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1, JANUARY 2003 91
I. INTRODUCTION Fig. 1. Schematic front view of RF oven with components of matching circuit.
(2)
(3)
(4) Fig. 3. Plot of phase space showing possible trajectories of y as and are
changed.
(10)
(11)
which can be simplified using (7)
(12)
(9)
where and denote the matched settings. These equations
The global behavior of the matching circuit can be understood show that there are two solutions for the matching problem, cor-
by plotting the trajectories of in phase space as and are responding to being positive or negative. However, since
94 IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 11, NO. 1, JANUARY 2003
(and hence, ) lies in the range given in (2), only one possible where and are the speeds chosen for and . For the
solution can be achieved. line, a Lyapunov function exists if
C. Linearized Model
When the load is close to being matched, is approximately (16)
, where is the imaginary component of the impedance, which is satisfied if
which is taken to be small (in particular, small compared to ).
Using this in the input output expression in (8) gives the fol- (17)
lowing model for the linearized dynamics near matching:
A similar condition applies for the switching line. The do-
main over which this condition holds defines the domain of at-
(13)
traction of the switching line. For the matched settings to be an
equilibrium of the system it is sufficient that one sliding mode
Even for the linearized system, there is a wide variation in the
exists and that along that line, the equilibrium is attractive. For
gains near matching for different loads since can vary between this it is necessary that the two lines intersect only at the matched
0.5 and 23. However, it can be seen that affects only the point and that one of them is a sliding mode.
imaginary part of the load (and always has a positive gain), while It is easier to identify suitable switching lines in the output
the effect of on the real part of the input impedance always
space (i.e., in terms of and ) and then to use (7) to ex-
has a positive gain. press the lines in terms of and . From Fig. 3, if , then
should be increased, so the switching line for is given by
III. CONTROLLER DESIGN
(18)
We summarize the features of the system as follows.
• Gains vary strongly with both load value and the state of the Similarly, when the input impedance lies on the upper half
system. of the circle, so that , should be increased for
• Output mapping is two to one, it is only the constraints on and decreased for . However, when lies in
the capacitor values which make it effectively one to one. the lower half of the circle (i.e., when ), decreasing
• Load is slowly varying thus the task of the controller is to actually moves in the wrong direction when .
identify the settings that which match the load and move the This suggests the following possible switching line for :
capacitors to those settings as quickly as possible. for
Essentially, the regulation problem has two aspects relating (19)
for .
to the two sources of nonlinearity. The first is to move the ca-
pacitors from any particular setting to a matched position for a The difficulty with the second switching line is that it requires
given load. The second is to track the changes in load impedance an estimate of one of the states and small errors in the estimate
once the controller is matched. By assuming that the load vari- can lead to unstable regions for the matching circuit control. For
ations are slow, the first problem can be seen to encompass the practical systems, a switching line that sometimes send in the
second. A number of approaches to the control problem were wrong direction but which will produce a stable equilibrium and
considered, including adaptive linear control and model inver- be less sensitive to matching circuit errors is preferable. One
sion, but none of these approaches was sufficiently robust to the possible switching line can be found by considering , the
uncertainties in the system [4]. However, a switching controller upper limit (i.e., least negative value) that can take, so that
[16], [17] was found to be suitable. becomes
A surface in the state space defined by , for
(20)
is a sliding mode [16] if the Lyapunov function for
exists and . Provided that a sliding mode exists, can be calculated from the range of allowable values for
then any trajectory in phase space can be described as having , which avoids the need to estimate the state [4].
two modes: the reaching mode and the sliding mode [16]. The Given that the detector produces voltages that are propor-
reaching mode is the part of the trajectory from the starting posi- tional to the real and imaginary parts of the reflected signal, to
tion until the trajectory intersects the switching surface. During implement the controller it is necessary to convert the expres-
the sliding mode, the trajectory is constrained to stay on the sions for the switching lines, which are given in terms of
switching surface and the dynamics of the system are deter- and , to corresponding expressions in terms of the measured
mined by . It is the robustness of the behavior during values. This can be done by writing the reflection coefficient in
the sliding mode to uncertainties in system dynamics which the form
makes this form of controller attractive for this system.
