Design and Simulation of Micro-cantilever

Suresh Rijal1, C.K.Thadani2, C.K.Kurve3,Shrikant Chamlate4

1
Electronics Engg.Dept.,KITS,Ramtek,
2
Electronics and Comn.Engg.Dept.,KITS,Ramtek,
3
Electronics Engg.Dept.,KITS,Ramtek,
4
Electronics and Comn.Engg.Dept.,KITS,Ramtek,

Abstract— Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements,

sensors, actuators, and electronics on a common substrate through the utilization of micro-fabrication
technology or micro-technology. By definition “A cantilever is a beam supported on only one end”.
The beam carries the load to the support where it is resisted by moment and shear stress. Cantilever
construction allows for overhanging structures without external bracing. Cantilevered beams are the
most ubiquitous structures in the field of micro-electromechanical systems (MEMS). MEMS
cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si3N4), or poly-silicon. The
fabrication process typically involves undercutting the cantilever structure to release it, often with an
anisotropic wet or dry etching technique.

Keywords— MEMS, cantilevers, anisotropic etching, ansys.

I. INTRODUCTION
The term MEMS refers to a collection of micro-sensors and actuators which can sense its
environment and have the ability to react to changes in that environment with the use of a
microcircuit control[1]. An effort to miniaturize sensors and actuators for the purposes of reducing
size, weight, energy consumption, and fabrication cost. Integrating micro-machines and
microelectronics on the same chip is possible. In many cases, obtain better device performance than
macro equivalent. MEMS made micro-sensors are used for measuring physical parameters.
Transducer is a basic building block of a sensor, which senses the physical change and gives
corresponding response which is measureable and converts the measureable response into electrical
signal with use of specific transduction principle.
Micro-cantilevers and beams are very useful transducer elements,using which many physical
changes can be measured. The main principle is the deflection of the beam and cantilever structures.
The deflections are sensed either by capacitive or piezoresistive measurement [2]. The difference
between a beam and a cantilever is that a beam is fixed at both the ends whereas a cantilever is fixed
at only one end. This paper shows the effects of variation in different materials and compares the
output simulation results for silicon, poly-silicon, and silicon nitride using Ansys13.0.

II. DESIGN PARAMETERS OF CANTILEVER BEAM

Cantilever beam has one end fixed and second is freely moveable to deflect as per provided load.
The cantilevers have more length as compare to width and have optimal thickness. Without load the
cantilever is at the resting state and therefore initially it is horizontal and straight [3]. When force is
applied the horizontal axis of the beam is deformed into a curve. Deflection of cantilever depends on
length of cantilever, cross-sectional shape of beam and type of material used. Cantilever deflection
also depends on the point where load is applied and supporting mechanism of the beam.
A Micro-cantilever is a device that can be used as physical, chemical or biological sensor by
detecting the changes in cantilever bending or vibrational frequency.

DOI: 10.23883/IJRTER.2018.4025.SGT0A 197

 International Journal of Recent Trends in Engineering & Research (IJRTER)
Volume 04, Issue 01; January- 2018 [ISSN: 2455-1457]

Among those two equations first one is Stone’s equation, which relates cantilever end deflection ‘δ’
to applied stress ‘σ’ and it indicates that the end deflection of cantilever beam is directly proportional
to the applied stress. Where ‘ϑ’ is Poisson’s ratio, ’E’ is the Young’s modulus, ‘L’ is the beam length
and‘t’ is the cantilever thickness [4].
The second formula relates the spring constant ‘k’ to the cantilever dimensions and material
constants:

( )
δ= -------------------------- (1)

K= = -------------------- (2)

Where ’F’ is the force and ‘w’ is the cantilever width. The deflection of the cantilever beam depends
up on the dimensions of the beam i.e., length, width, thickness and also depends on various
properties of the material used to build the cantilever.
Equations for deflection of cantilever, when load is applied at the end:
( )
d(x) = ------ (3)
Equations for maximum deflection of cantilever, when load is applied at the end:

dmax = d(L) = --------------- (4)

Equation for deflection of cantilever, when point load is applied at the intermediate point:

d(x) = 0 ≤ x ≤ a ---------------- (5)

$
= a≤x≤L ------------ (6)
( $)
Equation for maximum deflection of cantilever, when point load is applied at the intermediate point:
$
dmax = d(L) = ------------- (7)
( $)

III. Design of Micro-cantilevers

A popular method of designating planes and orientations is the Miller indices. These indices are
effectively used to designate planes of materials in cubic crystal families [5]. The comparative
analysis of change in material of the cantilevers is performed and the change in stress, strain, and
total deformation of cantilevers is formed, which proves the provided equations.
Table1. Respective change in resultant stress, strain and total deformation with change in material of cantilevers.
Material Properties Material Names
SiO2 Si3N4 Poly-si
Young’s Modulus(Pa) 70E9 250E9 160E9

Density(Kg/m3) 2220 2400 2320

Poisson’s Ration 0.17 0.23 0.22
Length(µm) 110 110 110
Width(µm) 30 30 30
Height(µm) 3 3 3
Force(N/m2) 1 1 1

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 International Journal of Recent Trends in Engineering & Research (IJRTER)
Volume 04, Issue 01; January- 2018 [ISSN: 2455-1457]

Equivalent 2.54E12 2.59E12 2.58E12

Stress (Max.)
Equivalent Strain(Max) 34.936 9.9967 15.553

Total Deformation(Max) 0.09324 0.02594 0.04058

Figure 1: Micro-cantilever ansys geometry view

Figure 2: Micro-cantilever total deformation for SiO2.

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 International Journal of Recent Trends in Engineering & Research (IJRTER)
Volume 04, Issue 01; January- 2018 [ISSN: 2455-1457]

Figure 3: Micro-cantilever equivalent stress for SiO2.

Figure 4: Micro-cantilever equivalent elastic strain for SiO2.

IV.CONCLUSION
With the change in materials of cantilevers respective change in total deformation, equivalent stress
and equivalent elastic strain is obtained.

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 International Journal of Recent Trends in Engineering & Research (IJRTER)
Volume 04, Issue 01; January- 2018 [ISSN: 2455-1457]

REFERENCES
II Suryansh Arora, Sumati, Arti Arora, P.J George, “Design of MEMS based Microcantilever using Comsol
Multiphysics”, Applied Engineering Research, Vol.7 No.11, 2012.
III Maziar Norouzi, Alireza K, “Design of Piezoelectric microcantilever Chemical Sensor in Comsol
Multiphysics Area”, Electrical and Electronics, Vol.2, issue 1, No.184, 2009.
IIII Nitin S.Kale, V.Ramgopal Rao,”Design and Fabrication Issues in Affinity Cantilevers for bioMEMS
Applications”,Micro Electro Mechanical Systems,VOL.15,NO.6,2006 .
IIV Anchit J.Kaneria, D.S.Sharma, R.R.Trivedi. Static Analysis of Electrostatically Actuated Micro Cantilever
Beam, Procedia Engineering 51, 2013, pp.776-780.
IV Robert Littrell et.al. : Modelling and Characterization of cantilever based MEMS piezoelectricsensors and
actuators, JournalofMicroelectromechanical Systems Vol.21 No.2 pp.406-413 (2012).

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