Asyst LPT 2200


LOAD PORT TRANSFER

SYSTEM
LPT 2150
LPT 2200
Technical Manual
Manual Part Number 2000-0900-01 Revision A

Load Port Transfer™ System 2150 / 2200 Technical Manual
DISCLAIMER
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written
permission from Asyst Technologies, Inc. Material contained within this manual is provided for informational
purposes only, and is subject to change without prior notice. Asyst Technologies, Inc. assumes no
responsibility for any errors which may appear in this manual, nor for any damages resulting from such
errors.
Any change, alteration, or modification to the equipment described herein, as well as application in a manner
inconsistent with its design and intent, without prior written permission from Asyst Technologies’ Engineering
Staff will void the system warranty and may render the equipment unsafe for use or unfit for its intended
purposes.
This manual supersedes and obsoletes all prior Asyst Technologies, Inc. material relating to the installation,
repair, service, or specifications of the product(s) described herein.
It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and
laws applicable to the installation and operation of this equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting
from the operation or service of this equipment in any manner inconsistent or contrary to the methods
supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins,
communications, and recommendations.
TRADEMARKS
ASYST-SMIF, Load Port Transfer, SMIF-Pod, SMART-Tag, SMART-Traveler System, SMART-Storage,

SMART-Comm, MicroStation Controller, MicroTag and FluoroTrac are all trademarks of Asyst
Technologies, Inc.
Asyst Technologies, Inc.

48761 Kato Road
Fremont, California 94538
Telephone: (510) 661-5000
FAX: (510) 661-5166
Technology described in this manual may be covered under one or more of the following Asyst
U.S. patents: 4,739,882; 4,674,939; 5,097,421; 4,974,166; 5,166,884; 4,724,874; 4,815,912; 4,676,709;
4,674,936; 4,802,809; 4,859,137; 4,995,430; 5,169,272; 4,746,256; 4,880,348; 4,895,486; 5,370,491;
5,547,328; 5,469,963; 5,586,585; 5,653,565.
Copyright Asyst Technologies, Inc., January 1997. All Rights Reserved

Worldwide.
Service Manual for Load Port Interface LPT 2150 / 2200

Part Number 2000-0900-01 Revision A [N4595]
Printed: February 1999.
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TABLE OF CONTENTS
Paragraph Page
Chapter 1 - GENERAL INFORMATION (Pages 1-1 thru 1-12)
1.0 Introduction ...................................................................................................................... 1-1

1.1 Product Specifications ..................................................................................................... 1-1
1.2 Safety............................................................................................................................... 1-3
1.2.1 Responsibility................................................................................................................... 1-3
1.2.2 Equipment Tagout / Lockout Procedure .......................................................................... 1-3
1.2.3 Laser Safety..................................................................................................................... 1-3
1.2.3.1 User ................................................................................................................................. 1-3
1.2.3.2 Service Technician .......................................................................................................... 1-3
1.2.3.3 Laser Caution .................................................................................................................. 1-3
1.2.4 Electrical Power ............................................................................................................... 1-4
1.2.4.1 Power Fuses.................................................................................................................... 1-4
1.2.5 Safety Interlocks .............................................................................................................. 1-4
1.2.5.1 Laser Interlock ................................................................................................................. 1-4
1.2.6 Pinch Points..................................................................................................................... 1-5
1.3 Terminology ..................................................................................................................... 1-5
1.4 LPT Conventions ............................................................................................................. 1-7
1.5 Labels .............................................................................................................................. 1-8
1.5.1 Power Switch Label ......................................................................................................... 1-8
1.5.2 Model and Serial Numbers .............................................................................................. 1-8
1.5.3 Interlock Label ................................................................................................................. 1-8
1.5.4 Pinch Labels .................................................................................................................... 1-8
1.5.5 Ground Labels ................................................................................................................. 1-9
1.5.6 Hazard Labels.................................................................................................................. 1-9
1.5.6.1 Hazard Label.................................................................................................................... 1-9
1.5.6.2 Warning Label ................................................................................................................. 1-9
1.5.7 Fuse Warning Label ...................................................................................................... 1-10
Chapter 2 - THEORY OF OPERATION (Pages 2-1 thru 2-20)
2.0 Introduction ...................................................................................................................... 2-1

2.1 LPT System Overview ..................................................................................................... 2-1
2.2 Control Panel (Optional) .................................................................................................. 2-2
2.3 Operating Sequence........................................................................................................ 2-3
2.3.1 Loading and Unloading Sequence................................................................................... 2-4
2.4 Mechanical Assemblies ................................................................................................... 2-6
2.4.1 Drive Column ................................................................................................................... 2-6
2.4.1.1 Vertical Arm Drive............................................................................................................ 2-6
2.4.1.2 Rotating Arm Drive .......................................................................................................... 2-6
Cassette Gripper.............................................................................................................. 2-7
2.4.2 Minienvironment .............................................................................................................. 2-7
2.4.3 Port Assembly.................................................................................................................. 2-7
2.4.3.1 Port Door ......................................................................................................................... 2-8
2.4.3.2 Optical Detector System ................................................................................................ 2-10
2.5 Electronic Assemblies.................................................................................................... 2-10
2.5.1 Printed Circuit Board Assemblies (PCBA) ..................................................................... 2-10
2.5.2 Port Control.................................................................................................................... 2-11
2.5.2.1 Power............................................................................................................................. 2-11
2.5.2.2 CPU ............................................................................................................................... 2-12
2.5.2.3 Program Memory ........................................................................................................... 2-12
2.5.2.4 SRAM ............................................................................................................................ 2-12
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Paragraph Page
2.5.2.5 Quad-Serial I/O...............................................................................................................2-12

2.5.2.6 Digital I/O ........................................................................................................................2-12
2.5.2.7 Watchdog Timer .............................................................................................................2-13
2.5.2.8 Interrupt Controller..........................................................................................................2-13
2.5.2.9 Sensors ..........................................................................................................................2-13
Optical Sensors ..............................................................................................................2-13
Optical-Limit Switches ....................................................................................................2-14
Excessive Wafer Protrusion Sensor...............................................................................2-14
2.5.2.10 Motor Controls ................................................................................................................2-15
Minienvironment Servo Motor.........................................................................................2-15
Pod-Door Lock Motor .....................................................................................................2-15
DC Stepper Motors.........................................................................................................2-15
2.5.2.11 LPT 2150 Motor Controls ...............................................................................................2-15
Minienvironment Servo Motor.........................................................................................2-15
DC Stepper Motors.........................................................................................................2-15
2.5.2.12 Status Indicators.............................................................................................................2-16
Power..............................................................................................................................2-16
Ready .............................................................................................................................2-16
Pod-In-Place ...................................................................................................................2-16
2.5.3 LPT System Controller Board.........................................................................................2-16
2.5.4 Power Supply..................................................................................................................2-17
2.5.5 Motion Control Board......................................................................................................2-18
2.5.6 Servo Amplifier Board.....................................................................................................2-18
2.5.7 Communications I/O Interface Board .............................................................................2-19
2.5.8 Power Distribution Board ................................................................................................2-19
2.5.9 Teach Pendant ...............................................................................................................2-19
Chapter 3 - DIAGNOSTICS AND TROUBLESHOOTING (Pages 3-1 thru 3-30)
3.0 Introduction .......................................................................................................................3-1

3.1 Using Asyst Simulator (SIM) Software .............................................................................3-1
3.2 Problem Identification .......................................................................................................3-1
3.3 Status and Error Reporting...............................................................................................3-4
3.4 Error Recovery..................................................................................................................3-5
3.4.1 Recoverable Errors...........................................................................................................3-6
3.4.2 Automatic Recovery..........................................................................................................3-6
3.4.3 Nonrecoverable Errors .....................................................................................................3-6
3.5 Troubleshooting Servo Amplifier Indicators....................................................................3-14
3.5.1 Servo Amplifier Home Indicators ....................................................................................3-15
3.6 Servo Controller Board Indicators ..................................................................................3-15
3.7 Indexer Board Indicators ................................................................................................3-15
3.8 Cable Wire Lists .............................................................................................................3-17
Chapter 4 - SERVICE (Pages 4-1 thru 4-122)
4.1 Safety Requirements ........................................................................................................4-1

4.1.1 Laser Safety......................................................................................................................4-1
4.1.1.1 Preventive Service For Laser Safety ................................................................................4-2
4.1.2 Fuses................................................................................................................................4-2
4.2 Preventive Service............................................................................................................4-3
4.2.1 Lubrication ........................................................................................................................4-3
4.2.2 General Inspection ...........................................................................................................4-4
4.2.3 Required Tools .................................................................................................................4-4
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Procedure
Preventive Service Procedures .................................................................................... 4-5

PSP-1 Inspect and Clean the LPT and Lubricate Vertical Lead Screw ...................................... 4-7
PSP-2 Inspect, Clean, and Lubricate and Perform Cleanliness Assurance ............................... 4-15
Calibration / Alignment Procedure............................................................................... 4-27

CAP-1 Optical Detector System Adjustment............................................................................... 4-29
CAP-2 Excessive Wafer Protrusion Sensor Adjustment............................................................. 4-35
CAP-3 Gripper Finger Adjustment; V- and H-Move .................................................................... 4-39
CAP-4 Gripper Adjustment; V-Move ........................................................................................... 4-43
CAP-5 Stop Plate Adjustment; V-Move....................................................................................... 4-47
CAP-6 Squat-Switch Adjustment; V- and H-Move ...................................................................... 4-49
CAP-7 Gripper-Level Adjustment; V- and H-Move .................................................................... 4-53
CAP-8 Gripper Adjustment; H-Move ........................................................................................... 4-57
CAP-9 Over-Travel Switch Adjustment; V- and H-Move............................................................. 4-61
CAP-10 Port-Door Leveling and Adjustment................................................................................. 4-63
CAP-11 Pod Hold-Down Latch Adjustment; LPT 2200 ................................................................. 4-67
CAP-12 Pod-In-Place Switch Adjustment; LPT 2200.................................................................... 4-71
CAP-13 Port Lock / Unlock Mechanism Adjustment; LPT 2150 ................................................... 4-75
CAP-14 Wafer Seater Adjustment ................................................................................................ 4-77
CAP-15 Fan / Filter Air Velocity Adjustment.................................................................................. 4-81
Corrective Service Procedures .................................................................................... 4-83

CSP-1A Minienvironment-Drive Servo Motor Replacement .......................................................... 4-85
CSP-1B Minienvironment-Drive Servo Motor Assembly Replacement ......................................... 4-89
CSP-2 Gripper-Tilt Motor Drive Replacement ............................................................................ 4-93
CSP-3 Fan Motor Replacement .................................................................................................. 4-95
CSP-4 Electronic Circuit Board Replacement ............................................................................. 4-99
CSP-5 Optical Detector System, Laser Diode Replacement .................................................... 4-103
CSP-6 Particle Protection Strip Replacement ........................................................................... 4-107
CSP-7A Motor Brake Replacement, Series 1 LPT ...................................................................... 4-111
CSP-7B Motor Brake Replacement, Series 2 LPT ...................................................................... 4-115
CSP-8 Encoder Replacement ................................................................................................... 4-119
APPENDICES
Appendix A SPARE PARTS , BILLS OF MATERIAL, AND ASSEMBLY DRAWINGS (Pages A-1 thru A-240)
Spare Parts List, Series 1 ................................................................................................ A-1
Spare Parts List, Series 2 ................................................................................................ A-2
Spare Parts List, LPT 2150.............................................................................................. A-3
Required Tools ................................................................................................................ A-4
Electrical and Mechanical Assembly Drawings With Bills of Material.............................. A-5
Appendix B TEACH PENDANT (Pages B-1 thru B-34)

B.0 Introduction ...................................................................................................................... B-1
B.1 Teach Pendant Operation................................................................................................ B-1
B.1.1 Emergency Stop Button................................................................................................... B-1
B.1.2 Liquid Crystal Display ...................................................................................................... B-1
B.1.3 Initial Power-up ................................................................................................................ B-1
B.2 Teach Pendant Setup Mode ............................................................................................ B-3
B.2.1 Pendant Setup Menus ..................................................................................................... B-3
B.2.2 General Menu Navigation ................................................................................................ B-3
B.2.3 Sub-Menu Navigation ...................................................................................................... B-3
B.2.4 Main Menu ....................................................................................................................... B-3
B.2.5 Saving Changes .............................................................................................................. B-4
B.2.6 Communications Setup Menu ......................................................................................... B-5
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Paragraph Page
B.2.7 Display Setup Menu......................................................................................................... B-6

B.2.8 Keyboard Setup Menu ..................................................................................................... B-7
B.2.8 Exit Setup Mode .............................................................................................................. B-8
B.3 Normal Operational Mode ............................................................................................... B-8
B.3.1 Homing Menu .................................................................................................................. B-9
B.3.2 Diagnostic Menu .............................................................................................................. B-9
B.3.2.1 Diagnostic Sub-Menus .................................................................................................... B-9
B.3.2.2 Displaying Indexer Variables ...........................................................................................B-11
B.3.3 Configuration Menu .........................................................................................................B-16
B.3.3.1 Configuration Sub-Menus................................................................................................B-16
B.3.3.2 Configuration File Default Values ....................................................................................B-16
B.4 Key Functions ..................................................................................................................B-26
B.4.1 Teach Keys......................................................................................................................B-26
B.4.2 Pause/Resume Key .........................................................................................................B-27
B.4.3 Enter Key .........................................................................................................................B-27
B.4.4 Escape Key......................................................................................................................B-27
B.4.5 Menu Key.........................................................................................................................B-27
B.4.6 Motion Keys .....................................................................................................................B-28
B.4.7 DC Motor Function Keys..................................................................................................B-31
B.4.8 Other Function Keys ........................................................................................................B-31
Appendix C FluoroTrac Option (Pages C-1 thru C-8)

C.0 Introduction ...................................................................................................................... C-1
C.1 Electronic Components ................................................................................................... C-1
C.2 Electronic Component Descriptions ................................................................................ C-1
C.2.1 Master Controller ............................................................................................................. C-1
C.2.2 MicroTags........................................................................................................................ C-1
C.3 LPT FluoroTrac Hardware Configuration......................................................................... C-2
C.4 Host Communication, SECS Protocol ............................................................................. C-4
C.5 LPT FluoroTrac Cable Information .................................................................................. C-6
INDEX
ILLUSTRATIONS
Figure Page
1-1 Load Port Transfer.........................................................................................................................1-2

1-2 LPT Conventions ...........................................................................................................................1-7
1-3 Model and Serial Number Label ....................................................................................................1-8
1-4 Laser Interlock Label .....................................................................................................................1-8
1-5 Pinch Hazard Label .......................................................................................................................1-9
1-6 Pinch Point Caution Label .............................................................................................................1-9
1-7 Ground Labels ...............................................................................................................................1-9
1-8 Hazard Label .................................................................................................................................1-9
1-9 Warning, Hazardous Voltages Label .............................................................................................1-9
1-10 Fuse Label ...................................................................................................................................1-10
1-11 Label Placement ..........................................................................................................................1-10
1-12 Label Placement ..........................................................................................................................1-11
2-1 Load Port Transfer System............................................................................................................2-1

2-2 Control Panel .................................................................................................................................2-2
2-3 LPT Air Flow Diagram ...................................................................................................................2-3
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Figure Page
2-4 LPT Vertical Drive......................................................................................................................... 2-6

2-5 LPT Overview ............................................................................................................................... 2-7
2-6 LPT Port Plates............................................................................................................................. 2-9
2-7 Simplified System Interconnect Diagram...................................................................................... 2-10
2-8 Port Control (Indexer) Board......................................................................................................... 2-11
2-9 Indexer Board Connectors............................................................................................................ 2-12
2-10 Optical Detector System Pictorial ................................................................................................. 2-14
2-11 LPT Status Lights ......................................................................................................................... 2-16
2-12 Communications Processor Board and Power Supply Assembly ................................................ 2-17
2-13 Motion Control Board .................................................................................................................... 2-18
2-14 Servo Amplifier Board................................................................................................................... 2-18
2-15 Power Distribution Board .............................................................................................................. 2-19
3-1 Servo Amplifier Board................................................................................................................... 3-16
4-1 Laser Danger Label ...................................................................................................................... 4-2

4-2 Interface Connector Panel ............................................................................................................ 4-2
4-3 Power Distribution Panel............................................................................................................... 4-3
PSP-1-1 LPT Components............................................................................................................. 4-11

PSP-1-2 LPT Vertical Drive Assembly ........................................................................................... 4-12
PSP-1-3 LPT Arm Assembly .......................................................................................................... 4-13
PSP-1-4 LPT Arm Rotate Assembly Covers.................................................................................. 4-13
PSP-2-1 LPT Components............................................................................................................. 4-21
PSP-2-2 LPT Arm Assembly .......................................................................................................... 4-22
PSP-2-3 LPT Arm Rotate Assembly Covers.................................................................................. 4-22
PSP-2-4 LPT Vertical Drive Assembly ........................................................................................... 4-23
PSP-2-5 Gripper Assembly Lubrication Points............................................................................... 4-24
PSP-2-6 FFU Air Velocity Measurement Points............................................................................. 4-25
PSP-2-7 Airborne Particle Counter Setup at LPT/Process Tool .................................................... 4-25
CAP-1-1 Optical Assembly Bracket................................................................................................ 4-33

CAP-1-2 Light Beam Orientation .................................................................................................... 4-34
CAP-1-3 Light Beam Diagram ........................................................................................................ 4-34
CAP-2-1 LPT Views........................................................................................................................ 4-36
CAP-2-2 LPT Tool-Side View ......................................................................................................... 4-37
CAP-3-1 Gripper Cover, Top View ................................................................................................. 4-41
CAP-3-2 Gripper Finger Adjustment, Top View ............................................................................. 4-42
CAP-4-1 Gripper V-Move ............................................................................................................... 4-45
CAP-5-1 Gripper V-Move, Right Side View .................................................................................... 4-48
CAP-6-1 Gripper, Extended Position, Top View............................................................................. 4-51
CAP-7-1 Gripper Level Adjustment, V- and H-Move ...................................................................... 4-55
CAP-7-2 Gripper Side-To-Side Level Adjustment, V- and H-Move................................................ 4-56
CAP-8-1 Gripper, H-Move .............................................................................................................. 4-59
CAP-8-2 Gripper Tilt Switches........................................................................................................ 4-60
CAP-9-1 Gripper, Overtravel Switch, Top View.............................................................................. 4-62
CAP-10-1 Door Bracket, Top View................................................................................................... 4-65
CAP-10-2 Minienvironment, Side View............................................................................................. 4-65
CAP-10-3 Port Home Flag and Sensor ............................................................................................ 4-66
CAP-11-1 Pod Hold-Down Latch Adjustment................................................................................... 4-69
CAP-12-1 200MM Port Plate (Bottom) Pod-In-Place Switch............................................................ 4-72
CAP-12-2 200MM Port Plate Pod-In-Place Switch........................................................................... 4-73
CAP-13-1 Port Lock / Unlock Mechanism ........................................................................................ 4-76
CAP-13-2 LPT 2150 Port Plate ........................................................................................................ 4-76
CAP-14-1 Wafer Seater Mechanism, Port Plate Top View .............................................................. 4-79
CAP-14-2 Wafer Seater Mechanism, Bottom View.......................................................................... 4-80
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Figure Page
CAP-14-3 Wafer Seater Mechanism, Side View.............................................................................. 4-80

