RAD2500M8

RAD-2500m
Semi-Automatic Wafer Mounting System
Operation Manual
Date of Preparation : 09 April 2013

Document No. : Doc-00034923G_E
Contents and specification of this manual are subject to change without prior
notification for improvement.
Unit notification is based on the SI units; reference values are in parentheses.
All pressure values are represented as gauge pressures.
Date of Implementation : 1 June 2009

Template No. : Doc-00035035_E
Chapter 1 Preface .............................................................................. 5
1-1 To the Customer ..............................................................................................5
1-2 Cautions on Use ..............................................................................................6
1-2-1 Definition on workers that are involved with this machine ........................................................ 10
1-2-2 Using the manuals .................................................................................................................. 10
1-2-3 Conventions in this manual ..................................................................................................... 10
1-3 Hazard Labels for Safety ............................................................................... 11

1-4 For Safe Use of the Machine ........................................................................16
1-5 Protective Gears ............................................................................................18
1-6 Safety Interlock (CE Specification) ................................................................19
1-6-1 Lockout ................................................................................................................................... 19
1-6-2 Emergency stop button (EMO button/Optional) ....................................................................... 20
1-6-3 Safety Interlock (CE Specification) .......................................................................................... 22
1-7 Status Indicator (Optional) .............................................................................23

1-8 Faceplate .......................................................................................................24
1-8-1 Standard specification ............................................................................................................. 24
1-8-2 Option specification................................................................................................................. 25
1-9 Emergency Contact .......................................................................................26

1-10 Descriptions of Basic Terms ........................................................................27
APPENDIX/MATERIAL SAFETY DATA SHEET (MSDS) ....................................28
Chapter 2 Machine Overview .......................................................... 29

2-1 Overview ........................................................................................................29
2-1-1 Standard Specification............................................................................................................. 29
2-1-2 Option specification................................................................................................................. 30
2-2 Features.........................................................................................................31
2-3 Machine Configuration (Standard Specification) ...........................................32
2-3-1 Front view ............................................................................................................................... 32
2-3-2 Right side view........................................................................................................................ 33
2-3-3 Left side view .......................................................................................................................... 34
2-4 Machine Configuration (Option Specification) ...............................................35

2-4-1 Front view ............................................................................................................................... 35
2-4-2 Right side view........................................................................................................................ 36
2-4-3 Left side view .......................................................................................................................... 37
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Chapter 3 Names and Functions of Each Unit .............................. 38
3-1 Operation Panel.............................................................................................38
3-1-1 Standard Specification............................................................................................................. 38
3-1-2 Option Specification ................................................................................................................ 39
3-1-3 Operation buttons ................................................................................................................... 40
3-1-4 Inside the control box .............................................................................................................. 41
3-1-5 Switches on front of control box .............................................................................................. 42
3-1-6 Switch on rear of control box ................................................................................................... 44
3-1-7 Sensors on top of left cover..................................................................................................... 45
3-1-8 Power supply box (CE specification) ...................................................................................... 46
3-2 Machine Component Names .........................................................................47

3-3 Unwinder........................................................................................................49
3-3-1 One-touch loading and unloading of tape roll .......................................................................... 49
3-4 Tension Roller ................................................................................................50

3-4-1 Tape tension adjustment ......................................................................................................... 50
3-4-2 Pinch roller lock and unlock..................................................................................................... 50
3-5 Tape Detection Unit .......................................................................................51

3-5-1 Tape detection ........................................................................................................................ 51
3-5-2 Adjustment of Tape Detection Unit position ............................................................................. 51
3-5-3 Tape detection (Optional) ........................................................................................................ 52
Micro switch type ......................................................................................................................... 52
Thrubeam type fiber sensor/ Micro switch universal type ............................................................. 52
Double micro switch type ............................................................................................................. 53
3-6 Press Roller Unit............................................................................................54

3-6-1 Press roller.............................................................................................................................. 54
3-7 Attachment Table Unit....................................................................................55

3-7-1 Attachment Table Unit ............................................................................................................. 56
3-8 Table Drive Unit .............................................................................................57

3-8-1 Table Drive Unit....................................................................................................................... 58
3-9 Drive Roller ....................................................................................................59

3-9-1 Drive roller .............................................................................................................................. 59
3-10 Winder .........................................................................................................60

3-10-1 Winder .................................................................................................................................. 60
3-11 Options.........................................................................................................61
3-11-1 Ionizer ................................................................................................................................... 61
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3-11-2 Heater ................................................................................................................................... 62
Built-in heater table ...................................................................................................................... 62
Heater control box (Temperature controller, Heater ON/OFF, Attachment speed switch) .............. 63
TABLE TEMPERATURE controller ............................................................................................... 63
3-11-3 Warm Air Unit ........................................................................................................................ 66
Warm Air Unit ............................................................................................................................... 66
Warm air heater control box (Power, Temperature controller, Heater ON/OFF, Attachment speed
switch) ......................................................................................................................................... 66
Temperature controller ................................................................................................................. 67
3-11-4 Cover .................................................................................................................................... 70
Upper cover ................................................................................................................................. 70
Upper cover with safety interlock.................................................................................................. 70
Chapter 4 Specifications ................................................................. 72

4-1 Power Supply ................................................................................................72
4-2 Air Supply ......................................................................................................72
4-3 Machine Dimensions .....................................................................................73
4-4 Processing Capacity ......................................................................................74
4-5 Ring Frame Size ............................................................................................74
4-6 Pre-cut Dicing Tape Attachment Accuracy ....................................................75
4-7 Tape Size .......................................................................................................76
Chapter 5 Machine Start-up and Operation ................................... 78

5-1 Supplying Power............................................................................................78
5-2 Setting Pre-cut Tape ......................................................................................79
5-2-1 Removing current pre-cut tape roll .......................................................................................... 79
5-2-2 Setting new pre-cut tape roll.................................................................................................... 81
5-3 Automatic Operation ......................................................................................82

5-4 Stoppage........................................................................................................83
5-4-1 Pause ..................................................................................................................................... 83
5-4-2 Emergency stop (Optional)...................................................................................................... 84
5-4-3 Error stop ................................................................................................................................ 85
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Chapter 1 Preface
Chapter 1 Preface
Read carefully the section of important warning labels ,
which appear in this manual, and fully understand the
statement before using the product.
1-1 To the Customer

Thank you for purchasing our RAD-2500m series:
Semi-Automatic Wafer Mounting System (hereinafter
referred to as the machine).
To use the machine for as long a period as possible, be sure

to read the attached manual and understand items such as
cautions on use, machine overview, operation methods, and
items related to machine safety before starting any work.
The contents of the operation manual, maintenance manual,

and other documents provided with the machine do not
constitute any part of an agreement nor modify or change any
existing agreement, contract, or relationship.
The sales contract covers all our obligations. The warranty

covered in the contract with you is our sole warranty.
Note that any statement written here is never a new article for
warranty nor modifies the existing warranty.
Any part of this manual cannot be duplicated for use by a third

party without our permission.
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Chapter 1 Preface
1-2 Cautions on Use

For safe use
We ask you to observe the following cautions for safety in using the machine.
Caution on electric shock
Even after turning off the machines main
breaker, electric current exists up to the
input terminals. Be careful not to make
contact with any of the input terminals.
Electric shock hazard from power

supply in the machine
Never touch an energized area such as a
power supply terminal block.
The machine employs an alternative
current line (100V, 200 V line) for input
power. Trained maintenance personnel
should perform the service when working
with the terminal block and performing
maintenance work.
Some components inside the machine still
have electric voltage even after all the
power has been turned off. Check the
voltage with an ohmmeter before doing
work.
Never fail to ground the machine.
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Chapter 1 Preface
Caution on entangling hands or body

The machine uses mechanical mechanism
for tension roller, Attachment Table Unit,
Table Drive Unit and winder.
Do not let any part of your body get too
close to the operation range of any
mechanical units or contact these areas
inadvertently.
In addition, be sure to turn off the power
when performing maintenance.
A warning sign is placed on these areas in
the machine.
Caution related to interlock

Interlock function is provided to the
machine for safety and protection of the
operator, protection of products, and the
protection of the machine.
Only those who are authorized and
well-experienced at your company should
manage and use this function. Never
operate the machine with the cover open
after disabling the interlocks. It is very
dangerous.
Caution on performing maintenance

Perform service with protective gloves and
safety shoes on, based on your safety work
procedure on performing maintenance on
the machine.
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Chapter 1 Preface
Caution on pressing the start button

Regardless of auto or manual operation,
press any start button only after confirming
that there is no one and no foreign matter in
the machine and that it is safe.
Other cautions
Do not fail to perform daily checks and
periodical checks before starting any
service.
When repairing or overhauling the
machine, watch out for the wiring between
machines and perform the work safely.
Pay full attention to safety by making
necessary all confirmations that the
machine is safe to use.
Read the section, "Hazard and safety
measures characteristic to the machine
during operation" for detailed information
on the different cautions used on the
machine.
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Chapter 1 Preface
Transfer
Read each manual thoroughly for cautions on change of frequency, removal of the power unit, or
transportation.
Contact our sales department.
Resale
When you have violated contract items stated in the sales contract, we do not assume any
responsibility.
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Chapter 1 Preface
1-2-1 Definition on workers that are involved with this machine

This machine divides the workers for machine operations and maintenance into the following worker
types according to the work details and the skills necessary for the work.
Worker type Work details

Operator Operations necessary for implementation of auto run only
Maintenance personnel Trained in machine maintenance.
Perform maintenance and inspection to keep the machine in good
condition
Take remedial measures when an error occurs during auto run
1-2-2 Using the manuals

Based on the above worker types, this machine provides manuals with work details, respectively for
operators and for maintenance personnel.
Worker type Manual for the respective work types

Operator Operation manual
Maintenance personnel Operation manual
Maintenance manual
CAUTION
Operations described in the Maintenance manual may be performed only
by authorized maintenance personnel.
Special knowledge and skills are required to perform these operations.
Performance by unauthorized personnel could lead to bodily injury or
machine damage.
1-2-3 Conventions in this manual

To describe the body text concisely, this manual uses the conventions in the following table.
In addition, the screens described in this manual may vary from the actual ones.
Convention Meaning
< > Buttons or switches on the operation box or in each unit on the machine.
Ex. <TAPE FEED> button
Important Emphasizes points to be noted in particular for the described operations.
Reference Provides reference information for the described operations.
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Chapter 1 Preface
1-3 Hazard Labels for Safety

Dangers, warnings, and cautions stated in the manual
Hazard levels for danger, warning and cautions on operation and maintenance are expressed in the
classification of 3 levels in the manuals of the machine. Understand the cautions and warnings of
areas where a sign is placed before handling the machine.
"DANGER" indicates that the wrong operation during

operation and maintenance or incorrect use of the machine
will cause serious injury or death to personnel. The method
described to avoid the hazard stated here must be given
DANGER priority over any other operation and maintenance procedure.
Operate the machine according to the method described to
avoid the hazard.
"WARNING" indicates that not strictly observing the correct

operation and maintenance procedure can lead to accidents
involving serious injury. The method to avoid such accidents
WARNING is stated here. Operate the machine as described.
"CAUTION" indicates that not strictly observing the correct

operation and maintenance procedure can cause injury. The
CAUTION method to avoid such accidents is stated here. Operate the
machine as described.
Besides the hazard classifications above, the following signs are used.
Indicates the matters without observance or correction of which the

product itself may be damaged, the production performance you are
IMPORTANT
recommended to know during operation and maintenance of the
machine, and the mistakes you are likely to make.
Indicates actions prohibited during operation or maintenance of the

machine.
PROHIBITED
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Chapter 1 Preface
Warning label on machine

To ensure safety, symbol stickers are attached to particular areas of units where extra caution should
be taken.
These areas are mentioned in section 1-4 For Safe Use of the Machine" together with their potential
hazard. Check the section along with this section before operating the machine.
Always pay full attention to safety by taking great care especially to

personnel safety and operate the machine using the proper procedure
WARNING when installing, operating, and performing maintenance on the machine.
Extremely hazardous high voltage area exists around

electrical lines inside the machine. To prevent accidents and
electric shock through contact with high voltage areas, turn
off the machines circuit breaker and the power distribution
panel before performing maintenance.
Moving mechanical drive area exists in the machine. Do not

carelessly place hands or fingers inside the panel. Your hands
or fingers may be caught in the driving unit. Turn off the
machines circuit breaker and the power distribution panel
before performing maintenance.

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Chapter 1 Preface
Hazard label attachment position (Standard specification)
KEEP HANDS CLEAR LTC-PL002E-01

NIPPED LTC-PL001E-01
ELECTRICAL HAZARD LTC-PL005E-01
ELECTRICAL HAZARD
LTC-PL005E-01
(for spec with ionizer/OP)
OP: Option
Machine appearance
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Chapter 1 Preface
Hazard label attachment position (Option upright type)
Machine appearance (Option specification)
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Chapter 1 Preface
Hazard label attachment position (Common)
Inside machine control box

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Chapter 1 Preface
1-4 For Safe Use of the Machine

Read this section thoroughly before operating or performing maintenance
on the machine to be well-acquainted with the potential hazards and how
WARNING to avoid each hazard.
Hazard and safety measures characteristic to the machine during operation
Electric shock
Potential hazard Measure to avoid hazard
Personnel receive an electric shock Do not fail to turn off the breaker
through contact with the terminal block. before touching the terminal block.
When removing the terminal block
cover for work, be sure to replace
the cover after the work, has been
completed.
Be careful that the voltage is present
at the primary side (input side) of the
breaker except when the electricity
has been turned off on the facility
side.
Short circuit is formed. Connect the terminal block as it was

before, Removing any wires and
install the cover.
Do not leave any tools on any
electric devices.
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Chapter 1 Preface

of the machine to be well-acquainted with the potential hazard and how to
WARNING avoid each hazard.
Mechanical hazard
Personnel gets body or hands caught in Moving mechanical drive area exists
the unit. in the machine. Do not place hands
or fingers in the machine carelessly.
Your hands or fingers may get
caught in the driving gears or belts.
Turn off the machine's circuit
breaker and the power distribution
panel before performing
maintenance.
When you operate the machine

manually, be sure to work with more
than two people present and check
the safety of each other by calling
out to each other when doing work.
Be aware of the location of the
emergency button at all time before
starting to work.
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Chapter 1 Preface
1-5 Protective Gears

The following protective gears may be needed in performing maintenance.
Be sure to wear protective gears according to the type of work.
Protective
glasses
Protective
gloves
Protective glasses
Protective gloves
Rubber apron for laser

(Electromagnetic shielding apron)
Rubber boots
Protective gears (example)
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Chapter 1 Preface
1-6 Safety Interlock (CE Specification)

1-6-1 Lockout
Lock out the circuit breaker
WARNING
When servicing the machine after power has been turned off, lockout the
circuit breaker so that the power will not be turned on inadvertently. The
appropriate person should keep the padlock key.
To lock the circuit breaker when it is off
1) Turn the handle toward the reset position at the marking of the case.
2) With the lock plate pushed in, turn the handle toward the OFF position.
3) Place a padlock through the hole on the handle to lock the handle. Use a padlock as described
below.
Marking on the case
Dimension of padlock (mm)

Use any padlock available in market.
A B C
35 19 5 Handle
All
types 40 22 or 23 5.5
Lock plate
Dimension C: 8mm or less can be
applied. Padlock
To release the lock, remove the padlock, and then turn the handle in the RESET direction until the
lock plate returns to its original position. Once the lock place is at its original position, the handle is
unlocked.
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Chapter 1 Preface
1-6-2 Emergency stop button (EMO button/Optional)
WARNING
Be sure to be acquainted with the location of the emergency stop button
(EMO) and check the functional operation of the <EMO> button right after
the machine startup or before the first operation or maintenance check.
It may lead to unexpected serious accident if the <EMO> button is unable
to be pressed or does not operate in an emergency.
Press the <EMO> button to stop the machine in emergency during operation or maintenance check.
Pressing the <EMO> button shuts off the power to the machine to maintain the machine in safe
conditions.
<EMO> button is red and lock switch button.
Emergency stop button (EMO button)
WARNING
Release the <EMO> button only after the problem was eliminated.
Releasing the <EMO> button without making confirmation is very
dangerous and may lead to an unexpected serious accident. The <EMO>
button does not recover automatically. Do not release them without
making confirmation that the danger is no longer present.
Press the emergency stop button when a situation dangerous to the machine or personnel occurs.
All the units will stop in a safe position.
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Chapter 1 Preface
One <EMO> button is provided on the machine main body.
Be sure to check for damages to the machine when recovering from power
shut down from the machine (when EMO is activated).
IMPORTANT
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Chapter 1 Preface
1-6-3 Safety interlock (CE specification)

The machine is equipped with various interlocks that act as safety measures against fatalities or
machine failure due to malfunction.
Hardware interlock by hard-wiring is used for interlock. (Software interlock by computer is used for
CE specification).
Cover interlock switch is provided on the cover No.4.
No.4
No.2
No.1
No.3
No.2 No.4
No.3 No.1
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Chapter 1 Preface
1-7 Status Indicator (Optional)

The status indicator lights during operation, at the end of operation, and when an error occurs.
Machine status Green Yellow Red

Power OFF
Power ON Lit
Emergency stop
During operation Lit
Operation ended Lit
Error stop Lit
Yellow indicator lights when the power is ON.
Green indicator lights during operation.
Yellow indicator lights at the end of operation.
Red indicator lights when the machine stops due to an error.
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Chapter 1 Preface
1-8 Faceplate
A faceplate containing the machine model name, serial number, manufacturing date, etc. is attached
at the rear part of left side cover of the machine.
Check the information on the faceplate when contacting us with questions regarding operation
method, ordering parts, and repairs.
1-8-1 Standard specification
Face plate
In standard specification/ In CE specification/

On the left side cover On the power supply box
Faceplate attachment position
Contents of faceplate
MADE IN JAPAN
MODEL : RAD2500m/* DIAGRAM NUMBER : *******

SERIAL NUMBER : ******* MFG.DATE : *******
MANUFACTURER : LINTEC Corporation
ADDRESS : 23-23 Honcho, Itabashi-ku, Tokyo 173-0001 Japan
AIR : 0.440.49Mpa, 150L/min(ANR) VOLTAGE : ***V 1PHASE
MASS : ***kg WIRING CONFIGURATION : 2WIRE+GROUND
FREQUENCY : 50/60Hz
FULL LOAD AMPS : **A
MACHINE MAIN BREAKER RATING : **A
AMPERE RATING OF LARGEST LOAD : **A
INTERRUPT CURRENT : **** A.I.C
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Chapter 1 Preface
1-8-2 Optional upright type
Faceplate

MADE IN JAPAN

FREQUENCY : 50/60Hz
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Chapter 1 Preface
1-9 Emergency Contact

INA Technology 7095 Komuro, Inamachi, Kita Adachi-gun,
Center Saitama 362-0806 Japan
Tel: +81-48-720-1211 Fax: +81-48-720-1221
Head Office 23-23 Honcho, Itabashi-ku, Tokyo 173-0001 Japan
Tel: +81-3-5248-7711 Fax: +81-3-5248-7760
Advanced Materials Kyouwaiidabashi Bldg., 2-1-2 Kouraku, Bunkyou-ku,
Div. Tokyo 112-0004 Japan
Tel: +81-3-3868-7737 Fax: +81-3-3868-7726
LINTEC OF AMERICA, 4629 E. Chandler Blvd., Suite 110
INC Phoenix, AZ 85048 USA
Tel: +1-480-966-0784 Fax: +1-480-966-5321
LINTEC SINGAPORE 20 Bendemeer Road, #02-01 Cyberhub,
PRIVATE LIMITED 339914, Singapore
Tel: +65-6221-5854 Fax: +65-6221-6458
LINTEC ADVANCED 27F-2-B3, No. 29, Hai-Pien Road,
TECHNOLOGIES Kaohsiung 802, Taiwan
(TAIWAN), INC. Tel: +886-7-331-3000 Fax: +886-7-331-3900
LINTEC ADVANCED 3rd FL., Dongwha Bldg., 207-1, Nonhyun-Dong,
TECHNOLOGIES Kangnam-Ku, Seoul 135-010, Korea
(KOREA), INC. Tel: +82-2-548-1537 Fax: +82-2-548-0571
LINTEC ADVANCED UG2 Richville Corporate Tower,
TECHNOLOGIES Madrigal Business Park, Alabang-Zapote Road,
(PHILIPPINES), INC. Alabang, Muntinlupa City 1780, Philippines
Tel: +63-2-772-3309 Fax: +63-2-772-3311
Service calls can be made between the hours of 9 am to 5 pm Monday Friday excluding holidays.
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Chapter 1 Preface
1-10 Descriptions of Basic Terms

