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Article history: The optical linear encoders are the preferred choice sensors for positioning machine tools’
Received 15 December 2009 moveable parts. Machine tools’ errors have been traditionally focused on the analysis and
Received in revised form 17 February 2011 performance of the machine tool structure until recent works have treated the encoder
Accepted 5 May 2011
itself as a source of error. Encoder error quantification has been done for several mounting
Available online 20 May 2011
conditions in static situations, but there is a lack of information regarding the performance
of the encoder under dynamic solicitations. The aim of this work is to analyze the loss of
Keywords:
accuracy of the sensor because of vibration for different mounting conditions. A finite ele-
Optical encoders
Vibration
ment model of encoder has been developed and experimental results have been analyzed
Mounting conditions using this model.
Finite element Ó 2011 Elsevier Ltd. All rights reserved.
0263-2241/$ - see front matter Ó 2011 Elsevier Ltd. All rights reserved.
doi:10.1016/j.measurement.2011.05.004
1368 J. López et al. / Measurement 44 (2011) 1367–1380
information regarding the performance of the encoder compression and torsion springs in order to diminish the
under dynamic solicitations. The proposed experimental adverse effects in the measuring process generated by an
methodology is based on assessing the loss of accuracy of excessive pressure or deformation of the head support. A
the sensor because of vibration, resulting in a final diagram typical configuration is the one represented in Fig. 1. As
of error versus frequency. Analytical basis for results dis- it can be observed, the scanning unit is linked to the head
cussion is provided by finite element analysis (FEA), by three compression springs in vertical direction avoiding
through sensitivity analysis based on probabilistic design. gap variation, one compression spring in the displacement
Three commercial encoders of three different commercial measurement direction to control the relative displace-
firms have been tested to ensure that results are as much ment between the scanning unit and the head because of
general as possible. inertia, and two torsional springs to prevent lateral dis-
placements of the carriage. By doing this, the tendency of
the scanning carriage to yaw, pitch or roll can be controlled
2. Mechanical design of transmissive optical linear changing the rigidity or initial strain of the springs; and
encoders therefore, the dynamic behavior of the set scanning unit-
scale can be independently altered in different directions.
Fig. 1 shows the mechanical design of a sealed linear en- The force applied on the scanning unit due to the initial
coder based on a transmission reading head specifying the strains of the springs fit the carriage to the scale, aligning
main elements. In the sealed type, all these elements are both to a proper guidance all through the measuring
hermetically isolated from the exterior by means of a hous- length.
ing and a sealing lips, preventing possible distortion of the The joint between the scale and the housing is solved by
measuring process because of external contamination means of an elastic or highly elastic adhesive. The use of
agents. highly elastic adhesives is based on the compensation of
The possibilities of arrangements between components the changes in length of scale (glass) and housing (alumi-
are diverse especially in the case of sealed encoders, since num) due to differences in their dilatation coefficients
their configuration allows different positions of the scale through the deformation of the elastic layer. Bond tapes
inside the housing, flexible joint of the scanning head to used utilize acrylic adhesive. The thickness of the bonded
the machine part and particular fastening element designs. joint is an important factor to be considered in the design, gi-
These make possible to have a wide range of geometric and ven that on one hand high thickness values are recom-
material properties parameters available. Therefore, the mended to join rigid substrates (such as aluminum and
designer can act over them in order to improve the accu- glass) and also to achieve a high tolerance to thermal expan-
racy of the sensor, strongly conditioned by thermal, vibra- sions and contractions; on the other hand, the more the
tion, deformation and translation errors. Transmission thickness increases, the less the bonded joint rigidity it
reading heads arrangements imply the use of glass scales would be, allowing the occurrence of modes of vibration of
placed on cantilever configurations allowing the solidarity the scale at low frequencies. This way, for very low measur-
movement of the photodetectors board with the reading ing lengths, such as that corresponding to the encoder se-
head. The possible constructive solutions to join the head lected, the common choice is to resort to very low
to the scanning carriage are diverse; however, the predom- thickness values of the adhesive tape, given that in this case
inant arrangement for the majority of the commercially the encoder performance is not sharply influenced by ther-
available encoders is a flexible joint by means of a set of mal expansions and contractions. The type of adhesive has
Fig. 1. Main components of a sealed optical transmissive linear encoder and detailed view of the optical system.