CAP-15-1 FFU Air Velocity Adjustment Point................................................................................... 4-82
CSP-1A-1 LPT Side View ................................................................................................................. 4-87

CSP-1A-2 Servo-Motor Assembly .................................................................................................... 4-88
CSP-1B-1 LPT Side View ................................................................................................................. 4-91
CSP-1B-2 Servo-Motor Assembly .................................................................................................... 4-92
CSP-2-1 Gripper-Tilt Drive Motor ................................................................................................... 4-94
CSP-3-1 Fan / Filter Assembly ....................................................................................................... 4-97
CSP-4-1 LPT Electronic Circuit Boards........................................................................................ 4-102
CSP-5-1 Optical Detector System................................................................................................ 4-105
CSP-5-2 Port Plate Bottom .......................................................................................................... 4-106
CSP-5-3 Light Beam Orientation.................................................................................................. 4-106
CSP-6-1 Upper Protection Strip Retainer Bracket ....................................................................... 4-109
CSP-6-2 LPT Rear View............................................................................................................... 4-109
CSP-6-3 Lower Protection Strip Retainer Bracket ....................................................................... 4-110
CSP-6-4 Bracket Placement For Proper Shield Strip Tension..................................................... 4-110
CSP-7A-1 Brake Assembly............................................................................................................. 4-113
CSP-7B-1 Brake Assembly............................................................................................................. 4-117
CSP-8-1 Vertical Drive Motor Assembly Showing Encoder ......................................................... 4-121
CSP-8-2 Encoder Assembly......................................................................................................... 4-121
B-1 Teach Pendant ............................................................................................................................. B-2

B-2 Teach Pendant Setup Main Menu ................................................................................................ B-4
B-3 Communication Setup Menu Hierarchy........................................................................................ B-5
B-4 Display Setup Menu Hierarchy ..................................................................................................... B-6
B-5 Keyboard Setup Menu Hierarchy.................................................................................................. B-7
B-6 Exit Setup Mode Hierarchy ........................................................................................................... B-8
B-7 Homing Menu Hierarchy ............................................................................................................... B-9
B-8 Diagnostic Menu Hierarchy...........................................................................................................B-13
B-9 Configuration Menu Hierarchy ......................................................................................................B-17
B-10 Teach Keys...................................................................................................................................B-26
B-11 Menu Keys....................................................................................................................................B-28
B-12 Motion Keys ..................................................................................................................................B-30
B-13 DC Motor Function Keys...............................................................................................................B-32
B-14 Other Function Keys .....................................................................................................................B-33
C-1 LPT FluoroTrac Electronics .......................................................................................................... C-2

C-2 (1 of 2) FluoroTrac-LPT Integration ............................................................................................. C-3
C-2 (2 of 2) FluoroTrac-LPT Integration ............................................................................................. C-4
TABLES
Table Page
1-1 Product Specifications ...................................................................................................................1-1
3-1 User Identifier Problems ................................................................................................................3-2

3-2 Port Errors .....................................................................................................................................3-6
3-3 Errors Reported By LPT I/O Task..................................................................................................3-7
3-4 Errors Reported By LPT General System Usage; All Tasks .........................................................3-9
3-5 Home Indicators ..........................................................................................................................3-15
4-1 Fuse Ratings By Location..............................................................................................................4-2

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Table Page
4-2 Recommended Preventive Service Schedule .............................................................................. 4-3

4-3 Recommended Lubricants............................................................................................................ 4-3
A-1 LPT Level 1 Spares Kit (Series 1) ................................................................................................ A-1

A-2 LPT Level 1 Spares Kit (Series 2) ................................................................................................ A-2
A-3 LPT Level 1 Spares Kit (LPT 2150) .............................................................................................. A-3
A-4 Assembly Drawings and Bills of Material ...................................................................................... A-5
B-1 Configuration File Default Values .............................................................................................. B-14
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CHANGE RECORD
Change Signature of
No. Date Title and/or Brief Description Validating Person
Preliminary Jan 1999 Load Port Transfer System ...

Service Manual
LIST OF EFFECTIVE PAGES

On a changed page, the portion of the text affected by the latest change is indicated by a vertical black bar
(change bar) in the right-hand margin of the page. A change to an illustration is indicated by a miniature
pointing hand. New figures are indicated by a change bar down the full length of the image area and opposite
the title.
Page No. Change in Effect Page No. Change in Effect
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ABOUT THIS MANUAL

This manual describes how to service the Asyst Technologies’ Load Port Transfer System. This manual
should be used by Service Technicians/Engineers to perform service/maintenance on the System.
This manual supports the following LPT assemblies:
LPT Assembly, LPT 2150, Forward Port Plate 9700-4466-XX XX: -01 = Right hand
LPT Assembly, LPT 2150, Reverse Port Plate 9700-4413-XX XX: -02 = Left hand
LPT Assembly, LPT 2200, Forward Port Plate 9700-4284-XX
LPT Assembly, LPT 2200, Reverse Port Plate 9700-4371-XX
LPT Assembly, LPT 2200, FluoroTrac Option 9700-5005-XX
CONVENTIONS
Certain conventions are used throughout this manual.
Keys or switches that must be pressed are printed in bold. Example: Press Enter or press F1.
Software commands are printed in italics. Example: ... after the UNLOAD command ...
Figures and tables are numbered in a manner similar to pages; sequential within individual chapters.
Each figure and table is identified by the number of the chapter in which it resides, hyphenated to
show its sequential order within that chapter. For example, the third figure in the second chapter
would be, Figure 2-3. Figure numbers are located immediately beneath, or immediately adjacent to,
the appropriate figure. Table numbers are located immediately above the appropriate table.
Warnings, cautions, and notes as used throughout this manual:
WARNING
Warnings alert personnel to potentially hazardous
conditions or actions that may result in personal injury.
CAUTION
Cautions alert personnel to actions that may result in
equipment damage.
NOTE
Notes emphasize, or expand upon, the presented information.
TIPþ:
Tips provide helpful hints to improve performance and/or use.
MANUAL CHANGES AND REVISIONS

Asyst Technologies periodically updates this manual to reflect changes to the equipment or to correct or
enhance previously published material. To receive manual updates it is necessary to complete and return the
PUBLICATION UPDATE REQUEST supplied with this manual.
The current revision level for this manual may be found immediately following the part number on the Title
Page.
Changes, corrections, additional material, or recommendations for future editions are always welcome and
should be directed to Asyst Technical Publications. Direct a letter to TECHNICAL PUBLICATIONS at the
address for the corporate facility in the front of this manual.
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RELATED DOCUMENTS
SEMI Standards
Load Port Transfer™ System, Installation Instructions, Asyst P/N 2000-0945-01
LPT Host Communications Manual, Asyst P/N 2000-0851-01
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Chapter 1
GENERAL INFORMATION
1.0 INTRODUCTION
This manual presents the Asyst Technologies Load Port Transfer system hereinafter referred to simply as
LPT.
The LPT is a robotics-load-port transfer system capable of transferring either a 6-inch or a 8-inch wafer
cassette from a SMIF-Pod™ to a Process Tool load position. The LPT operates under the control of the
Process Tool computer, Host computer, or a user. SMIF-Pods used must conform to the relevant SEMI-
standards.
Definitions of terms used in this manual may be found in paragraph 1.3.
1.1 PRODUCT SPECIFICATIONS
TABLE 1-1. PRODUCT SPECIFICATIONS
Wafer Size: LPT 2150 = 150mm LPT 2200 = 200mm

Cassette Pick-up Position: 909mm (35.8 inches)
Cassette Positioning: To within ±0.005 inches (vertical)
SMIF-Pod Load Height Measured from floor to top of Port Plate 900mm (35.5 inches)
when mounted into a Kinematic track. Nominal
Maximum Reach of Load Arm: 352mm (13.85 inches) 307mm (12.10 inches)
(Measured from front face of LPT to Standard Cassette Orientation Reversed Cassette Orientation
H-bar of SMIF-Pod)
Height: 1578mm (62.13 inches)
Width: 457mm (18.00 inches)
Depth: 478mm (18.81 inches)
Weight: 170 pounds
(Without SMIF-Pod, cassette, wafers) (77.27kg)
Speed of travel (Minienvironment): 57.2mm (2.25 inches) per second
Mounting: Tool mount. May make use of an interface frame calibrated to lock the
LPT into a repeatable position onto the Process Tool.
Power: 100 – 230 VAC (+10, -5%) 3.5 Amp (100–120vac)
50 – 60 Hz, Single Phase 2 Amp (230vac)
Laser Diode Laser; Wavelength = 670 nm
NOTE Laser Power = <1mW (Class II)
LPT is a Class I Laser product
when used with a SMIF-Pod
Communications: Serial RS-232C (SECS Ι / SECS ΙΙ), RS-485 (optional), Bi-directional

Parallel LAN
ASYST TECHNOLOGIES Page 1-1

2000-0900-01 Revision A
Table 1-1. Product Specifications (Continued)

Environmental: Operating Temperature 10 to 40° C.
Operating Humidity 10 to 75%
Storage Temperature -10 to +55°C.
Storage Humidity 5 to 90%
Figure 1-1. Load Port Transfer

(Shown with SMIF-Pod)
Page 1-2 ASYST TECHNOLOGIES

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1.2 SAFETY
Before attempting any operation or service, it is essential that the information presented in this section be
read and thoroughly understood.
Warnings and cautions are used throughout this manual to identify potential hazards to personnel and
equipment, respectively. All warnings and cautions immediately precede the step or operation in which the
hazardous condition may be encountered. All personnel operating or performing service on Asyst equipment
must fully understand warnings, cautions, and all general safety regulations associated with
electromechanical equipment.
Personnel should become thoroughly familiar with all aspects of safety for individuals and equipment prior to
operating or performing service on this equipment.
1.2.1 RESPONSIBILITY.
It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and
laws applicable to the installation and operation of this equipment.
1.2.2 EQUIPMENT TAGOUT / LOCKOUT PROCEDURE.

Per standard industry practices, tagout / lockout procedures must be followed when service / maintenance is
performed on the LPT to prevent injury or equipment damage. Local / company procedures must be followed,
but where no procedures exist, follow the guidelines below.
Any service that is to be performed on the LPT must be indicated to users of the Process Tool to which the
LPT is attached. The Process Tool must be powered down, or at a minimum, the circuit that provides power
to the LPT must be switched off / secured and a tag fixed to the circuit indicating the nature of the service
being performed on the LPT. The tag must have:
1. Date of maintenance / service action
2. Names of the persons performing the service procedure
3. Short description of the service / maintenance action
4. Signatures of the service supervisor and production supervisor.
1.2.3 LASER SAFETY
1.2.3.1 USER.
Under normal operation of the LPT with a SMIF-Pod, the user is never exposed to direct or collateral radiation
in excess of the accessible emission limits of Class I. When the LPT is used without a SMIF-Pod the
emission limits are Class II. The laser beam is on only when the LPT is in motion; when the LPT is not in
motion, the laser system is inoperative.
1.2.3.2 SERVICE TECHNICIAN.

There are no requirements for periodic cleaning, mechanical evaluation, or electro-optical inspections.
Procedures for laser replacement and alignment are included in this manual. In the DAC service mode the
laser is always on. Once power is removed from the LPT, the laser is inoperative.
1.2.3.3 LASER CAUTION.
CAUTION
Use of controls or adjustments or performance of
procedures other than those specified herein may result in
hazardous laser light exposure.

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1.2.4 ELECTRICAL POWER.

Electrical power for the LPT is supplied by the Process Tool.
• The LPT power must be supplied through the EMO switch of the Process Tool.
• The LPT must be connected to the earth ground connection of the Process Tool.
All electronics are fully enclosed in one of three (3) locations:
1. The bottom portion of the minienvironment
2. The bottom front (Process Tool side) of the frame
3. Just below and attached to the vertical arm assembly of the LPT.
In the event of an emergency, all power can be removed from the LPT by depressing the red mushroom
shaped EMO switch typically mounted on the Process Tool chassis.
1.2.4.1 POWER FUSES.

Electrical power fuses are located on the LPT at the location of LPT incoming AC power.
WARNING
For continued protection against risk of fire, replace only
with fuse of the specified type and current ratings.
• Incoming AC Fuses are located in the power connector in the LPT Interface Connector Panel.
• DC power Fuses for the distributed dc voltages are located on the Power Distribution Board.
Refer to Chapter 4, paragraph 4.1.2, for a listing of all of the fuse locations, functions, and fuse ratings of
fuses used in the LPT.
1.2.5 SAFETY INTERLOCKS.
1.2.5.1 LASER INTERLOCK.

The LPT has a feature to prevent the user from being exposed to the laser light beam. The SMIF-Pod when
locked in place on the port plate and the minienvironment window prevent the user from exposure to the
Laser beam.
Unless a SMIF-Pod is locked to the port plate, the minienvironment will not raise. Once the Pod is locked to
the port plate and the minienvironment / port plate raises, the user cannot be exposed to the light beam
because of the Pod top being in place and locked.
WARNING
If the POD-IN-PLACE indicator is lighted, the Laser interlock
has been defeated. If the pod-in-place switch is depressed
without a SMIF-Pod on the port plate and the LOAD
command has been issued, the user may be exposed to the
laser beam.

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1.2.6 PINCH POINTS.

The minienvironment moves up and down.
WARNING
The user must never place fingers or hands on any part of
the LPT while it is operating. Failure to comply may result in
bodily injury.
At the top of the minienvironment travel, fingers could be pinched between the minienvironment and the side
support if placed into the line of travel. At the bottom of the minienvironment travel, toes could be pinched
between the minienvironment and the base assembly if placed into the line of travel. A clear plastic shield
around the base of the LPT prevents toes from being pinched and the LPT should not be operated without
the shield. Pinch points are identified by a sign near the pinch-point hazard (see Figures 1-5 and 1-6).
Before performing maintenance / service on the LPT, where the removal of the panel is necessary, use
extreme care.
Figures 1-10 and 1-11 show the pinch point hazard areas on the LPT.
1.3 TERMINOLOGY
The following terminology is used throughout this manual to describe the LPT, its configuration, and options.
Asyst-SMIF™: The Asyst Technologies, Inc. automated system that utilizes clean isolation technology to
maintain a cleanroom environment around wafers during transfer to processing equipment.
Cassette: A carrier for wafers or other substrates that are being processed.
Cassette-Transfer Mechanism: An arm that moves a cassette of wafers between the LPT and the Process
Tool.
Cautions: Cautions alert personnel to actions that may result in damage to equipment or software.
Computer: In this manual the computer controlling the loading and unloading of wafer cassettes from the
LPT is either the computer within the Process Tool onto which the LPT is attached, or the Host computer
which tracks Fab operations and wafer moves.
FFU (fan / filter unit): An assembly located in the minienvironment and composed of a fan and an ULPA filter.
The FFU draws room air in and expels ultra pure air into the minienvironment.
Filtered Air System: An air flow system, part of the minienvironment, which maintains an ultra clean
environment for the product cassette when it is not enclosed in the SMIF-Pod. See FFU.
FluoroTrac: An optional Auto ID system using very low frequency (VLF) RF signals to communicate with a
MicroTag which may be located on a wafer cassette or attached to an operator. The system tracks the
cassette of wafers or registers the operator at the Process Tool interface.
H-Move: The transfer of product by gripping the face of a cassette at the minienvironment and then to place
it on the Process Tool cassette station.
Home: That position which is the starting position for moving components of the LPT. The minienvironment
is Home when the port plate is seated onto the port door. The arm is Home when vertical and down. The
gripper is Home when vertical and the gripper fingers are open. See paragraph 2.3 for Home position criteria.
Kinematic: A term associated with the Asyst method of mounting where the two opposite parts of the mount
fit together to precisely define the position.
Load: Moving a product cassette from the LPT to the Process Tool load station.

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Loadlock: A loadlock is a unit for loading or unloading a wafer or wafer cassette where the Process Tool
may operate under vacuum and the wafers are stored and moved in room air. The loadlock is a means to go
from the room atmosphere to vacuum.
MicroTag: Passive transponders that are attached to the material lot, the lot carrier or transporter, or are
carried by the operator. The FluoroTrac system use MicroTags to monitor the location of a particular operator
or material lot to ensure that the product is correctly routed by communicating with both the Process Tool and
the Host production computer.
Minienvironment: The minienvironment is a moving chamber with an attached port plate which accepts the
Pod. The minienvironment ascends separating the Pod top from the cassette. The cassette remains inside
the minienvironment and under clean, isolated conditions.
MSC (MicroStation Controller): A unit for controlling the input of product at a process station via
communication with the SMART-Tag attached to the SMIF-Pod. Hereinafter referred to as MSC. Whenever
a SMIF-Pod is placed on an LPT, the MSC that controls the LPT automatically checks the process step and
process equipment data stored in the Pod's SMART-Tag to verify that the Pod is at the correct process
station (to prevent mis-processing).
Multi-load: Operational mode allowing load or unload cycles to be performed in any sequence.
Operating Mode: Manual or automatic. Manual mode is an option for the equipment or service engineer
while automatic mode is the mode used by the user where the LPT is controlled by a Host computer, Process
Tool, or the user.
Port Plate: The top portion of the LPT minienvironment that supports the SMIF-Pod. The port plate houses
the status indicators, Pod latching/unlatching mechanism, the Pod door locking/unlocking mechanism, laser
assembly, and wafer seater.
Process Tool: The Customer's process equipment to which the LPT becomes an integral part. Also referred
to as the Host Tool.
Product: That which the Customer processes; typically semiconductor wafer material in cassettes.
SECS Communications: Semiconductor Equipment Communications Standard (SECS) interface is an
industry standard for communications between equipment.
SMIF-E™: (Controlled environment option) A configuration of the Asyst SMIF-System whereby an inert gas
environment, such as nitrogen (N2) can be achieved and maintained in the SMIF-Pod and cassette transfer
zone.
SMIF-Pod™: The sealed container housing the product cassette in which a controlled clean room
environment is maintained, hereinafter referred to as the Pod.
SMIF-Port: Interface between the SMIF-Pod and the minienvironment; also referred to as the port.
SMART-Comm™: The SMART-Comm is a multiplexing and communication protocol converting device that
increases operator and Process Tool efficiency. It connects process equipment, SMIF I/Os, bar code readers,
signal towers, Smart-Tag readers (SMART-Probe™), and other devices to the CIM LAN by multiplexing eight
(8) serial communications ports and eight (8) discrete digital outputs to a single Ethernet LAN port using high-
speed SECS messaging services (HSMS).
SMART-Tag™: A small, battery operated lot tracking device, containing a microprocessor and software, that
attaches to the SMIF-Pod, hereinafter referred to as the Tag. The Tag ensures that the product is correctly
routed by communicating with both the Process Tool and the Host production computer.
STS (SMART-Traveler™ System): A method of automating the work-in-progress management on the
production floor. It eliminates mis-processing via error-free validation. It links the Process Tools to the Host
computer aided manufacturing (CAM) system. It provides automated interlocked transfer between the SMIF
system and the Process Tool.
Squat: A function of the gripper. The gripper status prior to gripping or releasing a cassette in the process of
picking up or placing a cassette.
Standard Load: Operational mode where the LPT always performs an unload cycle after a load cycle.
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Tilt: A movement of the gripper. The wafers are tilted 30 degrees to reseat all wafers to reduce the chances
of breakage.
ULPA (ultra low particulate air): A filter element which is used in the FFU to maintain the minienvironment at
Class 1 or better during the time when the wafer cassette is out of the Pod.
Unload: Moving a product cassette from the Process Tool load station to the Pod.
V-Move: The transfer of product by gripping the top of a cassette to place it at the minienvironment on the
Process Tool cassette station.
Wafer Seater: An electro-mechanical mechanism attached to the bottom side of the port plate. When
actuated by the wafer sensor circuitry, the wafer seater will mechanically push an unseated wafer back into its
cassette slot to prevent breakage, when the cassette passes through the port and into the Pod.
Warnings: Warnings alert personnel to potentially hazardous conditions or actions that may result in
personal injury.
1.4 LPT CONVENTIONS

The following illustration, Figure 1-2, shows the conventions that are used throughout this manual to describe
the LPT, its components, and options.
LPT Process Tool
Process Tool Side of LPT

SMIF-Pod
Rotating Arm
Gripper
Port Plate Rotation Pivot
V-Move
Gripper
Gripping
Cassette
User Side of LPT
Gripper In
Home Position
Stationary
Port Door
Vertical Arm
Axis
Minienvironment Arm Rotation

(Shown Raised) Pivot
Vertical Arm
Figure 1-2. LPT Conventions

(LPT Shown Without Plexiglas Cover At Bottom)
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1.5 LABELS
1.5.1 POWER SWITCH LABEL.