Wafer Always a wafer, regardless of whether or not the wafer is
laminated with surface protection tape
Ring frame Ring which a wafer is mounted on with dicing tape.
Pre-cut tape Dicing tape that is cut to the shape and size of ring frame.
Release liner Release film of dicing tape which is structured by 2 layers, tape
and release film.
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Chapter 1 Preface
APPENDIX/ MATERIAL SAFETY DATA SHEET (MSDS)

This appendix contains a material safety data sheet (MSDS) for chemicals used in this machine.
Chemicals contained in MSDS
Grease
CAUTION
The following material safety data sheet (MSDS) provides general
information for chemicals used in this machine. As MSDS descriptions may
vary depending on regulations in your region and country, obtain MSDS from
your local dealer or manufacturer when necessary.
MSDS descriptions may be updated. Be sure to always obtain the latest
MSDS.
The user should prepare MSDS for chemicals purchased by the user to be used in this machine. The
MSDS provided should be attached to the end of this manual, making it possible for all the operators
to confirm its content at any time and understand the danger.
Location where grease is used

LM rail
Attachment Table Unit Multemp PS No.2(KYODO YUSHI CO.,LTD)
Unwinder (Optional) Shell Alvania EP Grease 2 (SHOWA SHELL SEKIYU K. K.)
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Chapter 2 Machine Overview

2-1 Overview
The RAD-2500m Semi-automatic Wafer Mounting System (hereafter referred to as the machine)
automatically attaches the pre-cut dicing tape to the manually set wafer and ring frame.
This machine was developed for the purpose of manual wafer mounting and as a backup for the
Fully-automatic Wafer Mounting System in order to help automatization of wafer mounting process
before dicing in the semiconductor manufacturing process.
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2-2 Features
1) No damage to ring frames
Pre-cut dicing tapes (round) are used. This eliminates the need to cut the tapes on the ring frames,
thus preventing ring frame damage. This results in 0% dust generation from tape cutting.
2) Tape tension is adjustable
Tape Tension Control (TTC) is employed. When a pre-cut tape is attached to a ring frame, its
tension is controlled by a torque motor. Tape tension can be adjusted manually with controls on the
control box. TTC enables a suitable tension to be obtained for the back-end processes.
3) Pre-cut tape can be attached to a ring frame without a wafer.
Pre-cut tape can be attached to a ring frame without mounting a wafer by using a selector switch.
4) One set of machine is capable of attaching tapes of applicable size wafers.
Tape attachment to wafers of different sizes is possible by converting the wafer table and the ring
frame table. The table below shows the list of tape size that can be used for the machine.
Tape for 6 wafers

RAD2500m/8 Tape for 8 wafers (290mm width)
(220mm width)
Tape for 8 wafers
RAD2500m/12 Tape for 12 wafers (390mm width)
(290mm width)
*The above values may vary depending on the specification.
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2-3 Machine Configuration (Standard Specification)

2-3-1 Front view
Front view
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2-3-2 Right side view
Right side view
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2-3-3 Left side view
Left side view
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2-4 Machine Configuration (Optional Upright Type)

2-4-1 Front view
Front view
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2-4-2 Right side view
Right side view
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2-4-3 Left side view
Left side view
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Chapter 3 Names and Functions of Each Unit
Chapter 3 Names and Functions of Each

Unit
3-1 Operation Panel
3-1-1 Standard Specification
Overall view of the machine and location of operation panel
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Overall view of the machine and location of operation panel
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3-1-3 Operation buttons
Operation panel Operation panel (CE specification)
Buttons Functions
POWER Sets automatic or manual operation mode.
(except CE When the <POWER> switch is pressed, the <TAPE FEED>,
specification) <VACUUM>, <START>, and <STOP> button LEDs light for two seconds.
To select manual mode, press the <POWER> switch while holding down
the <STOP> button. The <TAPE FEED>, <VACUUM>, <START>, and
<STOP> button LEDs flash twice and manual mode is selected.
TAPE FEED Automatically feeds the tape.
When this button is pressed, the press roller rotates and the tape is fed.
For micro switch tape detection (Optional)
If a strip of pre-cut tape is missing, feed the tape and correct the stop
position. After this, remove the fed tape.
VACUUM Vacuum-holds the wafer and the ring frame simultaneously.
Each press of this button switches the vacuum ON and OFF.
START <START> button Moves the table back and forth
<VACUUM><START> buttons Starts tape attachment cycle
STOP Stops the table moving and tape attachment cycle.
<STOP> button Table traveling timeout
LED ON When table safety sensor is interrupted
Ring frame vacuum error
Tape feeding timeout (For micro switch tape
detection (optional))
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3-1-4 Inside the control box
Inside the control box
Switches inside the control box

Switches Functions
Sets the driving torque of the tension roller.
TAPE TENSION
The tape tension can be set by this control only during tape attachment. Turning
: VR01
the control clockwise increases the torque.
TABLE SPEED Selects the table travel speed between high and low.
: High Only the table advance speed after tape attachment changes. The retract speed
: Low does not change. * (except for the machine with optional heater)
POWER This switch selects 50 Hz or 60 Hz frequency.

: 50Hz A 100 VAC torque motor is used. 50 Hz or 60 Hz frequency is selected depending
: 60Hz on the power supply.
VR02: Low tension, 50Hz
VR07 VR06 VR05 VR04 VR03 VR02 VR03: Low tension, 60Hz
VR04: Low-power
winding, 50Hz
VR05: Low-power
winding, 60Hz
Torque setting
board VR06: High-power
winding, 50Hz
VR07: High-power
winding, 60Hz
* These controls are factory-adjusted. If readjustment is necessary, turning

these controls to the right with a flathead screwdriver increases the torque.
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3-1-5 Switches on front of control box
MOUNT MODE switch
Earth-leakage
circuit breaker
Front of control box Front of control box (CE specification)

* Earth-leakage circuit breaker (not installed in the CE specification machine)
It is used as earth-leakage circuit breaker and short-circuit protection device.
Use the <POWER> switch on the operation panel to turn the power ON and OFF.
* The modes may vary depending on the specification. Refer to the MOUT MODE LIST attached
on the machine.
m/8
Switches Functions
MOUNTMODE Sets the mode as described in the table below depending on the type of
wafer to which the tape is attached. Timing of wafer pressurization and
vacuum change according to the mode selected.
Functions of modes not in the table are the same as those of mode A.
MODE FRAME WAFER
0 6 -
1 6 FLAT
2 6 4
3 6 5
4 6 6
5 8 -
6 8 FLAT
7 8 4
8 8 5
9 8 6
A 8 8
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m/12
Switches Functions
MOUNTMODE Sets the mode as described in the table below depending on the type of wafer
to which the tape is attached. Timing of wafer pressurization and vacuum
change according to the mode selected.
Functions of modes not in the table are the same as those of mode E.
MODE FRAME WAFER
0 6 -
1 6 FLAT
2 6 4
3 6 5
6 6
5 8 -
6 8 FLAT
7 8 5
8 8 6
9 8 8
A 12 -
B 12 FLAT
C 12 6
D 12 8
E 12 12
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3-1-6 Switch on rear of control box
Rear of control box
Do not turn the <LOCK> switch ON without a roll of tape being set. Doing
so may damage the tape lock cylinder.
PROHIBITED
Switches Functions
LOCK 1) Actuates the tape lock cylinder that secures the pre-cut tape.
:ON ON: The tape lock cylinder rises to secure the tape roll.
:OFF OFF: The tape lock cylinder lowers to release the tape roll.
ON
Tape lock
2) Locks the pinch roller against the tension roller and the drive roller.
ON The pinch roller is locked against the tension roller and drive
roller.
OFF The pinch roller is released from the tension roller and drive
roller.
Tension roller
ON Pinch roller
Drive roller
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3-1-7 Sensors on top of left cover

Standard specification Optional upright type
Wafer pressure
adjusting knob
UP: Turn clockwise
DOWN:
Turn counterclockwise
Pressure sensor
Pressure sensor
Top of left cover
Sensors Functions
WAFER PRESSURE Pressure is applied to the wafer to prevent air bubbles from entering the
center portion of the rear of the wafer during tape attachment.
Adjust the pressure while observing the digital pressure sensor.
FRAME SUCTION Regulates the ring frame vacuum pressure.
WAFER SUCTION Regulates the wafer vacuum pressure.
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3-1-8 Power supply box (CE specification)

Circuit breaker
Power breaker
POWER ON
POWER OFF
Switches/Buttons Functions
Power breaker Prevents power leakage and short circuits. Equipped with an operation handle.
Circuit breaker Cuts the power supply to protect wires and equipments due to overcurrent.
POWER ON Turns the machine power ON.
When the <POWER> switch is pressed, the <TAPE FEED>, <VACUUM>,
<START>, and <STOP> button LEDs light for two seconds.
To select manual mode, press the <POWER> switch while holding down the
<STOP> button. The <TAPE FEED>, <VACUUM>, <START>, and <STOP>
button LEDs flash twice and manual mode is selected.
POWER OFF Turns the machine power OFF.
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3-2 Machine Component Names

Standard specification
1
2
4 3
Option specification 1
4 2
Machine outline view
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1) Unwinder
2) Tension roller
3) Tape Detection Unit
4) Press Roller Unit
5) Attachment Table Unit
6) Table Drive Unit
7) Drive roller
8) Winder
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3-3 Unwinder
Reel plate
Slip mechanism Tape lock cylinder

Lock
Cylinder
controlled by air
Unwinder shaft
Section names of unwinder
Slip mechanism Reel plate Tape lock cylinder

Lock
Cylinder
controlled by air Unwinder support shaft
Unwinder shaft
Section names of unwinder (Option specification)
3-3-1 One-touch loading and unloading of tape roll

A roll of tape can be loaded and unloaded simply by setting the <LOCK> switch to ON and OFF.
Supplying the air actuates the <LOCK> switch regardless of whether the <POWER> switch is ON or
OFF.
Option specification
Pull the unwinder support shaft towards you and slide it to the side.
A roll of tape can be loaded and unloaded simply by setting the <LOCK> switch to ON and OFF.
Supplying the air actuates the <LOCK> switch regardless of whether the <POWER> switch is ON or
OFF.
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3-4 Tension Roller

Pinch roller
Tension roller
Guide rollers
Drive roller
Drove pulley
Torque motor
Location of tension roller
3-4-1 Tape tension adjustment

The tension roller is driven by a torque motor. Tape tension can be adjusted by varying the torque of
the torque motor. For torque adjustment location, refer to 3-1-4 Inside the control box.
3-4-2 Pinch roller lock and unlock

The pinch roller is pressed to the tension roller and drive roller by the air cylinder. The pinch roller
can be locked and unlocked by turning the <LOCK> switch ON and OFF.
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3-5 Tape Detection Unit
Marking of Tape Detection Unit position
Wing bolt
Sensor amplifier
Fiber sensor
(transmitter)
Fiber sensor
(receiver)
Tape securing plate

Section names of Tape Detection Unit
3-5-1 Tape detection

Thrubeam type fiber sensor detects and positions pre-cut tapes on the release liner.
3-5-2 Adjustment of Tape Detection Unit position

Tape attachment position can be adjusted by moving the Tape Detection Unit back and forth in the
st
tape feeding direction. The Tape Detection Unit detects the back end edge of the 1 piece of pre-cut
tape. Press the <TAPE FEED> button to adjust the tape position so that the front end of the tape is
protruding from the bottom end of the press roller by approx. 10mm.
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3-5-3 Tape detection (Optional)

Micro switch type
When the front edge of the pre-cut tape on the release liner strikes and turns the square wheel, the
micro switch turns ON, by which the tape is detected. It detects the second pre-cut tape instead of
the first pre-cut tape which is about to be attached. For this reason, in case there is a missing pre-cut
tape on the release liner, the machine stops with tape feeding timeout. This type of sensor detects
nd
the front edge of the 2 piece of pre-cut tape.
Square wheel
Square wheel
Thrubeam type fiber sensor/ Micro switch universal type
Either thrubeam type fiber sensor or micro switch can be selected for tape detection. To switchover
the tape detection method, use the <TABLE SPEED> switch located inside the control box. For this
type of tape detection, table travel speed is only limited to H (HIGH) except when optional heater
specification is installed.
<TABLE SPEED> switch
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Double micro switch type
When the front edge of the pre-cut tape on the release liner strikes and turns the square wheel, the
micro switch turns ON, by which the tape is detected.
Micro switch (LS01)
Micro switch (LS02)

Sequence of missing tape detection
1) Tape is fed as normal.

LS01
LS02 2) If the next tape is not detected in the
certain distance, the tape will be
back-fed.
3) When the LS02 detect the back
edge of the 1st pre-cut tape, the
1 2 3 tape will be fed.
4) The tape will be fed for a certain
distance and stops to start tape
attachment.
st
5) After the 1 pre-cut tape is
attached, the tape will be fed until
the LS01 detects the front edge of
the next tape. Then the tape will be
fed by the length for one wafer
which is depending on wafer size.
6) The machine goes back to the
4 5 6 normal state.
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3-6 Press Roller Unit
Guide rollers
Press roller
Stopper
Peel plate Assist air pipe
Section names of Press Roller Unit
3-6-1 Press roller

The press roller has two functions: feeding the tape and attaching the tape. It is driven by a stepping
motor.
1) Tape feed
The press roller is pressed against the peel plate by a spring. The tape is fed as the press roller is
driven. The press roller stops when a piece of pre-cut tape is detected by the tape detection sensor.
2) Tape attachment press
When the tape is separated from the release liner, the table ascends and pushes the press roller up.
In this state, the press roller is free from the motor drive. As the table travels, the press roller
attaches and presses the tape.
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3-7 Attachment Table Unit
Ring frame vacuum
Section names of Attachment Table Unit
Pressure nozzle
Ring frame table Wafer vacuum
Wafer table
Height adjusting bolt Cartridge filter (Optional)

Up/Down cylinder
Section names of Attachment Table Unit
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3-7-1 Attachment Table Unit

The Attachment Table Unit has a ring frame table and a wafer table.
1) Ring frame table
The ring frame table has guide pins for positioning the ring frame. The ring frame is held at four
points by magnets and suction pads.
2) Wafer table
The standard wafer table is non-contact table with a silicone rubber pad that holds a wafer at 3 mm
exclusion area of the periphery of a wafer surface. (A flat table can be used as an option)
To set the wafer in the correct position, the wafer is placed in the center with a 2 mm margin left on
the circumference of the silicone rubber pad. It is then held in position by pressing the <VACUUM>
button.
The wafer table has a vertical drive to adjust level relative to that of the ring frame. An adjusting
screw is provided under the table. For the relative vertical positions of the ring frame and wafer
table, place the ring frame and the wafer in position, then adjust the table level so that the wafer is
about 0.2 mm higher.
The wafer table is pressurized to prevent the wafer from sagging in the middle. Pressure is applied
when wafer attachment begins. To provide even cleaner air pressurizing, a cartridge filter can be
installed (Optional).
*The Attachment Table Unit is adaptable to a special frame as well as a PKG table.
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3-8 Table Drive Unit

In standard specification
Transfer rail Advance limit
sensor Attachment Table Unit
Retract limit sensor
Drive pulley
Driven pulley Transfer belt Stepping motor
In option specification
Attachment Table Unit
Advance limit
sensor
Driven pulley
Transfer rail
Retract limit sensor
Drive pulley
Transfer belt Stepping motor
Section names of Table Drive Unit
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3-8-1 Table Drive Unit

The Table Unit is driven by a stepping motor. When the table is stored inside the machine, tape
attachment motion starts.
The table stop position can be adjusted by the advance and retract limit sensors.
The table travel speed can be selected from HIGH and LOW using the <TABLE SPEED> switch
inside the control box. (Except for cases when thrubeam type fiber sensor/ Micro switch universal
type (Optional) is used for tape detection)
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3-9 Drive Roller

Pinch roller
Tension roller
Guide roller
Drive roller
Drive pulley
Torque motor
Location of drive roller
3-9-1 Drive roller

The Drive roller is driven by a torque motor, and it pulls the release liner at all time to maintain the
tape tension.
Winding release liner
The winder rotates to wind the release liner by the effect of motion transmission from the drive roller.
For torque adjustment location, refer to 3-1-4 Inside the control box
*Tape tension may have to be adjusted depending on tape type
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3-10 Winder
Slip mechanism
Tape lock pin
Winder shaft
Driving belt
Section names of winder
3-10-1 Winder
Winding release liner is controlled by the drive roller while it pulls the release liner and the winder
winds up the release liner. The drive roller and the winder are synchronized and run at the same
speed. As the speed at the circumference of the winder changes as winding proceeds, the winder
drive is provided with a slip mechanism to automatically adjust the speed.
* Remove the release liner regularly, otherwise the machine may not be able to execute the tape
feed operation due to the wound release liner piled up in the winder.
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3-11 Options
3-11-1 Ionizer
This ionizer eliminates the static electricity generated while dicing tape is being separated from
release liner.
An ionizer is installed at the front of the machine. The power source is located inside the machine
cover on the left. The power for the ionizer automatically turns ON when the machine power turns
ON, and it turns OFF when the machine power turns OFF.
To check the ON/OFF status of the ionizer power, open the cover No.2 (Rear of machine).
For the machine cover numbers, refer to Chapter 1 1-6-3 Safety Interlock (CE specification).
The ionizer supplies compressed air.
A regulator is used at the ionizer power source.
Regulator
Power source
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3-11-2 Heater
Heater is used to attach tapes with heat applied on the wafer (for LE tape).
1) Option features
Built-in heater table
A heater (made by LINTEC) is installed in between

Thermocouple the wafer table and the table base. A thermocouple
is attached to the wafer table from the rear of the
table base in order to detect the temperature. The
temperature is controlled by the temperature
controller inside the heater control box.
Heater
Fig.1 Top view of table
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62
Heater control box (Temperature controller, Heater ON/OFF, Attachment speed switch)
Heater ON/OFF, heater

TABLE TEMPERATURE temperature setting and
controller attachment speed setting can be
performed on the heater control
box attached to the control box
on the right side of the machine.
Or it can also be detached from

the machine.
HEATER ON/OFF switch

Heater control box
ATTACHMENT SPEED switch
Fig.2 Heater control box
TABLE TEMPERATURE controller
Temperature unit
No.1 display
(Current temperature)
Operation indicators
No.2 display
(Set temperature)
Up Key
Level Key
Mode Key Down Key
Fig.3 TABLE TEMPERATURE controller

Temperature appropriate for tape attachment should be set as a target value. If the temperature is
above the upper limit or below the lower limit temperature, an error will be triggered and the
operation cannot be continued.
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2) Heater operating suggestions
The built-in heater is capable of generating the heat up to 100. However, do not set the
temperature over 70 due to a chance of danger to human and possible acceleration of
deterioration of heater service life.
The heater is meant for LINTECs LE tape. Turn the heater OFF when tapes except LE tape are
used. (Applying the heat to these tapes may change their properties depending on the
characteristics)
For LINTECs LE tape, set the heater temperature so that the temperature on the backside of the
wafer is between 40 - 50.
3) Changing heater set temperature (SP)
Set the temperature of the No.2 display using the Up/Down keys on the temperature controller.
If the temperature is above the upper limit or below the lower limit temperature, an error will be
triggered even if the <START> button is pressed for an automatic operation. Do not start operations
until the temperature settles within the operable range. Once the temperature is within the range,
operation can be started as normal.
Temperature unit
No.1 display
No.2 display
(Set temperature)
Up Key
Level Key
Mode Key Down Key
Fig.4 TABLE TEMPERATURE controller
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4) Changing attachment speed
ATTACHIMENT SPEED switch
Fig.5 ATTACHMENT SPEED switch
1) Attachment speed is changed using the <ATTACHMENT SPEED> switch shown in the Fig.5.
ATTACHMENT SPEED LIST is attached on the front of the heater control box.
(Refer to the table below)
Attachment speed can be changed regardless of whether the heater is ON or OFF.