J. López et al. / Measurement 44 (2011) 1367–1380 1369
an important role too in the behavior of the joint insofar as it directions under prescribed mounting conditions, i.e.,
conditions the shear modulus. Adhesive tapes of firm type mounting requirements of encoder manufacturers are ful-
are typically used in general purpose applications with a filled at the specified mounting condition. The experiments
shear modulus value double to that corresponding to con- done related to this question have been named mounting
formable type, normally used in multipurpose applications. conditions 1a and 1b and the purpose, as it has been men-
tioned, is to assess what are the positions of the encoder
relative to the vibration direction that produces the worst
3. Mounting conditions and the best performance of the sensor.
As it can be seen in Fig. 3, the table of the milling ma-
Encoder manufacturers mounting requirements are chine is positioned in such a way that the longitudinal en-
very tight. Specifically, it is common to find values such coder is centered in relation to the head while the
as 0.1 mm of parallelism between the scale and the guide transversal encoder is at the beginning of the measuring
of the machine, and between the scale and the head of length. Analyzing this, a second question has been set
the encoder. Additionally a 0.1 mm flatness of the surface out: how does affect the position of the scanning unit along
in contact with the encoder is required. A value of the scale in the dynamic response of the encoder? The sec-
1.00 ± 0.50 mm has to be established for the gap between ond part of the study has to do with this question, tackled
the head and the housing of the encoder. These mounting by mounting conditions 2a and 2b together with previ-
requirements are shown on Fig. 2. ously defined mounting condition 1a. This way, the inten-
Once known the conventional mounting process of a tion of mounting conditions 1a, 2a, 2b is to assess how the
linear encoder [10] and the strict mounting requirements, position of the head along the scale affects the behavior of
it is not difficult to appreciate that the process is not ex- the encoder under vibrations, positioning the head at the
empt from possible errors due to successive alignment, center of measuring length (1a), and at the beginning and
centering and marking procedures, errors in the flatness the end of the measuring length (2a, 2b).
of surface and alignment of the guide of the machine tool The rest of the work done is related to quantify to what
itself, etc. Fig. 3 shows the mounting of two linear encoders extent a defective assembly of the encoder to the machine
to control the table movements of a milling machine. modifies the accuracy of the sensor. The origin of a defec-
Regarding the longitudinal encoder, the scale is attached tive assembly of the encoder can be due to the mounting
to the table and the scanning head to the saddle. The enco- process itself or by deformations of the machine parts in
der that controls the transversal movement of the table is contact with the encoder under operating solicitations.
attached in a way that the head bracket is tied to the sad- The third part of this paper has to do with this subject. In
dle which moves relative to scale, since the latter is fixed to this manner, the aim of mounting arrangement number
the knee. 3a is to assess to what extent the lack of parallelism be-
As it is shown in Fig. 3, the conventional attachment of tween the head and the scale affects the encoder behavior.
linear encoders is in a position with the back of the housing The purpose of number 3b is to quantify the effect of the
upward, preventing possible filtering of liquid splash non fulfilment of the requirements regarding the gap be-
through the sealing lips. However, if it is considered a loca- tween head and housing of the encoder under parallelism
tion in the machine or an application where the encoder is conditions between them. Test number 3c tries to simulate
prevented from liquid splash, such as for example in coor- the misalignment between head encoder surface and
dinate measuring machines, a first question arises: is this housing encoder surface in contact with machine parts.
the position of the encoder with best dynamic perfor- In order to create this mounting error it has been produced
mance? Clearly, the orientation of the main components a displacement introducing a washer (thickness: 1.728 ±
regarding the direction of vibration excitations produces 0.015 mm) between the fixture surface and the encoder
dissimilar encoder accuracy response. A first study has head surface. Fig. 4 presents a schematic view of the
been done trying to clarify this aspect. This study analyses different mounting conditions, showing the mount of the
the encoder error corresponding to different excitation encoder on the fixture and the direction of vibration
Fig. 3. Mounting of two linear encoders in a milling machine to control the longitudinal and transversal movements of the table.
