Training SmartTest HLT560

Leak Detector
SmartTest
design and function
Pfeiffer Vacuum 2007
EPM, Wolfgang Flatau, 2007-08, Training SmartTest
page 1
Course objectives
The participant will be able to:

explain the design and the function
operate the unit
perform maintenance work
do troubleshooting
page 2
Definition LEAK"
A LEAK is an untight spot in a container or line,

through which gases, vapors, or even liquids flow
from an area where the pressure is higher to an area
where the pressure is lower.
page 3
Leak rate units
SI - Standard
mol/s (1mol = 6.025E23 particles)
Fluid technology
Nm/s, sccm, sccs
Vacuum technology =
mbar l/s, Pa m3/s, Torr l/s,

atm cc/s
Air conditioning
g/a, oz/y
Concentration
ppm (no leak rate unit)
page 4
Definition of the unit "mbar l/s"
The leak rate is 1 mbar l/s if in an evacuated container

with a volume of 1 Liter, the pressure rises by 1 mbar
per second , or if in a pressurized container with the
same volume, the pressure drops by 1 mbar per
second.
page 5
Example 1: Leak rate in mbar l/s

A bicycle tube may have a maximum pressure
loss of 1000 mbar in 175 days.
Volume
=
1.5 liters
175 days
=
1.5x107 seconds
Which is the maximum

admissible leak rate?
How do you test a bicycle
tube?
page 6
Example 1
Result:
QL=[(p2 - p1) * V] / t
Bubble test
mbar l 1000 1,5

4
QL =
=
=
1,0
10
mbar l / s
7
s
1,5 10
The leakrate should be not higher than 1x10-04 mbarl/s.
page 7
Example 2: Leak rate in mbar l/s

A bicycle tube is pumped up to 3.0 bar.
The default leak rate is taken from example
Volume
1year
Leak rate
1.5 liters
ca.
=
3.0 x 107 seconds

1,0 E-04 mbar l/s
What is the pressure in the bicycle tube after 1

year?
page 8
Example 2
Result
Leak rate * Time

ploss =
Volumen
1.0x104 *3.0x107
mbar*l * s
==
ploss =
1.5
s *l
3
ploss = 2.0x10 mbar
ptube = 1.0x10 mbar = 1.0bar
3
The pressure in the bicycle tube is 1 bar after 1

year?
page 9
Leak detection methods
Test object pressurized:

Pressure decay
Bubble test
He sniffing with SmartTest
page 10
Detection limits pressurized
Pressure decay
Bubble test
He sniffing with SmartTest
E1
E0
E-1
E-2
E-3
E-4
E-5
E-6
E-7
E-8
E-9
E-10
E-11
E-12
mbar l/s
page 11
Leak detection methods
Test object under vacuum:

Pressure increase
Gas type dependence ( Pirani gauge)
He leak test with SmartTest
page 12
Detection limits vacuum
Pressure increase
Gas
Gastype
typedependence
dependencePirani
Pirani
He leak test with SmartTest
E1
E0
E-1
E-2
E-3
E-4
E-5
E-6
E-7
E-8
E-9
E-10
E-11
E-12
mbar l/s
page 13
Sniffing methods
Local
Test gas
Test gas
Integral
page 14
Vacuum methods integral
Test object evacuated

Test chamber pressurized
Test gas
Test gas
Test object pressurized

Test chamber evacuated
page 15
Vacuum method local
Test gas
Test object evacuated
page 16
SmartTest HLT 5xx

Modular concept
Unit HLT 5xx

2
Cart to SmartTest
Backing pump
3
page 17
Type overview
SmartTest
HLT 550
without Backing pump
SmartTest
HLT 560
Rotary vane pump
UNO 5
SmartTest
HLT 565
Rotary vane pump
UNO 30 M
SmartTest
HLT 570
Diaphragm pump
SmartTest HLT 572
Dry pump XtraDry 150-2
SmartTest HLT 575
Dry pump TS 620
page 18
The leak detector SmartTest

