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Image Metrology
Image Metrology was founded in 1998. Today, we are
a world wide leading supplier of software for nanoand microscale image processing. Our mission is to
provide our customers with state-of-the-art image
processing software for microscopy, including:
Correction tools for creating the most accurate
presentation of the true surface
Automated analysis techniques ensuring high accuracy, quality and cost efciency
Visualization and reporting tools enabling convincing and impressive communication of results
We are a highly innovative company constantly developing new solutions meeting the demands from our
customers. We supply our products directly to end
users and through our global distribution network.
Over the years, the Scanning Probe Image Processor,
SPIP, has become the de-facto standard for image
processing at nanoscale. SPIP was rst released in
1995. However, the founder of Image Metrology, Dr.
Jan F. Jrgensen, started developing the software 5
years earlier as part of his industrial PhD project in
cooperation with IBM Denmark, the Danish Institute
of Fundamental Metrology, and the Technical University of Denmark.
S P I P m o d u l e s
Get Started
- Basic, 6
Calibrate and Characterize
- Calibration, 10
- Tip Characterization, 12
Reduce Noise and Enhance Features
- Correlation Averaging, 14
- Filter, 16
- Extended Fourier Analysis, 18
Measure and Analyze
- Grain Analysis, 20
- Roughness & Hardness Analysis, 22
- Force Curve Analysis, 24
- CITS Continuous Imaging Tunneling Spectroscopy, 26
Visualize
- 3D Visualization Studio, 28
- Movie & Time Series Analysis, 30
Gain Productivity
- Batch Processor & Active Reporter, 32
Organize
- ImageMet Explorer, 34
Customize
- Plug-in Interface, 36
S P I P m o d u l e s
Basic
The Basic Module covers features that are essential
to most professionals working with microscopy. The
Basic Module is the backbone of SPIP, and it is therefore required for any conguration of the software.
File Reading
With the Basic Module you can open all the le formats supported by SPIP. The le formats are listed
on page 38.
You can even open les that are not directly supported by SPIP. The Heuristic File Importer guesses
the le structure and allows you to provide additional
information about the format. This way, you will be
able to read almost any image le.
Image Processing
The Basic Module includes a wide range of image processing features. The following list shows some of the
most important features:
The Color Scale Editor allows you to easily dene your own
surface colors which will be used in both images and histograms.
Basic
Plane correction (attening)
Proling
With the proling tools you can perform detailed
measurements interactively using multiple cursors.
The Curve Fitting tools enable you to t a curve to
your prole and subtract it automatically. Furthermore, you can perform 1D Fourier analysis and interactively t cone angle and radius of curvature on your
proles.
Using the Average Prole tool you can average any
number of scan lines in your prole.
The Multi-proling facilities enables detailed comparison of images by monitoring proles at the exact
same positions while moving the cross section line.
S P I P m o d u l e s
Plane Correction (Flattening)
Plane correction or attening is one of the most important aspects of SPM image analysis, in particular,
when performing Z-calibration and Roughness Analysis.
This is due to the fact that several distortion phenomenons can be of the same or even higher magnitude
than the surface corrugations.
SPIP includes a set of powerful plane correction
tools that allow automated correction of plane distortions by polynomial functions and elimination of
z-offset errors for single scan lines.
The example on these pages demonstrates the plane
correction effect on a distorted image.
In the upper left image, there is signicant bow and
z-offset errors which are reected in the prole. The
histogram indicates the two levels, but they cannot
be estimated accurately.
In the corrected image on the right, the histogram
peaks are sharp and it is easy to determine the step
height precisely.
You can perform the plane correction by a single
mouse click, and it is fully supported by the Batch
Processor & Active Reporter.
Before
Basic
After
S P I P m o d u l e s
Calibration
Calibration can be a complicated affaire. By use of
the Calibration Module and calibration samples it is
done easily.
In addition, the Calibration Module enables you to
perform measurements with sub-pixel accuracy.
Vertical Calibration
Step heights can be measured very accurately and a
proper correction factor for the Z-dimension is calculated. The measurements can be based on automated
histogram analysis or the ISO 5436 standard method.
Critical Dimensions
In addition to delivering a robust step height measurement the ISO 5436 method can also deliver Critical Dimensions such as line width and side wall angles.
Lateral Calibration
The lateral calibration is done in three easy steps:
Acquire an image by your instrument
Load the image le into SPIP
Enter the reference values
Critical Dimensions
The upper and lower width are calculated together with the
sidewall slopes measured in degrees.
and with a few mouse clicks you will have the most
accurate calculations of a comprehensive set of correction parameters, including scaling factors, the X-Y
coupling factor, and linearity parameters described
by third order polynomials.
