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Abstract
An overview of methods for preparing nanoparticles in the vapor phase is given, and recent advances are reviewed.
Developments in instrumentation for monitoring vapor-phase synthesis of nanoparticles and in modeling these processes are also
included. The most important developments relate to improved control and understanding of nanoparticle aggregation and
coalescence during synthesis, and to methods for producing multi-component nanoparticles.
䊚 2003 Elsevier Science Ltd. All rights reserved.
1359-0294/03/$ - see front matter 䊚 2003 Elsevier Science Ltd. All rights reserved.
doi:10.1016/S1359-0294Ž03.00007-4
128 M.T. Swihart / Current Opinion in Colloid and Interface Science 8 (2003) 127–133
Fig. 1. TEM image of agglomerated nanoparticles typical of those One general class of methods of achieving the super-
produced in many vapor-phase processes. These particular particles saturation necessary to induce homogeneous nucleation
are silicon produced by laser pyrolysis of silane, but the degree of is to vaporize the material into a background gas and
polydispersity and agglomeration is typical of many vapor-phase pro- then cool the gas.
cesses in which no special efforts have been made to avoid agglom-
eration or narrow the size distribution of the primary particles.
2.1.1. Inert gas condensation
Perhaps the most straightforward method of achieving
batches under well-controlled conditions with batch supersaturation is to heat a solid to evaporate it into a
times of hours to days. background gas, then mix the vapor with a cold gas to
Once particles form in the gas phase, they coagulate reduce the temperature. This method is well suited for
at a rate that is proportional to the square of their production of metal nanoparticles, since many metals
number concentration and that is only weakly dependent evaporate at reasonable rates at attainable temperatures.
on particle size. At sufficiently high temperature, parti- By including a reactive gas, such as oxygen, in the cold
cles coalesce (sinter) faster than they coagulate, and gas stream, oxides or other compounds of the evaporated
spherical particles are produced. At lower temperatures, material can be prepared. Wegner et al. w7●x presented a
where coalescence is negligibly slow, loose agglomerates detailed, systematic modeling and experimental study of
with quite open structures are formed. At intermediate this method, as applied to preparation of bismuth nano-
conditions, partially sintered non-spherical particles are particles, including both visualization and computational
produced. If individual, non-agglomerated nanoparticles fluid dynamics simulation of the flow fields in their
are desired, control of coagulation and coalescence is reactor. They clearly showed that they could control the
crucial. In contrast to the liquid phase, where a disper- particle size distribution by controlling the flow field
sion of nanoparticles can be stabilized indefinitely by and the mixing of the cold gas with the hot gas carrying
capping the particles with appropriate ligands, nanopar- the evaporated metal. Other advances in this method
ticles in the gas phase will always agglomerate. So, by have been in preparing composite nanoparticles and in
non-agglomerated nanoparticles, we usually mean par- controlling the morphology of single-component nano-
ticles agglomerated loosely enough that they can be particles by controlled sintering after particle formation.
redispersed without Herculean effort, as compared to Maisels et al. w8●x prepared composite nanoparticles of
hard (partially sintered) agglomerates that cannot be PbS with Ag by separate evaporationycondensation of
fully redispersed. Fig. 1 illustrates typical degrees of the two materials followed by coagulation of oppositely
agglomeration and polydispersity obtained in gas phase charged PbS and Ag particles selected by size and
processes when no special efforts have been made to charge. Ohno w9x prepared SiyIn, GeyIn, AlyIn and Aly
control agglomeration or narrow the particle size distri- Pb composite nanoparticles by condensation of In or Pb
bution. In the cases of carbon black, fumed silica, and onto Si, Ge, or Al particles prepared by inert gas
pigmentary titania, such particles are produced commer- condensation and brought directly into a second conden-
cially in huge quantities (millions of metric tons per sation reactor. Nakaso et al. w10●x conducted a detailed
year). In some applications, such as catalysis, agglom- experimental and theoretical study of the in-flight sin-
erates with an open structure like those in Fig. 1 are tering (coalescence) of gold nanoparticle agglomerates
desired. However, in many potential applications non- after evaporationycondensation synthesis. They were
agglomerated spherical nanoparticles of uniform size are able to differentiate between different sintering mecha-
M.T. Swihart / Current Opinion in Colloid and Interface Science 8 (2003) 127–133 129
nisms, and extracted rate constants for the restructuring relatively low pressures (;1 mTorr), which makes
process from their experiments. Similarly, Nanda et al. further processing of the nanoparticles in aerosol form
w11x studied the in-flight sintering of PbS nanoparticles. difficult.
