Proceedings of the

15th IFAC Symposium on System Identification

Saint-Malo, France, July 6-8, 2009

Adaptive Control for Piezo-Actuated Nano-Positioner

Xinkai Chen
Department of Electronic & Information Systems, Shibaura Institute of Technology,
307 Fukasaku, Minuma-ku, Saitama-shi, Saitama 337-8570, Japan
(Tel: 81-48-786-5805; e-mail: chen@shibaura-it.ac.jp).
Abstract: The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a
positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction
behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This
paper discusses the adaptive sliding mode control for the piezo-actuated nano-positioner, where the
hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the
adaptive control techniques, where the real value of the parameters of the stage need neither to be
identified nor to be measured. The proposed control law ensures the global stability of the controlled nanopositioner, and the position error can be controlled to be as small as required by choosing the design
parameters. Experimental results show the effectiveness of the proposed method.
1. INTRODUCTION
Piezo-actuated nano-positioner has many effective
applications in ultra-high precision positioning, such as
scanning probe microscopy, optical alignments, diamond
turning machines, active vibration control, bio-operation
devices (Bashash and Jalili, 2007; Croft, et al, 2001; Fleming
and Moheimani, 2007; Hwang, 2008; Leang and Devasia,
2007; Moheimani, et al, 2001, 2005, 2007; Parlangeli and
Corradini, 2005; Shieh and Hsu, 2007; Wu and Zou, 2007).
The piezo electric actuator is used to meet the requirement of
nanometer resolution in displacement, high stiffness and
rapid response. However, the main disadvantage is the
hysteresis phenomenon between the applied electric strength
and the displacement. Due to the undifferentiable and
nonmemoryless character of the hysteresis, it causes position
errors which limit the operating speed and precision of the
PEA. The development of control techniques to mitigate the
effects of hysteresis has been studied for decades and has
recently re-attracted significant attention, e.g. Moheimani et
al (2001, 2007) and the references therein. Interest in
studying dynamic systems with actuator hysteresis is
motivated by the fact that they are nonlinear system with
nonsmooth nonlinearities for which traditional control
methods are insufficient and thus require development of
alternate effective approaches (Abidi and Sabanovic, 2007).
Development of a control frame for the piezo-actuated nanopositioner is quite a challenging task.
Upon the developments in various hysteresis models, it is by
nature to seek means to fuse these hysteresis models with the
available control techniques to mitigate the effects of
hysteresis, especially when the hysteresis is unknown, which
is a typical case in many practical applications. However, the
results on the fusion of the available hysteresis models with
the available control techniques is surprisingly spare in the
literature (Su, et al, 2005; Tao and Kokotovic, 1995; Tan and
Baras, 2004; Zhou, et al, 2004). The most common approach

978-3-902661-47-0/09/$20.00 2009 IFAC

in coping with hysteresis in the literature is to construct an

inverse operator, which is pioneered by Tao and Kokotovic
[26], and the reader may refer to, for instance, Krejci and
Kuhnen (2001) and Tan and Baras (2004) and the references
therein. Essentially, the inversion problem depends on the
phenomenological modeling methods (for example, using
Preisach models). Due to multi-valued and non-smooth
features of hysteresis, the inversion always generates certain
errors and possesses strong sensitivity to the model
parameters. These errors directly make the stability analysis
of the closed-loop system very difficult except for certain
special cases.
This paper proposes a new approach for fusion of the
adaptive control techniques with the Prandtl-Ishlinskii (PI)
hysteresis model for the piezo-actuated stage. The advantage
is that only the parameters in the formulation of the controller
need to be adaptively estimated, and the real value of the
parameters of the stage need to be neither identified nor
measured. The proposed control law ensures the global
stability of the adaptive system, and the position error of the
stage can be controlled as small as required by choosing the
design parameters. Experimental results confirm the
effectiveness of the proposed method.
2. PROBLEM STATEMENT
2.1 System Description
In this section, the model of the piezo-actuated positioner will
be derived. The stage is composed of a positioning
mechanism (PM) and the piezo electric actuator (PEA). The
positioning mechanism can be modeled as a mass-springdamper mechanic system. The PEA can be regarded as a
force generator which generates force due to the applied
voltage. The dynamic equation of the piezo-actuated
positioner can be formulated as follows
m&y&(t ) + b1 y& (t ) + b2 y (t ) = w(t ) ,
(1)