Advanced sub-pixel Fourier and correlation algorithms ensure the highest accuracy.
You can apply the parameters for off-line correction
or transfer them to your instrument for on-line correction.
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C alib r atio n
Vertical calibration
Lateral calibration
Off-line or on-line correction
Automatic measurement of critical
dimensions including step height,
width, and side wall angle
Advanced sub-pixel Fourier and
correlation algorithms ensure the
highest accuracy
Linearity Distortion
The image shows a wafe calibration structure with the best
tting lattice grid super imposed. A careful inspection reveals
that the grid does not t perfectly due to linearity distortion
of the scanner. The red arrows are error vectors pointing in
the direction of the lateral distortion and their sizes indicate
the relative magnitude of the errors.
Distortion in X and Y
The graphs show how the error relates to the position in the
image. The upper graph shows how the distortion in the x-direction relates to the x-position while the lower graph shows
the distortion for the y-direction. It is seen that the errors are
within a few pixels, but that there is a systematic behavior
which can be modeled well by third order polynomials.
11
S P I P m o d u l e s
Tip Characterization
The Tip Characterization Module allows you to characterize the tip or stylus used for scanning and to
compensate for tip shape artifacts by Tip Deconvolution.
The tip is the most critical part of scanning probe instruments, and knowledge about its form is essential
for any evaluation of a surface image.
The full geometry of the tip is calculated with a few
mouse clicks. The tip radius and cone angle are extracted automatically.
When combined with the 3D Visualization Studio,
the calculated tip can be shown in 3D view in 1:1:1
aspect ratio to give a correct impression of the tip
geometry.
SEM image of an AFM Si3N4 tip used for scanning a TGT01 silicon based tip characterizer from
Mikromasch.
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The original image shown in 3D. The structure is a TGT01 silicon based tip characterizer from Mikromasch. Note the double
tip created artifact.
X-prole of the tip. The tip is shown in 1:1 aspect ratio to get
the correct impression of the geometry. The estimated cone
angle and tip radius are shown.
13
S P I P m o d u l e s
Correlation Averaging
The Correlation Averaging Module allows you to enhance weak structures in repeated patterns, such
as atomic crystals, self assembled molecules, and
etched patterns.
When measuring on the nanometer scale the signalto-noise ratio is often very small. Traditional lters
cannot remove random noise without removing parts
of the real surface structure.
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Raw zoom.
Average image.
15
S P I P m o d u l e s
Filter
The Filter Module provides a comprehensive set of
tools for designing dedicated spatial lters. Use the
lters to eliminate noise and get robust measurements and correct representations of your images.
Examples of supported lter types:
Low-Pass (smoothing)
High-Pass
Sharpening
Laplacian of Gaussian
ISO 11562 Gaussian
ISO 13565 Filtering of Deep Valleys
Median
Statistical Difference
Edge Enhancement (Roberts, Prewitt, Sobel)
Unsharp Masking
Outlier Filter
Outlier Filtering
Before
After
The image on the left contains a ber structure suffering from contamination particles.
On the right side, an interpolation method
has been applied to change the values of the
contamination pixels, and it is seen that the
particles have been successfully removed
with very little or no damage to the surrounding data.
16
Filte r
Filtering Directional Noise
Before
After
Waviness
Roughness
The example shows how an image can be separated into Waviness and Roughness images by
use of a large Gaussian Filter kernel. This is
often desirable when measuring roughness in
a specic wavelength interval.
The smoothening effect of the large lter creates the Waviness image where only the long
waves are seen.
17
S P I P m o d u l e s
Extended Fourier Analysis
The Fourier Analysis Module enables you to detect
and quantify repetitive patterns, such as atomic lattice structures, and to perform advanced ltering.
Fourier spectrums contain important information
about surface structures and distortion phenomena,
but they can be difcult to interpret.
By a sub-pixel Fourier algorithm SPIP provides accurate information about selectable Fourier peaks, including wavelengths and the corresponding frequencies in Hz. This is particularly useful for diagnosing
noise and vibration problems.
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19
S P I P m o d u l e s
Grain Analysis
The Grain Analysis Module contains powerful tools
for detecting and quantifying grains (particles) and
pores, even in situations with background waviness.
The Grain Analysis Module offers a very fast threshold method for detecting segments by their height
values. In addition, you can apply the advanced Watershed Multi Scale Segmentation for more complex
images.