Fig. 4. Schematic view of the different mounting conditions showing the mount of the encoder on the fixture and the direction of vibration excitation.
excitation. Measurements of parallelism between head and associated. The same procedure has been followed for
scale and of gap value are also presented for each mount- measure values shown in Table 1.
ing arrangement in Table 1. Test fixture dynamic performance in the frequency
Fixture flatness surface requirements are fulfilled and range selected is shown in Fig. 5. This figure shows the
surpassed for vertical and horizontal positions as it is transmissibility function between an accelerometer placed
shown in Table 2. Measurements have been done on a next to the shaker bolt joint (named control acc.) and an-
Grade 0 granite surface table using a Mitutoyo 1913B-10 other one placed next to a thread, where the encoder will
dial indicator with a resolution of 2 lm. Five measures be allocated in a horizontal position (named measure
have been taken for each one of the nine points repre- acc.). As it can be observed, the response is almost flat
sented on figures showed on Table 2 and corresponding until 1000 Hz, presenting a resonance at 1335 Hz. This
values are indicatives of the mean and the uncertainty resonance can be observed on several tests, but its
J. López et al. / Measurement 44 (2011) 1367–1380 1371
Table 2
Flatness of the fixture surfaces (scale factor on Z axis: 1000).
Vertical Horizontal
1: 0 lm 1: 0 lm
2: 23.2 lm ± 1.5 lm 2: 27.8 lm ± 0.8 lm
3: 30.6 lm ± 1.4 lm 3: 23.8 lm ± 0.8 lm
4: 39.8 lm ± 2.6 lm 4: 30.4 lm ± 0.9 lm
5: 11.8 lm ± 2.6 lm 5: 7.2 lm ± 1.6 lm
6: 16.6 lm ± 1.9 lm 6: 11.6 lm ± 1.3 lm
7: 7.6 lm ± 2.7 lm 7: 14.2 lm ± 0.5 lm
8: 11.2 lm ± 2.5 lm 8: 21.2 lm ± 0.6 lm
9: 26 lm ± 1.6 lm 9: 31.2 lm ± 0.8 lm
Max. diff.: 47.4 lm Max. diff. 45.4 lm
Fig. 5. Test fixture dynamic performance through transmissibility between the control and measure accelerometers.
1372 J. López et al. / Measurement 44 (2011) 1367–1380
Fig. 7. Estimation of yaw, pitch and roll angles from displacements of nodes delimiting the scanning zone.
Fig. 8. (a) Schematic view of the experimental set up. (b) Acceleration, velocity and displacement profiles for the tests.
Fig. 9. Error measurement method. (a) signals generated in the photodetectors. (b) encoder’s measurement quasi-sinusoidal signals A and B. (c)
interference patterns between the gratings. (d) Lissajous figure of the encoder’s measurement signals.