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10.3182/20090706-3-FR-2004.0366

15th IFAC SYSID (SYSID 2009)

Saint-Malo, France, July 6-8, 2009

where y (t ) represents the displacement of the stage, w(k ) is

the force generated by the PEA with hysteresis; m is the mass
of the stage, b1 is the viscous friction coefficient of the PM
and b2 is stiffness factor. In the following, we consider the
discrete-time expression of system (1) which can be given by
A(q 1 ) y (k ) = q 2 b0 w(k ) ,
(2)
where q 1 is the delay operator, A(q 1 ) is a polynomial
defined by
A(q 1 ) = 1 + a1 q 1 + a 2 q 2 .
(3)
The parameters a1 , a 2 and b0 are unknown. However, it is
known that b0 > 0 . Let v(k ) be the voltage applied to the
actuator, and express the relation between v(k ) and w(k ) as
w(k ) = H [v](k ) ,
(4)
where H [v] is the hysteresis operator which will be given
later. The control purpose is to drive the output y(k) to track
a uniformly bounded signal y d (k ) for the system (2)
together with (4).

v(k ) and w(k ) given by model (9) with p(r ) = e 0.067 ( r 1) ,

7
sin(0.03k ) ( k = 0,1, L , 628 ), and
R = 20 , v(k ) =
1 + 0.01k
w1 = 0 . Figure 2 shows the experimental relation between
the input voltage and the displacement for the PEA (PFT1110, Nihon Ceratec Corp.), where the input voltage is
2k
1
) ).
cos(
described by (which is v(k ) = 40 40
100
1 + 0.004k
The relation between the input voltage and the output force is
similar to that shown in Figure 2. It can be seen that the PI
model (9) indeed generates the hysteresis curves and can be
considered to be well-suited to describe the hysteretic
behavior in PEA.

2.2 Hysteresis Model

In this paper, we adopt the Prandtl-Ishlinskii (PI) model in
discrete time. The hysteresis is denoted by the operator
w(k ) = H [v](k ) , where v(k ) is the input (voltage), w(k ) is
the output (generated force) of the PEA. The basic element of
the PI operator is the so-called stop operator (k ) = E r [v](k )
with threshold r. For arbitrary piece-wise monotone function
v(k ) , define er : R R as
e r (v ) = min(r , max(r , v)) .
(5)
For any initial value w1 R and r 0 , the stop operator
E r [ ; w1 ](k ) is defined as
E r [v; w1 ](0) = er (v(0) w1 ) ,
(6)
E r [v; w1 ](k ) = er (v(k ) v(k i ) + E r [v; w1 ](k i )) , (7)
for k i < k k i +1 , where the function v(k ) is monotone for
k i k k i +1 . The stop operator is mainly characterized by
the threshold parameter r 0 which determines the height of
the hysteresis region in the (v, w) plane. For simplicity,
denote E r [v; w1 ](k ) by E r [v](k ) in the following of this
paper. It should be noted that the stop operator E r [v](k ) is
rate-independent. The PI hysteresis model is defined by

w(k ) = p(r ) E r [v](k )dr ,

0

(8)

where p(r ) is the density function which is usually unknown,

satisfying p ( r ) 0 with

rp(r )dr < (Su et al, 2005).

Since the density function p(r ) vanishes for large values of

r , it is reasonable to assume that there exists a constant R
such that p(r ) =0 for r > R . Thus, model (8) gives
R

w(k ) = p(r ) E r [v](k )dr .

