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Keywords: This review article rst presents a summary of current understanding of the magnetic properties and
Diluted magnetic oxide intrinsic ferromagnetism of transition-metal (TM)-doped ZnO lms, which are typical diluted magnetic
ZnO oxides used in spintronics. The local structure and magnetic behavior of TM-doped ZnO are strongly
Local structure
sensitive to the preparation parameters. In the second part, we discuss in detail the effects of doping
Defects
elements and concentrations, oxygen partial pressure, substrate and its orientation and temperature,
Spintronics
deposition rate, post-annealing temperature and co-doping on the local structure and subsequent
ferromagnetic ordering of TM-doped ZnO. It is unambiguously demonstrated that room-temperature
ferromagnetism is strongly correlated with structural defects, and the carriers involved in carrier-
mediated exchange are by-products of defects created in ZnO. The third part focuses on recent progress in
TM-doped ZnO-based spintronics, such as magnetic tunnel junctions and spin eld-effect transistors,
which provide a route for spin injection from TM-doped ZnO to ZnO. Thus, TM-doped ZnO materials are
useful spin sources for spintronics.
2008 Elsevier B.V. All rights reserved.
Contents
1. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2. Experimental procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1. Film growth of TM-doped ZnO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.2. Characterization techniques. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3. Local structure and ferromagnetism of TM-doped ZnO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.1. Effect of doping concentration on structure and magnetization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1.1. Effect of doping concentration on magnetic ordering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1.2. Formation of a secondary phase . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2. Substrate effects on magnetization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2.1. Substrate-dependent local structure and magnetic behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2.2. Substrate orientation-induced distinct magnetization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
3.3. Effects of substrate temperature and lm deposition rate on magnetization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.4. Inuence of oxygen partial pressure on magnetic ordering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.5. Strain-induced ferromagnetism enhancement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.6. Inuence of post-annealing on magnetization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.7. Effect of co-doping on magnetic properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.8. Comparison of ZnO doped with Sc, Ti, V, Cr, Mn, Fe, Co, Ni and Cu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4. Origin of ferromagnetism in TM:ZnO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.1. Computational work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.2. Experimental work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.2.1. Secondary phases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.2.2. Carrier exchange interactions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
0927-796X/$ see front matter 2008 Elsevier B.V. All rights reserved.
doi:10.1016/j.mser.2008.04.002
2 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
[8,31,44,83]. Mechanism proposed include a bound magnetic including direct current (dc) reactive [44,45,94] and radio-
polaron (BMP) mechanism involving defects, including oxygen frequency (rf) [32,9698], combinatorial laser molecular-beam
vacancies (VO) and Zn interstitials (Zni) [8,44,57], hole doping epitaxy [50,51], chemical vapor deposition (metalorganic
involving Zn vacancies [34,49,84], and the formation of FM [34,52,53,99,100], ultrasonic-assisted solution [57] and plasma-
secondary phases (e.g., Mn2xZnxO3d via Zn diffusion into the enhanced [101]), ion-beam implantation [35,42], ion-beam
Mn oxide [31]) and TM-rich nanocrystals [83]. Moreover, ab initio sputtering [54,55], and solgel methods [39,56]. Although the
calculations predicted that competition between FM and anti-FM magnetic behavior of TM-doped ZnO lms is sensitive to the
coupling existed in DMOs [84]. However, there is ongoing debate deposition conditions [1618], there is no conclusion on which
about these systems. In addition, a trace amount of an external deposition method is best for FM ordering of the lms. For
pollutant would also lead to a hysteresis loop during magnetiza- example, Co-doped ZnO lms deposited by PLD [11,77] or
tion measurements, further adding to the difculties in determin- magnetron sputtering [74,94], two widely used deposition
ing true DMOs [20,85,86]. So far, publications, including reviews methods, could alternatively exhibit RTFM and RT paramagnetism.
[1620], have commonly focused on a summary and comparison of Therefore, magnetron sputtering is increasingly popular for
DMOs obtained by different groups and the different experimental growing TM-doped ZnO lms owing to its low cost, high efciency,
conditions used (e.g., preparation methods and parameters). The and easy control, and its production of uniform lms of large size.
resulting macroscopic magnetic properties, which are critically The substrate generally used is Al2O3(0 0 1) for low mismatch
dependent on growth and processing conditions, are diverse between the lm and the substrate (2%) after a 308 in-plane
without any common characterizations. It is therefore difcult to rotation [21], which is suitable for ZnO lms exhibiting high
identify a consistent mechanism to effectively understand the crystallinity. Some other substrates suitable for the deposition of
origin of FM ordering merely by comparison of experimental TM-doped ZnO lms are Si [37,58,62,67,102], fused quartz [33],
results achieved by different groups. glass [54,68,103,104], ZnO [51,105], ScAlMgO4 [106], LiNbO3 [44],
Half a decade has already passed since the rst report of RFTM LiTaO3 [107], MgO [40], SiO2 [108] and NaCl [94]. Fig. 2 presents
for TM-doped ZnO. Efforts are increasingly shifting not only to the typical cross-sectional high-resolution transmission electron
rational design of methods to evaluate this system, but also to the microscopy (HRTEM) images of Co-doped ZnO lms grown by
development of TM-doped ZnO-based prototype spintronics dc reactive magnetron co-sputtering on Al2O3(0 0 1), Si(1 1 1),
[14,85]. When successfully combined with semiconductor func- SiO2(1 0 1) and LiNbO3(1 0 4) substrates. In contrast to the
tionalities, spintronics will have a considerable impact on future epitaxial growth of Co-doped ZnO lm on Al2O3 substrate
electronic device applications [15]. Spin injection from a TM-doped (Fig. 2a), the lms deposited on Si, SiO2 and LiNbO3 exhibit an
ZnO layer to pure ZnO and other conventional semiconductors is an (0 0 2) preferred orientation with structural defects (e.g., edge
important long-term goal of the continuing research into ZnO dislocations, marked by ?) in Fig. 2bd. Large- and small-angle
DMOs [87,88]. This concept has been realized in a representative grain boundaries are observed in the lms on Si (Fig. 2b)/LiNbO3
spintronics application, TM:ZnO-based magnetic tunnel junction (Fig. 2d) and SiO2 (Fig. 2c), respectively. Moreover, the (0 0 2)
(MTJs), which exhibit superior spin-polarized transport, such as a planes are not parallel to the surface of the LiNbO3 substrate;
large half voltage (V1/2, at which the tunnel magnetoresistance instead, the pillar-like grains tend to grow in two directions, as
ratio becomes half of the maximum) [88,89], compared to highlighted by the arrows in Fig. 2d. These observations reveal that
conventional magnetic metals and magnetic TM-oxide-based the substrate affects the microstructure and the formation of
MTJs with AlOx and MgO barriers [90]. Another typical application defects in TM-doped ZnO lm, which are expected to play an
is the spin eld effect transistor (spin-FET) proposed by Datta and important role in FM ordering in this system [94].
Das [91]. The core idea of this device is to induce spin precession by For PLD and rf magnetron sputtering techniques, lms were
the Rashba spinorbit interaction in a two-dimensional electron deposited using a ceramic target prepared using standard ceramic
gas and to use spin-dependent materials. Although a working techniques from ZnO and TMO or TM2O3 powders of 4N purity [23].
prototype of the DattaDas spin-FET has not yet been fabricated, For example, ZnO and MnO2 were mixed together, ground and
the relevant conditions necessary for the desired spin-FET calcined for 8 h at 400 8C and sintered at 600900 8C for 12 h in air
operation and simplied devices have been obtained [92,93]. to obtain Zn1xMnxO(0 x 0.1) ceramic pellets [33], whereas
In this review, to study the nature of FM ordering at high TC, our ZnO and CoO/Co3O4 powders were used to prepare a
main aim was to extract a single variable from a series of Zn1xCoxO(0 x 0.1) target. An alternative way to synthesize
experiments. An example is substrate variation [94], which is of TM-doped ZnO lms starts from pure metal targets of Zn and TM
great interest owing to its potential to provide direct information [44,59,94] or alternate deposition of TM/ZnO [54,55]. The relative
regarding the factors that affect FM ordering. Moreover, since ZnO sputtering area of TM chips attached to a Zn target was adjusted to
is a multi-functional material, recent signicant advances for this control the TM composition in TM-doped ZnO lms grown by dc
system are described, including ferroelectric, piezoelectric, optical, reactive magnetron co-sputtering [44]. Although it is hard to
and electric properties, which play important roles in spintronics precisely control the TM content in the lm to the same as that in
applications of TM-doped ZnO [21]. We summarize recent progress the target [59], the doping concentration in the lm can be
in TM-doped ZnO-based prototype spintronics, such as MTJs and estimated using extrapolated data, i.e., 5 at.% Co in a ZnO target
spin-FETs. It should be pointed out that it is almost impossible to corresponded to 6 at.% Co-doped ZnO in lms prepared by PLD
describe all the work performed around the world owing to the [25]. In general, the doping concentration ranges from 1 to 10 at.%,
rapid pace of studies in this eld, and therefore some references producing typical DMOs exhibiting good crystal quality and strong
may have been overlooked. magnetization; lower doping amounts lead to weak magnetiza-
tion, whereas higher amounts tend to result in the appearance of
2. Experimental procedure secondary phases, depending on the TM elements [50,56,69,80].
The typical deposition conditions for laser ablated lms are a
2.1. Film growth of TM-doped ZnO temperature of 400600 8C, oxygen partial pressure close to
1 105 to 5 105 torr and laser energy of 13 J cm2
TM-doped ZnO lms are commonly deposited by pulsed laser [11,25,33,41,4651,95]. A relatively low (<600 8C) growth tem-
deposition (PLD) [11,33,41,4649,95], magnetron co-sputtering, perature leads to homogeneous wurtzite TM-doped ZnO lms,
4 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
Fig. 2. (a) HRTEM image of Zn0.96Co0.04O/Al2O3 in cross-section. The inset shows the corresponding SAED pattern. (b) Representative columnar crystal grain of 15 nm in
diameter along the ZnO(0 0 2) growth direction in Co:ZnO lm grown on Si substrate. (c) HRTEM image of the 1010 zone for Zn0.96Co0.04O grown on SiO2. (d) Cross-sectional
HRTEM image of Co:ZnO/128LN. The arrows show the growth direction along ZnO(0 0 2) planes. Typical edge dislocations are marked by white symbols (?).
