Mitutoyo - Mikrometry Laserowe Laser Scan Micrometer - E13004 - 2016 EN

Sensor Systems
High Accuracy Non-Contact Measuring System

LASER SCAN MICROMETER
Catalog No. E13004
Non-contact measuring system combines

high-rate scanning (3200 scans/sec) with highly
accurate measurement
Laser Scan Micrometers
High scanning rate (3200 scans/sec) and high accuracy, non-contact measuring
systems. The LSM features a very high scanning rate which allows inspection of
small workpieces even if they are fragile, at a high temperature, in motion or
vibrating.
FEATURES
0.005mm-diameter ultra-fine wires to 160mm- measurement tools and instruments, has established within its
diameter cylinders can be measured: Seamless business practises.
measurement range models
Improved resistance to IP64-level environments
A rich assortment of models for diverse measuring applications.
The LSM-500S can measure ultra-fine wires as thin as 0.005mm The measuring unit has been extensively developed to resist rough
in diameter to a resolution of 0.00001mm, and the LSM-516S can measurement environments. As a result, for example, it can operate
measure cylindrical workpieces with a diameter as large as 160mm. at an ambient temperature of 45°C. (IP64-level resistance is not
The LSM-9506 bench-top model combines a display section and guaranteed for the display unit and the LSM-9506.)
measurement section all in one unit. DIN-size compact panel-mounted display unit
Ultra-high scanning rate 3200 scans/sec (LSM-5200, made-to-order model)
The incorporation of a sixteen-face polygonal mirror and a high- The LSM-5200 display unit is a compact DIN size, allowing it to be
precision motor now makes scanning at 3200 scans per second mounted in a panel so as to be suitable for mounting in a rack, etc.,
possible. This formidable capability is ideal, for example, for taking for use on production lines.
measurements on high-speed production lines or on vibrating Standard I/O output, analog output and
workpieces. RS-232C output interfaces
Certified accuracy over the entire measurement The LSM-5200/6200/6900 has a standard I/O and analog output
range interface to connect it to an operation controller or PLC used on a
The specified high accuracy over the entire measurement range production line. Also, every model has a standard RS-232C interface
is certified by the “Traceability System to the International for connection to personal computers or printers.
Standard” which Mitutoyo, as a leading manufacturer of precision
2
PRINCIPLE Motor
Collimating
lens
Workpiece
Condenser lens
Amplifier
Motor driver
Polygonal
mirror
Photoelectric
Power source Semiconductor element
laser Photoelectric element (receiver)
(Reset signal generation)
MP Motor driving RS
pulse Clock pulse
ROM Segment Edge detection

RAM Counter Gate selection circuit
circuit
Edge detection RS
circuit
CPU
Keyboard RS-232C Analog I/O Foot Expansion

Data display switch slot
A laser beam is directed at a polygonal mirror rotating at high speed in exact synchronism with highly stable pulses from the system clock.
The reflected beam is rotating clockwise as it sweeps across the input surface of a collimating lens but changes direction to be always
horizontal after the lens’ exit surface as it moves, or scans, downward. This horizontal beam enters the measuring space and, with no
workpiece present, reaches a receiver via a condensing lens to produce an output signal. When a simple workpiece (a cylinder, for example)
is put into the measuring space the beam will be interrupted for a time during its sweep and this time, as indicated by clock pulses occurring
while the receiver signal is absent, is proportional to the workpiece dimension in the downward direction.
Each transition between the receiver detecting the beam and then not detecting the beam, or vice versa, is called an ‘edge’ and marks
the start and/or end of measuring sections called ‘segments’, so that the differences in position of these edges define the length of each
segment. The edges and segments generated by a workpiece are numbered sequentially by the instrument and are used when writing
programs to extract the required dimensional data.
INDEX Pages Pages

Applications 4 Display Unit
All Models of Laser Scan Micrometer 6 LSM-5200 Compact (Panel-mount) Type Display Unit 28
Measuring Unit LSM-6200 Multi-function Type Display Unit 29
LSM-902/6900 Ultra-High Accuracy Measuring Unit 8 LSM-5200/6200/6900/9506 Functions 30
LSM-500S Ultra-Fine Wire Measuring Unit 10 LSM-5200/6200/6900/9506 Data I/O Specifications 32
LSM-501S Fine Wire Measuring Unit 12 Optional Accessories for Display Unit
LSM-503S Standard Measuring Unit 14 LSMPAK 34
LSM-506S Wide Range Measuring Unit 16 BCD Interface Unit 34
LSM-512S Ultra-Wide Range Measuring Unit 18 Digimatic Code-out Unit 35
LSM-516S Ultra-Wide Range Measuring Unit 20 Dual-type Add-on Unit 35
LSM-9506 Bench-top Type with Display Unit 22 2nd I/O-Analog Interface Unit 36
Optional Accessories for Measuring Unit BCD/2nd I/O-Analog Interface Cable 37
Calibration Gage Sets 23 Thermal Printer 37
Extension Signal Cables 23 Footswitch 37
Extension Relay Cables 23 Glossary 38
Workstage 23 Precautions
Wire Guiding Pulleys 23 Observe the following precautions 39
Air-screen System 23 Re-assembly after removal from the base 39
Adjustable Workstages 24
3
Applications
On-line measurement of glass Measurement of Measurement of outer diameter and

fiber or fine wire diameter outer diameter of cylinder roundness of cylinder
Diameter
Dia.
Reference
Out of edge
roundness
X- and Y-axis measurement Measurement of thickness Measurement of spacing

of electric cables and fibers of film and sheet of IC chip leads
Reference
edge
Measurement Measurement of laser disk Measurement

of film sheet thickness and magnetic disk head movement of gap between rollers
Reference
edge
Gap
Reference edge
4
Measurement Measurement of outer diameter Measurement
of tape width of optical connector and ferrule of form
Optimal for Inspecting the Outside Diameter of Pin Gages or Plug Gages
The use of world-class laser scan micrometer LSM-902/6900 along with an adjustable workstage allows
high-accuracy measurement inspection of the outside diameter of pin gages or plug gages.
This LSM is also capable of data output to an external device such as a personal computer from the
display unit.
(Measurement data can be stored easily in cells on EXCEL by using the Mitutoyo input tool.)
n Major Specifications
Measuring range: 0.1mm to 25.0mm in diameter
Resolution: 0.01μm
Linearity: ±0.5μm
Repeatability: ±0.05μm
5
ALL MODELS OF LASER SCAN MICROMETER
MEASURING UNITS
Measuring range Model Refer to...
LSM-500S
0.005 - 2mm
(.0002" - .08") Page 10
LSM-501S
0.05 - 10mm
(.002" - .4") Page 12
FDA Class II
LSM-503S
0.3 - 30mm
(.012" - 1.18") Page 14
LSM-506S
1 - 60mm
(.04" - 2.36") Page 16
LSM-512S
1 - 120mm
(.04" - 4.72") Page 18
LSM-516S
1 - 160mm
(.04" - 6.30") Page 20
6
MEASURING UNIT (Factory-set package)
LSM-902/6900
0.1 - 25mm
(.004” - 1.0”) Page 8
MEASURING UNIT WITH INTEGRATED DISPLAY

LSM-9506
0.5 - 60mm
(.02" - 2.36") Pages 22
Measuring unit / integrated-display
model for bench-top use only
DISPLAY UNITS
Type Model Refer to...
LSM-6200
Multi-function
(Power Supply Page 29
100V - 240V AC)
LSM-5200
Compact
(Power Supply Pages 28
+24V DC)
7
MEASURING UNIT
LSM-902/6900
Ultra-High Accuracy Measuring Unit
l Suitable for pin and plug gage measurements.

l Wide measuring range of ø0.1mm to ø25mm
l Provides ultra-high accuracy with a linearity of ±0.5µm over the entire measurement range and ±(0.3+0.1∆D)µm in the narrow range.
l Ultra-high repeatability of ±0.05µm
Pin and plug gage measurements

LSM-902 measuring unit
LSM-6900 display unit
Signal cable (5m) No.02AGN770A is supplied.
SPECIFICATIONS <Measuring unit>

Model LSM-902/6900 Type mm inch/mm
Order No. 100/110V AC 544-495C 544-496C Display 16-digit fluorescent tube (for measurement) &
(Order no. suffix 120V AC 544-495A 544-496A 11-digit fluorescent tube (sub display)
denotes the AC Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent
power cord type 220/230V AC 544-495D 544-496D
equipped.) objects)
240V AC 544-495E 544-496E
Edge designation 1 to 255 edges can be detected
240V AC † 544-495F 544-496F
Averaging times Arithmetical average: per 1 to 2048, moving
<Display unit> average: per 32 to 2048
Acceptable standard of laser IEC (FDA: 544-495A) IEC (FDA: 544-496A) GO/±NG judgment Nominal value ±tolerance setting, upper & lower
Measuring range 0.1 - 25mm (.004" - 1.0") limits setting, multi-limit setting
Resolution (selectable) 0.00001 - 0.01mm (.000001" - .0005") Measurement mode Waiting, single measurement, continuous
Repeatability*1 ±0.05µm (±1.9µinch) measurement
Linearity Entire range ±0.5µm (±20µinch) Statistical calculation Maximum measurement (MAX), minimum
at 20°C*2 measurement (MIN), mean, range (MAX-MIN),
Narrow range ±(0.3+0.1∆D)µm*5 standard deviation (σ)
Positional error*3 ±0.5µm (±20µinch) Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA
Measuring region*4 3x25mm (.12"x.98") Data output (as standard) Via RS-232C and I/O-Analog interfaces
Scanning rate 800 scans/s Functions (See page 16 and 17.)
Laser wavelength 650nm, Visible*6 Operating temperature 0°C - 40°C
Laser scanning speed 56m/s (2200”/s) Operating humidity 35 - 85% RH (with no condensation)
Operating temperature 0°C - 40°C Mass 5kg (11lbs.)
Operating humidity 35 - 85% RH (with no condensation) †
For Australia
Mass Measuring unit: 6.0kg (13.2lbs.), *1: Determined by the value for ±2σ at the measurement of ø25mm workpiece with 1.28sec.
Signal cable: 0.5kg (1.1lbs.) interval (1024-time avarage).
*2: At the center of the measuring region.
*3: An error due to workpiece shift either in the optical axis direction or in the scanning direction.
*4: The area given by "measuring range on the optical axis" x "measuring range in the scanning
direction".
*5: ∆D=Difference in diameter between the master gage and workpiece in mm.
*6: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.5mW)
8
OPTIONAL ACCESSORIES
Dimensions
Unit: mm (inch) 02AGD180
90 (3.54") 15 (.59") Calibration gage set (ø1mm, ø25mm)
50 (1.97")
10.5 (.41")
35 (1.38")
22 (.87")
56 (2.20") 7 (.28")
70 (2.76")
15.5 (.61")
60 (2.36") 60 (2.36")
200 (7.87") 120 (4.72") 100 (3.94")
70 (2.76") min 420 (16.54")