They were able to tune the band-gap of these semi-
conductor nanoparticles by changing the particle size 2.2. Methods using liquid or vapor precursors
and morphology.
An alternate means of achieving the supersaturation
2.1.2. Pulsed laser ablation required to induce homogeneous nucleation of particles
Rather than simply evaporating a material to produce is chemical reaction. Chemical precursors are heated
supersaturated vapor, one can use a pulsed laser to andyor mixed to induce gas-phase reactions that produce
vaporize a plume of material that is tightly confined, a state of supersaturation in the gas phase.
both spatially and temporally. This method can generally
only produce small amounts of nanoparticles. However, 2.2.1. Chemical vapor synthesis
laser ablation can vaporize materials that cannot readily In this approach, vapor phase precursors are brought
be evaporated. Marine et al. w12x presented a recent into a hot-wall reactor under conditions that favor
analysis of this method, in which they also reviewed its nucleation of particles in the vapor phase rather than
development. Nakata et al. w13●x used a combination of deposition of a film on the wall. It is called chemical
laser-spectroscopic imaging techniques to image the vapor synthesis or chemical vapor condensation in
plume of Si atoms and clusters formed during synthesis analogy to the chemical vapor deposition (CVD) pro-
of Si nanoparticles. They investigated the dependence cesses used to deposit thin solid films on surfaces. This
of the particle formation dynamics on the background method has tremendous flexibility in producing a wide
gas, and found that it was substantial. Some other recent range of materials and can take advantage of the huge
examples include the preparation of magnetic oxide database of precursor chemistries that have been devel-
nanoparticles by Shinde et al. w14x, titania nanoparticles oped for CVD processes. The precursors can be solid,
by Harano et al. w15x, and hydrogenated-silicon nano- liquid or gas at ambient conditions, but are delivered to
particles by Makimura et al. w16x. the reactor as a vapor (from a bubbler or sublimation
source, as necessary).
2.1.3. Spark discharge generation There are many good examples of the application of
Another means of vaporizing metals is to charge this method in the recent literature. Ostraat et al. w20●x
electrodes made of the metal to be vaporized in the have demonstrated a two-stage reactor for producing
presence of an inert background gas until the breakdown oxide-coated silicon nanoparticles that have been incor-
voltage is reached. The arc (spark) formed across the porated into high-density nonvolatile memory devices.
electrodes then vaporizes a small amount of metal. This By reducing the silane precursor composition to as low
produces very small amounts of nanoparticles, but does as 10 parts per billion, they were able to produce non-
so relatively reproducibly. Weber et al. w17●x recently agglomerated single-crystalline spherical particles with
used this method to prepare well-characterized nickel mean diameter below 8 nm. This is one of relatively
nanoparticles for studies of their catalytic activity in the few examples of a working microelectronic device in
absence of any support material. By preparing the which vapor-phase synthesized nanoparticles perform an
nanoparticles as a dilute aerosol they were able to carry active function. In other recent examples of this
out reactions on the freshly prepared particles while they approach, Magnusson et al. w21x produced tungsten
were still suspended. Metal-oxides or other compounds nanoparticles by decomposition of tungsten hexacarbon-
can be prepared by using oxygen or another reactive yl and Nasibulin et al. w22x produced copper and copper
background gas. Rather than having the background gas oxide nanoparticles from copper acetylacetonate.
present continuously, it can be pulsed between the Another key feature of chemical vapor synthesis is
electrodes at the same time that the arc is initiated, as that it allows formation of doped or multi-component
in the pulsed arc molecular beam deposition system nanoparticles by use of multiple precursors. Schmechel
described by Rexer et al. w18x. et al. w23x prepared nanocrystalline europium doped
yttria (Y2O3:Eu3q) from organometallic yttrium and
2.1.4. Ion sputtering europium precursors. Senter et al. w24x incorporated
A final means of vaporizing a solid is via sputtering erbium into silicon nanoparticles using disilane and an
with a beam of inert gas ions. Urban et al. w19x recently organometallic erbium compound as precursors. Srdic´ et
demonstrated formation of nanoparticles of a dozen al. w25x prepared zirconia particles doped with alumina.
different metals using magnetron sputtering of metal It is also possible to make composite nanoparticles
targets. They formed collimated beams of the nanopar- where one material is encapsulated within another. A
ticles and deposited them as nanostructured films on particularly promising approach to this is the sodium
silicon substrates. This process must be carried out at metalymetal halide chemistry used by Ehrman et al.