register of the signals rate in reasonably levels. As the treatment of the Lissajous figure using optimization
maximum value of excitation frequency is 2000 Hz, a sam- techniques. Basically, it takes a certain amount of sampled
pling frequency slightly greater than four times the maxi- data and calculates the circle that best fits the sampled set
mum value fulfil Nyquist theorem requirements by far. minimizing the geometric error through nonlinear theory
The encoder error charts are obtained by a program of least-squares [17]. Once the center and radius of the
developed in MATLAB. The program is based on a discrete circle has been calculated a subroutine determines the
J. López et al. / Measurement 44 (2011) 1367–1380 1375
arc angle covered by the data set, making it possible to Fig. 10. All given values from FEA represent the highest
estimate the encoder error for a certain instant. Clearly, relative frequency histogram value result obtained from
the sampled set is directly related to the desired excitation probabilistic analysis. Yaw, Pitch and Roll angle values be-
frequency resolution, which in turn is related to the veloc- tween scanning carriage and scale obtained applying FEA
ity rate of the excitation frequency sweep. Although a cir- for vertical and horizontal direction are shown on Tables
cle approach has been used, the program can be 5 and 6, respectively. Encoder experimental error charts
generalized to fit ellipses to the sampled set making it pos- for the different mounting conditions are presented in
sible to estimate errors associated to amplitude and phase Fig. 11. A sample size of 10 measures for each test has been
variations [18]. chosen to set uncertainty in acceptable values, resulting in
Finally, the digital readout completes the error mea- a total of 70 measures for the comparative study. Charts
surement system, serving as a power supply to the presented correspond to the mean of the mentioned 10
encoder. measures and the resultant uncertainty. Chart limits for er-
ror values have been set from 0 to 20 lm; this value has
been chosen to facilitate the comparison between mount-
6. Results and discussion ing conditions.
First mode obtained by FEA appears at a frequency va-
Deformed shapes and natural frequencies of the first lue of 311 Hz being predominantly a roll movement of
nine vibrational modes obtained by FEA are shown in the scanning carriage, as it can be appreciated in the
Fig. 10. Deformed shapes of vibrational modes obtained by FEA and natural frequencies.
1376 J. López et al. / Measurement 44 (2011) 1367–1380
Table 5
Yaw, pitch and roll angle values between scanning carriage and scale. Vertical direction.
Parameter Mode 1 Mode 2 Mode 3 Mode 4 Mode 5 Mode 6 Mode7 Mode 8 Mode 9
Yaw 0.504E 3 0.139E 2 0.201E 2 0.274E 3 – 0.907E 3 0.200E 4 0.216E 7 0.167E 3
Pitch 0.438E 2 0.300E 5 0.243E 2 0.234E 3 – 0.190E 3 0.200E 5 0.147E 6 0.900E 4
Roll 0.343E 1 0.220E 4 0.190E 1 0.183E 2 – 0.149E 2 0.190E 4 0.100E 5 0.708E 3
Table 6
Yaw, pitch and roll angle values between scanning carriage and scale. Horizontal direction.
Parameter Mode 1 Mode 2 Mode 3 Mode 4 Mode 5 Mode 6 Mode7 Mode 8 Mode 9
Yaw 0.189E 2 0.418E 3 0.464E 3 0.990E 4 – 0.334E 3 0.470E 4 0.648E 6 0.166E 3
Pitch 0.180E 2 0.823E 6 0.566E 3 0.930E 4 – 0.660E 4 0.170E 4 0.700E 5 0.127E 3
Roll 0.141E0 0.600E 5 0.443E 2 0.727E 3 – 0.519E 3 0.134E 3 0.560E 4 0.993E 3
Fig. 11. Experimental error charts for different mounting conditions and uncertainty associated. (a) Mounting conditions 1a. (b) Mounting conditions 1b.
(c) Mounting conditions 2a. (d) Mounting conditions 2b. (e) Mounting conditions 3a. (f) Mounting conditions 3b. (g) Mounting conditions 3c.