190 (7.48") 70 (2.76") 70 (2.76") 90 (3.54")
74 (2.91") 11 (.43") 3 (.12") 11 (.43")
25 (.98")
70 (2.76")
02AGD270
170 (6.69")
8 (.31")
Workstage
(1.97")
50
5 (.20")
LSM-902 measuring unit
335 (13.19")
Power Supply
100V - 240V AC
125 (4.92")
134 (5.28")
02AGD280
Adjustable Workstage
8.2 (.32")
Approx. 12º
276.4 (10.88")
250 (9.84")
Cable space
80 (3.15")
13 (.51") 121 (4.76")
LSM-6900 disply unit
9
MEASURING UNIT
LSM-500S
Ultra-Fine Wire Measuring Unit
l Permits measurements starting from ø5µm

l Provides ultra-high accuracy with a linearity of ±0.3µm over the entire measurement range (5µm to 2mm).
Ultra-fine wire measurement
SPECIFICATIONS Fiber meaurement

Model LSM-500S
Order No. 544-531 544-532
Acceptable standard of laser JIS IEC, FDA
Measuring range*1 0.005 - 2mm (.0002" - .08")
Resolution (selectable) 0.00001 - 0.01mm (.000001" - .0005")
Repeatability*2 ±0.03µm (±1.1µinch)
Linearity at 20°C*3 ±0.3µm (±12µinch)
Positional error*4 ±0.4µm (±16µinch)
Measuring region*5 1x2mm (.04"x.08")
Scanning rate 3200 scans/s
Laser wavelength 650nm, Visible
Laser scanning speed 76m/s (3000”/s)
Operating temperature 0°C - 40°C
Operating humidity 35 - 85% RH (with no condensation)
Water/Dust protection grade Conforming to IP64*6
Mass Measuring unit: 1.0kg (2.2lbs.),
Signal cable: 0.5kg (1.1lbs.)
*1: If a workpiece is transparent, measurement range will be set to between 0.05mm (.002") to
2mm (.08"). If the workpiece is less than 0.05mm, contact your Mitutoyo office.
If the edge measurement is selected for 1 to 255 edges and each function such as the
automatic workpiece detecting function, the group judgment, odd-fluted cutting tool
measurement, simultaneous measurement, and the dual-type add-on unit that is an optional
accessory for the LSM-6200 display unit are used, ultra-fine wire measurement will be
invalid. In this case the measurement range will be set to between 0.1mm (.004") to 2mm
(.08") as well. LSM-6200 display unit
*2: Determined by the value for ±2σ at the measurement of ø2mm workpiece with 0.32sec. (optional)
interval (1024-time avarage).
*3: At the center of the measuring region (According to Mitutoyo’s specified acceptance
procedure).
*4: An error due to workpiece shift either in the optical axis direction or in the scanning
direction.
direction".
*6: The protection level provided for the interior. If the workpiece or glass of the measuring unit
window is soiled by water or dust, the unit may malfunction.
Note) For ultra-fine wire measurement, following functions are unavailable in combination:
Simultaneous (Dual-program) measurement/1 to 255 edges specification/workpiece/
automatic workpiece detecting/group judgment/odd-fluted cutting tool measurement

(optional)
10
Dimensions
Unit: mm (inch)
17.5 (.69")
ø3.1 hole,
10.5 (.41")
depth 6
M3, depth 6 (x4)
(Measuring
position)
(1.57")
40 14.5 (.57") 9.5 (.37")
(.61")
15.5
11 (.43") 11 (.43")
Measuring
position
Signal cable
(Cable length: 5m)
70 (2.76") min. 103 (4.06") 46 (1.81") 32 Measuring ø3.1 hole,

region depth 6
29.5 (1.16")
Cable space (1.26")
34 (1.34")
Working
distance
2 (.08")
M4, depth 8 (x3)

1 (.04")
90 (3.54")
84 (3.31")
(1.28") (.98")
32.5 25
126 (4.96") 55 (2.17")
181 (7.13")
A
A : Bottom view
02AGD110
Calibration gage set (ø0.1mm, ø2.0mm)
02AGD200
Wire guiding pulley 02AGD220
Air-screen covers
957608 Air cleaner for air-screen covers

02AGN780A Extension signal cable 5m
02AGN780B Extension signal cable 10m
02AGN780C Extension signal cable 15m
11
MEASURING UNIT
LSM-501S
Fine Wire Measuring Unit
l Provides ultra-high accuracy with a linearity of ±0.5µm over the entire measurement range (0.05mm to 10mm)
and ±(0.3+0.1∆D)µm in the narrow range.
Precision shaft measurement
Ferrule Measurement
SPECIFICATIONS
Model LSM-501S
Order No. 544-533 544-534
Measuring range 0.05 - 10mm (.002" - .4")
Linearity Entire range ±0.5µm (±20µinch)
at 20°C*2 Narrow range ±(0.3+0.1∆D)µm
Measuring region*4 2 x 10mm at ø0.05 - 0.1mm
(.08" x .4" at ø.002" - .004")
4 x 10mm at ø0.1 - 10mm
(.16" x .4" at ø.004" - .4")
Laser wavelength 650nm, Visible*5
Mass Emission unit: 0.7kg (1.54lbs.),
Reception unit: 0.4kg (.88lbs.),
Base: 0.3kg (.66lbs.), Signal cable: 0.5kg (1.1lbs.)
*1: Determined by the value for ±2σ at the measurement of ø10mm workpiece with 0.32sec. LSM-6200 display unit
interval (1024-time avarage). (optional)
procedure).
*3: ∆D is the outside diameter difference from the master gage (unit:mm).
direction.
direction".

(optional)
12
Dimensions
50 (1.97") 9.5 9.5 Unit: mm (inch)
ø3.1 hole, depth 6
(Measuring position) (.37") (.37")
18.5 (.73")
22 (.87")
6 (.24") M3 (x8) 10.5
(.41") M4, depth 8 (x3)
ø3.1 hole,
depth 6
42 (1.65")
53 (2.09")
64 (2.52")
(1.18")
30
(1.52")
(.61")
Measuring position
38.5
15.5
40 150 (5.91") 40
(1.57") (1.57") 9.5 (.37")
70 (2.76") min. 230 (9.06") 14.5
(1.59")
40.5
(.57")
Cable space 123 (4.84") 68 (2.68") 39
100 (3.94") max. (1.54") 40 (1.57") ø3.1 hole,
Signal cable depth 6
(Cable 34 (1.34") 34 (1.34") Measuring
length: 5m) region
8 (.31") 8 (.31") M4, depth 8 (x3)
110 (4.33")
4
(.16")
To Reception Unit
84 (3.31")
(Cable length: 0.6m)

104 (4.09")
(2.26")
(.39")
57.5
10
Relay
cable Emission Base
Unit
(.79")
157 (6.18") 73 (2.87")

20
A: Bottom view
(Main unit detached
A from base)
Reception Unit
02AGD210 02AGD400
02AGD120
Wire guiding pulley Adjustable workstage
Calibration gage set (ø0.1mm, ø10mm)
02AGD230
Air-screen covers 02AGD440 Center support*
02AGD270 02AGD450 Adjustable V-block*
Workstage 957608 Air cleaner for air-screen cover
02AGC150A Extension relay cable 1m
*Use with an adjustable workstage.
13
MEASURING UNIT
LSM-503S
Standard Measuring Unit
l General-purpose type with a measurement range of 0.3mm to 30mm.

l Provides high accuracy with a linearity of ±1.0µm over the entire measurement range and ±(0.6+0.1∆D)µm in the narrow range.
l Excellent repeatability of ±0.1µm
Rubber roll
measurement
Dia.
Reference
Out of edge
roundness

Tape width
measurement
SPECIFICATIONS
Model LSM-503S
Order No. 544-535 544-536
Measuring range 0.3 - 30mm (.012" - 1.18")
Linearity Entire range ±1.0µm (±40µinch)
Measuring region*4 10 x 30mm (.4" x 1.18")
Reception unit: 0.6kg (1.32lbs.),
Base: 0.5kg (1.1lbs.), Signal cable: 0.5kg (1.1lbs.)
*1: Determined by the value for ±2 at the measurement of ø30mm workpiece with 0.32sec.
procedure). LSM-6200 display unit
*3: ∆D is the outside diameter difference from the master gage (unit:mm). (optional)
direction.
direction".

