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II. THE PROPOSED THERMOELECTRIC GENERATOR metrology review [14]. The real temperature difference was
The flexible TEG presented in this work has an area of verified by a high resolution LWIR thermal infrared camera
105mm×105mm and consists of 280 thermocouples of Bi 2Te3 (Gobi-640-GigE, Xenics). Figure 2 shows two high resolution
and Sb2Te3 alloys deposited by screen-printing technology. thermal images (18mm lens, 30μm of pixel pitch) of the
Screen printing is a relatively simple, versatile and n–type legs array, on the ends of which is kept a thermal
cost-effective deposition process, which is especially gradient of 4°C (Fig. 2.(a)) and 18°C(Fig. 2.(b)).
convenient for fabricating flexible devices. Screen printable
Bi2Te3 and Sb2Te3 alloys possess the highest figure of merit
near to room temperature, which is in the range of 0.1-0.6
[11,12,13]. For near room temperature applications, the
conversion efficiency of a TEG based on such thermoelectric
materials is reasonably in the range of 0.07%-0.2%, when a
temperature difference of 5K is recovered at the hot/cold
thermocouple junctions. For the TEG design, the
thermoelectric generation performance of the single
thermocouple was evaluated in terms of output power and
thermal efficiency. An estimation of the maximum number of
thermocouples which can be integrated on the available area (a)
as function of the length and width of the legs was performed.
Films of p-Sb2Te3/n-Bi2Te3 with 20µm thickness were screen
printed on both 80µm thick common paper and 25µm thick
Kapton foil substrates (Fig. 1). In order to reduce the internal
resistance of the generator and to increase the total output
current, the TEG was configured as parallel of 2 blocks, each
of which containing 140 thermocouples connected in series
electrically. A TEG internal resistance of about 37.5kΩ was
found. With a thermal gradient of 5K between the hot/cold
thermocouple junctions, an open circuit voltage of about
75mV was measured at the output terminals of TEG.
(b)
Fig. 2. Thermal camera images of the n-type array, on the ends of which is
kept a thermal gradient of (a) 4°C and (b) 18°C.
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The Seebeck coefficient for p/n complete thermocouple is III. THE PROPOSED DC-DC CONVERTER
estimated to be about 200 µV/K. Figure 5 shows the architecture of the proposed DC–DC
Data reported in Fig. 3 are average values collected by twin converter. It is composed by five functional blocks:
PT1000 measurements of different legs at hot and cold
thermocouples ends. The screen printed silver paste electrical the ultra–low voltage local oscillator;
paths shown in Fig. 1 help to correctly align the thermometers
with semiconductors borders. the boost converter circuit;
Figure 4(a) shows the package of the TEG optimized to the feedforward control circuit;
enhance the thermal gradient exploited for the energy
scavenging: the thermoelectric module (realized on Kapton the feedback control circuit;
substrate, in the reported image) was coupled to a the analog multiplexer;
polydimethylsiloxane (PDMS) layer, which was opportunely
molded to thermally insulate thermocouples cold junctions and A. The ultra-low voltage local oscillator
maximize the thermal gradient for the Seebeck generation.
The local oscillator defines the startup voltage of the DC–DC
In figure 4(b) the thermoelectric alloys legs spanning between converter. For this reason, it is the most critical component to
the hot site of the package (the valley region) and the cold site be designed. In Figure 6, the proposed circuit solution is
(on the sine wave peaks) are visible. Metal contact pads were shown.
