GSL Series Tube Furnaces

High Temperature

GENERAL OPERATIONAL MANUAL

860 South 19th Street, Richmond, CA 94804, USA

TEL: (510) 525 – 3070 FAX: (510) 525 – 4705
Website: www.mtixtl.com Email: info@mtixtl.com

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IMPORTANT NOTES

Thank you for purchasing from MTI Corporation. This manual contains important operation and safety
information prepared for those intending on operating and utilizing the equipment. The prospective user is
responsible for carefully reading and understanding the contents of this manual prior to operating the equipment.
MTI reserves the right to update or upgrade the product without informing customers of the data change(s) in
this manual. Please visit www.mtixtl.co m frequently for the latest information and manual.

GENERAL SAFETY WARNING

MTI will not be responsible for equipment damage, accidents leading to minor or fatal injuries, and etc. caused
by the user’s negligence or lack of knowledge. Always read the manual fully beforehand and exercise the best
judgment when handling the equipment.
Human Health and Operation Safety:
 Do not operate this furnace with flammable, toxic or corrosive gases/materials. If you do so, the sole
responsibility belongs to the operator in case of any accident.
 Do not operate the furnace at a temperature or pressure above the safety limit that MTI advised.
 Do not place the furnace near flammable or explosive environments and substances. While the furnace
is operating or hot, do not contact the furnace exterior with "Burn Hazard" warning label attached.
 Do not open the lid or end caps of the furnace while it is operating or hot. Hot discharge of air can cause
injury to personnel around.
Electrical Connection and Safety:
 Any electrical connection to operate this furnace must be done by a Qualified Electrician.
 Furnace main connection without plug installed should be managed through a circuit breaker.
 Use a proper circuit breaker with correct voltage and current handling capacity according to the power
specification associate with each furnace model. The electrician is solely responsible for selecting
appropriate circuit breaker and earth connections.
 Disconnect equipment from the power supply before servicing. This job also requires a qualified
electrician.
 Do not leave the internal circuit exposed after disassembly.

WARRANTY

MTI Corporation provides one year limited warranty from date the product is shipped out. Any defective
electrical part(s) will be replaced free of charge during warranty period (consumable parts such as sealing
gaskets, processing tubes and heating elements are not part of the warranty coverage). However, the warranty
does NOT cover any equipment damage caused by misuse or negligence. After the expiration of warranty, MTI
will continue to provide technical support and spare parts at a reasonable cost.

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Contents
IMPORTANT NOTES .......................................................................................................................................... 2
GENERAL SAFETY WARNING ......................................................................................................................... 2
WARRANTY ........................................................................................................................................................ 2
SPECIFICATIONS ................................................................................................................................................ 4
UNPACKING INSTRUCTION ............................................................................................................................ 5
SYSTEM SETUP ................................................................................................................................................... 6
Operating Environment ................................................................................................................................... 6

Power connection Requirements ..................................................................................................................... 7

Heating Elements Installation / Replacement ................................................................................................. 9

Tube Installation / Replacement ................................................................................................................... 11

Vacuum Flanges Installation / Removal ....................................................................................................... 11

Thermoblock placement ............................................................................................................................... 15

Thermocouple Installation ............................................................................................................................ 16

VACUUM PUMPS ...................................................................................................................................... 17

OPERATION GUIDELINES .............................................................................................................................. 21

Quick Test ..................................................................................................................................................... 21

Sample loading / unloading .......................................................................................................................... 22

Turning on/off the furnace ............................................................................................................................ 23

Temperature programming ........................................................................................................................... 25

The Use of Vacuum Accessories .................................................................................................................. 31

The Use of Various Gases ............................................................................................................................ 33

Introduction of the Gas flow system ............................................................................................................. 34

MAINTENANCE AND EQUIPMENT CARE ................................................................................................... 35