1
1
Test port
Instrument operation
Inlet air filter
Connection for
external backing pump
4
3
page 19
Instrument operation
3
START / STOP button
ZERO button
Softkeys with
changeable meaning
Display
page 20
Disign
1
1
2
3
4
5
6
7
8
Test port
Pressure at Test port
Clibrated leak
Vent of sniff connection
Backing pump
Fore vacuum pressure
Turbo drag pump
Mass spectrometer
8
P2
2
3
V5
V4
V3
V6
V2
V1
5
P1
page 21
Mass spectrometer
1
2
3
4
5
6
7
8
9
10
11
Cathode 1
Anode
Cathode 2
Shielding
Extractor
Shielding
Magnetical field
Suppressor
Shielding
Faraday cup
Pre amplifier
11
10
9
5
M < 4
7
M = 4
M > 4
page 22
Principle of measurement
Magnet
Magnetic field
+
+
+
++
+
Gas inlet
Ionsource
Pre amplifier
page 23
START/STOP pressed
Pressure value P2
mbar
1000
15
P2
V5
V4
5
0,5
0
V3
V6
V2
V1
P1
page 24
Pump fore vacuum

P2 > 15 mbar
P2
V5
V4
V3
V6
V2
V1
P1
page 25
Measure Counter flow

P2 < 15 mbar
P2 > 5 mbar
P2
V5
V4
V3
V6
V2
V1
P1
page 26
Measure "Twin-Flow low"

P2 < 5 mbar
P2 > 0.5 mbar
P2
V5
V4
V3
V6
V2
V1
P1
page 27
Measure "Twin-Flow high"

P2 < 0,5 mbar
P2
V5
V4
V3
V6
V2
V1
P1
page 28
Sniffing Twin-Flow low
P2
V5
V4
V3
V6
V2
V1
P1
page 29
Calibration
P2
V5
V4
V3
V6
V2
V1
P1
page 30
Running Up
The run-up of the turbo pump is visualized in percentage via

bar graph.
Details
Menu with selected system data
Sprache, Language
Idioma
Direct link to the menu Language
Setup
Settings of the operating parameters
page 31
Details
For line pressure p1

Rotation speed
TMP current
Emission
Filament
Vent TMP
Present fore-vacuum pressure

Present rotation of the turbo pump
Present consumption of the turbo pump
On if the rotation >= 1450 Hz , p1 < 10 mbar
and the filament test was okay
Active filament 1 or 2
The filament and the turbo pump
will switch off automatically
The menu Vent TMP will displayed only if the menu

Maintenace enable at Yes.
page 32
Venting TMP (1)
The turbo pump is switch off and the leak detector is waiting
until the rotation speed of the turbo pump < 150 Hz.
Restart
Stops the automatic venting procedure of the turbo

pump and leads back to the run up mode of the unit.
page 33
Venting TMP (2)
The rotation speed of the turbo pump <150 Hz . Thereafter the

turbo pump will be vented for 10 s.
Restart

page 34
Venting TMP (3)
The turbo pump is vented and the leak detector can be switched off.
Vent TMP
Vents the turbo pump again
Restart

page 35
Ready to start
Setup main menu
Settings
Mode, Mass,
Last calibration
Filter
Background signal
Display
internal test leak
Direct link to the

menu Mode & Mass
Start the calibration
Start the regeration
page 36
Measured value display
Analog
and
digital
Change
display mode
Graphic
page 37
Activate Zero
Leak rate
50
Measured leak rate

ZERO
40
30
Displayed leak rate
20
10
t
0
t1
page 38
Zero at falling back ground

Leak rate
50
40
Measured leak rate
30
Subrtraction value
20
Displayed leak rate
10
t
0
t1
t2
page 39
Deactivate Zero
Leak rate
50
Displayed leak rate
40
Measured leak rate
30
20
ZERO
10
>3s
t
0
t3
page 40
Setup main menu
View
Display configuration
Access control
Set access control
Language
Selection the language
Info
Information
Calibration settings
Setting for the calibration
User settings
Configuration of the user parameters
Maintenance & Service
Menus Maintenance & Service
page 41
View
Contrast
Settings for display contrast
Units
Settings for leak rate and pressure
Time & Date
Setting for time and date
Display range
Configuration of the display range
Lower display limit
Setting for lower display limit
Background
at ready to start
Setting for Display background signal
page 42
Contrast
Setting contrast
range 0 99
Invert display
normal / invert display
page 43
Units
Unit Leak rate
mbar*l/s, Pa*m3/s, Torr*l/s

sccm, sccs, atm*cc/s,
ppm, g/a, oz/yr
(only selectable in Sniffing mode)
Unit Pressure
mbar, Pa, atm, Torr
page 44
Time & Date
Date
Setting of the actual date
Time
Setting of the actual time (24 hours format)
page 45
Display range
Scale
linear
logarithmic
29
Display linear
Display logarithmic
Number of decades in
log. Display
Range
automatic
manual
Automatic range selection