whereas higher temperatures increase the possibility of an matrix can be observed from the XRD pattern. (2) Small
inhomogeneous lm containing secondary phases, such as nanoclusters present in the lm can be observed in HRTEM
hexagonal Co, CoO and Co3O4 phases [17,33,109,110]. For lms images. (3) Electron energy loss spectroscopy (EELS) combined
grown by magnetron sputtering, the substrate temperature (200 with HRTEM [33,108] and X-ray photoelectron spectroscopy (XPS)
400 8C) during deposition is typically lower than that for PLD [44,52] can be used to determine the valence state. (4) X-ray
[44,68,111], and a high substrate temperature (650 8C) results in absorption spectroscopy (XAS), including TM K-edge
the appearance of secondary phases [111]. The working gas is a [34,44,55,115], TM L-edge [97,116118] and O K-edge
mixture of argon and oxygen at various pressures, which greatly [37,39,97,109], and its interpretation are used to elucidate the
affects the local structure and the electric and magnetic properties local structure. This technique is currently attracting great interest
of ZnO lms [112114]. It was found that high oxygen partial owing to its potential to provide local chemical information for
pressure (>3 103 torr) resulted in insulating Co-doped ZnO complex materials and its sensitivity to subtle differences in local
lms (>105 V cm), which could provide a reference for elucidation arrangement [119,120]. (5) Most importantly, DMOs should not
of the nature of RTFM [112,113]. only have a strong magnetic circular dichroism (MCD) signal, but
should also exhibit an MCD spectral shape that reects the band
2.2. Characterization techniques structure of the TM-doped ZnO, which is considered the most
useful tool to determine whether TM-doped ZnO is a real DMO or
Highly sensitive characterization techniques are critical for not [37,47,52,60,85,121]. (6) Electron spin resonance (ESR)
understanding the local structure and the corresponding [122,123] and Mossbauer spectroscopy [42,124] are carried out
magnetic behavior of TM-doped ZnO and to accurately detect to determine the local structure. (7) Measurement of optical
chemical information for doping elements at very low concen- properties using Raman spectroscopy and optical transmittance
trations. X-ray diffraction (XRD) in the BraggBrentano, rocking (absorption) spectrophotometry are effective in identifying the
curve, and pole gure geometries is frequently applied to local structure of the TM dopant [48,108,109,111]. If the state of a
characterize the lm structure and crystalline quality of TM- trace amount of TM dopant cannot be determined using a single
doped ZnO, and to compare the position of diffraction peaks characterization technique, the best way to investigate the local
between doped and undoped ZnO lms to predict the state and TM structure may be to use several different methods.
site of doping elements [11,41,44,48,59,94]. Moreover, HRTEM, Magnetization studies are carried out using a superconducting
eld-emission scanning electron microscopy (FE-SEM) and quantum interference device (SQUID) magnetometer in the
selected-area electron diffraction (SAED) were used in most temperature range 5350 K. High-temperature magnetization
DMO studies to identify interface bonding and structural (300 < T < 800 K) was recorded using a vibrating sample magnet-
characteristics and to observe whether small nanoclusters were ometer (VSM), which has also been used to measure TC
present in the lms [36,44,48,94,110]. [11,44,59,125,126]. RTFM can also be examined using other
During the past 5 years of DMO research, many methods have methods, such as alternating gradient magnetometry (AGM).
been introduced to identify the local structure of doping elements, Furthermore, the average atomic magnetic moment is an inter-
which is considered essential information for elucidating the esting parameter in evaluating and understanding DMOs. It is
intrinsic FM and judging whether a system is a genuine DMO. (1) therefore important to determine the accurate TM content in
Diffraction peaks due to secondary phases in a TM-doped ZnO samples. X-ray uorescence (XRF) [103], energy-dispersive X-ray
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 5
spectroscopy (EDS) and inductively coupled plasma (ICP) atomic The mechanism related to BMP is discussed in detail in
emission spectroscopy [44,127] have been used to determine the Section 4.2.
TM content of samples after measuring the magnetic properties. Preparing TM-doped ZnO lms with low carrier concentrations
The average magnetic moment per Co atom was then calculated, and measuring the RTFM of the samples obtained can provide
for which ICP provided more credible results for the TM content information on whether RTFM is a result of carrier-mediated
[44,94,127]. To a certain extent, the characterization techniques exchange and whether the TM-doped ZnO can actually be used in
used are keys in studying DMOs. The rather contradictory situation spintronics applications. Thus it is worth studying TM-doped
regarding DMO research means that suitable characterization oxides without carrier-mediated exchange (>105 V cm) to further
techniques are important. In contrast, incorrect measurements add our understanding of the origin of RTFM. Insulating TM-doped
further confusion to the eld, which has already been dogged by oxides with FM ordering have become a new topic of research,
conicting papers published over the past several years. It is worth namely diluted magnetic insulators (DMIs) [44,144]. On the other
pointing out that checking for basic experimental reproducibility, hand, spin ordering in tunnel junctions made of barriers that are
in addition to correct selection of characterization methods, is DMIs such as EuS has interested researchers since Esaki et al. [145]
crucial in the search for high-TC DMOs and for reliable results and observed a large magnetic eld effect [146]. The topic has attracted
discussion. renewed interest because recent experiments revealed that the
To elucidate the origin of RTFM and to identify relationships transverse and longitudinal relaxation times for electron spins in
between magnetization and the carriers in TM:ZnO, RT resistivity insulating quantum dots are in the nanosecond regime, indicating
and Hall effect measurements have been carried out using van der potential as computing elements in quantum electronics
Pauw geometry using indium metal for the contact electrodes and [147,148]. However, EuS failed in the practical sense, because its
current supplied by a dc-voltage source [109]. For some TM:ZnO TC is much lower than RT, with little hope of great improvement
lms with quite high resistance, Hall effect measurements were [7]. RTFM with a TC of 350 K was rst observed for highly
not suitable and the electric properties were determined using a TF insulating Co- and Cr-doped TiO2 [144,149,150] and TM-doped
Analyser 2000 ferroelectric testing unit and impedance spectro- SnO2 [41,151]. Interestingly, RTFM explained by the BMP
scopy [44,108,128]. mechanism has been widely observed in TM-doped ZnO DMIs
[8,30,44,75,94,108,152,153]. For example, RTFM and a high TC of
3. Local structure and ferromagnetism of TM-doped ZnO 790 K were observed in (4 at.%) Co-doped ZnO lms deposited on
1288 YX LiNbO3, which is not carrier-mediated, but co-exists with
Doped ZnO lms are either conducting or semiconducting, as the dielectric state [44]. This phenomenon can be also reproduced
characterized by strong coupling between localized d electrons of in ZnO lms doped with different Co concentrations and grown on
the TM ions and the extended s and p carriers of ZnO. Thus, the various substrates. Measurement of RTFM in Zn1xFexO (x 0.04)
carriers are spin-polarized and can mediate FM ordering of the [43] and a lack of correlation between RTFM and conductivity
magnetic moments of TM ions doped into the oxide lattice, i.e., TM [154] support this observation. Moreover, Xu et al. [155,156]
ions replace Zn2+ sites. Furthermore, additional electron doping, observed that the saturated anomalous Hall resistivity increased
such as in (Co,Al)- [49,54,129,130], (Mn,Sn)- [131] and (Cu,Ga)- with decreasing electron concentration in Co-doped ZnO. Because
doped ZnO [132], as well as hole doping, such as in (Co,Li)- the spin splitting was proportional to the macroscopic magnetiza-
[133,134], (Co,N)- [135,136], (Mn,Cu)- [125], (Fe,Cu)- [126], tion induced by the Co ions, the positive magnetoresistance
(Co,Cu)- [137] and (Mn,P)-co-doped ZnO [138], has been inves- observed and the anomalous Hall effect in the insulating regime
tigated to further examine carrier effects on RTFM. It was suggested that FM could be realized in Co:ZnO with low electron
importantly noted that additional carrier doping had no signicant concentrations [157].
impact on RTFM enhancement [125,129,131,132], and some lms As indicated above, substitutional TM ions are a necessary but
even showed RTFM with an inverse correlation between magne- not sufcient condition for FM ordering [27,42,47,79,158], and
tization and electron density [131,137,138]. Thus, inconsistent large variations in carrier concentration and magnetic properties
phenomena and conclusions have been obtained, indicating that have been reported for otherwise similar samples, indicating a
the intrinsic FM of TM-doped ZnO systems remains an open strong dependence of RTFM on the synthesis and processing
question. It is hence of vital importance to clarify the correlation, if parameters [17,159]. Indeed, there is large variability in the
any, between carriers and the mechanism of FM inherent to this magnetic behavior of TM-doped ZnO lms, and the preparation
class of DMOs. process is not easily reproduced from one growth run to another.
On the other hand, defects are supposed to play a primary The intimate correlation between carrier concentrations and
role on FM ordering in TM-doped ZnO [8]. In fact, an increasing point defects (i.e., VO and Zni) arising from a large number of
number of studies have demonstrated that the formation of VO structural defects such as edge dislocations and stacking faults
and/or Zni [30,44,57,128,139] could lead to RTFM or FM leads to difculty in elucidating the relations among carriers,
enhancement. For example, the production of VO by depositing structural defects and FM ordering. It is therefore important to
TM:ZnO lms in vacuum [44,111,117] or annealing lms in a design a series of experiments to distinguish the variation of
reducing atmosphere (such as vacuum [137,140,141] and Ar/H2 carriers and structural defects and thus to identify the nature of
[55]) could greatly enhance RTFM. Annealing of Co-doped ZnO the RTFM. We discuss the inuence of parameters including the
lms in a Zn atmosphere also resulted in FM enhancement due doping elements and concentrations, oxygen partial pressure,
to Zni [57]. A similar phenomenon was observed by Schwartz substrate and its orientation and temperature, deposition rate,
and Gamelin [142] for Co:ZnO nanocrystals. It is worth pointing post-annealing temperature and co-doping on the local structure
out that a large number of edge dislocations, which were and subsequent FM ordering of TM-doped ZnO in this section. This
directly observed by HRTEM, enhanced the concentration of VO is important for understanding the origin of RTFM in this system.
and/or Zni point defects, and thus increased the RTFM of Such understanding can reveal the potential of a class of
TM-doped ZnO lms and nanowires [58,67,94,143]. Moreover, promising magnetic materials with strong FM at the atomic
charge-compensating structural defects can form polarons by level, which is attractive for elds such as semiconductor
interaction between hydrogenic electrons and the defects, spintronics, quantum computation and magneto-optical devices
leading to coupling of the exchange between polarons [8,139]. [160].
