Gyroscope Application Examples

This section shows some examples of Gyroscope models inside the CoventorWare-
ARCHITECT system level simulator. Many of the MEMS gyroscopes have complex
mechanical designs and in addition they require solutions to the 3-D electro-mechanical
physics.

We will show examples of schematic

layouts and the associated 3-D solid
models in addition to the numerical
simulation results. All the details shown in
this SEM picture (courtesy of Bosch) are
programmed into the schematic below.
Besides accuracy, one of the most
important aspects when simulating
gyroscopes is the simulation speed.

The Gyro schematic is built from

standard library components for the
electro-mechanics and electronics. Each
component is fully parameterized to allow
flexible simulations.

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Gyroscope Application
ARCHITECT simulations include, DC
analysis, Modal analysis, Quadrature
analysis, Noise analysis, Shock analysis,
statistical fabrication variation analysis,
Transient (time-dependent) analysis,
sensitivity analysis and many more options.
In each analysis the complete Finite
Element results from Package deformation
simulations can be included.

The graph on top shows a transient

simulation result when the gyro is
subjected to sudden change in angular
rate. The simulation includes all 3-D
mechanical movement as well as 3-D
electrostatic physics and the electrical
actuation and readout. The total simulation
time is less than 4 minutes!

The schematic represents a complex

Dual-Mass Gyroscope. The schematic
makes use of high-level elements to model
both geometrically and physically all the
suspensions, perforated masses and
electrostatic sensing and actuating parts of
the Gyroscope. The schematic includes 3-
D mechanical movement for applying
gyration, gravity and other forces of
motion. In addition the electronic circuit
can be connected as analog and digital
components, as control blocks or in a
Co-Simulation with Matlab-Simulink or
other 3rd party HDL-simulators.

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Gyroscope Application

The 3-D geometrical model is directly generated from the schematic and process technology
file. After meshing this model is used for detailed finite element analysis as a verification of the
behavioral model simulations. The picture to the right shows one of the modes of vibration of
the Gyroscope.

The transient simulation below shows one of the many problems that can by simulated using
Architect. The first graph shows the vertical oscillation of a gyro plate which leads to an
unintended sense signal called Quadrature. The Quadrature error comes from a coupling of
the comb actuated drive mode (graph on the bottom) into the sense signal even if no angular
rate is applied to the sensor. The various sources of Quadrature like comb levitation forces,
plate curvature and asymmetric side wall angles in the plate suspensions can be well
captured and investigated using Architects sophisticated MEMS models. The Quadrature in
the shown plot is caused by comb levitation forces which keep increasing as the movable
combs approache the stator backbone. Causing motions in z-direction in-phase with the
comb actuated in-plane drive mode.

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Gyroscope Applications
Being able to reproduce measured
Quadrature signals with Architect enables
the designer to test Quadrature
compensation strategies like feed back
loops, signal demodulation and filtering
within the same system simulation
environment.

Environmental noise of zero average can

create non-zero bias on the gyro signal
output called Vibration Rectification Error.
Vibration Rectification Errors can be
simulated using Architect by applying a
noise source to the substrate/reference
frame of the Architect schematic. The
applied signal of the noise source can be
seen in the bottom graph of the transient
simulation. The corresponding vertical plate
motions (z) and the capacitance changes
(cap) can be seen in the two top graphs.

This example below shows the effect of

white noise, but other spectral content is
possible
as well.