Manual range selection
Time axis
16960
Time axis, time in seconds
page 46
Lower display limit
Lower display limit
for unit mbar*l/s

1E-12 mbar*l/s
1E-11 mbar*l/s
1E-10 mbar*l/s
1E-09 mbar*l/s
This setting limits the display of the leak rate downwards in

the measuring mode. It is only effective for the vacuum mode.
page 47
Background at Ready to start
yes
Background displayed
at Ready to Start
no
Background not displayed

at Ready to Start
page 48
Access control
Maintenance enabled
Enables/disables the menu

Access to Cal function
Enables/disables the Calibration

at Ready to Start
Change device PIN
Input/change the device PIN
Change menu PIN
Input/change the menu PIN
page 49
Maintenance enable
Yes
Menu Maintenance & Service

is enabled
No
Menu Maintenance & Service

is disabled
page 50
Calibration enabled
Yes
Calibration at Ready to Start enabled
No
Calibration at Ready to Start disabled
page 51
Change device PIN
New PIN
0000 9999
New device PIN
New PIN (verify)
0000 9999
New device PIN

(repeat for confirmation)
page 52
Change menu PIN
New PIN
0000 9999
New menu PIN
New PIN (verify)
0000 9999
New menu PIN

(repeat for confirmation)
page 53
Language
The following languages are available for operation:

Language
Francais
Deutsch
Espanol
English
French
German
Spanish
English
Operating language
page 54
Information
Settings
Display menu parameters
System data
Display system data
Vacuum diagram
Display vacuum diagram
Error list
Display the last 12 errors
Calibration history
Display the last 12 calibrations
page 55
Settings
Display of the current parameter settings in 4 pages.
page 56
System data
Display of the system data/components in 4 pages.
page 57
Vacuum diagram
Vacuum diagram with the current states of valves, turbo pump

and emission.
Leak rate and pressure values P1, P2 are displayed.
page 58
Error list
List of the last 12 errors in following format:

Date / Time / Error no. / Remark
page 59
Calibration history
List of the last 12 Calibration in following format:

Date / Time / Location / Test gas / Calibration factors
page 60
Calibration settings
Unit
mbar*l/s
Pa*m3/s
Available units for external test leak
Torr*l/s
The unit for internal test leak is fixed to mbar*l/s.
Test leak rate
Leak rate value of the internal or external test leak

depending on the selected calibration mode
Calibration
mode
int. auto.
int. man.
extern
Internal automatic calibration

Intern manual calibration
External calibration
page 61
User Settings
Mode & Mass
Operation mode and detected mass
Filter & Zero
Filter and zero settings
Alarm
Alarm settings
Interfaces
Interface settings
Parameter save / load
Sets of parameter, factory settings
Monitoring functions
Diverse functions can be monitored
page 62
Mode & Mass
Mode
Vacuum
Sniff
Vacuum mode
Sniffing mode
Mass
He4, He3, H2
Test gas (Helium 4, Helium 3, Hydrogen)
Leak rate
factor
Gas
Air
User
Leak rate gas equivalent

Leak rate air equivalent
User defined factor
page 63
Filter & Zero
Filter
without
static
dynamic
No leak rate filter

Filter with fixed time constant
Filter with dynamic adaptation of time constant
Zero
with Start
2s5 min
enabled
disabled
constant
Zero is executed immediately after the

specified time.
Manual Zero released
Manual Zero locked
Manual Zero released and the zero value is retained
after pressing STOP. Automatic BG -tracing is locked.
On
Off
Internal background is subtracted at START

Internal background is not subtracted at START
MS-BG
subtraction
page 64
Alarm
Mode
prop. leak rate

trigger alarm
0 4.5 min
set point
0 4,5 min
pinpoint
Setpoint
Warn limit
1E-129,9E+2
1100 %
Acoustic signal proportional to the bar display

A multi-frequency signal is generated as soon
as the leak rate exceeds the setpoint value.
An alarm delay time can be entered.
A tone with the frequency proportional to the
leak rate is emitted as soon as the leak rate
exceeds the setpoint value.
An alarm delay time can be entered.
Acoustic signal proportional to the leak rate
between 0,1 and 10*setpoint value
Alarm setpoint value
Warning limit as percentage of setpoint value
page 65
Interfaces
Analog output
Compact gauge
Control location
Output of the analog signal