6 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
3.1. Effect of doping concentration on structure and magnetization for Co in ZnO [50,127], much lower limits (e.g., 5 at.%) have been
reported for V, Cr, Fe, Ni and Cu are detected [30,43,50], which is
3.1.1. Effect of doping concentration on magnetic ordering consistent with Raman spectroscopic observations [161].
Incorporation of substitutional TM ions in IIVI ZnO should be Table 1 presents a list of TM-doped ZnO DMOs, including the
less difcult than incorporating them in other semiconductor substrate, TC, TM content and the corresponding magnetization
hosts, since the valence of Zn (2+) and the ionic radius can be features at 300 K. As indicated above, the magnetization of TM-
readily adopted by many 3d TM ions [19,50]. Different from TM- doped ZnO exhibits no correlation with the preparation method,
doped TiO2 [20,144], TM-doped SnO2 [41,151] and similar systems, which is therefore not listed in the table. There are many references
this favors substitution of the TM ions at the cation site and helps in for Co- and Mn-doped ZnO owing to their strong magnetization
achieving higher dopant concentrations. It also means that, in a signals and the stability of Co and Mn ion congurations [8,23,44].
perfectly stoichiometric sample, substitutional TM introduces a It is evident from Table 1 that Co-doped ZnO and Mn-doped ZnO
magnetic moment without contributing carriers. Thus, this system are the most popular systems in the literature [162166], not only
can give direct insight into the question of whether the FM because of their high thermal solubility in ZnO lms, but also
observed is carrier-mediated or not [44]. Furthermore, TM atoms because of their high magnetic moments at RT. The dopant
have different thermal solubility limits in ZnO: in general, the concentration has a denite inuence on the magnetic properties,
thermal solubility limits of Co and Mn are much higher than those with more desirable behavior often obtained at comparatively
of Ti, V, Cr, Fe, Ni and Cu [50]. In contrast to the solubility of 15 at.% lower concentrations [23,25,37,62,66], with typical concentrations
Table 1
List of TM:ZnO DMOs
Magnetization features were recorded at 300 K for the TM content listed in column 2. Para, paramagnetism; AF, anti-ferromagnetism.
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 7
p
meff g mB JJ 1 (1)
Table 2
Resistivity (R), electron concentration (ne) and magnetic moments (M) for Co:ZnO samples prepared by rf magnetron co-sputtering at low/high deposition rate and low/high
substrate temperature (Tsub)
Slow growth high Tsub 0.15 573 >103 No Hall signal 0.25
Slow growth low Tsub 0.15 RT 5.6 2.3 1018 0.39
Fast growth high Tsub 0.6 573 1.9 101 1.5 1019 0.73
Fast growth low Tsub 0.6 RT 1.7 102 5.2 1019 0.91
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 13
Fig. 11. (a) Experimental and (b) calculated Co K-edge XANES spectra for Co:ZnO lms (E0 = 7708.8 eV). (c) Experimental and (d) calculated O K-edge XAS for Co:ZnO lms.
Spectra correspond to samples grown with slow growth and high Tsub (LH), slow growth and low Tsub (LL), fast growth and high Tsub (HH) as well as fast growth and low Tsub
(HL) from bottom to top.
generally applicable to TM-doped ZnO. Instead, structural defects corresponding to a deposition rate of 3.0 and 2.0 nm/min,
play a primary role in RTFM of TM-doped ZnO, and carriers respectively [112]. Fig. 12 shows the PO2 -dependent RTFM and
involved in carrier-mediated exchange are natural by-products of resistivity (R) of the lms. Both the magnetization and resistivity
the creation of defects, which is demonstrated in publications with decrease with decreasing PO2 . Insulating sample 1 (0.62 mB/Co)
increasing frequency [60,76]. exhibits more robust RTFM than semiconducting sample 2
(0.45 mB/Co), revealing that an increase in carrier concentration
3.4. Inuence of oxygen partial pressure on magnetic ordering does not enhance RTFM. A similar trend was observed by
Chakraborti et al. [137] and Ivill et al. [131,138]: an increase in
In general, both the oxygen partial pressure (PO2 ) and the conductivity did not increase the magnetic moment; instead, an
substrate temperature (Tsub) play important roles in the micro- increase in carrier concentration led to weak magnetization,
structure of DMO lms, which subsequently affects the magnetic suggesting that a mechanism mediated by free carriers is not a
properties. PO2 and Tsub affect the formation of secondary phases feasible explanation for FM in TM:ZnO lms.
[46,33]. Lee et al. [98] reported that ne dramatically decreased with To interpret the intrinsic RTFM in this system, microstructural
increasing PO2 up to an Ar/O2 ratio of 1:1 for the preparation of and local structural characterizations were conducted [112]. XRD
Mn:ZnO lms by rf magnetron sputtering, which showed intrinsic spectra in BraggBretano, rocking curve and F scan geometries
FM with TC of 78 K. However, lms grown under O2 overpressure suggested that the lms were highly crystalline, as shown in
showed various secondary phases, such as ZnMn3O4, MnO2 and Fig. 13. The XRD pattern of sample 1 (Fig. 13a) has a weaker
ZnMnO3. Films deposited at lower temperature (600 8C) and Co:ZnO(0 0 2) peak than that for sample 2 (Fig. 13b). Comparison of
higher oxygen pressures (105) showed a homogeneous dis-
tribution of Zn0.75Co0.25O, leading to spin-glass behavior, whereas
mixed phases of wurtzite ZnO with rock-salt CoO and hexagonal
Co phases coexisted at higher temperatures and lower pressures,
accompanied by RTFM [46]. On the other hand, variation of PO2
can lead to a change in magnetic behavior and electric properties.
On increasing PO2 from 1.0 104 to 5 Pa, the resistivity of
Zn0.95Co0.05O lms increased from 2.15 102 to 2.06 104 V cm,
corresponding to a change in magnetization from RTFM to
paramagnetism, revealing that oxygen vacancies are absolutely
necessary to induce FM coupling in TM-doped ZnO [168]. Philip
et al. [243] observed that the electric and magnetic behavior
of Cr-doped In2O3 lms from FM metal-like to FM semiconduct-
ing to paramagnetic insulators can be controllably tuned
by P O2 . It seems that PO2 plays an important role in the
magnetization of DMOs.
A transition from DMI to DMO was realized in Zn0.96Co0.04O Fig. 12. Magnetic moment and resistivity of Zn0.96Co0.04O lms as a function of P O2 .
lms grown by dc reactive magnetron co-sputtering by decreasing The inset shows magnetic hysteresis loops (MH) for Co:ZnO lms 1 and 2 prepared
P O2 from 4.2 103 to 1.0 103 torr for samples 1 and 2, at high and low P O2 , respectively.
14 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
Fig. 13. XRD spectra of Co:ZnO lm for (a) sample 1 and (b) sample 2. X-ray rocking curves from the wurtzite (0 0 2) plane for (c) sample 1 and (d) sample 2. F scan of {1 0 1}
family peaks for (e) sample 1 and (f) sample 2.
FWHM values for X-ray rocking curves for the wurtzite(0 0 2) RTFM in Co:ZnO lms by controlling the lm thickness from 15 to
plane for samples 1 and 2 reveals an improvement in crystallinity 900 nm (15, 30, 60, 100, 150, 300, 600 and 900 nm). The lms were
of sample 2 (0.188 decrease in the FWHM value; Fig. 13c and d). The deposited on Si(1 0 0) and LiNbO3(1 0 4) substrates by rf magne-
F scan for the (1 0 1) plane of sample 2 grown at lower PO2 is tron sputtering. The thinnest lms (15 nm) with greatest lattice
similar to that of sample 1 to a certain extent, but with more strain had the highest saturated magnetic moments of 2.96 and
symmetrical peaks. These results indicate that sample 2 is more 5.52 mB/Co for Co:ZnO/Si and Co:ZnO/LiNbO3, respectively (Fig. 15)
crystalline and has fewer structural defects such as edge The saturated FM rapidly decreased with increasing lm thickness;
dislocations and stacking faults due to the comparatively slow
rate of lm growth [189,190].
Fig. 14 presents Co K-edge XANES for samples 1 and 2 and for
reference materials (Co metal, CoO, Co2O3 and Co3O4). It is evident
that Co in Co:ZnO is not in the form of Co metal or Co-based oxides
such as CoO, Co2O3 and Co3O4. The calculated spectra displays
three main features accurately replicating those of the experi-
mental spectra, denoted by A, B, and C in order of increasing photon
energy (insets a and b of Fig. 14). These spectra reveal that for
sample 1 the Co photoabsorber in tetrahedral coordination is
surrounded by a rst shell comprising four oxygen atoms, with no
difference in normalized absorption between features B and C
(upper spectra in insets a and b). For sample 2, the Co center is
surrounded by a rst shell of three oxygen atoms and a VO, leading
to an obvious difference between features B and C for the
experimental (0.13) and calculated (0.11) spectra (lower spectra in
insets a and b). It is therefore concluded that there are more VO and
thus a higher carrier concentration in sample 2 due to lower P O2 .
However, sample 1 contains more structural defects than sample 2,
resulting in stronger RTFM for sample 1, demonstrating that
structural defects are responsible for RTFM in Co-doped ZnO.
Fig. 16. (a) XRD patterns of Co:ZnO/Si lms of 15900 nm in thickness. (b) Lattice constant and (c) c-axis lattice strain as a function of lm thickness.