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SPECIFICATIONS

GSL Series Models

Model GSL-1500X-50-UL GSL-1600X-50-UL GSL-1600X-OTF GSL-1700X-S-60UL

Working Temp 1500 °C (<1 hr) 1600 °C Max. (< 1 1600 °C Max. (< 1 1700 °C Max. (< 3 hr)
<1400 °C hr) hr) <1650 °C Continuous
Heating Rates <5°C/min
Continuous <1500<5°
°CC/min <1500<5°
°CC/min <5°C/min
Cooling Rates <5 °C/min <5°C/min
Continuous <5°C/min
Continuous <5°C/min
Heating Zone 6" L Total 6" L Total 6" L 12" L
3.1" @ +/-1°C 3.1" L @ +/- Total Total
Heating Element SiC 1° C
SiC 3.1" SiC
L @ +/- 3" MoSi
L @ +/-
Powe 2.5 4 KW 1°C
3.5 KW 32°2C
KW
r
Voltag KW
208~240VA 208~240VA 208~240VA 208~240VA
e C C C C
&
Curren
Thermocouple (20 Amps)
S (30
S (30
S (30
B
t
Temp. Controller YUDIAN PID Amps) PID
YUDIAN Amps) PID
YUDIAN Amps) PID
YUDIAN
Tube O.D Alumin Alumin Alumin Alumin
(Various a a a a
Furnacesizes 15.7"(L) 2"
x 12"(W) x 15.7"(L)2"
x 12"(W) 22.8"(L) x2-19.3"(W) 17.5"(L) x2-14.9"(W) x
available)
Dimensions 21"(H x 3/8"OR3.15"OR4"
x 3/8"
24"(H
) 21"(H 24.6"(H) )
Model GSL- )
GSL-1700X-S-TUV GSL-1750X-KS-UL GSL-1800X-KS60
1700X-
UL series
OR
Working Temp 1700-1700X
GSL °C Max.-80
(< -HN
1 1750 °C Max. (< 3 1750 °C Max. (< 2 1800 °C Max. (< 4 hr)
hr) G hr) hr) <1750 °C Continuous
Heating Rates <1600<5°°CC/min <1650<5°C°C/min <1700<5°C°C/min <5 °C/min
Cooling Rates <5°C/min
Continuous <5 °C/min
Continuous <5 °C/min
Continuous <5 °C/min
Heating Zone 18" L Total 12" L 18" L 12" L
6" L @ +/-2°C Total Total Total
Heating Element MoSi2 3" LMoSi2
@ +/-2°C 6" L MoSi
@ +/-2°C 3" MoSi
L @ +/-
Powe 5.2 3 KW 5.2 2KW 2KW
2.52°C
r
Voltag KW
208~240VA 208~240VA 208~240VA 208~240VA
e C C C C
&
Curren
Thermocouple (40 Amps)
B (30
B (40
B (30
B
t
Temp. Controller YUDIAN PID YUDIAN
Amps) PID YUDIAN
Amps) PID YUDIAN
Amps) PID
Tube O.D Alumin Alumin Alumin Alumin
(Various a a a a
Furnacesizes 2-3/8"OR3.15"OR4"
23.2"(L) x 19.3"(W) x 2-3/8
17.5"(L) "
x 15"(W) 3.25"xOR
17.5"(L) 4" x
15"(W) 17.5"(L) x2-15"(W) x
available)
Dimensions 30"(H x 24"(H 3/8"
24"(H
) 24"(H ) )
)

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 Model GSL-1700X-60-II GSL-1700X-60-III GSL-1800X-KS80

Working Temp 1150 °C Max. (< 1 hr) 1700 °C Max. (< 1 1800 °C Max. (< 2
<1100 °C Continuous hr) hr)
Heating Rates <5°C/min <1400<5°°CC/min <1750<5°C°C/min
Cooling Rates <5°C/min <5 °C/min
Continuous <5 °C/min
Continuous
Heating Zone 12" Each , 24" L Total 7.5",10",7.5" L, Each 18" L
8" L @ +/- 25" L Total Total
1°C 7.8" L @ +/- 6" L @ +/-2°C
Heating Element SiC , MoSi2 2°SiC
C , MoSi2 MoSi
Power 9 KW 10 2
5 KW
Voltage 220~240VA KW
220~240VA 208~240VA
& C C C
Curren
t
Thermocouple (60BAmps)
,S (75BAmps)
,S (40
B
Temp. Controller YUDIAN PID YUDIAN PID Amps) PID
YUDIAN

Tube O.D Alumina Alumin Alumin

(Various 2-3/8" a a
sizes 2-3/8" 3.25"
available)
Furnace 30.7"(L) x 17.7"(W) x 34"(L) x 18"(W) 23.2"(L) x 19.3"(W)
Dimensions 28"(H) x x
28"(H 30"(H
) )
NOTE: You can always go to WWW.MTIXTL.COM and search for the model# for more detailed equipment
features and specifications

UNPACKING INSTRUCTION

 A visual inspection of packing materials should be made before the furnace is unpacked. If there is
evidence of damage during transport, the carrier should be contacted so that an inspector can be present
to verify any damage before the furnace is unpacked.
 Notify MTI in writing immediately if any damages observed after arrival of the shipment.
 Check off all boxes against the packing list.
 Transport of the system should be in an upright position at all times until it is moved to the right place.
 Open the top cover of the furnace by screwing off four pieces of M2.5 bolts in the top cover. Then take
off the shock absorption sponge.

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 Remove the sponge
before use

CAUTION: Do not dispose any of the packing materials or boxes. MTI will not provide extra packing
materials in the case of future “return for repair” service request.

SYSTEM SETUP

Operating Environment

The following measures should be taken into consideration for establishing working conditions that are ideal for
safely operating the instrument:

 Installation of a fume hood to prevent harmful or toxic gases from disseminating

 Wearing of protective clothing and/ or equipment (e.g. suits, respiratory masks, goggles, gloves, and
etc.) that protect the user against hazards
 The instrument should be secured on a dry, solid and flat surface that is free of vibration
 Do not obstruct the venting holes on top of the furnace
 Use should be limited to indoor only with adequate ventilation and away from direct sunlight
 Environment should be dust-free and without explosive and corrosive gases
 Relative humidity(non-condensing): 10%～85%
 Ambient temperature:-10 ~ 75oC
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 WARNING:

To reduce the possibility of heat-related injuries or overheating the instrument, do not place the instrument too
close to the side wall or obstruct the air vents. Keep the instrument at least a 0.5 meter in distance away from the
side wall.