130 M.T. Swihart / Current Opinion in Colloid and Interface Science 8 (2003) 127–133
w26●x. In this approach, a halide, such as SiCl4, is by far the most commercially successful approach to
reacted with sodium vapor in a heated furnace to nanoparticle synthesis—producing millions of metric
produce NaCl-encapsulated particles. For example tons per year of carbon black and metal oxides. How-
SiCl4 reacts with Na to produce NaCl-encapsulated Si ever, the coupling of the particle production to the flame
particles. The salt-encapsulation can potentially be used chemistry makes this a complex process that is rather
to prevent agglomeration of the particles, and the salt difficult to control. It is primarily useful for making
can then be washed away in a post-processing step. oxides, since the flame environment is quite oxidizing.
Recent advances are expanding flame synthesis to a
2.2.2. Spray pyrolysis wider variety of materials and providing greater control
Rather than delivering the nanoparticle precursors into over particle morphology. Janzen and Roth w34●x recent-
a hot reactor as a vapor, one can use a nebulizer to ly presented a detailed study of flame synthesis of g-
directly inject very small droplets of precursor solution. Fe2O3 nanoparticles, including comparison of their
This has been called spray pyrolysis, aerosol decompo- results to a theoretical model. Lee and Choi w35●x
sition synthesis, droplet-to-particle conversion, etc. controlled nanoparticle morphology by using a CO2
Reaction often takes place in solution in the droplets, laser to re-heat flame-synthesized titania and silica
followed by solvent evaporation. Recent examples of nanoparticle agglomerates, thereby sintering them in
this include preparation of TiO2 nanoparticles by Aho- situ. Wegner et al. w36x controlled the size and mor-
nen et al. w27x and copper nanoparticles by Kim et al. phology of titania nanoparticles by extracting them from
w28x. the flame through a critical flow nozzle, quenching
particle growth and agglomeration. Kammler et al.
2.2.3. Laser pyrolysisyphotothermal synthesis w37●x have shown that they can influence flame condi-
An alternate means of heating the precursors to induce tions and primary particle size by application of a DC
reaction and homogeneous nucleation is absorption of electric field to the particle synthesis flame.
laser energy. Compared to heating the gases in a furnace,
this allows highly localized heating and rapid cooling,
since only the gas (or a portion of the gas) is heated, 2.2.6. Flame spray pyrolysis
and its heat capacity is small. Heating is generally done Rather than injecting vapor precursors into the flame,
using an infrared (CO2) laser, whose energy is either one can directly spray liquid precursor into it. This
absorbed by one of the precursors or by an inert process is generally called flame spray pyrolysis. This
photosensitizer such as sulfur hexafluoride. The silicon method allows use of precursors that do not have
particles shown in Fig. 1 were prepared in our laboratory sufficiently high vapor pressure to be delivered as a
by laser pyrolysis of silane. Nanoparticles of many ¨
vapor. Madler et al. w38●x presented a very detailed
materials have been made using this method. A few study of this method, as applied to the synthesis of silica
recent examples are MoS2 nanoparticles prepared by particles from hexamethyldisiloxane.
Borsella et al. w29x, SiC nanoparticles produced by
Kamlag et al. w30x, and Si nanoparticles prepared by 2.2.7. Low-temperature reactive synthesis
Ledoux et al. w31,32x. Ledoux et al. use a pulsed CO2 For particular materials, it is possible to react vapor-
laser, thereby shortening the reaction time and allowing phase precursors directly without external addition of
preparation of even smaller particles. heat, and without significant production of heat. Sari-
giannis et al. produced ZnSe nanoparticles w39x from
2.2.4. Thermal plasma synthesis dimethylzinc-trimethylamine and hydrogen selenide by
Yet another means of providing the energy needed to mixing them in a counter-flow jet reactor at room
induce reactions that lead to supersaturation and particle temperature. Apparently the heat of reaction was suffi-
nucleation is to inject the precursors into a thermal cient to allow crystallization of the particles without
plasma. This generally decomposes them fully into substantially increasing the gas temperature. This is an
atoms, which can then react or condense to form intriguing result, because it is one of few methods
particles when cooled by mixing with cool gas or reported for vapor-phase preparation of compound semi-
expansion through a nozzle. Heberlein et al. w33●x have conductor nanoparticles that are usually produced by
applied these methods to the production of nanoparticles colloidal chemistry.