MODE ATTACHMENT SPEED (mm/s)
0 12.3
1 15.9
2 19.4
3 23.0
4 26.6
5 30.1
6 33.7
7 37.3
8 40.9
9 44.4
A 48.0
B 51.6
C 55.2
D 58.7
E 62.3
F 65.9
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3-11-3 Warm Air Unit

Applying the warm air on the tape improves the conformity of the tape and makes tape attachment
easier.
(*The Warm Air Unit is optional)
1) Option features
Warm Air Unit
The Warm Air Unit is installed on the peel plate.
Temperature of warm air is controlled by the warm air

heater control box.
Warm Air Unit
Peel plate
Fig.6 Warm Air Unit appearance
Warm air heater control box

(Power, Temperature controller, Heater ON/OFF, Attachment speed switch)
Heater ON/OFF, heater

Power temperature setting and
attachment speed setting can be
performed on the warm air
Temperature heater control box attached to
controller the control box on the right side
of the machine.
Or it can also be detached from

the machine.
Warm air heater control box Heater ON/OFF button

ATTACHMENT SPEED switch
Fig.7 Warm air heater control box

* If the attachment operation is inactive for certain amount of time (3min.) after the Warm Air Unit
operation, the heater is automatically turned OFF.
* To continue the operation, turn the heater ON again.
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Temperature controller
Temperature unit
No.1 display
(Current temperature)
No.2 display
(Set temperature)
Up Key
Level Key
Mode Key Down Key
Fig.8 Warm air TEMPERATURE controller

Temperature appropriate for tape attachment should be set as a target value. If the temperature is
above the upper limit or below the lower limit temperature, an error will be triggered and the
operation cannot be continued.
2) Warm air heater operating suggestions
The built-in heater for warm air is capable of generating the heat up to 800. However, do not set
the temperature over 250 due to a chance of danger to human.
The heater is meant for the base material of PET. Turn the heater OFF when tapes except ones
with PET as a base material are used. (Applying the heat to other tapes may change their
properties depending on the characteristics)
For PET based tape, set the heater temperature at approx. 200.
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3) Changing warm air heater set temperature (SP)
Set the temperature of the No.2 display using the Up/Down keys on the temperature controller.
If the temperature is above the upper limit or below the lower limit temperature, an error will be
triggered even if the <START> button is pressed for an automatic operation. Do not start operations
until the temperature settles within the operable range. Once the temperature is within the range,
operation can be started as normal.
Temperature unit
No.1 display
No.2 display
(Set temperature)
Up Key
Level Key
Mode Key Down Key
Fig.9 Warm air heater temperature
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4) Changing attachment speed
ATTACHMENT
SPEED switch
Fig.10 ATTACHMENT SPEED switch
1) Attachment speed is changed using the <ATTACHMENT SPEED> switch shown in the Fig.10.
ATTACHMENT SPEED LIST is attached on the front of the warm air heater control box.
(Refer to the table below)
Attachment speed can be changed regardless of whether the heater is ON or OFF.

MODE ATTACHMENT SPEED (mm/s)
0 12.3
1 15.9
2 19.4
3 23.0
4 26.6
5 30.1
6 33.7
7 37.3
8 40.9
9 44.4
A 48.0
B 51.6
C 55.2
D 58.7
E 62.3
F 65.9
* In case the machine has both features, the table heater and the Warm Air Unit, the attachment
speed can only be changed on the heater control box but not on the warm air heater control box.
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3-11-4 Cover
Upper cover
The upper cover prevents the operator to place his hands accidentally inside the machine during the
machine operation. It also prevents the tape inside the machine from being exposed to UV light from
fluorescent lights and any dust in the atmosphere from falling inside the machine.
Upper cover
Upper cover with safety interlock
In addition to the functions of the upper cover stated above, employing a safety interlock on the cover
prevents the machine from being powered on without the cover on.
Micro switch type

(Only m8) Upper cover Micro switch
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Door switch type

(m8: for CE specification, m12: 2 switches) Door switch
Upper cover
(Optional upright type)

Door switch
Upper cover
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71
Chapter 4 Specifications
4-1 Power Supply
In standards specification
m/8 m/12
100VAC10%, 50/60Hz, 100VAC10%, 50/60Hz,
Power
Single phase Single phase
Main breaker capacity 5A 5A
Power consumption 0.2 KVA 0.2 KVA
In option specification
m/8
m/8
/8 /12 (with heater
(with Warm Air
(with heater) (with heater) and Warm Air
Unit)
Unit)
100VAC10%, 100VAC10%, 100VAC10%, 100VAC10%,
Power 50/60Hz, 50/60Hz, 50/60Hz, 50/60Hz,
Single phase Single phase Single phase Single phase
Main breaker capacity 5A 10A 10A 10A
Power consumption 0.3 KVA 0.4 KVA 0.4KVA 0.5KVA
m/12 m/12
(with Warm Air (with heater and
Unit) Warm Air Unit)
100VAC10%, 100VAC10%,
Power 50/60Hz, 50/60Hz,
Single phase Single phase
Main breaker capacity 10A 10A
Power consumption 0.4KVA 0.6KVA
* Main breaker is equipped with earth leakage protection. (Rated sensitivity current = 15mA)
* The specifications for both m/8 and m/8(Upright type),m/12 and m/12(Upright type) are the same.
4-2 Air Supply

m/8 m/12
Air pressure 0.440.49MPa 0.440.49MPa
Air consumption 150L/min (ANR) 150L/min (ANR)
*Connection : One-touch coupling (8) is provided on the regulator on the machine side.
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4-3 Machine Dimensions
m/8 m/12
Width (W) 566mm 666 mm
Depth (D) 750mm 850 mm
Height (H) 487mm 487 mm
Weight 90kg 110 kg
* The above sizes are for a standard machine. The size varies depending on option specification.
Option specification
m/8 m/12
Width (W) 568 mm 668 mm
Depth (D) 750 mm 850 mm
Height (H) 762 mm 767 mm
Weight 105 kg 125 kg
* The above sizes are for a standard machine. The size varies depending on option specification.
H
D W
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4-4 Processing Capacity

m/8: 15 sec/wafer m/12: 22sec/wafer
* Processing capacity varies depending on table travel speed.
4-5 Ring Frame Size
m/8 Unit: mm
A B C D E F G t
Disco 276 296 250 63.5 60.2 123.6 122 1.2
8
K&S 266.7 281.3 242.5 90.3 88.3 100.8 102.4 1.5
Disco 212 228 194 63.5 60.2 89.1 87.5 1.2
6
K&S 215.9 228.1 192.5 74.0 70.0 79.4 81.0 1.5
m/12 Unit: mm
A B C D E F G t
12 380 400 350 90 84 172 170.4 1.5
Disco 276 296 250 63.5 60.2 123.6 122 1.2
8
K&S 266.7 281.3 242.5 90.3 88.3 100.8 102.4 1.5
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4-6 Pre-cut Dicing Tape Attachment Accuracy

Tape attachment accuracy (X and Y indicate repeat accuracy): within 1.0mm
Ring frame (shaded area=tape)
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4-7 Tape Size

The machine can handle LINTECs D-series and G-series tapes.
m/8
6 inch (Optional) 8 inch
Rolls outer diameter (mm) max 230 max 230
Rolls inner diameter (mm) 76.70.5 76.70.5
Tape width (mm) max 220 max 290
Pre-cut tape size (mm) 207 270
Pre-cut pitch (mm) Approx. 8 Approx. 9.4
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m/12
8 inch(Optional) 12 inch
Rolls outer diameter (mm) max 230 max 230
Rolls inner diameter (mm) 76.70.5 76.70.5
Tape width (mm) max 290 max 390
Pre-cut tape size (mm) 270 370
Pre-cut pitch (mm) Approx. 9.4 Approx. 8
Rolls outer diameter Pre-cut size

Pre-cut pitch
Rolls inner diameter
Tape width
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77
Chapter 5 Machine Start-up and Operation

5-1 Supplying Power
Turn the breaker ON at the lower right of the front of the machine.
MOUNT MODE switch
Earth-leakage
circuit breaker
Front of control box Front of control box (CE specification)
Optional
Power breaker
Turn the power breaker ON on the power supply
box.
Press the <POWER ON> button on the power

supply box. The <POWER ON> button lights to
indicate that the power is supplied.
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5-2 Setting Pre-cut Tape

5-2-1 Removing current pre-cut tape roll
Guide rollers Tape Detection Unit Unwinder

Tension roller
Guide roller
Lift Pinch roller Tape lock pin
Unwinder the
release liner
Stopper Cut
Drive roller Winder
Peel plate
Assist air pipe
Press roller
1) Turn the <POWER> switch OFF.
2) Set the <LOCK> switch to OFF.
3) Unwind the release liner from the winder by one turn, and cut the release liner at a point
immediately before the winder.
4) Remove the tape lock pin and remove the roll of release liner from the winder.
5) When removing the tape from under the press roller, insert the stopper manually while lifting up the
shaft above the press roller.
6) Wind the remaining dicing tape on the unwinder and remove the tape roll.
*Leaving the tape routed through the rollers may leave some pressed marks on the tape. If the tape is
marked, feed the tape to get rid of the marks.

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79
In option specification (Upright type)

Unwinder
Tension roller
Tape Detection Unit

Pinch roller
Guide rollers
Guide roller
Lift
Tape lock pin
Press roller
Unwinder the
Stopper release liner
Assist air pipe Peel plate Drive roller Winder

2) Set the <LOCK> switch to OFF.
3) Unwind the release liner from the winder by one turn, and cut the release liner at a point
immediately before the winder.
4) Remove the tape lock pin and remove the roll of release liner from the winder.
5) When removing the tape from under the press roller, insert the stopper manually while lifting up the
shaft above the press roller.
6) Wind the remaining dicing tape passed through the rollers on the unwinder. Pull the unwinder
support shaft towards you and slide it to the side. Then remove the tape roll from the unwinder.
*Leaving the tape routed through the rollers may leave some pressed marks on the tape. If the tape is
marked, feed the tape to get rid of the marks.
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80
5-2-2 Setting new pre-cut tape roll
Do not turn the <LOCK> switch ON without a roll of tape being set. Doing
so may damage the tape lock cylinder.
PROHIBITED
1) Turn the <POWER> switch ON and press the <START> button to advance the table. When the
table is stored in the machine, press the <START> button again.
3) Set a roll of pre-cut tape on the unwinder.
* For the optional Upright type, pull the unwinder support shaft towards you and slide it to the side.
Then set a new roll of tape on the unwinder shaft. Be sure to bring the unwinder support shaft back
to the original position and insert it into the unwinder shaft.
4) Pass the tape according to the tape routing diagram.
* When passing the tape under the press roller, insert the stopper while lifting up the shaft above
the press roller
*Be sure to pass the tape between the peel plate and the assist air pipe.
5) Adjust the tape position so that the Tape Detection Unit is located above the center of the first
pre-cut tape.
6) Wind the release liner around the winder, and insert the tape lock pin along the slot of the winder.
Tape detection sensor Pre-cut tape
st nd
1 pre-cut tape 2 pre-cut
t
7) Set the <LOCK> switch to ON.

8) Remove the stopper lifting the press roller.
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81
5-3 Automatic Operation

Automatic operation can be started upon completion of operation preparation.
Be sure to confirm that no person is near the machine before pressing the
WARNING <START> button for automatic operation.
Operation panel Operation panel (CE specification)
1) Press the <START> button to move the table forward. When the table is stored in the machine,
press the <START> button again.
2) Set the mount mode using the <MOUNT MODE> switch on the front of the control box.
(Refer to the mount mode list described in 3-1-5 Switches on front of control box).
3) To set a ring frame and a wafer in the machine, place a ring frame aligned with the guide pins, and
place a wafer on the wafer table along the periphery of the silicon rubber. Press the <VACUUM>
button (LED lights) to vacuum-hold the workpiece.
4) Press the <START> button. The machine automatically attaches the tape and stops at the end of
the cycle. If a timeout error occurs due to a missing pre-cut tape or incorrect set position while
feeding the tape, press the <TAPE FEED> button to position the tape correctly.
5) Remove the ring frame with tape attached. Repeat the procedure from step 3) to process more
workpieces.
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5-4 Stoppage
The machine stops in any of the following modes depending on the
operating conditions: pause, emergency stop, and error stop.
Stoppage explained in this section is when the machine is stopped
intentionally by the operator and when the machine automatically stops
CAUTION due to an error occurring during processing. This section does not
include when the machine stops after processing of a wafer and ring
frame set in the machine has been completed.
5-4-1 Pause
The machine can be paused during automatic operation. When the <STOP> button on the operation
panel is pressed during automatic operation, the <STOP> button lights, and operation is halted.
Pause operation
During operation
Press the <STOP> button. The <STOP> button

STOP
lights and operation is halted.
Machine stops The machine stops.
START Press the <START> button.
Operation resumes
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83
5-4-2 Emergency stop (Optional)

The machine stops immediately when the <EMO> button is pressed during automatic operation. All
motor drives inside the machine stop immediately, and the cylinder-driven Attachment Table Unit
descends and stops.
Operation cannot be resumed after the <EMO> button is pressed during

automatic operation. The operator must remove the current workpiece set in
CAUTION the machine, and follow the operation sequence described below.
Emergency stop operation

During operation
Press the <EMO> button on the control box on the right side of the
Emergency arises
machine.
Emergency stop The machine stops immediately.
Eliminate the cause of the emergency stop.

Eliminate the cause
(Refer to the Maintenance manual Chapter 6 Troubleshooting)
Turn the <EMO> button to unlock the button.

Release the lock
START Follow the steps described in 5-3 Automatic Operation.
Operation resumes
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5-4-3 Error stop

If a problem occurs in the machine during automatic operation, the machine stops immediately. How
to deal with the problem differs depending on the type of error. Check the error information displayed
on the operation screen and take appropriate actions
Error recovery operation

During operation
Error occurs <STOP> button lights and the machine stops immediately.
Investigation
The error stop cannot be reset unless the error cause is

eliminated.
Eliminate the cause
Operation resumes
Error name Error state Actions required

Missing pre-cut tape
The machine stops when pre-cut tape Press the <TAPE FEED> button to
error (For Micro switch
is not detected or a timeout occurs feed the tape until the next tape
type tape detection
during tape feeding. stops at the correct position.
(Optional))
Ring frame detection The ring frame vacuum sensor is OFF.
Set the ring frame correctly or check
error This is due to an incorrect ring frame
the vacuum pads. Replace the
setting, or distorted or worn vacuum
vacuum pads as necessary.
pad.
Table safety sensor The detection sensor beam is
error obstructed by an object near the press
Remove the obstacle and resume
roller or the operator's hand placed in
operation.
a sensor detection area when the table
moves forward and backward.
Wafer vacuum error The wafer vacuum sensor is OFF. This

Set the wafer correctly.
is due to an incorrect wafer setting
RAD-2500m
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RAD-2500m
Semi-Automatic Wafer Mounting System
Maintenance Manual
Date of Preparation : 09 April 2013

Document No. : Doc-00034926G_E
Contents and specification of this manual are subject to change without prior
notification for improvement.
Unit notification is based on the SI units; reference values are in parentheses.
All pressure values are represented as gauge pressures.
Date of Implementation : 1 June 2009

Template No. : Doc-00035035_E
Chapter 1 Preface .............................................................................. 5
1-1 To the Customer ..............................................................................................5
1-2 Cautions on Use ..............................................................................................6
1-2-1 Definition on workers that are involved with this machine ........................................................ 10
1-2-2 Using the manuals .................................................................................................................. 10
1-2-3 Conventions in this manual ..................................................................................................... 10
1-3 Hazard Labels for Safety ............................................................................... 11

1-4 For Safe Use of the Machine ........................................................................16
1-5 Protective Gears ............................................................................................18
1-6 Safety Interlock (CE Specification) ................................................................19
1-6-1 Lockout ................................................................................................................................... 19
1-6-2 Emergency stop button (EMO button/Optional) ....................................................................... 20
1-6-3 Safety interlock (CE specification) ........................................................................................... 22
1-7 Status Indicator (Optional) .............................................................................23

1-8 Faceplate .......................................................................................................24
1-8-1 Standard specification ............................................................................................................. 24
1-8-2 Optional upright type ............................................................................................................... 25
1-9 Emergency Contact .......................................................................................26

1-10 Descriptions of Basic Terms ........................................................................27
APPENDIX/ MATERIAL SAFETY DATA SHEET (MSDS)...................................28
Chapter 2 Acceptance and Maintenance of Machine ................... 29

2-1 Installation......................................................................................................29
2-1-1 Installation environment .......................................................................................................... 29
2-1-2 Sufficient space for installation ................................................................................................ 30
2-1-3 Cleaning after opening ............................................................................................................ 30
2-1-4 Power supply .......................................................................................................................... 31
2-1-5 ALWAYS connect grounding wire ............................................................................................ 31
2-2 Air Supply Setting ..........................................................................................32

2-2-1 Air supply ................................................................................................................................ 32
2-2-2 Pressure setting for air supply ................................................................................................. 32
2-3 Power Supply ................................................................................................33

2-3-1 Power supply voltage .............................................................................................................. 33
Standard specification .................................................................................................................. 33
CE specification ........................................................................................................................... 33
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2
Chapter 3 Maintenance Mode ......................................................... 34
3-1 Maintenance Mode ........................................................................................34
3-2 Changing to Maintenance Mode ...................................................................34
3-3 Execution of Manual Operation .....................................................................35

3-3-1 Switch/Buttons used for manual operation .............................................................................. 35
3-3-2 Operation steps....................................................................................................................... 37
3-3-3 LED indication during manual operation .................................................................................. 37
Chapter 4 Condition Setting ........................................................... 38

4-1 Set-up Change ..............................................................................................38
4-1-1 Tape replacement ................................................................................................................... 38
4-1-2 Ring frame table replacement ................................................................................................. 39
4-1-3 Wafer table replacement ......................................................................................................... 40
4-1-4 Changing the mount mode ...................................................................................................... 42
4-1-5 Moving Tape Detection Unit .................................................................................................... 43
4-2 Regulator Settings .........................................................................................43
Chapter 5 Adjustment Procedure ................................................... 44

5-1 Press Roller Position Adjustment ..................................................................44
5-2 Dial Gauge Zero Adjustment .........................................................................46
5-3 Wafer Table Level Adjustment .......................................................................47
5-4 Tape Tension Control Settings.......................................................................48
5-5 Peel Plate Position Adjustment .....................................................................49
5-6 Tape Detection Sensor Adjustment ...............................................................50
5-6-1 Thrubeam type fiber sensor adjustment .................................................................................. 50
5-6-2 Micro switch adjustment .......................................................................................................... 52
Chapter 6 Troubleshooting ............................................................. 53