Do not allow metallic objects to fall inside the device. Otherwise, short circuit could occur and cause the

equipment to catch fire. Do not allow water to enter the device to prevent fire or electric shock hazards.

Power connection Requirements

Please make sure that the power source in your lab is sufficient to meet the power requirement listed for the
equipment. Depending on the instrument’s power requirement, an input voltage of either 110V AC or 220V AC
will typically be required for powering the instrument.

In the case of 110V, a standard US plug will typically be supplied. For 220V, MTI will most likely ship the
instrument without a power plug on its cable due to the different plug configurations and electrical codes used
by different locations and countries. The cable’s end will be naked with three wires (Live 1, and Live2, and
Ground) exposed for the end user to make the appropriate plug installation.

Attention:
We strongly suggest consulting a professional or licensed electrician to perform the power
connections. MTI Corporation will not be responsible for any equipment or property damage that
results from improper or incorrect power connections.

The “AC Power” section below contains some useful information on configuring the power supply to meet the
input voltage requirements.

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AC POWER
For carrying out the power connection, a licensed electrician should be consulted to meet and comply with the
local electrical codes and requirements. Proper electrical power handling and knowledge are crucial for both
safety and thorough application of the equipment.

Attention:
For countries that use 220V, the furnace’s power supply (applies only to 220V version) is usually configured
to work with this input voltage. However, in countries that use 110V, a 208~240V single phase AC power
line needs to be setup.

The following knowledge may be useful for configuring a single phase 208~240V power line from various
electrical panels. A three phase 240V AC electrical panel generally found in most laboratories can be
configured to output a single phase 208~240V power line. To do this, two of the three live wires from the panel
need to be configured with the neutral wire. Please refer to the illustrations below to get an idea of the
connections for the three phase and as well as the single phase 208~240V AC.

Attention:
MTI Corporation will not be responsible for any equipment or property damage that results from
improper or incorrect power connections.

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 Typical Single Phase AC Power In US

Heating Elements Installation / Replacement

The heating elements of the furnace will need to be replaced once they are worn. To prevent damage from
shipping, some furnaces will also require heating elements to be installed by the user prior to use. Follow the
instructions below to carry out the heating elements installation (depending on the heating element type, skip if
elements are already installed).

Molybdenum Disilicide (MoSi2) Heating Rods

MoSi2 elements are usually assembled prior to shipping and do not require installation upon delivery. Use the
instructions below for performing replacement or maintenance works on the elements.

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1) Remove the 4screwsontopoffurnace,andthenopenthecoveras shown in Fig.1
2) Take off the screws on the clips for heating elements as shown inFig.2
3) Disassemble the aluminum plates connecting the heating elements as shown in Fig.3

4) Unfasten the screws on the metal clips used for fixing the ceramic blocks as shown in Fig.4
5) Remove the ceramic block between rods of U type heating elements as shown inFig.5
6) Take out the U type heating elements that need to be replaced as shown in Fig.6
7) Insert a new heating element together with the ceramic block positioned in between the heating rods as
shown in Fig.7

8) When tightening the screw of metal clip for heating element, please make sure the bottom of the U
heating element does not touch the bottom of furnace chamber. Usually the bottom of the U element

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 shall rise 5mm high from the bottom of furnace chamber
9) Then, follow procedures 4, 3, 2, and 1 to tighten the screws and finish the exchange of heating elements

Attention:
1. MoSi2 Heating elements are brittle and need to be handled with care at all times.
2. To avoid breaking, do NOT over-tighten the aluminum connecting plates between the rods of
heating elements. However, a loose connection could cause a higher contact resistivity and increase
the temperature on the top of furnace dramatically.
3. If the temperature on top of furnace is too high during heating, please shut down the power and
remove the cover to further tighten the screws between heating element rods and aluminum plates.

Tube Installation / Replacement

The tube will need to be slid into the gut of the heating module from one side, the tube will then exit from the
other side of the furnace once it has passed through the furnace interior.

Upper part of tube support

Button part of tube support

How to install the tube support?

1. Raise bottom part of the tube support until it well supports the tube without pushing the tube too hard.
2. Lower upper part of the tube support to clamp the tube lightly.
NOTE: New generation of furnaces excludes the design of upper support part. Skip Step 2 if applicable.
3. Tighten the screws to secure the support parts.

Attention:

Please note that the vacuum sealing flanges must be removed from both ends of an installed tube prior to
removing it from this type of furnace.

Vacuum Flanges Installation / Removal

The flange end caps are responsible for enabling the tube chamber of the furnace to be air tight and thus
allowing for the vacuum environment to be induced. Follow the instructions below to install/ remove the
vacuum flanges depending on the tube configuration of the furnace.
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Furnaces of this design have both ends of the tubes extruded on the sides and the flanges are installed directly on
the tube ends. The flanges are suspended in air and generally do not make any contact with the furnace casing.
Please follow the instructions below to install or remove the flanges for this setup.