(optional)
14
Dimensions
ø3.1 (.12") hole Unit: mm (inch)
18.5 (.73")
50 (1.97")
(Measuring position) M3 (x8) 6 (.24")
22 (.87")
(.41")
10.5
(1.61")
M4, depth 8 (x3)
68 (2.68")
41
(2.09")
(1.65")
For mounting base
53
42
(2.24")
(.61")
57
15.5
202 (7.95") 57 (2.24") 9.5 9.5 ø3.1, depth 6

Signal cable (.37") (.37") (Reference hole)
(Cable length: 5m) 48 259 (10.2") 48 Measuring
(1.89") (1.89") position
70 (2.76") min. 355 (13.98") 14.5 9.5
(.57") (.37")
90 (3.54")
Cable 130 (5.12")
space M4,
350 (13.78") max. depth 8 (x3)
170 (6.69") 80 (3.15") 50 (1.97") 55 (2.17") 42 For mounting
Reception base
8 (.31") 10 (.39") 8 (.31") Unit (1.65")
Emission Unit Measuring ø3.1, depth 6
region
30 (1.18")
(Reference hole)
150 (5.91")
80 (3.15")
57.5 (2.26")
90 (3.54")
110 (4.33")
(.47")
To Reception Unit
12
Relay Base
(.22")
5.5
(.79")
cable
20
95.5 (3.76") 65.5 (2.58") 84.5 (3.33") 54.5 46

(2.15") (1.81") A
250 (9.84") 105 (4.13")
M4, depth 8, A: Bottom view
M4, depth 8, ø3.3 through hole (x3) ø3.3 through hole (x2) (Main unit detached
For mounting side plate (Same in the back) For mounting side plate from base)
(Same in the back)
02AGD130 02AGD490 02AGD270
Calibration gage set (ø1.0mm, ø30mm) Adjustable workstage Workstage
02AGD240
Air-screen covers 02AGD440 Center support*
02AGD450 Adjustable V-block*
02AGC150B Extension relay cable 3m
02AGC150C Extension relay cable 5m
02AGN780D Extension signal cable 20m
15
MEASURING UNIT
LSM-506S
Wide Range Measuring Unit
l General-purpose type with a measurement range of 1mm to 60mm.

l Provides high accuracy with a linearity of ±3µm over the entire measurement range and ±(1.5+0.5∆D)µm in the narrow range.
Mill roll clearance

measurement
Gap
Uneven sheet thickness

measurement
SPECIFICATIONS Reference
edge
Model LSM-506S
Order No. 544-537 544-538
Measuring range 1 - 60mm (.04" - 2.36")
Repeatability*1 ±0.36µm (±14µinch)
Linearity Entire range ±3µm (±120µinch)
Positional error*3 ±4µm (±160µinch)
Measuring region*4 20 x 60mm (.8" x 2.36")
*1: Determined by the value for ±2 at the measurement of ø60mm workpiece with 0.32sec.
*2: At the center of the measuring region (According to Mitutoyo’s specified acceptance LSM-6200 display unit
procedure).
*3: ∆D is the outside diameter difference from the master gage (unit:mm). (optional)
direction.
direction".

(optional)
16
Dimensions
ø3.1 hole 100 (3.94") Unit: mm (inch)
(Measuring 50 (1.97")
18.5 (.73")
position) M3 (x12) 7 (.28")
22
(.87") M5, depth 10 (x3)
(.41")
10.5
(2.48")
For mounting base
63
(1.65")
(2.28")
(2.76")
42
58
70
ø3.1, depth 6
(.61")
9.5 9.5
121 (4.76")
15.5
258 (10.16") 102 (4.02") (Reference hole)

(.37") (.37")
90 (3.54") 360 (14.17") 90 (3.54")
70 (2.76") min. 540 (21.26")

273 (10.75") Measuring position
Signal cable Cable
174.5 (6.87")
space 700 (27.56") max.
(Cable Reception
length: 5m) 185 (7.28") 163 (6.42") 110 (4.33") 82 14.5 9.5
Unit 42 (1.65") M5, depth 10 (x3)
Measuring 8 (.31") (3.23") (.57") (.37") For mounting base
8 (.31") 20
Emission Unit region
(.79")
97 (3.82")
110 (4.33")
60
130 (5.12")
ø3.1, depth 6
66 (2.6")
162 (6.38")
(Reference hole)
12
Base To Reception Unit

(.28")

(.79")
7
20
87 87 168.5 115.5 (4.55") 71

(3.43") (3.43") (6.63") (2.8") A
Relay cable 348 (13.7") 192 (7.56") M5, depth 10,
M5, depth 10, ø4.2 through hole (x2) A: Bottom view
ø4.2 through hole (x3) For mounting side plate (Main unit detached
For mounting side plate (Same in the back) from base)
(Same in the back)
02AGD140 02AGD520 02AGD250
Calibration gage set (ø1.0mm, ø60mm) Adjustable workstage Air-screen covers
02AGD580 Center support*

02AGD590 Adjustable V-block*
02AGD250 Air-screen cover
17
MEASURING UNIT
LSM-512S
Ultra-Wide Range Measuring Unit
l General-purpose type with a wide measurement range of 1mm to 120mm.

X and Y axes simultaneous measurement

for resin pipe
SPECIFICATIONS Rubber roll measurement

Model LSM-512S
Order No. 544-539 544-540
Diameter
Measuring region*4 30 x 120mm at ø1 - 120mm
(1.2" x 4.72" at ø.04" - 4.72")
Laser scanning speed 904m/s (35590"/s)
*1: Determined by the value for ±2σ at the measurement of ø120mm workpiece with 0.32sec.
procedure). (optional)
direction.
direction".

(optional)
18
Dimensions M4 (x8)
200 (7.87")
ø3.1 hole Unit: mm (inch)
100 (3.94") (Measuring position)
(.31")
85 (3.35")
8
M6, depth 12 (x3)
(1.89")
(3.15")
(2.68")
For mounting base
48
80
68
(.75")
19 8 ø3.1 hole, depth 6

19
144 (5.67")
7 (.28") (Reference hole)
18.5 (.73")
(.75") (.31")
312 (12.28") 88
150 (5.91") 400 (15.75") (3.46") 150 (5.91")
Measuring position
70 (2.76") min. 700 (27.56")
272 (10.71") 321 (12.64") 107 Reception
Signal cable Cable Unit 19 8
256 (10.08")
700 (27.56") max. (4.21")
(Cable space (.75") (.31")
length: 5m) 48 (1.89")
Emission 190 (7.48") 131 (5.16") M6, depth 12 (x3)
Unit 9 (.35") Measuring 9 (.35") For mounting base
30
region
(1.18")
146 (5.75")
ø3.1 hole, depth 6

120 (4.72")
146 (5.75")
162 (6.38")
192 (7.56")
84 (3.31")
(Reference hole)
192 (7.56") To Reception Unit

(.35")
(.35")
Base
(1.18")
9
96 96 263 137 52
30
Relay cable
(3.78") (3.78") (10.35") (5.39") (2.05") A
462 (18.19") 238 (9.37")
M6, depth 12, A: Bottom view
M6, depth 12, ø5 through hole (x3) ø5 through hole (x3) (Main unit detached
For mounting side plate (Same in the back) For mounting side plate from base)
(Same in the back)
02AGD260
02AGD150
Air blow cover
Calibration gage set
(ø20mm, ø120mm)

19
MEASURING UNIT
LSM-516S
Ultra-Wide Range Measuring Unit
l General-purpose type with a wide measurement range of 1mm to 160mm.

X and Y axes simultaneous measurement

for resin pipe
SPECIFICATIONS Roll measurement

Model LSM-516S Diameter
Order No. 544-541 544-542
Measuring region*4 40 x 160mm at ø1 - 160mm
(1.57" x 6.30" at ø.04" - 6.30")
*1: Determined by the value for ±2σ at the measurement of ø160mm workpiece with 0.32sec.
procedure). (optional)
direction.
direction".

(optional)
20
Dimensions 200 ø3.1 hole (Measuring position)
Unit: mm (inch)
100 8-M4
20.5
8
100
120
M6, depth 12 (x3)
74
For mounting base
37
9 10
ø3 hole, depth 6
136
(Reference hole)
350 250
13
170 600 110 41 8
70 min. 880
320 400 160
400
Cable
space
200 200* Measuring
position
200
8.7 40 8.7 41 8
Measuring
region
88
208
160
208
224
249
10
218
M6, depth 12 (x3)

For mounting base
9
9
25
100 107 306 206 87.5

A
520 360
3-M6, depth 12, ø5 through hole A: Bottom view
3-M6, depth 12, ø5 through hole For mounting side plate (Main unit detached
For mounting side plate (Same in the back) (Same in the back) from base)
* Can be extended to 600mm
02AGD300 02AGC150B Extension relay cable 3m
Calibration gage set 02AGC150C Extension relay cable 5m
(ø20mm, ø160mm) 02AGN780A Extension signal cable 5m
21
MEASURING UNIT
LSM-9506
Bench-top Type with Display Unit
l With a design that integrates the display section and measuring section into one unit,
this instrument is best suited for making bench-top measurements in an inspection room.
l A statistical calculation function is provided.
l Standard RS-232C and SPC output interfaces are provided as standard.
Dimensions
150 (5.9") 10 (.39")
100 (3.94")
ø3.1 (Measurement position) 50 (1.97")
10 (.39")
80 (3.15")
60 (2.36")
22
Cable
space
12-M3
(.87")
Unit: mm (inch)
100 (3.94")
120 (4.72")
180 (7.07")
83 97
(3.27") (3.82")
382 (15.04") 180 (7.09") 85
(3.35")
647 (25.47")
365 (14.37") 100 100 82 40 (1.57") 52.5 (2.07")
(3.94") (3.94") (3.23") 25 (.9
11 (.43") 7")
10 8 (.31")
(.39")
60 (2.36")
202 (8.39")
213 (8.39")
(3.86")
8 (.31")
98
Measuring
region
(.43") (2.05")
52
172 (6.77") 13.5 (.53")