The results are shown graphically, and the detected
segments can be discriminated interactively based on
their size and shape.
Numerical results include the surface coverage ratio
and more than 40 parameters quantifying the individual grains and pores, for example, the area and
perimeter.
In addition, most parameters can be presented graphically in histograms.
Contour Image
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Grain A nalysis
Results
More than 40 parameters are calculated for each segment. Results are shown in a spread sheet
style grid and in histograms.
Area histogram.
Volume histogram.
21
S P I P m o d u l e s
Roughness Analysis
With the Roughness & Hardness Analysis Module you
can characterize images and cross section proles by
more than 30 parameters and visualize the results by
several graphs.
If you think it takes more than simple rst order statistics to describe a surface, you might choose the
built-in Birmingham 14 parameter set.
The Fourier angular spectrum is shown in a polar plot
for an easy evaluation of the isotropy of the surface.
Likewise, a polar plot is applied to show the fractal
dimension as function of direction.
Calculation of 1D roughness parameters from image
cross sections or prolometer curves can be done in
agreement with ISO standards when combined with
the Filter Module.
In combination with the ImageMet Explorer it is possible to save the results automatically into the database so that you can retrieve, report and compare
results any time later.
Hardness Analysis
With just a single mouse click you can detect indentation marks and automatically measure Vickers, Contact, and Indentation hardness for your experiments.
Indentation Experiment
Indentations are easily detected by a single mouse click.
22
Abbott Curve
Raw Image
The image contains a surface of molded polymer and is dominated by a directional structure created by the original polishing process of the mold.
Roughness Chart
Angular Spectrum
Fractal Dimension
The angular spectrum is shown in a polar plot for easy evaluation of the isotropy of the surface.
23
S P I P m o d u l e s
Force Curve Analysis
The Force Curve Analysis Module has strong tools for
analyzing, transforming and reporting force curves
and force volume images.
SPIP automatically detects the maximum loading
and pulling force, the point of detachment and ts
various models to the data.
In pulling experiments the Worm Like Chain Model
can be tted to each rupture event.
SPIP can calculate Youngs modulus from indentation
curves using either the sphere-at Hertz model or the
cone-at Sneddon model.
In addition to analyzing individual curves or average
curves from force volume images SPIP can create adhesion maps, Youngs modulus maps, stiffness maps,
constant force maps and many more.
Results from individual force curves are shown with
statistics, which can easily be exported to other programs.
The raw data has been baseline and hysteresis corrected and
transformed into force vs. separation. Thereafter, the Worm
Like Chain model has been tted.
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Multiple force curve pairs from the same force volume image.
The orange curve represents the calculated mean pair from
the box in the force volume image.
25
S P I P m o d u l e s
CITS Continuous Imaging Tunneling
Spectroscopy
26
Topographic image.
IV Curves
27
S P I P m o d u l e s
3D Visualization Studio
With the 3D Visualization Studio you can generate
spectacular 3D images and animations.
The 3D Visualization Studio enables you to inspect
image details by interactive rotation, positioning and
scaling of your images.
You can work interactively with the surface colors.
Use the SPIP color bar, a xed color, or overlay the
colors from another image on your 3D surface. In addition, you can add a wireframe to enhance certain
features.
Create spectacular images and reveal otherwise hidden features by use of multiple light sources interacting with surface color properties.
By dening a set of key frames, you can easily create
impressive 3D animations. These can be exported to
AVI and MPEG les.
SPIP will take full advantage of 3D graphics cards,
and the intuitive mouse interface provides the feeling
of real-time control.
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S P I P m o d u l e s
Movie & Time Series Analysis
The Movie & Time Series Analysis Module enables you
to combine image series into drift corrected movies
and study time dependent behavior.
Time series of images are best presented as movies,
but due to drift and long acquisition time, direct creation may cause undesired results. However, with the
Movie & Time Series Analysis Module you can achieve
drift free results.
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S P I P m o d u l e s
Batch Processor & Active Reporter
The Batch Processor & Active Reporter Module is the
perfect tool and time saver for analyzing large series
of data les and creating impressive reports.
Design your own processing sequences easily by
mouse clicks and apply them on hundreds of images.
There are no programming skills required.
Create customized Microsoft Word reports with full
layout control by the Active Reporter.
Generate HTML reports ready for web publication including graphical outputs, individual image results,
and statistics.
