2013

AMOLED
IGZO

2013
MOMetal Oxide
Smart Display Device
SONYPanasonicSamsungLGTV
AMOLEDIGZO
Display Taiwan 2013
(PIDA)

2013

IGZO

IGZO1

MOMetal Oxide
Oxide TFTIGZOIn-Ga-Zn-O

TFT-LCD
Metal Oxide

Metal Oxidea-Si
amorphous-Si

60

1IGZO

TFT

PIDA20137

2013 7 No.106

a-Si

IGZO

LTPS

(cm^2/Vs)

~1

~30

~100

TFT

NMOS

MOS(LCD, OLED)

NMOS(LCD), PMOS(OLED)

TFT

4~5

4~5

5~11

( )

150~350

150~350

250~400

(Gen)

10

5.5~8

LCD

LCD, OLED

LCD, OLED

PIDA20137

a-Si

IGZO

LTPSa-Si

IGZO-SHARP

LTPS

SHARP20124

IGZO

IGZO

a-Si10

IGZO8

IGZOa-Si

LTPS

LTPSLow Temperature

Poly-Si1

< Gen 6

IGZO

IGZO

IGZOa-Si

IGZO

LTPS

LTPS

Display Taiwan 2013-IGZO

IGZOa-Si

IGZO

TFT

IGZO4~5a-Si

Tr a n s p a r e n t A m o r p h o u s

LTPS

O x i d e S e m i c o n d u c t o r s T F Ts

5~11

Oxide TFT

IGZO150~350a-Si

LTPS

TA O S Tr a n s p a r e n t A m o r p h o u s O x i d e

250~400IGZO

S e m i c o n d u c t o r s TA O S I n G a Z n O x

2 0 1 37 N o . 1 0 6

61

2IGZO--_
Transparent Amorphous Oxide Semiconductors TFTs

3SEL__
AMOLED

TA O S - T F Ts

CAAC-IGZOSEL

TA O S - T F Ts H y d r o g e n

SHARPTFT

EffectRemaining conc. In TAOS thin films cf.

H-implantationIncorporation modeduring

depo.Post depo.P-Channel TFTshigh

mobilityamorphous semiconductorLT-

TFT

Processingprecursorphoton-assist

CAAC-IGZO

Quantum EffectTAOS-TFTs

TFT

Display Taiwan 2013

IGZO-__
2

62

CAAC-IGZO
idling stop displaychannel etch

IGZO-

structure TFTshort channel length design

SELSemiconductor

OLED drivingSmall size TFT

E n e rg y L a b o r a t o r y

CAAC-IGZOTFT-LCD

CAAC-IGZO Technology For Low Power &

High Definition Display

IGZO

PIDAIGZO

-Applied MaterialAKT

Crystal Phase of Oxide Semiconductor Material

_Dong Kil YimMulti-layer Metal

O x id e Semiconductor Mater ial

Oxide TFT Towards High Mobility & Uniform

CAACC Axis Aligned Crystal-IGZO

Vth By PVD & CVD Process Integration

2013 7 No.106

4IGZO-AKT
_Dong Kil YimMulti-layer Metal Oxide
TFT Towards High Mobility & Uniform Vth By
PVD & CVD Process Integration

5AMOLED--_
AMOLED

4Dong Kil YimAKT

AMOLED

IZOIGZOactive TFT

IGZO

Mobility30cm2Vsec, Von-1~1V

AMOLED

IZO 30~80APECVD

AMOLED

IGZO back channel interface

AKT Rotary cathode

D i s p l a y Ta i w a n 2 0 1 3

IGZO

-AMOLEDAMOLED

AKTGen 8.5

PECVDPVDIGZO

AMOLED5

AMOLED

AMOLED

Organic GenerationO-Display
O-LightingO-PVO-TFT

AMOLED

OLED Display-AMOLED

LCD2016

AMOLED

AMOLED-TVOLED Lighting

Samsung Electronics

-OLED2016

AMOLED

OLED Display

8OLED Display

AMOLED
LCD

OLED Lighting

2 0 1 37 N o . 1 0 6

63

64

6AMOLED-
__
AMOLED

7-__

4K2K

OLEDETL

HostHostDopant

4K2K

DopantHILUDC

Idemitsu KosanCheil Industry

On-

DoosanSun Fine Chemical

G l a s s D i s p l a y C RT P D P T F T- L C D

OLEDOn-Silicon Display

AMOLED-

MicrodisplayDMDMEMSLCoS

OLEDoSLEDoSOn-Silicon

AMOLED6

MicrodisplayLCoS 1P2P3P

AMOLED

NB Projector

TFT-LCDAMOLED

Mobile Phone Pico ProjectorOffice & Personal

ProjectorEVFDSCDVCNear Eye

AMOLED

Display GlassesLCoS On-Silicon

Phase ModulationLaser Beam

AMOLED

4K2K

OLED

3D

AMOLED8

2013 7 No.106

-
2010
190

8__
AMOLED

>Gen 8.5 LCD

>Gen 4.5 AMOLED>Gen 4.5 LTPS

Gen 8.5 LCDAMOLED-

Gen 5.5 LTPSAMOLED

-Gen 5.5 LTPS-

Smart TV

Gen 4.5 AMOLED-

Smart TVLCD

Gen 4.5 AMOLED-

TVSmart TV

Gen 5.5 AMOLED-Gen

4.5 AMOLED-Gen 4.5

AMOLED

Smart TV
401080P Full HD

4K UHD

3,840*2,160

-9

2 0 1 37 N o . 1 0 6

65

Mounted Display
Google Glass
Smart WatchiWatch

9-
PIDA20137

10-
PIDA20137

HD

GoogleGoogle Glass

66

-10

Display Taiwan 2013-

11

Head

2013 7 No.106

StaticDynamicMonochromeColor
FuzzyClearSmallLargeFlat
CurveOpaqueTransparent

3C

11-__

-
3D-
12

ARAugmented Reality

GPURF Sensor
Camera

3D

12-_
3D-

-
-
-ITO
13

13-_
-ITO

2 0 1 37 N o . 1 0 6

67


ITONano
ITO particleZnO-basedAg-basedCarbonbasedConductive polymer

--_
14-
-_
2013

2013
14

IP
ARM-
15
ARM
IPARM

QualcommnVidia

15IP
-ARM-_

MTK

TSMCSamsung Electronics
ARM
RISC

68

IntelCISC

ITOITO

LCDLEDPV

ARM

I n

ARM

ITO

Intel

2013 7 No.106

16
--_

A M O L E D Ta b l e t A M O L E D T V

16

AMOLED

2013AMOLED

1960~19801987

Oxide-TFTIGZOTAOS

2007

Flexible4K

2010

AMOLED

Smart TV

VUIVoice User

Display Taiwan 2013

Interface

Samsung
AMOLED3C
AMOLED Smart Phone

2 0 1 37 N o . 1 0 6

69