1) Remove the tube from the furnace after disassembling the vacuum sealing flanges from the tube

(refer to Fig. 20).

2) Carefully insert a new tube into furnace while keeping the tube straight to avoid breaking heating

elements inside the furnace.

3) Keep equal lengths on both ends of the tube protruding out of the furnace casing. The tube should be

able to be rotated by hand after insertion; otherwise, the tube may crack during heating due to lack

of clearance for thermal expansion.

4) Install the vacuum sealing flanges back onto the tube using the following procedures (refer to Fig. 20

again if necessary).

i. Put the Tighten Cover though the tube and let tube be exposed a little.
ii. Put Sealing Gasket 1 in, then the Press ring, and Sealing Gasket 2 thereafter.
iii. Seal the tube with the Sealing Cover and tighten the Hexangular Screws.
iv. Follow the same steps above to install the vacuum sealing flange on the other side of the tube.

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 WARNING:
The air seal must be inspected by vacuum or filled inert gas before running the furnace again.

The picture series below should be used as the reference for properly fitting every component of the
flange end caps onto the tube ends (applies to both Extruded and Concealed tube configurations).

1. With the inner collar of the flange end cap placed on the tube, install the two silicone O-rings with the
steel O-ring in between. Then push all three O-rings into the tube to leave some clear space on the tube
end for the next step that follows.

2. Having left a certain amount of clear space on the tube end (with all three O-rings pushed inward), slide
the inner collar of the flange end cap towards the tube end to see if its edge is flush with the tube end’s
edge. Adjust the position of all three O-rings until both edges of the tube and the inner flange piece are
on the same level.

13
3. Then put on the outer flange end cap and begin tighten the screws. Please note that all screws must be
fastened evenly to ensure the gap between the two flange end caps is evenly distributed all around.

WARNING:

All screws around the flange end cap must be fastened EVENLY in a fashion similar to securing a car’s
wheel onto the axle. This ensures the pressure applied on the tube by the flange is evenly distributed.

Fastening a particular screw more than the others (as pictured below) will generate excessive pressure on
certain spot of the tube rim more than the other areas. This could potentially lead to irreversible damage on
the tube end such as chips and cracks.

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Thermo block placement

Prior to heating samples inside of the furnace, thermal insulation blocks must be placed inside the tube
chamber by a position specific manner. This will insulate the heat from the vacuum flanges (sealing
gasket protection) while simultaneously preventing the dissipation of heat from the furnace chamber.
The insulation of heat stabilizes the heating zone which in turn expends less energy and places less
wear on the heating elements.

Two pairs of fiberous ceramic tube blocks are included for every furnace system, please follow the instructions
below for placing the tube blocks after loading the sample materials and prior to heating the furnace.

1. Two tube blocks are required on each side of the tube. Before inserting the blocks, please measure
‘L1’and ‘L2’ and make sure they are of equal length. This will keep the processing tube centered in the
furnace.

2. When placing the tube blocks, make sure the insertion depths (distance between the edge of the tube and
outside edge of the outer tube block) on both sides equal to L1 or L2.

15
Thermocouple Installation

The thermocouple has been tested on the furnace to ensure proper function prior to shipping. However, some
furnaces (high temperature series) have special thermocouples that had to be removed prior to shipping to protect
against damage. If your furnace does not come with the thermocouple already being installed, please use the
following instructions to install it.
 Insert the thermocouple (ceramic tube) from the backside of the furnace and make sure that the tip
of the thermocouple is fully protruded in the chamber for accurate temperature readings.

Attention:
A clearance of 1mm (millimeter) between tip of the thermocouple and the tube surface should be
given to prevent damage to the thermocouple.

 Tighten screw to fix the thermocouple in position.

 Connect the wires coming out from the furnace to the terminals on the thermocouple block
according to the labels and markings. It is very important that the positive and negative polarities
are connected correctly or else the thermocouple will not work. Please refer to pictures C and D
for more details.

Figure C

Figure D
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VACUUM
PUMPS

When used in conjunction with vacuum pumps, vacuum furnaces can heat samples with a cleaner environment
that greatly reduces oxidation and contamination of materials or samples. For medium vacuum levels (25~10-
3 Torr), a rough mechanical vacuum pumps is an ideal option. Turbo-molecular pumps are ideal for
achieving high vacuum levels (10-3~10-5 Torr).

WARNING:

 Vacuum limitations for preventing tube deformation:

1. Quartz tube furnaces - may be safely used up to 1000°C
2. Mullite tube furnaces - may be safely used up to 1300°C
3. Alumina tube furnaces - may be safely used up to 1500°C

The flanges on MTI furnaces can be readily configured to accept various fittings for vacuum pump connections.
The standard Barbed Hose Fitting (default fitting option on flanges) allows a flexible rubber hose to be used for
the vacuum pump connection at minimal cost. For the best vacuum efficiency, a KF25 Adapter is recommended
for connection to the pump. This type of connection is made by securing stainless steel bellows to either side of
the flange by quick locking clamps and a right angle ball valve for quick seal of the tube chamber.