6-1 The POWER switch dose not light. ........................................................53
6-2 The <TAPE FEED>, <VACUUM>, <START> or <STOP> button does not light.
.............................................................................................................................54
6-3 The LED does not light even when the button is pressed. ...........................54
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3
6-4 The motor is actuated but the table does not move forward.........................55
6-5 The motor is not actuated, thus the table does not move forward................56
6-6 The table does not stop at the specified position. .........................................56
6-7 The <VACUUM> button lights but the ring frame and the wafer are not
vacuum-held. .......................................................................................................57
6-8 The <START> button does not light. .............................................................57
6-9 The table moves forward instead of backward .............................................57
6-10 The assistance air pipe does not blow air. ..................................................58
6-11 The motor is actuated but the press roller does not rotate. ........................58
6-12 The motor is not actuated, thus the press roller does not rotate. ...............59
6-13 The press roller rotates but tape is not fed..................................................59
6-14 The release liner is not wound. ...................................................................59
6-15 The tape is not separated from the release liner.........................................60
6-16 The tape does not stop at the specified position.........................................60
6-17 The tape is fed although the press roller has stopped. ...............................60
6-18 The tape is pulled back. ..............................................................................61
6-19 The table does not ascend. .........................................................................61
6-20 The release liner is caught between the tape and wafer. ...........................62
6-21 Bubbles form between the wafer and the tape. ..........................................62
Chapter 7 Periodic Check ............................................................... 63

7-1 Periodic Check ..............................................................................................63
7-1-1 Linear guide ............................................................................................................................ 64
7-1-2 Timing belt and pulley ............................................................................................................. 65
7-1-3 Ring frame vacuum pad .......................................................................................................... 66
7-2 Start-up Check ...............................................................................................67

7-2-1 Rubber roller ........................................................................................................................... 68
7-2-2 Wafer table ............................................................................................................................. 69
Ref. #1 Belt Tension Adjustment..........................................................................70
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4
Chapter 1 Preface
Chapter 1 Preface
Read carefully the section of important warning labels ,
which appear in this manual, and fully understand the
statement before using the product.
1-1 To the Customer

Thank you for purchasing our RAD-2500m series:
Semi-Automatic Wafer Mounting System (hereinafter
referred to as the machine).
To use the machine for as long a period as possible, be sure

to read the attached manual and understand items such as
cautions on use, machine overview, operation methods, and
items related to machine safety before starting any work.
The contents of the operation manual, maintenance manual,

and other documents provided with the machine do not
constitute any part of an agreement nor modify or change any
existing agreement, contract, or relationship.
The sales contract covers all our obligations. The warranty

covered in the contract with you is our sole warranty.
Note that any statement written here is never a new article for
warranty nor modifies the existing warranty.
Any part of this manual cannot be duplicated for use by a third

party without our permission.
RAD-2500m
5
Chapter 1 Preface
1-2 Cautions on Use

For safe use
We ask you to observe the following cautions for safety in using the machine.
Caution on electric shock
Even after turning off the machines main
breaker, electric current exists up to the
input terminals. Be careful not to make
contact with any of the input terminals.
Electric shock hazard from power

supply in the machine
Never touch an energized area such as a
power supply terminal block.
The machine employs an alternative
current line (100V, 200 V line) for input
power. Trained maintenance personnel
should perform the service when working
with the terminal block and performing
maintenance work.
Some components inside the machine still
have electric voltage even after all the
power has been turned off. Check the
voltage with an ohmmeter before doing
work.
Never fail to ground the machine.
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6
Chapter 1 Preface
Caution on entangling hands or body

The machine uses mechanical mechanism
for tension roller, Attachment Table Unit,
Table Drive Unit and winder.
Do not let any part of your body get too
close to the operation range of any
mechanical units or contact these areas
inadvertently.
In addition, be sure to turn off the power
when performing maintenance.
A warning sign is placed on these areas in
the machine.
Caution related to interlock

Interlock function is provided to the
machine for safety and protection of the
operator, protection of products, and the
protection of the machine.
Only those who are authorized and
well-experienced at your company should
manage and use this function. Never
operate the machine with the cover open
after disabling the interlocks. It is very
dangerous.
Caution on performing maintenance

Perform service with protective gloves and
safety shoes on, based on your safety work
procedure on performing maintenance on
the machine.
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Chapter 1 Preface
Caution on pressing the start button

Regardless of auto or manual operation,
press any start button only after confirming
that there is no one and no foreign matter in
the machine and that it is safe.
Other cautions
Do not fail to perform daily checks and
periodical checks before starting any
service.
When repairing or overhauling the
machine, watch out for the wiring between
machines and perform the work safely.
Pay full attention to safety by making
necessary all confirmations that the
machine is safe to use.
Read the section, "Hazard and safety
measures characteristic to the machine
during operation" for detailed information
on the different cautions used on the
machine.
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8
Chapter 1 Preface
Transfer
Read each manual thoroughly for cautions on change of frequency, removal of the power unit, or
transportation.
Contact our sales department.
Resale
When you have violated contract items stated in the sales contract, we do not assume any
responsibility.
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9
Chapter 1 Preface
1-2-1 Definition on workers that are involved with this machine

This machine divides the workers for machine operations and maintenance into the following worker
types according to the work details and the skills necessary for the work.
Worker type Work details

Operator Operations necessary for implementation of auto run only
Maintenance personnel Trained in machine maintenance.
Perform maintenance and inspection to keep the machine in good
condition
Take remedial measures when an error occurs during auto run
1-2-2 Using the manuals

Based on the above worker types, this machine provides manuals with work details, respectively for
operators and for maintenance personnel.
Worker type Manual for the respective work types

Operator Operation manual
Maintenance personnel Operation manual
Maintenance manual
CAUTION
Operations described in the Maintenance manual may be performed only
by authorized maintenance personnel.
Special knowledge and skills are required to perform these operations.
Performance by unauthorized personnel could lead to bodily injury or
machine damage.
1-2-3 Conventions in this manual

To describe the body text concisely, this manual uses the conventions in the following table.
In addition, the screens described in this manual may vary from the actual ones.
Convention Meaning
< > Buttons or switches on the operation box or in each unit on the machine.
Ex. <TAPE FEED> button
Important Emphasizes points to be noted in particular for the described operations.
Reference Provides reference information for the described operations.
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10
Chapter 1 Preface
1-3 Hazard Labels for Safety

Dangers, warnings, and cautions stated in the manual
Hazard levels for danger, warning and cautions on operation and maintenance are expressed in the
classification of 3 levels in the manuals of the machine. Understand the cautions and warnings of
areas where a sign is placed before handling the machine.
"DANGER" indicates that the wrong operation during

operation and maintenance or incorrect use of the machine
will cause serious injury or death to personnel. The method
described to avoid the hazard stated here must be given
DANGER priority over any other operation and maintenance procedure.
Operate the machine according to the method described to
avoid the hazard.
"WARNING" indicates that not strictly observing the correct

operation and maintenance procedure can lead to accidents
WARNING involving serious injury. The method to avoid such accidents
is stated here. Operate the machine as described.
"CAUTION" indicates that not strictly observing the correct

operation and maintenance procedure can cause injury. The
CAUTION method to avoid such accidents is stated here. Operate the
machine as described.
Besides the hazard classifications above, the following signs are used.
Indicates the matters without observance or correction of which the

product itself may be damaged, the production performance you are
IMPORTANT
recommended to know during operation and maintenance of the
machine, and the mistakes you are likely to make.
Indicates actions prohibited during operation or maintenance of the

machine.
PROHIBITED
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11
Chapter 1 Preface
Warning label on machine

To ensure safety, symbol stickers are attached to particular areas of units where extra caution should
be taken.
These areas are mentioned in section 1-4 For Safe Use of the Machine" together with their potential
hazard. Check the section along with this section before operating the machine.
Always pay full attention to safety by taking great care especially to

personnel safety and operate the machine using the proper procedure
WARNING when installing, operating, and performing maintenance on the machine.
Extremely hazardous high voltage area exists around

electrical lines inside the machine. To prevent accidents and
electric shock through contact with high voltage areas, turn
off the machines circuit breaker and the power distribution
panel before performing maintenance.


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12
Chapter 1 Preface
Hazard label attachment position (Standard specification)

ELECTRICAL HAZARD
LTC-PL005E-01
OP: Option
Machine appearance
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13
Chapter 1 Preface
Hazard label attachment position (Option upright type)
Machine appearance (Option specification)
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14
Chapter 1 Preface
Hazard label attachment position (Common)
Inside machine control box

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15
Chapter 1 Preface
1-4 For Safe Use of the Machine

on the machine to be well-acquainted with the potential hazards and how
WARNING to avoid each hazard.
Hazard and safety measures characteristic to the machine during operation
Electric shock
Personnel receive an electric shock Do not fail to turn off the breaker
through contact with the terminal block. before touching the terminal block.
When removing the terminal block
cover for work, be sure to replace
the cover after the work, has been
completed.
Be careful that the voltage is present
at the primary side (input side) of the
breaker except when the electricity
has been turned off on the facility
side.
Short circuit is formed. Connect the terminal block as it was

before, Removing any wires and
install the cover.
Do not leave any tools on any
electric devices.
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16
Chapter 1 Preface

of the machine to be well-acquainted with the potential hazard and how to
WARNING avoid each hazard.
Mechanical hazard
Personnel gets body or hands caught in Moving mechanical drive area exists
the unit. in the machine. Do not place hands
or fingers in the machine carelessly.
Your hands or fingers may get
caught in the driving gears or belts.
Turn off the machine's circuit
breaker and the power distribution
panel before performing
maintenance.
When you operate the machine

manually, be sure to work with more
than two people present and check
the safety of each other by calling
out to each other when doing work.
Be aware of the location of the
emergency button at all time before
starting to work.
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17
Chapter 1 Preface
1-5 Protective Gears

The following protective gears may be needed in performing maintenance.
Be sure to wear protective gears according to the type of work.
Protective
glasses
Protective
gloves
Protective glasses
Protective gloves
Rubber apron for laser

(Electromagnetic shielding apron)
Rubber boots
Protective gears (example)
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18
Chapter 1 Preface
1-6 Safety Interlock (CE Specification)

1-6-1 Lockout
Lock out the circuit breaker
WARNING
When servicing the machine after power has been turned off, lockout the
circuit breaker so that the power will not be turned on inadvertently. The
appropriate person should keep the padlock key.
To lock the circuit breaker when it is off
1) Turn the handle toward the reset position at the marking of the case.
2) With the lock plate pushed in, turn the handle toward the OFF position.
3) Place a padlock through the hole on the handle to lock the handle. Use a padlock as described
below.
Marking on the case
Dimension of padlock (mm)

Use any padlock available in market.
A B C
All 35 19 5 Handle
types 40 22 or 23 5.5
Lock plate
Dimension C: 8mm or less can be
applied. Padlock
To release the lock, remove the padlock, and then turn the handle in the RESET direction until the
lock plate returns to its original position. Once the lock place is at its original position, the handle is
unlocked.
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19
Chapter 1 Preface
1-6-2 Emergency stop button (EMO button/Optional)
WARNING
Be sure to be acquainted with the location of the emergency stop button
(EMO) and check the functional operation of the <EMO> button right after
the machine startup or before the first operation or maintenance check.
It may lead to unexpected serious accident if the <EMO> button is unable
to be pressed or does not operate in an emergency.
Press the <EMO> button to stop the machine in emergency during operation or maintenance check.
Pressing the <EMO> button shuts off the power to the machine to maintain the machine in safe
conditions.
<EMO> button is red and lock switch button.
Emergency stop button (EMO button)
WARNING
Release the <EMO> button only after the problem was eliminated.
Releasing the <EMO> button without making confirmation is very
dangerous and may lead to an unexpected serious accident. The <EMO>
button does not recover automatically. Do not release them without
making confirmation that the danger is no longer present.
Press the emergency stop button when a situation dangerous to the machine or personnel occurs.
All the units will stop in a safe position.
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20
Chapter 1 Preface
One <EMO> button is provided on the machine main body.
Be sure to check for damages to the machine when recovering from power
shut down from the machine (when EMO is activated).
IMPORTANT
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21
Chapter 1 Preface
1-6-3 Safety interlock (CE specification)

The machine is equipped with various interlocks that act as safety measures against fatalities or
machine failure due to malfunction.
Hardware interlock by hard-wiring is used for interlock. (Software interlock by computer is used for
CE specification).
Cover interlock switch is provided on the cover No.4.
No.4
No.2
No.3 No.1
No.2 No.4
No.3 No.1
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Chapter 1 Preface
1-7 Status Indicator (Optional)

The status indicator lights during operation, at the end of operation, and when an error occurs.
Status
Red
Yellow
Green
Machine status Green Yellow Red

Power OFF
Power ON Lit
Emergency stop
During operation Lit
Operation ended Lit
Error stop Lit
Yellow indicator lights when the power is ON.
Green indicator lights during operation.
Yellow indicator lights at the end of operation.
Red indicator lights when the machine stops due to an error.
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23
Chapter 1 Preface
1-8 Faceplate
A faceplate containing the machine model name, serial number, manufacturing date, etc. is attached
at the rear part of left side cover of the machine.
Check the information on the faceplate when contacting us with questions regarding operation
method, ordering parts, and repairs.
Face plate

MADE IN JAPAN

FREQUENCY : 50/60Hz
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Chapter 1 Preface
Faceplate

MADE IN JAPAN

FREQUENCY : 50/60Hz
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Chapter 1 Preface
1-9 Emergency Contact

INA Technology 7095 Komuro, Inamachi, Kita Adachi-gun,
Center Saitama 362-0806 Japan
Tel: +81-48-720-1211 Fax: +81-48-720-1221
Head Office 23-23 Honcho, Itabashi-ku, Tokyo 173-0001 Japan
Tel: +81-3-5248-7711 Fax: +81-3-5248-7760
Advanced Materials Kyouwaiidabashi Bldg., 2-1-2 Kouraku, Bunkyou-ku,
Div. Tokyo 112-0004 Japan
Tel: +81-3-3868-7737 Fax: +81-3-3868-7726
LINTEC OF AMERICA, 4629 E. Chandler Blvd., Suite 110
INC Phoenix, AZ 85048 USA
Tel: +1-480-966-0784 Fax: +1-480-966-5321
LINTEC SINGAPORE 20 Bendemeer Road, #02-01 Cyberhub,
PRIVATE LIMITED 339914, Singapore
Tel: +65-6221-5854 Fax: +65-6221-6458
LINTEC ADVANCED 27F-2-B3, No. 29, Hai-Pien Road,
TECHNOLOGIES Kaohsiung 802, Taiwan
(TAIWAN), INC. Tel: +886-7-331-3000 Fax: +886-7-331-3900
LINTEC ADVANCED 3rd FL., Dongwha Bldg., 207-1, Nonhyun-Dong,
TECHNOLOGIES Kangnam-Ku, Seoul 135-010, Korea
(KOREA), INC. Tel: +82-2-548-1537 Fax: +82-2-548-0571
LINTEC ADVANCED UG2 Richville Corporate Tower,
TECHNOLOGIES Madrigal Business Park, Alabang-Zapote Road,
(PHILIPPINES), INC. Alabang, Muntinlupa City 1780, Philippines
Tel: +63-2-772-3309 Fax: +63-2-772-3311
Service calls can be made between the hours of 9 am to 5 pm Monday Friday excluding holidays.
RAD-2500m
26
Chapter 1 Preface
1-10 Descriptions of Basic Terms

Wafer Always a wafer, regardless of whether or not the wafer is
laminated with surface protection tape
Ring frame Ring which a wafer is mounted on with dicing tape.
Pre-cut tape Dicing tape that is cut to the shape and size of ring frame.
Release liner Release film of dicing tape which is structured by 2 layers, tape
and release film.
RAD-2500m
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Chapter 1 Preface
APPENDIX/ MATERIAL SAFETY DATA SHEET (MSDS)

This appendix contains a material safety data sheet (MSDS) for chemicals used in this machine.
Chemicals contained in MSDS
Grease
CAUTION
The following material safety data sheet (MSDS) provides general
information for chemicals used in this machine. As MSDS descriptions may
vary depending on regulations in your region and country, obtain MSDS from
your local dealer or manufacturer when necessary.
MSDS descriptions may be updated. Be sure to always obtain the latest
MSDS.
The user should prepare MSDS for chemicals purchased by the user to be used in this machine. The
MSDS provided should be attached to the end of this manual, making it possible for all the operators
to confirm its content at any time and understand the danger.
Location where grease is used

LM rail
Attachment Table Unit Multemp PS No.2(KYODO YUSHI CO.,LTD)
Unwinder (Optional) Shell Alvania EP Grease 2 (SHOWA SHELL SEKIYU K. K.)
RAD-2500m
28
Chapter 2 Acceptance and Maintenance of Machine
Chapter 2 Acceptance and Maintenance of

Machine
Open the package in the presence of our representative.
The package should be opened by more than 2 persons with qualified
WARNING package-opening personnel or a supervisor present.
Ware protective glasses and gloves when performing work.
2-1 Installation
2-1-1 Installation environment
Install the machine in the clean room. Avoid the locations described below due to the difficulty in
achieving safety and the possibility of failure.
In direct sunlight
Where electrical supply problems occur (voltage fluctuation, noise)
Where temperature fluctuates rapidly
Nearby heat sources
Where temperature and humidity are high
Where ventilation is not good
Where frequent vibration is observed
Where dew formation takes place
Where an ignition source exists
Where the machine may be damaged by fluid or gas in the air
Where floor is not strong enough or not leveled
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29
2-1-2 Sufficient space for installation

Be sure to install the machine at least 1 m away from the wall to ensure safe working space.
Similarly, an area of more than 1 m should be secured for maintenance. Hold the shaded area in the
figure below when moving the machine.
In option specification (upright type)
2-1-3 Cleaning after opening

When the package is opened, clean the inner and outer surface of the machine with ethanol before
moving the machine to the clean room.
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30
2-1-4 Power supply
Prepare the power supply defined in the specifications.
Be sure to install an eart-leakage circuit breaker.
Provide an independent power supply for the machine. Do not connect any other product to the
power supply.
Connecting wires with wet hands is extremely dangerous.

After completing wiring and supplying power, check the following.
No looseness at the connection of the power supply
DANGER No cracks or scratches on the power cable
No abnormal heat generation from the power plug or power
cable
2-1-5 ALWAYS connect grounding wire

ALWAYS connect the grounding wire to prevent electrical shock.
The grounding wire for the machine is the green and yellow striped cable. Connection of the earth is
limited to a terminal block with a G mark and PE mark or an earth bar with mark.
The machine should be grounded to an appropriately grounded terminal at your facility or the terminal
on the power distribution panel.
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31
2-2 Air Supply Setting

2-2-1 Air supply
Make sure to connect the air supply to the regulator at the rear of the machine using air hose with its
diameter larger than the specified size.
Air supply
The machine is provided with a one-touch coupling

(8) and a 5-meter air hose (8).
2-2-2 Pressure setting for air supply
Only those persons in charge of maintenance are permitted to change

CAUTION settings. Operators are requested only to check the gauge.
A primary air regulator is provided at the rear of the machine. Turn the regulator knob to set the
desired pressure.
Setting pressure: 0.49MPa
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32
2-3 Power Supply

2-3-1 Power supply voltage
Be sure to turn OFF the primary breaker before wiring.