For the matching circuit, there are two switching lines, (21)
and , which determine and , the rates of change of
and (22)
(14) From (18), it can be seen that the switching line can be im-
(15) plemented by switching the direction of movement for the
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 11, NO. 1, JANUARY 2003 95
capacitor according to the sign of the voltage proportional to Introduce a new variable, , such that
the imaginary part of the reflected signal. The implementation
of the switching line for determining the movement of the (30)
capacitor is less straightforward. In principle, it would be pos-
sible to use the signals from the detector in (22) to deduce then
and and then to use these values to determine the line.
However, this requires an accurate calibration of the detector (31)
signals and it was not possible to produce a reliable calibration
over the whole range of operation [4]. As a result, the modified where
switching line
(32)
(23)
Stable sliding modes will exist for the linearized system pro-
was used, so that the direction of movement of the capacitor vided that is positive definite [17]. From the definition of ,
depended upon the sign of the real part of the reflected signal. In in (2), is always negative, so a stable sliding mode exists on
the limit , the switching on the modified line occurs at the second switching line for all choices of . For the first
the same point as on the optimal line given in (19). Although the switching line, a stable sliding mode will occur provided that
resulting control does not produce the global stability achieved is set sufficiently large. Thus, close to the equilibrium point, the
by the switching lines in (19), it will have the same local sta- stability of the system depends solely upon the rates of change
bility properties as the ideal controller in the region close to the of the positions of the capacitors and is independent of the ad-
matching point. mittance of the load.
Fig. 4. Plot of switching lines and velocities at points in the phase space expressed in terms of C and C . Matching is achieved when C = 125 pF and
C = 125 pF.
Fig. 5. Plot of switching lines and velocities at points in the phase space expressed in terms of C and C . Matching is achieved when C = 12:5 pF and
C = 125 pF.
values of and at the matching point, can be related to the are (locally) a good approximation to the ideal. Also, near the
real and imaginary parts of the load admittance by equilibrium point, both lines form sliding modes. In Fig. 5, the
matched setting of capacitor has been reduced to 12.5 pF,
(35) which makes the region close to matching less stable, although
global asymptotic stability is maintained.
(36)
IV. ROBUSTNESS TO MODEL ERRORS
Fig. 4 shows the phase plane diagram for the case where the One of the reasons for using the switching controller the
matched capacitor settings are both 125 pF. The arrows indicate matching circuit was the possibility of model errors. In prin-
the velocities of the states. From the diagram it can be seen that ciple, stray components (impedances) can occur at any point in
the equilibrium is globally stable and that the switching lines the matching network. However, it can be shown [4], that the
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 11, NO. 1, JANUARY 2003 97
(43)
leading to
(44)
Fig. 6. Simplified matching circuit model with stray component.
Transforming the coordinates from to using
only component that can affect the stability is the stray admit-
tance, , shown in Fig. 6. Any other components simply bias (45)
the range of the variable capacitors. The equation for the input
impedance of the matching circuit with this stray component is gives
(37) (46)
where
where
(47)
(38)
Fig. 7. Plot of switching lines and velocities at points in the phase space expressed in terms of C and C , when a stray admittance of 0.25
is present. The
nominal matched settings for the capacitors are C = 10 pF and C = 25 pF.
on the axes in order to make the plot clearer. For the oven used fast switching is not possible. To remove the oscillations about
in this study, it is possible for global stability to be lost, for a the switching surface the control implemented took the form of
small range of nominal matching conditions (when the matched a high gain with saturation. Since steppers drives were being
settings of both and were at the low end of their range) used and it is not possible to move a fraction of a step during
and when the stray component had a large admittance [4]. It is a sampling interval, there was effectively a deadband on the
possible to use the mapping from to in (37) to determine signal as well.
the limiting values of and that will maintain global stability Experience with using the controller showed that once
for a given stray impedance, . In practice, there is only a very matching had been achieved, the impedance of the load
small region of the phase space for which global stability is lost, changed slowly as the object was heated and that the matching
even when the stray admittance is large [4] and global stability circuit tracked the change well. The results presented here
can be achieved by initializing the system with both capacitors cover the more interesting problem of bringing the system from
at the low end of their ranges. From Fig. 7, it can be seen that this an initial (unknown) state to the matched position. Under these
ensures that the system converges the required stable position. circumstances, the local stability analysis no longer applies.
