Professional Documents
Culture Documents
Xuejun Fan
Department of Mechanical Engineering
Lamar University
Beaumont, TX 77710
E-mail: xuejun.fan@lamar.edu
EM
Introduction
Name
Organization
Responsibility
Expectations
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Reminder
Request
Please keep pagers / phones turned off
No email / web surfing
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Acknowledgement
Institute of
Microelectronics
T.Y. Tee
T.B. Lim
Philips
G.Q. Zhang
W.D. van Driel
Intel
Yi He
Steve Cho
Daniel Shi
Bin Xie
Hyunchul Kim
Lay Foong Siah
Alan Lucero
Shubhada Sahasrabudhe
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Outline
Introduction
Moisture absorption, desorption, and diffusion
Vapor pressure model
C
Case
study
t d I underfill
d fill selection
l ti ffor FC BGA packages
k
Case study II delamination/cracking in stacked-die
chip scale packages
Accelerated moisture sensitivity test
Effect of moisture on material properties
Hygroscopic swelling
Electrochemical metal migration
Summary
References
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Introduction
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Leadframe based
Xuejun Fan
Moisture-Related Reliability
higher performance
smaller size
cheaper price
xuejun.fan@lamar.edu
Electronic Packaging
Surface Mounting
Packaging
level
Wafer
level
Board
level
Moisture-Related Reliability
xuejun.fan@lamar.edu
Coefficient of thermal
expansion (CTE):
ppm/C
Al Heat Sink: 24
Silicon Chip: 3
U d fill 20-30
Underfill:
20 30
Substrate: 20
Solder:
23
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Failures by Thermal-Stresses
10
10
Wire bond damage
Interface delamination
substrate
Die crack
Substrate cracking
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Individual component
11
shipment
storage
Moisture-Related Reliability
xuejun.fan@lamar.edu
12
St
Stage
4:
4 P
Package
k
cracking
ki and
d vapor release
l
St
Stage
3
3: D
Delamination
l i ti propagation
ti
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
13
Solder
cracks
Die
Adhesion degradation
Underfill
Solder
Hygro-swelling
H
lli
induces
i d
solder cracking
underfill delamination
BLM, ILD delamination
Substrate
Moisture-Related Reliability
xuejun.fan@lamar.edu
14
Conditions
Moisture absorption/condensation
Voltage
dendrites
Contamination
3 Basic Steps
CAF
SR
-
e
Ref:
f Katayanagi et al. ESPEC
S C Japan Tech-info
f Field Report #5,
# 1996
Moisture-Related Reliability
xuejun.fan@lamar.edu
15
IPC/JEDEC J-STD-020C
MOISTURE SATURATION LEVELS PER IPC/JEDEC J-STD-020A (4/99)
MSL 3
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
16
IPC/JEDEC J-STD-020C
Soldering reflow traditionally @ 220C degrees, now moving to 260C (for
no-lead solders).
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
17
surface mount
Moisture
generates high vapor pressure
can degrade adhesion strength
induces stresses due to hygroscopic swelling
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
18
Biased HAST
Unbiased HAST
HAST
Autoclave (Steam) 121C/100%RH
Relative
Humidity
(%RH)
Static
/Dynamic
Bias (V)
THB
85 / 60
0.1 to 7
85
HAST
Xuejun Fan
55
85 / 60
30
85 / 60
156
85 / 60 / 50
130
85 /60 / 50
120
85 /60 / 50
110
85 /60
Moisture-Related Reliability
xuejun.fan@lamar.edu
19
MECHANISM
DESCRIPTION
DRIVING
FORCES
RELIABILITY
STRESS
M+ Migration
Temperature
Humidity
Voltage
Biased HAST
Interfacial
delamination
Temperature
Humidity
HAST / Bi HAST
/Precon
Intermetallic
IMC formation
Temperature
Bake
Kirkendall
voiding
Temperature
Bake
Manufacturing
Electromigration
voiding
Temperature
Current
Mech. Stress
Electromigration
Thermal material
degradation
Temperature
Mech. Stress
Bake
Dielectric
cracking
Humidity
Temperature
HAST
Steam/TH/Precon
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
20
Summary
3 failure mechanisms due to moisture
Popcorn at soldering reflow (vapor pressure, adhesion reduction)
Delamination under HAST (hygroscopic swelling, adhesion
reduction moisture aging)
reduction,
Metal migration under BiHAST (e.g. dendritic growth. Moisture,
voltage, contamination)
3 reliability tests
Moisture sensitivity test (MSL 1, MSL 2, MSL 3 )
MSL 3 - 30C/60%RH for 192 hours
HAST/TH
BiHAST/BiTH
Moisture-Related Reliability
xuejun.fan@lamar.edu
10
21
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Bulk-form
encapsulation (e.g. mold
22
Mold compound
compound)
substrate
Thermal adhesive
A leadframe package
Adh
Adhesives
i
die-attach, underfill
thermal adhesives
Thick- or thin- film
solder mask
Carrier
Underfill
Solder
bump
Passivation
passivation
Solder mask
Substrate
Moisture-Related Reliability
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23
85C/85RH
w
a
Moisture condensation in a typical underfill
Moisture-Related Reliability
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Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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25
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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2C
C
2C 2C
= D
+
+
2
t
y 2
z 2
x
