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Code: 12D86104

M.Tech - I Semester Regular Examinations, April/May 2013

MICRO SENSORS AND ACTUATORS
(Micro and Nano Electronics)
Time: 3 hours Max Marks: 60
Answer any FIVE questions
All questions carry equal marks
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1 (a) Discuss the role of sensing elements in real micro devices.

(b) Explain the functionality of any sensing element using a case study of a real device.

D
2 (a) Explain the sensing mechanism of a piezoresistive device with a neat sketch.
(b) Explain the actuation mechanism of a electrostatic device with a neat sketch.

3 (a)
(b) L
How do you classify the physical sensors? Discuss pressure sensors briefly.

R
Discuss the functionality and applications of accelerometers.

4 (a)
(b)
O
Explain the principles and modes of operation of biosensors.
Discuss any MEMS device for DNA analysis.

5 (a)
(b)
W
Discuss about the micro actuators for flow control.

U
What are the different MEMS fabrication techniques? Give a brief account.

6 (a)
(b)
T
Explain briefly the design considerations of sensors for turbulent measurement.
Discuss MEMS fabrication criteria for turbulent flows.

N
J
7 (a) Discuss the role of capacitors and varactors in RF MEMS elements.
(b) Explain the modeling of RF MEMS.

8 (a) Discuss the applications of RF MEMS filters.

(b) Discuss the role of oscillators in RF MEMS.

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