(.43")
11
11
SPECIFICATIONS OPTIONAL ACCESSORIES

Model LSM-9506
Order No. 100/110V AC 544-115C 544-116C 02AGD140
Calibration gage set (ø1.0mm, ø60mm)
(Order no. suffix 120V AC 544-115A 544-116A
denotes the AC
equipped.)
240V AC 544-115E 544-116E
240V AC † 544-115F 544-116F
Type mm inch/mm
Measuring range 0.5 - 60mm .02" - 2.36"/0.5 - 60mm
Resolution (selectable) 0.00005 - 0.1mm .000002" - .005"/0.00005 - 0.1mm
Repeatability*1 ±0.6µm (±24μinch)
Linearity at 20°C*2 ±2.5µm (±100μinch)
Positional error*3 In the optical axis direction: ±2.5µm (±100μinch) 02AGD680 Adjustable Workstage
In the scanning direction: ±(2.0+L/10µm) (±(.00008+L/10000)") 02AGD580 Center support*
Measuring region*4 10 x 60mm (.4" x 2.36") 02AGD590 Adjustable V-block*
Scanning rate 1600 scans/s 936937 SPC output cable (1m)
Laser wavelength 650nm, Visible*5 937179T Footswitch
Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA †For Australia
Data output Via RS-232C interface, SPC (Digimatic) output port *1: Determined by the value for ±2σ at the measurement
of ø60mm workpiece with 0.32sec. interval (512-time
Functions (See page 30.) avarage).
Operating temperature 0°C - 45°C *2: At the center of the measuring region (According to
Mitutoyo’s specified acceptance procedure).
Operating humidity 35 - 85% RH (with no condensation) *3: An error due to workpiece shift either in the optical axis
direction or in the scanning direction.
Mass 13kg (28.6lbs.) *4: The area given by "measuring range on the optical axis" x
"measuring range in the scanning direction".
22
MEASURING UNIT
Optional Accessories
Calibration Gage Sets Workstage

• The calibration gage sets are made up of precision disks, cylinders or •Aids shaft measurement by providing a V-block mounting and an up/down
wires used for calibrating Laser Scan Micrometers. Each gauge that may adjustment mechanism.
be measured in alternate positions is marked at the position where the Order No. Application
calibration measurement was made. 02AGD270 LSM-501S
LSM-503S
LSM-902/6900
Order No. Application Components

02AGD110 LSM-500S ø0.1mm gage (958200) Gage stand (02AGD111) Wire Guiding Pulleys
ø2mm gage (958202) Set case (958203)
ø0.1mm gage (958200) Gage stand (02AGD121)
• This jig is for guiding thin filaments, such as fine magnet wire or optical
02AGD120 LSM-501S fiber, so that a stable measurement of the outside diameter can be made.
ø10mm gage (229317) Set case (958203)
ø1mm gage (02AGD920)
02AGD180 LSM-902 ø25mm gage (02AGD963)
ø1mm gage (02AGD920) Gage stand (02AGD131)
02AGD130 LSM-503S ø30mm gage (02AGD961) Set case (02AGD980)
02AGD140 LSM-506S ø60mm gage (02AGD962) Set case (02AGD980)
ø20mm gage (229730) Gage stand (02AGD151)
02AGD150 LSM-512S ø120mm gage (234072) Set case (02AGD990)
ø20mm gage (229730) Gage stand (02AGM320)
02AGM300 LSM-516S ø160mm gage (02AGM303) Set case (02AGM310)
02AGD170 LSM-9506 ø60mm gage (02AGD962) Set case (02AGD970)
*Not available for LSM-902
Extension Signal Cables

• Used to extend the supplied signal cable if the measuring unit and display Order No. Application Maximum measuring dia.
unit need to be placed further apart from one another. 02AGD200 LSM-500S 1.6mm (.063")
02AGD210 LSM-501S 2mm (.079")
Extension Relay Cables* Note: Use the calibration gage set (02AGD110) for both types of wire guiding pulley.
• Used to extend the supplied relay cable if the emission unit and reception
unit need to be placed further apart from one another.
Signal Cable (5m) Air-Screen System
Display Emission Reception
Unit Unit Unit •If using your LSMs in a smoky or dusty environment, an air-screen system
Extension
Relay Cable (1.4m*)
consisting of two covers per unit and a central air cleaner/regulator can be
Signal Cable
*0.6m for LSM-501S used to help prevent the emission/reception windows from being soiled.
Extension Relay Cable Air cleaner/regulator: 957608

Air-screen covers
Extension signal cables Extension relay cables Order No. Application
Order No. Cable length Order No. Cable length 02AGD220 LSM-500S 6 pcs.*
02AGN780A 5m 02AGC150A 1m 02AGD230 LSM-501S 6 pcs.*
02AGN780B 10m 02AGC150B 3m 02AGD240 LSM-503S 3 pcs.*
02AGN780C 15m 02AGC150C 5m 02AGD250 LSM-506S 1 pc.*
02AGN780D 20m 02AGD260 LSM-512S 1 pc.*
Note 1: The maximum length of the LSM-500S/501S signal cable is 20m, and that of the relay * No. of pcs. concurrently usable with one
cable is 2m. The maximum length of the signal and relay cables of the air cleaner/regulator.
LSM-503S/506S/512S/516S should be 30m or less and 5m or less, respectively. Note: Air tube (length of 5m and outside
Note 2: The total length of signal and relay cables should not be more than 32m. diameter of 6mm) is supplied for the
Note 3: Not available for the LSM-902/6900. air-screen covers.
23
MEASURING UNIT
Optional Accessories for Laser Scan Micrometer

Adjustable Workstages
l Aids in measuring workpiece diameter by means of up/down and right/left slide adjustments.
l Optimum for quality control of precision shafts, rollers, pin gages, etc.
For LSM-902/6900
Unit: mm (inch)
range 22.5 (.88")

From center of
From center of measuring
measuring
62 (2.44")
Sliding table
range 35 (1.37)
(1.96")
Overall travel 315 (12.40")
50
(including horizontal
adjustment 130 (5.11))
(1.08")
Horizontal clamp
27.5
180 (7.08")
LSM-902 Up/Down adjustment wheel
(2.28") (5.03")
SPECIFICATIONS
127.8
Vertical adjustment
Order No. 02AGD280
58
47 (1.85")
Application LSM-902
From center of measuring
Horizontal adjustment 130mm (5.12")
range 70 (2.75")
From center of
range 60 (2.36)
Vertical adjustment 47mm (18.50")
measuring
Maximum table loading 0.5kg (1.1lbs.)
Mass 0.8kg (1.8lbs.)
•V-block (02AGD420) x 2pcs.
Standard accessories •Workpiece stop (02AGD430)
For LSM-501S
Unit: mm (inch)
Sliding table
Horizontal
clamp Form center of
measuring range
140 (5.51")
55 (2.17")
18.5 (1.2")
Base
50 (x2pcs.)
SPECIFICATIONS Overall travel 315 (12.40")
(including horizontal (1.97") 26 (1.02")
adjustment 130 (5.11)) 230 (9.06")
Order No. 02AGD400 Up/Down adjustment wheel
180 (7.09") 34 (1.34")
Application LSM-501S
Emission Unit From center of
Horizontal adjustment 130mm (5.12") measuring range
138.8 (5.46")
144.8 (5.7")
Vertical adjustment 32mm (1.26")

(2.26")
57.5

Vertical adjustment
32 (1.26")
Mass 1.0kg (2.2lbs.) Reception

Unit
•V-block (02AGD420) x 2pcs. 40 150 (5.91") 40
Standard accessories
6 (.24")
•Workpiece stop (02AGD430) (1.57") Base (1.57")
24
For LSM-503S
Unit: mm (inch)
460 (18.11")
Sliding table
180 (7.09")
Horizontal clamp Vertical clamp
Overall travel 505 (19.88")
(including horizontal adjustment 200 (7.87")) 26 (1.02")/50 (1.97")*
From center of Up/Down
300 (11.81") measuring range
adjustment wheel
Emission Unit
SPECIFICATIONS
167 (6.57")
178 (7.01")
(3.84")
adjustment
97.5
Order No. 02AGD490
Vertical
Application LSM-503S
300 (11.81") Reception Unit
Horizontal adjustment 200mm (7.87") 90
(43")
11
(3.54") From center of *02AGD520

Vertical adjustment 35mm (1.38") measuring range

Standard accessories •Workpiece stop (02AGD430)
Standard Accessories
V-blocks Workpiece stop
øD Workpiece having
ø10mm (.39") co-axial steps
Calibration gage
mounting hole ød
6mm
(1.38")
(.24")
35
H
20 27
L2 L1 (.78") (1.06")
Unit: mm (inch)
Order No. 02AGD420 Order No. 02AGD430
øD max. 30 (1.18")* Mass 0.05kg
ød max. 30 (1.18")*
D - d max. 25 (.98")**
H 25.5 (1")
L1 27 (1.06")
L2 20 (.79")
Mass 0.03kg
Calibration gages to be used • ø0.1mm • ø1mm • ø10mm • ø30mm
*10 (.39") for LSM-501S **25 (.98") for LSM-902
25
MEASURING UNIT
Optional Accessories for Laser Scan Micrometer

Adjustable Workstages
l Aids in measuring workpiece diameter by means of up/down and right/left slide adjustments.
l Optimum for quality control of precision shafts, rollers, pin gages, etc.
For LSM-506S
Unit: mm (inch)
640 (25.2")
Sliding table
200 (7.87")
Horizontal clamp Vertical clamp
Overall travel 745 (29.33") 26 (1.02")/50 (1.97")*
(including horizontal adjustment 300 (11.81"))
From center of
440 (17.32") measuring range Up/Down
adjustment wheel
SPECIFICATIONS Emission Unit
202 (7.95")
213 (8.39")
Order No. 02AGD520
(4.57")
adjustment
116
Application LSM-506S Vertical
Horizontal adjustment 300mm (11.81") 398 (15.67") Reception Unit
Vertical adjustment 45mm (1.77") 100
(43")
11
(3.94") From center of *02AGD520