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
13
Moisture
C1
27
T1
C2
T2
C2
Mat A
Mat A
Mat B
Mat B
T3
C1
w1
C2
w2
C2
Mat A
Mat A
Mat B
Xuejun Fan
Moisture-Related Reliability
Mat B
w3
xuejun.fan@lamar.edu
28
Thermal-moisture analogy
Properties
Thermal
Moisture
Field variable
Temperature,
p
,T
= C/S
Density
Conductivity
DS
Specific capacity
Moisture concentration: C= S
Moisture diffusivity: D = DS/(1xS) = D
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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29
Molding
Compound
BT
Cu
Solder Mask
Output
Moisture concentration at each location
Package total weight gain: C* Velement
Compare
Package weight gain data
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
30
Cu
Molding
Compound
BT
Solder Mask
42 hrs
84 hrs
168 hrs
Die
Attach
850C/85%RH
09
0.9
0.8
0.7
300C/60%RH
0.6
0.5
0.4
0.3
Experiment
0.2
FEA
0.1
0
0
20
40
60
80
100
120
140
160
Time (hour)
Xuejun Fan
Moisture-Related Reliability
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31
Mold compound
Substrate
Cu
plane
l
Solder
resist
Die
flag
Die
Thermal
via
Xuejun Fan
0.016
0.012
0.008
Experiment
FEA
0.004
0
0
200
400
600
800
1000
Time (hr)
Moisture-Related Reliability
xuejun.fan@lamar.edu
32
Moisture Absorption
Moisture Absorption
48h
24h
48h
168h
192h
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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33
h/2
h = 0.2cm
C (0, t ) = C sat
Thickness: 2mm
x=0
14.0
1.2
30C/60%RH
85C/60%RH
85C/85%RH
12.0
Tempe
erature at the side of x=h
h/2
10.0
8.0
6.0
x=h
4.0
h = 0.2cm
20
2.0
0.0
0
100
200
300
400
500
1.0
0.8
x=h
0.6
0.4
h = 0.2cm
02
0.2
0.0
0
10
Time (hours)
20
30
40
Time (second)
In most cases, the thermal modeling can be decoupled with moisture diffusion
modeling
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Moisture Desorption
G
34
Moisture absorption
(e.g. 30C/60%RH:168 hours)
(Factory environment after
opening dry-bag)
Moisture desorption
(reflow process)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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35
2 2 2 1
S
+
+
=
+
x 2 y 2 z 2 D t D S t
S
0
D S tt
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
36
Die
DA
MC
C
Cu
Wetness
During
D i reflow,
fl
External package surface
loses a significant amount of
moisture due to high
moisture desorption rate
Moisture concentration in the
interior of the package
remains relatively unchanged
The local moisture
concentration along critical
interfaces determines the
strength of interfacial
adhesion and magnitude of
internal vapor pressure
induced
1hr
12hr
168h
168hr
Reflow
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
18
37
1 min
183C
1.5 min
200C
2 min
220C
Moisture-Related Reliability
xuejun.fan@lamar.edu
Over-Saturation at Reflow
38
Flux=0
0.03mm
Mat2
0.2mm
Mat1
C
8
BT
Concentration (kg/m^3)
Concentration (kg/m^3)
Film
6
5
4
3
2
1
0
BT
Film
5
4
3
2
1
0
50000
100000
150000
200000
250000
300000
350000
316780 316800 316820 316840 316860 316880 316900 316920 316940 316960
Time ((s))
Time ((s))
In the beginning of desorption, since the film tends to absorb more moisture
due to increasing the saturated moisture concentration, the moisture
concentration increases at the beginning, and then decreases
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
19
39
The first case passed pre-con test, will the second case pass?
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Mt/M 75%
Failure
No failure
Mt/M 38%
Failure
No failure
40
Mt/M of package
Moisture-Related Reliability
xuejun.fan@lamar.edu
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41
Water-resistant material
In air (30C/60%RH)
In water (30C/100%RH)
Moisture-Related Reliability
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42
S=
C sat
P
Xuejun Fan
Moisture-Related Reliability
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43
Characterization Method
Procedures - documented in the following standards
Semi G66-96
ASTM D570-95
BS 2782: Part 4
4-1983,
1983, ISO 62 -1980
1980
Method 430A
Method 430B
water-soluble matter
Method 430C
Method 430D
water-soluble matter
50mm
1 mm for diffusivity
3mm for solubility
Xuejun Fan
Moisture-Related Reliability
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Source of Error
Specimen Preparation
Minimize voids
Sufficient aspect ratio to
Xuejun Fan
Moisture-Related Reliability
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45
C
C
= D
t
x2
2
60
40
Experimental
Calculated
20
D: diffusivity (cm2/sec)
50
Time (hours)
(2n + 1) 2 2 D
Mt
8
1
= 1 2
exp
t
M
h2
n=0 (2n + 1) 2
Xuejun Fan
Moisture-Related Reliability
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46
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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47
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
48
Csat = p*S
p = RH * psat (T) = RH * p0 exp (- Ep/ kT)
Csat = RH * p0 exp (- Ep/ kT)* S0 exp(Es/kT) = RH*C0 exp [(Es-Ep)/kT ]
In-Situ Moisture Measurement for BT-Core
10
9
Experimental Data
Linear Fit
8
3
Csat (mg/cm )
Csat (mg/cm )
60% R.H.
80% R.H.