0

(9)

For the piezo electric actuator, the constant R depends the

saturation input voltage. Figure 1 shows the relation between

Fig. 1 Hysteresis curves given by model (9).

Fig. 2 The relation between the input voltage and the

displacement of PEA.
3. ADAPTIVE CONTROL DESIGN
3.1 Some Preliminaries
To begin with, define the variable
s (k + 2) = C (q 1 )( y (k + 2) y d (k + 2) ) ,

(10)

where C (q 1 ) is a Schur polynomial defined by

C (q 1 ) = 1 + c1 q 1 + c 2 q 2 .
Let the sliding surface be defined as
s ( k + 2) = 0 .
Clearly, lim s (k ) = 0 implies lim ( y ( k ) y d ( k ) ) = 0 .
k

(12)

Now, consider the polynomial equation

C (q 1 ) = A(q 1 ) N (q 1 ) + q 2 F (q 1 ) ,
1

(11)

(13)

where N (q ) and F (q ) are in the following form

1745

N (q 1 ) = n 0 + n1 q 1 ,

(14)

15th IFAC SYSID (SYSID 2009)

Saint-Malo, France, July 6-8, 2009

F (q 1 ) = f 0 + f1 q 1 .

(15)

Thus, the parameters in N (q ) and F (q ) can be

determined uniquely and n 0 = 1 . Finally, for simplicity,
define
G(q1) = b0 N (q1 ) = g0 + g1q1 .
(16)
3.2 Adaptive Algorithm
Since the parameters a1 , a 2 and b0 are unknown, the
parameters in G (q 1 ) and F (q 1 ) can not be obtained.
Multiplying (13) with y(k) and employing (2) gives
C (q 1 ) y(k + 2) = G (q 1 ) w(k ) + F (q 1 ) y (k ) . (17)
where w(k ) is the force generated by the PEA. Substituting
the PI model (9) into (17) yields
C (q 1 ) y(k + 2) = f 0 y (k ) + f 1 y (k 1)
R

p i (r , k ) = p i (r , k 1) +

p i (r , 0) 0 and

s ( k ) = C ( q ) y (k ) = s ( k ) + C ( q ) y d (k ) ,

(P2).

(k ) = [ y (k ), y(k 1)] ,

(20)

= [ f 0 , f1 ] .
T

(21)

e 2 ( k + 2)

1 + D(k )

<

k =1

(P3). For any positive finite integer ,

(k ) (k ) < ,

2
k =

0 ( p i (r, k ) p i (r, k )) dr <

k =

(19)

0 rp i (r, 0)dr < .

Lemma 1. For the adaptation algorithm in (26)-(29), the

following properties hold.
R
2
p (r , k ) ) dr are bounded for all k > 0 .
(P1). (k ) and ( ~

Define
1

(27)

p (r , k ) if p 0 (r , k ) 0
,
(28)
p 0 (r , k ) = 0
otherwise
0
p 1 (r , k ) = p 1 (r , k ) .
(29)
The initial condition p i (r ,0) should be chosen such that

+ g 0 p(r ) E r [v](k )dr + g1 p(r ) E r [v](k 1)dr (18)

1

e(k ) E r [v](k 2 i )
,
1 + D ( k 2)

3.3 The Adaptive Control

(22)

In this section, the control input is determined so that the

sliding mode exists along the sliding surface s (k ) = 0 .
Define
R
W (k ) = T (k )(k ) p (r , k ) E [v](k 1)dr

Since the density function p(r ) does not depend on time, we

can thus treat this function as a parameter. In the following,
we will try to estimate the unknown parameters f i (i = 0, 1)
and the unknown functions g i p(r ) (i = 0, 1) . Let

+ C (q ) y d (k + 2) + s (k ) ,
(30)
where is the weighting factor in the range of 0 < < 1 . It
is obvious that W (k ) is an available signal. If the input v(k )
can be chosen such that