Maximum table loading 5.0kg (11lbs.) measuring range

Standard accessories •V-block (02AGD560)
•V-block (02AGD570)
For LSM-9506
Unit: mm (inch)
180 (7.09")
120 (4.72")
Sliding table
SPECIFICATIONS
Order No. 02AGD370 02AGD680
Application LSM-9506 Overall travel 545 (21.46")/
745 (29.33")* Vertical
Horizontal adjustment 200mm (7.87") 300mm (11.81") (Horizontal adjustment 200 (7.87")/ Horizontal clamp clamp
300 (11.81")*)
Vertical adjustment 45mm (1.77") From center
340 (13.39")/440 (17.32")*
Maximum table loading 2.0kg (4.4lbs.) 5.0kg (11lbs.) of measuring Up/Down adjustment
adjustment
range
106 (4.17")
wheel
Vertical
LSM-9506
Mass 3.8kg (8.4lbs.) 4.8kg (10.56lbs.)
(7.56")

192
Standard accessories •V-block (02AGD560)

•V-block (02AGD570)
60 (2.36")
83 (3.27")
*02AGD680
26
Standard Accessories
V-blocks Unit: mm (inch)
Order No. 02AGD550 02AGD560 02AGD570
øD Workpiece having
ø10mm (.39") co-axial steps øD max. 60 (2.36") 60 (2.36") 60 (2.36")
Calibration gage
mounting hole ød ød max. 60 (2.36") 30 (1.18") 30 (1.18")
6mm
(.24") D - d max. 30 (1.18") 50 (1.97") 50 (1.97")
H 39 (1.54") 45 (1.77") 45 (1.77")
H
L1 50 (1.97") 50 (1.97") 50 (1.97")

L2 30 (1.18") 30 (1.18") 30 (1.18")
L2 L1 Mass 0.12kg 0.15kg 0.15kg
Calibration • ø10mm • ø10mm • ø1mm
gages to be • ø30mm • ø30mm • ø10mm
used • ø60mm • ø30mm
Adjustable V-blocks Center Supports
• Optional accessories for adjustable workstages. • Optional accessories for adjustable workstages.
L3
L4 A (Horizontal stroke)
Up/down wheel
W
W
H
H1
A (Vertical stroke)
H2
Sliding knob
H3
W L L2 Fixed support L1 Adjustable support
Unit: mm (inch) Unit: mm (inch) Unit: mm (inch)

Order No. 02AGD450 02AGD590 Order No. 02AGD440 02AGD580 Order No. 02AGD440 02AGD580
H 78.8 (3.1") 105.8 (4.17") H1 45 (1.77") 65 (2.56") L2 20 (.79") 40 (1.57")
L 36 (1.42") 40 (1.57") H2 40 (1.57") 60 (2.36") L3 66 (2.60") 106.5 (4.19")
W 27 (1.06") 50 (1.97") H3 30 (1.18") 45 (1.77") L4 32 (1.26") 55 (2.17")
L1 25 (.98") 50 (1.97") W 27 (1.06") 50 (1.97")
SPECIFICATIONS SPECIFICATIONS
Order No. 02AGD450 02AGD590 Order No. 02AGD440 02AGD580
Application For adjustable workstage For adjustable workstage Application For adjustable workstage For adjustable workstage
LSM-501S (02AGD400), LSM-506S (02AGD520), LSM-501S (02AGD400), LSM-506S (02AGD520),
For adjustable workstage For adjustable workstage For adjustable workstage For adjustable workstage
LSM-902 (02AGD280), LSM-9506 (02AGD680) LSM-902 (02AGD280), LSM-9506 (02AGD680)
For adjustable workstage For adjustable workstage
LSM-503S (02AGD490) LSM-503S (02AGD490)
Vertical adjustment (A) 20mm (.79") 35mm (1.38") Point angle 60° 60°
Maximum workpiece 30mm (1.18") 60mm (2.36") Maximum workpiece 110mm (4.33") 315mm (12.4")
diameter length on 02AGD400/02AGD280 on 02AGD520
Mass 0.1kg 0.2kg 230mm (9.06") on 02AGD490 on 02AGD680
Horizontal adjustment (A) 5mm (.2") or more 10mm (.39") or more
Center point clamping 1.1kgf 3.2kgf
force
Mass 0.18kg (.4lbs.) 0.85kg (1.87lbs.)
27
DISPLAY UNIT
LSM-5200
Compact (Panel-mount) Type Display Unit
l Panel-mount type (with dimensions conforming to DIN standards) allows easy system integration.
l Capable of calculating mean, maximum, minimum, and range (maximum - minimum).
l Segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be selected.
l USB2.0, RS-232C and I/O-Analog interfaces are provided as standard.
l Arithmetical average or moving average can be selected.
l GO/±NG judgment function.
Dimensions 144 (5.67") 197.1 (7.76") 20.5 (.81")

Unit: mm (inch)
72 (2.83")
Front view Side view

(.17")
4.4
Power Supply
24V DC
(2.68")
68
*240.3+(t-0.6) [9.46"+(t-.024")]
138 (5.43")
Rear view
0 )
(2.68 +.028"
68 +0.7
0
140.4 (5.53") 138 +10 (5.43 +.039"

0 )
Support for mounting plate

Dimensions of panel mounting slot
(DIN 43 700-144x76)
Bottom view
*t= Panel thickness Panel thickness: 1.6mm t 6mm
SPECIFICATIONS
Model LSM-5200
Order No. 544-047
Display 9-digit LED (for measurement) & 8-digit LED (sub-display)
Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects)
Edge designation 1 to 255 edges can be detected*1
Averaging times*2 Arithmetical average: per 1 to 2048, moving average: per 32 to 2048 (when LSM-500S is used, arithmetical average is per 16 to 2048)
GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting
Measurement mode Waiting, single measurement, continuous measurement
Statistical calculation Available when connecting an external PC via the RS-232C or USB interfaces
Power supply +24V DC ±10%, 1A
Data output USB2.0, RS-232C and I/O-Analog interfaces
Functions (See page 30.)
Others Odd-fluted cutting tool measurement, simultaneous measurement, reference value setting, sample setting, selection of number of
blank-out digits, transparent object measurement*2, automatic workpiece detection (dimension/position detection)*1, abnormal data
elimination, mastering, statistical processing (with USB, RS-232C), output timer, automatic measurement when edge is specified, and
preset (restrictions are imposed on some functions when used in combination).
*1: If the edge measurement is selected for 1 to 255 edges and each function such as the automatic workpiece detecting function, the group judgment, odd-fluted cutting tool measurement,
simultaneous measurement are used in LSM-500S, ultra-fine wire measurement will be invalid. In this case the measurement range is between 0.05mm (.002") to 2mm (.08").
*2: Measurement range will be set to between 0.05mm (.002") to 2mm (.08") when LSM-500S is connected.
Note1: Can not be connected to the measuring unit of old models (LSM-500, LSM-500H, etc.).
Note2: Can not be connected to the LSM-902.
Note3: When USB communication is performed with PC, the dedicated device driver is required.
28
DISPLAY UNIT
LSM-6200
Multi-function Type Display Unit
l With a dual-display design setup values can be continuously monitored. Also, two measurement
value items can be displayed on the sub-display with the simultaneous measurement function.
l Either segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be
selected.
l RS-232C and I/O-Analog interfaces are provided as standard.
l A statistical calculation function and abnormal data eliminating function are provided.
335 (13.19")
Dimensions Unit: mm (inch)
125 (4.92")
134 (5.28")
8.2 (.32")
Approx. 12º
Power Supply
100V - 240V AC
276.4 (10.88")
250 (9.84")
80 (3.15")
Cable
space
13 (.51") 121 (4.76")
SPECIFICATIONS
Model LSM-6200
Order No. 100/110V AC 544-071C 544-072C
(Order no. suffix 120V AC 544-071A 544-072A
denotes the AC
equipped.)
240V AC 544-071E 544-072E
240V AC † 544-071F 544-072F
Type mm inch/mm
Display 16-digit fluorescent tube (for measurement) & 11-digit fluorescent tube (sub-display)
Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects)
Edge designation 1 to 255 edges can be detected*1
Averaging times*2 Arithmetical average: per 1 to 2048, moving average: per 32 to 2048
GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting, multi-limit setting
Measurement mode Waiting, single measurement, continuous measurement
Statistical calculation Maximum measurement (MAX), minimum measurement (MIN), mean, range (MAX-MIN), standard deviation (σ)
Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA
Data output (as standard) Via RS-232C and I/O-Analog interfaces
Functions (See page 30.)
Mass 5kg (11lbs.)
Others Odd-fluted cutting tool measurement, simultaneous measurement, reference value setting, sample setting, selection of number of blank-out
digits, transparent object measurement*2, automatic workpiece detection (dimension/position detection)*1, abnormal data elimination,
mastering, statistical processing, output timer, automatic measurement when edge is specified, SHL changeable, group judgment, buzzer,
zeroset/offset, and dual measurement as optional (restrictions are imposed on some functions when used in combination).
†For Australia
*1: If the edge measurement is selected for 1 to 255 edges and each function such as the automatic workpiece detecting function, the group judgment, odd-fluted cutting tool measurement,
simultaneous measurement, and the dual-type add-on unit that is an optional accessory for the LSM-6200 display unit are used in LSM-500S, ultra-fine wire measurement will be invalid. In this
case the measurement range is between 0.1mm (.004") to 2mm (.08").
*2: Measurement range will be set to between 0.05mm (.002") to 2mm (.08") when LSM-500S is connected.
Note1: Can not be connected to the measuring unit of old models (LSM-500, LSM-500H, etc.). Note2: Can not be connected to the LSM-902.
29
DISPLAY UNIT
LSM-5200/6200/6900/9506 Functions
Measuring Setup Memory Arithmetical Average/Moving Average

