Technical information

GPS Safety Summary

Silicon tetrachloride

Substance name

Silicon tetrachloride
CAS-No. 10026-04-7

General statement

Silicon tetrachloride is used as raw material/intermediate in the production of

silicon, silica, and other silicon based substances.

Silicon tetrachloride is corrosive and toxic and reacts violently with water.

Based on the physical-chemical and toxicological properties there is no

intended use of silicon tetrachloride for consumers.

Worker risk and exposure is very unlikely as this substance must be

manufactured and handled under strictly controlled conditions in industrial
settings.

Silicon tetrachloride should not enter surface water and soil. If the risk
recommendations are considered, which are mentioned under RISK
MANAGEMENT RECOMMENDATIONS,
RECOMMENDATIONS, the substance can be handled safely.

Chemical identity

Chemical name (IUPAC) Silicon tetrachloride

Brand names Siridion® STC
CAS number 10026-04-7
Molecular formula SiCl4
Molecular weight 170
Structure Si-(Cl)4
Chemical characterization Chlorosilane
Synonyms Tetrachlorosilane

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Uses and application

Silicon tetrachloride is used as a raw material/intermediate in the production

of silicon, silica, and other silicon based substances. Silicon tetrachloride is
the starting material for the production of pure silicon for manufacture of
semiconductors and optical fibres. The substance is manufactured and
handled in industrial settings in closed systems.

Physical/chemical properies

Silicon tetrachloride is a clear liquid at standard temperature and pressure.

It will not self-ignite at temperatures below 650°C. It is not explosive nor is
it oxidizing. Silicon tetrachloride reacts rapidly with water.

Property Value
Physical state Liquid
Color Colorless
Odor Pungent
Density 1.48 g/cm3 at 20°C
Melting / Boiling point -68.9°C at 1013 hPa /59°C at 101.4 kPa
Explosive Properties No explosive properties
Self-ignition temperature > 650°C (1010 hPa)
Vapor pressure 290 hPa at 22.5°C
Water solubility Decomposition by hydrolysis
Flash point N.a. inorganic
Octanol-water partition Decomposition by hydrolysis
coefficient
Viscosity 0.52 mPa—s (dynamic), 0.35 mm2/s
(static) at 25°C

Health effects

Based on corrosivity the substance is acute toxic by oral and inhalation

exposure. Also after repeated exposure corrosive effects can occur
especially in the respiratory tract. It will cause severe skin burns and
damage to eyes. Silicon tetrachloride has not shown mutagenic or genotoxic
effects. Data show no evidence that Silicon tetrachloride is a reproductive or
developmental toxin nor is there evidence of carcinogenicity.

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 Health effects

Effect Assessment Result

Acute toxicity (oral, dermal based on corrosivity toxic by oral and

and inhalation) inhalation
Eye / Skin irritation Corrosive, causes severe skin burns and
damage to eyes.
Sensitization not applicable, corrosive
Toxicity after repeated Corrosive effects
exposure
Genotoxicity / mutagenicity Not mutagenic / genotoxic
Carcinogenicity There is no evidence of carcinogenicity
Toxicity for reproduction There is no evidence of reproduction
toxicity

Environmental effects

Silicon tetrachloride hydrolyzes (half-life < 1 minute) to silicic acid and

hydrogen chloride. Based on available data for the hydrolysis products,
Silicon tetrachloride is considered to have a low toxicity to aquatic
organisms. As an inorganic substance tests on biodegradation are not
relevant. Based on the bioaccumulation assessment (fast hydrolysis,
formation of non persistent inorganic substances) and toxicity assessment
(not classified for long-term human health effects or for aquatic toxicity) the
substance does not meet the criteria for PBT or vPvB.

Environmental effects

Effect Assessment Result

Aquatic toxicity
Fate and Behavior
Biodegradation
Bioaccumulation potential
PBT / vPvB conclusion
fast hydrolysis, hydrolysis products are
not toxic to water organisms
Result
Not relevant, fast hydrolysis, inorganic
substance
Not relevant, fast hydrolysis, inorganic
substance
Not considered to be either PBT or vPvB

Reactivity hazard

The substance reacts vigorously in the presence of water, including moisture

in the air. One of the products of the reaction is hydrogen chloride, which is
classified as corrosive.

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 Releases of hydrogen chloride or hydrogen vapors may over-pressurize the
container or vessel, resulting in a sudden rupture of the container or vessel.

In addition, alcohols, amines and alkalis react violently with Chlorosilanes,

generating heat.

It is important to keep the substance strictly free of water during

manufacture and storage and also prevent contact with other incompatible
materials.