Stainless Steel Bellows Right Angle Valve Quick Locking Clamps

17
For keeping the working environment cleaned, the exhaust of vacuum pumps can be fitted with traps or filters
that help eliminate particles, vapors, oil mist, and etc. into the room.

Exhaust Filters

Particle Trap

Cold Trap for Recovering Condensables

Mounting accessories in between the vacuum pump and the processing chamber can also be considered to
protect the internals of the vacuum pump from damage. Moreover, traps are available to prevent the back
streaming of rough vacuum pump oil into the processing chamber or the molecular pump’s internals.

18
 Exhaust Gas Cooling Unit Oil Trap

GAS FLOW SYSTEMS

Gas mixing/ delivery systems allow for mixing of various reactive gases for inducing chemical reactions as well
delivering inert gases into the chamber for sample treatment. For making the connections to these systems, the
flanges regularly come standard with Barbed Hose Fittings to accept flexible rubber gas tubes for bridging the
gas source and furnace. Moreover, this fitting can easily be removed and re-configured to accept more secured
gas connections with stainless steel pipes or for adding gas flow meters to monitor gas flow rates.

Gas tanks containing certain types of gas(es) may be connected to the inlet side of flange with a rubber hose or
stainless steel pipe (used with Swagelok Type 304 SS Tube Fitting). The airflow can be controlled by
adjusting the pressure setting of the gas regulator. For precisely measuring or adjusting the gas flow rates
entering into the tube chamber, gas flow meters should be attached to the flange.

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WARNING:

 For safety concerns, never charge any noxious, explosive or flammable gas into ceramic tubes.
 The flow rate for gases should be limited to <200 SCCM (or 200ml/min) for reducing
thermal shocks to the tube (with the output pressure of the gas tank regulated to < 0.2 Bar or
< 3 PSI).
 Never heat the furnace while the gas release valve is closed and a positive pressure condition exists
within the furnace chamber. The pressure gauge must be used to closely monitor the chamber
condition at all times during the heating process; please open the gas release valve immediately
once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
 A pressure regulator must be installed on your input gas tank ( see instructions below ) and have the
output gas pressure set below 3 PSI at all times after opening the gas tank with the gas maintained
in a continuous flowing condition. Gas build up with pressure levels exceeding over 3 PSI may
cause irreversible damage to the furnace chamber
.
1. Connect the gas regulator to gas Cylinder. Install a 1/4" tube fitting to the outlet of gas regulator.

2. Install another 1/4 tube fitting in the flange. Use a 1/4 stainless steel or PTFE tube (low pressure) to
connect the gas regulator and flange.

20
 NOTE: Check the compatibility of the thread type of the 1/4 tube fittings before installation. For most
gas regulator in U.S. the 1/4 tube fitting is required to have 1/4 MNPT thread type. For MTI flange
system, the 1/4 tube fitting is required to have 1/4 MBSPP thread type.

3. Finish Installation.

All of the components mentioned above can be found at the Furnace Accessories section below:
http://mtixtl.com/furnaceaccessories.aspx

OPERATION GUIDELINES

Quick Test:
If the furnace is being used for the first time (or use again after a long period of inactivity), please perform a
quick test to heat up the furnace to 300℃ for at least 2 hours to remove moisture inside the chamber. This helps
prevent the furnace refractory ceramic material from cracking. The quick test can be performed without
installing the tube but only place one thermoblock on each side as shown in the pictures below:

21
Turn on the furnace (instructions listed below), then press and hold the RUN button of the temperature controller
for 3 seconds. Then the furnace starts running and heating up to 800℃. The heating program has been set up
before we ship out our equipment.

The heating program is

Wait until the program stops. If the furnace gets trap in the halfway or problem was found after inspection.
Please contact us immediately.

Caution:

 Do not touch the furnace case and thermoblocks until the furnace has been completely cooled down.
 Do not touch the top surface of the furnace, tube or flanges when furnace is still hot.
 Do not open the lid of the furnace during the heating process.
 Do not shut off the power to the furnace until it is cooled to the room temperature.

Sample loading / unloading:

1. Crucibles are necessary for loading and unloading samples, you may use quartz crucibles for furnaces
with working temperature <1200°C; use alumina or zirconia crucibles for furnaces with working
temperature < 1800°C.

Quartz (Crucibles, Boats, and Rods)Alumina Crucibles / Boats

22
Note: MTI supplies various kinds of quartz, alumina and zirconia crucibles/boats, please click the link in below
to view our products:

http://www.mtixtl.com/quartzcricublesboats.aspx

http://www.mtixtl.com/aluminacricublesboats.aspx

2. A handle hook is included and it can be used for pulling out the thermoblocks and crucibles from the
processing tube

http://www.mtixtl.com/furnacehandlehook.aspx

Caution:

 Do not place sample on the tube wall directly;

 Must use crucible with curved bottom for sample loading;
 Do not place flammable/combustible materials inside the chamber;
 After loading samples, please make sure thermoblocks have been placed in the correct position

Turning on/off the furnace:

Warning:
Prior to turning on the furnace, please make sure:
 The power supply must satisfy its voltage and power consumption requirements.
 Samples and thermoblocks have been placed in the correct position.
 Lid (if any) and flange have been properly closed and sealed. Do not attempt to open the lid or
flange when the furnace is still hot. If you do so, any risks involved due to the hot discharge of air
belong solely to the operator.