16 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
Table 3
List of co-doped ZnO systems, including lms, bulk and nanocrystals
Content is presented as x/y for the main TM element/additional dopant. Magnetism results indicate the change in parameter before ! after co-doping.
electron doping elements in TM-doped ZnO are Al, Sn and Ga FM enhancement arising from an increase in donor defects or
[52,95,129,131,132,186,35], whereas N, Li, and Cu are used for hole electron carrier concentration is ambiguous because these two
doping [125,126,129,203205]. It has been reported that an factors coexist in most doped ZnO systems and are hard to
increase in carrier concentration due to trace amounts of distinguish. It is hence of vital importance to design an experiment
additional dopants can greatly enhance RTFM [95,126,206]. that can separate the two factors [129,204]. Zn0.95xCo0.05AlxO
Additional hole doping, using Li or N promotes strong hybridiza- (x = 0, 0.001, 0.002, 0.004, 0.005) thin lms were deposited on
tion of Mn 3d/N 2p states and long-range FM coupling, as it brings Si(1 0 0) substrates by rf magnetron co-sputtering [129]. Fig. 19
the d electron/TM closer to the optical values for double exchange shows XRD spectra of Zn0.95xCo0.05AlxO (x = 0, 0.002) lms. The
[133,134], although some authors reported that co-doping plays a peak corresponding to ZnO(0 0 2) changes little except for a
negligible role in enhancing the magnetic moment [125]. Ivill et al. decrease in intensity after additional Al doping in the Zn0.95Co0.05O
[131] designed a series of experiments on (Mn,Sn)-co-doped ZnO thin lm, implying a decrease in crystalline quality and an increase
with varying Sn concentration (00.1 at.%). They found that the in structural defects on inclusion of a trace amount of Al. This was
lms exhibited FM, with an inverse correlation between magne- conrmed by optical transmittance spectra of pure ZnO and
tization and electron density, as a function of the Sn doping. This Zn0.95xCo0.05AlxO (0 x 0.005) [129].
phenomenon is most consistent with the BMP model in which Fig. 20 shows curves of the magnetization versus magnetic eld
bound acceptors mediate FM doping. In this case, an increase in (MH) for Zn0.95xCo0.05AlxO (0 x 0.005) thin lms. The Al
electron density decreases the acceptor concentration and thus concentration dependence of Ms and ne is shown in the inset. It is
quenches the FM exchange. Similar conclusions have been evident that a trace amount of Al can enhance the magnetic
reported for (Mn,P)- and (Cu,Ga)-co-doped ZnO [132,138]. moment per Co ion of Co:ZnO lms. The increase in Ms with
additional Al doping, combined with the increase in ne, reveals that value for x = 0.004 (ne/nAl = 0.95), implying a greater number of
the free carrier concentration is important, as expected for DMOs. donor defects in the former lm and corresponding to the stronger
However, it should be noted that ne (1.597 1020 cm3) is greater Ms of 2.71 mB/Co, indicating that donor defects most likely play a
and Ms (2.34 mB/Co) is smaller for the Zn0.95xCo0.05AlxO (x = 0.004) critical role in governing FM ordering.
lm than for the Zn0.95xCo0.05AlxO (x = 0.001) lm A systematic study by Mokhtari et al. [207] revealed that
(ne = 4.597 1019 cm3, Ms = 2.71 mB/Co), indicating that elec- additional doping could ionize other defects, which played an
trons are not the real mediators of FM exchange. It is clear that important role in FM enhancement. Fig. 21 presents the change in
additional Al doping leads to a decrease in both the crystalline carrier density as a function of the Al concentration in (a) Co- and
quality and the number of crystal grains in Co:ZnO lms, indicating (b) Mn-doped lms. Data obtained for lms prepared by PLD at
that a large number of structural defects are introduced, mainly 0.05 mtorr and by magnetron sputtering are denoted by black and
located in grain boundary areas in the samples. In addition, the red circles, respectively. The circles around the data points indicate
concentration of donor defects (notably VO and Zni) increases to a the magnitude of the magnetic moment measured at RT. The solid
certain extent [58,109], accounting for the FM enhancement. lines correspond to addition of one carrier per Al atom. It is evident
It is noted that the ne dramatically increases up to x = 0.002 and that all data lie signicantly above this line, indicating that the
then remains relatively constant with further increases in Al presence of Al has ionized other defects, perhaps some Co2+ and
concentration, implying that Al is not the only candidate Mn2+, which provides carriers in the lms.
responsible for introducing electron carriers, as shown in Acceptor co-doping using Li and N has also been extensively
Fig. 21a (red circle). It is well known that ZnO is a natural n- studied to determine the origin of RTFM [134,204]. Fig. 22 shows
type semiconductor owing to the existence of native defects such unpolarized Raman scattering spectra measured at RT for
as VO and Zni. An increase in structural defects could enhance the (Co,N):ZnO lms. Vibrational modes are evident at 273, 470,
concentrations of point defects such as VO and Zni in the lms. Such 639, 691 and 854 cm1, in addition to the host phonons of ZnO,
an increase in point defects, as well as the native defects, is indicating the substitutional behavior of N3 for O2 and an
regarded as another primary donor source of electron carriers. increase in donor defects for (Co,N)-co-doped ZnO lms [204]. The
Since free electrons can be introduced into Co:ZnO lms not only higher intensity of the vibrational mode at 577 cm1 indicates a
by additional Al doping, but also by an increase in donor defects, higher concentration of donor defects in (Co, N):ZnO lms than in
the ratio of the carrier concentration to the Al density (ne/nAl) is an Co:ZnO lms. Acceptor doping with nitrogen compensates the
indirect measure of the number of defects in a lm, with a larger ne/ electron carriers and hence decreases ne [135]. Magnetization
nAl value indication a greater number of donor defects. For measurements reveal that co-doping increases Ms for (Co,N)-co-
Zn0.95xCo0.05AlxO (x = 0.001), ne/nAl = 1.09 is greater than the doped ZnO (0.129 mB/Co) compared to Co:ZnO (0.085 mB/Co)
Fig. 21. Carrier density of (a) Zn0.95xCo0.05AlxO and (b) Zn0.98xMn0.02AlxO lms. The solid line corresponds to addition of one carrier per Al atoms. Films were grown by PLD at
0.05 mtorr (black) [207] and magnetron sputtering (red), respectively [129]. The thickness of the circles indicates the magnetic moment in Bohr magnetons. The circles lie
signicantly above the line, indicating that the presence of Al has ionized other defects and also possibly some of the Co2+. (For interpretation of the references to color in this
gure legend, the reader is referred to the web version of the article.)
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 19
3 1 LL 1 SS 1
g ; (2)
2 2 JJ 1
where J is the total angular momentum, including the spin (S) and
orbit (L) angular momentum. The Lande g-factor and J can be used
to evaluate the effective magnetic moment of TM ions in TM:ZnO
lms. For Co2+ in Co:ZnO, the Lande g-factor is 4/3, the effective
magnetic moment calculated using Eq. (1) is 6.6 mB/Co and the net
spin moment calculated from the spin-only formula mmax g mB S
is 3 mB. Similarly, Mn2+ has both an effective and net spin magnetic
moment of 5 mB. These different ideal magnetic values for TM ions
are most likely one of the reason for different moments of TM:ZnO.
On the other hand, it is generally considered that Co is more
soluble than other TM atoms in ZnO lms [11,44,105]. In terms of
concentration-dependent magnetization, the largest moments
Fig. 22. Raman spectra of ZnO, Co:ZnO and (Co,N):ZnO lms. ZnO and silicon
substrate modes are marked by (*) and (#), respectively.
have been observed for ZnO doped with different TM concentra-
tions, i.e., 35 at.% for Co [44,58,103], 2 at.% for Mn [33,95], and
1 at.% for Cr, Ni and Cu [62,64,66], and ZnO lms with other dopant
[204]. Combined with FM enhancement, donor defects other than contents tend to show much lower magnetic moments. Therefore,
electron carriers are responsible for RTFM in TM-doped ZnO lms. besides ideal moment discrepancies for these TM ions in ZnO lms,
different solubility and different maximum dopant concentration-
3.8. Comparison of ZnO doped with Sc, Ti, V, Cr, Mn, Fe, Co, Ni and Cu dependent magnetization would also account for different
magnetic moments in 5 at.% TM-doped ZnO lms.
More than 800 reports on TM-doped ZnO DMOs have been
published from 2000 to date. A large number of these focus on Co-
[8,11,23,4455,5860,97,103,111,126,141,152,154,164,165,198] 4. Origin of ferromagnetism in TM:ZnO
and Mn-doped ZnO lms [3137,39,40,73,98,117,140,186]. There
have also been numerous experiments on ZnO lms doped with As discussed in Section 3, almost all of the publications that
other TM elements, including Sc [23,24], Ti [23,25], V [2628], Cr reported magnetization of TM:ZnO referred to the origin of
[11,23,29,30,208], Fe [4143,124], Ni [62,63] and Cu [6467,132]. magnetic ordering. This is very important not only for under-
Some of the magnetic moments measured at room temperature standing the nature of TM:ZnO, but also for applications in useful
reported for 5 at.% TM-doped ZnO lms are summarized in Fig. 23. spintronics. Many points and mechanisms have been proposed for
ZnO lms doped with 5 at.% Co commonly exhibit much stronger intrinsic magnetic ordering. However, it is hard to experimentally
RTFM than ZnO doped with other TM elements. This is consistent characterize and quantitatively analyze the nature of RTFM
with results obtained by Ueda et al. [11] and Venkatesan et al. [23] because so many factors affect the magnetic behavior of TM-
for ZnO doped with a series of TM elements; such studies can doped ZnO, including the microstructure, local structure, electro-
exclude the inuence of the preparation parameters on magnetic nic structure, coupling between localized magnetization, and trace
ordering. It is evident that ZnO lms doped with different TMs amounts of TM dopant atoms in complicated oxide lms. On the
exhibit RTFM with different Ms values, as well as very small other hand, FM values reported seem to be rather weak, often
magnetic moments indicating negligible FM. It is tempting to many orders of magnitude smaller than the expected spin-only
saturation moments. The samples that exhibit FM often do so at
levels low enough so that no technique other than magnetization
itself can reveal whether the phenomenon is intrinsic or arises
from impurities [209]. Magnetization is measured using a SQUID
magnetometer with a high sensitivity of 108 emu; trace FM
contamination of the substrate can lead to lms with magnetiza-
tion signals, which means that measurements may be ambiguous.