Compact gauge settings
Selection of the control location
Relay
Serial port
Bypass option
Relay settings
Selection of port and protocol
Bypass option settings
page 66
Analog output
Channel 1
Channel 2
Scale
off
Pressure p1
Pressure p2
LR mantissa
LR exponent
LR linear
LR log.
Pressure p(ext)
see channel 1
upper limit
1E-111E+06
V / decade 0.5,
1, 2, 2.5, 5, 10
Channel is off(0V)
Output pressure p1
Output pressure p2
Output leak rate mantissa, linear from 010 V
Output leak rate exponent as a step function
Output leak rate linear, linear from 010 V
Output leak rate logarithmic, upper limit 10V
Output external pressure
upper limit(=10V) for setting LR log
and LR linear
Volt per decade for setting LR log
page 67
Compact gauge
Full scale
(only for linear gauges)
Type
0.1, 1, 10,100, 1000, 2000, 5000,

10000, 50000 mbar
APR, CMR, PCR, PKR, TPR
Setpoint value
1E-109,9E+02
Setpoint value for relay output
Pressure p(ext)
Current pressure value p(ext)
Press.
P2 source
internal
external
Inlet pressure determined with

internal gauge
Inlet pressure determined with
external gauge
page 68
Control location
Local
Controlled by START, STOP and ZERO keys
Local and
RS232/RS485
Controlled by START, STOP and ZERO keys

and via RS232/RS485 interface
RS232/RS485
Controlled via RS232/RS485 interface
PLC
Controlled via digital input
ALL
Controlled by START, STOP and ZERO keys,

via digital input and via RS232/RS485 interface
page 69
Relay
Relay 1,2
Off
START
STOP
START/STOP
Ready
Setpoint
On
Relay is always dropped-out.

Relay is active when V2 is open.
Relay is active when V6 is open.
Relay is active when START is pressed and
is dropped-out when STOP is pressed.
Relay is active in measure.
Relay is active when leak rate exceeds setpoint.
Relay is always active.
Warning limit
Pressure setpoint
Relay is active when leak rate exceeds warn limit.

Relay is active when pressure exceeds setpoint.
page 70
Serial ports
Port
RS 232
RS 485
Control via RS 232

Control via RS 485
Protocol
Pfeiffer
HLT 2xx
Pfeiffer interface protocol

HLT 2xx interface protocol
(selected commands)
Diagnosis interface protocol
(only for internal use)
Binary
Address
1255
Bus-address of SmartTest
in Pfeifer protocol
page 71
Bypass option
Mode
No bypass
No bypass option selected
Quick pump
The optional Backing pump is ready

for the pumping down process without
being active in the measuring mode.
Partial flow
The optional Backing pump is ready

for the pumping down process and the
measuring mode.
Internal
on / off
evacuation
delay
Delay time for the activation of the internal

Backing pump is enabled / disabled.
page 72
Parameter save / load
Load PARA SET 1, 2
Load a saved parameter sets
Save as PARA SET 1, 2
The current parameter setting

can saved as PARA SET 1 or 2.
Load factory settings
Load the default parameter set
page 73
Load parameters
View
Parameter set
Displays values of parameter set

PARA SET 1,2 .(4 pages)
Load
Loads the parameter set PARA SET 1 or 2.
page 74
Save parameters
The current parameter setting will be saved after pressing

the button Save in PARA SET 1 or PARA SET 2.
page 75
Load factory settings
The factory settings will be loaded after pressing the button OK.
page 76
Monitoring functions
Flow
Contamination
protection
Settings for the flow control

(sniffing mode only)
Settings of the protection against
helium contamination
Min. Volume & Beep
Settings of minimal volume and beep
Valves
Settings valve V1, V3 and V4
Evacuation time
& Vent
Calibration request
Settings for evacuation time and vent mode