The POWER switch on the LPT user control panel is labeled:
I for In or On
O for Out or Off
1.5.2 MODEL AND SERIAL NUMBERS.

The model and serial number for the LPT (see Figure 1-3) is located on the underside of the LPT top
horizontal support (see Figure 1-11). This number is required when contacting the manufacturer for any
matter concerning the equipment.
Figure 1-3. Model and Serial Number Label
1.5.3 INTERLOCK LABEL.

The laser interlock label (see Figure 1-4) is located on the inside of the plastic shield and can be viewed by
looking across the port plate (see Figure 1-11). The interlock label indicates that laser radiation may be
present in the area of the port plate when the port door is open and no Pod is attached to the port plate. Also
laser radiation may be present if the smoke-colored plastic panel is removed from the front of the
minienvironment.
CAUTION
LASER RADIATION WHEN OPEN
AND INTERLOCK DEFEATED.
AVOID DIRECT EYE EXPOSURE.
Figure 1-4. Laser Interlock Label
1.5.4 PINCH LABELS.

The pinch hazard label is found on the LPT near to the port plate. Figure 1-5 shows the Danger, Pinch
Hazard label. See Figures 1-11 and 1-12 for placement.
The Caution, Pinch Point, Bodily Injury label is located on the lower plastic cover to warn of the pinch hazard
if the cover is removed. Figure 1-6 shows the Pinch Point label.

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Figure 1-5. Pinch Hazard Label Figure 1-6. Pinch Point Caution Label
1.5.5 GROUND LABELS.

The ground connection points on the LPT are labeled with the symbols as shown in Figure 1-7. This label can
be found near the power supply, LPT chassis, ground location.
CAUTION
As a safety precaution, the LPT must be connected to an
earth ground. Failure to comply may result in personnel
being shocked or electrocuted.
Protective Chassis
Earth Ground Ground
Figure 1-7. Ground Labels
1.5.6 HAZARD LABELS.
1.5.6.1 HAZARD LABEL.

The hazard label on the LPT indicates that hazardous voltages exist within the area of the label, usually under
the panel where the label is attached. Before performing service on the LPT, where the removal of the panel
is necessary, use extreme care. The label is shown in Figure 1-8.
1.5.6.2 WARNING LABEL.

The warning label on the LPT indicates that hazardous voltages exist within the area of the label, usually
under or near to the panel where the label is attached. Before performing service on the LPT, when the
circuits are energized and the removal of the panel is necessary, use extreme care. The label is shown in
Figure 1-9.
Figure 1-8. Hazard Label Figure 1-9. Warning, Hazardous Voltages Label
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1.5.7 FUSE WARNING LABEL.

The fuse label is attached near the connector panel because the incoming power fuses are located in the
power connector. The label is shown in Figure 1-10.
Figure 1-10. Fuse Label
Pinch Hazard. Interlock

Keep Hands Out Label Placed
Model and Of This Area on the Shield
Serial Number When Operating In at this
Label Located Manual / Service Location
On Underside Mode Without a Facing the
of Top Support SMIF-Pod. User
Pinch Point,
Bodily Injury
Label
(LPT Viewed From Side) (LPT Viewed From Rear)

(Operator Side)
Figure 1-11. Label Placement
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Pinch Hazard.
Keep Hands Out
Of This Area
When Operating In
Manual / Service
Mode Without a
SMIF-Pod.
Danger Pinch
Hazard Labels
Warning
Hazardous
Voltages Label
Hazard Label
Fuse
Warning
Label
(LPT Viewed From Side) (LPT Viewed From Process Tool Side)
Figure 1-12. Label Placement

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Chapter 2
SYSTEMS OVERVIEW
2.0 INTRODUCTION
This chapter provides an overview of Asyst Technologies Load Port Transfer system.
2.1 LPT SYSTEM OVERVIEW

The LPT is configured as a 200 millimeter SMIF-Port with integrated minienvironment (see Figure 2-1). The
base assembly contains wheels which provide leveling and ease of removal of the LPT from the Process Tool
if needed. Two (2) support structures are attached to the base; the vertical drive column and the support
column. Attached to these columns is the stationary port door and the movable minienvironment. The top-
most portion of the minienvironment is the port plate. The LPT is designed to directly mount onto a Process
Tool via an interface frame and use a quick disconnect type latch. The LPT can then be quickly disconnected
from the Process Tool for service without loosing LPT to Process Tool alignment.
The LPT brings together SMIF-integrated cassette handling with commercially available semiconductor
Process Tools. The LPT can place the cassette into a Process Tool with the integrated cassette-transfer arm.
The LPT meets the SEMI standard for inter-equipment material transport interface (SEMI E15-91). An LED
light beam-based sensing system on the LPT provides precision wafer mapping and cassette slot location.
The light beam also detects cross-slotted wafers. It senses protruding wafers (horizontal view) so that the
system can be stopped and the extended wafer can be reseated.
A fan and ULPA filter are located in the base of the minienvironment (see Figure 2-3) to assure a clean and
isolated local environment (minienvironment) during SMIF-Pod opening and cassette transfer. The ultra-pure
air is expelled into the minienvironment. A fan is also located on the side column above the I/O connector
panel for reducing particles. See Figure 2-3 for the air-flow diagram.
Figure 2-1. Load Port Transfer System (LPT 2200 Shown)

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2.2 CONTROL PANEL (Optional)
NOTE
Due to varying hardware configurations of the LPT,
the control panel may or may not be accessible to
the user. If the panel is visible on the vertical corner
of the user side of the LPT, then it may be usable.
Direct (non-Host control) control of the LPT is normally used for service purposes or
during alignment of the LPT to the Process Tool cassette-transfer mechanism.
Direct control of the LPT is performed using LOAD, UNLOAD, and HOME switches
on the control panel located on the rear (user side) of the LPT, if it is available, and
is not intended for the user to use for production purposes.
LOAD Pressing the LOAD switch begins a load operation, which initiates all of
the functions to move the cassette from the SMIF-Pod to the Process
Tool cassette station.
UNLOAD Pressing the UNLOAD switch begins an unload operation, which

initiates all of the functions to move the cassette from the Process Tool
cassette station to the SMIF-Pod.
HOME The HOME switch can be pressed by the user if certain types of errors
occur. See Chapter 3 for a list of possible error conditions.
POWER (Black, rocker-type, non-illuminated, LPT master-power switch).

This switch is available on all LPTs and is normally in the I-
position. The I-position is the power-on position. This switch
may be used to stop the LPT in the middle of an operation when
set to the O-position; however, if so used, normal LPT operation
may be resumed ONLY by factory-trained personnel.
Figure 2-2. Control Panel

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SMIF-Pod
Minienvironment
Cassette
Exhaust Fan
Ambient Air is pulled by the
fan, pushed through the filter
and into the minienvironment.
Air is exhausted from
inside the vertical
ULPA-Filter drive column to
remove particles
generated by the drive
Minienvironment Fan screw and motors.
Figure 2-3. LPT Air Flow Diagram
2.3 OPERATING SEQUENCE

The following section describes the LPT operating sequence. The operation starts from the Home position.
The LPT is at the Home position when the following criteria are met.
Home Position Criteria:
1. The port door is seated to the port plate (Pod-door-closed interlock and minienvironment down-limit
switches are made).
2. The pod hold-down latches are retracted (open).
3. The wafer seater is retracted (in).
4. The vertical drive is at its Home switch.
5. The rotating arm is at its down-limit switch.
6. The gripper fingers are open.
7. The gripper head is vertical.
8. The READY indicator is lighted.

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2.3.1 LOADING AND UNLOADING SEQUENCE

1. The sequence is started with the LPT in the Home position. The SMIF-Pod (with cassette) is placed
onto the port plate. Three holes in the base of the Pod are aligned with three alignment pins on the
port door. The pod-in-place switch is depressed by the weight of the Pod and the interlock is made.
The POD-IN-PLACE lamp lights.
2. When commanded by the Host computer, Process Tool, or by user action, the load sequence begins.
The pod hold-down latches activate to secure the SMIF-Pod to the port plate and the pod-door locks
are unlocked from the SMIF-Pod top.
3. The minienvironment moves upward carrying the port plate with the SMIF-Pod top attached while the
port door and attached pod door and wafer cassette remain stationary.
NOTE
As the minienvironment is moving upward, if a cassette is not found, the load
cycle will be aborted.
The LOAD switch lamp (if available) blinks until the cycle is complete.
4. The vertical arm drive assembly moves up as the rotating arm rotates to position the gripper over the
cassette and stops. The vertical arm then moves down until the top of the cassette comes in contact
with the gripper and continues moving down, pushing on the cassette until it activates the squat
switches in the gripper and then stops. (In the case of an H-move, the gripper squats on the face of the
cassette.)
5. The gripper fingers close to grip the cassette.
6. The rotating arm rotates forward (carrying the cassette) as the vertical arm moves down, then moves
up after clearing the interface frame to move the cassette straight out from the arm and into the
Process Tool. On some models of the LPT, the gripper rotates to seat the wafers in the cassette,
then returns to its horizontal position. If the material in the cassette is vertical or this is an H-Move,
the gripper rotates down and remains down.
7. The rotating arm continues forward until it reaches a taught position. The vertical arm moves up to a
programmed height.
8. The vertical arm moves down until the bottom of the cassette comes in contact with a Process Tool
indexer or cassette station, which triggers the squat switches in the gripper and the vertical arm
stops.
9. The gripper fingers open, releasing the cassette. The vertical arm then moves up to its original
position before the squat began. Simultaneously, the rotating arm rotates to is Home position, the
vertical arm moves down to its Home position (down limit) and the gripper rotates to the vertical to
clear the minienvironment.
10. The minienvironment is returned to the Home position to wait for the unload sequence.
CAUTION
During normal operation, once a cycle is started, the pod top
is locked to the port plate and cannot be removed. Do not try
to remove it. Failure to comply may result in damage to the
port plate and SMIF-Pod.

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NOTE
The next operation performed on the Arm must be an unload. In single-load
mode another load operation will not be permitted until an unload is first
completed.
11. At the conclusion of processing, the Host computer or Process Tool will give the UNLOAD command.
The minienvironment was returned Home as in the previous step, it has to be moved up to accept the
cassette. The minienvironment will move up to its maximum height.
NOTE
In standard-load mode, as the minienvironment is moving up, if a cassette is
found on the port door, the unload cycle will be aborted.
12. Verify that an empty SMIF-Pod is on the port plate.
NOTE
The UNLOAD lamp (if available) blinks until the cycle is complete.
13. The rotating arm rotates forward to a programmed position as the vertical arm moves up to a taught
height and stops.
14. The vertical arm moves down until the gripper comes in contact with the top of the cassette, which
triggers the squat switches in the gripper, and the vertical arm stops.
15. The gripper fingers grip the cassette.
16. The vertical arm moves up some distance. Simultaneously, in some LPT models, the rotating arm
rotates upward, then the gripper head rotates (tilts) to seat the wafers. If the material in the cassette is
vertical or this is an H-Move where the gripper rotates up and remains up, there is no gripper rotation.
17. The vertical arm moves up to its original position before the squat.
18. Simultaneously, the rotating arm and vertical arm move to position the cassette over the port door.
19. The vertical arm moves down and the bottom of the cassette comes in contact with the pod door,
then continues downward until the top of the cassette triggers the gripper squat switches and stops.
20. The gripper fingers open to release the cassette.
21. The vertical arm moves up to clear the cassette.
22. Simultaneously, the rotating arm moves up to the vertical position, the vertical arm moves down to a
taught position, and the gripper head rotates to the vertical.
23. The minienvironment moves down. As the cassette is passing through the port plate, the horizontal
laser sensor checks for protruding wafers.
24. The pod door locks and the pod hold-down latches unlock. The minienvironment is at its down limit
(Home), pod door closed (locked), and pod hold-down latch disengaged-interlock switches are all
made.
25. The UNLOAD switch lamp (if available) stops blinking and the LOAD switch lamp (if available) lights.
The SMIF-Pod may be removed; the LPT is now ready to perform the next load operation.

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2.4 MECHANICAL ASSEMBLIES

The LPT consists of a SMIF-Port assembly and integral minienvironment supported off of a base assembly
by two side columns. The base has four (4) wheels to aid in moving the LPT for service. One side of the
stationary frame is a simple support column and the other contains the vertical drive mechanism (elevator) for
the minienvironment and the arm vertical drive component.
2.4.1 DRIVE COLUMN.

The two (2) vertical drives each utilize an independent servo-motor driven ball-bearing mounted drive nut
assembly (see Figure 2-4). These drive assemblies are located on a fixed drive screw. These independent
servo motors provide vertical motion for raising and lowering the minienvironment and the vertical arm drive.
2.4.1.1 VERTICAL ARM DRIVE.

The vertical drive (Figure 2-4) is a servo-motor driven arm assembly attached to the drive screw. This
assembly provides Z-motion for raising or lowering the rotating arm.
2.4.1.2 ROTATING ARM DRIVE.

The rotating arm drive (Figure 2-5) is a servo-motor assembly attached to the vertical arm. This assembly
provides X-motion for moving the cassette from the pod door to the Process Tool and back again. On the end
of the rotating arm is located the cassette gripper.
Minienvironment
Drive Mechanism
Stationary
Drive Screw
Vertical Arm
Drive
Mechanism
Figure 2-4. LPT Vertical Drive

(Series 2 Shown, Series 1 Similar)

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Minienvironment Drive
SMIF-Pod
Rotating Arm (Extended)
Port Plate
Gripper Rotation Pivot
Minienvironment
(Shown Raised)
V-Move Gripper
Cassette On
Stationary Port
Door
User Side of LPT Process Tool Side

of LPT
Arm Rotation
Axis
Vertical Arm Axis of Motion

Vertical Arm Drive
Access to
Electronic
Circuit Boards
And The Power
Supply
Figure 2-5. LPT Overview

(Right Hand, V-Move-Configured LPT Shown)
CASSETTE GRIPPER. The gripper drive (Figure 2-5) is a servo-motor driven assembly attached to the
vertical arm. This assembly enables tilt-motion for the cassette when commanded, and provides for the
continuous movement of the cassette so that the cassette can be held level at all times when the
cassette is transferred between the LPT and the Process Tool.
Displacement activated optical squat switches are located within the gripper to provide the Arm with a
sense of touch. Two (2) squat switches are used for V-Move systems and three (3) for the H-Move
systems. During load and unload cycles, the gripper performs a squat just prior to the gripper fingers
opening or closing.
2.4.2 MINIENVIRONMENT.
The top portion of the minienvironment is the SMIF-port. Located in the lower portion is a fan and ULPA
(ultra-low particle air) filter element which provides the minienvironment with a self-contained filtered air
system. The minienvironment structure is servo-motor driven to move vertically in response to a LOAD or
UNLOAD command. When a LOAD or UNLOAD command is given to the LPT, the minienvironment raises
the port plate with the attached pod top leaving the pod door and cassette stationary. The cassette remains
on the stationary port door, in a clean environment.
2.4.3 PORT ASSEMBLY.

The LPT SMIF-Port complies with SEMI standards. The LPT 2150 complies with standard E19.3-91 and the
LPT 2200 complies with standard E19.4-94. The SMIF-Port consists of the port plate assembly and a port door
(see Figure 2-6). The port plate is the loading platform for a SMIF-Pod. The port door is attached to the LPT
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frame and is stationary. The 200mm port door houses the pod door lock and unlock drive mechanism and a
pod-in-place sensor. In the 150mm port, the pod door lock and unlock and pod-in-place sensor functions are
contained on the port plate. The port plate has two (2) SMIF-Pod guides / covers. One cover contains a
SMART-Tag probe and status indicator lights to indicate POWER, READY, and POD IN PLACE information.
Also part of the port assembly are the pod hold-down latch mechanism, the optical detector system, excessive
wafer protrusion sensor, wafer re-seater mechanism, and the optional FluoroTrac antenna (if equipped).
The excessive wafer protrusion sensor is a down looking sensor. The electronic circuit is adjusted to detect
an excessively protruding wafer when it is one inch below the port plate. If the sensor detects a wafer, the
system is halted. The wafer must then be manually reseated and the process restarted.
2.4.3.1 PORT DOOR.

The port door provides a stationary platform upon which the product cassette and pod door rests during its
separation-from or return-to the pod top. Three locating pins on the port door provide precise registration of
the pod door and cassette. The port door contains the pod lock/unlock motor and actuator assembly and a
pod-in-place switch. The LPT cassette-transfer arm picks the cassette from and returns it to this position
during a load or unload operation.

2000-0900-01 Revision A
Pod Latch Pin

(1 of 4)
150mm Port Door
Pod Alignment
Pod In Place Pins (3)
Switch
Tag Reader
Power Light
Ready Light Pod In Place Light
2150 LPT 2200 LPT

150mm Port Plate 200mm Port Plate
Pod In Place
200mm Port Door
Switch
Pod Alignment
Pod In Place Light Pins (3)
Ready Light
Power Light
Tag Reader
Figure 2-6. LPT Port Plates

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2.4.3.2 OPTICAL DETECTOR SYSTEM.