of SiC and TiC for nanophase hard coatings.
w10x Nakaso K, Shimada M, Okuyama K, Deppert K. Evaluation acetylacetonate vapor decomposition in the presence of
● of the change in the morphology of gold nanoparticles during oxygen. Aerosol Sci Technol 2002;36:899 –911.
sintering. J Aerosol Sci 2002;33:1061 –74. w23x Schmechel R, Kennedy M, von Seggern H, et al. Lumines-
This work goes beyond simply making observations about particle cence properties of nanocrystalline Y2O3:Eu3q in different
sintering to identify the mechanisms responsible for sintering in host materials. J Appl Phys 2001;89:1679 –86.
different regimes and extract rate parameters for the particle w24x Senter RA, Chen Y, Coffer JL, Tessler LR. Synthesis of
restructuring processes.
silicon nanocrystals with erbium-rich surface layers. Nano
w11x Nanda KK, Kruis FE, Fissan H, Acet H. Band-gap tuning of
Lett 2001;1:383 –6.
PbS nanoparticles by in-flight sintering of size classified
w25x Srdic´ VV, Winterer M, Moller A, Miehe G, Hahn H.
aerosols. J Appl Phys 2002;91:2315 –21.
w12x Marine W, Patrone L, Luk’yanchuk B, Sentis M. Strategy of Nanocrystalline zirconia surface-doped with alumina: chem-
nanocluster and nanostructure synthesis by conventional ical vapor synthesis, characterization, and properties. J Am
pulsed laser ablation. Appl Surf Sci 2000;154–155:345 –52. Ceram Soc 2001;84:2771 –6.
w13x Nakata Y, Muramoto J, Okada T, Maeda M. Particle dynam- w26x Ehrman SH, Aquino-Class MI, Zachariah MR. Effect of
● ics during nanoparticle synthesis by laser ablation in a ● temperature and vapor-phase encapsulation on particle
background gas. J Appl Phys 2002;91:1640 –3. growth and morphology. J Mater Res 1999;14:1664 –71.
By combining different spectroscopic imaging techniques, these The sodium metalymetal halide chemistry studied in this paper
authors were able to obtain time-resolved images of both atoms provides a new means of controlling nanoparticle size and mor-
and clusters during laser ablation synthesis of silicon nanoparticles phology by modifying particle coagulation and coalescence.
and to directly observe the effects of background gas on particle w27x Ahonen PP, Joutsensaari J, Richard O, et al. Mobility size
formation and the dynamics of the plume of ablated material. development and the crystallization path during aerosol
w14x Shinde SR, Kulkarni SD, Banpurkar AG, Nawathey-Dixit R, decomposition synthesis of TiO2 particles. J Aerosol Sci
Date SK, Ogale SB. Magnetic properties of nanosized pow- 2001;32:615 –30.
ders of magnetic oxides synthesized by pulsed laser ablation. w28x Kim JH, Germer TA, Mulholland GW, Ehrman SH. Size-
J Appl Phys 2000;88:1566 –75. monodisperse metal nanoparticles via hydrogen-free spray
w15x Harano A, Shimada K, Okubo T, Sadakata M. Crystal phases pyrolysis. Adv Mater 2002;14:518 –21.
of TiO2 ultrafine particles prepared by laser ablation of solid w29x Borsella E, Botti S, Cesile MC, Martelli S, Nesterenko A,
rods. J Nanoparticle Res 2002;4:215 –9. Zappelli PG. MoS2 nanoparticles produced by laser induced
w16x Makimura T, Mizuta T, Murakami K. Laser ablation synthesis synthesis from gaseous precursors. J Mater Sci Lett
of hydrogenated silicon nanoparticles with green photolumin- 2001;20:187 –91.
escence in the gas phase. Jpn J Appl Phys 2002;41:L144 – w30x Kamlag Y, Goossens A, Colbeck I, Schoonman J. Laser
L146.
CVD of cubic SiC nanocrystals. Appl Surf Sci
w17x Weber AP, Seipenbusch M, Kasper G. Application of aerosol
2001;184:118 –22.
