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FIG. 1. Schematic of the resonator system combined with PDMS and glass. (a) Dimensions of the LC circuit are s = w = 0.2 mm and R avg = 1.04 mm, and the
hole radius of the PDMA is R hole = 0.90 mm. (b) The photograph shows a fabricated sample. The black and the blue arrows in (a) indicate the upper (input port)
and lower (output port) lines, respectively.
FIG. 3. RF system for sample measurement. (a) The overall measurement system with a test fixture zig system is schematically shown. (b) A photograph of the
embedded sample in the test fixture zig system. (c) Each wetting size of the 1-l and 2-l PBS droplets on the glass is shown.
the molding frame, after which the bubbles were removed by the PDMS by exposure to O2 plasma for 1 min for strong
vacuum process. After soft baking for 50 min at 80 C, the bonding. The overall procedure of glass-bonded PDMS with
PDMS pattern was demolded. The bulky PDMS was diced hole is shown in Fig. 2.
with rectangular parallelepipeds and their holes were formed Figure 3(a) shows a schematic of the measurement
by a punching tool. Finally, the glass was combined with system, which consisted of a universal test fixture (3680K,
094706-3 H.-J. Lee and J.-G. Yook Rev. Sci. Instrum. 87, 094706 (2016)
Anritsu Co.) associated with a two-port vector network TABLE I. Comparison between the resonator systems with and without a
analyzer (E8364A, Agilent Co.). The sample was measured PBS droplet.
as follows: First, the overall measurement system was Resonator system Resonator system
calibrated with a short-open-load-thru (SOLT) method using Configuration quantities without a PBS droplet with a PBS droplet
an electronic calibration kit (N4693A, Agilent Co.). Next,
the sample was embedded on the zig system, as shown in Resonant frequency (GHz) 11.73 (11.74) 11.50 (11.50)
Fig. 3(b), and was then perfectly matched with glass-bonded S21 level (dB) 68.70 (57.60) 36.80 (35.70)
Loaded Q-factor 1565 60
PDMS in the desired frequency region. Meanwhile, to find the
suitable volume of a droplet in the PDMS hole, each droplet
with volumes of 1-l and 2-l was considered on the glass,
as shown in Fig. 3(c). In the resonator system, a 1-l volume
phase of the S21-parameter in the resonator system with a
droplet was found to be suitable for the PDMS hole. Here,
droplet. As shown in Fig. 4(c), when the 1-l volume droplet
the used droplet volume was the smallest size that could be
was dropped in the PDMS hole using a pipette, the resonator
implemented by handling a pipette.
system exhibited the low-Q characteristic, with an S21 level and
Q-value of about 36.8 dB and 60 at 11.50 GHz, respectively.
On the other hand, when the droplet was completely removed
IV. RESULTS AND ANALYSIS
from the PDMS hole, the resonance of the S21-parameter was
In order to validate the sensing feasibility of the proposed immediately restored to the original state.
resonator system, we investigated the change of resonance From the measured results, the sensing characteristics
characteristics, such as frequency, signal level, and Q-value of the resonator system are summarized in Table I and the
change, of S21-parameter (or transmission coefficient) using a parenthesized values represent the simulated results. The tabu-
droplet of PBS solution (1, pH 7.4) via the RF measurement lated data reveal that the resonant frequency of the resonator
system. system with a droplet was clearly shifted toward a lower fre-
Figs. 4(a) and 4(b) show the results of the measured quency region, as predicted in Eq. (1), and simultaneously,
magnitude and phase of the S21-parameter in the resonator the S21 signal level was considerably increased compared to
system without a droplet, i.e., the bare resonator system. These the bare resonator system due to high relative permittivity and
results indicated that the resonator was exactly matched with conductivity of the PBS solution. However, the Q-value was
50 impedance via the glass-bonded PDMS because the drastically decreased because a water droplet is a kind of lossy
arrow indicates the central point on the Smith chart, as shown dielectric material.