If the stray admittance were measured and incorporated into the Six different initial load impedances were created by adjusting
controller by recalculating the switching lines, then global sta- the separation between the actuator plates when a load was
bility could be maintained throughout the phase space. inserted into the oven. The real and imaginary parts of the
reflected signal were recorded every 10 ms as the matching
circuit was controller automatically and the experiment was
V. IMPLEMENTATION
repeated three times for each starting position [4]. Fig. 8 shows
The switching controller designed in the previous sections was a plot of the normalized magnitude of the reflected signal,
implemented on a prototype commercial RF oven shown in Fig. 1. plotted against time, for each of the runs. It is noticeable that in
The internal dimensions of the oven are 400 500 510 mm and each of the runs from a given starting condition, the trajectories
it is double skinned for insulation. The inductor, which forms part are very similar. Closer examination of the movement of the
of the matching circuit is made from coiled copper strap 30-mm variable capacitors showed that the capacitor did not start to
wide by 1-mm thick. Power is provided by an 50- RF generator move until the capacitor had virtually reached the matched
running at 27.12 MHz, which is rated at 1 kW, although the gen- position. This is partly due to the nonideal switching line,
erator automatically restricts the forward power of the generator and partly a result of stray admittance in parallel with [4].
if the reflected power exceeds 75 W. The variable capacitors in It is noticeable that the response of the system is much slower
the matching circuit are moved by stepper motors which have 200 for one set of initial conditions. This is due to the presence
steps per turn and a maximum speed of 7.5 rad/s. The voltages of stray components which make the initial load impedance
from the detector were sampled at 50 Hz by an A/D board in a PC, appear close to the switching line and the finite gain on
which generated the pulse signals for driving the stepper motors. the speed of movement only changes the settings of slowly
Further details of the oven are described in [4]. in the early stages of the trajectory.
Since the controller was to be implemented using a dis- Fig. 9 plots the real and imaginary parts of the normalized
crete-time algorithm rather than analog electronics, the reflected signal for each of the runs associated with two dif-
possibility existed for chattering [17]. This is because infinitely ferent initial conditions. For both sets of initial conditions, the
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 11, NO. 1, JANUARY 2003 99
Fig. 8. Plot of magnitude of 0 against time (seconds) during matching for six different initial conditions. The results of three runs are shown for each initial
condition.
VI. CONCLUSION
A control system for a matching circuit in a fixed frequency
RF oven has been developed, analyzed, and implemented. There
was considerable uncertainty in the system and the control de-
sign has taken account of this uncertainty. The controller has
been proven to be locally stable for all loads and global stability
is indicated by phase plots. The robustness of the controller to
stray components in the matching circuit has been calculated
showing that local stability is maintained for a wide range of
stray components. Although in principle, global stability can be
lost for a small range of loads when there is a large stray ad-
mittance in the system, in practice, stability can be maintained
by initializing the system with both capacitors at the low end of
their ranges. The control law has been implemented and shown
to produce matching for a range of loads.
The matching circuit used in this study was based upon a
Fig. 9. Plot of real and imaginary parts of 0 (after normalization) during simple -network, but this is not the only possible configura-
matching for two different initial conditions (one set of initial conditions is
represented by the solid line and the other by the dashed line). The results of tion for impedance matching [12]. Other networks are possible
three runs are shown for each initial condition. and it can be shown that the same form of controller used in
this matching circuit is appropriate for these other networks [4].
trajectories start by following circles, which correspond to lines Circuits with more than two variable components are possible
of constant reactance, indicating that the trajectories are not and have some advantages. The extra degrees of freedom can
sliding modes. This is because the gain on the movement of be used to increase the matching range or to reduce the cur-
is large and this drives the system to the switching line, rents and voltages within the circuit. It is not possible to produce
which lies along the real axis, rather than being attracted to the switching lines for the third (or higher) variable component be-
switching line. The speed of movement of the capac- cause there is no consistent mapping from the third variable to
itor is also apparent from the “jerky” trace for the trajectories the real and imaginary parts of . However a possible control
described by the dashed line, where the very rapid change in structure would be to use two of the variable components for
means that only a few samples were recorded in this portion matching and the third could be varied on a much slower time
of the trajectory. Increasing the gain for the capacitor did scale, tracking changes in the load.
100 IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 11, NO. 1, JANUARY 2003