Prior to turning off the furnace please make sure:

 Wait until the temperature of the furnace is slowly cooled to <200C with a 5C/min cooling rate or
less. Always remember to add the cooling procedure to the temperature profile.
 Vacuum pump, gas supply system or other attached devices& valves have to be shut off accordingly.
23
To operate the furnace, please:

1. Turn on the power switch. This will open the controller panel but the furnace will not start heating. The
purpose of this is to give time to operator to feed in programming data / set the required temperature etc.
without actually the heat up.

2. To get ready for the heating, depress "Green" Heating Ready button if any

3. Input the temperature program and depress RUN key. (Please refer to the next section for temperature
programming.

Furnaces with Yudian controller

1.Power switch

2.AC contactor off

3.AC contactor on

4.RS485 port

5.Yudian controller

6.Power indicator

Operating software sets:

This sets enables customers to efficiently control and monitor the furnace temperature via a GUI
(Graphical User Interface) in real time.

The software MTI provide for furnaces is available at extra cost; if customers order a laptop with a
furnace, MTI will have pre-installed the software and ensure the laptop works well with the
furnace.

EQ-MTS02-Y

24
 http://www.mtixtl.com/temperaturecontrolsystemforcontrollingmtisfurnacebyusingcomputereq-
mts02.aspx

Temperature programming:

Attention:
 Ramping / cooling rate must be strictly controlled according to the specification table. Processing
tubes can be thermally shocked or cracked if the ramping / cooling rates are not followed properly.
 Do not change any default parameters especially the ‘P’, ‘I’, ‘D’, ‘PLOC’, ‘LOC’ without MTI’s
authorization.

1) Structure

Below are the three variants of controllers commonly found on the furnaces. Though with
different looks, they all share similar features and functions.

25
 2) Functions and Indicators

3) Startup Status

When starting the device, the meter type and program version will display for a few seconds, and then enter the
normal state. Blinking “stop” indicates the program is in “normal state”.

26
4) Displaying Switch

a. In the “normal state” or “program running state”, press “SET” key (Button 2)
for1secondtoswitchto“executing program segment”(to set executing segments or display
the ongoing temperature segment).

b. Press “SET” key (Button 2) again for1 second to switch to “running time state”(to display the
total running time PV xxxx min and the elapsed time SV xxxx min.)

c. Press “SET” key again (Button 2) for1secondto go back to “normal state”.

5) Temperature program setting

Programmable smart instrumentation auto-controller allows you to set the temperature profile up to
30 segments. To process this function, follow these steps:

 Power on the furnace, blinking “STOP” on the SV window indicates the Normal State;
 Press “←” once to display “C01” on PV window;

 Set initial temperature to 0 oC by using Keystrokes :“←”, “↑” or “↓” ;

 Press “Set” to display “t01” on PV window;

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  Set heat-up time from initial temperature to target temperature by using Keystrokes :“←”, “↑”
or “↓” ;
 Press “Set” to display “C02” on PV window; Set the actual working temperature for the
second segment by using Keystrokes :“←”, “↑” or “↓” ;

 Press “Set” to display “t02” on PV window; Set heat-up time from initial temperature to
target temperature by using Keystrokes :“←”, “↑” or “↓”;
 By pressing “Set” , you can get into the remaining segments (C03&t03;C04&t04;C05&t05…)
and set their target temperature and duration time values;
 Press “Set” to display “Cxx” on PV window (xx could be any values among 01~30);
 Press“←”, “↑” or “↓” to set “-121” in the last segment in order to shut down the furnace;

Attention
The heating profile will stop at the first segment that contains “-121” regardless of whether or not
the latter segments have values set in them.

6) Running the program

When all the data is input into the temperature program, press both “Set” and “←” together, and
“STOP” will show on SV window again as an indication of the controller returning to the “Normal
State”. Then press “↓” and hold for two seconds to display “Run” on SV window;

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  Furnace will run segment by segment automatically according to the program setting;
 PV window then displays the present temperature inside the chamber;

7) Holding the program

 If you need to hold the furnace at certain temperature when the program is running, press “↓” for 2
sec to hold the program and press it again to continue.
 You can stop the program either from the running or holding states by pressing “↑” for 2 seconds.

Attention:
It is not suggested to modify any parameters during the execution if the operator is not familiar
with the furnace operations. If any modifications need to be carried out immediately, please first
stop the program.