DANGER
Refer to the 1-8 Faceplate for power specifications when the machine is delivered to your
premises.
The machine is provided with a 3-meter power cable. Connect the cable to your breaker correctly.
Turn ON the breaker on the machine, and then press the <POWER> switch.
The switch LED lights and <TAPE FEED>, <VACUUM>, <START> and <STOP> button LEDs light
once (approx. 2 seconds).
CE specification
Refer to the 1-8 Faceplate for power specifications when the machine is delivered to your
premises.
The machine is provided with a 3-meter power cable. Connect the cable to your breaker correctly.
Turn ON the breaker on the power box, and then press the <ON> button. The <ON> button lights and
the <TAPE FEED>, <VACUUM>, <START> and <STOP> button LEDs of the machine light once
(approx. 2 seconds).
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Chapter 3 Maintenance Mode

3-1 Maintenance Mode
Only maintenance personnel are permitted to perform manual operation
and setting changes.
WARNING
The following operations are available in maintenance mode.
Execution of manual operations

Independent cylinder operation
Independent motor operation
Independent vacuum operation
Independent pressurization operation
LED test
3-2 Changing to Maintenance Mode

1) Turn OFF the <POWER> switch if power is already supplied.
2) Wait for approximately five seconds.
3) Turn the <POWER > switch ON with the <STOP> button held down.
4) The <TAPE FEED><VACUUM><START> and <STOP> lamps flash twice, indicating that
maintenance mode is selected.
CE specification
1) Press the <OFF> button on the power box if power is already supplied.
2) Wait for approximately five seconds.
3) Press the <ON> button on the power box with the <STOP> button held down.
4) The <TAPE FEED><VACUUM><START> and <STOP> LEDs flash twice, indicating that
maintenance mode is selected.
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3-3 Execution of Manual Operation

3-3-1 Switch/Buttons used for manual operation
Operation panel
Switch/Button names Functions

POWER Starts and stops the machine
Increments the maintenance mode number to select the desired
TAPE FEED
operation.
Decrements the maintenance mode number to select the desired
VACUUM
operation.
START Starts the selected mode.
Stops the current operation.
STOP
Stops the cycle step motion.
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CE specification
Operation panel(CE specification)
Button names Functions

Increments the maintenance mode number to select the desired
TAPE FEED
operation
Decrements the maintenance mode number to select the desired
VACUUM
operation.
START Starts the selected mode.
Stops the current operation.
STOP
Stops the cycle step motion.
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3-3-2 Operation steps
1) Press the <TAPE FEED> or <VACUUM> button to increment or decrement the maintenance
mode number. The selected mode is indicated by lighting the <TAPE FEED><VACUUM>
<START> and <STOP>.
2) Press the <START> button to execute the selected mode operation. Press the <STOP> button to
stop the operation.
3-3-3 LED indication during manual operation

LED OFF LED ON
Maintenance mode indication

TAPE Mode The operation details
STOP START VACUUM
FEED
0 LED test
1 Ring frame suction ON/OFF
2 Wafer suction ON/OFF
3 Wafer pressure ON/OFF
4 Assistance air ON/OFF
5 Table UP/DOWN
6 Tension roller torque ON/OFF
7 Drive roller torque ON/OFF
8 Tape feed
9 Table forward/backward repetition ON/OFF
A Table FORWARD/BACKWARD
B
C
D
E
F
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Chapter 4 Condition Setting

4-1 Set-up Change
4-1-1 Tape replacement
1) Move the tape guide to the width of the tape to be used.(Fit the guide to the roller groove.)
Roller Tape guide
6 8 (m/8)
8 12 (m/12)
2) Table below indicates the tape size can be used and if the reel plate/collar is used in each
machine.
Tape Reel plate Collar

6
2500m/8
8
8
2500m/12
12
Unwinder Collar for 6 (m/8)

Collar for 8 (m/12)
Reel plate
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4-1-2 Ring frame table replacement
1) Remove the four cap bolts securing the ring frame table.
Cap bolts (4 pcs.)
Ring frame table
2) Press the outer band of coupler with your fingers and disconnect the air hose of ring frame
suction from the coupler.
Air hose of ring frame suction
Coupler
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3) Unload the current ring frame table. Place the desired ring table against the positioning pins.
Secure the table with the four cap bolts. Connect the air house to the coupler.
Positioning pins
4-1-3 Wafer table replacement
1) Remove the cap bolts securing the wafer table.
Positions for cap bolts
Positions for cap bolts
*The positions for cap bolts may vary for a table with a special specification.
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2) Press the outer band of the coupler with your fingers and disconnect the air hose of wafer suction
from the coupler.
Air hose of wafer suction
Coupler
3) Remove the heater power connector and the thermocouple connector. (Only when the heater
option is selected)
Please make sure not to leave the connector of machine side in the driving area when the heater
table is not used to prevent the connecter from being caught in the driving area.
Connector of table side (Male) Connector of machine side (Female)
Pull out
4) Unload the current wafer table. Place the desired wafer table against the positioning pin. Secure
the table with four cap bolts.
Positioning pin
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5) Connect the air hose of wafer suction to the coupler.
Air hose of wafer suction
Coupler
6) Reconnect the connecters for heater power and thermocouple removed in 3). (Only when the
heater option is selected)
Insert
Connector of table side (Male)

Connector of machine side (Female)
4-1-4 Changing the mount mode

Refer to the Operation Manual 3-1-5 Switches on front of control box to change the mount mode
setting.
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4-1-5 Moving Tape Detection Unit

The diameter of the pre-cut tape varies for the side of wafer used. The Tape Detection Unit must be
moved to the specified point on the scale. Loosen the wing nut, and move the Tape Detection Unit
back and forth. (Similarly, adjust the tape attachment position when it has shifted due to the tension
level.) Please follow the same steps for adjustment, even when the tape size is different from those
indicated in the diagram below.
8 (m/8)
6 Wing nut
12 (m/12)
8
Scale
Tape Detection Unit
4-2 Regulator Settings

A pressure regulator is located on the rear of the machine. The setting pressure is shown below.
Setting pressure: 0.49MPa
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Chapter 5 Adjustment Procedure

5-1 Press Roller Position Adjustment
Follow the steps below to adjust the position of the
press roller, peel plat and attachment table.
Set a ring frame on the attachment table.
With manual operation, move the attachment table

until it is immediately under the press roller.
Press roller
Raise the attachment table with manual operation.
Peel plate
Table rising distance15mm
Attachment table
Press roller gear Adjust the position of the middle gear so that the
gear on the press roller shaft and the middle gear
are not engaged.
0.20.5mm
Middle gear
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Press roller Check that the press roller and peel plate, and peel
plate and attachment table are not touching.
Attachment table
Lower the attachment table with manual operation.

Press roller
Attachment table
Adjust the position of the middle gear so that the

Press roller gear Press roller
gear on the press roller shaft and the middle gear
are engaged.
Middle gear
Attachment table
Press roller Check that the press roller and the peel plate are
touching.
Repeat the above check several times.

Peel plate
12.5mm
Attachment table
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5-2 Dial Gauge Zero Adjustment

1) Move the attachment position of dial gauge based on the size of wafer that will be adjusted.
*Slide the dial gauge based on wafer size if the level adjustment jig with the optional sliding
framework is used.
Lock screw
Dial gauge
Level Adjustment Jig Level Adjustment Jig (sliding framework)

2) Place the level adjustment jig on the surface plate.
* If the optional adjistmet jig with sliding framework is used, remove the platform and place on the surface
plate.
3) Loosen the lock screw on the scale plate of the dial gauge.
4) Adjust the scale plate on the dial guage so that the long needle and the short needle indicate zero(0),
and tighten the lock screw.
Long needle
Short needle
*For the use of the optional level adjustment jig with sliding framework, follow the instructions below.
1) Hold the main plate to move the jig.
2) Since the dialgauge rotates, place the jig on the clear spot to read the gauge.
3) To protect the front edge of the dial gauge, use a platform for storage.
Main plate
Platform
Level Adjustment Jig (sliding framework)
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5-3 Wafer Table Level Adjustment

1) Place a ring frame on the ring frame table
2) Measure the thickness of the ring frame with the level adjustmet jig.
3) Revome the ring frame.
4) Place the wafer on the wafer table to be vaccumed.
5) Place the level adjustmet jig on the ring frame table and align the tip of the dial guage to touch
the wafer.
6) Open the doors on the sides of the wafer table.On checking the dial gauge on the level
adjustment jig, loosen the level adjustment fixing nut under the wafer table and turn the level
adjustment nut to adjust the tables height.
The proper value is:

Ring frame thickness +0.20.1mm
Example 1: in case of ring frame thickness is 1.2mm

1.2+0.20.11.31.5
Example 2: in case of ring frame thickness is 1.5mm

1.5+0.20.11.61.8
7) After adjusting, tighten the level adjusting fixing belt.
Dial gauge
Wafer
Ring frame table

Spring
Level adjustment nut Level adjustment

fixing nut
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5-4 Tape Tension Control Settings

1) Torque setting board inside the control box
VR07 VR06 VR05 VR04 VR03 VR02
2) Function and adjustment
<POWER> switch
Control Function Adjustment
frequency (Hz)
VR02 50 Tension torque adjustment

Tension during tape feeding and Until the tension roller
Torque when the machine has rotates lightly
VR03 60 stopped for attachment
VR04 50 Winder torque adjustment

Until the drive roller
when the machine has
rotates lightly
VR05 60 stopped for attachment
Winder
Torque
VR06 50 Winder torque adjustment
during tape feeding and Until the release liner is
tape attachment wound (tight)
VR07 60
*Turning the control clockwise makes tension larger.

*Use a precision driver for adjustment.
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5-5 Peel Plate Position Adjustment

1) Move the ring frame table to the middle position in manual mode.
2) Set a 2mm-thick plate on the ring frame table.
3) Raise the ring frame table with manual operation.
4) Set the gap between the peel plate and the ring frame table to be approximately from 2 to 2.5mm.
Peel plate
2mm-thick plate
Ring frame table

Up
Peel plate
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5-6 Tape Detection Sensor Adjustment

5-6-1 Thrubeam type fiber sensor adjustment
Tape detection sensor
Sensor amplifier
Shaft
Stopper
This section describes how to adjust the sensor amplifier (two-point tuning)
1) Set the tape to be adjusted.

Refer to the Operation Manual 5-2 Setting Pre-cut Tape as to the tape setting method.
2) Turn the <POWER> switch ON.
3) Lift up the shaft above the press roller by hand and insert the stopper. (See the above figure)
st
4) Pass the tape manually so that the 1 pre-cut tape is placed between the tape detection sensors
(between the beam of the transmitter and receiver).
Pre-cut tape Tape detection sensor
Operator side Unwinder side

st nd
1 pre-cut tape 2 pre-cut tape
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5) Press the <SET> button of sensor amplifier.

(SET is displayed on the threshold indication (Green) field.)
Threshold indication (Green)

SET (Threshold between ON/OFF) Current value indication (Red)
6) Pass the tape manually so that the release liner is placed between the tape detection sensors
(between the beam of the transmitter and receiver).
(If necessary, peel the tape off slightly to detect the release liner.)
Release liner Tape detection sensor
Operator side Unwinder side
7) Press the <SET> button of sensor amplifier.

(The threshold is displayed after the indication field (Green) flashes.)
That is the end of sensor amplifier adjustment (two-point tuning).

st
8) Wind the tape a little toward Unwinder side so that the 1 pre-cut tape backs to the tape
detection sensor position.(Refer to the 4) above.)
9) Remove the stopper supporting the press roller and inserted in 3).
10)Press the <TAPE FEED> button to check if the tape stops.
Note: Perform the tuning adjustment using the tape whose difference of light amount between tape
and the release liner is the smallest when more than one tape is used.
As to the sensor amplifier detail, please refer to the end of the manual.
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5-6-2 Micro switch adjustment

This section describes how to adjust the micro switch (OP).
1) Set the tape to be adjusted.

Refer to the Operation Manual 5-2 Setting Pre-cut Tape as to the tape setting method.
2) Turn the <POWER> switch ON.
3) Lift up the shaft above the press roller by hand and insert the stopper between there.
4) Set the square wheel of micro switch to the position where it touches the release liner only.
5) Loosen the lock bolt of micro switch.
6) Loosen the lock nut of adjustment knob.
7) Once loosen the knob to the end, and then tighten the knob to search the point where the micro
switch turns ON. The point shall be defined as A.
8) Loosen the knob little by little from A point to search another point where the micro switch turns
OFF. The point shall be the basic setting value.
9) Manually move the tape back and forth to check if the micro switch turns ON/OFF.
Similarly, adjust both micro switches when double micro switch (OP) is selected. Also adjust the
clearance between centers of them to be approximately 5 to 6mm.
Lock bolt
Adjustment knob
10) Tighten the lock bolt and the lock nut.
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Chapter 6 Troubleshooting
6-1 The POWER switch dose not light.
Cause Solution
Circuit breaker (CB01) may be If the breaker is OFF, turn it ON.
OFF. If the breaker turns OFF repeatedly, check the 100 VAC lines for a
short circuit.
Determine the faulty unit by connecting two 100 VAC lines each
for the torque motor, the breaker, and 24 VDC power supply.
Check the power line for leakage.
<POWER> switch may have Check that the <TAPE FEED>, <VACUUM>, <START>, and
ended its product life. <STOP> buttons light once when power is supplied.
If the <POWER> switch is unlit, please contact LINTEC.
Power cable may be faulty. Measure the voltage inside the control box (100 VAC 10%). If
there is no voltage, check the power supply or power cable.
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6-2 The <TAPE FEED>, <VACUUM>, <START> or <STOP> button

does not light.
Cause Solution
Buttons (PBL0104) may have Turn the power OFF, wait for five seconds, then turn the power
ended its product life. ON again, and check whether or not the button lights.
If some of buttons are OFF, please contact LINTEC for
replacement of the buttons.
24 VDC (SPS01) power supply Check that the 24 VDC <POWER> switch lights.
may be faulty. If not, measure the 100 VAC and 24 VDC line voltages.
Check for a short circuit. If there is none, please contact LINTEC
for replacement of the power supply.
Wiring may be faulty. Check the button voltage.
Between P1 and N1: 24 VDC
Between Y00 ~ 03 and N1: 24 VDC
(3 seconds after turning the power ON)
Controller may be faulty. Check that controller output monitors YB to YE light. If not,
please contact LINTEC for replacement of the controller.
6-3 The LED does not light even when the button is pressed.
Cause Solution
Buttons (PBL0104) may be Press the <TAPE FEED>, <VACUUM>, <START> and <STOP>
faulty. buttons, and check that they do not stick when returning. If they
stick often, please contact LINTEC for replacement.
Check that the controller input monitors light or turn off the lit LED
when the corresponding buttons are pressed.
TAPE FEED : X4 VACUUM : X5
STOP : X7
START : X6
(lit LED is turned off)
If the input monitors do not turn ON/OFF correctly, check the
wiring and buttons.
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6-4 The motor is actuated but the table does not move forward.
Cause Solution
Is the tape attached to the table? Turn the power OFF and remove the tape.
Are the table drives linear Turn the power OFF and tighten any loose bolts.
mounting bolts or the drive
pulleys set bolts not loose?
Is the drive belt not faulty? Press the belt with your finger and check that it sags about 5
to10mm. If the tension is not correct, adjust the position of the
pulley on the free side (without motor).
Turn the power OFF and check that the belt is straight. If not,
adjust the drive motor position.
Gear head may be faulty. Turn the power OFF. Move the table manually and check the gear
head for noise. If the table does not move smoothly or noise is
generated, please contact LINTEC for replacement of the gear
head.
Wiring may be faulty. Check the wiring between the stepping driver and the motor (wire
Nos. PM10 to 15). If wiring is loose, fasten it.
Driver setting may be faulty. Check the driver setting.
Turn the DIP switches #1 to #4 ON in the driver setting.
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6-5 The motor is not actuated, thus the table does not move
forward.
Cause Solution
Stepping driver (PMD1) may be Check that the driver <POWER> lights.
faulty. If unlit, measure the voltage (24 VDC) between wire P1 and N1.
If the voltage is incorrect, check the wiring.
If the voltage is correct, please contact LINTEC for replacement
of the driver.
Wiring may be faulty. Check the driver wiring of P2, P3, Y11 and Y12. If any wire is
faulty, please contact LINTEC.
Stepping motor (PM1) may be Check the stepping driver and wiring. If they are correct, please
faulty. contact LINTEC.
Table entrance safety sensor Check that the sensor beam is obstructed.
(PH03) may be faulty. Check the input monitor (XE) of the controller by turning the
sensor ON/OFF.
Check the sensor cord (X14) and sensor operation.
6-6 The table does not stop at the specified position.

Cause Solution
Table sensors (PH01, PH02) may Turn the power OFF, and move the table into the beam of the
be faulty. U-shaped table position detection sensor.
Turn the power ON, and check the controller input monitor.
Advance limit: X3
Retract limit (in storage): X2
When the monitors do not light, check the wiring.
When wiring is correct, please contact LINTEC.
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6-7 The <VACUUM> button lights but the ring frame and the wafer
are not vacuum-held.
Cause Solution
Is air pressure not faulty? Set primary air pressure to 0.49MPa.
If the pressure is too low, check the air supply.
Is the vacuum pump operating? Check the power supply of pump unit.
(Option)
Wiring (SV01, 02) may be faulty. Check that the vacuum solenoid valve monitor lights. If the
monitor does not light, check that the power cord is plugged in.
Frame suction: SV01
Wafer suction: SV02, SV06 and SV07
If the power code is disconnected, plug it in.
If the power code is connected correctly and the solenoid valve
monitor does not light, check the wiring.
Is mount mode setting not Refer to the MOUNT MODE LIST for settings.
incorrect?
6-8 The <START> button does not light.

Cause Solution
Frame suction sensor (VS01) Check that the suction sensor turns ON when a correctly set ring
may be faulty. frame is vacuum-held.
Wafer suction sensor (VS02) may Check that the suction sensor turns ON when a correctly set
be faulty. wafer is vacuum-held.
6-9 The table moves forward instead of backward

Cause Solution
Wiring of stepping driver (Y12, Check for faulty wiring, and please contact LINTEC if wiring
P3) may be faulty. repair is necessary.
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6-10 The assistance air pipe does not blow air.

Cause Solution
Is primary air pressure 0.49MPa? If the pressure is too low, check the air supply.
Check for damaged or disconnected air pipes within the
machine. If any pipe is damaged,please contact LINTEC.
Wiring (Y10) may be faulty. Check that the solenoid valve monitor lights. If the monitor does
not light, check that the power cord is plugged in.
Assistance air: SV05
If the power cord is disconnected, plug it in.
If the power cord is connected correctly and the solenoid valve
Is the speed controller set Adjust the speed controller properly.
properly?
6-11 The motor is actuated but the press roller does not rotate.
Cause Solution
Press roller gear may not be Drive gear position adjustment
engaged with drive gear.
1 Place a ring frame in position on the table.
2 Turn the power OFF and move the table to the middle
position.
3 Manually move the table upward, and adjust the drive gear
position so that the gap between the drive and press roller
gears is 0.2 to 0.5mm.
Is the drive pulley set bolt not Turn the power OFF and tighten any loose bolts.
loose?
Is the drive belt not faulty? Turn the power OFF and press the belt with your finger to check
that it sags appropriately predefined. If the tension is not correct,
adjust the motor position.
Check that the belt is straight. If not, adjust the drive motor
position.
Gear head may be faulty. Turn the power OFF. Move the drive gear manually and check the
gear head for noise. If the drive gear does not rotate smoothly or
noise is generated, please contact LINTEC.
Wiring may be faulty. Check the wiring between the stepping driver and the motor
(wiring Nos. PM20 to 25). If the wiring is disconnected,
re-connect it.
Driver setting may be faulty. Check the driver setting.
Turn the DIP switches #1 to #4 ON in the driver setting.
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6-12 The motor is not actuated, thus the press roller does not
rotate.
Cause Solution
Stepping driver (PMD1) may be Check that the driver <POWER> lights.
faulty. If unlit, measure the voltage (24 VDC) between wire P1 and N1.
If the voltage is incorrect, check the wiring.
If the voltage is correct, please contact LINTEC.
Wiring may be faulty. Check that the stepping driver wirings (P4, P5, Y13 and Y14) are
damaged. If so,please contact LINTEC.
Stepping motor (PM2) may be Check the stepping driver and wiring. If they are correct and the
faulty. motor still does not work, please contact LINTEC.
6-13 The press roller rotates but tape is not fed.

Cause Solution
Is the press roller not faulty? Check the following.
1 The press roller stopper is released. If not, release it.
2 The press roller is pressed parallel to the peel plate.