realized on each section of the thermoelectric module, in order
to allow electrical testing of single partitions of the array. CLK VIN CLK_INV
L1 L2
SINGLE SINGLE
CELL CELL
N
N
M1 M2
L3 CS1 L4
CS2
INPUT COMPARATORS
Del_1 R1 REF2 OUT_150
CMP1
REFERENCES REFERENCE R2 CLK/2
GENERATOR 1 CMP2 Del_2 PWM VOSC_2 CLK/2N
GENERATOR 2 REF1 EN1
TEG GENERATOR
CMP3 Del_3 HYSTERESIS
CLK/2N COMPARATOR
CLK/2 CMP4 OUT_150
VIN EN2
LBOOST VOUT
CLK/64N
M8
Del_1
CLK/2N
Del_2
CLK/64
Del_3
CLK/2
CLK
CLK_INV CLK CHARGE VCHARGE EN COUT RLOAD
CLK_INV IN1 M7
PUMP VOSC
PROGRAMMABLE OUT
DUTY CYCLE VOSC_1
LOCAL OSCILLATOR CLK IN2
MODULATOR
MUX BOOST CONVERTER
FEEDFORWARD CONTROL CIRCUIT
Fig. 5. Schematic of the DC – DC converter.
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Over the value of 2pF the effect of CS1 on the startup voltage
(1)
| | is limited. The startup voltage of the local oscillator calculated
by (4) is 78mV, which is in good agreement with 80mV
measured experimentally. Table 1 reports the dimensions of
where gm is the transconductance of the NMOS transistors, 𝜔o
L1÷L4 inductors, CS1 and CS2 capacitors and transistors MOS.
is the resonance frequency, and Q1 is the quality factor of
inductors L1 and L2. At very low input voltage, the NMOS COMPONENTS VALUE
transistors operate in weak inversion, and its transconductance L1, L2 5mH
is equal to: L3, L4 2µH
CS1, CS2 2pF
(2) W = 9µm
M1, M2 L = 300nm
(native) Finger = 5
being n the slope factor of M1 and M2, Vt is the thermal Multiplier = 110
voltage, Is is the reverse saturation current. The oscillation Tab. 1. Dimensioning of the components of the local oscillator.
frequency (200kHz) depends on inductors L1&L2 values and B. The boost converter
input capacitance of the charge pump, where the output nodes
In figure 5, it is possible to note the schematic of boost
of the oscillator are connected. The relationship is:
converter. It consists of two MOS transistors M7 and M8 that
are switched by PWM clock signal. The values of the LBOOST
𝜔 (3) inductor (off–chip), and COUT (off–chip) output capacitor are
√ √
560µH and 47µF, respectively. Boost converter operates in
continuous conduction mode (CCM), so the relationship
where N is the number of stages of charge pump, C0 is the
between input voltage and steady state output voltage is:
input capacitances of each stage of the charge pump and CPAR
is representative of the parasitic capacitances caused by
parasitic ground capacitance of C0, interconnection lines and (5)
pads. Figure 8 shows the architecture of the single cell of the
charge pump including C0 and CPAR. However, the value of where D is duty cycle of PWM clock signal. As it possible to
CPAR has been estimated to be lower than 1/10 of C0, so it can note by equation (5), the voltage gain depends on PWM clock
be neglected. Combining the relationships (1), (2) and (3), the signal. Therefore a lower value of VIN needs of an higher duty
minimum input voltage allowing the local oscillator to operate cycle value to achieve the same VOUT.
is given by:
C. The feedforward control circuit
The feedforward control circuit provides a PWM clock signal
(4) (VOSC_1), which drives the boost converter for low VIN
√
( ) (80mV–150mV range). During the normal operation, reducing
( ) the power consumption of the DC – DC converter improves
the efficiency. For this reason, the feedback control circuit is
The L3&L4 inductors are used to fix at ground the sources of
off, when the feedforward control circuit operates.
the NMOS transistors at the startup. The CS1 and CS2
The feedforward control circuit is composed by:
capacitances play an important role. Increasing their value, the
a charge pump [7] (fig. 9);
minimum supply voltage of the local oscillator is reduced, as
figure 7 shows. a programmable duty cycle modulator (fig. 10):
105
a references generator (fig.5, reference generator 1).