70 m BT core
30
40
50
60
70
6
5
4
3
Slope = 0.11
2
1
80
10
Temperature (C)
20
30
40
50
60
70
80
90
Moisture-Related Reliability
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49
1.2
Measured
Linear Fit
1.0
0.8
0.6
Y = 0.34+0.0084T
0.4
30
40
50
60
70
80
Temperature (C)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
50
Weight
100.3
60
Weight (%
%)
100.2
50
40
100.1
30
20
100.0
10
99.9
Referen
nce Sensor RH (%)
60 C
0
0
200
400
600
800
1000 1200
Time (min)
Moisture-Related Reliability
xuejun.fan@lamar.edu
25
51
25
o
60 C / 60% RH
20
Weight Gain (g)
Saturation
15
10
Experimental Data
Fit 1
Fit 2
0
0
1000
2000
3000
4000
Time (sec)
C
= D 2C
t
E
D = Do exp d
kT
Moisture-Related Reliability
xuejun.fan@lamar.edu
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Substrate
0.14
Weight Gain (%)
0.12
0.1
0.08
0.06
Sub SH1
0.04
Sub S6F
0.02
Mean
0
0
24
48
72
96
120
144
168
192
216
240
Time (hr)
two-stage sorption
( DEB ) D =
m
D
M (t ) = M ,i (1 e k i t )
i
Two processes
Moisture diffusion
Polymer relaxation
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
26
Moisture absorption
Moisture desorption
Moisture-Related Reliability
xuejun.fan@lamar.edu
w
a
54
Where to stay?
Free volume or micro/nano pores
Moisture state
Bound water (hydrogen bond)
Unbound water (liquid or gas)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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55
Summary
Moisture in polymer materials will be in liquid/vapor
mixed phases
Moisture concentration is discontinuous along bimaterial interface special
special treatment such as
normalization must be applied
Local moisture concentration, not total moisture weight
gain, determines package moisture performance
Moisture absorption is different from water absorption
Moisture absorption is a reversible process for Fickian
type of moisture diffusion
Diffusivity, solubility and saturated moisture
concentration are moisture related properties
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
28
57
Xuejun Fan
Moisture-Related Reliability
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T1 T2
p1
p2
Single vapor phase
Xuejun Fan
Moisture-Related Reliability
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59
Liquid/vapor phase
Moisture-Related Reliability
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Multi-Scale Analysis
Representative Elementary Volume (REV) concept
Microscopic level
dm dm dV
=
=C/ f
dV f dV dV f
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
30
61
85C/85RH
85C/85RH
w
a
dm dm dV
=
=C/ f
dV f dV dV f
w= Csat =
81.2 a
=Csat/f =
1624 a
f=5%
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
62
Steam Table
T(C)
20
30
40
50
60
70
80
0.017
0.03
0.05
0.08
0.13
0.2
0.29
p g(MPa)
0.002
0.004
0.007
0.01
0.02
0.03
0.05
T(C)
90
100
110
120
130
140
150
0.42
0.6
0.83
1.12
1.5
1.97
2.55
p g(MPa)
0.07
0.1
0.14
0.2
0.27
0.36
0.48
T(C)
160
170
180
190
200
210
220
3.26
4.12
5.16
6.4
7.86
9.59
11.62
p g(MPa)
0.62
0.79
1.26
1.55
1.91
2.32
T(C)
230
240
250
260
270
280
290
14
16.76
19.99
23.73
28.1
33.19
39.16
p g(MPa)
2.8
3.35
3.98
4.69
5.51
6.42
7.45
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
31
63
1
273 + T ( o C )
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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T0
(T )
g
T0
T1
(T1 ) = g (T1 )
T
Single vapor phase
Moisture-Related Reliability
xuejun.fan@lamar.edu
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65
T, f
(T1) = g(T1)
Case 1
(T0)
g(T0)
Case 3
(T0) > g(T0)
and
(T) < g(T)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
p(T ) =
C pg (T0 ) T 1 f 3 (T T0 )
e
g (T0 )f T0 1 f 0
Case 2:
C0 1 f 3 (T T0 )
e
g (T )
f 1 f 0
p(T ) = pg (T )
66
C0 1 f 3 (T T0 )
e
< g (T )
f 1 f 0
p(T ) = pg (T1)
T f (T1) 1 f
e 3 (T T1 )
T1 f 1 f (T1)
where
C 1 f (T1) 3 (T T1 )
e
= g (T1)
f (T1) 1 f 0
Liquid/vapor phase
Transition from
liquid to vapor
Xuejun Fan
Moisture-Related Reliability
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33
67
24h
MPa
48h
192h
Moisture-Related Reliability
xuejun.fan@lamar.edu
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48h
168h
Moisture-Related Reliability
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Interfacial adhesion
Moisture
absorption
Vapor pressure
Vapor
pressure
Adhesion
69
MSL 3
MSL 2
MSL 1
Moisture absorption
Schematic, not scaled
Moisture-Related Reliability
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Thermal expansion : T
Swelling : C
Before preconditioning
After preconditioning
Volume expansion:
Thermal expansion-induced
Vapor pressure-induced
pressure induced
At reflow temperature
3 T 21 e-3
dV/V = 3 (1 - 2
2 ) p/ E
E 9.3
93e
e-3
3
Moisture-Related Reliability
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35
71
T h erm om e c h a n ic a l
H ygrom e c h a n ic a l
V apor
P ressu re
In te g r a te d
(to ta l)
D ie A tta c h
T o ta l S tr a in
E q u iv a le n t m e a n
C T E (p p m / C )
T o ta l S tr a in
E q u iv a le n t m e a n
C T E (p p m / C )
1 .5 3 e - 3
34
7 .6 5 e - 3
170
1 .5 7 e - 3
3 4 .9
3 .2 2 e - 3
7 1 .6
8 .1 4 e - 4
1 8 .1
2 .1 6 e - 2
4 7 9 .6
3 .9 1 e - 3
87
3 .2 5 e - 2
7 2 1 .2
Moisture-Related Reliability
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Summary
Xuejun Fan
Moisture-Related Reliability
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73
Xuejun Fan
Moisture-Related Reliability
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Material properties
Modulus (E)
Viscosity
CTE
underfill
Tg
Xuejun Fan
Moisture-Related Reliability
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75
1.6
1.4
% weight gain
1.2
1
0.8
0.6
0.4
0.2
UF-A
UF-B
UF-C
UF-D
UF-E
UF-F
0
0
60
121
182
244
305
366 425
486
547
609
670
731
790
851
912
UF-A < UF-B < UF-C < UF-D < UF-E < UF-F
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
CTE1
ppm/C
CTE2
ppm/C
Tg
C
UF-A
31
90
133
1.7
UF-B
18
40
128
12
UF-C
25
93
117
9.6
1.4
UF-D
27
78
144
4.5
UF-E
68
197
155
2.2
1.05
UF-F
UF
F
61
199
102
2.7
0.05
76
E1, E2
GPa
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
38
77
35
30
0days
25
11days
20
17days
15
21days
10
5
0
JM-A
UF-A
JM-B
UF-B
Sumito.
