DIAMOND LIKE

CARBON COATINGS
DLC PROCESSES FOR 3-5m
AND 8-12m INSIDE YOUR BAK
THE NEW WAY TO MAKE DLC COATINGS
Evatec brings conventional PVD and PECVD
processes together within the same system to enable
high performance protected AR coatings on Si or Ge.

REDUCE YOUR MANUFACTURING COSTS FOR CONTROLLING THE DEPOSITION PROCESS

HIGH PERFORMANCE IR COATINGS
PVD and PECVD processes can now be brought together in the sp2 + sp3
BAK platform. Save time and costs in the coating of DLC type amorphous
layers used to protect thermal imaging and guidance systems for
polymeric
high performance consumer, industrial and military applications
soft - hard
-- Eliminate the vacuum break required between conventional
PVD and PECVD processes DLC is not one material but refers to a whole class of
-- C
 oat the whole batch of optics together for best process

repeatability amorphous hydrogen containing carbon materials with
various degrees of cross linking, hydrogen content and
-- Low temperature processing <150C (compared with
300-600C for conventional DLC processes) to prevent stress. Evatec processes technology delivers films with
substrate damage a hybridisation between sp3 and sp2 in the range 0.07 to
0.72 at H contents of around 40at%
-- Reduce the number of manufacturing steps - eliminating
the need for an additional DLC tool and saving cleanroom
space TAKE A LOOK AT THE RESULTS
Step 1: PVD Process(es) FT-IR measurement on Silicon Wedge with DLC Coating
Multilayer stack deposition for high performance AR 30

coatings using Evatec digital e gun technology 25

Step 2: PECVD 20

Deposition of hydrogenous amorphous carbon films

%R

15
of controlled refractive index using proprietary plasma
10
source technology - Layer thickness
362nm
5
- Refractive index
Process Control 1.67@2160nm

Combination of quartz and broadband optical monitoring for 0

1500 3500 5500 7500 9500 11500 13500 15500 17500 19500
layer end point termination with in situ direct measurement Wl [nm]

of optical properties Two sided AR Coating with additional DLC on single side
1

TYPICAL BAK1101 TOOL SET UP 0.9

-- Throw distance approx. 1000mm 0.8

0.7
-- 2 x Digital E-Gun ESQ212
0.6
-- 4 x Quartz front side heaters
%R

0.5

-- Proprietary plasma source 0.4 Specification:

absolute
-- E
 nhanced gas throughput vacuum 0.3 reflection 3720-
4470nm<0.4%
pumping system. DLC process in 0.2

range 10-4 to 10-3 mbar 0.1

0
-- 4 MFCs for process gases 3500 3700 3900 4100 4300 4500 4700
Wl [nm]
-- Integrated quartz and optical
thickness monitoring
TYPICAL FILM PROPERTIES
WANT TO KNOW MORE -- Film Hardness: >20 GPa -- Environmental & durability
For more information contact your local -- Intrinsic stress: <100MPa performance tested according
Evatec sales office or visit us online at: -- Refractive index : 1.67 to UK military tests TS1888
(water/sand wiper TS)
www.evatecnet.com/markets/precision-optics -- Compatibility: Bio & Blood
(stable against acids & alkalis)

Evatec Ltd. Tel: + 41 81 720 1080 Product descriptions, photos

and data are supplied within the
Lochrietstrasse 14 Fax: + 41 81 720 1081 brochure for general information
only and may be superseded by
CH-8890 Flums info@evatecnet.com any data contained within Evatec
Switzerland www.evatecnet.com quotations, manuals or specifications.