Manually move the press roller up and down to check that it
moves smoothly. If not, adjust the position of the vertical
drive press roller shaft.
3 The press roller surface is clean. If not, wipe the surface with
ethanol.
Tension torque may not be set Remove the tape from the machine. Adjust the tension torque
properly. with VR02 for 50 Hz and VR03 for 60 Hz so that the tension roller
lightly rotates.
Is the press roller not slipping? Check the press roller for slipping by pressing the <TAPE FEED>
button. If the tape slips on the press roller surface even after
cleaning with ethanol, please contact LINTEC for replacement of
the press roller.
6-14 The release liner is not wound.

Cause Solution
Release liner winding clutch may Open the cover of the driver section, and try operating by
be worn. loosening the slip clutch control on the winding section.
Please contact LINTEC for replacement of the clutch, if it is worn.
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6-15 The tape is not separated from the release liner.

Cause Solution
Is winding torque set properly? Remove the tape from the machine. Adjust the winding torque
with VR06 for 50 Hz and VR07 for 60 Hz so that the release liner
is wound correctly.
Wiring may be faulty. Unload the tape from the machine, and turn the winding torque
control clockwise and counterclockwise. If the drive roller speed
does not change even when the control is turned, check the
wiring.
6-16 The tape does not stop at the specified position.

Cause Solution
Tape detection sensor (PH04) Check the following.
may be faulty. 1 Power is supplied to the sensor amplifier. (Digit of sensor
amplifier monitor is displayed). If not, check the power supply
to the amplifier.
2 Beam is passed from transmitter (upper) side of fiber sensor.
If not, check the sensor installing condition to the amplifier.
3 Threshold is set appropriately.

Check the sensor amplifier if the LED lights when tape is
placed and it does not light when release liner is placed.
Refer to the 5-7 Tape Detection Sensor Adjustment as to the
tape adjustment method.
6-17 The tape is fed although the press roller has stopped.
Cause Solution
Is winding torque set properly? Adjust the winding torque with VR04 for 50 Hz and VR05 for 60
Hz so that the release liner is wound with light tension.
Wiring may be faulty. Unload the tape from the machine, and turn the winding torque
control (with VR04 for 50 Hz and VR05 for 60 Hz) clockwise and
counterclockwise. If the drive roller speed does not change even
when the control is turned, check the wiring.
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6-18 The tape is pulled back.

Cause Solution
Tape tension setting may be too Lower the tension with VR02 for 50 Hz and VR03 for 60 Hz.
high.
Is the attachment position of Check that the tape tip is attached to the ring frame. Adjust the
thrubeam type fiber sensor thrubeam type fiber sensor position appropriately.
correct?
Wiring may be faulty. Turn the tension OFF manually.
Unload the tape from the machine, and set the tension roller
torque to ON in manual mode.
Try turning the tape tension control clockwise and
counterclockwise.
When the tension roller speed does not change even when the
control is turned, check the wiring.
6-19 The table does not ascend.

Cause Solution
Primary air pressure may not be If the pressure is too low, check the primary air supply. If the pipe
0.49MPa. is damaged, please contact LINTEC for its replacement.
Wiring may be faulty. Manually move the table vertically. Check that the solenoid valve
(SV04) monitor lights.
If the lamp does not light, check that the power cord is plugged in.
If the power cord is disconnected, plug it in.
If the power cord is connected correctly and the solenoid valve
Is the solenoid valve speed Adjust the speed controller properly.
controller set properly?
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6-20 The release liner is caught between the tape and wafer.
Cause Solution
Is winding torque set properly? Adjust the winding torque with VR06 for 50 Hz and VR07 for 60
Hz so that the release liner is wound correctly.
Is the peel plate position correct? Perform the attachment to check that the peel plate tip does not
touch the ring frame. If the peel plate is touching the ring frame,
raise the peel plate position slightly. If it does not improve, adjust
the press roller position.
6-21 Bubbles form between the wafer and the tape.

Caution Solution
Is the mount mode setting Refer to the MOUNT MODE LIST for settings.
correct?
Is the table level correct? Remove the table side cover, and check the level of the wafer
table. Turn the screw under the wafer table if the table level needs
adjustment.
Use the level control jig to adjust the table level.
Air pipe may be faulty. Check for damaged or disconnected air pipes. If any pipe is
damaged, please contact LINTEC for replacement.
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Chapter 7 Periodic Check

7-1 Periodic Check
Be sure to turn the machine breaker OFF before performing the check in
standard specification and lock out the main breaker before performing
DANGER this in CE specification.
Periodically check the following:

LM rails
Timing belt and pulley
Ring frame vacuum pad
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7-1-1 Linear guide

Check item Check contents Check frequency
Visual check for abrasion and flaws
Linear guide Semi-annually
Grease application
Inspection steps
1) Turn the machine breaker OFF and open the cover of the corresponding unit before performing the
following steps in standard specification.
Lock out the main breaker and open the cover of the corresponding unit before perfoming the
following steps in CE specification.
2) Wipe off any grease with a non-fluffy cloth and apply new grease (2 cc each) to the rails via the
grease nipple. (If this is too difficult, apply grease directly to the rails.)
We recommend AFF GREASE (THK). (Lithium)
3) Close the cover opened in 1).
4) Turn the machine breaker ON and turn the <POWER> switch ON in standard specification.
Release the breaker handle locked out and then press the <ON> button on power box in CE
specification.
5) Enter manual mode and operate the inspected unit three times.
6) Set the <POWER> switch to OFF and turn the machine breaker OFF in standard specification.
Press the <OFF> button on power box and lock out the breaker handle in CE specification.
7) Open the cover of the corresponding unit.

8) Check that enough grease is applied. Close the cover.
specification.
Unit name Inspection location Cover No.

1Table Drive Unit Attachment table up/down movement section No.1,3
Attachment table forward/backward movement section No.1,3
2. Unwinder (Option) Unwinder support shaft movable section.
For cover numbers, refer to the figure in 1-6-3 Safety interlock (CE specification)
For unit names and inspection locations, refer to the Operation Manual 3-8 Table Drive Unit.
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7-1-2 Timing belt and pulley

Timing belt Visual check for abrasion and flaw
Semi-annually
Timing pulley Check for backlash
Inspection steps
2) Check the timing belt for flaws visually or by touch.
3) If flawed, please consult LINTEC.
4) To increase tension of the timing belt, loosen the motor base bolt while being careful not to drop the
motor unit. At the correct tension, the belt should have an elastic feel when pushed at the center
with your thumb. When checks are completed, tighten the bolt.
5) Close the cover.
specification.
7) If any abnormal noise is generated, refer to the Chapter 6 Troubleshooting"

1Table Drive Unit Attachment table forward/backward movement section No.1
2Tension Roller Tension roller No.2
3Drive Roller Drive roller No.2
4Press Roller Unit Press roller No.2
For cover numbers, refer to the figure in 1-6-3 Safety interlock (CE specification)
For unit names and inspection locations, refer to the Operation manual 3-4 Tension Roller, 3-6
Press Roller Unit, 3-8 Table Drive Unit, and 3-9 Drive Roller.
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7-1-3 Ring frame vacuum pad

Ring frame vacuum pad Semi-annually
Visual check for dirt on pad
Inspection steps
2) Check that there is no abrasion, flaws, or cracks on the vacuum pad visually or by touch. If there are
any defects, replace the pad.
3) If the pad is dirty, dampen a non-fluffy cloth with ethanol (3 cc) and wipe the pad.
4) Push the table to its original position.
5) If vacuum error occurs, refer to the Chapter 6 Troubleshooting".

1Attachmen Table Unit Ring frame table vacuum No.1
For cover numbers, refer to the figure in 1-6-3 Safety interlock (CE specification).
For unit names and inspection locations, refer to the Operation Manual 3-7 Attachment Table Unit.
RAD-2500m
66
7-2 Start-up Check

DANGER this in CE specification.
Check the following before daily operation of the Machine.

Rubber roller
Wafer table
RAD-2500m
67
7-2-1 Rubber roller
this in CE specification.
DANGER
Be extremely careful when inspecting rollers.

Rubber roller Daily
Visual check for dirt on robber
Inspection steps
2) Cut the tape set in the machine near the winder with a cutter, and wind it up.
3) Check that there is no abrasion, flaws, and cracks on the rubber roller. If there are any defects,
please consult LINTEC.
4) If tape is stuck to the roller, remove the tape to prevent damaging the roller.
5) If the roller is dirty, dampen a non-fluffy cloth with ethanol (3 cc) and wipe the roller. Wait until it
dries.
6) Refer to the label showing the tape threading direction to set the tape correctly. Refer to the
Operation Manual 5-2-2 Setting new pre-cut tape roll as to the method.
7) Close the cover.
Area inspected Inspection location Cover No.

Tape feed area Tension roller
Drive roller No.4
Press roller
For the area inspected and inspection locations, refer to the Operation Manual 3-4 Tension Roller,
3-6 Press Roller Unit, and 3-9 Drive Roller.
RAD-2500m
68
7-2-2 Wafer table
this in CE specification.
DANGER
Be extremely careful when inspecting wafer table.

Wafer table Daily
Visual check for dirt on table
Inspection steps
2) Pull the wafer table toward you.
3) Check that there is no abrasion, flaws, and cracks on the table visually or by touch.
4) If the table is dirty, dampen a non-fluffy cloth with ethanol and wipe the table.
5) Push the wafer table to its original position. Close the cover.
6) When a vacuum error occurs during operation due to damaged rubber, replace the table with a
spare one if you have any. Refer to the 4-1-3 Wafer table replacement as to the method. The
rubber of the removed table must be replaced, so please consult LINTEC.

1Attachment Table Unit Wafer table
For unit names and inspection locations, refer to the Operation Manual 3-7 Attachment Table Unit.
RAD-2500m
69
Ref. #1 Belt Tension Adjustment

Adjust the belt tension so that the deviation in the belt when a load is applied to the center of the
belt between the roller shafts is within the range in the table below.
Please refer to the value of parentheses if you own the Belt tension meter.
RAD-2500m/12
Unit Location Tension level
9.5mm with load of 6.0 to 4.4N.
(Tension of belt76.5 to 51.0N)
Attachment table
1 Attachment Table Unit forward/backward Length of belt span581mm
movement section. Width of belt12.7mm
Unit mass of belt0.03kg
Press roller rotation
2 Press Roller Unit Length of belt span160mm
section.
Width of belt9.5mm
Drive roller rotation
3 Drive roller (short belt) Length of belt span90mm
section.
Width of belt9.5mm
4 Drive roller (long belt) Length of belt span241mm
section.
Width of belt9.5mm
Tension roller rotation
5 Tension roller Length of belt span175mm
section.
Width of belt9.5mm
RAD-2500m
70
RAD-2500m/12 upright type(Option)

Attachment table
movement section. Width of belt12.7mm
Press roller rotation Length of belt span160mm
2 Press Roller Unit
section.
Width of belt9.5mm
Drive roller rotation Length of belt span189mm
3 Drive roller (short belt)
section.
Width of belt9.5mm
4 Drive roller (long belt)
section.
Width of belt9.5mm
Tension roller rotation Length of belt span320mm
5 Tension roller
section.
Width of belt9.5mm
RAD-2500m
71
RAD-2500m/8
7.5mm with load of 6.0 to 4.4N
Attachment table
movement section Width of belt12.7mm
Unit mass of belt0.03kg.
2 Press Roller Unit
section Width of belt9.5mm
3 Drive roller (short belt) Length of belt span90mm
section.
Width of belt9.5mm
4 Drive roller (long belt) Length of belt span241mm
section.
Width of belt9.5mm
Tension roller rotation
5 Tension roller Length of belt span175mm
section
Width of belt9.5mm
RAD-2500m
72
RAD-2500m/8 upright type(Option)

Attachment table Length of belt span457mm
1 Attachment Table Unit forward/backward
movement section Width of belt12.7mm
Unit mass of belt0.03kg.
2 Press Roller Unit
section Width of belt9.5mm
3 Drive roller (short belt)
section.
Width of belt9.5mm
4 Drive roller (long belt)
section.
Width of belt9.5mm
Tension roller rotation Length of belt span280mm
5 Tension roller
section
Width of belt9.5mm
RAD-2500m
73
RAD- Recommended Spare Parts List Parts List No.:Doc-00096544
6-Dec-13
Rank A : Parts that are recommended to be stocked at all time by the user as spare wear-out parts. LINTECCorporation
B : Parts that are recommended to be stocked as spare age deterioration parts. InaTechnologyCenter
C : Parts that are recommended to be stocked as spare.
Lead-time 1 : Dispatch available within 5 days after acceptance of order.Parts that are in stockDispatch from Saitama pref.
2 : Dispatch available within 10 days.
Number of use/ Rank/Replacement

LTC Code No. Parts Model Manufacturer recommended parts
Price per part Lead-time Remarks
time (estimated)
0E13102010 Timing belt 126XL037U MITSUBOSHI 1/1 B/1 year 2
0E13102590 Timing belt 420L050U MITSUBOSHI 1/1 B/1 year 2
0E34300010 Vacuum put KP-10-U KOGANEI 4/4 A/1 year 2
0EF06CA010 8"VN a direction stage Assy K06112H03-02-10C LINTEC 1/1 B/3 year 3
0EF06DJ010 8 heater table base K06112H03-02-13-501E LINTEC 1/1 B/3 year 3
0EU0046170 6"non-contact stage Assy K13495H03-02-03-502 LINTEC 1/1 B/3 year 3
0EU003UM00 6 heater table base K13118H03-02-14-501A LINTEC 1/1 B/3 year 3
0EDC019010 Press roller K01086H03-01-01-021A LINTEC 1/1 B/3 year 3
0EDC312H00 Tension roller (1) K04074H03-04-01-010A LINTEC 1/1 B/3 year 3
0EDC313H00 Tension roller (2) K04074H03-04-01-013A LINTEC 1/1 B/3 year 3
0E31030010 Clamping module cylinder NO.13290 EV-15/63-4 FEST 1/1 C 1
0E31031010 Metallic plate NO.13784 EV-15/63-DP FEST 1/1 C 1
0E1X801010 Except TEL brush (E and S cleaner) A-10-300 NIPPON KAYAKU 1/1 B/1 year 2
0EU0012WW0 Switching power supply PBA100F-24-N COSEL 1/1 B/5 year 3
0EF00GK010 Motor driver CSD2120-P ORIENTAL 2/1 B/5 year 1
0EF000X010 Needle electrode (Ionizer) OP-51644 KEYENCE 7/7 C 1 Option
0EU003MVZ0 Thermo couple E52-CA1DY-40 M6 1M OMRON 1/1 C 3 Option
Please order Moter drivers with attached order form as the setup is necessary for moter drivers.
Guarantee period for the purchased product is one year after delivery. Please note that the estimated replacement time in the table is the recommended time for part replacement, not the guarantee period for the part.
Page 1/28
Memo Designed/Drawn Mfg. No.
M.Narukawa Drawing No. K10492H03-01-01A
Checked Model RAD-2500m/8
M.Nagao Date 03-Dec-2013
Approved
Title Press Roller Unit T.Yoshioka
No. Part No. LTC's code Part name Qty. Material code Manufacturer Remarks
001 K10492H03-01-01-001 0EU002F6K0 Timing pulley (1) 1 Purchase goods/Electroless nickel plating
+200 0EF01RD010 Timing pulley 1 32XL037B MITSUBOSHI
002 K10492H03-01-01-002 0EU002F6D0 Timing pulley (2) 2 Purchase goods/Electroless nickel plating
+200 0EF09ST010 Timing pulley 1 28XL037BF BANDO
003 K10492H03-01-01-003 0EU002F6W0 Timing pulley (3) 1 Purchase goods/Electroless nickel plating
+200 0EF01S2010 Timing pulley 1 32XL037A MITSUBOSHI
004 K01086H03-01-01-004 0EDC004T00 Stainless steel cogwheel (1) 1 Purchase goods
+200 0EF01S3010 Cogwheel 1 SUS1-50 KHK
005 K01086H03-01-01-005 0EDC005T00 Stainless steel cogwheel (2) 1 Purchase goods
+200 0EF01S3010 Cogwheel 1 SUS1-50 KHK
006 K01086H03-01-01-006 0EDC006300 Pin 1 SUS304
007 K01086H03-01-01-007 0EDC007C00 Collar (1) 1 MC Nylon
008 K01086H03-01-01-008 0EDC008C00 Collar (2) 1 MC Nylon
009 K01086H03-01-01-009 0EDC009200 Press roller arm (1) 1 A5052P/Black anodic oxide coating
010 K01086H03-01-01-010 0EDC010010 Ball bushing presser 2 SUS304
011 K01086H03-01-01-012 0EDC011400 Support 4 A5052P/Black anodic oxide coating
012 K01086H03-01-01-013 0EDC012300 Stay 1 SUS304
013 K01086H03-01-01-014 0EDC013H00 Guide roller 4 A5052P/Black anodic oxide coating
014 K01086H03-01-01-015 0EDC014300 Guide roller shaft 4 SUS304
015 K01086H03-01-01-017 0EDC015500 Guide 8 A6063/Black anodic oxide coating
Page 2/28
Approved
017 K01086H03-01-01-019 0EDC017400 Peel plate bracket 1 A5052P/Black anodic oxide coating
018 K01086H03-01-01-020 0EDC018010 Peel plate 1 SUS304/Both sides polishing
019 K01086H03-01-01-021A 0EDC019010 Press roller 1 SUS304
020 K10492H03-01-01-022 0EU002DWG0 Timing pulley (4) 2 Purchase goods/Electroless nickel plating
+200 0EU002FS70 Synchro-pulley 1 26XL037BF BANDO
021 K01086H03-01-01-023 0EDC021400 Stopper support plate 2 A5052P/Black anodic oxide coating
022 K01086H03-01-01-024 0EDC022700 Stopper 1 A5052P/Black anodic oxide coating
023 K01086H03-01-01-025 0EDC023300 Stopper bearing 1 A5052/Black anodic oxide coating
024 K08017H03-01-01-026 0EU0012HJ0 Assist tube 1 SUS303
026 K01086H03-01-01-028 0EDC026E00 Collar (3) 8 SUS304
027 K01086H03-01-01-030 0EDC027E00 Collar (4) 4 SUS304
028 K01086H03-01-01-031A 0EDC028700 Electropneumatic brush bracket (2) 1 A5052P/Black anodic oxide coating
029 K01086H03-01-01-032 0EDC029200 Press roller arm (2) 1 A5052P/Black anodic oxide coating
030 K10492H03-01-01-033A 0EU002K7P0 Timing pulley (5) 1 Purchase goods/Electroless nickel plating
+200 0EU002K2M0 Timing pulley 1 28XL037BF-8H7 BANDO
031 K01086H03-07-01-010 0EDC610400 Motor bracket (1) 1 A5052P/Black anodic oxide coating
032 K01086H03-01-01-027B 0EDC025900 Electropneumatic brush bracket (1) 1 A5052P/Black anodic oxide coating
034 K01086H03-07-01-003 0EDC603C00 End collor (1) 2 SUS304
Page 3/28
Approved
035 K07342H03-01-01-034 0EU000PB30 Key 4 Purchase goods
+200 0EU000PB50 Key 1 4*4*30
036 K07342H03-01-01-035 0EU000PB40 Parallel key (1) 1 Purchase goods
+200 0EU000PB60 Parallel key 1 4*4*60
037 K08171H03-01-02-001 0EU001R4M0 Bracket (right) 1 A5052P/White anodic oxide coating
038 K08171H03-01-02-002 0EU001R4P0 Bracket (left) 1 A5052P/White anodic oxide coating
039 K08171H03-01-02-003A 0EU001R4Q0 Wiring plate 1 A5052P/White anodic oxide coating
201 0E19102510 Ball plunger 8 MP-4 NBK
202 0E19601140 Helical compression spring 1 AS100-023-1.2 SHOWAHATSUJO
203 0EU002EEM0 Speed controller 1 AS1211F-M5-06 SMC