Enables and disables request for a calibration
page 77
Flow
Flow min
140 sccm
Flow too low appears when the current

value falls below this threshold
Flow max
1050 sccm
Flow too high appears when the current

value exceeds t this threshold
Current flow
Current flow of the sniffer line (measure mode)
These settings only take place in sniffing mode.
page 78
Contamination protection
Protection
On
Off
Limit
1E-091E+3
mbar*l/s
When the leak rate exceeds this threshold

the unit changes from Measure mode to
Ready to Start.
Contamination protection is switched off.
Threshold value for the contamination
protection function
Contamination protection will be activated not before alarm

delay time is finished!
page 79
Minimum volume & beep
Minimum Volume
Beep sound
On
Off
015
This is the minimum available

value for the volume
An acoustic signal marks the change

in a status.
No acoustic signal marks the change
in a status.
page 80
Valves
Twin-Flow high
Twin-Flow low
Counterflow
enable
disable
0,01 0,5
mbar
enable
disable
0,1 5 mbar
enable
disable
0,1 25 mbar
Valve V4 opens
Valve V4 always closed
Threshold value when
V4 opens
Valve V3 opens
V3 opens
Valve V1 opens
V1 opens
page 81
Evacuation time & vent
Maximum
evacuation time
1 s30min
infinitely
Vent
with Stop
Regeneration
This is the threshold for maximum

pump down time before this process
will stopped.
Inlet is vented automatically after Stop.
manual
Inlet can be vented in Ready to Start

by pressing the Vent softkey.
no
Venting of the inlet is locked.
Start-Stop-cycles with short range intended for

the reduction of a raised helium background.
page 82
Regeneration
Automated Start-Stop-cycle with short range intended

for the reduction of a raised helium background.
An active Regeneration will be announced in the display
and stops after 60 minutes automatically.
This function can be deactivate in general with the STOP
key or with STOP in the setting Venting with STOP menu.
The Regeneration can only be successful activated
in the setting Venting with STOP menu!
page 83
Calibration request
Yes
The request for calibration comes up:

- 30 min after switching HLT On
- temperature of HLT has changed
more than 5C
No
The request for calibration does not come up.
page 84
Burn- in
Automatic start-stop cycle
Maintenance intervals
components
Displays the current operating hours

of the components fore pump,
turbo pump and ion source
View Maintenance
intervals list
List of maintenance intervals
Service
Access to menu Service
The maintenance menu can only be chosen when the maintenance

is enabled under Setup / Access control / Maintenance enabled.
page 85
Burn-In
Start without
Calibration

without calibration
Start with
Calibration

with calibration
You can see in the display when the BurnIn is activated.

The Burn-In can be deactivated with the STOP key.
page 86
Burn-In activ
Run time
Time in minutes since activating

the Burn-In function
Cal factor min.

Cal factor max.
Calibration factor low

Calibration factor high
Anode pot. min.

Anode pot. max.
Anode potential low

Anode potential high
Stop
Deactivate the Burn-In
This menu is available when the Burn-In is active.

(Setup / Maintenance & Service / Burn-In)
page 87
Maintenance intervals components
Fore pump
Displays the current operating hours of fore pump
TMP
Displays the current operating hours of turbo pump
Ion source
Displays the current operating hours of ion source
After the maintenance work each counter of the appropriate

component can be reset.
The activation of the Save button leads to a new data set
in the list of maintenance intervals.
page 88
Maintenance interval list
List of the last 12 Maintenance in following format:

Date / Time / Component / Operating hours
page 89
Service
The service menu is available after entering the Service-PIN.

This menu offers more information an settings for the service
engineers.
page 90

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Leak Detector

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

The participant will be able to:

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

A LEAK is an untight spot in a container or line,

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Leak rate units

mol/s (1mol = 6.025E23 particles)

Nm/s, sccm, sccs

mbar l/s, Pa m3/s, Torr l/s,

ppm (no leak rate unit)

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Definition of the unit "mbar l/s"

The leak rate is 1 mbar l/s if in an evacuated container

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Example 1: Leak rate in mbar l/s

Which is the maximum

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

mbar l 1000 1,5

The leakrate should be not higher than 1x10-04 mbarl/s.

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Example 2: Leak rate in mbar l/s

3.0 x 107 seconds

What is the pressure in the bicycle tube after 1

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Leak rate * Time

The pressure in the bicycle tube is 1 bar after 1

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Leak detection methods

Test object pressurized:

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Detection limits pressurized

He sniffing with SmartTest

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Leak detection methods

Test object under vacuum:

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Detection limits vacuum

He leak test with SmartTest

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Vacuum methods integral

Pfeiffer Vacuum 2007

Test object evacuated

Test object pressurized

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

Vacuum method local

Test object evacuated

Pfeiffer Vacuum 2007

EPM, Wolfgang Flatau, 2007-08, Training SmartTest

SmartTest HLT 5xx

Unit HLT 5xx