UF-C
Moisture: 85C/85RH
Moisture-Related Reliability
xuejun.fan@lamar.edu
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Configuration
A1
3/24
A2
5/24
A3
4/24
A4
6/24
MSL 2
UF-C
0/24
0/18
UF-E
0/18
Not Available
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
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79
Failure Mechanism
Solder spread
Cross-section
delamination
Before moisture sensitivity test
El t i l short
Electrical
h t causedd by
b solder
ld extrusion
t i
Extruded
solder
die
UF
solder
Ni
Cu
SM
Cross-section image
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
80
30
with moisture
without moisture
25
20
15
10
5
0
UF A
UF-A
UF B
UF-B
UF C
UF-C
UF D
UF-D
UF E
UF-E
UF F
UF-F
underfill
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
40
Interfacial adhesion
Moisture
absorption
Vapor pressure
Vapor
pressure
Adhesion
81
MSL 3
MSL 2
MSL 1
Moisture absorption
Schematic, not scaled
Moisture-Related Reliability
xuejun.fan@lamar.edu
82
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
41
Failure Mechanism
83
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
84
Key Messages
For underfill material, since materials modulus is
relatively high, cohesive delamination is not a
concern
Underfill material properties of diffusivity and
solubility are not critical properties for package
performance at reflow;
The adhesion at high temperature with moisture is a
key.
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
42
Summary
85
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
86
Case St
C
Study
d II :
Delamination/Cracking in StackedDie Chip Scale Packages
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
43
Xuejun Fan
Moisture-Related Reliability
87
xuejun.fan@lamar.edu
88
substrate
DA paste
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
44
89
UV irradiation
Dicing
Wafer laminate
Wafer
DB Film DC Tape
Die Bonding
Wire Bonding
Xuejun Fan
Molding
Moisture-Related Reliability
xuejun.fan@lamar.edu
90
Experimental observations
Failures at the bottom die-attach film after precon
Cohesive voiding/cracking dominant
Veryy sensitive to soldering
g reflow p
profile
Tem
mperature (C)
280
260
240
220
200
180
160
140
120
100
80
60
40
20
FM
SH
Xuejun Fan
Moisture-Related Reliability
60
360
420
xuejun.fan@lamar.edu
45
91
Failure Mechanism
Before reflow
After reflow
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
800
No RH
700
85 % RH
600
500
Dramatic decrease
in modulus of DA
material in moisture
400
300
200
% weight gain
n
900
Modulus (MPa)
92
03
0.3
0.2
0.1
0
100
-0.1
0
0
20
40
60
80
100
120
140
Temperature (oC)
time (minute)
DA film
fil T
Tg iis llow, and
dd
drops with
i h moisture
i
exposure
DA modulus is less than 3MPa at reflow temperature, even lower than the
saturated vapor pressure (4.7MPa@260C)
Moisture uptake in DA is very fast
Faster than observed in previous literature
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
46
93
270
2.32MPa
240
Temperaturre (C)
210
0.48MPa
180
150
Reflow profile
120
0.02MPa
90
60
270
30
240
Scenario II
2.32MPa
60
120
180
Scenario I
240
Temp
perature (C)
210
180
300
0.48MPa
150
Reflow profile
120
0.02MPa
90
60
30
0
0
60
120
180
240
300
Moisture-Related Reliability
xuejun.fan@lamar.edu
94
Si
film 1
Saturated
Fully dry
substrate
thick
No appreciable difference in moisture saturation after precon with difference substrate thickness
fil 1
film
thin
thi
substrate
b
Comments:
Substrate thickness has no effect on final moisture saturation of package
materials after moisture preconditioning.
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
47
95
Temperature (C)
Moisture desorption
modeling - after reflow
280
260
240
220
200
180
160
140
120
100
80
60
40
20
SH
SH (Model)
60
120
180
240
300
360
420
1.3x
Comments:
Moisture at DA film interface is reduced ~40%
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
96
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
48
97
280
260
240
220
200
180
160
140
120
100
80
60
40
20
Temperaturre (oC)
Temperatu
ure ( C)
Interface moisture content comparison between two reflow profiles from 60oC~200oC
SH
SH (Model)
60
120
180
240
300
360
420
280
260
240
220
200
180
160
140
120
100
80
60
40
20
FM
FM (Model)
60
120
180
240
300
360
420
Comments:
moisture at DA film interface is reduced ~40%
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
98
Leg1
Leg 2
Leg 3
Leg 4
Leg 5
Solder Mask
1x
1.02x
1.04x
1.04x
1.37x
Inner Cu density
0%
50
50
50
50
BT-Core
1y
1.09y
1.43y
1.47y
1.44y
Total
1z
1.20z
1.47z
1.47z
1.53z
Delam Rate
0%
7%
32%
47%
100%
Comments:
BT-core thickness is largest modulator
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
49
99
Desorption Model
C ( x, t ) / Csat =
[2( 1)n ]e
2n + 1
)
2
n =0
n = (
2n D t / h
C
Csat
cos(n ( h x ) / h )
C/Csat ~ exp (-
Dt
h2
D: substrate diffusivity
t: time
h: thickness
C/Csat
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
100
C/Csat
Die-Attach Film
(reservoir)
D: diffusivity
t: time
h: thickness
Reflow time, substrate diffusivity, and substrate thickness are three key
parameters to determine the moisture loss.