J. López et al. / Measurement 44 (2011) 1367–1380 1377
Fig. 11 (continued)
deformed shape of Fig. 10a and in roll angle value in rela- tained from experimental tests. Mode number 3 (708 Hz)
tion with yaw and pitch angle values given in Tables 5 and can be seen in experimental error charts for both vertical
6. Observing encoder error charts of Fig. 11 for this fre- (as a peak of around 2 lm) and horizontal direction
quency value, we cannot distinguish a significant error in (4 lm error value). The highest angle value for this corre-
any of them. Natural frequency value from FEA for second sponds to roll movement but, in contrast to angle results
mode is 590 Hz. Fig. 10b and angle values from Tables 5 obtained for mode 1, yaw angle value is significantly closer
and 6 clearly show a yaw movement of the scanning car- to roll angle value. This would explain the importance of
riage. This mode is not clearly discernible from error exper- this mode in encoder error charts. Mode number 4
imental charts for vertical direction (it can be appreciated (908 Hz) consists in a pitch movement of the scanning car-
as a small error peak only in Fig. 11c, f and g), but it is riage together with the scale. This mode is only excited in
noticeably distinguished for horizontal direction as an er- vertical direction and has a very low influence in the per-
ror peak value twice the accuracy of the encoder (10 lm) formance of the encoder (error does not reach 1 lm, as it
at an excitation frequency of 600 Hz. From Fig. 10b it can can be observed in Fig. 11a). Mode 5 has to do with a vibra-
be seen that it is easier to excite this mode for horizontal tional mode of the housing wall at a frequency value of
than for vertical direction. Which is in line with results ob- 1140 Hz. Effects of this mode cannot be analyzed with
1378 J. López et al. / Measurement 44 (2011) 1367–1380
our finite element model given that sealing lips have not for all encoder error charts with an error value of
been included (it is the element connecting housing walls 1 lm.
with head support). However, interesting remarks can be Observations made through deformed shapes of
make from experimental results. This mode can be ob- different modes, experimental error values and yaw, pitch
served in several error charts and is clearly distinguishable and roll angles suggest that yaw movements of the scan-
for mounting condition 3c (Fig. 11g). In this mounting con- ning carriage in relation to the scale have a strong influ-
dition, a displacement of the head towards the housing ence in the performance of the encoder. Trying to clarify
wall was forced. This way, it is not difficult to figure out this influence, Tables 7 and 8 show the correlation coeffi-
why the effect of this mode is more accentuated for this cient between yaw angles and encoder experimental errors
mounting condition. For the encoder selected it does not for the most significant modes. As it can be observed in
constitute an important loss of accuracy. However, for lar- these two tables, highest and positive values of correlation
ger measuring length encoders, several modes related to coefficient have been obtained for yaw angles for both
this wall vibration can appear in the selected frequency directions, being the influence of yaw movements in the
range with larger moving masses involved, and possibly, accuracy of the encoder quite clear for horizontal direction.
with higher error values. From Fig. 10f a yaw movement Table 9 shows probabilistic sensitivities to yaw angle of
of the scanning carriage can be appreciated again for Mode input variables. The highest sensitivity values correspond
6 (1220 Hz), and again, high error values are shown in all to adhesive shear modulus except for mode number 6, in
encoder error charts for this excitation frequency. The only which the parameter relative to initial strain of the vertical
case in which this error does not exceed the accuracy of the compression springs has the strongest sensitivity. Regard-
instrument (although the value is very close) corresponds ing spring stiffness, the most influential is that related to
to mounting condition 1a, that is, the conventional posi- vertical springs, being torsional spring stiffness and axial
tion with prescribed mounting conditions. FEA results sit- spring stiffness the less influential variables in yaw angle
uate mode number 7 at a frequency of 1318 Hz. Yaw is FEA results. Focusing on vibrational modes with highest
predominant for this mode too. Peak error value associated experimental error values, that is, mode numbers 2, 3
with this mode is only discernible for mounting conditions and 6, it can be appreciated from Table 9 signs and values,
1a (Fig. 11a) and 3b (Fig. 11f) given that for the other that yaw angles can be minimized resorting to high values
charts seems to be add up to Mode 6 error in a continuous of adhesive shear modulus (Gadh) and spring stiffness of
way. Frequency values from FEA for modes number 8 and 9 vertical springs (kv), diminishing their initial strains (Lc).