in Fig. 4(a). Here, the glass-bonded PDMS was used as a For the simulation, the overall resonator system with a
tunable material for impedance matching of 50 . Using this droplet was fabricated as shown in Fig. 5. The relative dielec-
principle, the proposed resonator system exhibited a high-Q tric constant ( r ) and loss factor (tan ) of the semi-droplet
characteristic, with an S21 level and Q-value of about 68.7 dB were obtained from the Debye formula (supplementary mate-
and 1565 at 11.73 GHz, respectively. Similarly, Figs. 4(c) rial) and the conductivity was set to be variable. A 1-l volume
and 4(d) show the results of the measured magnitude and semi-droplet (R = 0.8 mm) on the glass shown in Fig. 5(a) was
FIG. 4. Simulated and measured results of the resonator system with and without a PBS droplet. (a) Each S21-magnitude of the simulated and measured
resonator system without a droplet is shown. The red arrow of the inset Smith chart indicates that the resonator is exactly matched with 50 impedance. (b) Its
corresponding phase is shown. (c) The S21-magnitude of the simulated and measured resonator with a droplet is shown. (d) Its corresponding phase is shown.
094706-4 H.-J. Lee and J.-G. Yook Rev. Sci. Instrum. 87, 094706 (2016)
FIG. 5. Schematic of the resonator system with a PBS droplet. (a) Topology of the droplet controlled by a pipette. (b) Electric and (c) magnetic field distributions
within the droplet.
minutely meshed by element-length-based refinement, with a In the future, we expect our resonator system to be capable
maximum length of 0.1 mm. From the simulated results (red of discriminating between solutions with different dielectric
dashed line) shown in Fig. 4, the estimated relative constant, constants.
loss factor, and conductivity of the PBS semi-droplet were esti-
mated to be approximately 63, 0.76, and 1.6 S/m, respectively.
This droplet exhibited a high conductivity compared to that SUPPLEMENTARY MATERIAL
of ordinary water because the used PBS droplet was a water-
See supplementary material for the Debye model as a
based salt solution containing sodium hydrogen phosphate, so-
function of the frequency for water.
dium chloride, potassium chloride, and potassium dihydrogen
phosphate. 1A. Kumar, S. Sharma, and G. Singh, Prog. Electromagn. Res. 69, 47 (2007).
Figs. 5(b) and 5(c) show that the effect of the electric 2J. Sheen, J. Appl. Phys. 102, 014102 (2007).
3J. Sheen, Measurement 42, 57 (2009).
field was strongly dominant over that of the magnetic field and 4M. Kapoor, K. S. Daya, and G. S. Tyagi, Int. J. Microwave Wireless Technol.
that the electric field represents an inhomogeneous distribution
4, 241 (2012).
within the droplet because of the asymmetric surface current, 5L. F. Chen, C. K. Ong, C. P. Neo, V. V. Varadan, and V. K. Varadan, Micro-
as shown in Fig. 1(a). wave Electronics: Measurement and Materials Characterization (John
Wiley & Sons Inc., New Jersey, 2004).
6U. Kaatze, Meas. Sci. Technol. 18, 967 (2007).
7S. Gu, T. Lin, and T. Lasri, Appl. Phys. Lett. 108, 242903 (2016).
V. CONCLUSION 8J. Kim, A. Babajanyan, A. Hovsepyan, K. Lee, and B. Friedman, Rev. Sci.
our resonator system can be considerably changed compared Freeman, Lab Chip 9, 3406 (2009).
14K. Grenier, D. Dubuc, T. Chen, F. Artis, T. Chrtiennot, M. Poupot, and J.-J.
to those of the bare resonator system without a droplet. Fi-
Fourni, IEEE Trans. Microwave Theory Tech. 61, 2023 (2013).
nally, the small and compact scheme of the resonator system 15G. Yesiloz, M. S. Boybay, and C. L. Ren, Lab Chip 15, 4008 (2015).
gives it compatibility with an RF wireless sensing system. 16W. Andress and D. Ham, IEEE J. Solid-State Circuits 40, 638 (2005).