8) Stop the program and shut off the furnace

 Press the “↑”key to make sure the controller is at its “STOP “ state
 Push the red “ Turn-Off” button to deactivate the furnace relay
 Turn the lock switch in counter clockwise direction to cut off power from the control panel
 If possible, shut off the power switch from the power cable

3.Setting Example

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℃

0 40 60 100 120 140 220

340 mins

You can make such a form before you input the data:

Prompt Input Data

C01 0 Initial Temperature
T01 40 Running time from C01 to C02
C02 200 The target temperature in the second segment
T02 20 Running time from C02 to C03
C03 200 The target temperature in the third segment
T03 40 Running time from C03 to C04
C04 600 The target temperature in the fourth segment
T04 20 Running time from C04 to C05
C05 600 The target temperature in the fifth segment
T05 20 Running time from C05to C06
C06 800 The target temperature in the sixth segment
T06 80 Running time from C06 to C07
C07 800 The target temperature in the seventh segment
T07 120 Running time from C07 to C08
C08 200 The target temperature in the eighth segment
T08 -121 Program finished. Furnace is cooling down naturally

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 Attention:
When the target temperature is over 200 °C, the segments “C01~C03” are necessary; When the target
temperature is over 800 °C, the segments “C01~C05” are necessary, it’s called a pre-heat process. On
the other hand, the cooling rate is recommended 5 °C/min all the time.

The Use of Vacuum Accessories

Attention:
 Vacuum pressures may only be safely used up to 1000°C for quartz tube.
 Vacuum pressures may only be safely used up to 1300°C for mullite tube.
 Vacuum pressures may only be safely used up to 1500°C for alumina tube.

A brief introduction of the vacuum system

Furnaces under vacuum can heat samples with a cleaner environment that greatly reduces oxidation and
contamination of materials or samples.

The flanges on MTI furnaces can be readily configured to accept various fittings for vacuum pump connections.
Typically, connection to the pump is made by securing stainless steel bellows to either side of the flange by
quick locking clamps. For medium vacuum (25~10-3Torr), the EQ-YTP550 vacuum pump is an ideal option.
Turbo-molecular pumps such as the EQ-PV-HVS or EQ-MT-HVS are ideal for achieving high vacuum levels
(10-3~10-5 Torr).

1. Standard available vacuum ports (not included)

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 2. Standard available vacuum gauges (not included)
EQ-CVM-YZ60 EQ-CVM-211-P-LD EQ-PGC-554-LD

N/A Anti-corrosive Anti-corrosive

Mechanical Digital Digital
Gas independent Gas dependent (N2 calibrated) Gas independent
(Gauge indicates relative
pressure value, -0.1Mpa
represents ultimate vacuum
while 0 represents atmospheric
pressure )
N/A Need additional power Need additional power
Max. reading: 2Torr Max. reading: 10 E -4 Torr Max. reading: 4 E -5 Torr
M14 × 1.5mm 1/8 NPT fitting 1/8 NPT fitting

Warning:

EQ-CVM-211-P-LD
Thermal conductivity gauge is calibrated using nitrogen (N2). When a gas other than N2 / air is
used, correction must be made for the difference in thermal conductivity between nitrogen (N2)
and the gas in use. You may make a conversion table for your EQ-CVM-211-P-LD that
compares the true pressure of the gas you are measuring as measured by a gas independent gauge
such as a capacitance diaphragm gauge EQ-PGC-554-LD.

1. Standard available vacuum accessories (not included)

Flanges Right-angle valve Bellows Quick clamps

Oil pump Oilless pump Filter Cold trap

For more product details, please visit: http://www.mtixtl.com/furnaceaccessories.aspx

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 Vacuuming procedure

With these standard vacuum accessories being successfully installed, users may simply perform a
quick test for the sealing chamber by following the steps below:

1. Make sure the exhaust port is opened to the vacuum pump by opening the gas-out needle
valve or KF right angle valve.
2. Fully close the needle valve on the side of gas-inlet to prevent any gas flow.
3. Double check all the fittings, connecting junctions and make sure the clamps are tightened
properly. Wrap the fitting thread with Teflon tapes if necessary.
4. After the chamber is fully evacuated, always remember to shut off the valve on the side with
exhaust port before turning off the pump. This helps prevent oil from back streaming to the
chamber.

The Use of Various Gases

Warnings:

 Do not operate this equipment with flammable, explosive, poisonous inside. MTI does not accept
any responsibility in case of any accident which might happen during any kind of process due to the
usage of materials mentioned above. (If at any times, this equipment is to be used under conditions
of hazard to Human health, the sole responsibility belongs to Operator. During such operation
Operator is obliged to provide the necessary conditions to minimize any risk involved.)

 The gas flowing rate must be controlled< 200 sccm in the case of using mullite or alumina processing
tubes
 Pressure of the chamber should be limited < 0.02Mpa / 3 PSI / 0.2 bar.
 Due to the high pressure gas output from the gas cylinder, it is necessary to install the gas
pressure regulator with it to reduce the output pressure, avoid overpressurizing the chamber and
ensure a safe operation. Please reduce the gas output pressure < 3PSI by using the pressure regulator
as shown in the picture below:

http://www.mtixtl.com/twostagebrass0-100psianalyticalcylinderregulatorcga-580withneedlevalve-fa-
y12244d580.aspx
 Always read the manual of pressure gauge to understand compatible gas type before using any gases.