100 4 input comparators (fig. 5, CMP1, CMP2, CMP3, CMP4);
( ) (6)
75
1 2 3 4 5 6
CS [pF]
Fig. 7. VDD,MIN versus CS1. A minimum value of 2pF ensures a startup voltage
Where VCLK, equal to 160mV at 80mV input voltage, is the
of the local oscillator equal to 78mV. peak voltage of the waveform provided by the LC local
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oscillator, which allows to obtain a peak value of the After the division, the clock signal (CLK/64) is shifted by the
waveform higher than the supply voltage. ROUT is the output programmable delay circuit, which is composed by 5
resistance of each stage, while IOUT is the current consumed by programmable delay cells, as figure 11(a) shows. Each cell,
the following programmable duty cycle modulator. As whose schematic is shown in figure 11(b), includes a capacitor
VCHARGE grows, a clipping circuit, made by two series diodes array that regulates the delay produced on the divided clock.
VCHARGE
D1 and D2, limits amplitude at 1.2V, in order to prevent the
break-down of M7 and M8 MOS transistors for high input DELAY DELAY CLK/64SHIFTED
CLK/64
CELL CELL
voltage. Figure 8 shows the architecture of the charge pump. VCHARGE
Del_1
CLK Del_2
Del_3 R CLK/64SHIFTED
VIN SINGLE SINGLE VCHARGE (a) C1 C2 C3
CLK/64
CELL CELL D1 COUT IOUT C Del_1 Del_2 Del_3
VCLK
D2 CLK
CLK_INV 0 (b)
(a) C0 CPAR M
M0 2 Fig. 11. (a) Schematic of programmable delay circuit and (b) programmable
VIN delay single cell.
VCHARGE
The following NAND gate has the divided clock and its
M1 C 0 M3
CPAR delayed copy (CLK/64SHIFTED) at its inputs, generating PWM
VCLK CLK_INV
0
clock signal with a duty cycle depending on the delay set by
(b)
the programmable delay circuit. Table 2 reports the achieved
Fig. 8. (a) Architecture of the charge pump and (b) schematic of single cell.
PWM duty cycle of according to the value of the input
The integrated output capacitor of the charge pump, COUT, is voltage, VIN, and the corresponding code coming from the
100pF. The programmable duty cycle modulator is supplied input comparators feeding the capacitor arrays.
by VCHARGE. This circuit provides an high duty cycle clock DUTY
VIN RANGE DEL_1 DEL_2 DEL_3
signal according to the input voltage value VIN. Figure 9 shows CYCLE
the schematic of the programmable duty cycle modulator. 80mV÷100mV 92% 0 0 0
VCHARGE 100mV÷115mV 90% 1 0 0
Del_1
Del_2
Del_3
D3 M5 115mV÷130mV 88% 1 1 0
D4 FREQUENCY CLK/64SHIFTED 130mV÷150mV 85% 1 1 1
VOSC_1
M4 CLK DIVIDER Tab. 2. VIN vs duty cycle and corresponding code for various input voltage
M6 DELAY To MUX
range.
CLK/2 CLK/2N CLK/64N CLK/64
Fig. 9. Schematic of the programmable duty cycle modulator. The input comparators are supplied by the output voltage,
VOUT. They are used to set the capacitor array of the
The oscillator positive output, CLK, is directly connected to
programmable delay single cell, according to the value of the
the gate of the M6 transistor. The M4 NMOS transistor is
input voltage. For VIN less than 100mV, as VOUT is not
always off, therefore only the leakage current flows in the
sufficient to supply the input comparators, their output are set
series connected diodes D3 and D4. This branch is used as
to the ground, enabling the minimum delay.
voltage reference in order to fix the polarization of M5 PMOS
VOUT VOUT
transistor, whose gate is connected to the node between the VIN VIN
series diodes. In order to improve the efficiency, the clock 90mV Del_1 120mV Del_3
100mV CMP1 130mV CMP3
frequency is divided by a 64 factor thanks to the frequency CLK/2 CLK/2
divider. The latter is composed by 6 divider cells, which CLK/2N VOUT CLK/2N VOUT
VIN VIN
consist of a positive edge-triggered D latch (fig. 10).