Then, (18) can be rewritten as

R

s (k + 2) = T (k ) + g 0 p(r ) E r [v](k )dr

0

+ g1 p(r ) E r [v](k 1)dr

0

T
(k ) = f0 (k ), f1 (k )

(23)
denote the estimate of the unknown parameter and let
p i (r , k ) be the estimate of g i p(r ) for a fixed r at the k -th
step. By replacing the parameters and g i p(r ) in the right
hand side of (22) with their corresponding estimates, then
1

i =0

p i (r , k 1) E r [v](k 2 i )dr . (24)

i =0

For simplicity, define

1

D(k 2) = T (k 2) (k 2) + (E r [v](k 2 i)) dr (25)

i =0

The estimates (k ) and p i (r , k ) are updated by the

following adaptation laws with constraints
e(k ) (k 2)
(k ) = (k 1) +
,
(26)
1 + D(k 2)

p 0 (r , k ) Er [v](k )dr = W (k ) ,

(31)
(32)

+ ( p 0 (r , k + 1) p 0 (r , k ) )E r [v](k )dr
R

be regarded as the estimate of the available signal s (k ) .

Define the estimation error as
e(k ) = s (k ) T (k 2)(k 1)

then, from (24), it yields

s ( k + 2) = s (k ) + e(k + 2) + (k )
where (19) and (30) are used, and (k ) is defined by
(k ) = T (k ) (k + 1) (k )

R
(k 2)(k 1) + p i (r , k 1) E r [v](k 2 i)dr may
T

+ ( p 1 (r , k + 1) p 1 (r , k ) )E r [v](k 1)dr . (33)

R

Furthermore, if it can be assured that lim e(k ) = 0 and

k

lim (k ) = 0 , then (32) guarantees that a sliding mode exists

along the sliding surface s (k ) = 0 . However, since the v(k )

satisfying equation (31) is impossible to be calculated, we
consider a weakened version of equation (31). In the
following, for an assigned admissible error , we try to
derive a signal V * (k ) satisfying
R

p 0 (r , k ) E r [V * ](k )dr W (k ) .

(34)

Let [v min , v max ] be the practical input range to the hysteresis

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15th IFAC SYSID (SYSID 2009)

Saint-Malo, France, July 6-8, 2009

operator, which is a strict subset of [ R, R ] . Suppose the

R

output of

p 0 (r , k ) E r [v](k )dr for v min v v max is in the

range W sat ( k ), W sat ( k ) . Suppose W (k ) is monotone on

each of the period k i < k k i +1 , i = 0, 1, 2, K . Then, V * (k )
should also be monotone on each of the period k i < k k i +1 ,
i = 0, 1, 2, K . Without loss of generality, suppose W (k ) is
increasing on the period k i < k k i +1 .

From (34)-(36), it is obvious that

(k ) .
From (30) and (36), it yields
R
T (k )(k ) + p 0 (r , k ) E r [v](k )dr
0

+ p 1 (r , k ) E r [v](k 1)dr
0

= C (q 1 ) y d (k + 2) + s(k ) + (k ) .
By (24) and (38), we have

If W ( k ) > W sat ( k ) , V * (k ) = v max ;

Otherwise, V * (k ) should be derived as follows.
Define r = R , where L is a positive integer. The algorithm
L
of determining V * (k ) is as follows.
Step 1: V ( 0) (k ) := V * (k 1) , l := 0 .
R

p 0 (r , k ) E r [V (l ) ](k )dr .

Else if x (k ) < W (k ) , let V

l := l + 1 , then go to Step 2.