The measuring setup can be registered as a program and saved (LSM-6200: Arithmetical/moving average modes are provided to obtain the average
100 programs, LSM-6900: 10 programs, LSM-5200: 1 program). These of measurement values. On this type of LSM either of them can be
programs can be recalled with a single operation. specified before starting measurement. In the arithmetical average mode,
the number of scans over which to take an averaging can be set at one
Multiple Calibration Data Memory Function of twelve steps between 2 (0.64ms) and 2048 (0.64sec). In the moving
average mode the number of scans can be set at one of seven steps
This function allows storage of 10 types of calibration data. In this function
between 32 (0.01sec) and 2048 (0.64sec), and the measurement value
mode, up to 10 sets of 10 programs are available in hand.
will be updated every sixteen scans on and after the second measurement,
• 10 programs (a piece of calibration data) X 10 sets
irrespective of the specified number of scans for averaging. The latter mode
* LSM-6200 can only support this function.
is suitable for judging the trend in the diameter or width of an endless
workpiece such as wire or tape from a measurement that requires a long
period.
Drill/Endmill (odd number flute) diameter

measurement* *Only for LSM-6900 Measurement using
The diameter of drills or endmills that have an odd number of flutes can be Segment Specification
measured by using the max/min value function. The following conventions are
* LSM-6200 can only support this function. used to set up to the maximum • Measurement of spacing of two
of seven segments. However, if parallel pins (pitch measurement)
the transparent object measuring Pitch = ((Seg.2+Seg.4)/2)+Seg.3
Reference bar SEG1
(Min.) mode is set, no more than three
SEG1+2 segments can be set at one time. Workpiece 1
(Max.) Seg.1
Seg.1 Seg.2
Odd number flute tool D Seg.2 Seg.3
Seg.3 Seg.4
Seg.4 Seg.5
D= [SEG1+2 (Max.)] - [SEG1 (Min.)] Seg.5
Seg.6 Workpiece 2
Seg.7
Automatic Workpiece Detection • The Runout of a revolving workpiece can
be obtained by observing the variation
This function automatically starts measurement when a workpiece in Seg.1 which is measured against a
stationary reference pin.
advances into the specified measuring area.
• The outside diameter of a wire or cylindrical
workpiece can be measured by using
Preset/Offset Seg.2. Rotation
Movement
Sets the currently displayed measurement value to zero or a specified Seg.1 due to Runout
numeric value. This is useful, for example, if a difference in the diameters of Seg.2
a reference gage and a workpiece is to be allowed for in calibration, or if a Reference pin
dimension of a workpiece that exceeds the measurement range of the LSM
is to be measured. • If dimensions in both X and Y directions
(min. distance of X/Y scanning section:
• The outside diameter of a large workpiece 10mm) are measured through dual-unit
Mastering can be measured by using Seg.1 and Seg.5
in a dual-unit configuration. (only with
measurement, use Seg.2 and Seg.6 (only
with LSM-6200).
For continuous processing of high-precision workpieces, fine-adjusting the LSM-6200).
preset or offset value is called mastering. By specifying a mastering value Seg.1
X Y
the total correction will be (zero-set/offset value) + (±mastering value). If
a positive mastering value is specified, the displayed value for a workpiece D
diameter measurement will be greater than the actual value: if a negative
Se g.2
Se g.5
Seg.5
value is specified, the displayed value will be smaller than the actual value.
g.1
Se g.3
Se
Se g.6
Se
g.7
Sample Measurement
On a sample measurement the number of measurements will be defined (in Automatic Measurement using Laser scanning direction
Edge 1
the range of 2 to 999) in advance. From this sample measurement various Edges
calculation results (mean, maximum, minimum, and range) can be derived. The edges created by scanning a workpiece can Pin 1
Edge 2
Edge 3
These measurements can be used for runout measurements on a revolving be used to program an LSM. A maximum of 127 Edge 4
workpiece and simplified cylindricity measurements. workpiece features, and 127 of the spaces between Pin 2
Edge 5
these features, can be used which involves a total of Edge 6
Pin 3
255 edges. This is most useful for measuring such Edge 7
things as IC chip leads or connector pins that are Pin 126

Edge 253
approximately equally spaced. This method cannot Edge 254
be applied to transparent objects. Pin 127

Edge 255
Edge 256
30
External trigger signal input* *Not available for LSM-5200 Data Output
By supplying a contact signal to the footswitch connector at the rear panel Every model has a standard RS-232C interface unit, allowing data to be
of the LSM-6200/6900/9506, the measurement can be triggered. output to an external PC or printer.
The LSM-5200/6200 has the standard I/O-Analog output interface that
Abnormal Data Elimination allows the LSM to be connected to a sequencer, etc. The SPC (Digimatic
If a piece of data significantly exceeds the tolerance limit because the Code) output interface is standard with the LSM-9506, allowing for easy
workpiece or measuring unit is contaminated by a water droplet, oil construction of a quality control system. With the LSM-6200 there are
droplet, or dust, the piece of data will be automatically removed by this additional means of data output, including SPC, BCD, and GP-IB output
function. interfaces, which can be incorporated.
Data Output Interval Setting Multi-Limit Judgment* *Not available for LSM-5200
By setting an interval (between 1 and 999 seconds) to continuous In addition to +NG, GO, and -NG judgment criteria limit values from Limit
measurement in advance, data output will take place at each specified 1 to Limit 6 can also be set. If an optional 2nd I/O-Analog interface unit
period of time. (02AGC880) is used with the LSM-6200/6900/9506, seven-step judgment
signals can be output to external devices to support GO/NG judgment.
Statistical Calculation +NG
Limit 6
With this function, multiple measurements OK5
Limit 5
are taken from the same kind of workpiece, OK4
Limit 4
statistical values are calculated from the OK3
measurement results and quality evaluation is A A Limit 3
OK2
executed for each lot. OK1
Limit 2
Limit 1
-NG
• Example of measuring a stepped cylinder
using the statistical calculation function.
B B
-0 .1

5
6-0 0.+10
01
7.01+50
-0.
+
0h-0+0
Simultaneous (Dual-program) Measurement*

A 6ø
ø01h7
ø
ø1
A
It is possible to measure two items simultaneously with one Laser Scan

-0. 0
1
12-0+.10+
B
B
Micrometer unit, and to output the data. This function can be used to
C 1ø2
ø
C C simultaneously measure the outside diameter and runout of a bar that is

2
C
01
-01.20
7.0 +
5h -0+0
rotating, or to measure the outside diameters of two cylinders or wires at

D 5øh7
the same time.

D ø
Measuring procedure: Measure the

dimensions numbered D D
A to D , perform tolerance
judgment, and statistically process
the resulting data for every ten
samples defined as one lot.
Restrictions Associated with Particular Combinations of Functions

Edge specification Transpar- Ultra-fine Odd-fluted
Automatic Abnormal Sample cutting Group
Combinations of Functions Manual Automatic ent object wire workpiece data measure- tool Moving judg-
measure- measure- measure- measure- detection elimination ment measure- average ment***
ment ment ment ment* ment**
Edge Manual measurement — — — l l l — l l
specification Automatic measurement — — — l — — — — —
Transparent object measurement — — l l l l l l l
Ultra-fine wire measurement* — — l — l l — l l
Automatic workpiece detection l l l — l l — — l
Abnormal data elimination l — l l l l l l l
Sample measurement l — l l l l l l l
Odd-fluted cutting tool measurement** — — ● — — ● ● — l
Moving average l — l l — l l — —
Group judgment*** l — l l l l l l —
l: Permitted combination, —: Combination that is not permitted Note1: The number of scans will be limited to between 16 and 2048 if the ultra-fine wire measurement function is on.
*Function that is not provided for LSM-9506 Note2: The number of scans will be limited to between 32 and 2048 for the moving averages.
**Function that is only provided for LSM-6200/5200. Note3: Segment setting will be limited to between 1 and 3 for the transparent object measurement.
***Function that is only provided for LSM-6200/6900.
31
DISPLAY UNIT
LSM-5200/6200/6900/9506 Data I/O Specifications
RS-232C Interface
Allows the LSM to communicate with external devices via RS-232C Connections
(conforming to the EIA standard) serial signals. Depending on the basic
(1) Connecting the RS-232C interface to a device specified as a terminal (DTE)
setup this interface can be used as a printer port.
Example 1: Flow control method (handshake method controlled by
Pin assignment of the connector CTS, DSR, DTR, and RTS signals)
Matching plug: D-sub 9pin (female) PC (PC-AT compatible) LSM-5200/6100/6900/9506
specified as a terminal (DTE) specified as a terminal (DTE)
1 5 9 6
Signal No. of pin No. of pin Signal
DCD 1 1
RxD 2 2 RxD
6 9 5 1 TxD 3 3 TxD
DTR 4 4 DTR
LSM-6200/6900/9506 LSM-5200 SG 5 5 SG
DSR 6 6 DSR
RTS 7 7 RTS
CTS 8 8 CTS
RI 9 9
Communication specifications D-sub (9-pin) D-sub (9-pin)
Definition of device DTE definition on the side of LSM Example 2: Flow control method (handshake method controlled
Data transmission method All-duplex transmission by CTS, DSR, DTR, and RTS signals)
Syncronizing method Start-stop system PC (PC-9801) LSM-5200/6100/6900/9506
specified as a terminal (DTE) specified as a terminal (DTE)
Data transmission 6200 4800, 9600, 19200, 38400bps Signal No. of pin No. of pin Signal
speed 5200, 6900 1200, 2400, 4800, 9600, 19200bps FC 1 1
Transmission code ASCII TxD 2 2 RxD
RxD 3 3 TxD
Data length 7 or 8 bits RTS 4 4 DTR
Data Start bit 1 bit CTS 5 5 SG
arrangement
Parity check Non, odd or even DSR 6 6 DSR
SG 7 7 RTS
Delimiter CR+LF, CR, LF DCD 8 8 CTS
DTR 20 9
D-sub (25-pin) D-sub (9-pin)
Commands Example 3: 3-Wire method (teletype protocol using TxD, RxD and SG)
Various external commands, including those for setting measuring
conditions, setting the measurement mode, starting measurement, PC (PC-AT compatible) LSM-5200/6100/6900/9506
and requesting statistical calculation, are supported. This allows the specified as a terminal (DTE) specified as a terminal (DTE)
user to control the LSM from an external unit (e.g. PC) for customized Signal No. of pin No. of pin Signal
measurements. DCD 1 1
RxD 2 2 RxD
TxD 3 3 TxD
DTR 4 4 DTR
SG 5 5 SG
DSR 6 6 DSR
RTS 7 7 RTS
CTS 8 8 CTS
RI 9 9
(2) Connecting the RS-232C interface to a device specified as a modem (DCE)
Example 1: Flow control method (handshake method controlled by

CTS, DSR, DTR, and RTS signals)
Device specified LSM-5100/6100/6900/9506
as a modem (DCE) specified as a terminal (DTE)
Signal No. of pin No. of pin Signal
DCD 1 1
RxD 2 2 RxD
TxD 3 3 TxD
DTR 4 4 DTR
SG 5 5 SG
DSR 6 6 DSR
RTS 7 7 RTS
CTS 8 8 CTS
RI 9 9
32
I/O-Analog Interface*
Used to communicate with a PC, programmable controller, or relay circuitry (2) Output circuit
by means of sequential signals. It is also capable of producing an analog 1. Control signal output
voltage output that may be used for feedback control and/or continuous 51 Output signal
recording of workpiece dimension deviation. If the optional second I/O- (GO, -NG, +NG, STS)
Analog Interface is connected, this I/O-Analog Interface becomes invalid.
External view of the connector GND
• Maximum rating of the output transistor is 30V, 50mA.