105mV Del_2 140mV OUT_150m
VCHARGE 115mV CMP2 150mV CMP4
CLK/2 CLK/2 CLK/2
CLK/64 CLK/2N CLK/2N
CLK CLK DIVIDER Q CLK DIVIDER Q CLK DIVIDER Q
CELL QN CELL QN CELL QN
(a)
CLK/64N CLK/2
CLK/2N VIN
(a) PLUS OA1
OUT
1 REFH MINUS
CLK R
2 CLK/2N SR NOR OUT
5
Q QN
CLK/2N LATCH
QN S
6 MINUS
3 OUT
REFL PLUS OA2
4
CLK/2
(b) (b)
Fig. 10. (a) Architecture of the frequency divider and (b) schematic of the Fig. 12. (a) Schematic of the input comparators and (b) schematic of single
divider cell. hysteresis comparator.
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VOUT
M21 M22
REF4
M20 M19
BIAS
M23 M24
VOUT
R15
M9 M10 M11 M12 M13 M14 M15 M16 M17 M18
(a) 90mV 100mV 105mV 115mV 120mV 130mV 140mV 150mV REF1
OA3 BIAS CM
R3 R4 R5 R6 R7 R8 R9 R10 R11 R12
R13
R14 R16
REFERENCE REFERENCE
GENERATOR 1 GENERATOR 2
(b)
Fig. 13. (a) Schematic of the operational amplifier in the (b) schematic of the reference generators.
The 10mV difference between the low and the high thresholds CLK/2N
CLK/64N R19
EN2
of the input comparators is useful to make the design more REF4
C5
robust against kickback noise due to LBOOST inductor, as they
R20
are directly supplied by the input voltage (VIN) on the input
Fig. 14. Schematic of the PWM generator.
node where also LBOOST inductor is connected. As figure 12(b)
shows, the input comparators are composed by two single
OUTP [V]
0.6
ended dynamic latched comparators [8] (OA1 and OA2), and an VOUT 0.4
CLK/64 M28 CLK/64N 0.2
SR NOR latch. This structure has been preferred because of its M27
0.5 0.6 0.7
i
ultra–low power characteristics. The reference generator 1 [9] REF4 M25 M26 REF4
VP - VM [V]
0.2
provides the voltage references to the input comparators. VP R21 R22 VM 0
-0.2
Figure 13 shows the circuit. It is an ultra–low voltage bandgap 0.5 0.6 0.7
(a) ii
CLK/64N [V]
Time [ms]
D. The feedback control circuit (b)
The feedback control circuit is enabled, as the output Fig. 15.(a) Schematic of the DAC and (b) simulation with variable VOUT. In
(b.i) the OUTP waveform represents the output of the integrator.
voltage, VOUT, reaches 1V and VIN is higher than 150mV. The
feedback control circuit provides a PWM clock signal (VOSC_2) The task of the DAC is to produce a differential square
to the boost converter, with a feedback control of duty cycle
waveforms (VP - VM), with a peak voltage value robust against
that improves the output voltage accuracy. The feedback
the supply voltage (VOUT) variation. Figure 15(b) shows a
control circuit is composed by:
transient simulation with a variable supply voltage VOUT,
the PWM generator (fig. 14); between 920mV and 1.2V. The peak voltage of VP - VM
(fig. 15(b.ii)), remains constant around 0.3V.
the hysteresis comparator;
The architecture of the integrator circuit is shown in figure 16.