( l +1)

(k ) := V

Else (i.e. x (l ) (k ) > W (k ) + ), let V

(l )

(l )

(k ) + r and

(k ) := V (l 1) (k ) and

V (l ) (k ) := V (l ) (k ) , then go to Step 3.
Step 3: x (k ) :=

(l )
p 0 (r , k ) E r [V ](k )dr ,

x ( l ) (k ) :=

p 0 (r , k ) E r [V (l ) ](k )dr ,

(l )

V (l +1) (k ) := V

(l )

+ r

(l )

x (k ) x (k )

Let l := l + 1 and x (k ) :=
(l )

and the roots of C (q 1 ) .

If x (k ) W (k ) , go to Step 4;
(l )

(k ) := V (l ) (k ) and

V (l ) (k ) := V (l 1) (k ) , then go to Step 3;
Else (i.e. x (l ) (k ) > W (k ) + ), let V

(k ) := V

(l )

(l )

(k ) := V

( l 1)

(k ) and

(k ) , then go to Step 3.

Step 4: V (k ) := V (l ) (k ) and stop.

*

Remark 1: V * (k ) can be found by finite steps of operations,

i.e. l is finite when the operation is stopped.
In this paper, the adaptive control input (i.e. the applied
voltage) is considered as
v(k ) = V * ( k ) .
(35)
3.4 Stability Analysis
In the following, suppose W sat (k ) W (k ) W sat (k ) . Let
R

(k ) = p 0 (r , k ) E r [v](k )dr W (k ) .
0

(42)

Remark 2: The output tracking error can be controlled to be

as small as possible by choosing the design parameters ,

p 0 (r , k ) E r [V (l ) ](k )dr .

Else if x (l ) (k ) < W (k ) , let V

0
= C (q 1 ) y d (k + 2) + s (k ) + e(k + 2) + (k ) + (k ) (41)
1
The closed-loop system equation (41) will be employed to
analyze the stability of the system (2) together with (4)
controlled by the derived input (35).
Theorem 1. Consider the system (2) together with (4)
controlled
by
the
derived
input
(35).
If
W sat (k ) W (k ) W sat (k ) , then all the signals in the loop
remain bounded and lim e(k ) = 0 . Furthermore, there exists
k

(l )

(l )

= C (q 1 ) y d (k + 2) + s(k ) + e(k + 2) + (k ) + (k ) . (39)

By substituting (39) into (22) and using (19), the dynamics of
s ( k + 2) gives
s ( k + 2) = s (k ) + e(k + 2) + (k ) + (k ) . (40)
The closed-loop system equation can be obtained by
combining (1) and (39)
A(q 1 ) q 2 b0 y (k )

1
1
F (q ) G(q ) w(k )

a constant > 0 such that

lim y (k ) y d (k ) .

(l )

W (k ) x (k )
(l )

If x (l ) (k ) W ( k ) , go to Step 4;
(l )

(38)

T (k ) + g 0 p(r ) E r [v](k )dr + g1 p(r ) E r [v](k 1)dr

If W (k ) < W sat (k ) , V * (k ) = v min ;

Step 2: x (l ) (k ) :=

(37)

(36)

4. EXPERIMENTAL RESULTS
The scheme of the peizo-actuated nano-positioner used for
experiment stage is shown in Figure 3. The piezo electric
actuator used in the experiment is PFT-1110 (Nihon Ceratec
Corp.). The maximum force generated by it is not less than
80kgf. The maximum displacement is not smaller than 83m .
The applied voltage range is -10V~150V. The non-contact
capacitive displacement (NCCD) sensor (PS-1A, Nanotex
Corp.) with 2nm resolution is used to measure the
displacement of the stage. Since the adaptive method is used
in this paper, the real values of the parameters a1 , a 2 and b0
and the density function p(r ) are needed neither to be
measured nor to be identified. The experiments are conducted
for y d (k ) = 5m (it is noted as y d 1 (k ) in the following) and
2k
y d (k ) = 5.2 5 cos
(it is noted as y d 2 (k ) in the
250
following). The sampling period is chosen as 0.004 second.
The design parameters are shown in Table 1. The offset of
the driver is set to 30V. Since the piezo driver can enlarge the