● techniques to study the catalytic formation of methane on
w31x Ledoux G, Gong J, Huisken F, Guillois O, Reynaud C.
gasborne nickel nanoparticles. J Phys Chem A
Photoluminescence of size-separated silicon nanocrystals:
2001;105:8958 –63.
confirmation of quantum confinement. Appl Phys Lett
This work demonstrates how carefully prepared and characterized
2002;80:4834 –6.
nanoparticles can be used to study catalytic processes, many of
which are carried out commercially on supported metal nanoparti- w32x Ledoux G, Amans D, Gong J, Huisken F, Cichos F, Martin
cles, in the absence of a support material and with a continuous J. Nanostructured films composed of silicon nanocrystals.
supply of fresh nanoparticles. Mater Sci Eng C 2002;19:215 –8.
w18x Rexer EF, Wilbur DB, Mills JL, DeLeon RL, Garvey JF. w33x Heberlein J, Postel O, Girshick SL, et al. Thermal plasma
Production of metal oxide thin films by pulsed arc molecular ● deposition of nanophase hard coatings. Surf Coat Technol
beam deposition. Rev Sci Instrum 2000;71:2125 –30. 2001;142–144:265 –71.
w19x Urban FK III, Hosseini-Tehrani A, Griffiths P, Khabari A, These authors, in this and previous work, have developed plasma
Kim Y-W, Petrov I. Nanophase films deposited from a high- synthesis methods for preparing nanoparticles of hard, non-oxide
rate, nanoparticle beam. J Vac Sci Technol B 2002;20:995 – ceramics and of depositing these as nanophase hard coatings and
9. coarsely patterned coatings ‘written’ with a focused nanoparticle
w20x Ostraat ML, De Blauwe JW, Green ML, Bell LD, Atwater beam.
● HA, Flagan RC. Ultraclean two-stage aerosol reactor for w34x Janzen C, Roth P. Formation of Fe O nano-particles in
2 3
production of oxide-passivated silicon nanoparticles for novel ● doped low-pressure H2 yO2 yAr flames. Combust Flame
memory devices. J Electrochem Soc 2001;148:G265 –G270. 2001;125:1150 –61.
This and related papers by this group demonstrate the integration This is a thorough combined experimental and modeling study of
of vapor-phase synthesis of nanoparticles into a conventional formation of g-Fe2O3 in a low pressure flame, including modeling
semiconductor processing environment to produce high-purity (less the flame structure and aerosol dynamics and particle size distri-
than one contaminant transition metal atom per 100 nanoparticles) bution measurements using a particle mass spectrometer.
nanoparticles that can be incorporated as an active part of a real w35x Lee D, Choi M. Coalescence enhanced synthesis of nano-
microelectronic (flash memory) device.
● particles to control size, morphology, and crystalline phase
w21x Magnusson MH, Deppert K, Malm J-O. Single-crystalline at high concentrations. J Aerosol Sci 2002;33:1 –16.
tungsten nanoparticles produced by thermal decomposition The infrared laser heating approach described here and in other
of tungsten hexacarbonyl. J Mater Res 2000;15:1564 –9. recent papers by these authors provides a new means to slow
w22x Nasibulin AG, Richard O, Kauppinen EI, Brown DP, Joki- coagulation of flame-produced particles. Flame-synthesized parti-
niemi JK, Altman IS. Nanoparticle synthesis by copper(II) cles generally form fractal aggregates that coagulate much faster
M.T. Swihart / Current Opinion in Colloid and Interface Science 8 (2003) 127–133 133
than spheres of the same volume. So, by spheroidizing the particles, w45x Suh S-M, Zachariah MR, Girshick SL. Numerical modeling
the coagulation rate and, therefore, final particle size can be reduced of silicon oxide particle formation and transport in a one-
and spherical particles can be obtained. dimensional low-pressure chemical vapor deposition reactor.
w36x Wegner K, Stark WJ, Pratsinis SE. Flame-nozzle synthesis J Aerosol Sci 2002;33:943 –59.
of nanoparticles with closely controlled size, morphology, w46x Muhlenweg
¨ H, Gutsch A, Schild A, Pratsinis SE. Process
and crystallinity. Mater Lett 2002;55:318 –21. ● simulation of gas-to-particle-synthesis via population balanc-
w37x Kammler HK, Pratsinis SE, Morrison PW Jr., Hemmerling es: investigation of three models. Chem Eng Sci
● B. Flame temperature measurements during electrically 2002;57:2305 –22.
