Gas Filtration Metal Data Sheet A94a

Gasket-Sert PSP Filter

Description Specifications
The Gasket-Sert PSP filter is designed Materials Operating Conditions
to protect major components of gas Medium and gasket: 316L stainless Recommended flow range:
panels employed in semiconductor gas steel 0-28 slpm / 0-1 scfm
distribution systems. Maximum operating temperature:
Removal Rating
Inert gases: 300C / 572F
True in-line design and easy 0.4 m at 99.9% efficiency
Anhydrous corrosive gases:
installation 30C / 86F
Alignment retainer for ease of Maximum differential pressure:
installation Inside out:
Fits in place of standard 14 VCR1 690 kPa @ 20C / 100 psid @ 68F
or 14 UJR compatible gasket Outside in:
Broad compatibility with process 1380 kPa @ 20C / 200 psid @ 68F
gases
Low differential pressure 1 VCR is a trademark of Swagelok Co.
All 316L stainless steel construction
Dried with high purity nitrogen
Cleanroom packaged
No hold-up volume
No particle contribution above
background
No housing required
Retrofit of existing panels without
reconfiguring of systems
Zero displacement
Protection for regulators and MFCs
Pressure Drop vs. Gas Flow Rate

Flow Rate (scfm) @ 20C/68F Flow Rate (scfm) @ 20C/68F

0.0 0.25 0.5 0.75 1.0 0 10 20 30 40 50
20 4
2.5 25

Clean Pressure Drop (psid)

Clean Pressure Drop (psid)

Clean Pressure Drop (kPa)

Clean Pressure Drop (kPa)

15 2.0 20 3
206 kPa inlet/30 psig 10.3 Mpa inlet/1500 psig
1.5 15
10 2
1.0 10
5 1
620 kPa inlet/90 psig 0.5 5
20.7 Mpa inlet/3000 psig
0 0.0 0 0
0 7 14 21 28 0 500 1000 1500
Flow Rate (slpm) @ 20C/68F Flow Rate (slpm) @ 20C/68F

Dimensions

24.5 mm
.96"

4.0 mm
.16"

12.7 mm 3.30 mm
.50" .13"

Part Numbers/Ordering Information

Part Number Material of Construction Fitting Type

CNF1104USG4 All 316L stainless steel 1

4 VCR or 14 UJR
Unit conversion: 1 bar = 100 kilopascals

25 Harbor Park Drive Visit us on the Web at www.pall.com/micro

Port Washington, New York 11050 USA Pall Corporation has offices and plants throughout the world in locations including:
Argentina, Australia, Austria, Belgium, Brazil, Canada, China, France, Germany, Hong Kong,
1.800.360.7255 toll free (Only in US) India, Indonesia, Ireland, Italy, Japan, Korea, Malaysia, Mexico, the Netherlands, New Zealand,
Norway, Poland, Puerto Rico, Russia, Singapore, South Africa, Spain, Sweden, Switzerland,
1.516.484.5400 phone Taiwan, Thailand, United Kingdom, United States, and Venezuela. Distributors are located in
1.516.625.3610 fax all major industrial areas of the world.

Copyright 2006, Pall Corporation. Pall, , and Gasket-Sert are trademarks of Pall Corporation. Indicates a Pall
trademark registered in the USA. is a service mark of Pall Corporation.

A94a