A1 A6
2. Analog signal output
560
ALG
0V
B1 B6
• The output voltage range is ±5V.
Pin assignment (of LSM-6200/6900) • The accuracy of the analog voltage output is 0.2% of full-scale range.
Terminal Signal Function I/O • This analog output should be connected to a device that has an input
A1 FG Frame ground (Used for connecting the — impedance of 1MΩ or greater. If the input impedance is lower than
shield conductor of I/O signal cables) this value, the output accuracy will be reduced due to the internal
A2 STS Output of measurement condition OUT resistance of 560Ω.
(Goes high in the event of “Err-0”)
A3 GO GO/NG judgment result output (GO) OUT
(Can be changed to strobe signal (STB) or
measurement in-progress signal (ACK)output
A4 +NG
by the basic setup)
GO/NG judgment result output (+NG) OUT
Remote Interlock Connector
A5 -NG GO/NG judgment result output (-NG) OUT The Remote Interlock Connector is provided as a means of turning the laser
A6 GND Digital ground (Common ground terminal of both output — beam on and off from a remote location. Since the supplied short-circuit
(A2 thru A5) and input (B4 thru B6) pin is usually inserted in this terminal, the circuit is short-circuited. Insert an
B1 FG Frame ground (Used for connecting the — optional switched plug to allow external control of
shield conductor of I/O signal cables) the LSM laser.
B2 ALG Analog voltage output OUT
B3 0V 0V reference for analog voltage output OUT Laser emission ON: Short-circuit pin inserted
B4 OFFS Offset input (Can be changed to (HOLD) by the basic IN Laser emission OFF: Short-circuit pin removed
setup)
B5 RUN Input of trigger command for single-run IN No.214938
measurement (Can be changed to a trigger
for continuous-run measurement (with term
specification))
B6 RES Input of CLEAR command IN
Note: The pin assignment for the LSM-5100 may differ.
Scanning Signal Connector
The Scanning Signal Connector is provided for observing the output
signal waveform from the reception chip in the measuring unit. Typically,
this connector is used to align the emission unit and reception unit after
they have been removed from the original base and then mounted on a
different base.
Input/output equivalent circuit

(1) Input circuit
2.7k No.02AGC401
Connected to +24V internally
Normal waveform Abnormal waveform
Voltage
Voltage
Input signal
(OFFS,RUN,RES)
Time Time
•Low-level signal to be between 0 and 1V. Generally drive this circuit with
an open collector-type transistor.
• Maximum current drawn from the input signal terminal is 12mA.
33
DISPLAY UNIT
LSM Control/Data Processing Software

LSMPAK Available in the near future
n Outline n Other Functions
This software can import measurement data from multiple LSM-5200 • Rich choice of functions (e.g. counter, graphs, calculation
Display Units to a personal computer, allowing a variety of measuring results)
systems to be constructed.
n Operating Environment
n Features • Connection interface: USB2.0
• Capable of processing a maximum of 10 channels of measured-point • PC: DOS/V compatible machine
data (USB-HUB connection). • CPU: 2GHz or more (recommended)
• Capable of composite calculation between Measuring Units (multiple • OS/software: WindowsXP, Excel2000XP Japanese version
channels), statistical calculation, and calculation results output as a file. • Memory: 256MB or more (recommended)
• Applicable display unit: LSM-5200
SystemDiagram Example of concurrent multi-point measurement of printer rollers
USB-HUB
LSM-5200 LSMPAK
LSM-S series
BCD Interface Unit (02AGC910)

• Outputs a 7-digit BCD and a positive or negative sign.
• Switchable data logic.
• The input and output circuits are isolated.
18 1
36 19
Signal Internal power source 5V External power source: Vcc

input SW1: Circuit 2 (5 - 24V)
circuit
Pin assignment of BCD Interface Unit
Pin No. Signal Pin No. Signal Pin No. Signal
10K name name name
F/R.HOLD 1 1 x 100 15 4 x 103 29 Err.0
SW1: Circuit 3 (Segment
2 2 x 100 16 8 x 103
error)
Internal GND Inner circuit External GND 3 4 x 100 17 1 x 104
30 HOLD (input)
4 8 x 100 18 2 x 104
31 F/R
5 1 x 101 19 4 x 104
32 STB (Strobe
External power source: Vcc 6 2 x 101 20 8 x 104 output)
Signal (5 - 24V) 7 4 x 101 21 1 x 105 33 EXT.Vcc
output (Ext. power)
8 8 x 101 22 2 x 105
circuit R
34 +POLE
9 1 x 102 23 4 x 105
(Polarity)
10 2 x 102 24 8 x 105
35 GND
L2 11 4 x 102 25 1 x 106 (Signal GND)
SW1: Circuit 3 12 8 x 102 26 2 x 106 36 FG (Frame
Internal GND Inner circuit External GND 13 1 x 103 27 4 x 106 GND)
14 2 x 103 28 8 x 106
Applicable connector: 57-40360-D (Standard accessory)
34
Digimatic Code-out Unit (02AGC840)
• Provides two channels of SPC (Digimatic) output. Dual-type Add-on Unit (02AGP150)*
• Outputs the following during simultaneous measurement: From • Enables a second measuring unit to be connected to the display unit (this
OUTPUT1: Measured values by PRG.0 through PRG.4. From OUTPUT2: is possible only if the two measuring units are the same model).
Measured values by PRG.5 through PRG.9 • Depending on the layout of the two measuring units, large-diameter
• The output cable (936937) is optional. measurement, XY measurement, and parallel measurement are possible.
• The sub-display of the LSM-6200 allows simultaneous measurement and
display with two measuring units.
Signal input circuit

20K
74HC14
20K
Terminal 5
330P
LSM inner circuit
Signal output circuit

Large-diameter measurement
TD62503
Terminal
2, 3, 4
LSM inner circuit
9 1
XY measurement
X Y
10 2 X Y
Pin assignment of Digimatic Code-out Unit

Pin No. Signal name I/O Function
1 GND — Signal GND
2 DATA OUT Data out (X-Y)=Deviation
(X-Y)=Deviation
(X+Y)/2=Mean
3 CK OUT Data transmission clock (X+Y)/2=Mean
4 RD OUT Data read request
5 REQ IN Data output request (min. distance of XY scanning section: 10mm)
6, 7, 8, 9 I.C — Spare
10 F.G — Frame GND Parallel measurement
35
DISPLAY UNIT
2nd I/O-Analog Interface Unit

(02AGC880)
• Provides I/O capability and analog voltage output for GO/±NG judgment.
• Provides two sets of GO/NG judgment result outputs. Fully compatible
with simultaneous measurement, since measurement values from PRG.5 1
18
through PRG.9 will be output as analog signals.
*If the second I/O-Analog Interface is connected, the standard I/O-Analog 36 19
Interface becomes invalid.
Pin assignment of 2nd I/O-Analog Interface Unit

Pin No. Signal name I/O
1 +5V (Internal power)
2 COM (IN) (IN)
3 PROG.0/b0 IN
4 PROG.2/b2 IN
Signal input circuit 5 PROG.4/PRG IN
2.2K (1W) 6 SHIFT IN
COM (IN): External voltage supply 7 RUN IN
terminal (5 - 24V) 8 A•(-NG) OUT
9 I.C (OUT)
Input signal
10 I.C (OUT)
11 B•(-NG) OUT
12 B•(+NG) OUT
Signal output circuit
13 I.C (OUT)
Output signal 14 A•(+NG) OUT
(30V 10mA max.) 15 A•(GO) OUT
16 ERR.0 OUT
COM (OUT) 17 COM (OUT) (OUT)
18 CNT OUT
19 GND (Internal power)
20 COM (IN) (IN)
21 PROG.1/b1 IN
22 PROG.3/b3 IN
23 IC (OUT)
24 PRINT IN
25 RESET IN
26 A•(GO) OUT
27 I.C (OUT)
28 I.C (OUT)
29 B•(GO) OUT
30 I.C OUT
31 I.C (OUT)
32 A•(-NG) OUT
33 ACK OUT
34 STB OUT
35 COM (OUT) (OUT)
36 FG —
With a combined use of b0, b2, PRG, b1 and b3 maximum
100 patterns of program can be used.
36
Thermal Printer
System Extension Devices • This printer can be connected to any LSM-5100, -6200, -6900 or -9506
model.
• Both measurement values and statistical calculation results can be printed
Extension Cable for Concurrent Installation (only with LSM-6200/6900/9506).
of BCD and Second I/O-Analog Interface
No.02AGE060
• The use of this cable enables concurrent installation of BCD