Detection of the local structure and electronic structure of TM
elements in TM:ZnO lms is generally limited by the sensitivity
and efciency of the equipment used [85,139], which can lead to
false conclusions. Reports that cast doubt on the very existence of
any type of long-range magnetic order in clean samples of TM-
doped ZnO at low doping concentrations are also appearing with
increasing frequency [209]. There is ongoing debate about these
systems. Therefore, from the broad spread of experimental data it
is difcult to draw general conclusions about the nature of
magnetic interactions in TM-doped ZnO. The confusing situation
clearly calls for a critical and even subjective position to be taken
on this topic. So far, the most popular mechanisms suggested for
magnetic ordering in TM-doped ZnO are carrier-mediated
Fig. 23. Magnetic moments reported for (5 at.%) TM:ZnO at room temperature. exchange (electron and hole carriers), and the BMP model with
20 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
respect to defects, including VO and Zni, and Zn vacancies, which in the absence of free carriers. Since the total energy calculated is
are described in detail in this section. very close for FM and anti-FM orders [84,210], actual TM-doped
ZnO systems observed in experiments may remain in different
4.1. Computational work metastable states that exhibit FM, anti-FM, and spin-glass
behavior, depending on subtle differences in experimental
Computational work based on ab initio calculations can provide conditions, even for similar lms.
some initial predictions and explanations of the electronic More recently, Ye et al. [211] found that the FM state was
structure and the nature of FM ordering in TM-doped ZnO. To 43 meV lower than the anti-FM state, and thus 12.5 at.% Cu-doped
simulate realistic dopant concentrations, calculation are required ZnO was predicted to be in the ground state with a net magnetic
for supercells containing a large number of atoms, in which the moment of 1 mB/Cu and an estimated TC of 380 K. In contrast, it
doping concentrations are usually higher than 5 at.% [84,210]. was found that the close case for Mn:ZnO favors an anti-FM state,
Hence, computational results for TM:ZnO have been produced whereas the separated conguration tends to be an FM state, stable
using a range of electronic structure implementations, generally by only 0.01 eV [216]. Furthermore, different geometries with
using a density functional theory (DFT) approach based on FM, ferrimagnetic and anti-FM congurations were found to be
pseudopotentials with localized atomic-orbital basis sets, in which nearly energetically degenerate for both bulk V:ZnO and subsur-
the total energy of a many-electron system is described as a face layers of the lms, where V atoms couple ferromagnetically
function of the electron density [19,84,210,211]. This method when they occupy surface sites of the lms [210]. On the other
combines accuracy with low computational cost, particularly hand, Lee and Chang [188] calculated the energy difference
compared to other approaches such as plane-wave pseudopoten- between FM and anti-FM alignments for two Co atoms substituted
tial or all-electron methods [84]. The most widely used approx- in ZnO using the GGA approximation in supercells of 2 2 1,
imation is the local density approximation (LDA) exchange 2 1 2 and 4 1 1 to allow different CoCo distances. The
correlation function [10]. Relaxation of the constraint of an equal total energy difference between the FM and anti-FM states was
occupation of spin-up and spin-down states and minimization of <3 meV per Co atom, indicating that competition between FM and
the total energy with respect to spin occupancy results in the local anti-FM coupling exists in Co-doped ZnO and that spontaneous
spin-density approximation (LSDA) [19,133]. magnetization is not possible in intrinsic Co-doped ZnO, which
It is known that LDA or LDSA calculations fail in predicting the theoretically supports FM at 300 K in some Co-doped ZnO lms,
insulating behavior of many TM oxides, but produce the metallic but the reproducibility was less than 10% [11]. Meanwhile, high
ground state. Incorporation of the effective on-site Coulomb concentrations of both Co ions and electron carriers are needed to
interaction, characterized by Hubbard U (LDA + U), between TM 3d achieve FM [188,217]. These diverse magnetic behaviors predicted
electrons into LDA or LDSA calculations greatly improves the by calculations could be one of the main reasons for the conicting
interaction for TM oxides [212,213]. On the other hand, the highly experimental results reported.
precise projected augmented wave (PAW) method within the However, for both Co- and Mn-doped ZnO, the FM state was
generalized gradient approximation (GGA) or GGA + U scheme, stabilized by the introduction of holes, such as the creation of Zn
which includes an explicit dependence of exchange-correlation vacancies in (Co,Cu)-doped ZnO. Following this prediction, the
energy on the electron density gradient, has also been used in effects of Zn vacancies on FM were experimentally and theore-
calculations [33,10,214,215]. tically investigated [34,218,219]. Some groups demonstrated that
In 2000, Dietl et al. [9] theoretically predicted that p-type ZnO Zn vacancies promote the appearance of RTFM by rst-principle
doped with 5 at.% Mn and similar TM-doped wide-bandgap calculations [34,218,219]. Comparison of experimental and
semiconductors would show RTFM, which focused much attention calculated O K-edge XANES revealed that Zn vacancies indeed
on TM:ZnO research. The prediction used a mean eld approach, exist in Mn-doped ZnO lms and account for the RTFM. Likewise,
assuming hole-mediated FM interactions between Mn local the presence of Fe3+ is a signature of hole doping induced by Zn
moments. TC was then determined from competition between vacancies. A deep acceptor trap due to Zn vacancies with thermal
this long-range carrier-mediated FM coupling and short-range activation energy of 0.815 eV has also been detected by deep-level
MnMn anti-FM exchange interactions. Following this prediction, transient spectroscopy [49]. Karmakar et al. [218] revealed
Sato and Katayama-Yoshida [10] used the KorringaKohn experimentally and theoretically that hole doping is crucial in
Rostoker (KKR) Green function method based on LDA of density promoting FM in Fe-doped ZnO systems, and the presence of Fe3+ is
functional theory to calculate the properties of ZnO doped with a signature of hole doping induced by Zn vacancies. Furthermore,
TMs such as V, Cr, Mn, Fe, Co, and Ni. Additional holes were Yan et al. [34] recently demonstrated that Zn vacancies favor RTFM
introduced by replacing O with N, and electrons were added by in Mn-doped ZnO lms using simulations of O K-edge XANES and
replacing some of the Zn atoms with Ga. The energy difference rst-principle calculations; similar calculations and results were
between FM and anti-FM ordering was taken as the upper TC limit. reported by Iusan et al. [219]. To elucidate the effects of co-doping
This energy difference (EFM EAFM) was in the region of 0.2 eV, and defects on magnetic ordering in TM-doped ZnO, Gopal and
which corresponds to a high TC. An FM ground state would be Spaldin [213] systematically investigated four cases: (a) single-TM
favored at a doping level of 25 at.% V, Cr, Fe, Co, or Ni in ZnO (Cr, Mn, Fe, Co, Ni and Cu) substitution at Zn sites; (b)
without additional dopants to provide carriers, whereas Mn-doped substitutional magnetic TM ions combined with additional Cu
ZnO was anti-FM. and Li dopants; (c) substitutional magnetic TM ions combined with
Spaldin [84] identied potential FM ground states within VO; and (d) pairs of magnetic ions (Co and Fe, Co and Mn). The
(Zn,Co)O or (Zn,Mn)O using the DFT approach with an LSDA results indicate that FM ordering of TM ions is not induced by
exchange-correlation function. This is achieved for 32-atom addition of substitutional TM impurities or VO. Incorporation of
supercells containing two dopant ions in different positional interstitial or substitutional Li is favorable for FM, as are Zn
arrangements: a close conguration in which TM atoms were vacancies, which is consistent with experimental results for
separated by a single O ion, and a separated conguration in (Co,Li)-co-doped ZnO [133,134].
which they were connected by an OZnO bond. The calcula- We cannot draw denite conclusions regarding intrinsic RTFM
tions show that the energy difference between the anti-FM and FM from the computational work carried out. Electron carriers
spin orders was only a few meV, producing paramagnetic behavior [188,220] and hole doping [49,84,133,134,213,221] seem to be
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 21
necessary for FM ordering. Gopal and Spaldin [213] proposed that effect (AHE) [226], which was previously considered an indicator of
the calculated magnetic behavior is strongly dependent both on whether a doped sample was a DMO or not. AHE was observed in
the computational details (with FM disfavored by improved FM ZnO and in non-FM Cu-doped ZnO lms, indicating that AHE
convergence) and on the choice of exchange correlation function does not uniquely demonstrate FM behavior [227]. Therefore,
(with FM disfavored by the more appropriate LSDA + U method). checking for basic experimental reproducibility, in addition to
This observation explains the large spread of computational results carrying out careful high-sensitivity characterizations, is highly
in the literature. Fortunately, there is some common ground: most warranted.
publications agree that intrinsic FM does not occur in TM-doped
ZnO at reasonable doping concentrations, but in many cases the 4.2.2. Carrier exchange interactions
addition of carriers or point defects stabilizes the FM state Since RTFM arising from carrier exchange interactions has been
[222,223]. These additional carriers or point defects are in fact by- predicted for several TM-doped ZnO systems [9,10,228], a great
products of structural defects in TM-doped ZnO, which have deal of attention has been focused on doped ZnO systems as
frequently been demonstrated by recent experiments and appear potential DMOs to provide efcient injection of spin-polarized
with increasing frequency. carriers for spintronics devices. Meta-analysis reveals that early
publications (20012004) generally favored carrier exchange
4.2. Experimental work interactions [11,81,48], which are characterized by strong coupling
between localized d electrons of TM ions and the extended sp
Fueled by theoretical predictions, claims of FM at and above carriers of ZnO. The term carrier-mediated exchange refers to
room temperature in TM-doped ZnO have abounded. Unfortu- interactions between localized magnetic moments that are
nately, neither the true nature of these materials nor the physical mediated by free carriers in the system, which can be divided
causes of the magnetism have been adequately determined. It is into three cases: the RudermannKittelKasuyaYosida (RKKY)
known that it is difcult to introduce factors that may inuence interaction; Zener carrier-mediated exchange; and Zener double
RTFM, such as defects and carriers, into calculations. Moreover, it is exchange. RKKY interaction formally describes the magnetic
not easy to realize low doping concentrations (<2 at.%) in TM- exchange between a single localized magnetic moment and a free
doped ZnO supercells because of the limitation of the calculation electron gas. Zener carrier-mediated exchange proposes that
efciency of rst-principle calculations. So far, hundreds of studies carriers can mediate FM interaction between local moments in
have experimentally investigated intrinsic RTFM by focusing on the lms and both local magnetic moments and itinerant carriers
correlations among the magnetization, microstructure, local [9]. FM ordering is driven by a decrease in carrier energy due to
structure and electric properties. Besides the extrinsic origin of redistribution between spin sub-bands split by the exchange
RTFM arising from FM secondary phases, several mechanisms have interaction. Finally, the Zener double-exchange model refers to
been proposed for intrinsic magnetic ordering, including carrier- indirect coupling mediated by oxygen atoms between neighboring
mediated exchange (electron and hole carriers) and a BMP model FM ions in different states. The kinetic energy of the system
in terms of structural defects (VO and Zni), which are described in decreases if the magnetic moments align in parallel, since parallel
details in the following subsections. alignment allows electron transfer from ions in the low state to
those in the higher state [19].