204 0E11206030 Clean damper 1 D6CL-6.3F ORIENTAL
205 0E11007010 Torque motor 2 4TK10CGN-A ORIENTAL
206 0E11006260 Stepping motor 1 CSK264BP-SG7.2 ORIENTAL
207 0E11103010 Gear head 2 4GN6K ORIENTAL
208 0E14001650 Ball bearing 14 6000ZZSS(F-6000ZZ) NTN
209 0E15101140 Ball bushing 2 LM10MGUU THK
210 0EU00059C0 Slide shaft 2 NBS03-10-80-M4/10-N4/10 NB
212 0E13102020 Timing belt 1 186XL037U MITSUBOSHI

Page 4/28
Approved
216 0E1X801010 ES Cleaner: Antistatic brush 2 A-10-300 NIPPONKAYAKU
217 0EU001R4R0 Nut 2 FRSNUT4 MISUMI

Page 5/28
M.Narukawa Drawing No. K10492H03-02-01
Approved
Title Table Unit T.Yoshioka
002 K01086H03-02-01-002A 0EDC102G00 Pressurizing nozzle 1 SUS304
003 K01086H03-02-01-003 0EDC103400 Bracket (1) 2 A5052P/Black anodic oxide coating
005 K01086H03-02-01-005 0EDC105400 Linear guide bracket (1) 1 A5052P/Black anodic oxide coating
007 K01086H03-02-01-007 0EDC107700 Rail bracket 2 A5052P/Black anodic oxide coating
008 K01086H03-02-01-008A 0EDC108700 Flange 1 A5052/Black anodic oxide coating
010 K06489H03-02-01-010A 0EU000T980 Level adjustment shaft 1 SUS304
014 K01086H03-02-01-019 0EDC114700 Cover hinge stay (1) 1 A6063/Black anodic oxide coating
015 K01086H03-02-01-020 0EDC115700 Cover bracket (1) 1 A6063/Black anodic oxide coating
016 K01086H03-02-01-021 0EDC116400 Table stopper 1 A5052P/Black anodic oxide coating
022 K01086H03-02-01-028 0EDC122400 Table up/down base 1 A5052P/Black anodic oxide coating
023 K01086H03-02-01-029 0EDC123400 Slide table 1 A5052P/Black anodic oxide coating
029 K01086H03-02-01-035 0EDC129910 Cableveyor bracket 1 A5052P/Black anodic oxide coating
030 K02142H03-02-01-036 0EDC147310 Positioning pin (1) 1 SUS304
034 K02142H03-02-01-041 0EDC146310 Positioning pin (2) 2 SUS304
037 K01086H03-02-01-044 0EDC142700 Cover hinge stay (2) 1 A6063/Black anodic oxide coating
038 K01086H03-02-01-045 0EDC143700 Cover bracket (2) 1 A6063/Black anodic oxide coating
Page 6/28
Approved
Title Table Unit T.Yoshioka
203 0E15101830 Ball bushing 3 SMSF12UU
204 0E15102610 Shaft 3 SNS12X55-2-M4X10 NB
205 0EU0023WX0 Thin-walled cylinder 1 CDQ2B25-15DZ(ROHS compliant goods) SMC
210 0E29601320 Cableveyor 1 TKP0180W40R37-25L TSUBAKI
211 0E29602220 Cableveyor bracket (movable end) 1 TKP0180W40-PIA TSUBAKI
212 0E29603120 Cableveyor bracket (fixed end) 1 TKP0180W40-PKA TSUBAKI
213 0E15001P40 C-Sleeve Linear way 2 MLF42C2R498H IKO
214 0E15001F70 C-Sleeve Linear way 2 MLF42C1R83H/E19 IKO
217 0EU002EEH0 Speed controller 2 AS1201F-M5-06 SMC

218 0EU0000YS0 Male elbow 1 KQ2L06-M5(ROHS compliant goods) SMC
Page 7/28
M.Narukawa Drawing No. K09218H03-02-02D
Approved
Title 8" Frame table unit(standard) T.Yoshioka
011 K09214H03-02-01-011 0EU002MKX0 Ring stopper 3 SUS304
013 K01086H03-02-01-015 0EDC113310 Vacuum pad cored bar 4 SUS304
020 K01086H03-02-01-025 0EDC120400 Ring table plate 8 1 SUS304/One side polishing
025 K01086H03-02-01-031 0EDC125400 Level adjustment plate 8 (1) 1 SUS304/One side polishing
028 K01086H03-02-01-034B 0EDC128400 Ring table base 8 1 A5052P/Black anodic oxide coating
201 0E34300010 Vacuum pad 4 KP-10-U KOGANEI
202 0E19402010 Magnet 4 KM-001 KANETEC
218 0EU003M970 Male elbow 4 KQ2L06-M5A SMC
219 0EU003M8Z0 Union Y 3 KQ2U06-00A SMC
Page 8/28
M.Narukawa Drawing No. K09218H03-02-06D
Approved
Title Frame Table UnitStandardUnwinder collar
T.Yoshioka
001 K09218H03-02-04D 0EU001XSV0 6"Frame table unit(standard) 1
+011 K09214H03-02-01-011 0EU002MKX0 Ring stopper 3 SUS304
+012 K01086H03-02-01-013A 0EDC112400 Level adjustment plate 6 (1) 1 SUS304/One side polishing
+013 K01086H03-02-01-015 0EDC113310 Vacuum pad cored bar 4 SUS304
+024 K01086H03-02-01-030A 0EDC124400 Ring table plate 6 1 SUS304/One side polishing
+026 K01086H03-02-01-032C 0EDC126400 Ring table base 6 1 A5052P/Black anodic oxide coating
+201 0E34300010 Vacuum pad 4 KP-10-U KOGANEI
+202 0E19402010 Magnet 4 KM-001 KANETEC
+218 0EU003M970 Male elbow 4 KQ2L06-M5A SMC
+219 0EU003M8Z0 Union Y 3 KQ2U06-00A SMC
002 K01086H03-05-01-007 0EDC407C00 Collar (2) 1 Resin
Page 9/28
Approved
Title Non-contact table setheater guide
T.Yoshioka
010 K06112H03-02-10C 0EF06CA010 8"VNa direction 1
+002 K01086H03-02-01-024B 0EDC119600 Wafer table 8 1 A5052P/Black anodic oxide coating
+003 K02014H03-01-01-008B 0ED4525010 Wafer vacuum head 1 Conductive silicon rubber
+004 K04073H03-02-01-004A 0EF04V1010 Table rubber attach/Grinding 1 D-TYPE
048 K06112H03-02-48A 0EF06GX010 a direction guide 1
+001 K01086H03-02-01-009A 0EDC109W00 Wafer positioning pin 3 SUS304-CSP
501 K06112H03-02-13-501E 0EF06DJ010 8"Heater table base 1
+001 K04014H03-02-01-004C 0EF065R010 table base 8" 1 A5052/Black anodic oxide coating
+201 0EF065U010 Heat insulator 8" 2 K01069H03-02-01-006 GORE-TEX
+202 0EF065X010 Heater 8" 1 00T8-3488=1 KAWAI
+203 0EU003MVZ0 Thermo couple 1 E52-CA1DY-40 M6 1M OMRON
+204 0EF07L3010 Connector 1 RM12BPE-4PH(71) HIROSE
+206 0EF0FJQ010 O-ring 1 G-170 type D
+207 0EF0BR9010 O-ring 1 G-200 4 type D(F201)
Page 10/28
Approved
Title Non-contact table setheater guide
T.Yoshioka
046 K09218H03-02-46 0EU001YDW0 OF a direction guide 1
+001 K09218H03-02-01-001 0EU001YDU0 Wafer guide(OF) 1 SUS304
+002 K01086H03-02-01-009A 0EDC109W00 Wafer positioning pin 2 SUS304-CSP
501 K13118H03-02-14-501A 0EU003UM00 Heater table base 1
+001 K04057H03-02-01-001C 0EF069D010 6"table base 1 A5052/Black anodic oxide coating
+201 0EF069H010 Heat insulator 6" 2 SG20X/K00154H03-20-01-206 GORE-TEX
+202 0E2X004030 Heater 6" 1 00T8-3489=1 KAWAI
+203 0EU003MVZ0 Thermo couple 1 E52-CA1DY-40 M6 1M OMRON
+204 0EF07L3010 Connector 1 RM12BPE-4PH(71) HIROSE
+206 0E1X701540 O ring 1 P-8 4 type D(F201)
502 K13495H03-02-03-502 0EU0046170 Non-contact stage 1
+002 K13495H03-20-01-005 0EU0046180 Wafer table 1 A5052/Black anodic oxide coating
+003 K10437H03-01-01-001A 0EU002TZR0 Wafer vacuum head 1 Conductive silicon rubber
+004 K04073H03-02-01-002A 0EF054H010 Table rubber attach/Grinding 1 B-TYPE
Page 11/28
Approved
Title Table Unit Level adjustment jig T.Yoshioka
008 K01086H03-08-01-008 0EDC708100 Dial gauge support 1 A6063/Black anodic oxide coating
009 K01086H03-08-01-009 0EDC709400 Level adjustment jig 1 A6063/Black anodic oxide coating
027 K01086H03-08-01-028A 0EDC727700 Level adjustment jig holder 2 A5052P/Black anodic oxide coating
216 0EF020T010 Dial gauge 1 2046S MITSUTOYO
Page 12/28
Approved
Title Tepe detectionFiber T.Yoshioka
001 K07487H03-03-01-001A 0EU000VJ70 Bracket 1 A5052P/Black anodic oxide coating
002 K01086H03-03-01-002 0EDC202400 Stay 1 SUS304
004 K02166H03-03-01-004 0EF04F5010 Sensor bracket (1) 1 A5052P/Black anodic oxide coating
005 K07487H03-06-01-005 0EU000VJB0 Fiber sensor bracket 1 A6063/Black anodic oxide coating
006 K07487H03-06-01-006A 0EU000VJC0 Tape securing plate stay 1 A5052P/Black anodic oxide coating
007 K07487H03-06-01-007A 0EU000VJD0 Tape support plate 1 A5052P/Black anodic oxide coating
008 K07487H03-06-01-008 0EU000VJE0 Tape securing plate 1 SUS304/Both sides polishing
009 K07487H03-03-01-009 0EU000VJA0 Bracket mounting 1 A5052/Black anodic oxide coating
013 K01086H03-03-03-013 0EDC209820 Bracket migration marker 1 Acrylic
201 0E26013010 Fiber sensor 1 FU-12 KEYENCE
202 0EF000Z010 Amplifier unit 1 FS-V33 KEYENCE
203 0EF0CFZ010 Fitting 1 OP-73880 KEYENCE
204 0E19107010 Bolt 1 CHBS6-25 MISUMI
Page 13/28
Approved
Title Pinch Roller Unit T.Yoshioka
001 K01086H03-04-01-001 0EDC301200 Bearing holder 2 A6063/Black anodic oxide coating
002 K01086H03-04-01-002 0EDC302200 Pinch roller arm 2 A5052P/Black anodic oxide coating
003 K01086H03-04-01-004 0EDC303300 Pinch roller board 1 SUS304
004 K01086H03-04-01-005 0EDC304400 Plare 1 A6063/Black anodic oxide coating
005 K01086H03-04-01-006 0EDC305300 Pinch roller shaft 2 SUS304
006 K01086H03-04-01-007 0EDC306H00 Pinch roller (1) 1 SUS304
007 K01086H03-04-01-009 0EDC307400 Bracket 1 A5052P/Black anodic oxide coating
008 K04074H03-04-01-010A 0EDC312H00 Tension roller (1) 1 SUS304+Silicon rubber
009 K01086H03-04-01-011 0EDC309200 Bearing 2 A6063/Black anodic oxide coating
010 K01086H03-04-01-012 0EDC310H00 Pinch roller (2) 1 SUS304
011 K04074H03-04-01-013A 0EDC313H00 Tension roller (2) 1 SUS304+Silicon rubber
201 0E15101830 Ball bushing 2 SMSF12UU NB
202 0E15102550 Linear system shaft 2 SNS12*82-2-M5*15 NB
204 0EU0024J20 Pin cylinder 1 CJPB15-10(ROHS compliant goods) SMC
Page 14/28
Approved
Title Unwinder Unit T.Yoshioka
001 K01086H03-05-01-001 0EDC401H00 Unwinder 1 Resin
002 K01086H03-05-01-002 0EDC402K10 Extension pin 1 SUS304
003 K01086H03-05-01-003 0EDC403400 Reel plate 1 Acrylic
004 K01086H03-05-01-004 0EDC404C00 Collar (1) 1 SUS304
005 K01086H03-05-01-005 0EDC405400 Reel plate support 1 A1050P/Black anodic oxide coating
006 K09214H03-06-01-004 0EU002QLT0 Spring presser (1) 1 SUS304
008 K01086H03-05-01-008A 0EU000EBH0 Unwinder shaft 1 SUS304
010 K09214H03-05-01-006 0EU002QLR0 Friction plate 1 NA Resin
011 K01086H03-06-01-005 0EDC505L00 Spring presser (2) 1 SUS304
201 0EU00010Q0 Hose nipple 1 MS-5H-6(ROHS compliant goods) SMC
202 0EU00010R0 Hose elbow 1 MS-5HLH-6(ROHS compliant goods) SMC
203 0E31030010 Clamp module cylinder 1 NO.13290 EV-15/63-4 FESTO
204 0E31031010 Metal plate 1 NO.13784 EV-15/63-DP FESTO
207 0EU0002Z60 Elbow union 1 KSL06-M5(ROHS compliant goods) SMC

