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Code: 12D68102a

M.Tech - I Semester Regular Examinations, April/May 2013

MEMS
(Common to VLSIES, ESVLSI & VLSIESD)

Time: 3 hours Max Marks: 60

Answer any FIVE questions
All questions carry equal marks
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1 (a) Explain the following:
(i) Mechanical properties of silicon.
(ii) Silicon compounds used in MEMS

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(b) Discuss about:
(i) Different types of MEMS and their applications.

2
(a)
(ii) Lithography.

Explain about:
Micro Fabrication.
R L
(b)

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Parallel plate actuators along with its applications.

4
(a)
(b)

(a)
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Explain about MUMPs process.
Discuss about electrostatic actuators.

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Explain about the design rules implemented in Mump processing.

5
(b)

(a)

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Discuss about Hinges for MEMS.

Explain about CMOS foundry process.

6
(b)

(a)
(b)
(c)
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Explain about MEMS post processing.

Explain about characteristics of clean rooms.

Explain about basic safety rules.
Explain about fire classifications.

7 (a) Explain about micro scanner. In what way they differ from other scanners.
(b) Explain about digital micro mirror.

8 (a) Discuss about corner cube retro reflector.

(b) Explain about Micro-optical device along with its applications.

*****

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