differ to some extent in relation to those values observed in The sensitivity values of this parameter (Lc) agrees well
experimental charts. Mode number 8 (1550 Hz) can be with experimental results as it can be observed in mount-
seen as a 2 lm peak error value at 1500 Hz of excitation ing conditions 1a (Fig. 11a) and 3b (Fig. 11f). In fact, for all
frequency in most of experimental error charts. Mode mounting conditions, the probabilistic variables chosen for
number 9 (1708 Hz), a combination of roll and yaw FEA other than this one (Gadh, kv, kt, ka) are constant. The
movement of the scanning carriage, can be observed only variable that changes its value when gap variations
Table 7
Correlation coefficients between angle values and experimental errors for the most significant modes. Vertical direction.
Table 8
Correlation coefficients between angle values and experimental errors for the most significant modes. Horizontal direction.
Table 9
Sensitivities to Yaw angle between scanning carriage and scale.
Parameter Mode 1 Mode 2 Mode 3 Mode 4 Mode 5 Mode 6 Mode7 Mode 8 Mode 9
Gadh 7.793e 1 9.7503e 1 9.561e 1 9.904e 1 – 3.839e 1 1.605e 1 4.805e 1 7.297e 1
Lc 5.933e 1 Insignificant 2.315e 1 9.109e 2 – 9.195e 1 2.732e 2 2.377e 1 6.236e 1
kv 3.519e 1 4.7381e 1 4.564e 1 4.989e 1 – 1.724e 1 1.277e 1 2.201e 1 3.426e 1
kt 2.474e 1 1.8310e 1 1.977e 1 1.958e 1 – 7.707e 2 1.221e 1 2.109e 1 5.344e 2
ka 3.106e 2 2.4826e 2 5.383e 2 2.828e 2 – 7.322e 2 1.493e 2 2.242e 2 2.521e 2
J. López et al. / Measurement 44 (2011) 1367–1380 1379
Table 10
Correlation coefficient between yaw sensitivity values to Lc and most significant experimental errors variations from mounting condition 1a to mounting
condition 3b.
Fig. 12. Scale displacement field for mode 6. (a) Head positioned at end of the scale. (b) Head centered in relation to scale.
between head and scale are forced such as in mounting encoder error values to appear. Encoder error is sharply
condition 3b is the initial strain of the vertical springs. This influenced by yaw movements of the scanning carriage in
way, the high increment of error for Mode 6 from mount- relation to the scale. This way, dynamic force directions that
ing condition 1a to mounting condition 3b is well related tend to excite the modes of vibration with a significant yaw
to the highest sensitivity value of yaw angle for this mode component have to be avoided, if possible. A defective
of vibration. Direct relation between yaw sensitivity values assembly of the encoder in the machine tool amplifies the
to Lc and most significant experimental errors variations error committed by the encoder, making it possible that
from mounting condition 1a to mounting condition 3b is an encoder that is working with errors lower than accuracy
well reported by the high correlation coefficient showed under prescribed mounting conditions, becomes one work-
in Table 10, agreeing well again FEA with experimental ing with errors higher than accuracy. For the special case
results. where gap requirements are not fulfilled between scale
Regarding results obtained for positions of the head in and head, the error can exceed several times the accuracy
relation to scale others than centered (mounting condi- of the encoder, due to the strong influence of initial strains
tions 2a, 2b; Fig. 11c and d, respectively), a peak error va- of vertical springs in the yaw movement of the carriage.
lue higher than that corresponding to mounting condition Vibrational modes associated to the housing walls can cause
1a can be observed for Mode 6. This is probably due to the a loss of accuracy too, especially in case of encoders with
lesser adhesion surface of the bonded joint that contributes high measuring lengths. Dissimilar accuracy response have
to the movement of the set scanning carriage-scale when been obtained regarding the position of the head in relation
the head is positioned at both ends of the scale, as it can to the scale; specifically, higher encoder error values are ob-
be observed on Fig. 12. This agree well with the fact that served for head positions at the beginning or end of the mea-
Mode 8 presents a peak error slightly lower for mounting suring length than when the head is centered with the scale,
condition 2b than for 2a, given that for mounting condition due to the lower rigidity contribution of the adhesive at the
2b axial spring compensates to some extent the lower end of measuring length, which involves larger displace-
rigidity contribution of the adhesive at the end of measur- ments of the scale relative to the carriage.
ing length.