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15th IFAC SYSID (SYSID 2009)

Saint-Malo, France, July 6-8, 2009

inputted signal 20 times, the value of R is chosen as R = 10 ,

v min is set as v min = 0.5 , v max is set as v max = 7.5 . (0) is
set to (0) = [0, 0]T . The initial condition (0) is set to

(0) = [0.3, 0.3]T . The initial conditions of p 0 (r ,0) and

p 1 (r ,0) are all set to 0.3. The initial value of w1 is simply
assumed as 0. Figure 4 shows the estimated parameter
T
(k ) = f (k ), f (k ) for y (k ) . Figure 5 shows the

only needed to estimate p i (r , k ) ( i = 0, 1 ) for

r = 0.00, 0.01, 0.02, L , 9.99, 10.00 in the experimental
process. In the experiment, the Step 3 in the algorithm of
deriving V * (k ) only needs to be run for at most one time. It
should be noted that the condition W sat (k ) W (k ) W sat (k )
in Theorem 1 is satisfied for all k.

d1

estimates of p 0 ( r , k ) and p 1 (r , k ) with r = 0.2 for y d 1 (k ) .

The estimates of p 0 ( r , k ) and p 1 (r , k ) for different r are
similar to those shown in Figure 5. Figure 6 shows the
control input for y d 1 (k ) . Figure 7 shows the displacement
error for y d 1 (k ) , where the maximum error in the steady
state is about 0.02 m . Figure 8 shows the estimated

parameter (k ) = f0 (k ), f1 (k ) for y d 2 (k ) . Figure 9 shows

the estimates of p 0 ( r , k ) and p 1 (r , k ) with r = 0.2 for
y d 2 (k ) . The estimates of p 0 ( r , k ) and p 1 (r , k ) for
different r are similar to those shown in Figure 9. Figure 10
shows the control input for y d 2 (k ) . Figure 11 shows the
displacement error for y d 2 (k ) , where the maximum error in
the steady state is about 0.10m .

T
Fig. 4 The estimate (k ) = f0 (k ), f1 (k ) for y d 1 (k ) .

Fig. 5 The estimates of p 0 ( r , k ) and p 1 (r , k ) with r = 0.2

for y d 1 (k ) .

Fig. 3 The experimental setup.

Table 1 The control parameter values

c1

Values for
y d 1 (k )
1

Values for
y d 2 (k )
1

c2

0.25

0.25

0.8

0.2

0.1

0.1

10 4
10

10 4
10

10 3

10 3

Parameters

Fig. 6 The control input for y d 1 (k ) .

5. CONCLUSIONS

It can be seen that very good results are obtained after 20

seconds (i.e. 5000 steps). As it is stated in Remark 5, it is

This paper has discussed the adaptive sliding mode control

for the piezo-actuated stage. The hysteresis existed in the
piezo electric actuator is described by Prandtl-Ishlinskii
model. The main contribution is the fusion of the hysteresis
model with the available adaptive control technique, where
the parameters of the stage need not to be identified or
measured. Only the parameters directly needed in the
formulation of the sliding mode controller are adaptively
estimated online. The proposed control law ensures the

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15th IFAC SYSID (SYSID 2009)

Saint-Malo, France, July 6-8, 2009

global stability of the controlled piezo-actuated stage, and the

position error can be controlled to be as small as required by
choosing the design parameters. Experimental results are
presented to show the effectiveness of the proposed method.
Relatively satisfactory results are obtained.

Fig. 11 The output tracking error for y d 2 (k ) .

REFERENCES

Fig. 7 The output tracking error for y d 1 (k ) .

T
Fig. 8 The estimate (k ) = f0 (k ), f1 (k ) for y d 2 (k ) .

Fig. 9 The estimates of p 0 ( r , k ) and p 1 (r , k ) with r = 0.2

for y d 2 (k ) .