4.2.1. Secondary phases In TM-doped ZnO, the addition of Al as a dopant, or a decrease in
Before elucidating the mechanisms of intrinsic FM, it must rst PO2 during lm growth, seems to increase the carrier concentration
be conrmed whether the magnetic hysteresis loops measured are and enhance FM [46,206]. This suggests the presence of carrier-
intrinsic or extrinsic. Magnetic contamination [86], measurement mediated exchange. It was found that two distinct mechanisms
errors [139] and secondary phases [31,110] are all possibilities for could give rise to FM in TM-doped ZnO prepared by PLD: magnetic
FM signals. Low levels of FM contamination in the substrate and polarons and carrier-mediated exchange, giving rise to DMI and
lm can yield magnetization signals detectable by magnetometers, DMO behavior, respectively [152]. Recently, some groups reported
which have a high sensitivity of 108 emu. The mass of a 100-nm that additional doping cannot signicantly enhance FM ordering
thick lm on a substrate of 5 mm 5 mm 0.5 mm is approxi- [109,112,125,129,131,138]. For ZnO, it is known that annealing in a
mately 1015 mg, whereas the substrate mass is 50 mg. reducing atmosphere results in the creation of VO, with the
Approximately 200 ng of FM contaminant, equivalent to a speck formation of one charge-compensating electron for every VO, thus
of radius of 20 mm, would be sufcient to produce the magnetic leading to an increase in conductivity. That is, an increase in
moment observed for a typical FM thin-lm specimen [139]. A carriers generally accompanies the production of defects, leading
common feature is that all samples tend to exhibit phase to misguided and shortsighted conclusion of a carrier-mediated
segregation at high dopant concentrations and rather high mechanism. By separating these two factors, several reports have
annealing temperatures (>700 8C in general). These secondary determined that FM enhancement is most likely due a decrease in
phases are often likely to be responsible for the FM observed, crystalline quality and an increase in structural defects with a trace
which are key points for the study of DMOs. A key requirement in amount of additional doping (e.g., Al and Sn) [129,130,138].
elucidating RFTM in TM-doped ZnO is to judge whether the
magnetism originates from substitutional dopants on Zn sites or 4.2.3. Defect-based BMP
from the formation of a secondary FM phase. Note that conducting or semiconducting TM-doped ZnO lms
A number of FM or ferrimagnetic Co-based phases have been with a perfect single-crystal structure show negligible FM, which is
detected. For example, FM Mn2xZnxO3d has been proposed as the considered to represent the absence of structural defects
origin of high-temperature FM in (Zn,Mn)O [31]. Both metals and [27,77,79,153,158,184]. There is a dramatic increase in resistivity
their oxides have been identied as being responsible for FM for Co:ZnO lms on Cu doping, but this change in resistivity does
behavior in TM-doped ZnO lms, such as Co [18,224,225], Mn not affect the magnetic moment, suggesting that a carrier-
[122], CoFe [70], CoO [56,163], Co3O4 [56,109,111,163], Fe3O4 [43], mediated mechanism is not a feasible explanation for FM in these
and CuO [65]. These types of TM-doped ZnO lms are not genuine lms [137,139]. Cu-doped ZnO lms showed RTFM with 1.45 mB/
DMOs. However, these non-magnetic semiconductors with Cu, whereas FM completely vanished when additional carriers
embedded secondary FM phases may exhibit an anomalous Hall were introduced into the lms [132]. Coey et al. [8] observed RTFM
22 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
in insulating TM:ZnO and elucidated a BMP mechanism. Further- that structural defects have a signicant inuence on magnetism in
more, an increasing number of experimental results demonstrate these systems.
that carriers are not necessary for RTFM, and FM interaction can be Under conditions in which acceptor dopants are activated,
unambiguously observed in lms without free carriers but in a leading to a decrease in free-electron density, magnetization is
dielectric state [8,30,41,44,45,75,94,108,109,152,153,186]. This enhanced. The result is consistent with hole-mediated FM in Mn-
insulating nature is signicant, in that a magnetic coupling doped ZnO, in which bound acceptors mediate the FM ordering.
interaction other than carrier-mediated exchange is apparently Increasing the electron density decreases the acceptor concentra-
operative. tion, thus quenching the FM exchange [131,138]. In addition, ZnO
In fact, many specically designed experiments appearing with and similar TM oxides show paramagnetism at RT, whereas it has
increasing frequency reveal that defects such as VO and Zni account been claimed that RTFM can be obtained in certain d0 TM oxides
for RTFM in TM:ZnO [44,58,94,167]. For example, Co:ZnO lms without a dopant [229231]. It should be pointed out that pure
annealed in Ar/H2 with a pronounced Zn K-edge XANES pre-edge HfO2 powder develops a weak magnetic moment on heating in
peak showed an increase in VO (1 1021 cm3) that was responsible vacuum, which is eliminated on annealing in oxygen [229]. Lattice
for much stronger RTFM [55]. Annealing of Zn0.92Co0.08O lms in defects are proposed to be responsible for the FM properties in
vacuum and air also demonstrated that VO and Zni are responsible for these semiconducting and insulating lms without doping. It is
the RTFM of the lms [141]. More interestingly, quantitative worth pointing out that the absence of free spin-polarized carriers
reversible cycling of magnetic moments was achieved by annealing would restrict the application of these materials in RT spintronics
TM:ZnO lms in alternating air and Zn vapor (vacuum), demon- [139,154,232].
strating a direct correlation between FM and Zni (VO) [102,154,198]. Fig. 24a shows the lattice structure of TM:ZnO, in which TM ions
By annealing lms in different oxidation atmospheres and in the are incorporated into the wurtzite lattice at Zn2+ ion sites. The
presence or absence of Zn vapor, it has been demonstrated that highly non-equilibrium process of lm deposition makes it
RTFM is not linked to conductivity and that a small level of Zni possible that structural defects in the doped lm are located
defects and consequent BMP plays a crucial role in mediating RTFM throughout the lattice at arbitrary distances with respect to Co
in TM:ZnO. Similarly, post-annealing leads to a decrease in the c sites, which can play an important role in the system, as illustrated
lattice parameter by affecting the Zni concentration, corresponding in Fig. 24b. The formation of one charge-compensating electron for
to a decrease in RTFM [57]. every VO produces a polaron. An electron associated with a
Using XAS and XMCD, Matsumura et al. [197] obtained direct particular defect is conned in a hydrogenic orbital of radius
evidence that the absence of anomalous dispersion of the atomic rH = er(m/m*)a0 and g = er(m/m*), where er is the dielectric constant,
scattering factor for Co is probably caused by signicant lattice m the electron mass, m* the effective mass of the donor electrons,
deformation of the local structure around Co due to VO, accounting and a0 is the Bohr radius (0.53 A). For Co:ZnO, m/m* = 3.57 and er is
for RTFM in Co:ZnO, whereas Co ions indeed substitute in Zn sites in the range 437 [8,44,107,141], which is dependent on the
in paramagnetic Co:ZnO thin lms [197]. This observation also fabrication method and parameters. For example, er = 10 corre-
demonstrates that VO is necessary for the appearance of RTFM. sponds to large rH and g, i.e., rH = 18.9 A and g = 35.7. Likewise, the
Elimination of defects, as well as lling up VO, would degrade the polaron size is estimated to be approximately 7.6 and 7.8 A in Co-
FM ordering [29,141,200]. For example, Cr:ZnO lms fabricated doped ZnO [8,100]. In contrast, the disappearance of RTFM after
under various conditions revealed that elimination of structural hydrogen implantation can be ascribed to the enhanced effective
defects and lling up of VO might lead to a certain level of FM mass and subsequent decrease in g, which also supports the above
degradation [29]. Likewise, annealing of Cu-doped ZnO lms in equation [38]. It should be noted that if the donor orbital extends
oxygen led to a decrease in VO and had a large detrimental effect on over a sufcient number of cations, there is nothing to be gained by
FM [177]. The large amount of edge dislocations observed would any further increase in er [8].
enhance the concentration of VO and Zni point defects, which Interestingly, an electron trapped in a defect is demonstrated by
contribute to FM ordering [58,94]. Therefore, these results imply CV measurement, which exhibits hysteresis with a large memory
Fig. 24. (a) Lattice structure of TM:ZnO. (b) Three-polaron subsystem representing supercoupling between polarons.