The optical detector system incorporates a laser diode emitter which produces a visible, red-colored, light beam
at 670 nanometers wavelength, integrated with a regulated power supply circuit, and a focusable collimating
lens. When power is applied to the LPT, power is applied to the optical circuitry as indicated by the POWER
indicator on the status indicator panel on top of the port plate.
2.5 ELECTRONIC ASSEMBLIES
2.5.1 PRINTED CIRCUIT BOARD ASSEMBLIES (PCBA).

The LPT system operation is dependent on seven (7) major PCBAs.
1. The port control (indexer) board
2. The LPT system controller board
3. The motion control board
4. The servo amplifier board
5. The communications I/O interface board
6. The power distribution board
Figure 2-7 shows a System Interconnect Diagram. Refer to the complete Interconnect Block Diagrams in
Appendix A for interface information; Asyst part number 3400-0057-01 for LPT 2200 and 3400-0056-01 for
LPT 2150.
SERVO CONTROLLER
6900-1283-01 J1 P1 PARALLEL I/O CONNECTOR PANEL
TO ELEVATOR MOTOR PCM-U1O48 9700-4084-XX
SERVO AMP P2 P/O P8
6900-1284-01 9700-4081-01 P/O J8
P1 J1 J2 PARALLEL PORT
SERVO PWR (1-34) P1
34 DB25F
9700-4083-01
6900-1355-01
J2 PORT A (SPARE)
PC/104 BUS DB9M
9700-4072-01 9700-4082-01
9 5 P6B
P10 SERIAL I/O PORT B (TEST)
SERVO AMPLIFIER PCM-COM4A J1
6900-1272-01 P3 J10 DB9M
J6 P6 6900-1290-01 CHAN2 J6B
J3 U2 CHAN3 (TAG)
J1
P3 CHAN2(11-20)
J1 P1
PORT CONTROL 5 SERVO J6 P6 10
P1 (INDEXER) 9700-4108-01 JDC J3 9700-4109-01 PORT C (LAPTOP)
9700-3717-01 J7 J4
P5 J5 P7 10 CHAN1(1-10) 20 DB9M
2 2
SPARE 10
P22 P22 5 CHAN4 (HOST)
9 2 J6A P6A P/O P7
J12 PORT D (HOST)
9700-4080-01 P/O J7 J3
2 INDEX PWR P12 DB9M
10 (11-20)
CHAN1
11 9700-3706-01 2 P/O P7
4 PC/104 BUS
9700-4080-01 P/O J7
TEST (N/C)
10 (1-10)
J11 P11 P/O P7
MINIENVIRONMENT SERIAL1(1-10)
HOST 9700-4080-01 P/O J7
DC-DC CONVERTER FAN (21-40)
3200-1061-01 SERIAL2(11-20) 20
P2 P2
(LAPTOP)
J13 P13 P/O P8
2 INX PWR SERIAL3(1-10)
(TOOL) 9700-4081-01 P/O J8
(35-54)
SERIAL4(11-20) 20
P4 P4 P10 (TEACH PENDANT)
9700-4075-01 J10 J7 P7
P3 P3 6900-1282-01 J9 LAN
CPU POWER 4 ETHERNET RJ45
POWER 8 8
SERVO PWR 2
J16 P16
9700-4267-01 J5 PORT E (TOOL)
P21 UTILITY I/O 6900-1115-01 DB9M
(7-8) 2
CPU PCB J6 TEACH PENDANT
P21 6900-1285-01 CPC8F
2 P5 P5 P/O P8
9700-4081-01 P/O J8 J10 AC POWER
FRONT 7 (CONN POWER) (55-62)
7
SWITCH
PANEL P1 P1 P20 J20
ASSY 9700-4074-01 POWER SUPPLY 9700-4073-01 9700-4078-01
24V PWR 3 6200-2009-01 3 3
OUT IN
GND
J24 P24
2
FAN
9700-4337-01 9700-4338-01
9700-3732-01 (ON/OFF CONTROL)
9700-4079-01 2
Figure 2-7. Simplified System Interconnect Diagram

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2.5.2 PORT CONTROL.

The port functions are controlled through two (2) electronic assemblies located on a common chassis
assembly. These assemblies are located in the bottom of the minienvironment on the Process Tool side (see
Figure 2-8).
• The first unit is an Indexer board assembly consists of two (2) printed circuit board (PCB) assemblies
located in the base of the minienvironment (Process Tool side), enclosed for ESD protection, contain
the electronic circuitry to control the port plate small motor functions, port plate sensor and detector
inputs, and communicate with the LPT system control board. The indexer central processing unit
(CPU) circuit board is piggybacked onto the indexer control interface board.
• The second unit is a servo amplifier. This is the elevator (minienvironment) motor driver.
Using the electronics functional block diagram, located in Appendix A (3400-0018-01), the following paragraphs
will describe its operation.
Servo Amplifier
Indexer
Control
Interface
Board
Indexer
CPU
Board
Figure 2-8. Port Control (Indexer) Board
2.5.2.1 POWER.
The +24 vdc (+10%, -5%) input power is applied through external connector J5 to the Main Control PCB. The
input voltage is sent to a reverse-voltage-protection diode that ensures only the correct polarity 24 vdc is
accepted. A circuit monitors over/under voltage and over-current situations to control the +24 vdc transistor
power switch. An acceptable band of +19.5v to +30.0v (nominal) input voltage is required to allow the
transistor switch to turn on. Outside this voltage band, the transistor switch will be off.
Any over-current situation is detected via a sense resistor. If a 24v current greater than 5.0 amps nominal is
detected, the transistor power switch will turn off or will be tripped. If the switch is tripped, 24v power must be
shut off and then turned on to reset the LPT.
A second over/under voltage circuit is used to detect a power failure and signal the CPU. The acceptable
range for this circuit is from +22.8v to +26.4v (nominal). This voltage is within the range of the first over/under
voltage circuit, described above. Voltage outside the acceptable range gives a power fail signal, which allows
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for orderly shutdown of motors and the saving of certain run-time parameters and data to the battery-backed
static random access memory (SRAM). Data is saved before transistor power is switched off, as described in
the previous paragraph.
The +24v switch voltage from the transistor power switch provides power for the motor-driver circuits and the
dc-to-dc converter. The converter provides +5v to the digital circuitry and ±12v for analog and interface
circuitry.
2.5.2.2 CPU.
The CPU microprocessor is an 80C188. This processor provides a 16-bit internal and 8-bit external data
transfer bus running at 16 MHz.
2.5.2.3 PROGRAM MEMORY.

The program memory is contained in an erasable-programmable random access memory (EPROM).
2.5.2.4 SRAM.
The SRAM is battery backed to provide a long-term non-volatile random-access memory (NOVRAM). This is a
readable-writeable memory source for the storage of equipment configuration data and history. The battery
(Lithium type) is self contained in the NOVRAM socket device and has an estimated shelf life of ten years.
2.5.2.5 QUAD-SERIAL I/O.

The quad-serial I/O device is a universal asynchronous receive transmitter (UART) used to process four
channels of bi-directional RS-232 data. One channel, channel D, can be selected (jumpers on the PCB) for RS-
232 or RS-485 local-area network communication. The four (4) ports are:
1. Host/Process Tool. A 9-pin D-subminiature type connector (J7) (Figure 2-9 HOST EQUIP) is for
connection to the Communications Control Board.
2. STS Probe. This is a 9-pin D-subminiature type connector (J6) (Figure 2-9 SAM) for internal
connection of the probe assembly which is located in the port plate. The probe is designed to
communicate with a SMART-Tag, which is mounted on the Pod. The probe and Tag use two-way
infrared communications devices to transfer data.
3. J8 – Not used.
4. J9 – Not used.
J7 J9
J5
J10
J6 J8
Figure 2-9. Indexer Board Connectors
2.5.2.6 DIGITAL I/O.

The digital I/O block communicates with the CPU via the computer data bus. Digital I/O latched output lines are
for control and annunciation by the status indicators on the port plate. Inputs for interlocks, limit switches, and
sensors are read into the CPU via the input lines of the digital I/O.

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2.5.2.7 WATCHDOG TIMER.

The watchdog timer resets the CPU on powerup. If the watchdog timer fails to receive a pulse from the CPU via
the digital I/O every 600 msec., the CPU will be reset. The watchdog timer will halt the CPU if the CPU voltage
falls below 4.5 vdc. This ensures that the CPU is properly executing instructions and no associated failure has
occurred.
2.5.2.8 INTERRUPT CONTROLLER.

The interrupt controller accepts inputs from the quad-serial UART, digital I/O, and the horizontal view and slot
sensors to provide interrupt data to the CPU.
2.5.2.9 SENSORS.
All sensors used on the LPT are optical sensors. The optical sensors are either break-the-beam type or beam-
intensity-threshold type.
1. OPTICAL SENSORS. The light beam is detected by the following beam-intensity threshold optical
sensors:
• Wafer sensor
• Slot sensor
• Protrusion sensor
The light beam is sent through two (2) beam splitters and reflected off of two (2) mirrors to strike
three (3) horizontal view sensors (see Figure 2-10). These sensors feed intensity information from
the sensor, as a voltage level, to the comparators which have a programmable threshold. This
voltage level is detected by a comparator whose reference is set by a digital-to-analog converter
(DAC). Here, a 0v to 5.0v input level will equal a 0 to 255 count from the CPU to the DAC. The
outputs of the comparator are processed via the digital I/O.
a) WAFER SENSOR. The light beam is first directed to a precision optical beam splitter that
reflects a portion and transmits a portion of the light. The reflected light travels across the mid
point of the port opening. On the opposite side of the port door opening, the light is directed
through an aperture and then strikes a sensor. This sensor is used to furnish positional
information about individual wafers. The information is then stored into memory as internal data
collected for cassette wafer mapping. This sensor is also used to determine cross-slotted errors.
b) SLOT SENSOR. The transmitted light beam from the first beam splitter is directed at a second
beam splitter. This beam splitter evenly splits the light into two beams. The reflected beam
travels at an angle across the port opening. The angle of the beam is such that the light path will
pass through the cassette wafer slot openings on one side of the cassette as it travels up or
down with the minienvironment. The beam is then projected through an aperture to a sensor on
the opposite side.
c) PROTRUSION SENSOR. The transmitted light beam from the second beam splitter is projected
across the cassette opening and through an aperture and onto a sensor on the opposite side.
This sensor is used to detect any wafers which may be protruding beyond the front of the
cassette. This would cause damage to the wafer if the minienvironment was returning the
cassette into the SMIF-Pod. Activation of this sensor causes the wafer seater mechanism to
reseat the out-of-position wafer.

2000-0900-01 Revision A
CASSETTE SLOT SENSOR
SILICON WAFER WAFER PRESENT SENSOR
PROTRUSION SENSOR
<1 mW
LASER DIODE
67O NM VISIBLE RED
RETROREFLECTIVE
INFRARED SENSOR FOR PARTIAL VIEW OF
EXCESSIVE WAFER BEAMSPLITTER CASSETTE SLOTS
PROTRUSION
(Vertical View)
WAFER AT SOME
EXCESSIVELY PROTRUDED
2
POSITION 10 mm
FIRST SURFACE
BEAMSPLITTER MIRRORS
Figure 2-10. Optical Detector System Pictorial
2. OPTICAL-LIMIT SWITCHES. The optical-limit switches (break-the-beam type) are small electronic
devices that provide an off and on signal via the digital I/O to interrupt the processor when actuated.
Their functional applications are:
• Pod-in-place
• Pod lock – unlock
• Pod hold-down latch – latched / unlatched
• Elevator up limit
• Elevator down limit
3. EXCESSIVE WAFER PROTRUSION SENSOR. The excessive wafer protrusion sensor, vertical
view, uses an IR emitter / receiver (retroreflective) sensor. If a wafer were to be positioned too far out
of the cassette for the wafer seater to correct, this sensor would detect the wafer long before it could
pose a problem. Detection is by direct reflection off the wafer’s top surface. Upon detection, the LPT
will halt and the Process Tool will halt so that the wafer can be manually reseated into the cassette
slot. The process must then be restarted.

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2.5.2.10 LPT 2200 MOTOR CONTROLS.

There are five (5) motors in the 2200 LPT that are controlled by the Main Processor Board: one (1) pod hold-
down dc-stepper motor, one (1) wafer reseater dc-stepper motor, one (1) pod door lock / unlock dc motor, and
one (1) elevator dc-servo motor. There are three (3) motor control circuits on the Main Board. The elevator
motor has a separate servo amplifier unit which is chassis mounted (see paragraph 2.5.2). The fifth motor is
the air circulation fan motor.
NOTE
Optical limit switches associated with the actuator motors and elevator motor
have software generated time limits for actuation. Failure to actuate in a
given period of time will cause the dc-motor to stop motion.
1. MINIENVIRONMENT SERVO-MOTOR. The minienvironment (elevator) is controlled by a servo

loop consisting of: a servo-motor controller, amplifier-driver, dc-drive motor, digital encoder, and a
position-capture circuit. The controller is programmable from the CPU. The forward and reverse drive
information is provided to the amplifier/driver that provides pulse-width modulated (PWM) voltage to
the motor. The encoder produces the equivalent of 2000 counts per lead screw revolution for
feedback to the servo-controller. This produces control and position data for the CPU. Motor current
is sensed through the driver circuit to prevent motor or circuit burnout due to a stalled motor or
shorted winding. The over-current trip-point is set at 3.5 amps nominal. The overcurrent condition is
resettable via the software.
The minienvironment up-limit switch is used to indicate an over-travel condition. The minienvironment
down-limit switch is used to confirm that the elevator is at the Home position.
2. POD-DOOR LOCK MOTOR. The pod-door lock motor is driven by an amplifier-driver. When the
motor runs the pod-lock mechanism to its locked position, the lock-limit (switch) is detected, thus
turning off the motor. This is the same procedure for the motor and the unlock-limit switch. Motor
current is sensed through the driver circuit. If the motor were to stall, current would be limited until the
condition was cleared. If a shorted motor winding or some other type of short circuit were to occur,
the over-current would be tripped. The trip condition can be reset by powering down the LPT and
then reapplying power.
The pod-lock motor has the pod-open and pod-closed limit switches that ensure that the motor is de-
energized when it has reached the desired position.
3. DC STEPPER MOTORS. The DC stepper motor for the pod hold-down latch and the wafer seater
motor each have their own stepper-motor driver, but they share a step sequencer, since these
motors will never be energized at the same time. A current limiter is provided should an overcurrent
or short circuit occur in the motor wiring.
Each motor has limit switches that will cause the motor to stop if a maximum travel limit is exceeded.
2.5.2.11 LPT 2150 MOTOR CONTROLS.

There are four (4) motors in the 2150 LPT that are controlled by the Main Processor Board: one (1) pod lock /
unlock dc motor, one (1) wafer seater dc motor and one (1) elevator dc-servo motor. There are two (2) motor
control circuits on the Main Board. The elevator motor has a separate servo amplifier unit which is chassis
mounted. The fourth motor is the air circulation fan motor.
1. MINIENVIRONMENT SERVO-MOTOR. The minienvironment (elevator) motor function is the same

as the LPT 2200.
2. DC STEPPER MOTORS. The DC stepper motor for the pod lock / unlock and the wafer seater
motor function is the same as the LPT 2200.

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2.5.2.12 STATUS INDICATORS.

The lights located on the port plate indicate the operational status of the LPT. See Figure 2-11.
1. POWER. The POWER indicator, when lighted, indicates that the system power supply is switched
on, converting 100 to 260vac into +24vdc, which is applied to the indexer board. The light is powered
from +5vdc which is derived from the +24vdc input power.
2. READY. The READY indicator, when lighted, indicates the readiness of the LPT. When the light is
lighted, the LPT is idle and ready to accept a new command from the Host. When it is off, the LPT is
busy and cannot accept any more action commands until all motions in progress are completed. The
state of this light, however, has no affect on commands initiated by the SMART-Comm or MSC
(SAM) or commands interrogating the LPT status.
3. POD-IN-PLACE. The POD-IN-PLACE indicator, when lighted, indicates the presence of a SMIF-Pod
on the port. When the light is lighted, a Pod has been properly placed on the port. When it is off,
either a Pod is missing or it is improperly seated on the port.
Figure 2-11. LPT Status Lights
2.5.3 LPT SYSTEM CONTROLLER BOARD.

The LPT system controller board is a high performance single board computer (see Figure 2-11). It is a 486DX-
based PC/AT compatible system with two (2) plug-in daughter boards. The additional boards are:
1. PC/104 Type One, four-channel serial I/O module with option for two-channel RS485
2. PC/104 Type One, 48-channel digital I/O module
Key functions of the processor assembly include:
• 80486DX2 CPU, 50 MHz – DOS operating system
• Onboard DRAM: 4M byte
• Disk on chip – bootable program memory: 2M byte flash solid state disk (SSD)
• Static RAM: 512k words x 8 (battery backed)
• Embedded-PC BIOS.
• Eight (8) buffered RS232C serial ports:
1. Communications to the Port Control (Indexer) Board (internal LPT connection)
2. Communications to the Servo Controller Board (internal LPT connection)
3. Communications to a SECS–CIM Host (external LPT connection)
4. Communications to the Process Tool (external LPT connection)
5. Communications to a Teach Pendant (external LPT connection)
6. Communications to an auxiliary computer (external LPT connection)
7. Communications to an SMART-COMM or MSC (Tag)
(SAM connector on Indexer Board) (internal LPT connection)
8. Communications to LPT2 or (spare / MSC / SMART-Comm) (external LPT connection)
• Onboard keyboard and speaker interfaces
• Onboard floppy and fast IDE drive controllers
• Onboard Ethernet LAN interface
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• 48 general purpose, programmable, bi-directional, parallel I/O lines.

• An IEEE-1284 parallel port – 12-digital I/O lines optically isolated at the LPT I/O panel
Additional features include a watchdog timer and powerfail NMI (non-maskable interrupt), extended
temperature operation, advanced power management, and +5.0-vdc-only operation.
A second LPT can be connected via the Ethernet connection or the spare RS232C port.
2.5.4 POWER SUPPLY.

The power supply converts the LPT incoming 100 to 260vac into +24vdc. The supply can be remotely turned on
by setting the POWER switch on the user control panel of the LPT to the O (ON) position. The supply provides
24vdc to the power distribution board and 24vdc to the small column mounted fan.
Power Supply
Figure 2-12. LPT System Control Board and Power Supply Assembly

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2.5.5 MOTION CONTROL BOARD.

The Motion Control Board receives axis movement instructions from the system control board (see Figure 2-
13). This digital code from the LPT control program is translated into analog signals that drive the servo-
control amplifiers on the servo amplifier board. This board is located directly under the servo amplifier board
on the front of the LPT.
Figure 2-13. Motion Control Board
2.5.6 SERVO AMPLIFIER BOARD.

The servo amplifier board receives motor drive information for each of the three (3) servo amplifier circuits on
the board from the motion control board (see Figure 2-14). There is a servo amplifier for each of the following
motors: the arm assembly vertical-drive motor, the rotating-arm motor, and the gripper-tilt motor.
Tilt Axis Vertical Axis Rotate Axis

Servo Amp Module Servo Amp Module Servo Amp Module
Figure 2-14. Servo Amplifier Board

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2.5.7 COMMUNICATIONS I/O INTERFACE BOARD.