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
50
101
Summary
Cohesive voiding/cracking of die-attach film was
observed
Very
y sensitive to reflow p
profiles
Desorption plays a significant role
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
102
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
51
Accelerated Equivalent
103
IPC/JEDEC J-STD-020C
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Accelerated Equivalent
104
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
52
Acceleration Methodology
105
Technique
Use 1-D moisture diffusion analytical analysis
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Acceleration Methodology
106
AF =
Xuejun Fan
D acc
D std
Moisture-Related Reliability
xuejun.fan@lamar.edu
53
Method
BHAST
~ 4.2days
UHAST
~ 4.2days
Precon
~ 10days
TCC
~ 11days
TCB
~ 21days
Bake
~ 21days
> 84days*
Bend
TCG
Time
Moisture-Related Reliability
xuejun.fan@lamar.edu
Method
Accelerated MS
BHAST
~ 4.2days
4 2days
UHAST
~ 4.2days
Precon
Fast TCC
~ 10days
TCC
~ 11days
TCB
~ 21days
Bake
~ 21days
~ 84days*
Bend
TCG
Time
Moisture-Related Reliability
xuejun.fan@lamar.edu
54
Acceleration Methodology
Testing Method
Bake 7hrs/125C
( i t
(moisture)
)
G
TCB 5cycles
(shipment)
IRX3 260C
(reflow)
G
Storage & Shipment
TH 60RH/60C
88hrs (moisture)
surface mount
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Acceleration Methodology
Accelerated test should ensure
same failure mode/mechanism;
similar failure rate.
TSAM image
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
55
Acceleration Methodology
Accelerated & Standard
Precon. Correlation
Methodology
T + M + P
Thermo-stress
Adhesion Strength
Stress
Delam Occurrence
Time
Moisture-Related Reliability
xuejun.fan@lamar.edu
5
4.5
4
3.5
3
2.5
2
1.5
1
0.5
0
30C/60%RH
60C/60%RH
0
20
Xuejun Fan
40
60
Time (hrs)
Moisture-Related Reliability
80
100
xuejun.fan@lamar.edu
56
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
57
Failure Mode/Mechanism
Validation
30C/60%RH, 216hrs
60C/60%RH, 60hrs
60C/60%RH, 75hrs
60C/60%RH, 88hrs
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Validation
Failure Rate
FR at 216hrs 30C/60%RH is similar with that at 68.5hrs 60C/60%RH
100
10
1
30 45
50
60 75 88
216
100
150
0.1
200
250
30C/60%RH
60C/60%RH
0.01
Time (hrs)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
58
117
Summary
Equivalent concentration methodology
Identifies local moisture concentration as the primary failure
driver
J-STD-020C
Simple to use
Caution necessary when applied to leaded packages of different
materials
Caution necessary when applied to organic substrate based
packages
New methodology
Local moisture concentration equivalency
Global moisture distribution equivalency
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
118
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
59
119
General Observations
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
120
S tora ge M odulus ( G P
Pa)
20
16
Modulus @ 30C
Modulus @ 100C
12
Modulus @ 160C
Modulus @ 220C
8
4
0
0
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
60
121
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
122
900
800
No RH
Modulus (MPa)
700
85 % RH
600
500
400
300
200
100
0
0
20
40
60
80
100
120
140
Temperature (oC)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
61
70
123
143
142.5
50
40
CTE 1
CTE 2
Tg
30
20
142
Tg (C)
CTE (ppm/C)
60
141.5
10
0
141
0
Xuejun Fan
2
4
6
Moisture Concentration (mg/cc)
Moisture-Related Reliability
xuejun.fan@lamar.edu
124
Shear Test
Adhesion measurement
Shear test
Pull test
Peel test
Torque test
Pull Test
Sample configurations
Pre-cracked
Not pre-cracked
Sandwiched
Peel Test
Button shape
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
62
125
Shear Test
Samples
chip
substrate
uf
uf
chip
substrate
chip
subs.
uf
uf
chip
substrate
Test samples
Same materials on both sides
To eliminate the thermal stress effect
To keep the interface same on both sides
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
126
Chip attachment
Curing
Wafer/Substrate
with PI/SM coating
Dicing
Test Samples
Moisture-Related Reliability
xuejun.fan@lamar.edu
63
127
Dry
v
v
v
UF-1
UF-2
UF-3
85C/85RH
85C/85RH
85C/85RH
11 days
17 days
21 days
v
v
v
v
v
v
v
v
v
Sample size: 16
Dry
30C/60RH
85C/60RH
85C/85RH
21 days
21 days
21 days
v
v
v
v
v
v
v
v
v
v
v
v
UF-1
UF-2
UF-3
Sample size: 16
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
128
adh. fixture
chip
uf
chip
adh. fixture
time.
pull fixture
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
64
129
Adjustable parameters
Shear speed
Shear height
Load range
Shear height
The failure mode and adhesion results are very sensitive to the
parameters setting such as shear height and shear speed.
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
130
Shear
height
Average
Stdev.
