14644-9

2013

I S O 14644-9:2012
Cleanrooms and associated controlled environments Part 9:
Classification of surface cleanliness by particle concentration
(IDT)

2014
 14644-9 2013

27 2002 . No 184- ,
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(ISO 14644-9:2012 Cleanrooms and associated controlled
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Cleanrooms and associated controlled environments. Part 9.

Classificaiion of surface cleanliness by panicle concentration

2014-12-01

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3.9 (surface particle concentration):
.

:
AFM - - :
CNC - ;
EDX - ;
ESCA - ,
:
ESD - ;
IR () - ( );
- ;
- ;
SEM - ;
SPC - ;
UV () - ;
WDX - .

2
 14644*9 2013

5.1 SCP

( SCP)

N.
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SCP2
(20 000) 10 000 2 000 1 000 (200) (100)
SCP 3
(200 000) 100 000 20 000 10 000 2 000 1 000 (200) (100)
SCP 4
1 000 000 200 000 100 000 20000 10000 2 000 1 000 (200)
SCP 5
(10000 2 000 000 1 000 000 200 000 100 000 20 000 10 000 2 000
SCP 6 000)
10 000 2000 000 1000 000 200 000 100 000 20 000
SCP 7 000
10 000 2 000 000 1 000 000 200 000
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, 1. .
SCP , 1 7
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- (. . ) SCP
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3
 14644-9 2013

X - , D. ; Y - t D. ^^. / *:
1 - SCP 1: 2- SCP 2; 3- SCP 3: 4- SCP 4; 5- SCP 5:
- SCP 6:7- SCP 7:8- SCP 8
1 - SCP

SCP .
.

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104 2 10 (0 = 10).
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SCP.
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4
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5
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6
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12
 14644-9 2013

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>25
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>1.0
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)

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(
)

>0.07
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>0.01
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13
 14644-9 2013

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14
 14644-9 2013

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02 >1
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(> 0.05 )

( 0.3 >0.3
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15
 14644-9 2013

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. ._______________________
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D.2.4

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(. 5725-2. /TS
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16
 14644-9 2013

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17
 14644-9 2013

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2500 (2.5 ). .
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6.3,
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18
 14644-9 2013

()

.1

14644-6-2010
14644-6:2007 .
6.

- 8
:
- .

Geometrical Product Specifications (GPS) Surface texture: Profile method

(1] ISO 4287:1997
Terms, definitions and surface texture parameters
Geometrical Product Specifications (GPS) Surface texture: Profile method
[2] ISO 4288:1996
Rules and procedures lor the assessment of surface texture
Accuracy (trueness and precision) of measurement methods and results Pari
(3] ISO 5725-2:1994 2: Basic method for the determination of repeatability and reproducibility of a
standard measurement method
[4] IS010015:1999 Quality management Guidelines for training
Statistical methods Guidelines for the evaluation of conformity with specified
(5] IS010576-1:2003
requirements Part t: General principles
Road vehicles Cleanliness ot components of fluid circuits Part 2: Method
[6] IS0 16232-2:2007
of extraction of contaminants by agitabon
Road vehicles Cleanliness ot components of fluid circuits Part 3: Method
[7] IS016232-3:2007
of extraction of contaminants by pressure rinsing
Road vehicles Cleanliness of components of fluid circuits Part 4: Method
(8] IS016232-4:2007
of extraction of contaminants by ultrasonic techniques
Road vehicles Cleanliness ot components of fluid circuits Part 5: Method
(9] IS0 16232-5:2007
of extraction of contaminants on functional test bench
Guidance for the use of repeatability, reproduoMity and trueness estimates in
(10] ISO/TS 21748:2004
measurement uncertainty estimation
Electrostatics Part 5-1: Protection of electronic devices Irom electrostatic
(11] IEC 61340-5-1:2007
phenomena General requirements
(12] ASTM E18-07 Standard Test Methods for Rockwell Hardness of Metallic Materials
[13] ASTM E1216-06 Standard Practice tor Sampling for Particulate Contamination by Tape Lift
Standard Test Methods for Mfcroscopical Sizing and Counting Particles from
(14] ASTM F312-08
Aerospace Fluids on Membrane Filters
Standard Method tor Measuring and Counting Particulate Contamination on
(15] ASTM F24-09
Surfaces
Standard Practice tor Sampling for Particles in Aerospace Fluids and
[16] ASTM F303-08
Components
Electrostatics Part 5-2: Protection of electronic devices trom electrostatic
(17] CLOTR 61340-5-2:2008
phenomena: User guide
[18] IEST-RP-CC022.2-2004 Electrostatic charge in cleanrooms and other controlled environments
[19] IEST-STD-CC12460 Product Cleanfiness Levels and Contamination Control Program
[20] SEMI 4-0301 Guide for Measuring Static Charge on Objects and Surfaces
Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic
[21] SEMI E78-0706
Attraction (ESA) tor Equipment
Adamson. A.W. Physical Chemistry of Surfaces. John Wiley & Sons, New York.
[ 22]
1976

19
 14644-9 2013

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19.020 94 1000

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