The communications distribution board is a component of the connector panel located on the side of the LPT.
Each of the connectors is attached to the distribution board. Located on the board is the opto-isolation
circuitry for the parallel communication interface. There are two (2) jumpers located on this board which
enable or disable the opto-isolation. The Communications I/O Interface Board provides circuitry for a fully
opto-isolated (6 inputs and 6 outputs) parallel interface. The board receives data lines from the processor
board. The board divides the data into the proper serial port, parallel interface, Teach Pendant, and Ethernet
information connectors. A power input is provided for the parallel interface circuitry and for output to the
Teach Pendant.
2.5.8 POWER DISTRIBUTION BOARD.

The +24 vdc is provided by system power supply to the power distribution board (see Figure 2-15) which
provides connections for an indexer board power bus, servo motors bus, and to the on-board DC-to-DC
converter. This converter provides +12vdc, –12vdc, and +5vdc to the I/O interface board. +12vdc and +5vdc
are also provided to the system control board. See Appendix C, Power Distribution diagram.
+24vdc Indexer Indexer Servo Servo Comm I/O System

Power Power Board Amp Amp Processor Connector Control
Input Fuse Power Board Board Board Panel Board
(F1) Output Power Power Power Fuse Power Power
Fuse Output (F3) Output Output
(F2)
Figure 2-15. Power Distribution Board

(Viewed as mounted next to power supply)
2.5.9 TEACH PENDANT.

The quickly detachable Teach Pendant allows the service engineer to perform a variety of LPT functions. The
Teach Pendant is used to teach the LPT arm and gripper the coordinate points it must execute during the
load and unload cycles and to reset the operation of the LPT manually if it is halted in mid-cycle. Refer to
Appendix B for the detailed operation of the Pendant.

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Chapter 3
DIAGNOSTICS AND TROUBLESHOOTING
3.0 INTRODUCTION
This chapter provides information for troubleshooting problems associated with the LPT.
3.1 PROBLEM IDENTIFICATION

This chapter provides a troubleshooting information. Table 3-1 provides step-by-step troubleshooting of
common symptoms found in the operation of the LPT.

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TABLE 3-1. USER IDENTIFIED PROBLEMS
Indication/Problem Possible Causes Solutions

Indication: No indicator lights 1. The LPT power plug is not 1. Push the power cord
on the port plate. plugged into the power connector onto the LPT
connector at the LPT base. power connector.
2. The Process Tool does not 2. Turn-on the Process Tool.

have power applied.
3. The Process Tool has power, 3. Check LPT main power fuse.
the LPT power cord is
attached, but there are no
lights.
Indication: The POWER light is 1. The Host computer or the 1. Wait for the LPT to perform
lit, but the READY light will not Process Tool have issued a the task ordered.
light. command to the LPT.
2. LPT will not respond. 2. Using the Teach Pendant,
select the configuration menu
and ensure that the LPT is
configured to communicate
properly with the Process
Tool or Host computer.
Indication: The POD-IN- 1. The SMIF-Pod is not properly 1. Ensure that the SMIF-Pod is
PLACE light will not light when a seated on the port plate. sitting flat on the port plate in
SMIF-Pod is placed on the LPT the proper orientation.
port plate.
2. Pod-in-place switch is not 2. Perform procedure CAP 10 in
calibrated. Chapter 4; Service.
3. Electronic problem. 3. Troubleshoot.
Indication: The Host or 1. The serial communications 1. The Host always utilizes the
Process Tool has sent a cable is not plugged into the serial port D connector while
command to the LPT, but proper connector at the base. the SMART-Tag may be
nothing happens. configured to use port D or E.
Push the plug onto the LPT
connector and tighten the
connector hold-down
screws.
2. The communications 2. Using the Teach Pendant,
configuration has not been select the configuration menu
setup for the LPT. and ensure that the LPT is
Baud rate = 9600 configured to communicate
Parity = None with the Process Tool or Host
Data bits = 8 computer. See LPT
Stop bit = 1 Installation Instructions for
configuration setup.
3. The jumpers W1 and W2 on 3. Remove jumpers W1 and W2
the parallel interface have not to restore Host control.
been removed for Host
control.

2000-0900-01 Revision A
TABLE 3-1. User Identified Problems (Continued)

Indication: False wafer appears in 1. Laser tube, mirror, or sensor 1. Tighten loose optical system
the wafer map when viewing DSIM is loose and moves while component and perform
Auto Mode screen. The LPT halts minienvironment is moving. Optical Detector System
and alarms. Adjustment; CAP 12, in
Chapter 4.
Indication: During an unload 1. Excessive wafer protrusion 1. Perform Excessive Wafer
operation, the cassette is being sensor needs adjustment. Protrusion Sensor
loaded into the SMIF-Pod. Protruding Adjustment; CAP 02, in
wafer below the wafer seater cannot Chapter 4.
be seated or wafer is broken by the
port plate. The LPT halts and alarms.
Indication: During a load operation, 1. Position accuracy 1. The User uses the Teach
the LPT halts and alarms: improper deteriorates over time due to Pendant to select the
squat. servo encoder pulses being position drift check options.
missed by the arm servo See Appendix B:
controller. Eventually the Teach Pendant CFG key
position is far enough out that Select Read / Write Items
an error occurs. Select Position drift chk
Select 0.020 or 0.040 or 0.060.
Automatic Homing calibration
is activated at start of next
Load cycle if current position
at the port (full squat) position
exceeds position recorded at
end of last homing calibration
cycle.
Indication: During a load or unload 1. Leadscrew needs to be 1. Clean and lubricate
operation the LPT halts and alarms. cleaned and lubricated. leadscrew. Perform PMP 01,
in chapter 4.
Problem: Mechanical Position
Following Errors. 2. Loose or stretched belt. 2. Tighten or replace belt.
Perform a portion of CSP
01A or 01B, in Chapter 4.
3. Adjust brake or replace.
3. Brake drag (see Note 1).
Perform CSP 07A or 07B,
in Chapter 4.
4. Brake seating (see Note 1). 4. Adjust brake or replace.
5. Safety nut improperly 5. Check for proper clearance

adjusted ( Series 2 ). (0.120 to 0.180 inches)
between pulley and nut and
safety nut.
6. Pulley/Nut assembly is not 6. Replace pulley or nut.

concentric.
7. Defective pulley bearings. 7. Replace pulley.
8. Bad vertical drive motor 8. Replace vertical drive

bearings. motor. Perform CSP 01A or
01B, in Chapter 4.
9. Leadscrew is warped. 9. Replace leadscrew.
2000-0900-01 Revision A
TABLE 3-1. User Identified Problems (Continued)

Problem: Electrical Position 1. Elevator servo amplifier 1. Replace servo amplifier
Following Errors. defective.
2. INX/LP Control Interface 2. Perform INX/LP
Board defective. Electronic Circuit Board
Replacement procedure;
CSP 04, in Chapter 4.
3. Defective or intermittent 3. Perform
elevator motor. Minienvironment-Drive or
Arm Servo-Motor
Replacement procedure;
CSP 01A or 01B, in
Chapter 4.
4. Defective encoder 4. Perform Encoder
assembly. Replacement procedure;
CSP 08, in Chapter 4.
5. Intermittent encoder cable. 5. Replace cable.
TABLE 3-1 FOLLOWING ERROR NOTES

1. Possible Mechanical Causes of Port Following Errors
Proper brake operation: Raise elevator to top position. Turn LPT power off.
Elevator should remain in place. Remove lead from elevator motor. Apply
LPT power. Elevator should move slowly downward if brake is operating
properly.
Most Port Following Errors are related to mechanical rather than electrical
issues. Improper cleaning and relubricating of the leadscrew has proven to
be the root cause of a majority of all Port Following Errors. Operators should
never lean on or place anything on the SMIF-Pod or elevator.
2. Possible Electrical Causes of Port Following Errors

Defective IC;U2 on INX/LP Control Interface Board may generate a false
over-temperature indication. If CR9 is on and the elevator motor current is
less than 4 amps, then replace INX/LP Control Interface board or cut the
legs off U2 leaving the black, brown and white wires soldered to the board.
Measure elevator motor current. The elevator motor current should be less
than 4 amps when the elevator is moving in an upwards direction. If
excessive elevator motor current is measured, this is an indication of a
problem such as a bad lead screw or bearing.
3.3 STATUS AND ERROR REPORTING

The Teach Pendant will display status messages as an action takes place. The Teach Pendant will also
display error messages as the error occurs.
When an error occurs it is possible that one error will create one or more additional errors. The Teach
Pendant will display the first error and additional errors will go into the VTN message file which is accessed
through the Teach Pendant Diagnostics Menu.

2000-0900-01 Revision A
It is important when troubleshooting the LPT to know which error messages were generated by the system for
a given problem. The error message on line 4 of the Teach Pendant is either the first alarm message or the
most critical alarm message. Additional messages may be created if additional assemblies create error
messages because of the primary error occurring. Example: the minienvironment servo has a following error
at the same time that the vertical arm is going to Home which creates an arm error.
There are two (2) types of errors: recoverable and non-recoverable. If the Teach Pendant displays a
recoverable error (see Table 3-2), the user need only provide the missing SMIF-Pod or cassette, or start the
process. If a non-recoverable error is displayed, a malfunction has occurred and troubleshooting and
adjustment or component replacement is required to clear the problem.
TIPþ
If an error occurs and the HOME light (if available) on the operator control
panel is lighted, the error is recoverable.
3.4 ERROR RECOVERY

Whenever an error condition is detected by the LPT, the Host(s) are notified and the operator is alerted via
audible alarm or HOME switch LED illuminated. The action taken depends upon the type of error which is
covered in the following paragraphs.
In the software, the master task maintains a current system error status variable which identifies the error, if
any, and type of recovery process where:
• Zero value = No error
• Minus value = Recoverable error or special condition
• Positive value = Nonrecoverable error, requires operator action
Recoverable error states that are not associated with any special options are:
-1 = Recoverable load error, improper squat at port – can be corrected via the Home command
-2 = Recoverable unload error, improper squat at the Process Tool – can be corrected via the Home
command.
-3 = Recoverable load error, no cassette detected at port – needs a SMIF-Pod action or a Load or Unload.
-4 = Recoverable unload error, cassette detected at port – needs a SMIF-Pod action or a Load or Unload.
-7 = Recoverable error, SMIF-Pod in place or port lock failed at beginning of the Load or Unload – needs
a SMIF-Pod action or a Load or Unload.
Recoverable error states associated with cassette present signal are:
-5 = Recoverable error, Cassette Present signal at start of a Load, needs a valid Load or Unload. The
error state can also be cleared by removing the invalid command condition.
-6 = Recoverable load error, no Cassette at Process Tool signal – can be corrected via a Home
command.
-8 = Recoverable error, no Cassette Present signal at start of an Unload, needs a valid Load or Unload.
The error state can also be cleared by removing the invalid command condition.
Recoverable error states associated with three wire PIO system are:
-10 = Recoverable load error, load interrupted – can be corrected via a Home command. The cassette
will be returned to the SMIF-Pod since the cassette had not been released at the Process Tool.
-11 = Recoverable load error, load interrupted – can be corrected via the Home command. The LPT will
be returned to Home since the cassette was released at the Process Tool.
-12 = Recoverable unload error, unload interrupted – can be corrected via the Home command. The
cassette will be returned to the SMIF-Pod since the cassette had been gripped at the Process Tool.
-13 = Recoverable unload error, unload interrupted – can be corrected via the Home command. The LPT
will be returned to Home since the cassette was not gripped at the Process Tool.
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Normal process states associated with SIO Pre-Load/Pre-Unload option are:

-20 = At the Pre-Load point after processing a Load command with Pre-Load enabled. The next Load
command will cause a normal load sequence to resume from the current position rather than the
Home position.
-21 = At Pre-Unload point after processing an Unload command with Pre-Unload enabled. The next
Unload command will cause a normal unload sequence to resume from the current position rather
than the Home position.
Normal process states associated with Leave Port Up option are:

-30 = At leave port up point after processing a Load command with leave port up option enabled. The
next Unload command will cause the normal unload sequence to resume from the current position
rather than the Home position.
3.4.1 RECOVERABLE ERRORS.

Recoverable errors are indicated whenever the HOME switch LED is illuminated. The most common error is
an improper squat at the port or Process Tool position. The LPT will return to Home position when the Home
command is processed via the HOME switch or the Host Home command. If the recovery process fails then it
is declared to be a Nonrecoverable error.
3.4.2 AUTOMATIC RECOVERY.

Some errors are recovered from automatically by returning the LPT to the Home position and notifying the
Host(s) that the operation has failed. The most common errors of this type are:
• SMIF-Pod not in place
• Cassette not present during Load
• Cassette present during Unload.
3.4.3 NONRECOVERABLE ERRORS.

Nonrecoverable errors are those that do not fall into the two (2) categories above. This is usually the result of
the I/O task returning a failed condition for an action requested by the Master task. In these cases the LPT is
put into an ESTOP condition and the alarm buzzer sounded.
The Teach Pendant must be connected to allow the operator to:
1. Reset an alarm by resetting the ESTOP condition.
2. Manually recovering from the error condition.
3. Returning LPT to Home position.
4. Disconnect Teach Pendant to return to normal mode of operation.
In most cases the Teach Pendant status line (4) will show an error message. VTN messages are constantly
being sent to the Teach Pendant to provide system information that is available to the user. The user should
display the VTN messages, from last message <End Of Messages> through start of sequence which led up
to the error condition. Use the Prev key to scroll backwards in time, to review these messages.
TABLE 3-2. PORT ERRORS
Recoverable Non-Recoverable
Aborted by user Elevator fails to reach target position
Cassette not present Excessive wafer out error
Indexer busy Flash sensor malfunction
Not Home Loss of configuration data
SMIF-Pod removed Port door failed to close
2000-0900-01 Revision A
Table 3-2. Port Errors (Continued)

Recoverable Non-Recoverable
Port door failed to open
Port hold-down failed to close
NOTE
Within the message Port hold-down failed to open
data for the LPT, the Position following error
terms elevator, Seater failed to move in
indexer, INX, and port Servo controller command error
all refer to the LPT
minienvironment and Slot sensor malfunction
port. System internal time out
Tripping of elevator over-travel limit
Wafer protruding & seater failed to move out
Wafer protrusion sensor malfunction
NOTE
Reported errors as noted in Tables 3-3 and 3-4 may be interactive. Example:
SMIF-Pod failed to lock, followed by an . . . alarm reported, followed by
failed to move, followed by some other alarm in sequence. In this example
the last alarm reported was not the cause. The original error was the SMIF-
Pod not locking, but the last alarm message points to something else.
TABLE 3-3. ERRORS REPORTED BY LPT I/O TASK
ERROR OR STATUS MESSAGE NOTES

Aborted by user, E-stop Status information
Aborted by user, Soft-stop Status information
ACOMLIBS resources init error Status information
Action timeout Status information
Arm action rejected, at E-stop Status information
Arm action rejected, busy Status information
Arm action rejected, busy with stop Status information
Auto correct of error cases failed Status information
Axis is busy Status information
Brake released Status information
Brake set Status information
Collision Status information
Condition motion abort, time-out Status information
E-stop is reset Status information
E-stop not clear Status information
E-stop or soft-stop action timeout Status information
E-stop requested before completion Status information
Error during I/O task status init Status information
Error of unknown code Status information
Face squat Status information
Face squat is clear Status information

2000-0900-01 Revision A
Table 3-3. Errors Reported by LPT I/O Task (Continued)

Full squat achieved Status information
Gripper close aborted, timeout Status information
Gripper finger closed Status information
Gripper finger opened Status information
Gripper finger over-travel Status information
Gripper open aborted, timeout Status information
Homing calibration aborted, timeout Status information
Homing calibration completed Status information
Improper squat Status information
Invalid/unsupported arm action Status information
Invalid/unsupported port action Status information
Motion completed Status information
Motion time-out Status information
Partial squat achieved Status information
Port action communication failed Status information
Port action rejected, at E-stop Status information
Port action rejected, busy Status information
Port action rejected, busy with stop Status information
Port action status indicates failure Status information
Port SECS ARS alarm reports fatal Status information
error
Required cassette condition failed Status information
Reserved axis following error Status information
Reserved axis negative over-travel Status information
Reserved axis positive over-travel Status information
Reverse vertical squat Status information
Rotate following error Status information
Rotate negative over-travel Status information
Rotate positive over-travel Status information
Servo disabled Status information
Servo enabled Status information
Soft stop canceled by Estop Status information
Soft-stop requested before completion Status information
Tilt following error Status information
Tilt negative over-travel Status information
Tilt positive over-travel Status information
Unhandled stop request Status information
Unrecognized arm event code Status information
Vertical following error Status information
Vertical negative over-travel Status information
Vertical positive over-travel Status information
Y axis position not attainable Status information

2000-0900-01 Revision A
TABLE 3-4. ERRORS REPORTED BY LPT GENERAL SYSTEM USAGE; ALL TASKS

ADD_AUX_DEVICE_FAILED
Add_mem_pool ( ) failed
ADD_TAG_DEVICE_FAILED
Already busy
ANY_PORT init_serl_port ( ) failed
Arm program download failed
ARM_PORT add_term_protocol ( )
failed
ARM_PORT init_serl_port( ) failed
AUX_DEVICE_INIT_FAILED
AUX_PORT_INIT_FAILED
Can't create history log file
Can't create records log file
Can't load backup teachpoint file
Can't load current teachpoint file
Can't open history log file
Can't open records log file
Can't position history log file
Can't position records log file
Can't write history log file
Can't write records log file
Configuration to indexer failed
Corrupted history log file
Corrupted records log file
E-stop reset failed
Failed to obtain current position
Failed to obtain current position
Free_task_msg ( ) error
Hardware configuration to indexer
failed
HOST_DEVICE_INIT_FAILED
HOST_PORT add_secs_device ( )
failed
HOST_PORT_INIT_FAILED
HOST_TAG pair_ports ( ) failed
I: arm message buffer overflow
I: arm message string too long
I: arm message timeout
I: INX, Are you there failed
I: INX, Define report clear failed
I: INX, Define report failed
I: INX, Enable alarm failed

2000-0900-01 Revision A
Table 3-4. Errors Reported by LPT General System Usage; All Tasks (Continued)
NOTE: I: Refers to a port (minienvironment) error condition.