Bashash, S. and Jalili, N. Robust Multiple Frequency Trajectory Tracking

Control of Piezoelectrically Driven Micro/Nanopositioning Systems,
IEEE Trans. on Control Systems Technology, vol. 15, no. 5, pp. 867878,
2007.
Croft, D., Shed, G. and Devasia, S. Creep, hysteresis, and vibration
compensation for piezoactuators: atomic force microscopy application.
ASME Journal of Dynamic Systems, Measurement, and Control, vol. 123,
pp. 35-43, 2001.
Fleming, A.J. and Moheimani, S.O.R. Sensorless vibration suppression and
scan compensation for piezoelectric tube nanopositioners, IEEE Trans.
on Control Systems Technology, vol. 14, no.1, pp. 33-44, 2007.
Hwang, C.-L. Microprocessor-Based Fuzzy Decentralized Control of 2-D
Piezo-Driven Systems, IEEE Trans. on Industrial Electronics, vol. 55, no.
3, pp. 1411-1420, 2008.
Krejci, P. and Kuhnen, K. Inverse control of systems with hysteresis and
creap, Proc. Inst. Elect. Eng. Control Theory Appl., vol. 148, pp. 185-192,
2001.
Leang, K.K. and Devasia, S. Feedback-Linearized Inverse Feedforward for
Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators,
IEEE Trans. on Control Systems Technology, vol. 15, no.5, pp. 927 - 935,
2007.
Moheimani, S.O.R. and Goodwin, G.C. Guest editorial introduction to the
special issue on dynamics and control of smart structures. IEEE Trans.
on Control Systems Technology, vol. 9, pp. 3-4, 2001.
Moheimani, S.O.R., Devasia, S. and Eleftheriou, E. Introduction to the
special issue on dynamics and control of micro- and nanoscale systems,
IEEE Transactions on Control Systems Technology, vol. 15, no. 5, pp.
799-801, 2007.
Moheimani, S.O.R. and Vautier, B.J.G. Resonant control of structural
vibration using charge-driven piezoelectric actuators, IEEE Transactions
on Control Systems Technology, vol. 13, no. 6, pp. 1021-1035, 2005.
Parlangeli, G. and Corradini, M.L. Output zeroing of MIMO plants in the
presence of actuator and sensor uncertain hysteresis nonlinearities, IEEE
Transactions on Automatic Control, vol. 50, no. 9, pp. 1403 1407, 2005.
Shieh; H.-J., Hsu, C.-H. An Integrator-Backstepping-Based Dynamic
Surface Control Method for a Two-Axis Piezoelectric Micropositioning
Stage, IEEE Trans. on Control Systems Technology, vol. 15, no.5, pp.
916926, 2007.
Su, C.Y., Wang, Q., Chen, X. and Rakheja, S. Adaptive variable structure
control of a class of nonlinear systems with unknown Prandtl-Ishlinskii
hysteresis. IEEE Transactions on Automatic Control, vol. 50, no. 12, pp.
2069-2074, 2005.
Tao, G. and Kokotovic, P.V. Adaptive control of plants with unknown
hysteresis. IEEE Trans. Automatic Control, vol. 40, pp. 200-212, 1995.
Tan, X. and Baras, J.S. Modeling and control of hysteresis in
magnetostrictive actuators. Automatica, vol. 40, no. 9, pp. 1469-1480,
2004.
Wu; Y., Zou, Q. Iterative Control Approach to Compensate for Both the
Hysteresis and the Dynamics Effects of Piezo Actuators, IEEE Trans. on
Control Systems Technology, vol. 15, no.5, pp. 936-944, 2007.
Zhou, J., Wen, C. and Zhang, Y. Adaptive backstepping control of a class of
uncertain nonlinear systems with unknown backlash-like hysteresis,
IEEE Transactions on Automatic Control, vol. 49, no. 10, pp. 1751-1757,
2004.

Fig. 10 The control input for y d 2 (k ) .

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