Acknowledgments
7. Conclusions
This work has been supported by the Ministry of
Optical linear encoders present dissimilar dynamic per- Science and Education of Spain under Project DPI2007-
formance regarding the direction of vibration. Error values 64469.
for certain positions can exceed the accuracy of the instru-
ment even for acceleration levels at which manufacturers References
do not recommend the use of vibration protection elements.
[1] P. Sente, H. Buyse, From smart sensors to smart actuators: application
The mounting position with reference to the direction of of digital encoders for position and speed measurements in numerical
vibration can cause new resonances with important control systems, Measurement 15 (1995) 25–32.
1380 J. López et al. / Measurement 44 (2011) 1367–1380
[2] S. Chatterjee, An assessment of quasi-static and operational errors in [10] M. Brumbaugh, Mounting tool for linear encoder, United States
NC machine tools, Journal of Manufacturing Systems 16 (1) (1997) Patent 6820348, 2004, November 23.
59–68. [11] K.R. Loss, K.T. Keyward, Modeling and analysis of peel and shear
[3] G. Dessein, P. Lagarrige, W. Rubio, The configuration of a machining stresses in adhesively bonded joints. AIAA paper 84-0913.
centre and its influence on accuracy, The International Journal of [12] W. Weaver, P.R. Johnston, Structural Dynamics by Finite Elements,
Advanced Manufacturing Technology (1998) 38–42. Prentice-Hall, 1987. pp. 413–415.
[4] M. Weck, C. Hessel, B. Müller-Held, The virtual machine tool, [13] R.W. Clough, J. Penzien, Dynamics of Structures, McGraw-Hill, New
Production Engineering (VII/2) (2000) 89–94. York, 1975.
[5] W.G. Weekers, P.H.J. Schellekens, Compensation for dynamic errors [14] EN 60068-2-6, Environmental testing. Part 2: tests. Tests Fc:
of coordinate measuring machines, Measurement 20 (3) (1997) 197– vibration (sinusoidal), 1996, July.
209. [15] R. Mahdavinejad, Finite element analysis of machine and workpiece
[6] G.H.J. Florussen, F.L.M. Delbressine, M.J.G. van de Molengraft, P.H.J. instability in turning, International Journal of Machine Tools &
Schellekens, Assessing geometrical errors of multi-axis machines by Manufacture 45 (2005) 753–760.
three-dimensional length measurements, Measurement 30 (4) [16] I. Alejandre, M. Artés, Method for the evaluation of optical encoders
(2001) 241–255. performance under vibration, Precision Engineering 31 (2007) 114–
[7] I. Alejandre, M. Artés, Machine tool errors caused by optical linear 121.
encoders, in: Proceedings of the I MECH E Part B Journal of [17] W. Gander, G.H. Golub, R. Strebel, Least-squares fitting of circles and
Engineering Manufacture, vol. 218, no. 1, January 2004, pp. 113–122. ellipses, BIT 34 (1994) 556–577.
[8] K. Patorsky, M. Kujawinska, Handbook of the Moire Fringe [18] L.M. Sánchez-Brea, T. Morlanes, Metrological errors in optical
Technique, Elsevier, Amsterdam, Holland, 1993. encoders, Measurement Science and Technology 19 (2008) 115104.
[9] J. Song, K. Kim, S. Kim, Reducing tilt errors in moire linear encoders
using phase modulated grating, Review of Scientific Instruments 71
(6) (2000) 2296–2300.