Sample size: 16
Shear Load Speed 200um/s,Room Temp.
Failure Mode Vs. Shear Height
100%
22
21
20
19
18
17
16
15
14
13
12
11
10
9
8
7
6
5
4
3
2
1
0
20um
50um
100um
150um
200um
90%
80%
70%
60%
50%
40%
30%
20%
10%
0%
20um
Shear Height
50um
100um
150um
200um
Shear Height
Moisture-Related Reliability
xuejun.fan@lamar.edu
65
131
Strength (MPa)
shear
pull + shear
Pull
Shear
pull
(loading mode)
JM-A
UF-1
JM-B
UF-2
UF-3
Sumitomo
Moisture-Related Reliability
xuejun.fan@lamar.edu
132
35
30
0days
25
11days
20
17days
15
21days
10
5
0
JM-A
UF-1
JM-B
UF-2
Sumito.
UF-3
Moisture: 85
85C/85RH
C/85RH
Moisture-Related Reliability
xuejun.fan@lamar.edu
66
133
7
6
Sample size: 16
5
4
Sumitomo
JM-A
UF-3
UF-1
JM-B
UF-2
2
1
0
Dry
30C/60RH
85C/60RH
85C/85RH
Moisture-Related Reliability
xuejun.fan@lamar.edu
134
pull
chip
chip
Spacer
UF
Spacer
UF
Spacer
UF
PI surface
chip
chip
chip
chip
chip
chip
U/F surface
PI surface
PI surface
shear
chip
chip
chip
chip
Si substrate
U/F surface
chip
chip
U/F surface
U/F surface
Mode 1
PI surface
Mode 2
Mode 3
Almost 100% failures occur at UF/PI interface under both pull and
shear tests
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
67
135
Mode 4
Mode 2
Mode 5
Mode 3
Mode 6
Failure modes are more complicated than that of UF/PI adhesion test.
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
136
Hygroscopic Swelling
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
68
Hygroscopic Swelling
137
85C/85%RH
Expansion strain
due to hygroscopic
swelling
Expansion strain
due to temperature
change of 100C
~0.29%
0 29%
~0.25%
0 25%
hygro=C
the coefficient of
hygroscopic swelling
thermal=T
C moisture concentration
138
Before HAST
Moisture-Related Reliability
xuejun.fan@lamar.edu
69
Xuejun Fan
Moisture-Related Reliability
139
xuejun.fan@lamar.edu
140
Specimen
Identical shape and size so as to ensure identical moisture absorption and
desorption rate
TGA
Xuejun Fan
TMA
Moisture-Related Reliability
xuejun.fan@lamar.edu
70
141
TMA/TGA Method
Thermal Mechanical Analyzer
TMA
h
ave =h/h
time
TGA
Moisture absorption
Cave= M/V
time
ave. strain
0.0012
0.0008
ave = aveCave
0.0004
0.0
1.0
2.0
3.0
4.0
5.0
ave coefficient of
hygroscopic swelling
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
142
Hygroswelling Characterization
Graphs of TGA and TMA
TGA (mg)
TMA (mm)
36.12
TGA
1.0369
36.1
TMA
1.0367
0.001
1.0365
0.0008
1.0363
0.0006
1.0361
0.0004
36.08
Method #1
36 06
36.06
36.04
1.0359
36.02
1.0357
1.0355
36
0
200
400
600
800
y = 0.2223x
R2 = 0.9946
0.0002
0
0
0.001
1000
0.002
0.003
0.004
0.005
Concentration (mg/mm3)
Time (min)
Method #1
Method #2
I
ave
=
h(t ) h0 h0 (t )
=
h0
h0
II
ave
=
I
=
C ave
M (t ) M 0 M moisture (t )
=
V0
V0
II
=
C ave
Xuejun Fan
Moisture-Related Reliability
hsat h(t )
hsat
M sat M (t )
V0
xuejun.fan@lamar.edu
71
143
Issues
Uniform
moisture
distribution
ave. strain
0.0012
Non-uniform
moisture
distribution
0.0008
0.0004
0
0.0
1.0
2.0
3.0
4.0
5.0
Moisture-Related Reliability
xuejun.fan@lamar.edu
144
Theoretical Predictions
Material constant
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
72
145
Experimental Verification
Moisture-Related Reliability
xuejun.fan@lamar.edu
146
Regression Analysis
0.004
ave
0.0035
Strain (delta_L/L_0
0)
0.003
t0
0.0025
t1
0.002
0.0015
0.001
0.0005
t2
ave(t0) =
0
0
0.003
0.006
0.009
0.012
0.015
Moisture-Related Reliability
xuejun.fan@lamar.edu
73
147
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
148
V free volume
= 3%
V
The hygroscopic swelling is only a small fraction of the total free
volume
S lli is
Swelling
i caused
d by
b water
t molecules
l
l bound
b
d to
t the
th polymer
l
matrix and not by free water molecules
Free volume fraction estimate without considering swelling effect
is acceptable
swelling = C
Xuejun Fan
xuejun.fan@lamar.edu
74
149
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
Moisture-Related Reliability
xuejun.fan@lamar.edu
75
chip
bump
underfill
substrate
HAST
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
152
with moisture
without moisture
stresses (MPa)
50
40
30
20
10
0
Normal stress
Shear Stress
stresses (MPa)
with moisture
without moisture
50
40
30
20
10
0
Xuejun Fan
Moisture-Related
Reliability
Normal
stress
Shear Stress
xuejun.fan@lamar.edu
76
153
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
D
(mm2/s)
CME
(mm3/mg)
Csat
(mg/mm3)
Underfill A
9.02e-6
0.18
0.0152
0.0027
Underfill B
1.55e-6
0.22
0.0329
0.0072
Underfill C
1.14e-5
0.31
0.0112
0.0035
Mold Compound
2.79e-6
0.4
0.0043
0.0017
Solder Mask
4.83e-5
0.2
0.0143
0.0029
BT Substrate
2.13e-6
0.4
0.0075
0.0030
Mold Compound
Thermomechanical
Hygromechanical
Die Attach
Total Strain
Equivalent mean
C ((ppm/C)
CTE
/ C)
Total Strain
Equivalent mean
C ((ppm/C)
CTE
/ C)
1.53e-3
34
7.65e-3
170
1.57e-3
34.9
3.22e-3
71.6
Xuejun Fan
154
Moisture-Related Reliability
xuejun.fan@lamar.edu
77
155
Thermomechanical
Hygromechanical
Vapor
Pressure
Integrated
Moisture-Related Reliability
xuejun.fan@lamar.edu
156
Summary
Polymer expands upon absorbing moisture
hygroscopic swelling
Hygroscopic strain is comparable to & may be larger