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 23
It is generally reported that TM-doped ZnO lms show FM Band gap (eV) System TC (K) Reference
ordering at or above RT (Table 1); these materials have been InAs 0.36 Mn:InAs 30 [237]
considered typical DMOs with high TC, and should be promising for
Ge 0.75 Mn:Ge 116 [238]
use in spintronics. In fact, using a mean eld approach, calculations
Mn:Ge 150 [6]
predicted TC for oxides and semiconductors, assuming hole-
mediated FM interactions between Mn local moments. TC was then GaAs 1.55 Mn:GaAs 150 [1]
Mn:GaAs 173 [2]
determined from competition between this long-range carrier-
mediated FM coupling and short-range TMTM anti-FM exchange ZnTe 2.38 Cr:ZnTe 300 [239]
interactions. The major breakthrough in such calculations is GaP 2.87 (Mn,C):GaP 300 [240]
magnetic ordering temperatures in excess of RT for Mn-doped GaN TiO2 3.0 (rutile) Fe/Co/Ni:TiO2 700 [234]
and ZnO (Fig. 25, plotted according to Ref. [9]). Given that TC is one 3.2 (anatase) Cr:TiO2 700 [190]
of the most important parameters for DMOs, many researchers ZnO 3.37 Mn:ZnO 425 [33]
have tried to enhance it and to elucidate the factors that inuence Co:ZnO 790 [44]
it. This has led to TC enhancement from much lower than RT [158] Cu:ZnO 390 [65]
to 790 K [44] for TM:ZnO and to 700 K for TM-doped TiO2 SnO2 3.4 Co: SnO2 650 [172]
[190,234], and to 110 K [3] to 173 K [235] for Mn:GaAs [236]. The Fe:SnO2 610 [41]
highest TC values for typical DMOs with intrinsic magnetization are CeO2 3.4 Co: CeO2 740875 [241]
listed in Table 4, including Mn:InAs [237], Mn:Ge [238,6], Mn:GaAs GaN 3.5 Mn:GaN 940 [242]
[1,2], Cr:ZnTe [239], (Mn,C):GaP [240], Fe/Co/Ni:TiO2 [234], In2O3 3.75 CrIn2O3 850930 [243]
Cr:TiO2 [190], Mn:ZnO [33], Co:ZnO [44], Cu:ZnO [65], Co: SnO2 LiNbO3 3.8 CoLiNbO3 710 [120]
HfO2 4.5 Co:HfO2 800 [244]
[172], Fe:SnO2 [41], Co:CeO2 [241], Mn:GaN [242], Cr:In2O3 [243],
AlN 6.2 Cr:AlN 900 [245]
Co:LiNbO3 [120], Co:HfO2 [244], Cr:AlN [245], in order of
24 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
Fig. 26. Curie temperature reported for DMOs as a function of bandgap. The correlation between them is described by a simple linear t: TC = 226.3Eg 107.4.
by Eq. (4) can then be estimated as 822 K, which is close to the accomplished under ambient conditions via optical pumping with
experimental result of 790 K for (4 at.%) Co:ZnO [44]. TC values appropriately polarized laser light [249,250]. This method is well
reported for DMOs as a function of semiconductor Eg are known and has been used to achieve the drift transport of optically
summarized in Fig. 26. Interestingly, the reported data reveal that induced spin-polarized carriers in semiconductors [251]. However,
TC is proportional to the semiconductor Eg. This correlation can be ultimate device integration will require electrical spin injection,
described by a simple linear t: TC = 226.3Eg 107.4, demonstrating which can be accomplished either by injection from a spin-
that Eg has a signicant inuence on the TC of TM-doped ZnO. This polarized source or by spin-ltering unpolarized carriers at the
relation provides an insight into the TC values measured for DMOs interface [22,246]. Several experiments have successfully demon-
lms and opens the possibility of increasing TC by modifying the Eg of strated spin injection into semiconductors and additional concepts
DMOs, especially for Mn-doped GaAs, which has potential applica- for spin lters and spin aligners have been proposed [252]. It is
tions in spintronics owing to its strong spinorbit coupling and high envisioned that the merging of electronics, photonics and
spin polarization [2]. magnetics will ultimately result in new spin-based multifunctional
devices, e.g., MTJs, spin-FETs, spin light-emitting diodes (spin-
5. TM-doped ZnO-based prototype spintronics and multi- LEDs), spin resonant tunneling devices, optical switches operating
functional materials at terahertz frequency, and modulators and quantum bits for
quantum computation and communication [7]. For example, MTJs
Spintronics is a topic that has attracted much interest in recent and spin-FETs fabricated by DMO-based transparent heterostruc-
years. Within the context of spintronics, the spin of electrons, and tures are not only effective models for studying spin transport and
not just their electrical charge, is controlled during the operation of spin injection, but are also promising in information processing
information circuits. The transport and manipulation of spin- [237]. Spin-polarized electrons are injected via an n-contact to a p-
polarized electrons or holes in semiconductors offer huge potential contact in a magnetic semiconductor-based LED with a TM-doped
for novel devices that combine non-volatile information storage ZnO n-contact and a conventional non-magnetic p-contact. ZnO is
with high processing speed at low power, which may even be expected to be one of the most promising materials for RT
useful for quantum computation [7,246]. It was the discovery of polarized light emission, but optical spin polarization in ZnO has
giant magnetoresistance (GMR) and tunnel magnetoresistance not been detected to date owing to the short spin relaxation time,
(TMR) that initiated spintronics research and guided a rst- which likely results from the Rashba effect. Possible solutions
generation device in the form of spin valves based on FM involve either cubic-phase ZnO or the use of additional stressor
multilayers, such as Co/Ru [247], which are now used in the read layers to create greater spin splitting to obtain polarized light
heads of most hard-disk storage devices. Second-generation emission from these structures, as well as the consideration of
spintronics integrating semiconductor materials and magnetic alternative semiconductors and fresh device approaches
elements involve new exible devices such as spin-FET and spin [159,253,254].
logic devices, which not only improve the capabilities of electronic Despite persistent efforts by many groups, spin injection from a
transistors, but also have new functionalities [248]. Successful conventional FM metal into a semiconductor has proved highly
realization of most spintronics applications depends critically on inefcient, and is limited to <0.1% [246,255]. Although promising
the ability to create spin-polarized charge carriers in a conven- advances in spin-injection efciency from metal contacts into
tional semiconductor in a device structure [22]. To successfully semiconductors have been recently been achieved (using injection
incorporate spin into existing semiconductor technology, technical from ohmic contacts or ballistic point contacts, tunnel injection or
issues such as efcient injection, transport, control and manipula- hot electron injection), there are generally difculties in reprodu-
tion, and detection of spin polarization and spin-polarized currents cibility [256]. Some experiments also yielded high spin-injection
have to be solved [7]. efciencies; however, other experiments revealed no unambig-
A major issue that needs to be resolved is the transfer of spin- uous results, and for many of the concepts proposed even a proof of
polarized carriers from a magnetic contact into a non-magnetic principle is still lacking [91]. In contrast, efcient spin injection has
semiconductor. Highly efcient electrical spin injection was recently been successfully demonstrated in all semiconductor
realized for the rst time in 1999 [249]. Spin injection can be tunnel diode structures using either a spin-polarized DMO as the
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 25
injector or a paramagnetic semiconductor under high magnetic paradigms. In fact, besides TM:ZnO, Ti0.95Co0.05O and (Zn,Cr)Te
eld as a spin lter [257259]. According to this concept, making with TC above RT have been used as one of the magnetic electrodes
carriers ow from DMOs to a conventional semiconductor, such as in MTJs, possessing TMR up to 180 and 250 K, respectively, but are
from TM:ZnO to ZnO, would be an effective way to realize high spin limited by inelastic tunneling conduction due to the low quality of
injection efciency because of their minimum crystal structure the amorphous AlOx barrier and/or the junction interface [270
mismatch, good chemical compatibility and similar electric 272]. The TMR temperature and spin polarization could be
properties. enhanced by optimization of the interface and barrier quality in
MTJs [264,270272], in analogy to single-crystal Fe/MgO/Fe MTJs
5.1. Co-doped ZnO-based magnetic tunnel junctions with large TMR of 180% at 300 K [273].
Based on the concepts described above, TM:ZnO-based
The main trigger for the search for spin injection was the heterostructures have been developed to study spin injection
discovery of GMR in 1988 by Grunberg [260] and Fert [261], who and spin-polarized transport [88,89,274]. In particular, (Zn,Co)O
were awarded the 2007 Nobel Prize for Physics. In the simplest was selected for fabrication of two FM electrodes, with a pure
case, a very thin, non-magnetic metal layer is sandwiched between insulating ZnO layer as the barrier, which is compatible with
two FM metal layers. Later, CoFe/Al2O3/Co and NiFe junctions were (Zn,Co)O and allows epitaxial growth [88,89]. (Zn,Co)O/ZnO/
found to show TMR of 11.8% at RT [262]. These publications (Zn,Co)O epitaxial structures satisfy two primary requirements
prompted a focus on the study of GMR and TMR [247,263,264]. for spin injection: a minimum conductance mismatch and high
TM:ZnO and similar DMOs with RTFM have been prepared to spin polarized contacts [265]. In this scenario, TMR is expected to
provide materials in which the spin freedom of electrons can be persist up to RT and exhibit high V1/2 to overcome one of the main
manipulated for spin transport electronics [16]. Steady progress is shortcomings of MTJs for technical applications: a dramatic
being made on this front, but few reports have been published on decrease in TMR with bias. Moreover, this MTJ structure indeed
spin-polarized transport in heterostructures made from doped provides an approach for spin injection from a (Zn,Co)O electrode
ZnO [88,89,265]. In fact, spin injection from a doping ZnO layer to to ZnO, detected by measuring SP tunneling into the other (Zn,Co)O
pure ZnO and other conventional semiconductors is a key long- electrode.
term goal of the extensive study of ZnO DMOs [87,88]. Fig. 27a shows a cross-sectional view of (Zn,Co)O (50 nm)/ZnO
(4 nm)/(Zn,Co)O (25 nm) junctions. The two (Zn,Co)O layers serve
5.1.1. Spin-polarized transport in (Zn,Co)O/ZnO/(Zn,Co)O junctions as the bottom (50 nm) and top (25 nm) magnetic electrodes
Large TMR at low temperature (e.g., 4 K) has been obtained in (r = 1.7 102 V cm), which are separated by an insulating ZnO
(Ga,Mn)As-based MTJs [266269]. However, the operation of these barrier with a lm thickness of 4 nm (107 V cm). For vertical
junctions is reduced to a rather low temperature (<30 K) owing to transport measurement, the ZnO barrier and the Zn0.94Co0.06O top
the low TC (170 K) of (Ga,Mn)As [1,2,235]. It is important to electrode were patterned using shadow mask into a circular
develop MTJs of high-TC DMOs (such as TM-doped ZnO) to enhance junction with a diameter of 300 mm (Fig. 27b). Fig. 27c shows a
the operation temperature, and eventually to achieve RT device typical atomic force microscopy image of the junction surface. The
Fig. 27. (a) Schematic representation of a (Zn,Co)O/ZnO/(Zn,Co)O junction. (b) SEM image of an MTJ array. (c) AFM image of junctions for a scan area of 3 mm 3 mm. (d) XRD
spectrum of the MTJ. The inset displays a pole gure for the wurtzite(1 0 1) plane.