I: INX, Enable event failed
I: INX, Link event failed
I: INX, Status request failed
I: message xmit failed
I: no buffer available
I: Received string too long
I: TAG, Disable event failed
I: Too many arm message strings
ILLEGAL_MOTION_REQUESTED
Init_dev_block ( ) failed
Initialization not done, can't reset
E-stop
Initialization of I/O_task failed
Invalid Estop message parameter
Invalid load_unload_home_sequence
( ) state
Invalid option response message
parameter
INX_DEVICE_INIT_FAILED
INX_PORT add_secs_device () failed
INX_PORT init_serl_port ( ) failed
KEY_PORT init_serl_port ( ) failed
Lost track of action request
Memory full Status information
Movement list failure
Movement list failure
Movement list link failure
Movement/teachpoint list failed
Program state failure
Query list overflow
REDIR_PORT init_serl_port ( ) failed
Send_msg ( ) invalid parameter
SPARE_PORT init_serl_port ( ) failed
TAG_DEVICE_INIT_FAILED
TAG_PORT_INIT_FAILED
Teachpoint list failure
Teachpoint not found
Too many arm action requests
Too many arm download requests

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Too many I/O task configuration
requests
Too many port action requests
Too many stop requests
Too many stop reset requests
TP_ID_NOT_IN_STATUS_LIST
Unexpected action response
Unexpected arm download response
Unexpected I/O status response
Unexpected I/O task configuration
response
Unexpected parallel host report
Unexpected parallel port status
response
When configuration change is received and Host has defined LPT configuration
HOST set AND_REMOTE Status information
HOST set LOCAL Status information
HOST set OR_REMOTE Status information
During LPT startup

Arm download failed Status information
Estop reset failed Status information
Estop set by host Status information
I/O task initialized Status information
Initializing System Status information
LPT init done Status information
LPT init failed Status information
LPT init marginal Status information
Moves file failed Status information
Moves list failure Status information
No motion levels Status information
Received Estop Status information
Using old moves file Status information
During Load / Unload / Home

All axes calibrated Status information
Calibrating all axes Status information
Cassette present Status information
Home completed Status information
Home failed Status information
Home required Status information
Home started Status information
2000-0900-01 Revision A

During Load / Unload / Home (Continued)
Improper squat Status information
Load completed Status information
Load failed Status information
Load started Status information
Need manual recovery Status information
No cassette Status information
Placement error Status information
SMIF-Pod not present Status information
Recovery failed Status information
Unload completed Status information
Unload failed Status information
Unload started Status information
These are derived from status returned by I/O task if no unique error was determined
Arm Estop status
Arm not home Status information
Arm soft stop status
Arm status failed Status information
Arm status timeout Status information
Error of unknown type Status information
Gripper closed status
Gripper open status
Gripper overtravel limit Status information
Holddown closed status
Holddown open status
SMIF-Pod detected status
SMIF-Pod door closed status
SMIF-Pod door open status
Port Estop status
Port locked status
Port not home status
Port not station status
Port overtravel limit Status information
Port status
Port status failed Status information
Port status timeout Status information
Port unlocked status
Rotate brake on Status information
Rotate forward limit Status information
Rotate home status

2000-0900-01 Revision A

These are derived from status returned by I/O task if no unique error was determined
(Continued)
Rotate reverse limit Status information
Rotate servo off Status information
Squat sensor status
Squat sensor status
Tilt forward limit Status information
Tilt home status
Tilt servo off Status information
Vertical brake on Status information
Vertical forward limit Status information
Vertical home status
Vertical reverse limit Status information
Vertical servo off Status information
Wafer seater not at outer limit Status information
Wafer seater not home Status information
These can occur when checking for AT HOME

Arm not home Status information
Gripper not open Status information
SMIF-Pod not present Status information
Port not home Status information
Port not locked Status information
Rotate not home Status information
Tilt not home Status information
Vertical not home Status information
These can occur when an action is requested

Busy doing home Status information
Busy doing load Status information
Busy doing unload Status information
Host interlock reqd
Valid = Home
Valid = Load
Valid = None
Valid = Unload
These can occur using motion keys

At negative limit Status information
At positive limit Status information
Busy doing Home Status information
Busy doing Load Status information
2000-0900-01 Revision A

These can occur using motion keys (Continued)
Busy doing Unload Status information
Estop busy Status information
Estop reset busy Status information
No configuration Status information
No motion levels Status information
Not initialized Status information
Not manual mode Status information
These can occur while teaching

Incorrect sequence Status information
Not supported Status information
Port too low Status information
Wrong moves file Status information
These can occur if Escape key is pressed and at Home and not busy
Estop busy Status information
Estop done Status information
Estop failed Status information
Estop in progress Status information
Estop request failed Status information
Estop reset busy Status information
Estop reset done Status information
Estop reset failed Status information
Estop reset in progress Status information
Not initialized Status information
Reset to HOME_TP
3.5 TROUBLESHOOTING SERVO AMPLIFIER INDICATORS

The Servo Amplifier circuit board has indicators that may make troubleshooting servo problems easier. Figure
3-1 shows the LED indicators and where they are placed on the circuit board.
• Power Indicator LEDs are lighted when power is available.
• Gripper closed (GR. CLOSED) LED is lighted when the gripper fingers are closed.
• Gripper open (GR. OPEN) LED is lighted when the gripper fingers are open.
• Gripper OVER TRAVEL LED is lighted when the gripper has over traveled.
• TILT RLS LED indicator is always lighted (no tilt reverse sensor is used on the LPT).
• VERT RLS LED indicator is always lighted (no vertical reverse sensor is used on the LPT).

2000-0900-01 Revision A
• Gripper SQUAT N.C. and SQUAT N.O.: ( X = Lighted)
GRIPPER SQUAT N.O. N.C.

Partial Squat – V-Move X X
Full Squat – V-Move X
Full Squat – H-Move (Face Grip) X
No Squat – V-Move
No Squat – H-Move
3.5.1 SERVO AMPLIFIER HOME INDICATORS

Table 3-5 provides information on the LED indicators that are lighted when the LPT is at Home.
TABLE 3-5. HOME INDICATORS
FLS RLS HOME

GRIPPER ROT
TILT X X
VERTICAL X X
ROTATE X X
(NOTE: X = Lighted)
3.6 SERVO CONTROLLER BOARD INDICATORS

On the Servo Controller circuit board which is under the Servo Amplifier board, on the left-hand bottom edge,
are two (2) status LED indicators. The indicators when lighted:
• Green LED indicates normal status for the board.
• Red LED indicates a problem.
3.7 INDEXER BOARD INDICATORS

The Indexer circuit board, which is in the bottom of the Minienvironment, has several LED status indicators.
The indicators when lighted:
• Yellow LED (near to the center of the board) indicates normal status for the board.
• Any red LED indicates a problem (the circuit board is labeled as to the LED function).
There are three (3) red LEDs located on the board:

SMIF-Pod Lock – indicates a stalled motor or shorted winding (over-current) condition.
Elev – indicates a stalled motor or shorted winding (over-current) condition.
(No label) – indicates an over- or under-voltage or over-current condition.

2000-0900-01 Revision A
Gripper
Rotation
HOME
D17–D21
RLS
FLS
Gripper D1–D12
Limit
GR CLOSED
Tilt GRIPPER ROT GR OPENED
Switch
TILT SQUAT N C
Function
Vertical VERTICAL SQUAT N O
Indicators
Arm ROTATE OVER TRAVEL
Rotating
Arm
Forward Limit Gripper

Switch (FLS) Function
Indicators
Reverse Limit
Switch (RLS)
Home
Indicators
+12vdc Power
Indicator
+5vdc Power
Indicator
+12 V
–12vdc Power
+24vdc Input Indicator
+5 V
Indicator
–12 V
+24 V
Power Indicators
(Lighted When Power is Present)
Figure 3-1. Servo Amplifier Board

2000-0900-01 Revision A
3.8 CABLE WIRE LISTS

This section provides cable wire lists for signal tracing in the event of a malfunction.
ENCODER CABLE ASSEMBLY – 9700-3135-XX

VERSION APPLICATION
–01 Right Hand Elevator
–02 Left Hand Elevator
–03 Right Hand Vertical
–04 Left Hand Vertical
–05 Right Hand Rotate
–06 Left Hand Rotate
–07 Right Hand Tilt
–08 Left Hand Tilt
–09 Gripper Tilt
–10 Arm Rotate
Encoder Cable Assembly – 9700-3135-XX (Continued)

WIRE LIST FOR –01/ –02/ –03/ –04/ –05/ –07/ –08/ –09/ –10
FROM POS COLOR TO PO REFERENC
S E
P17/P27/P24/P19 1 Black P67/P77/P74/P69 1 +5v Gnd
P17/P27/P24/P19 2 Key
P17/P27/P24/P19 3 Red P67/P77/P74/P69 2 Ch 1
P17/P27/P24/P19 4 Green P67/P77/P74/P69 3 Ch A
P17/P27/P24/P19 5 White P67/P77/P74/P69 4 +5 VDC
P17/P27/P24/P19 6 Orange P67/P77/P74/P69 5 Ch B
P17/P27/P24/P19 7 Drain Wire
WIRE LIST FOR –06 ONLY
P24 1 Black P74 1 +5v Gnd
P24 2 Key
P24 3 Red P74 2 Ch 1
P24 4 Green P74 5 Ch B
P24 5 White P74 4 +5 VDC
P24 6 Orange P74 3 Ch A
P24 7 Drain Wire
GRIPPER CABLE ASSEMBLY – 9700-3139-03

FROM COLOR TO SIGNAL NAME / REF
P58-1 Yellow P12-7 +5v Gnd
P58-2 Green P12-2 Grip Closed Switch
P58-3 Blue P12-5 Squat N.O.
P58-4 Brown P12-4 Squat N.C.
P58-5 White P12-3 Grip Open Switch
P58-6 Red P12-11 Gripper Motor (+)
P58-7 Clear P12-8 Gripper Motor (–)
P58-8 Orange P12-6 Grip Overtravel Switch
P58-9 Grey P12-10 +5 VDC
P12-9 Key

2000-0900-01 Revision A
PORT PLATE SENSORS HARNESS – 9700-3265-01

P3-1 Blue PCB1-2 Wafer Seater Out
P3-2 Red PCB2-2 SMIF-Pod Latch Unlocked
P3-3 Green PCB1-3 Wafer Seater Home
P3-4 Orange PCB2-3 SMIF-Pod Latch Unlocked
P3-5 Brown PCB2-1 Ground
P3-6 N/C
P3-7 Yellow PCB2-4 +5 VDC
PCB2-1 Black PCB1-1 Ground
PCB2-4 White PCB1-4 +5 VDC
STATUS LIGHTS/SWITCH INTERCONNECT CABLE ASSEMBLY – 9700-3271-01

P1-1 Blue N/C Switch 3
P1-2 Red PS1-3 LED 3
P1-3 Violet N/C Switch 1
P1-4 Grey N/C Switch 2
P1-5 Brown PS1-1 LED 2
P1-6 Orange PS1-4 LED 1
P1-9 Green PS1-7 +5 VDC
P1-10 Yellow PS1-5 Ground
PROBE (PLUG TYPE) CABLE ASSEMBLY – 9700-3273-01 (LPT 2200 Only)

P4-1 P1-4
P4-2 Red P1-7 RX Data
P4-3 P1-3
P4-4 Brown P1-8 -12 VDC
P4-5 Orange P1-6 TX Data
P4-6 Yellow P1-5 +12 VDC
P4-7 Green P1-2 Ground (±12 VDC)
P1-1
WAFER SEATER MOTOR ASSEMBLY – 9700-3372-01 (LPT 2150 Only)

COLOR TO SIGNAL NAME / REF
Green PS2-1 Wafer Seater Motor MA1
Red PS2-2 Wafer Seater Motor MA2
Black PS2-3 Wafer Seater Motor MB1
Blue PS2-4 Wafer Seater Motor MB2

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SMART-PROBE CABLE ASSEMBLY – 9700-3380-01 (LPT 2150 Only)

P1-8 Yellow P50-4 -12 VDC
P1-7 Green P50-6 RX Data
P1-5 Red P50-2 +12 VDC
P1-4 – – –
P1-3 – – –
P1-2 Brown P50-1 Ground
P1-1 – –
– P50-5
PORT DOOR CABLE ASSEMBLY – 9700-3724-XX

P53-1 Brown P3-1 +5 VDC
P53-2 Red P3-2 Ground
P53-3 Orange P3-3 SMIF-Pod Unlocked Signal
P53-4 Yellow P3-4 SMIF-Pod Locked Signal
P53-5 Green P3-5 Motor (+)
P53-5 White P3-7 Motor (+)
P53-6 Blue P3-6 Motor (–)
P53-6 Grey P3-8 Motor (–)
P53-7 Violet P3-9 SMIF-Pod In Place Signal
P53-10 Clear P3-10 Chassis Ground
PORT PLATE / BASE (RIBBON) CABLE ASSEMBLY – 9700-3725-01

CONNECTOR STRIPE CONNECTOR
END 1 END 2
P20 Pin 1 P2
GRIPPER TILT CABLE ASSEMBLY – 9700-3941-XX

LT-1 Brown PCB1-1 Ground
LT -2 Red PCB2-1 Ground
LT -3 Orange PCB2-2 Forward
LT -4 Yellow PCB1-2 Home
LT -5 Green PCB2-3 +5 VDC
PCB2 Red PCB1-1 Ground
PCB1 Green PCB2-3 +5 VDC

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MINIENVIRONMENT ASSEMBLY – 9700-3947-01 [Series 1]

FROM COLOR TO
Laser Diode Red/Brown P17-1
Black/Violet P17-2
Wafer Sensor Black P17-3
Red P17-4
Slot Sensor Black P17-5
Red P17-6
Protrusion Sensor Black P17-7
Red P17-8
Elevator Limits Cable Brown P17-13
Orange P17-14
Yellow P17-15
Red P17-16
Green P17-21
Wafer Excessive White P17-22
Protrusion Sensor Black P17-23
Red P17-24
Yellow P17-10
GRIPPER TILT MOTOR CABLE ASSEMBLY – 9700-3958-01

MT-1 Black Motor-2 DR–
MT-4 Red Motor-1 DR+
DC POWER AMPLIFIER CABLE ASSEMBLY – 9700-4052-02

J1-1 Violet P1-4 Amp +24 VDC
J1-2 Brown P1-5 Amp +24 VDC Ground
SWITCH PANEL EXT CABLE ASSEMBLY – 9700-4072-01

P21-1 Brown P10-2 Load Switch
P21-2 Red P10-4 Unload Switch
P21-3 Orange P10-6 Home Switch
P21-4 Yellow P10-7 Load Lamp
P21-5 Green P10-9 Unload Lamp
P21-6 Blue P10-11 Home Lamp
P21-7 Violet P10-24 Alarm
P21-8 Grey P22-1 PWREN
P21-9 Black P10-13 Panel Power
P21-10 White P22-2 PWRENRTN
P21-11 2nd Brown P10-25 DC Rtn
P10-14 Yellow P10-20 Jumper

2000-0900-01 Revision A
AC TO POWER SUPPLY CABLE ASSEMBLY – 9700-4073-01 [Series 1]

P20-1 Brown – AC Line
P20-2 –
P20-3 Blue – AC Neutral
PS TO DC–DC PCB CABLE ASSEMBLY – 9700-4074-01

P1-1 Green/Yellow T-Ring Chassis Ground
P1-2 Brown T-Ring 24v Return
P1-3 Violet T-Ring +24 VDC
DC–DC TO CPU CABLE ASSEMBLY – 9700-4075-01

P4-1 Black P10-2 Ground
P4-2 Red P10-4 +5 VDC
SMART-PROBE CABLE ASSEMBLY (PLUG TYPE) – 9700-4076-01

P4-1 – P1-4 –
P4-2 Red P1-7 RX Data
P4-3 – P1-3 –
P4-4 Brown P1-8 -12 VDC
P4-7 Green P1-2 Ground
P1-1 –
AC POWER CABLE ASSEMBLY – 9700-4078-01 [Series 2]

A Brown J20-1 AC Line
J20-2
B Blue J20-3 AC Neutral
C Green/Yellow D Chassis
INDEXER DC POWER / TTL CABLE ASSEMBLY – 9700-4079-01

J2-1 Red PS-1 +24 VDC
J2-4 Black PS-4 +24V RETURN
P22-1 Grey T-Ring Power En (RCG)
P22-2 White T-Ring Power En Return(RC)
PS-1 Violet P1-1 +24 VDC (J1-4)
PS-3 Brown P1-2 +24 V Return (J1-5)

2000-0900-01 Revision A
40 PIN I/O (RIBBON) CABLE ASSEMBLY – 9700-4080-01

CONNECTOR STRIPE CONNECTORS
END 1 END 2
– P11
P7 Pin 1 P6A
Pin 1 TEST
64 PIN I/O (RIBBON) CABLE ASSEMBLY – 9700-4081-01

END 1 END 2
Pin 1 P2
P8 – P13
– P5
SERVO SERIAL CABLE ASSEMBLY – 9700-4082-01

FROM SIGNAL NAME / REF COLOR TO SIGNAL NAME / REF
P6B-3 RXD Orange P1-2 TXD
P6B-4 RTS Red P1-7 CTS
P6B-5 TXD Green P1-3 RXD
P6B-6 CTS Black P1-8 RTS
P6B-9 Ground White P1-5 Ground
DC POWER TO SERVO CABLE ASSEMBLY – 9700-4083-01

P3-1 Red P1-1 +24 VDC
P3-3 Black P1-5 24v Return
MINIENVIRONMENT TO CARRIAGE HARNESS ASSEMBLY – 9700-4086-01 [Series 1]

CN1-1 Red P1-1 Motor Amp (+)
CN1-2 Black P1-2 Motor Amp (–)
CN1-4 Black P19-1 Ground
CN1-5 Red P19-3 Index
CN1-8 Orange P19-4 Ch A
CN1-7 White P19-5 +5 VDC
CN1-6 Green P19-6 Ch B
CN1-9 White P4-1 Brake
CN1-10 White P4-2 Brake
CN1-13 Brown P17-13 Ground
CN1-14 Red P17-16 Elevator Up
CN1-15 Orange P17-14 +5 VDC
CN1-16 Yellow P17-15 Elevator Down
CN1-13 P19-7 Drain Wire

2000-0900-01 Revision A
CARRIAGE HARNESS ASSEMBLY – 9700-4087-01

CN1-1 Red TB1 Motor Amp (+)
CN1-2 Black TB2 Motor Amp (–)
CN1-4 Black P59-1 Ground
CN1-5 Red P59-2 Index
CN1-6 Green P59-5 Ch B
CN1-7 White P59-4 +5 VDC
CN1-8 Orange P59-3 Ch A
CN1-9 White Brake
CN1-10 White Brake
CN1-13 Brown PCB2-1 Ground
CN1-14 Red PCB2-2 Elevator Up
CN1-15 Orange PCB2-3 +5 VDC
CN1-16 Yellow PCB1-2 Elevator Down
CN1-3 Drain Wire
VERTICAL ARM CABLE ASSEMBLY – 9700-4100-01

LV-1 Brown CN1-13 R
LV-2 Red CN1-13 G
LV-3 Orange CN1-16 F
LV-4 Yellow CN1-14 H
LV-5 Green CN1-15 5
BV-1 White CN1-9 BR
BV-3 White CN1-10 G
EV-1 Black CN1-4 G
EV-3 Red CN1-5 L
EV-4 Green CN1-6 A
EV-5 White CN1-7 5
EV-6 Orange CN1-8 B
EV-7 Shield CN1-3 Drain Wire
MV-1 Black CN1-2 DR (–)
MV-4 Red CN1-1 DR (+)
ARM ROTATE CABLE ASSEMBLY – 9700-4101-01

MR-1 Red Motor-2 DR–
MR-4 Black Motor-1 DR+
ARM OPTO ASSEMBLY – 9700-4103-01 (RIGHT) [Series 2]