th thermal
than
th
l strain
t i
= C: - hygroswelling coefficient can be
measured by TGA/TMA
Hygroscopic swelling and adhesion reduction are
main failure mechanisms under HAST
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
78
157
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
158
Conditions
Moisture absorption/condensation
Voltage
Contamination
SR
-
e
CAF
Ref: Katayanagi et al. ESPEC Japan Tech-info Field Report #5, 1996
Moisture-Related Reliability
xuejun.fan@lamar.edu
79
159
Dendritic growth
@ V 1.23V electrolytic decomposition of water:
H2O H+ + OH
At the Anode: oxidation and metal loss
production of hydronium ion:
H2O O2 + 2H+ + 2e
electrolytic dissolution of metal:
M Mn+ + ne
Cu Cun+ + ne
(n = 1,2)
At the Cathode: reduction and protective effects
production of hydroxyl ion:
2H2O + 2e H2 + 2OH
reduction of metal:
Mn+ + ne M
Cunn+ + ne Cu
(n = 1,
1 2)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
160
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
80
161
500X
Area 1
200X
Anode
Anode
Cathode
Cathode
200X
500X
Area 2
Moisture-Related Reliability
xuejun.fan@lamar.edu
162
500X
Anode
Cathode
200X
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
81
163
Ni Migration (bulk)
Sn Migration (surface)
Cu Migration (bulk)
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
164
Moisture-Related Reliability
xuejun.fan@lamar.edu
82
Dendritic Growth
165
Anode Reactions
1.
2.
3.
Metal oxidation creating metal ions that migrate towards the cathode.
When the metal ions reach the cathode, dendritic growth can occur.
Halide ion breakdown of the passive film creating freshly exposed metal
surface
surface.
The oxidation can eventually lead to an open circuit failure.
Cathode Reactions
1.
2
2.
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Moisture-Related Reliability
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Xuejun Fan
Moisture-Related Reliability
Initiation
Propagation
Dendrites shape:
flow of species involved in the
electrolytic process
path of current flow (electric
field)
Critical over-potential or critical
current density
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167
Cathode
Epoxy resin
Glass fiber
CAF
Thru-Via
Moisture-Related Reliability
xuejun.fan@lamar.edu
a: hole-to-hole
c: trace-to-hole
Xuejun Fan
168
b: hole-to-trace
d: trace-to-trace
Moisture-Related Reliability
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84
169
SEM on X-section
(-)
(+)
CAF growth
Xuejun Fan
Moisture-Related Reliability
Void
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x-section
Prepreg
(-)
(+)
SM
Xuejun Fan
Moisture-Related Reliability
Intel package FA
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171
X-section
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Moisture-Related Reliability
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172
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Moisture-Related Reliability
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Contributory Factors
ENVIRONMENT
MATERIALS
Reaction
173
PROCESS
Mechanism (schematic)
Acceleration Factors
Moisture content
Temperature
Material quality
Changes in pH due to
the electrolysis of water
(acidization)
Voltage
Moisture content
Temperature
Voltage
Material quality
pH, impurity ions
Voltage
Moisture content
Material quality
pH, impurity ions
Dissolved oxygen content
Ref: Katayanagi et al. ESPEC Japan Tech-info Field Report #5, 1996
Contributory Factors:
Environment
En ironment Temperature,
Temperat re H
Humidity,
midit Voltage
Voltage, Contaminants
Materials Package Materials Selection and Suppliers
substrate dielectrics, solder resist, flux and flux residue, Cu-plating chemistry, Cu
metallization (line width/spacing and geometry) underfill chemistry (water adsorption
isotherm, ionic content/contamination, CTE), etc.
Process Package Assembly
baking, fluxing, soldering, cleaning, etc.
Xuejun Fan
Moisture-Related Reliability
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Contributory Factors
174
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Moisture-Related Reliability
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175
Summary
Xuejun Fan
Moisture-Related Reliability
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Summary
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Moisture-Related Reliability
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88
177
Summary
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Moisture-Related Reliability
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178
References
Xuejun Fan
Moisture-Related Reliability
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References
179
General
X.J. Fan, Moisture related reliability in electronic packging, 2005/2006/2007 ECTC Professional
Development Course Note, 2005/2006/2007
X.J. Fan, Mechanics of moisture for polymers: fundamental concepts and model study, 9th IEEE
International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments
in Microelectronics and Microsystems, (EuroSimE), April 20-23, 2008, pp159-172
XJ F
X.J.
Fan, J.