the reference generator (fig.5, reference generator 2). This architecture was preferred because it operates at low
The PWM generator consists of a DAC, an integrator and a supply voltage [10]. It uses two common mode circuits (one
dynamic latched comparator. At first the DAC receives two for the input stage and one for the output stage). The common
square waveforms (CLK/64 & CLK/64N) which are derived mode of the OUTP is centered around the half of the supply
from the main clock, CLK, dividing by 64 its frequency. This voltage (i.e. VOUT/2) to maximize the output swing, while the
operation is performed by the frequency divider included in common mode voltage at the input is set close to the ground
the programmable duty cycle modulator of the feedforward voltage, as the voltage swing at the input node is limited
control circuit. The REF4 reference is provided by the thanks to the virtual ground. In this way it is guaranteed a
reference generator 1. Figures 14 and 15(a) show the sufficient overdrive voltage to the input MOS transistors
schematics of the PWM generator and the DAC, respectively. (M27&M28) at low voltage supply.
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The drawback is the presence of a DC current that flows robust against the disturbs on the output voltage of boost
through R18 resistor, which is absorbed by the current sources converter, VOUT. Figure 17 shows the architecture of the
circuit, internal of the integrator. hysteresis comparator.
The following low power comparator makes a comparison CMP CLK/2N
between triangle waveform coming from integrator and REF3, VOUT REF2 5
IN2
which is a partition of VOUT on R4 resistor ( fig. 14). It has a OUT5
dynamic latched architecture, receiving two clock signals from R1 REF1 IN1 S
the frequency divider (CLK/2 & CLK/2N). The comparator SR NAND Q EN1
CLK/2 LATCH
provides a PWM clock signal depending on VOUT. R2 R
IN2 1
The hysteresis comparator (fig. 5) makes a comparison OUT6
between a partition of VOUT on R2 resistor, REF2, and the REF1
IN1
voltage reference, REF1, provided by reference generator 2, in HYSTERESIS
CLK/2N COMPARATOR
order to set its output, as VOUT reaches 1V. CMP6
The hysteresis behavior is useful to make the DC–DC more Fig. 17. Schematic of the hysteresis comparator.
SR NAND
EN1
VOUT
LATCH
2 M62 M61
OUT5
R26 R27
M65 M67 M68 VOUT
M66 (b)
1.2
Voltage [V]
VOUT V
CLK/2N OUT
0.8
OUT
M69 0.4
5
OUT
6
M70 M71
0.5 0.6 0.7 0.8 0.9 1 1.1
OUTM OUTP
i
M72 M75
Voltage [V]
1.2
M73 M74 S
0.8
R
0.4
VOUT
0.5 0.6 0.7 0.8 0.9 1 1.1
M77 CLK/2 M76 ii
Voltage [V]
1.2
REF1 M78 M79 0.8
REFH REFL REFH REFL
REF2 0.4
DYNAMIC M80
CLK/2 0.5 0.6 0.7 0.8 0.9 1 1.1
LATCHED Time [ms]
COMPARATOR
iii
(a) (c)
Fig. 18. (a) Schematic of the CMP5 and CMP6, (b) hysteresis behavior and (c) transient of the hysteresis comparator: (c.i) transient simulation with triangle
waveform VOUT (full line) and output waveforms of the CMP5 (OUTP5 – dashes line) and the CMP6 (OUTP6 – dots line); (c.ii) input waveforms to SR NAND
latch 1 (S (Set) – dashes line, R (Reset) – dots line); (c.iii) the output of the hysteresis comparator EN1 with two reference REFH and REFL.