LR-1 Brown PCB1-2 Reverse
LR-2 Red PCB3-1 Ground
LR-3 Orange PCB3-2 Forward
LR-4 Yellow PCB2-2 Home
LR-5 Green PCB3-3 +5 VDC
PCB1-1 Red PCB2-1 Ground
PCB1-3 Brown PCB2-3 +5 VDC
2000-0900-01 Revision A
ARM OPTO ASSEMBLY – 9700-4103-02 (LEFT) [Series 2]

LR-1 Brown PCB3-2 Reverse
LR-2 Red PCB3-1 Ground
LR-5 Green PCB3-3 +5 VDC
BRAKE, ARM ROTATE, CABLE ASSEMBLY – 9700-4104-01

BR-1 White Brake R BR
BR-3 White Brake R G
SERVO AMP POWER CABLE ASSEMBLY – 9700-4105-01

P3-1 Blue P90-6 +12 VDC
P3-2 Red P90-5 +5 VDC
P3-3 Red P90-4 +5 VDC
P3-6 Violet P90-1 –12 VDC
SERVO / AMP J5 (RIBBON) CABLE ASSEMBLY – 9700-4106-01

END 1 END 2
J5 Pin 1 J5
SERVO / AMP J2 (RIBBON) CABLE ASSEMBLY – 9700-4107-01

END 1 END 2
J5 Pin 1 J5
INDEXER SERIAL CABLE ASSEMBLY – 9700-4108-01

P3-3 RXD Brown P6-3 TXD
P3-4 RTS Red P6-8 CTS
P3-5 TXD Orange P6-2 RXD
P3-6 CTS Yellow P6-7 RTS
P3-9 Ground Green P6-5 Ground
P3-13 RXD Blue P7-3 TXD
P3-14 RTS Violet P7-8 CTS
P3-15 TXD Grey P7-2 RXD
P3-16 CTS White P7-7 RTS
P3-19 Ground Clear P7-5 Ground

2000-0900-01 Revision A
Y / 20 TO 10 (2X) (RIBBON) CABLE ASSEMBLY – 9700-4109-01

END 1 END 2
P6 Pin 1 J6A
J6B
CPU SPEAKER CABLE ASSEMBLY – 9700-4227-01

Speaker White P16-7 Speaker
Speaker White P16-8 Ground
PORT DOOR CONTROL CABLE ASSEMBLY – 9700-4289-01 [Series 2]

P3-1 Brown NC +5 VDC
P3-2 Red J53-1 Ground
P3-3 Orange J53-2 Pod Unlocked
P3-4 Yellow J53-3 Pod Locked
P3-5 Green J53-4 Motor (+)
P3-6 Blue J53-5 Motor (–)
P3-7 Violet NC –
P3-8 Grey NC –
P3-9 White P53-6 Pod In Place
P3-10 Black NC

P20-1 Brown – –
P20-2 Red – –
P20-3 Orange – –
P20-4 Yellow – –
P20-5 Green J52-1 Seater Motor MA1
P20-6 Blue J52-2 Seater Motor MA2
P20-7 Violet J52-3 Seater Motor MB1
P20-8 Gray J52-4 Seater Motor MB2
– – J52-5 –
– – J52-6 –
P20-9 White J50-1 Ground
P20-10 Black J50-2 +12 VDC
P20-11 Brown J50-3 Probe TX Data
P20-12 Red J50-4 –12 VDC
– – J50-5 –
P20-13 Orange J50-6 Probe RX Data
P20-14 Yellow – –
P20-15 Green PCB1-4 +5 VDC
P20-16 Blue PCB1-1 Ground
P20-17 Violet – –
P20-18 Gray PCB1-3 Seater Home
P20-19 White – –
P20-20 Black PCB1-2 Seater Out
2000-0900-01 Revision A
Minienvironment to Carriage Harness Assembly – 9700-4290-01 (Continued)

P20-21 Brown PS1-4 LED 1 (READY)
P20-22 Red PS1-1 LED 2 (POD-IN-PLACE)
P20-23 Orange PS1-3 LED 3 (Spare)
PCB1-1 Yellow PS1-5 Digital Ground
PCB1-4 Green PS1-7 +5 VDC
– – PS1-6 –
– – PS1-2 –
P20-24 – – –
P20-25 – – –
P20-26 – – –

TB-1 Red JP-1 Motor Amp (+)
TB-2 Black JP-2 Motor Amp (–)
P59-2 Red P19-3 Index
P59-3 Orange P19-4 Ch A
P59-4 White P19-5 +5 VDC
P59-5 Green P19-6 Ch B
J61-1 White P4-1 Brake
J61-2 White P4-2 Brake
P1-2 Red P17-14 +5 VDC
P1-3 Orange P17-15 Elevator Down
P1-4 Yellow P17-16 Elevator Up
Shield P19-7 Drain Wire
PS TO FAN CABLE ASSEMBLY – 9700-4338-01 [Series 2]

P24-1 Blue T-Ring 2 Ground
P24-2 Red T-Ring 1 Power
BRAKE EXTENSION CABLE ASSEMBLY – 9700-4339-01 [Series 2]

J61-1 White BR-1 BR
J61-2 White BR-3 G

2000-0900-01 Revision A
VERTICAL ARM HARNESS – 9700-4340-01 [Series 2]

Term-1 Red JP-1 DR+
Term-2 Black JP-2 DR–
J61-1 White BV-1 BR
J61-2 White BV-3 Ground
P59-1 Black EV-1 Ground
P59-2 Red EV-3 Index
P59-3 Orange EV-6 B
P59-4 White EV-5 +5 VDC
P59-5 Green EV-4 A
EV-7 Drain Wire
P1-1 Brown LV-2 Ground
P1-2 Red LV-5 +5 VDC
P1-3 Orange LV-3 F
P1-4 Yellow LV-4 H
P1-5 Green LV-1 R
ARM ROTATE SENSORS HARNESS – 9700-4344-01 (RIGHT) [Series 2]

LR-2 Brown PCB3-1 Ground
LR-1 Orange PCB3-2 Reverse
LR-5 Red PCB3-3 +5 VDC
LR-3 Green PCB1-2 Forward
PCB1-1 Brown PCB2-1 Ground
PCB1-3 Red PCB2-3 +5 VDC
ARM ROTATE SENSORS HARNESS – 9700-4344-01(LEFT) [Series 2]

LR-2 Brown PCB1-1 Ground
LR-5 Red PCB1-3 +5 VDC
LR-1 Green PCB3-2 Reverse

2000-0900-01 Revision A
SERVO SERIAL CABLE ASSEMBLY – 9700-4346-01 [Series 2]

P6B-3 RXD Orange P1-2 TXD
P6B-4 RTS Red P1-7 CTS
P6B-5 TXD Green P1-3 RXD
P6B-6 CTS Black P1-8 RTS
P6B-9 Ground White P1-5 Ground
Term-1 Braided Shield – Term-2 Braided Shield
DC POWER TO SERVO CABLE ASSEMBLY – 9700-4347-01 [Series 2]

P3-1 Red P1-1 +24 VDC
P3-3 Black P1-5 24V Return
AC LINE FILTER CABLE ASSEMBLY – 9700-4509-01 [Series 2]

P20A-1 Brown L-In AC Line
P20A-2 – – –
P20A-3 Blue N-In AC Neutral
Term-1 Green/Yellow G Ground
L-Out Brown Item-7 AC Line
– – – –
N-Out Blue Item-7 AC Neutral
Term-2 Green/Yellow Term-2 Ground
AMPLIFIER TO INDEXER PCB CABLE ASSEMBLY – 9700-4526-01 [Series 2]

P21-1 Brown P3-7 PWM
P21-2 White P3-8 DIR
P21-4 Key – –
P21-5 – – –
SERVO AMPLIFIER (COPLEY) CONNECTOR P2 JUMPER – 9700-4678-01

FROM TO
P2-1 P2-4
P2-4 P2-5
P2-5 P2-6
LASER DIODE WITH CABLE ASSEMBLY – 9700-4834-XX

COLOR SIGNAL NAME / REF Laser Diode Dash Number (XX)
Brown 0 VDC -01 = MDL – Asyst – 670-1, 1mW
Violet –5 VDC -02 = MDL – Asyst – 670-3, 3mW

2000-0900-01 Revision A
PORT DOOR CONTROL CABLE ASSEMBLY – 9700-5030-01 [LPT 2150]

P3-1 Brown NC +5 VDC
P3-2 Red J53-1 Ground
P3-3 Orange J53-2 Pod Unlocked
P3-4 Yellow J53-3 Pod Locked
P3-5 Green J53-4 Motor (+)
P3-6 Blue J53-5 Motor (–)
P3-7 Violet NC –
P3-8 Gray NC –
P3-9 White P53-6 Pod In Place
P3-10 Black NC
SMART-PROBE CABLE ASSEMBLY – 9700-5031-01 (LPT 2150 Only)

P1-8 Yellow P50-4 -12 VDC
P1-7 Green P50-6 RX Data
P1-5 Red P50-2 +12 VDC
P1-4 – – –
P1-3 – – –
P1-1 – –
– P50-5

2000-0900-01 Revision A

2000-0900-01 Revision A
Chapter 4
SERVICE
4.1 SAFETY REQUIREMENTS

Warnings and cautions are used throughout Preventive Service Procedures (PSP), Calibration / Alignment
Procedures (CAP), and Corrective Service Procedures (CSP) to identify potential hazards to personnel and
equipment respectively.
All warnings and cautions immediately precede the step or operation in which the hazardous condition may
be encountered. All personnel involved in service on the LPT must fully understand warnings, cautions, and
all general safety regulations associated with electromechanical equipment. Personnel should become
familiar with all aspects of the material safety instructions (MSI) and material safety data sheets (MSDS)
which are to be maintained in the work area. Personnel should become thoroughly familiar with all aspects of
safety for individuals and equipment prior to performing preventive or corrective service. The following
general precautions should be observed by all personnel when working with electrical equipment.
1. Do not allow unauthorized or inexperienced personnel to operate the LPT.
2. Ensure that another person, aware of work in progress, is in the area to provide assistance in event
of injury.
3. Do not bypass electrical interlocks or safety devices unless specifically required within a procedure.
4. When necessary, always replace electrical fuses with the exact type and rating specified.
5. Remove power from the LPT prior to removing or inserting electrical connectors.
6. Remove metal jewelry such as rings, chains, and watches.
7. Stand on dry insulating mats when working with energized electrical equipment.
8. Ensure that all test equipment and accessory electrical units are grounded to facility ground.
9. Remove spilled materials immediately to prevent accidents.
10. Ensure that chemicals with vapors are used in a well-ventilated area. Avoid skin contact with
chemicals and avoid inhaling vapors.
11. Ensure that fingers are not placed in the path of moving mechanical components, such as gears or
belts, when the LPT is operating. Ensure that fingers are not placed between the port plate and the
port door when the minienvironment is lowering and the port door is closing. Ensure that hands or
feet are not placed between the minienvironment and the base when the minienvironment is
lowering.
12. When working with electronic circuit boards, ensure that ESD safety precautions be followed to
prevent component malfunction or loss of data.
NOTES
1. Before attempting to perform service or adjustments to the LPT, this
chapter must be read and understood.
2. When making adjustments to LPT mechanisms, it may be necessary to
remove certain panels to gain access.
4.1.1 LASER SAFETY.

The laser safety symbol (see Figure 4-1) indicates that a laser beam is present in the area of the symbol.
Avoid exposure.

2000-0900-01 Revision A
When the LPT is removed from the Process Tool and covers are removed from around the LPT, personnel
may be exposed to the laser light beam. Especially when the technician/engineer is aligning the mirrors,
beamsplitters, or beam sensors, the technician/engineer will be exposed to the beam. When anyone is
exposed to the laser beam, direct eye exposure to the beam is to be avoided.
CAUTION
LASER RADIATION WHEN OPEN
AVOID DIRECT EYE EXPOSURE.
Figure 4-1. Laser Caution Label
4.1.1.1 PREVENTIVE SERVICE FOR LASER SAFETY.

The LPT requires no laser safety preventive service.
4.1.2 FUSES
Electrical fuses are used to protect personnel from electric shock and electrical components from fire and
destruction. Fuses must be replaced with the exact type and rating. A list of fuses and their locations is given
in Table 4-1. Figures 2-14 and 4-2 show fuse locations.
TABLE 4-1. FUSE RATINGS BY LOCATION

Location Function Rating
Interface Connector Panel AC Incoming Voltage 250V, 4A, Time Lag (2
each)
Power Distribution Board F1 – Indexer (Minienvironment) 250V, 6.3A, Fast Blo
Power Distribution Board F2 – Servo Amplifier Board 250V, 6.3A, Fast Blo
Power Distribution Board F3 – Communications Processor Board 250V, 2A, Fast Blo
NOTE
All fuses are metric size 5X20mm.
Fuse Holder Input AC-Power Fuse Holder

Latching Tab
Figure 4-2. Interface Connector Panel
Input power fuses are removed by pressing up on the latching tab on the fuse holder portion of the power
connector (see Figure 4-2). With pressure applied to the tab, pull straight out to remove the fuse holder.

2000-0900-01 Revision A
Fuse F1 – Comm Fuse F2 –

Fuse F3 – LPT /
Processor Servo Amplifier
Indexer Board
Figure 4-3. Power Distribution Panel
4.2 PREVENTIVE SERVICE

Preventive service is scheduled systematic care, inspection, and testing of an item of hardware or software to
keep the LPT in operable condition and to detect and correct minor failures before they develop into major
defects or malfunctions. The procedure for accomplishing this regular care is the preventive service
procedure (PSP). The PSP is a stand-alone procedure fully detailing the steps to provide the systematic
service. Also included is inspection and correction of environmental factors that could adversely affect the
hardware. Typical tasks include inspection, cleaning, and lubrication.
• Refer to Table 4-2 for an outline of periodic service tasks and their specified intervals.
• Refer to Table 4-3 for recommended lubricants.
TABLE 4-2 RECOMMENDED PREVENTIVE SERVICE SCHEDULE

SERVICE PROCEDURE INTERVAL
1 Inspect and Clean the LPT and Lubricate Vertical Lead Screw 4 Months
or 10,000 cycles which
ever comes first
2 Inspect, Clean, Lubricate and Cleanliness Assurance 12 Months
4.2.1 LUBRICATION.
Lubrication of certain moving components of the LPT is required. Gears and the lead screw need grease or
oil after a certain number of cycles or elapsed time in service. These lubricants were chosen for their
performance, other lubricants should not be substituted.
TABLE 4-3. RECOMMENDED LUBRICANTS

_______________________________________________________________________________________
1 – Oil (fluorinated) Asyst part number 7500-2029-01
2 – Grease Asyst part number 7500-2004-01

2000-0900-01 Revision A
NOTE
Lubricants are special low-outgassing compounds with characteristics
chosen for contamination-free operation of the LPI. Other lubricants should
not be substituted.
_______________________________________________________________________________________
4.2.2 GENERAL INSPECTION.

The LPT is an electro-mechanical device. The preventive service process can prevent simple problems from
becoming major problems. The following are searched for at specific intervals to prevent problems:
1. Cords and cables for nicks or abrasions.
2. Connectors for loose hardware and/or cracked or broken backshells.
3. Sliding or moving parts for obvious signs of wear or possible particle generation.
4. Damaged ULPA filters (visual damage and measured filter efficiency [airborne particle measuring] ).
NOTE
The ULPA filter will last 5 to 7 years, under normal conditions, when the LPT
is operated in a Class 1000 or better cleanroom.
5. Cracked, torn, or missing gaskets.

6. Loose or missing attaching hardware (screws, nuts, bolts, and washers).
7. Inspect optical system mirrors and beam splitters for obvious dirt or contamination.
8. Drive belts or chains for proper tension.
9. Ensure that the fans are running. Air is pulled into the minienvironment by the minienvironment fan
and pulled out of the side column by the column exhaust fan.
NOTE
The LPT fans typically have a life of approximately 50,000 hours.
4.2.3 REQUIRED TOOLS. Specific tools are required to perform certain service tasks. Tools may
be purchased from Asyst Technologies where Asyst part numbers are provided:
Description Asyst Part Number
Grease gun 1000–0306–01
Squat switch adjustment tool 1000-0096, Rev B
Port-door clearance gage 1000-0126-01
Minienvironment test window 1000-0427-01
Description
Air velocity meter; Shortridge Instruments, Inc., Model 860 or equivalent
Process Tool Simulator – A fixture that is suggested, but not required, is a platform to support the
cassette when performing autocycling or manually controlled cassette placement testing as performed
within a service procedure. The platform would be created to be at the exact height of the cassette
landing point on the Process Tool. This fixture would prevent having to change the load height calibration
for the LPT and would exactly simulate the Process Tool for testing purposes. It need not be more
complicated than a table top surface raised to be at the proper cassette load height.

2000-0900-01 Revision A
PREVENTIVE SERVICE PROCEDURE

EQUIPMENT
LOAD PORT TRANSFER™ SYSTEM
AUTHORIZED PROCEDURES
ASYST TECHNOLOGIES SERIES LOAD PORT TRANSFER
LIST OF PROCEDURES
PSP
01 Inspect and Clean the LPT and Lubricate Vertical Lead Screw
02 Inspect, Clean, Lubricate and Cleanliness Assurance

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2000-0900-01 Revision A
PSP 01
PREVENTIVE SERVICE PROCEDURE Semiannual Procedure
EQUIPMENT
TASK
INSPECT AND CLEAN THE LPT AND LUBRICATE VERTICAL LEAD SCREW
SPECIAL TOOLS, TEST EQUIPMENT, MATERIAL

1) Screwdriver, Phillips, no. 2 8) SMIF-Pod with cassette
2) Allen wrench (hex driver), 9/64 inch 9) Teach Pendant
3) Allen wrench (hex driver), 7/64 inch 10) Oil; Asyst P/N 7500-2029-01
4) Allen wrench (hex driver), 5/32 inch 11) Grease; Asyst P/N 7500-2004-01
5) Allen wrench (hex driver), 3/32 inch 12) Lens tissues or cleanroom swabs
6) Lint-free wipes 13) Torque screwdriver
7) Isopropyl Alcohol (IPA) 14) Gloves
PROCEDURE
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all
cable connectors attaching the LPT to the Process Tool or Host computer. Release the
latch(es) securing the LPT to the Process Tool and remove the LPT.
B. Place the LPT in a suitable location for inspection. Using a 5/32 inch hex driver, loosen two (2)
hex screws located at the bottom of the three-sided plastic cover . Using a 7/64 inch hex
driver, unscrew the captive screw at the side, top, of the cover. Using a phillips screwdriver,
loosen two (2) screws located at the other side of the cover. Grasp the cover at the top and lift
up and pull straight off. Set cover aside.
C. Using a phillips screwdriver, remove one (1) screw on the top, center, of the vertical support
cover. Using a 3/32 inch hex driver, remove three (3) hex screws located at the top. Using the
hex driver, loosen one screw at the bottom. Grasp the handle at the top of the cover and lift
and pull straight off. Set cover aside.
D. Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel.
Set panel aside.
E. Located on the gripper-tilt cover (see Figure PSP-1-4); LPT Series 1, using a phillips
screwdriver, remove one (1) screw on the top and one (1) screw on the bottom-front, LPT
Series 2, using a 3/32 inch hex driver, loosen two (2) hex screws on the cover top. Using the
phillips (Series 1) or hex driver (Series 2), remove one screw holding the cable clamp.
Remove the screw and clamp. Move the cable out of the way. Grasp the cover at the top and
pull out (horizontally) and then up. Set cover and screws aside.
2. SERVICE
A. Perform a visual inspection of the LPT and inspect for any of the irregularities as outlined
below. If inspection reveals a problem, correct immediately.
1. Cords and cables for nicks or abrasions.