J Zhou,
Zh
and
dA
A. Ch
Chandra
d P
Package
k
iintegrity
t it analysis
l i with
ith th
the consideration
id ti off moisture
i t
effects, 58th Electronic Components and Technology Conference (ECTC), 2008
G.Q. Zhang, W.D. van Driel, and X.J. Fan, Mechanics of Microelectronics, Springer, 2006
Moisture diffusion modeling
B. Xie, X.Q. Shi, X.J. Fan, and H. Ding, Direct concentration approach of moisture diffusion and
whole field vapor pressure modeling for reflow process, submitted, 2008
B. Xie, X. Q. Shi, and X.J. Fan, Sensitivity investigation of substrate thickness and reflow profile on
wafer level film failures in 3D chip scale packages by finite element modeling, 57th Electronic
p
and Technology
gy Conference 2007, ECTC '07, 2007, p 242-248
Components
T.Y. Tee, X.J. Fan and T. B. Lim, Modeling of whole field vapor pressure during reflow for flip chip
and wire-bond PGBA Packages, 1st International Workshop on Electronic Materials & Packaging,
1999
J.E. Galloway and B.M. Miles, Moisture absorption and desorption predictions for plastic ball grid
array packages, IEEE Transactions on Components, Packaging and Manufacturing Technology,
Part A, 20(3), pp. 274-279, 1997
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
References
180
Y. He, and X.J. Fan, In-situ characterization of moisture absorption and desorption in a thin BT
X.Q. Shi, Y.L. Zhang, W. Zhou, and X.J. Fan, Effect of hygrothermal aging on interfacial reliability
core substrate, Electronic Components and Technology Conference, pp. 1375-1383, 2007
of silicon/underfill/FR-4 assembly, IEEE Transactions of Components and Packaging
Technologies, 2008, 31(1), 94-103
T. Ferguson and J. Qu, Moisture absorption analysis of interfacial fracture test specimens
moisture content
content, and hygroscopic swelling of epoxy molding compound
compound, EuroSimE 2008
2008, 455-462
455 462
composed of no-flow underfill materials, Journal of Electronic Packaging, Vol. 125, pp 24-30,
2003.
S. Luo and C.P. Wong, Moisture absorption in uncured underfill materials, IEEE Transactions of
S. Luo and C.P. Wong, Influence of temperature and humidity on adhesion of underfills for flip
chip packaging, IEEE Transactions of Components and Packaging Technologies ,Vol. 28, No.1,
88-94, 2005
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
90
References
181
X.J. Fan, J. Zhou, G.Q. Zhang and L.J. Ernst, A micromechanics based vapor pressure model in
X.J. Fan; G. Q. Zhang; W. D. van Driel; L. J. Ernst, Analytical solution for moisture-induced
electronic packages, ASME Journal of Electronic Packaging, 127 (3), pp. 262-267, 2005.
interface delamination in electronic packaging, Electronic Components and Technology
Conference, 2003, May 27-30, 2003 Page(s):733-738
E. Prack and X.J. Fan, Root cause mechanisms for delamination/cracking in stack-die chip scale
packages, International Symposium on Semiconductor Manufacturing (ISSM), 2006, September
25 - 27, Tokyo, Japan.
X.Q. Shi and X.J. Fan, Wafer-level film selection for stacked-die chip scale packages, Electronic
X.J. Fan and T. B. Lim, Mechanism analysis for moisture-induced failures in IC packages, ASME
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
References
182
Hygroscopic swelling
X.J. Fan, J. Zhou, and A. Chandra Package integrity analysis with the consideration of moisture
X.J. Fan, Mechanics of moisture for polymers: fundamental concepts and model study, 8th IEEE
International Conference on Thermal and Mechanical Simulation and Experiments in
Microelectronics and Microsystems, (EuroSimE), April 20-23, 2008
T.Y. Tee, C. Kho, D. Yap, C. Toh, X. Baraton, Z. Zhong, Reliability assessment and hygroswelling
modeling of FCBGA with no-flow underfill Microelectronics Reliablity, 2003, pp. 741-749.
H. Ardebili, E.H. Wong, and M. Pecht, Hygroscopic swelling and sorption characteristics of epoxy
molding compounds used in electronic packaging, IEEE Trans. Comp. Packag. Technol., Vol. 26,
No. 1 (2003) pp. 206-214.
E.H. Wong, K.C. Chan, R. Rajoo, T.B. Lim, The mechanics and impact of hygroscopic swelling of
polymeric materials in electronic packaging, Proc. 50th Electron. Comp. Technol. Conf., Las
Vegas, NV, 2000, pp. 576580.
Xuejun Fan
Moisture-Related Reliability
xuejun.fan@lamar.edu
91
References
183
B. Xie and X. Shi, and X.J. Fan, Accelerated moisture sensitivity test methodology for stacked-die
molded matrix array package, Proceedings of IEEE 9th Electronics Packaging Technology
Conference, p.100-104, December 2007
R. Shook, T. Conrad, V. Sastry and D. Steele, Diffusion Model to Derate Moisture Sensitive
Surface Mount ICs for Factory Use Conditions, IEEE Transaction on Components, Packaging
and Manufacturing Technology, Vol. 19, No. 2, pp. 110-118, 1996.
R. Shook, R. Vaccaro and D. Gerlach, Method for Equivalent Acceleration of JEDEC/IPC Moisture
Sensitivity Levels, Annual International Reliability Physics Symposium, pp. 214-219, 1998.
Chemical-electromigration
J.W. Osenbach, Corrosion-induced degradation of microelectronic devices, Journal of Semicond.
Sci. Technol., 11, 155-162, 1996
Xuejun Fan
Moisture-Related Reliability
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184
Xuejun Fan
Moisture-Related Reliability
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92