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Abstract
Two new techniques, developed for studying the fatigue behavior of thin metal films on substrates, are presented: The first
technique involves deposition of Cu films onto elastic polyimide substrates. During cyclic tensile testing of the film–substrate
composite, the film is subjected to tension–compression cycles, since it is plastically deformed, while the substrate undergoes only
elastic deformation. Using this technique, it was found that, for 3 mm thick Cu films, the number of cycles to failure follows the
phenomenological Coffin–Manson relationship. For the other technique, thin films, here Ag films with thicknesses ranging from
0.2 to 1.5 mm, are deposited onto micromachined SiO2 cantilever beams. The beams are then deflected with a frequency of 45 Hz
using a nanoindentation system. A detailed investigation of the damage formation in both fatigued Cu and Ag films revealed
surface roughening prior to failure. Extrusions and cracks are formed inside large grains and between small grains, respectively.
© 2001 Elsevier Science B.V. All rights reserved.
0921-5093/01/$ - see front matter © 2001 Elsevier Science B.V. All rights reserved.
PII: S0921-5093(01)00990-X
920 O. Kraft et al. / Materials Science and Engineering A319–321 (2001) 919–923
It is the aim of this paper to elucidate the fatigue (O2 pressure 1× 10 − 2 mbar, power 100 W, bias
mechanisms in constrained volumes and to determine − 300 V). Without breaking vacuum, 3 mm thick Cu
fatigue lifetimes under these conditions. We present films were then sputter deposited at a substrate tem-
two methods, which we developed to study the fa- perature of 300°C, a rate of 60 nm per min with an
tigue behavior of thin metal films on substrates: The Ar pressure of 2× 10 − 3 mbar, a power of 150 W
first technique involves tensile testing of Cu films de- and a bias of −80 V. After deposition, the samples
posited onto elastic polyimide substrates. Tensile test- were annealed in a vacuum furnace (6× 10 − 6 mbar)
ing of these specimen results in tension– compression at a temperature of 400°C.
cycles in the plastically deformed thin film while the The tensile tests were performed in an electrome-
substrate is elastically deformed only. The second chanical tensile tester (Zwicki 1120, Zwick) under
technique utilizes the cyclic deflection of thin Ag films load control. Samples were cyclically loaded between
deposited onto micromachined SiO2 cantilever beam a minimum load of 2 N to maximum loads in the
using a nanoindentation system. range of 15–60 N. Under these conditions, the film is
strained with constant total strain ranges between 0.7
and 2.1% as determined from the crosshead displace-
2. Experimental ment and monitored as a function of the number of
cycles. It is not possible to determine the film stress
2.1. Tensile testing using this configuration because the externally applied
force is predominantly governed by the mechanical
For processing of the tensile specimen, shown in properties of the substrate. However, microtensile
Fig. 1a, the 125 mm thick polyimide substrates (Kap- tests on comparable samples using an X-ray diffrac-
ton, Du Pont) were initially cleaned by rinsing with tion technique enabled the measurements of stress–
ethanol and pressurized CO2. Then, the sample was strain behavior during such experiments as
mounted in the deposition system (base pressure of exemplified in Fig. 1b [11]. On loading and unload-
5×10 − 7 mbar) and activated by an oxygen plasma ing, the film is plastically deformed in tension and in
compression for a total and plastic strain range of 0.5
and 0.15%, respectively.
3. Results
5. Summary