26 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
Fig. 28. (a) Low-magnication image of MTJ cross-section. The dashed line denotes the (Zn,Co)O/Al2O3 interface and areas b and c correspond to the images in (b) and (c),
respectively. (b) HRTEM image of (Zn,Co)O/ZnO/(Zn,Co)O heterostructure. (c) Cross-sectional HRTEM image of (Zn,Co)O/Al2O3 interface. (d) SAED pattern of the junction (F,
lm; S, substrate).
root-mean-square of the surface roughness is approximately (>1 T) does not reect any specic correlation with magnetization
0.9 nm for a scan area of 3 mm 3 mm, indicating that the data. This result is supported by work carried out by Ramachan-
junction has a smooth surface. The sharp and intense wurtzite dran et al. [265], who reported that the positive TMR apparently
ZnO(0 0 2) peak observed in Fig. 27d indicates that the trilayered saturates and starts to decrease at intermediate magnetic elds,
lms are highly crystalline. This is further conrmed by a pole and that the value of this magnetic eld decreases with decreasing
gure of the lms acquired from the (1 0 1) planes, which was temperature. The positive TMR can be attributed to spin splitting of
obtained by azimuthally rotating the sample from 08 to 3608 at tilt the conduction band and a subsequent redistribution of conduc-
angles from 208 to 908. Six poles are evident, in agreement with the tion electrons when an sd exchange interaction is present [265].
sixfold symmetry of hexagonal ZnO. The low-magnication image The diffusion of Co dopes the ZnO barrier near the interface and
in Fig. 28a reveals the uniform thickness of the junction of 80 nm. likely leads to alignment of paramagnetic Co states and a decrease
The HRTEM image in Fig. 28b shows the good crystallinity of the in spin-ip scattering; subsequent suppression of spin-ip
heterostructure acquired for area b in Fig. 28a. It was found that
both the (Zn,Co)O electrodes and the ZnO barrier behave as single-
crystal structures with well-dened interfaces. A typical cross-
sectional image of the (Zn,Co)O/Al2O3 interface is shown in Fig. 28c
for area c in Fig. 28a. The SAD pattern in Fig. 28d indicates that
the orientation relationship is wurtzite(0 0 2)jjsapphire(0 0 3). It is
thus concluded that epitaxial growth of (Zn,Co)O-based MTJs
occurs from the bottom (Zn,Co)O electrode via the ZnO barrier to
the top (Zn,Co)O electrode, although some defects exist.
The spin injection and spin transport characteristics are
manifested directly in the magnetotransport properties. Fig. 29
shows the TMR dependence on the magnetic eld at four typical
temperatures. The TMR ratio is dened as TMR% = [R(H) R(0)]/
R(0), where R(H) and R(0) are the eld-dependent resistance and
zero-eld resistance, respectively. A common feature is that all
curves show positive TMR with symmetrical behavior and a high
saturation eld >2 T. On the other hand, the TMR curves do not
exhibit a buttery shape; instead, the TMR monotonously
increases with increasing magnetic eld. It is noted that Co:ZnO
junctions have a coercivity eld of 11 mT and saturation of
0.2 T. Although the magnetization is accompanied by an increase Fig. 29. TMR curves of junctions measured at a current of 1 mA at 4, 50, 100, 200, and
in parabolic resistance, it is clear that the high TMR saturation 300 K.
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 27
scattering at or near the interface has been identied as a possible The magnitude of a TMR ratio is commonly dened using
source of high-eld TMR [88]. Jullieres formula, TMR = 2P1P2/(1 P1P2), where P1 and P2 are the
A possible explanation for the intrinsic positive TMR can be spin polarization of FM1 and FM2, respectively [276]. Thus, SP was
found by invoking spin orientations in (Zn,Co)O. In the low eld, calculated as 31% at 4 K. This is apparently lower than the value for
the entire density of states near the Fermi energy (EF) arise from (Ga,Mn)As-based MTJs [266], presumably because Co:ZnO is a
the minority spin band for (Zn,Co)O [275]; the spin (S) is parallel in controllable n-type DMO with very low spinorbit coupling. This is
the bottom and top electrodes, because both electrodes are different to GaMnAs, which is a p-type DMO with very strong spin
fabricated from the same (Zn,Co)O, as marked in Fig. 28. In this orbit coupling [41]. Interestingly, the SP is estimated to be 4% at RT,
parallel case, the electron can easily tunnel from one electrode to revealing an effective but very small spin polarization in fully
the other, giving rise to low resistance in the junction. As the eld is epitaxial (Zn,Co)O/ZnO/(Zn,Co)O junctions at RT. Clearly, higher SP
enhanced, domain rotation becomes prevalent, accompanied by and a better understanding of the physical phenomena require
rotation of S. It is noted that the domains, as well as S, in magnetic further efforts.
materials are rotated sequentially rather than simultaneously,
particularly for the bottom and top (Zn,Co)O electrodes of different 5.1.2. Anomalous TMR in (Zn,Co)O-based junctions
lm thickness in our scenario. Consequently, S in the two Fig. 30a shows non-linear currentvoltage (IV) characteristics
electrodes would not be totally parallel when applying H, leading for MTJs up to 2 V under H = 0 and 1 T at 4 K, which is expected for a
to difcult transport and producing high resistivity. Moreover, tunneling device. This is indicative of carrier injection by tunneling,
these descriptions concerning sequential rotation of S most likely taken the linear IV curve for a single (Zn,Co)O lm into account. On
correspond to a monotonic increase rather than buttery TMR the basis of IV curves obtained at H = 1 and 0 T, TMR versus bias
curves. (TMR%V) at different temperatures is plotted in Fig. 30be, where
Fig. 30. (a) MTJ IV characteristics under applied elds of H = 0 and 1 T at 4 K. Typical bias dependence TMR curves at (b) 4, (c) 100, (d) 200, and (e) 300 K.
28 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
TMR% = [Rjun(1 T) Rjun(0 T)]/Rjun(0 T). Although both the TMR ratio Four interesting phenomena are observed at different tempera-
and the signal-to-noise ratio drastically decrease with increasing tures: a very large V1/2 in excess of 4 V at T > 6 K; nearly constant
temperature, the parabolic TMR%V curve remains at 300 K, revealing TMR up to 2 V at T = 5 K; a combination of higher (at low voltage)
that the effects of bias on transport in the junction can persist up to and lower (at high voltage) TMR with increasing voltage at T = 3
RT. The most outstanding property of all the TMR%V curves from 4 to 4 K; and an anomalous increase in TMR with increasing voltage at
300 K is their weak bias dependence. V1/2, the voltage at which the T = 2 K. The anomalous voltage-dependent TMR can be explained
TMR ratio is half of the maximum, exceeds 2 V over a wide by the large energy separation between the Fermi level and the
temperature range (4300 K). These values are much larger than mobility edge [89]. A non-metal ! metal transition caused by the
for conventional magnetic metal and for DMO-based MTJs with AlOx, magnetic eld can bring the Fermi level above the mobility edge, so
MgO and similar barriers [270273]. The decrease in TMR with bias that the energy separation between the Fermi level and the
can be explained by inelastic scattering by magnon excitations at the mobility edge is large enough to cause the V1/2 behavior observed
FM/insulator interface [264]. The much lower bias dependence is [281].
likely due to the coherence of the (Zn,Co)O/ZnO interface owing to
both the minimum conductance mismatch and the high spin- 5.2. TM-doped ZnO-based spin eld-effect transistors
polarized contacts.
The typical V1/2 value is approximately 0.2 V [262,277]. V1/2 The most effective measurement of the quality of the DMO-
enhancement has generally been achieved by fabrication of double based FM materials is the operation of device structures such as the
barriers [278] and by improving control of the single-crystal MTJs described above, spin-FETs and photo-induced ferromagnets
barrier [273,279], yielding up to 1.44 V in fully epitaxial MgO [16,22,88,282]. The use of DMOs as the spin source in spintronics
double-barrier MTJs [280]. As discussed above, all-epitaxial could allow high spin injection efciency and long spin coherence.
(Zn,Co)O/ZnO/(Zn,Co)O junctions show a very large V1/2 far in The spin-FET proposed by Datta and Das [91] and subsequent
excess of 2 V [88]. The double-barrier junctions grown by coherent numerous clones have motivated extensive study of spin preci-
sputtering on Al2O3(0 0 1) substrate are composed of two FM sion-controlled electronic semiconductor devices [237,282284].
(Zn,Co)O electrodes (50 and 25 nm for bottom and top, respec- Huang et al. [285] claimed that a silicon spin transport device
tively) separated by a ZnO (4 nm)/(Zn,Co)O (6 nm)/ZnO (4 nm) showed output current modulation through voltage control of spin
trilayer [89]. On the basis of IV curves obtained at H = 2 and 0 T precision, with 37% electron current spin polarization after
(Fig. 31a), TMR%V at different temperature is plotted in Fig. 31. transport through 10-mm undoped silicon, but no spin-FET based
Fig. 31. (a) MTJ currentbias voltage (IV) characteristics up to 5 V under applied elds of H = 0 and 2 T at 3 K. Typical bias voltage dependence of TMR curves at (b) 20, (c) 10, (d)
6, (e) 5, (f) 4, (g) 3 and (h) 2 K.
F. Pan et al. / Materials Science and Engineering R 62 (2008) 135 29
Fig. 33. (a) Frequency dependence of the PE characteristics of Zn0.975V0.025O lms measured at room temperature. (b) PE characteristics of Ag/Zn0.94Cr0.06O/n-Si FET
measured at 2 kHz and room temperature. Piezoelectric hysteresis loop (black) and DV curve (red) for (c) Zn0.975V0.025O and (d) Zn0.94Cr0.06O lms. (For interpretation of the
references to color in this gure legend, the reader is referred to the web version of the article.)
30 F. Pan et al. / Materials Science and Engineering R 62 (2008) 135
Fig. 35. Effective d33 as a function of V concentration x in Zn1xVxO lms, bulk ZnO
and ZnO nanobelts.
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have been determined, defects are difcult to characterize [25] L.S. Dorneles, D. OMahony, C.B. Fitzgerald, F. McGee, M. Venkatesan, I. Stanca,
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