(No.02AGC910) and second I/O-Analog interface (No.02AGC880) in
LSM-6200/6900.
*Restrictions
If this cable is used, the dual extension unit (No.02AGP150) is not
available.
Order No. 02AGD600A (w/100V AC adapter)

Dimensions 02AGD600B (w/120V AC adapter)
02AGD600C (w/130V AC adapter)
120±10 200±10 Type Thermal serial-dot printer
Digits per line 40
Character format 9x8 dot matrix
Data input Via RS-232C interface
47.8
Printer life 500,000 lines

Operational temperature range 0°C to 50°C
Power supply Via AC adapter (100V AC, 50/60Hz)
Standard accessories Printer paper (1 roll), AC adpter
Consumable item Printer paper set (10-roll, 223663)
Example
BCD No.2 I/O•Analogue Footswitch (937179T)*
• Connecting the Footswitch to the LSM-6100/6900/9506 enables the user
to initiate a single measurement externally.
937179T
37
Glossary
True value
Ideal relationship:
1. Linearity measured value = true value
True value
This is a specified value that defines the maximum error* that may be Ideal relationship:
indicated by the LSM after calibration**, anywhere within its measuring measured value = true value
range, when measuring a workpiece in the center of the measuring region. Maximum error
Note that the linearity specification does not include the calibration error Linearity
specification of the calibration gages themselves. This error must be added Maximum error
separately.
Linearity
* The difference between the result of measuring a dimension and the
Measured value
true value of the dimension measured. LoCAL HiCAL
** Optional calibration gages are available for each model of LSM to
provide appropriate high and low calibration points (HiCAL and LoCAL Measured value
on the diagram). LoCAL HiCAL
2. Repeatability 3. Position error

Means, in the center of a measuring region, the dispersion (±2σ) of Means an error with reference to the measurement value at the center of
measurement values as the result of continuous measurement for 2 the measuring region if a workpiece is displaced in the measuring region.
minutes with the number of scans for averaging set at 512 times (1024 A position error consists of an up-down error and a parallel error as shown
times for LSM-902/6900) without moving a workpiece of the maximum in the following figure. This error separately affects measurement accuracy.
measurement diameter on each measuring unit.
Parallel error Up-down error
Parallel error Up-down error
5 Measuring region
4. Measuring region 1 2
The LSM provides numeric values for which the accuracy (linearity + 6 3
5 Measuring region
position error) is guaranteed only if a workpiece is located within the Laser scanning
prescribed space domain. This domain is called the measuring region. direction
4
2
A measuring region is determined by [laser beam scanning direction 6 3
range] x [optical axis direction range]. To perform measurement with a Laser scanning
minimum of error, it is necessary to measure a workpiece at the center of direction
4
this measuring region. As an example in the figure right, workpieces 1, 2, Optical axis direction
5, and 6 cannot be measured because these are outside the measuring
region. For workpieces 3 and 4, a position error is added to a linearity error.
Optical axis direction
5. Beam diameter and width A
LSM-902/6900 LSM-500S LSM-501SB LSM-503S LSM-506S LSM-9506 LSM-512S LSM-516S

Beam diameter A 200µm 80µm 120µm 240µm 600µm 600µm 1200µm 1200µm
Beam width B 300µm 120µm 170µm 340µm 800µm 800µm 1600µm 1600µm
38
PRECAUTIONS
Observe the following precautions
Compatibility Electrical noise interference
Your Laser Scan Micrometer has been adjusted together with To avoid operational errors, do not route the signal cable and
the ID Unit, which is supplied with the measuring unit. The relay cable of the Laser Scan Micrometer alongside a high-
ID Unit, which has the same code number and the same voltage line or other cable capable of inducing noise current
serial number as the measuring unit, must be installed in the in nearby conductors. Ground all appropriate units and cable
display unit. This means that if the ID Unit is replaced the shields.
measuring unit can be connected to another corresponding
display unit. Connection to a computer
If the Laser Scan Micrometer is to be connected to an
The workpiece and measuring conditions external personal computer via the RS-232C interface, ensure
Depending on the workpiece shape, and the surface that the cable connections conform to the specification.
roughness, measurement errors may result. If this is the
case, perform calibration with a master workpiece which Laser safety
has dimensions, shape, and surface roughness similar to the Mitutoyo Laser Scan Micrometers use a low-power visible
actual workpiece to be measured. If measurement values laser for measurement. The laser is a CLASS
show a large degree of dispersion due to the measuring 2 IEC 825-1 device and a CLASS II 21 CDRH
conditions, increase the number of scans for averaging to device. Warning and explanation labels,
improve the measurement accuracy. as shown right, are attached to
the Laser Scan Micrometers as is
appropriate.
Re-assembly after removal from the base

Observe the following limits when re-assembling the emission unit and reception unit to minimize measurement errors due to
misalignment of the laser's optical axis with the reception unit.
(1) Alignment within the horizontal plane (2) Alignment within the vertical plane
a. Parallel deviation between reference lines C c. Parallel deviation between reference planes A
and D: X (in the transverse direction) and B: Y (in height)
Reference Reference Reference Reference
line C line D plane A plane B
b. Angle between reference lines C d. Angle between reference planes A

and D: θx (angle) and B: θy (angle)
Reference Reference Reference Reference
line C line D plane A plane B
θx θy
(3) Allowable limits of optical axis misalignment

Distance between Emission Unit
Model X and Y θx and θy
and Reception Unit
68mm (2.68") or less within 0.5mm (.02") within 0.4° (7 mrad)
LSM-501S
100mm (3.94") or less within 0.5mm (.02") within 0.3° (5.2 mrad)
130mm (5.12") or less within 1mm (.04") within 0.4° (7 mrad)
LSM-503S
350mm (13.78") or less within 1mm (.04") within 0.16° (2.8 mrad)
LSM-506S
LSM-512S
LSM-516S 800mm (31.50") or less within 1mm (.04") within 0.09° (1.6 mrad)
39
199 1604 1 A (TX) HS, Printed in Japan
Export permission by the Japanese government may be
required for exporting our products according to the Foreign
Exchange and Foreign Trade Law. Please consult our sales
office near you before you export our products or you offer
technical information to a nonresident.
QUICKTOOL Coordinate Measuring Machines

• QUICKTOOL is a free software that makes the troublesome key operation Vision Measuring Systems
of LSM-5200/6200/6900 setting simple and easy. The system can save the
settings of measurement condition and can read the settings that have Form Measurement
been saved. Please contact your Mitutoyo office.
Optical Measuring
Sensor Systems
Test Equipment and
Seismometers
Digital Scale and DRO Systems
Small Tool Instruments and
Data Management
*RS-232C connection for LSM-6200 and LSM-6900. USB connection for LSM-5200.
Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained in this pamphlet, as
well as other technical data are to be regarded as approximate average values. We therefore reserve the right to make changes to the corresponding designs,
dimensions and weights. The stated standards, similar technical regulations, descriptions and illustrations of the products were valid at the time of printing. Only
quotations submitted by ourselves may be regarded as definitive.

Mitutoyo - Mikrometry Laserowe Laser Scan Micrometer - E13004 - 2016 EN

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Mitutoyo - Mikrometry Laserowe Laser Scan Micrometer - E13004 - 2016 EN

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Sensor Systems

High Accuracy Non-Contact Measuring System

Catalog No. E13004

Non-contact measuring system combines

ROM Segment Edge detection

Keyboard RS-232C Analog I/O Foot Expansion

INDEX Pages Pages

On-line measurement of glass Measurement of Measurement of outer diameter and

X- and Y-axis measurement Measurement of thickness Measurement of spacing

Measurement Measurement of laser disk Measurement

MEASURING UNIT WITH INTEGRATED DISPLAY

l Suitable for pin and plug gage measurements.

Pin and plug gage measurements

LSM-6900 display unit

Signal cable (5m) No.02AGN770A is supplied.

SPECIFICATIONS <Measuring unit>

70 (2.76") min 420 (16.54")

LSM-902 measuring unit

13 (.51") 121 (4.76")

LSM-6900 disply unit

l Permits measurements starting from ø5µm

Ultra-fine wire measurement

Signal cable (5m) No.02AGN770A is supplied.

SPECIFICATIONS Fiber meaurement

LSM-5200 display unit

70 (2.76") min. 103 (4.06") 46 (1.81") 32 Measuring ø3.1 hole,

M4, depth 8 (x3)

126 (4.96") 55 (2.17")

957608 Air cleaner for air-screen covers

Precision shaft measurement

Signal cable (5m) No.02AGN770A is supplied.

LSM-5200 display unit

(Cable length: 0.6m)

157 (6.18") 73 (2.87")

l General-purpose type with a measurement range of 0.3mm to 30mm.

Signal cable (5m) No.02AGN770A is supplied.

LSM-5200 display unit

202 (7.95") 57 (2.24") 9.5 9.5 ø3.1, depth 6

(Cable length: 1.4m)

95.5 (3.76") 65.5 (2.58") 84.5 (3.33") 54.5 46

l General-purpose type with a measurement range of 1mm to 60mm.

Mill roll clearance

Signal cable (5m) No.02AGN770A is supplied.

Uneven sheet thickness

LSM-5200 display unit

258 (10.16") 102 (4.02") (Reference hole)

70 (2.76") min. 540 (21.26")

Base To Reception Unit

(Cable length: 1.4m)

87 87 168.5 115.5 (4.55") 71

02AGD580 Center support*

l General-purpose type with a wide measurement range of 1mm to 120mm.

X and Y axes simultaneous measurement

Signal cable (5m) No.02AGN770A is supplied.

SPECIFICATIONS Rubber roll measurement

LSM-5200 display unit

M6, depth 12 (x3)

19 8 ø3.1 hole, depth 6

ø3.1 hole, depth 6

192 (7.56") To Reception Unit

957608 Air cleaner for air-screen covers

l General-purpose type with a wide measurement range of 1mm to 160mm.

X and Y axes simultaneous measurement

Signal cable (5m) No.02AGN770A is supplied.