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Introduction of the Gas flow system
Gas mixing/ delivery systems allow for mixing of various reactive gases for inducing chemical
reactions as well delivering inert gases into the chamber for sample treatment. For making the
connections to these systems, the flanges regularly come standard with barbed hose fittings or ¼”
tube fittings to accept gas tubes bridging the gas source and furnace. Moreover, these fitting can
easily swapped.

Gas tanks contains certain types of gas(es) may be connected to the inlet side of flange with a
rubber hose or stainless steel pipe. The airflow can be controlled by adjusting the pressure
setting of the gas pressure regulator. For precisely measuring or adjusting the gas flow rates,
gas flow meters should be attached to the flange.

Note: 1/4'' Tube Fitting is preferred to be used with MTI MFCs and Gas Mixing System.

MTI provide three types of gas delivery products

Float flow meter Mass flow meter Gas mixing system

Economic Precise Multi-functional

http://www.mtixtl.com/compact-flow-meters.aspx http://www.mtixtl.com/gasmixin
ganddeliverysysytem.aspx

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MAINTENANCE AND EQUIPMENT CARE

1. Processing Tube

http://www.mtixtl.com/processingtubes.aspx

1. To prevent thermal shocks on the processing tube, please always take great care not to heat up nor to cool
down the tube at high rates.

2. Regularly check and replace the aged tube if necessary. There is higher chance that an aged tube can break
during high temperature process. Consumable parts such as processing tubes, O-rings are not part of the
warranty with a limited one year period.

3. For different processes conducted with the same furnace, use separate tubes to avoid cross-contamination.
4. Processing tubes tend to be weakened at its higher working temp. range, therefore, please do not execute any
vacuum or pressure with the furnace:
 When utilizing the furnace with quartz tube and the temperature over 1000 °C;
 When utilizing the furnace with mullite tube and the temperature over 1300 °C;
 When utilizing the furnace with Alumina tube and the temperature over 1500 °C;
5. In order get longer tube service life, please use quartz, alumina or zirconia crucibles to carry sample, instead
of loading sample directly on tube. http://www.mtixtl.com/ceramiccrucibles.aspx

2. Heating element

1. It is most advisable to use a furnace at 100 ̊C below the max working temperature to prolong the heating
elements service life.

2. Heating element aging can result low heating performance. Heating element life is shortened by use at
temperatures close to maximum. Do not leave the furnace at high temperature when not required.

3. Please handle the heating elements very carefully as they are very brittle! Please keep them from any impact.

4. Please do not over tighten the heating elements to avoid breaking them. However, the connection cannot be
too loose as this will cause higher contact resistivity and temperature overshoot.

5. Please check heating elements for every three months to see if they are in good condition. Tip: measure the
resistance of each heating elements and compare. If connection gets loose, please open case and tighten them
properly.

6. Heating elements are not part of the warranty which is provided for a period of one year.
http://www.mtixtl.com/hi-temperatureheatingelements.aspx
35
 3. Alumina Liner

1. If the furnace is being used for the first time (or use again after a long period of inactivity), please pre-heat
the furnace to 300° C for at least 2 hours for removing moisture inside the liner to prevent cracking of the
furnace refractory ceramics. Do not pour any liquid or molten substances onto the furnace heating liner to keep
it clean.

̊ to prevent its insulation materials from cracking.

2. Do not open the furnace when it is being heated above 300 C

3. Please always keep inside liner clean to avoid contamination to your sample. Furnace must be used in an
environment without vibration and conductible dust, explosive, flammable and corrosive gases
4. It is normal to observe minor cracks on the liner after the first couple times of trial. Easy repair instruction for
chamber cracking issue via alumina coating material below.
http://www.mtixtl.com/equipment-applications/MTI-Coating-Instructions-110614.pdf

4. Flange & Foam Block

1. Alumina adhesive material on alumina foam block can help minimize the dust released. Apply a thin layer of
alumina adhesive bonding material on the surface of foam block, followed by a few hours curing at room
temperature.

http://www.mtixtl.com/HT-coatingandadhesive.aspx

2. Flange cleaning after the completion of each use by ethanol.

http://www.mtixtl.com/Sealing-flanges.aspx

3. Do not forget to place foam blocks at each end of the furnace.

http://www.mtixtl.com/refractoryceramicblocks.aspx

4. Regularly check and avoid using aged O-ring gaskets to ensure the best sealing quality. If the vacuum
performance starts to decline drastically, please replace the silicon rubber O-rings inside the flanges and then
reassemble the flanges and the vacuum system. Consumable parts such as processing tubes, O-rings are not
covered by the warranty.

5. Properly setting up the tube and vacuum flanges prior to heating will ensure the furnace to work under the
most ideal conditions. This will insulate the heat from the flanges while simultaneously preventing the
dissipation of heat from the furnace chamber. The insulation of heat stabilizes the heating zone which in turn
expends less energy and places less wear on the heating elements. Please refer to the system setup section.

5. Cooling Fan

When powering the furnace on, do not continue to operate if you cannot hear the sound from cooling fans. Shut
down the furnace and check or replace the cooling fans.

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