208 0EU000PB80 Parallel key 2 KESS4-LC14 MISUMI
Page 15/28
Approved
Title Wafer table heating mechanism T.Yoshioka
001 K06443H03-10-01-002 0EU0003SX0 Heater control box setting plate 1 SUS304/Both sides polishing
002 K99086H03-01-01-002B 0EF0FKQ010 Heater control box base 1 SPC/R-01 gross60(half gloss)
003 K99086H03-01-01-003B 0EF04EV010 Heater control box 1 SPC/R-01 gross60(half gloss)
004 K07168H03-55-02-017 0EU000R5F0 Nameplate 1 Acrylic
005 K03166H03-08-01-002 0EF04EX010 Nameplate 1 Acrylic
006 K03166H03-08-01-003 0EF04EY010 Nameplate 1 Acrylic
007 K03166H03-08-01-004 0EF04EZ010 Nameplate 1 Acrylic
009 K09215H03-02-01-042 0EU0023T20 Wiring drop prevention bracket 1 SUS304
201 0E22401590 Temperature controller 1 E5CN-R2T OMRON
202 0EF04F0010 Seesaw switch 1 A8A-213-1 OMRON
203 0E25407100 Digital switch 1 A7BS-254-1 OMRON
204 0E28303020 End plate 1 A7B-M-1 OMRON
205 0E28302030 Connector 1 A7B-C OMRON
206 0E22103210 Solid state Relays 1 G3NA-205B DC24V OMRON
207 0EU00334S0 D-SUB25P (male) 1 XM3A-2521 OMRON
208 0EU00334T0 D-SUB25P (female) 1 XM3D-2521 OMRON
209 0E28302760 Case (D-SUB25P) 1 XM2S-2511 OMRON
210 0E28302210 Fixing bracket (D-SUB) 2 XM2Z-0001 OMRON
211 0EF04F1010 Rubber legs 4 K2 (code N0.7042) TOCHIGIYA
212 0E28302M50 Connector 1 RM12BJB-4S(07) HIROSE
Page 16/28
Approved
Title Winder Unit T.Yoshioka
002 K01086H03-06-01-002 0EDC502400 Pressing plate 1 SUS304
003 K10492H03-06-01-003 0EU002F8M0 Timing pulley 1 Purchase goods/Electroless nickel plating
+200 0EF01S2010 Timing pulley 1 32XL037A MITSUBOSHI
004 K09214H03-06-01-004 0EU002QLT0 Spring presser (1) 1 SUS304
005 K01086H03-06-01-005 0EDC505L00 Spring presser (2) 1 SUS304
006 K01086H03-06-01-006 0EDC506C00 Collar 1 SUS304
007 K01086H03-06-01-007 0EDC507310 Lock pin 1 SUS304
008 K01086H03-06-01-008 0EDC508H00 Winding roller 1 Resin
009 K01086H03-06-01-009 0EDC509300 Winding shaft 1 SUS304
010 K09214H03-05-01-006 0EU002QLR0 Friction plate 1 NA Resin
Page 17/28
Approved
Title Ionizer Unit T.Yoshioka
001 K04246H03-02-06-001 0EF04E9010 Ionizer bracket (1) 1 A5052/Black anodic oxide coating
002 K04246H03-02-06-002A 0EF04EC010 Ionizer bracket (2) 1 A6063/Black anodic oxide coating
003 K04246H03-02-06-003 0EF04EA010 Ionizer bracket (3) 1 A5052/Black anodic oxide coating
004 K01069H03-08-01-033 0EF04EB010 Ionizer wire stop 1 SUS304
201 0EF0BQL010 Micro static eliminator (high-efficiency) 1 SJ-M070G KEYENCE
202 0EF0BQK010 Ionizer controller 1 SJ-M300 KEYENCE
203 0EU0000P70 Regulator 1 AR10-M5BG(ROHS compliant goods) SMC
204 0EU002EFF0 Speed controller 1 AS2211F-U01-04 SMC
206 0EU0000Y60 Straight of different dia 1 KQ2H04-06(ROHS compliant goods) SMC
207 0EU0000ZQ0 Union"Y" 1 KQ2U06-00(ROHS compliant goods) SMC
Page 18/28
Approved
Title Conduction Unit T.Yoshioka
001 K10492H03-07-01-001 0EU002FHF0 Timing pulley 1 Purchase goods/Electroless nickel plating
+200 0EF01VY010 Timing pulley 1 20L050A MITSUBOSHI
002 K01086H03-07-01-002 0EDC602300 Pin 1 SUS304
004 K01086H03-07-01-004 0EDC604400 Conduction pin bracket (1) 1 A5052P/Black anodic oxide coating
005 K01086H03-07-01-005 0EDC605700 Slide driving plate (1) 1 A5052P/Black anodic oxide coating
006 K01086H03-07-01-006 0EDC606400 Slide driving plate (2) 1 A5052P/Black anodic oxide coating
007 K01086H03-07-01-007 0EDC607700 Belt stay 1 A5052P/Black anodic oxide coating
008 K01086H03-07-01-008 0EDC608920 Dog 1 SUS304/One side polishing
009 K09218H03-07-01-009 0EU002QLK0 Sensor bracket 2 SUS304
012 K01086H03-07-01-012 0EDC612300 Tension shaft 1 SUS304
013 K01086H03-07-01-013 0EDC613400 Tension bracket 1 A5052P/Black anodic oxide coating
014 K01086H03-07-01-014 0EDC614400 Conduction pin bracket (2) 1 A5052P/Black anodic oxide coating
016 K10492H03-07-01-016 0EU002FK00 Timing pulley 1 Purchase goods/Electroless nickel plating
+200 0EF01TD010 Timing pulley 1 12L050B MITSUBOSHI
Page 19/28
Approved
Title Conduction Unit T.Yoshioka
201 0E11206030 Clean damper 1 D6CL-6.3F ORIENTAL
202 0E11006260 Stepping motor 1 CSK264BP-SG7.2 ORIENTAL
204 0E13102590 Timing belt 1 420L050U MITSUBOSHI
205 0E26009040 Photomicro switch 2 EE-SX671 OMRON
206 0E28302050 Connector 2 EE-1001 OMRON
Page 20/28
Approved
Title Covers T.Yoshioka
001 K01086H03-08-01-001 0EDC701400 Side stand board feet (1) 2 A5052P/Black anodic oxide coating
002 K01086H03-08-01-002 0EDC702400 Side plate transfer plate (1) 1 A5052P/Black anodic oxide coating
004 K01086H03-08-01-004 0EDC704310 Side plate pin 7 SUS304
005 K01086H03-08-01-005 0EDC705400 Operation panel 1 Acrylic
006 K01086H03-08-01-006 0EDC706400 Precision regulator bracket 1 A5052P/Black anodic oxide coating
010 K01086H03-08-01-010 0EDC710400 Rib (1) 1 A5052P/Black anodic oxide coating
011 K10025H03-08-01-011 0EU0022VA0 Rib(2) 1 A5052P/Black anodic oxide coating
012 K07124H03-08-01-013A 0EU000EAQ0 Left side cover 1 SPC/R-01 gross60(half gloss)
013 K01086H03-08-01-014 0EDC713400 Bottom plate 1 A5052P/Black anodic oxide coating
014 K01086H03-08-01-015A 0EDC714400 Right side plate 1 A5052P/Black anodic oxide coating
015 K07124H03-08-01-016A 0EU000PBB0 Left side plate 1 A5052P/Black anodic oxide coating
016 K07124H03-08-01-017 0EU000EAR0 Table front cover 1 SPC/R-01 gross60(half gloss)
017 K07124H03-08-01-018 0EU000EAS0 Table side cover (1) 1 SPC/R-01 gross60(half gloss)
018 K07124H03-08-01-019 0EU000EAT0 Front cover 1 SPC/R-01 gross60(half gloss)
019 K09218H03-08-01-020 0EU001XRC0 Main cover (right) 1 SPC/R-01 gross60(half gloss)
020 K07124H03-08-01-021 0EU000EAV0 Motor cover (1) 1 SPC/R-01 gross60(half gloss)
021 K11268H03-08-01-022 0EU002U5J0 Motor cover (2) 1 SPC/R-01 gross60(half gloss)
Page 21/28
Approved
025 K08017H03-08-01-026 0EU0012LU0 Control board 1 SPC/Chromating
026 K08017H03-08-01-027 0EU0012LV0 Level adjusting bracket 1 SPC/Chromating
028 K06397H03-08-01-030 0EU0004XJ0 Ionizer cover 1 SPC/R-01 gross60(half gloss)
029 K01086H03-08-01-031 0EDC729900 Sensor bracket 1 A6063/Black anodic oxide coating
030 K01086H03-08-01-032 0EDC730K10 Support 3 SUS304
031 K08017H03-08-01-033 0EU0012LX0 Substrate bracket 1 SPC/Chromating
032 K01086H03-08-01-034A 0EDC732400 Control board cover 1 PET plate
033 K01086H03-08-01-035 0EDC733900 Power supply cable hold 1 SUS304/One side polishing
034 K08017H03-08-01-036 0EU0012MC0 Connector bracket 1 SPC/Chromating
035 K08017H03-08-01-037 0EU0012MD0 Driver bracket 1 SPC/Chromating
036 K08017H03-08-01-038 0EU0012MJ0 Power supply bracket 1 SPC/Chromating
037 K08017H03-08-01-039 0EU0012MM0 Power supply cover 1 SPC/Chromating
038 K01086H03-08-01-040 0EDC738C00 Collar 2 SUS304
039 K01086H03-08-01-041 0EDC739C00 Spasar 4 Resin
040 K01086H03-08-01-042 0EDC740400 Side plate (2) 1 A5052P/Black anodic oxide coating
041 K01086H03-08-01-043 0EDC741400 Side plate (3) 2 A5052P/Black anodic oxide coating
043 K07124H03-08-01-045 0EU000EAX0 Table side cover (2) 1 SPC/R-01 gross60(half gloss)
060 K08017H03-08-01-062 0EU0012MP0 Sequencersn bracket 1 SPC/Chromating
061 K09177H03-08-01-042 0EU001YDR0 Earth plate 1 C1100P/Electroless nickel plating
Page 22/28
Approved
062 K01069H03-08-01-007 0EDD725900 Pressure switch bracket 1 SUS304
063 K01092H03-03-01-008 0EF04FD010 Digimatic pressure switch nameplate 1 Acrylic
064 K11268H03-08-01-064 0EU002U5K0 Motor cover (3) 1 SPC/R-01 gross60(half gloss)
201 0EU0019GT0 Precision regulator 1 IR2000-02B(ROHS compliant goods) SMC
202 0EU001EMW0 Filter Regurator 1 AW20-02BG(ROHS compliant goods) SMC
203 0EU0013SY0 Manifold 1 VV5Z3-41-031-M5(ROHS compliant goods) SMC
204 0EU0013SX0 Air solenoid valve 3 VZ3140-5LOZ(ROHS compliant goods) SMC
205 0EU0013SU0 Connector 3 DXT170-80-A(ROHS compliant goods) SMC
206 0EU0013SV0 Connector 2 VJ10-20-A(ROHS compliant goods) SMC
208 0E32101010 Finger valve 1 4V KOGANEI
209 0EU000YW90 Silencer 1 AN103-01(ROHS compliant goods) SMC
210 0EU0013T10 Vacuum ejector 2 ZM103H-J5LOZ(ROHS compliant goods) SMC
212 0EU0013T20 Vacuum ejector 1 ZZM02-SL(ROHS compliant goods) SMC
213 0E19401090 Brass Drawn Butt Hinges 2 B-201-3 TAKIGEN
214 0E19404020 Ball catche 1 C-90-1 TAKIGEN
215 0E19301410 Rubber legs 4 K16W TOCHIGIYA
216 0EU0030540 Hexagon brass Supporter 4 BSB-360E KAMEDA
217 0EU0030530 Hexagon brass Supporter 4 BSB-350E KAMEDA
218 0E22903210 Substrate accessory 8 YB-10 TOYOGIKEN
219 0E22903010 Substrate accessory 8 YF-10 TOYOGIKEN
Page 23/28
Approved
220 0E19402320 Magnet catch 2 TL-152-2 TOCHIGIYA
221 0E19401580 Flat hinge (tapped Hole) 4 TH-TM-113 TOCHIGIYA
222 0E26001060 Photoelectric switch 1 E3C-S50 OMRON
223 0E22503040 Sensor controller 1 E3C-JC4P OMRON
224 0E19402330 Magnet catches 4 TL-107-2 TOCHIGIYA
225 0EU0000ZG0 Reducer 1 KQ2R06-08(ROHS compliant goods) SMC
226 0EU000H4K0 Branch 2 KQ2U06-01S(ROHS compliant goods) SMC
227 0EU000JXM0 Plug 3 M-5P(ROHS compliant goods) SMC
228 0EU000H4C0 Union T 1 KQ2T08-00(ROHS compliant goods) SMC
229 0EU0000YR0 Male elbow 1 KQ2L06-01S(ROHS compliant goods) SMC
230 0EU0000YU0 Male elbow 2 KQ2L06-02S(ROHS compliant goods) SMC
231 0EU0000Z20 Male elbow 3 KQ2L08-02S(ROHS compliant goods) SMC
232 0EU000V9U0 Male union 1 KQ2H08-01S(ROHS compliant goods) SMC
233 0EU0000ZT0 Union Y 1 KQ2U08-00(ROHS compliant goods) SMC
235 0EU002BTV0 Digital pressure switch 2 ZSE30AF-01-N-ML SMC
236 0EU002BTR0 Digital pressure switch 1 ISE30A-01-N-ML SMC
237 0EU0000ZQ0 Union"Y" 1 KQ2U06-00(ROHS compliant goods) SMC
238 0EU0003LL0 Taper screw plug (hexagon socket) 1 PT1/4(SUS)
239 0EU0003LK0 Taper screw plug (hexagon socket) 4 PT1/8(SUS)
Page 24/28
Approved
Title System nameplate(english) T.Yoshioka
044 K01086H03-08-01-046 0EDC744820 Nameplate (1) 1 Acrylic
Page 25/28
Approved
Title CE specification T.Yoshioka
020 K09218H03-08-01-021A 0EU001XVB0 Main cover (right) 1 SPC/R-01 gross60(half gloss)
+001 K09218H03-08-01-020 0EU001XRC0 Main cover (right) 1 SPC/R-01 gross60(half gloss)
501 K09086H03-14-01-501C 0EU001TL80 CE Power supply box 1
+012 K09177H03-08-01-042 0EU001YDR0 Earth plate 1 C1100P/Electroless nickel plating
+013 K09086H03-08-01-001 0EU001TMS0 Breaker cover(1) 1 SPC/R-01 gross60(half gloss)
+014 K09086H03-14-01-002 0EU001TMQ0 Breaker cover(2) 1 SPC/R-01 gross60(half gloss)
+015 K06275H03-08-01-003 0EF0DXJ010 Breaker cover (3) 1 SPC/Black chromating
+016 K09086H03-08-01-004 0EU001TMR0 Breaker cover (4) 1 SPC/R-01 gross60(half gloss)
+017 K06275H03-08-01-005 0EF0DXP010 Breaker cover (5) 1 SPC/Black chromating
+018 K02071H03-08-01-007 0EF04FQ010 Operation panel 1 Acrylic
+019 K06275H03-08-01-008 0EU000LXG0 Breaker cover 1 SPC/R-01 gross60(half gloss)
+021 K02145H03-08-01-002 0EF04FS010 Nameplate 1 Acrylic
+022 K02145H03-08-01-003 0EF04FT010 Nameplate 1 Acrylic
+023 K02145H03-08-01-004 0EF04FU010 Nameplate 1 Acrylic
+024 K02145H03-08-01-005 0EF04FV010 Nameplate 1 Acrylic
+025 K02145H03-08-01-006 0EF04FW010 Nameplate 1 Acrylic
+201 0EU0033SD0 Earth leakage breaker 1 NV100-SRU 2P 15A 30MA MITSUBISHI
+202 0EF0AKL010 Terminal cover 1 TCL-05SRU2 MITSUBISHI
+204 0EU000Q1M0 Molded Case Circuit Breaker 1 FAZ-D10/2-RT MOELLER
+205 0EF0BQG010 Rubber legs 4 K2W TAKIGEN
Page 26/28
Approved
+206 0E22001X20 Electromagnetic switch 1 SD-Q11 1B DC24V MITSUBISHI
+207 0EU001B1A0 Switching power supply 1 PBA15F-24-N COSEL
+208 0E22104020 Safety relay 1 G9SB-2002-C OMRON
+209 0E23001810 Transformer 1 ES21-01KB1 TOYOZUMI
+210 0E25314010 Lighted Pushbutton Switches 1 A22L-GG-24A-11M OMRON
+211 0E25314840 Lighted Pushbutton Switches 1 A22L-TW-24A-02M OMRON
+218 0EU0013UR0 Power supply cable 1 KS31AY GTCE1.0*3C L=5M KDK
+221 0EU000V6K0 Operation handle 1 F-05SRUL2 MITSUBISHI
502 K09218H03-14-01-502 0EU001XV90 Upper cover(CE specification) 1
+001 K97274H03-08-01-012A 0EEC715800 Upper cover 1 PVC
+002 K98415H03-08-01-040 0EF04FE010 Cover switch bracket (1) 1 SUS304
+003 K03265H03-08-01-001 0EF07B6010 Key bracket 1 SUS304
+028 K01086H03-08-01-025 0EDC724D00 Cover angle (upper) 1 A5052/Black anodic oxide coating
+216 0E26010090 Operation key 1 D4DS-K2 OMRON
+217 0EF01TG010 Safety door switch 1 D4NS-1BF OMRON
+219 0E19403140 Round bar pulls (male screws) 3 A-1042-C-6 TAKIGEN
+220 0E19402330 Magnet catches 2 TL-107-2 TOCHIGIYA
Page 27/28
Approved
503 K09218H03-14-01-503A 0EU001XVA0 Safety cover 1
+006 K09218H03-08-01-003 0EU001ZQG0 Slide cover 1 TND-77665
+007 K02196H03-08-01-034 0EF07B9010 Control panel 1 Takiron ND-7
+008 K02071H03-08-01-002 0EF07BA010 Under cover 2 SPC/Black chromating
+009 K02071H03-08-01-006 0EF04G3010 Table stopper 1 A5052P/Black anodic oxide coating
+020 K02071H03-08-01-004 0EF04G4010 Stay 2 SUS304
+031 K08289H03-08-01-013 0EU001JKX0 Left side cover 1 SPC
++012 K07124H03-08-01-013A 0EU000EAQ0 Left side cover 1 SPC/R-01 gross60(half gloss)
504 K09086H03-14-01-504 0EU001TLB0 Emergency stop 1
+004 K02071H03-08-01-001 0EF04FF010 Cover switch bracket (2) 1 A5052P/Black anodic oxide coating
+005 K90007H03-08-01-015 0EF04FG010 Emergency stop switch fixed bracke(1) 1 A5052P/Black anodic oxide coating
+212 0E25303F10 Pushbutton Switches 1 A22E-M-02 OMRON
+213 0E28005800 Control box 1 A22Z-B101Y OMRON
Page 28/28
Approved
Title Controller expansion T.Yoshioka
201 0EU0032L10 Controller 1 FP0R-E32T PANASONIC ELECTRIC
Page 1/2

K.Baba Drawing No. K13027H52
Checked Model RAD-2500m
K.Kawasaki Date 26-Aug-13
Approved
Title Electrical Parts List
T.Shimomura
001 SPS01 0EU0012WW0 SWITCHING POWER SUPPLY 1 PBA100F-24-N COSEL
002 VR01 0EU000GU00 VARIABLE RESISTOR 1 HP-16 B20K OHM MIDORI PRECISIONS
003 VR01 0E28121020 DIAL 1 D-12 MIDORI PRECISIONS
004 TS01 0E25405080 TOGGLE SWITCH 1 M-2032L NIKKAI

005 TS02 0E25405070 TOGGLE SWITCH 1 M-2022G NIKKAI
006 PBL01 0E25314720 PUSH BUTTON SWITCH WITH LAMP 1 A3KJ-90A1-24EY OMRON
007 PBL02,03 0E25314700 PUSH BUTTON SWITCH WITH LAMP 2 A3KJ-90A1-24EG OMRON
008 PBL04 0E25314710 PUSH BUTTON SWITCH WITH LAMP 1 A3KJ-90A1-24ER OMRON
009 DS01 0E25407100 ROTARY SWITCH 1 A7BS-254-1 OMRON
010 DS01 0E28303020 BRACKET 1 A7B-M-1 OMRON
011 DS01 0E28302030 CONNECTOR 1 A7B-C OMRON
012 0EF0BW5010 TERMINAL STOPPER 2 CT-H TOYO GIKEN
013 TB 0EF0BW2010 TERMINAL 9 PUW-20 TOYO GIKEN
014 TB 0EF0BW3010 TERMINAL END 2 PUW-20L TOYO GIKEN
015 CNT01 0EU0014J50 CONTROLLER 1 FPG-C32TH MATSUSHITA
016 PCB01 0E77504010 PRINTING SUBSTRATE 1 PCB01(RAD2500M) LINTEC
017 CN03 0EU001WVB0 CONNECTOR 1 XG5M-1632-N OMRON
018 CN03 0EU002P9Q0 CONNECTOR CASE 2 XG5S-0801 OMRON
019 0EU002VAX0 CABLE GUARD 2 BU-687D SATO PARTS
020 NF01 0E28201760 NOISE FILTER 1 FN9222R-10-06 SCHAFFNER
Page 2/2

K.Baba Drawing No. K13027H52
Checked Model RAD-2500m
K.Kawasaki Date 26-Aug-13
Approved
Title Electrical Parts List
T.Shimomura
021 0EU0013UR0 AC CABLE 1 KS31AY GTCE1.0*3C L=5M KAWASAKI
022 CN05 0EU00334R0 CONNECTOR 1 XM3D-1521 OMRON
023 CN04 0EU00334V0 CONNECTOR 1 XM3D-3721 OMRON
024 CN05 0EU00334Q0 CONNECTOR 1 XM3A-1521 OMRON
025 CN04 0EU00334U0 CONNECTOR 1 XM3A-3721 OMRON
026 CN05 0E28302790 CONNECTOR CASE 1 XM2S-1511 OMRON
027 CN04 0EF0BVL010 CONNECTOR CASE 1 XM2S-3711 OMRON
028 0E28302220 SCREW 4 XM2Z-0011 OMRON
029 0E28302230 SCREW 4 XM2Z-0071 OMRON
030 DS01 0E28305020 SPACER 1 A7B-PA-1 OMRON RAD-2500m/12 ONLY
031
032
033
034
035
036
037
038
039
040

RAD2500M8

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RAD2500M8

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RAD-2500m

Semi-Automatic Wafer Mounting System

Date of Preparation : 09 April 2013

Date of Implementation : 1 June 2009

1-2-2 Using the manuals .................................................................................................................. 10

1-2-3 Conventions in this manual ..................................................................................................... 10

1-3 Hazard Labels for Safety ............................................................................... 11

1-6-2 Emergency stop button (EMO button/Optional) ....................................................................... 20

1-6-3 Safety Interlock (CE Specification) .......................................................................................... 22

1-7 Status Indicator (Optional) .............................................................................23

1-8-2 Option specification................................................................................................................. 25

1-9 Emergency Contact .......................................................................................26

Chapter 2 Machine Overview .......................................................... 29

2-1-2 Option specification................................................................................................................. 30

2-3-2 Right side view........................................................................................................................ 33

2-3-3 Left side view .......................................................................................................................... 34

2-4 Machine Configuration (Option Specification) ...............................................35

2-4-2 Right side view........................................................................................................................ 36

2-4-3 Left side view .......................................................................................................................... 37

3-1-2 Option Specification ................................................................................................................ 39

3-1-3 Operation buttons ................................................................................................................... 40

3-1-4 Inside the control box .............................................................................................................. 41

3-1-5 Switches on front of control box .............................................................................................. 42

3-1-6 Switch on rear of control box ................................................................................................... 44

3-1-7 Sensors on top of left cover..................................................................................................... 45

3-1-8 Power supply box (CE specification) ...................................................................................... 46

3-2 Machine Component Names .........................................................................47

3-4 Tension Roller ................................................................................................50

3-4-2 Pinch roller lock and unlock..................................................................................................... 50

3-5 Tape Detection Unit .......................................................................................51

3-5-2 Adjustment of Tape Detection Unit position ............................................................................. 51

3-5-3 Tape detection (Optional) ........................................................................................................ 52

Micro switch type ......................................................................................................................... 52

Thrubeam type fiber sensor/ Micro switch universal type ............................................................. 52

Double micro switch type ............................................................................................................. 53

3-6 Press Roller Unit............................................................................................54

3-7 Attachment Table Unit....................................................................................55

3-8 Table Drive Unit .............................................................................................57

3-9 Drive Roller ....................................................................................................59

3-10 Winder .........................................................................................................60

Built-in heater table ...................................................................................................................... 62

TABLE TEMPERATURE controller ............................................................................................... 63

3-11-3 Warm Air Unit ........................................................................................................................ 66

Warm Air Unit ............................................................................................................................... 66

Temperature controller ................................................................................................................. 67

3-11-4 Cover .................................................................................................................................... 70

Upper cover ................................................................................................................................. 70

Upper cover with safety interlock.................................................................................................. 70

Chapter 4 Specifications ................................................................. 72

Chapter 5 Machine Start-up and Operation ................................... 78

5-2-2 Setting new pre-cut tape roll.................................................................................................... 81

5-3 Automatic Operation ......................................................................................82

5-4-2 Emergency stop (Optional)...................................................................................................... 84

5-4-3 Error stop ................................................................................................................................ 85

1-1 To the Customer

To use the machine for as long a period as possible, be sure

The contents of the operation manual, maintenance manual,

The sales contract covers all our obligations. The warranty

Any part of this manual cannot be duplicated for use by a third

1-2 Cautions on Use

Electric shock hazard from power

Caution on entangling hands or body

Caution related to interlock

Caution on performing maintenance