The Batch Processor & Active Reporter Module comes
with predened batch sequences for various tasks,
such as calibration, pitch and step height measurements, roughness analysis, force curve analysis, and
printed output.
The reports shown on next page were generated by
the Batch Processor and the Active Reporter. The top
pages show the result from a roughness batch analysis. The report on the bottom of the right hand page
is a HTML reports for a batch of force curve experiments.
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S P I P m o d u l e s
Imagemet Explorer
Imagemet Explorer is a le and data management
tool.
Important analytical results from SPIP can be automatically stored in the database for easy retrieval of
results.
You have the exibility to enter descriptions, assign
categories, and create hyperlinks to individual les.
ImageMet Explorer automatically recognizes all the
le formats supported by SPIP and displays them as
thumbnails of optional size.
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I m a g e M e t E x p l o r e r
ImageMet Browser.
ImageMet Finder.
ImageMet Reporter.
35
S P I P m o d u l e s
Plug-in Interface
The Plug-in Interface Module is included free of
charge with Basic Module. It allows you to program
your own plug-in programs for SPIP.
In case you want to perform some dedicated analysis, you can use the Plug-in Interface library to create
your own code and interface it to SPIP.
You will get all the advantages of the SPIP processing features, including le handling and visualization
tools while you concentrate on your own specialized
data processing and data creation functions.
{
CSpipExchange WindowData;
if (!WindowData.Get _ ImageData())
{::AfxMessageBox(No data in window,MB _ OK,NULL); return
0;}
if (!AverageData){
AverageData = new CSpipExchange;
if (!AverageData>Create _ ImageData(WindowData.SizeX,WindowData.SizeY))
{::AfxMessageBox(No Average Data Created,MB _ OK,NULL);
return 0;}
for (int i=0;i<AverageData->SizeTotal; i++)
AverageData->Data[i] = WindowData.Data[i];
AverageCnt = 1;
}
else {
if (AverageData->SizeX != WindowData.SizeX ||
AverageData->SizeY != WindowData.SizeY )
{::AfxMessageBox(Data is not of same form,MB _ OK,NULL);
return 0;}for (int i=0;i<AverageData->SizeTotal; i++)
AverageData->Data[i] = (AverageData->Data[i]*AverageCnt +
+ WindowData.Data[i])/(AverageCnt+1);
AverageCnt++;
}
char Caption[30];
sprintf(Caption, Average %d, AverageCnt );
AverageData->Put _ Filename( Caption );
AverageData->Show _ ImageData(&AverageWindow, Caption,0);
return true;
}
36
=
Image Stitching
With this plug-in the user added the ability to
stich two images into one image.
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A.P.E. Research
Aarhus University
ADE Phase Shift
Agilent Technologies
Ambios Technology
Anfatec
Asylum Research
ATOS GmbH
Dektak
Digital Instruments
Digital Surf
DME Danish Micro Engineering
EXFO Burleigh
FOGALE nanotech
GFMesstechnik
Hitachi Kenki FineTech
Hysitron, Inc.
IBM
JEOL
JPK Instruments
KLA-Tencor
Molecular Imaging
MTS Nano Instruments
NanoFocus
NanoMagnetics
Nanonics Imaging
Nanonis
Nanosurf
Nanotec Electronica
NT-MDT
Omicron NanoTechnology
Oxford Instruments
Pacic Nanotechnology
Park Scientic
Park Systems
PSIA Corporation
Quesant Instrument
RHK Technology
Sensofar
Shimadzu Corporation
SII Nano Technology
SNU Precision
ASCII
BCR
Bitmap
JPEG
SDF
TIFF
D o w n l o a d Fr e e Ev a l u a t i o n
Ve r s i o n
Please visit our website and download a free evaluation version of SPIP:
www.imagemet.com/download
Requirements
CPU Speed:
Memory:
Graphics Card:
Hard Disk:
1 GHz
1 GB
3D accelerated,
1024x768 pixels resolution
100 MB free
Network Installation
With more users in the same group, you can obtain
extensive multi-user discounts on your SPIP license.
In addition, you can install a multi user license as a
client/server solution. This makes is easy to maintain
the license, as most updates only have to be installed
on the server.
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SPIP modules:
Basic Module with Plug-In Interface
Calibration
Tip Characterization
Correlation Averaging
Filter
Extended Fourier Analysis
Grain Analysis
Roughness & Hardness Analysis
Force Curve Analysis
CITS Continuous Imaging Tunneling Spectroscopy
3D Visualization Studio
Movie & Time Series Analysis
Batch Processing
Imagemet Explorer
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