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The structure of the hysteresis comparator consists of two IV. EXPERIMENTAL RESULTS ON
single ended dynamic comparators (CMP5 and CMP6), a THE PROPOSED DC – DC CONVERTER
buffer, an inverter stages and an SR NAND latch 1. The proposed low input voltage DC–DC converter for
Each CMP5 and CMP6 comparator is composed by a dynamic thermoelectric energy harvesting applications is implemented
latched architecture and an SR NAND latch 2, shown in figure in a standard 65nm CMOS process. To characterize electrical
18(a). Simulations results are shown in order to explain the properties of the DC–DC converter, the thermoelectric
operation mode of the hysteresis comparator. Figure 18(c) generator is modeled by an ideal voltage source, ranging from
shows a transient with a variable VOUT, varying as a triangle 80mV to 370mV and 37.5kΩ equivalent series resistance, RS.
waveform between 0V and 1.2V. As the voltage reference A 4F of input capacitance (CIN) has been added, in order to
REF1 is always greater than REF2, the comparators output keep the voltage at the output of the thermoelectric generator,
voltages (OUT5/6) is set. For this reason, the outputs of the and reduce the kickback noise due to LBOOST inductor. Figure
comparators (OUT5/6), have the same transient behavioral of 20 shows the schematic of the measurements test bench.
VOUT ( fig 18(c.i)). OUT5/6 are close to VOUT, however their
value depends on R26 and R27, which pulls a certain amount of
current by the comparators output, determining the voltage RS
drop on them. The value of R26&R27 for CMP5 is 45kΩ and the DC–DC
value of R26&R27 for CMP6 is 29kΩ. Between the output of Converter
the comparators CMP5 and CMP6 and the inputs of the SR
NAND latch 1, an inverting and not inverting buffer are
VIN
placed, respectively. The inverting buffer is done by a single CIN
NOT gate, while the on inverting buffer is done by a cascade
of two NOT gates. As them outputs are set, they follows the
behavior of the VOUT, that supplies them. The waveforms at
the output of the buffers are shown in figures 18(c.ii). At the THERMOELECTRIC
output of the hysteresis comparators, the SR NAND latch 1 GENERATOR
receives the waveforms shown in figure 18(c.ii). By varying Fig. 20. Schematic of the test bench.
the value of R26 & R27, the values of REFH and REFL change,
as figure 18(c.iii) shows. Figure 21 shows die photograph of the fabricated circuit. The
occupied chip area is 0.51mm2. As it is possible to note the
E. The analog multiplexer
charge pump circuit occupied the largest area in the chip.
The analog multiplexer has in input two signals, VOSC_1 and
675µm
VOSC_2, corresponding to the output voltages of feedforward
control circuit and feedback control circuit respectively.
Figure 19 shows the structure of the multiplexer:
IN1
OUT
745µm
IN2
EN
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0,7 20
VIN
VOUT
0,5 0 10 20 30 40 50 60 70
RLOAD [k]
[V]
OUT
Time [s] 60
Fig. 23. Transients of the input voltage provided by TEG (VIN – red line) and
the output voltage of the DC – DC converter. (VOUT – black line). 50
1,1 Table 3 reports the state of the art comparison. Among fully
electrical architectures, it has the lowest startup voltage, with
1
regulated output voltage and a good efficiency.
VOUT [V]
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Chiara De Pascali received the first Microelectronics, specialized in analog design service. He
level Laurea degree in Information authored more than 130 papers in journals and international
Engineering at the University of Lecce conferences, 7 book chapters, and 4 international patents in
(2005), discussing a thesis on the the field of low-power integrated circuits design, with
optimization of metallic contacts for particular emphasis on low-power continuous-time analog
quantum dots lasers. In 2009, she filters and A/D converters. Prof. D'Amico is a member of the
received the second level Laurea degree technical committees of several international IEEE
in Telecommunication Engineering (with Honour) at the conferences (ICICDT, PRIME, ICM 2013, Spie
University of Salento, discussing a thesis on the fabrication Microtechnologies 2015).
and electrical-functional characterization of gas sensors based
on titania nanometric strips using Impedance Spectroscopy. In
November 2013, she got the Ph.D. in Energetic Systems and
Environment at the same University, discussing a thesis on the
design and fabrication of a flexible MEMS thermoelectric
generator for Energy Harvesting applications. At present her
activity is mainly focused on FEM modelling, design and
fabrication of MEMS devices for energy harvesting
applications in wearable electronics.
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