assisted aerosol synthesis of nanoparticles. Combust Flame This is a thorough and valuable comparison of the capabilities of
2002;128:369 –81. monodisperse, extended 1-dimensional, and fully two-dimensional
This work shows quantitatively how the application of an electric (in particle size and surface area) sectional models of aerosol
field changes the structure of a particle-producing flame, and how dynamics that shows that the more computationally manageable
this can be used to influence the size and morphology of the extended 1-D approach performs well.
particles. w47x Tsantilis S, Kammler HK, Pratsinis SE. Population balance
¨
w38x Madler L, Kammler HK, Mueller R, Pratsinis SE. Controlled ● modeling of flame synthesis of titania nanoparticles. Chem
● synthesis of nanostructured particles by flame spray pyroly- Eng Sci 2002;57:2139 –56.
sis. J Aerosol Sci 2002;33:369 –89. A moving sectional model for the dynamics of flame synthesis of
This combined experimental and modeling study is the most titania particles is presented here. The authors attain quantitative
thorough and systematic investigation and description of flame agreement with experiment, without using adjustable parameters,
spray pyrolysis in the literature. It shows how the surface area and are able to distinguish between different possible particle
(primary particle size) can be controlled via the oxidant flow rate growth mechanisms.
and precursoryfuel composition. w48x Lee BW, Oh S, Choi M. Simulation of growth of nonspher-
w39x Sarigiannis D, Peck JD, Kioseoglou G, Petrou A, Mountziaris ical silica nanoparticles in a premixed flat flame. Aerosol
TJ. Characterization of vapor-phase-grown ZnSe nanoparti- Sci Technol 2001;35:978 –89.
cles. Appl Phys Lett 2002;80:4024 –6. w49x Jeong JI, Choi M. A sectional model for the analysis and
w40x Arabi-katbi OI, Pratsinis SE, Morrison PW Jr.. In situ growth of polydisperse non-spherical particles undergoing
● infrared measurements on TiO2 flames: gas and particle coagulation and coalescence. J Aerosol Sci 2001;32:565 –82.
concentrations. AIChE J 2002;48:59 –68. w50x Rosner DE, Pyykonen ¨ JJ. Bivariate moment simulation of
This paper describes a rare situation in which a flame nanoparticle ● coagulating and sintering nanoparticles in flames. AIChE J
synthesis reactor has been probed to determine temperature, gas- 2002;48:476 –91.
phase species concentrations, and particle concentration This paper applies a bivariate extension of the quadrature method
simultaneously. of moments to treat the evolution of particle size and surface area
w41x Cho J, Choi M. Determination of number density, size and in flame-synthesis of alumina particles. This is a computationally
● morphology of aggregates in coflow diffusion flames using efficient approach, compared to sectional methods described in the
light scattering and local sampling. J Aerosol Sci papers cited above. It shows that this method can usefully capture
2000;31:1077 –95. the main features of the particle size distribution and morphology,
This is one of very few papers in which particle size, morphology, and provides a thoughtful discussion of future directions in the
and concentration have been simultaneously determined in a application of these methods.
particle producing flame. w51x Rosner DE, Yu S. MC simulation of aerosol aggregation and
w42x Janzen C, Kleinwechter H, Knipping J, Wiggers H, Roth P. simultaneous spheroidization. AIChE J 2001;47:545 –61.
Size analysis in low-pressure nanoparticle reactors: compar- w52x Efendiev Y, Struchtrup H, Luskin M, Zachariah MR. A
ison of particle mass spectrometry with in situ probing ● hybrid sectional-moment model for coagulation and phase
transmission electron microscopy. J Aerosol Sci segregation in binary liquid droplets. J Nanoparticle Res
2002;33:833 –41. 2002;4:61 –72.
w43x Bhandarkar UV, Swihart MT, Girshick SL, Kortshagen UR. This paper describes a formulation and solution method for the
Modeling of silicon hydride clustering in a low pressure situation of two-phase particle synthesis in which there is a
silane plasma. J Phys D: Appl Phys 2000;33:2731 –46. distribution of ‘enclosures’ of one phase within another phase, as
w44x Girshick SL, Swihart MT, Suh S-M, Mahajan MR, Nijhawan in the experimental work described by Ehrman et al. w26x.
S. Numerical modeling of gas-phase nucleation and particle w53x Efendiev Y, Zachariah MR. Hybrid monte carlo method for
growth during chemical vapor deposition of silicon. J Elec- simulation of two-component aerosol coagulation and phase
trochem Soc 2000;147:2303 –11. segregation. J Colloid Interf Sci 2002;249:30 –43.