Exposure

Human / Environment
All the intended uses are industrial only, and there are no downstream uses
that would result in exposure to consumers. Silicon tetrachloride is extremely
reactive and no residual unreacted starting material is present in the end
products.
Due to the corrosive and reactive nature of the substance, all aspects of
Silicon tetrachloride handling, including on-site storage and transfer, must
be subject to highly controlled conditions to minimize the potential for
exposure to worker. There is no exposure to humans from silicon
tetrachloride via the environment, as the substance is highly reactive and
unstable.

Risk management recommendations

Description General measures Specific Human Health risk management Specific Environment risk
measures management measures
Production (i) Rigorous (i) Local Exhaust ventilation (LEV) (i) Use of air emission
(site specific) containment and safe (ii) Personal Protective Equipment (PPE): abatement equipment
handling in line with Gloves/ gauntlets (5-layer laminate of PE such as incinerators and
industry best practice. and EVOH (4H) or Butyl & Viton types scrubbers
(ii) Procedural and recommended; nitrile gloves may also be (ii) Treatment of effluent
technological control used for short durations); Full-face in biological waste water
using Best Available respirator with ABEK-filter; Goggles or treatment plant.
Technique (BAT) face shield; and Self-contained, positive (iii)Incineration of waste
pressure breathing apparatus (for
prolonged or high exposures)
(iii) Specific workers’ training
(iv) Duration of exposure: <15 min
Monomer, Rigorous containment (i) Local Exhaust ventilation (LEV) (i) Use of air emission
Chemical and safe handling in (ii) Personal Protective Equipment (PPE): abatement equipment
intermediate line with industry best Gloves/ gauntlets (5-layer laminate of PE such as incinerators,
and practice. and EVOH (4H) or Butyl & Viton types scrubbers and fabric
Semiconducto recommended; nitrile gloves may also be filters is applicable as a
r Manufacture used for short durations); Full-face ‘best practice’.
(Down stream respirator with ABEK-filter; Goggles or (ii) Treatment of effluent
user) face shield and Self-contained, positive in waste water treatment
pressure breathing apparatus (for prolong plant.
or high exposures)
(iii) Specific workers’ training
(iv) Duration of exposure: <15 min

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State agency review
• EU-GHS Regulation (EU) No. 1272/2008
• EU-Risk Assessment (Regulation 793/93)
• IPCS International Chemical Safety Card
• EU REACH registration 2010
• OECD SIDS Program

Regulatory information/classification and labelling

GHS-
GHS-Labelling

Statutory basis EU-GHS as per Regulation (EU) No. 1272/2008

Symbol(s)

Signal word Danger

H301: Toxic if swallowed
H331: Toxic if inhaled
H314: Causes severe skin burns and eye
damage

EUH014: Reacts violently with water

EUH071: Corrosive to the respiratory tract

Precaution statements and more information about Silicon tetrachloride can

be found in the Safety Data Sheet.

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This GPS Safety Summary is based on Evonik´s present knowledge and experience as of the date of
issue. However, it implies no liability or other legal responsibility on the part of Evonik, including
with regards to existing third party intellectual property rights, especially patent rights. In no event
shall Evonik be responsible for damages of any nature whatsoever resulting from the use of or
reliance upon the information herein or the chemical to which that information refers. In particular,
no warranty, whether express or implied, or guarantee in the legal sense is intended or implied by
Evonik.

This GPS Safety Summary is only intended to provide general information about the chemical
referred to herein but not any in-depth health and safety information. The information in this GPS
Safety Summary is supplied on the condition that the persons receiving the same will make their
own determination as to its suitability for their purposes prior to use. This GPS Safety Summary
does not supersede or replace required regulatory and/or legal communication documents.

Performance of the chemical described herein should be verified by testing which should be carried
out only by qualified experts.

Evonik reserves the right to make any changes to this GPS Safety Summary in accordance with
technological progress or further developments. Reference to trade names used by other
companies is neither a recommendation, nor does it imply, that similar products could not be used.

Glossary
Acute toxicity harmful effects after a single exposure
Biodegradable breakdown of materials by a physiological environment
Bioaccumulation accumulation of substances in the environment
Carcinogenicity effects causing cancer
Chronic toxicity harmful effects after repeated exposures
GHS Global Harmonized System on Classification and Labelling
Mutagenicity effects that change genes
PBT Persistent Bioaccumulative Toxic
Reprotoxicity teratogenicity, embryotoxicity and harmful effects on fertility
Sensitizing allergenic
Teratogenic effects on foetal morphology
vPvB very Persistent very Bioaccumulative

Contact information within company

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Emergency Telephone number: +49 (0)7623 91-9191