2000-0900-01 Revision A
PREVENTIVE SERVICE PROCEDURE PSP 01

3. Sliding or moving parts for obvious signs of wear.
5. Loose, cracked or worn timing belts. Check for proper tension – not too tight, but not
excessively loose. Test by hand the tilt motor drive belt – optimum is 1/8 inch deflection at
center of span.
7. Optical system mirrors and beam splitters for dirt and contamination.
8. Damaged sensor/flag assemblies.
9. Verify that rotate housing cover does not rub on Tilt Motor Pulley.
10. Inspect minienvironment / rotating arm cable assemblies for rubbing contact.
11. Inspect mylar particle protection strip for dirt and damage and ensure that it is not loose.
12. Inspect flex cables for damage. They should be free to move and they are not bent.
B. If installed, visually inspect the kinematic track. If dirt and debris are found, using a lint-free
wipe, clean the track. Ensure that the track is clean and free of obvious dents and damage.
C. Visually inspect the moving components of the LPT such as the lead screw and slide assembly
components, minienvironment drive, the minienvironment guide wheels, the vertical arm
assembly, and the rotating arm / gripper drive assembly components. Look for any indications
that show abnormal wear or alignment problems. If problems are found, refer to Corrective
Service Procedures in this chapter.
WARNING
Use alcohol in a well-ventilated area. Do not inhale
vapor and avoid contact with eyes. Prolonged or
repeated breathing may cause drowsiness, nausea, or
vomiting. Alcohol may be fatal or cause blindness if
swallowed. Failure to comply may cause death.
WARNING
Keep alcohol away from heat, sparks, and open flame.
Failure to comply may result in serious burns.
D. If optical system mirrors and beam splitters show contamination, clean with alcohol using lens
tissue or cleanroom swab. DO NOT RUB – Rubbing will remove the optical coating on the
mirrors and beam splitters. Drag the cloth or swab across the glass surface to sweep the
solution across the glass and to float the contamination away.
E. Using a clean lint-free wipe moistened with alcohol, wipe both sides of the mylar tape located
on the inside of one of the vertical side columns. Wipe the full length of the tape. Continue to
wipe the tape until the cloths show no signs of dirt.

2000-0900-01 Revision A
F. Connect the Teach Pendant and then connect AC power to the LPT. Provide a calibrated-height
cassette-landing position. Place a SMIF-Pod with cassette on the port. Use the Teach Pendant
to command the LPT to cycle up and down:
WARNING
Laser radiation is present when the port plate raises
and the interlock is defeated. Avoid direct eye
exposure.
1) Depress the AUTO CYCLE key.

2) From the AUTO CYCLE menu, select BEGIN AUTOCYCLE.
G. Listen for any noises that may indicate an out of alignment component or condition. Listen for
the two (2) fans. If abnormal noises are heard, refer to the Corrective Service Procedures
section of this chapter or call for Field Service.
H. Observe the plastic shield panels for smooth operation while the minienvironment drives up and
down, panels must not hang up.
I. From the Teach Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
J. Visually inspect the lead screw assembly. If problems are discovered, refer to Corrective
Service Procedures section of this chapter if a component needs to be replaced or repaired
contact Field Service Organization for assistance with the assembly.
K. Wearing gloves, use one hand to hold a clean, lint-free cloth as a splatter shield behind a
portion of the leadscrew. Using a synthetic bristle brush (tooth brush or equivalent) and alcohol,
clean the grooves in the lead screw in front of the cloth. Change cloths as often as necessary to
ensure that the grease is not splattered. When as much as possible of the trapped grease is
removed from the screw, using a clean, lint free cloth moistened (not dripping) with alcohol,
wipe the lead screw clean. Clean all accessible surfaces of the screw. Continue to wipe the
leadscrew using lint-free cloths and IPA until cloths show no signs of grease residue. See
Figure PSP-1-2.
L. After the IPA has dried, apply a few drops of oil to the top of the minienvironment drive nut
bearing (this is a shielded bearing, apply oil to the shield surface on the top-middle section of
the bearing).
M. Apply grease to the leadscrew. Apply a thin even coat to the section of the screw that the drive
mechanism uses to lift and lower the minienvironment and the section of the screw used by the
arm drive to raise and lower the arm assembly.
N. Use the Teach Pendant to command the LPT to cycle up and down to spread the grease:
WARNING
exposure.

2000-0900-01 Revision A

1) Depress the AUTO CYCLE key.
3) Cycle ten (10) full cycles.
O. From the Teach Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
P. Using a lint-free cloth, wipe away any excess grease or oil which may have collected at the
bottom and top of the leadscrew.
Q. Remove all cleaning materials from LPT.
R. Using a 9/64 inch hex wrench, loosen the automatic tensioner screw on the side of the arm, as
shown in Figure PSP-1-3. The chain tension will be reset. Using a torque wrench or torque
screwdriver, retorque the screw to 24 inch-pounds.
S. Remove power from the LPT then remove the Teach Pendant.
3. POSTSERVICE
A. Grasp the handle at the top of the vertical support cover and place onto the LPT. Using a hex
driver, replace three (3) screws at the top and tighten one (1) screw at the bottom-front of the
cover. Replace the one (1) phillips screw on the top center of the cover.
B. Replace the gripper-tilt cover:

(Series 1) Place the cover over the assembly. Replace one (1) screw on the top and one (1) on
the side and tighten.
(Series 2) Slide the cover over the assembly and fit the cover under the metal ears on the side.
Tighten the two (2) screws on the top and replace the screw and clamp on the end and ensure
that the cable is under the clamp when securing.
C. At the top of the opening in the minienvironment, replace the plastic panel on the
minienvironment by slipping the panel up and inside the minienvironment a small amount.
Push the bottom of the plastic panel toward the opening while pushing upward. When the
panel has cleared the sheet metal at the bottom of the opening, let the panel slide down onto
the metal brackets at the bottom, inside, of the opening in the minienvironment.
D. Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two (2) screws on the
bottom at the other side. Tighten the captive at the top of one side to secure the cover to the
LPT.
E. Replace the LPT back onto the Tool and secure. Reconnect the communications cable(s) and
then the power cable.
F. Using the Teach Pendant, verify the teach points using the AUTOCYCLE key to ensure that the
LPT properly places the cassette into the Process Tool and back onto the Pod door.
G. Return the LPT to standard operating conditions.

2000-0900-01 Revision A
Vertical
Support Plastic
Cover Shield
Panels
Fans
Mylar
Strip
Gripper-Tilt
Cover
(See Figure
PSP-1-4)
Vertical Arm
Guide Wheel
(1 of 2)
Flex Cables
Fan Inside
Minienvironment
LPT Front
Cover
LPT Plastic
Safety Shield
Figure PSP-1-1. LPT Components

2000-0900-01 Revision A
Series 2 Drive
Minienvironment
Drive Assembly
Drive Belt
Slide-Bearing
Block
Drive Nut
Assembly
Leadscrew
Slide
Vertical Arm
Drive
Assembly
Drive Belt
Drive-Nut
Assembly
Series 1 Drive
Figure PSP-1-2. LPT Vertical Drive Assembly (Side View)

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Auto-tensioner
Screw
Vertical Arm
Assembly
Figure PSP-1-3. LPT Arm Assembly
Series 2
Cover Screws
(2 each)
Series 1
Cover Screws
(2 each)
Gripper Tilt
Assembly
Cover
Gripper Cable
Clamp and Screw
LPT Series 1 LPT Series 2
Figure PSP-1-4. LPT Arm Rotate Assembly Covers

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2000-0900-01 Revision A
PSP 02
PREVENTIVE SERVICE PROCEDURE Annual Procedure
EQUIPMENT
TASK
INSPECT, CLEAN, LUBRICATE AND PERFORM CLEANLINESS ASSURANCE

1) Oil, Asyst P/N 7500-2029-01 11) Allen wrench (hex driver), 3/32 inch
2) Grease, Asyst P/N 7500-2030-01 12) Allen wrench (hex driver), 5/32 inch
3) Grease, Asyst P/N 7500-2078-01 13) Allen wrench (hex driver), 7/64 inch
4) Grease gun P/N 1000–0306–01 14) Allen wrench (hex driver), 9/64 inch
5) Teach Pendant 14) Air Velocity Meter (Shortridge Instruments, Inc., Model
6) Alcohol, isopropyl (IPA) Model 860 or equivalent)
7) Lint-free cloths 15) Airborne particle monitor (sampling to 0.10
8) Torque wrench or screwdriver micron at 1 cfm) MET-ONE A2100B or equivalent
9) Screwdriver, Phillips, No. 1 16) SMIF-Pod with cassette
10) Minienvironment test window, Asyst P/N 1000-0427-02
PROCEDURE
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Remove all cable
connectors attaching the LPT to the Process Tool or Host computer. Release the latch(es)
securing the LPT to the Process Tool and remove the LPT.
B. Place the LPT in a suitable location for inspection. Using a 5/32 inch hex driver, loosen two (2)
hex screws located at the bottom of the three-sided plastic safety cover. Using a 7/64 inch hex
driver, unscrew the captive screw at the side, top, of the cover. Using a phillips screwdriver,
loosen two (2) screws located at the other side of the cover. Grasp the cover at the top and lift
up and pull straight off. Set cover aside.
C. Using a phillips screwdriver, remove one (1) screw on the top, center, of the vertical support
cover. Using a 3/32 inch hex driver, remove three (3) hex screws located at the top. Using the
hex driver, loosen one screw at the bottom. Grasp the handle at the top of the cover and lift and
pull straight off. Set cover aside.
D. Remove the minienvironment plastic window panel by pressing fingers onto the panel and
Set panel aside.
E. Located on the gripper-tilt cover (see Figure PSP-2-3); LPT Series 1, using a phillips
screwdriver, remove one (1) screw on the top and one (1) screw on the bottom-front, LPT
Series 2, using a 3/32 inch hex driver, loosen two (2) hex screws on the cover top. Using the
phillips (Series 1) or hex driver (Series 2), remove one screw holding the cable clamp. Remove
the screw and clamp. Move the cable out of the way. Grasp the cover at the top and pull out
and then up. Set cover and screws aside.

2000-0900-01 Revision A

2. SERVICE
A. Perform a visual inspection of the LPT and inspect for any of the irregularities as outlined below.
If inspection reveals a problem, correct immediately. Cords and cables for nicks or abrasions.
2. Sliding or moving parts for obvious signs of wear.
4. Loose, cracked or worn timing belts. Check for proper tension – not too tight, but not
excessively loose. Test by hand the tilt motor drive belt – optimum is 1/8 inch deflection at
center of span.
6. Optical system mirrors and beam splitters for dirt and contamination.
7. Damaged sensor/flag assemblies.
8. Verify that rotate housing cover does not rub on Tilt Motor Pulley.
9. Inspect minienvironment / rotating arm cable assemblies for rubbing contact.
10. Inspect mylar particle protection strip for dirt and damage and ensure that it is not loose.
11. Inspect flex cables for damage. They should be free to move and they are not bent.
B. If installed, visually inspect the kinematic track. If dirt and debris are found, using a lint-free
wipe, clean the track. Ensure that the track is clean and free of obvious dents and damage.
C. Visually inspect the moving components of the LPT such as the lead screw and slide assembly
components, minienvironment drive, the minienvironment guide wheels, the vertical arm
assembly, and the rotating arm / gripper drive assembly components. Look for any indications
that show abnormal wear or alignment problems. If problems are found, refer to Corrective
Service Procedures in this chapter.
WARNING
Use alcohol in a well-ventilated area. Do not inhale
vapor and avoid contact with eyes. Prolonged or
repeated breathing may cause drowsiness, nausea, or
vomiting. Alcohol may be fatal or cause blindness if
swallowed. Failure to comply may cause death.
WARNING
Keep alcohol away from heat, sparks, and open flame.
Failure to comply may result in serious burns.
D. If optical system mirrors and beam splitters show contamination, clean with alcohol using lens
tissue or cleanroom swab. DO NOT RUB – Rubbing will remove the optical coating on the
mirrors and beam splitters. Drag the cloth or swab across the glass surface to sweep the
solution across the glass and to float the contamination away.
E. Using a clean lint-free wipe moistened with alcohol, wipe both sides of the mylar tape located
on the inside of one of the vertical side columns. Wipe the full length of the tape. Continue to
wipe the tape until the cloths show no signs of dirt.

2000-0900-01 Revision A

F. Connect the Teach Pendant and then connect AC power to the LPT. Provide a calibrated
cassette landing position. Place a SMIF-Pod with cassette on the port. Use the Teach Pendant
to command the LPT to cycle up and down:
WARNING
exposure.
1) Depress the <AUTO CYCLE> key.

G. Listen for any noises that may indicate an out of alignment component or condition. Listen for
the two (2) fans. If abnormal noises are heard, refer to the Corrective Service Procedures
section of this chapter or call for Field Service.
H. Observe the plastic shield panels for smooth operation while the minienvironment drives up and
down, panels must not hang up.
I. From the Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
J. Visually inspect the leadscrew assembly. If problems are discovered, refer to Corrective
Service Procedures section of this chapter if a component needs to be replaced or repaired
contact Field Service Organization for assistance with the assembly.
K. Wearing gloves, use one hand to hold a clean, lint-free cloth as a splatter shield behind a portion
of the leadscrew. Using a synthetic bristle brush (tooth brush or equivalent) and alcohol, clean
the grooves in the lead screw in front of the cloth. Change cloths as often as necessary to
ensure that the grease is not splattered. When as much as possible of the trapped grease is
removed from the screw, using a clean, lint free cloth moistened (not dripping) with alcohol, wipe
the lead screw clean. Clean all accessible surfaces of the screw. Continue to wipe the leadscrew
using lint-free cloths and IPA until cloths show no signs of grease residue. See Figure PSP-2-4.
L. Using a clean, lint free cloth moistened with IPA, wipe the slide clean. Clean all surfaces of the
slide assembly. Continue to wipe the slide using lint-free cloths and IPA until cloths show no
signs of grease or oil residue.
M. If equipped, remove the copper spring clip at the top of the vertical-arm drive slide-bearing block
and at the bottom of the minienvironment drive slide-bearing block. Using a 3/32 inch hex driver,
remove two (2) screws securing the clip to the block. Set the clip and screws aside.
N. After the IPA has dried, find the grease fitting on the top of the top slide-bearing block and the
fitting on the bottom of the bottom slide-bearing block. Using the grease gun, gently apply a
small amount of grease (7500-2078-01) at the grease fitting until grease is seen coming through
the seals at the bearing block-to-slide surface. See Figure PSP-2-4.
O. Using oil, apply a thin film of oil to the length of the slide. Apply oil to each of the exposed sides
of the slide.

2000-0900-01 Revision A

P. Apply a few drops of oil to the top of the minienvironment drive nut bearing (this is a shielded
bearing, apply oil to the shield surface on the top-middle section of the bearing).
Q. Apply grease to the leadscrew. Apply a thin even coat to the section of the screw that the drive
mechanism uses to lift and lower the minienvironment and the section of the screw used by the
arm drive to raise and lower the arm assembly.
R. Remove all cleaning materials from LPT.
S. Use the Teach Pendant to command the LPT to cycle up and down to spread the grease:
WARNING
exposure.
1. Depress the <AUTO CYCLE> key.

2. From the AUTO CYCLE menu, select BEGIN AUTOCYCLE.
3. Cycle ten (10) full cycles.
T. From the Teach Pendant AUTO CYCLE menu, select STOP AUTOCYCLE.
U. Using a lint-free wipe, wipe away any excess grease or oil which may have collected at the
bottom and top of the slide and lead screw.
V. Replace the copper spring clips (if used) at the top and bottom of the slide-bearing blocks.
Secure the clips with two (2) screws each.
W. Using a 9/64 inch hex wrench, loosen the automatic tensioner screw on the side of the arm, as
shown in Figure PSP-2-2. The chain tension will be reset. Using a torque wrench or torque
screwdriver, retorque the screw to 24 inch-pounds.
X. If the LPT gripper is V-move, depending on the configuration, the gripper may be in the correct
orientation. If not, using the Teach Pendant, depress <TILT UP> to move gripper to gain
access to the top cover.
If the gripper is H-move, using the Teach Pendant, depress <HORZ OUT> and <TILT UP> as
necessary to gain access to the gripper top cover.
Y. Using a phillips screwdriver, remove nine (9) screws securing gripper-assembly top cover.
Z. Inspect gripper components for undue wear on mechanical components (see Figure PSP-2-5).
Inspect gripper for possible electrical problems such as broken wires or wires pinched by
moving mechanical components. Correct problems as they are encountered.
AA. Apply a small amount of grease (7500-2030-01) to the worm gear.
BB. Using a long needle-type applicator, apply a single drop of oil to each gripper-link pivot point
(see Figure PSP-2-5). There are a total of eight (8) pivot points; 4-upper and 4-lower.
Exercise gripper by depressing <Gripper Open> and <Gripper Close> several times. Using a
lint-free cloth, wipe any excess grease from gear or oil from pivot points.
CC. Replace the gripper assembly cover and secure with nine (9) screws.

2000-0900-01 Revision A

DD. Using the Teach Pendant, depress <HORIZ IN> and <TILT DOWN> keys as necessary to
return the gripper back to its Home position.
EE. Grasp the handle at the top of the vertical support cover and place onto the LPT. Using a hex
driver, replace three (3) screws at the top and tighten one (1) screw at the bottom-front of the
cover.
FF. Replace the gripper-tilt assembly cover by sliding the cover over the assembly and aligning the
screw holes. Series 1; replace the two phillips screws and tighten. Series 2; tighten the two
screws on the cover top. Replace the clamp and screw for the cable and ensure that the cable
is under the clamp when securing the screw (Series 2; the exposed copper braid must be
under the clamp before securing.
GG. Replace the LPT back onto the Tool and secure. Reconnect the communications cable(s) and
HH. On the minienvironment, install the test panel (P/N 1000-0427-02) by slipping the panel up and
inside the minienvironment at the top of the window opening, a small amount. Push the bottom
of the plastic panel toward the opening while pushing upward. When the panel has cleared the
sheet metal at the bottom of the opening, let the panel slide down onto the metal brackets at
the bottom, inside, of the opening in the minienvironment.
I I. Check the fan / filter unit (FFU) for clean air delivery – perform an air velocity test.
Early model filters have stitched seams across the filter top, the later model has no stitching.
Using an air velocity meter (Shortridge Instruments, Inc., Model 860 or equivalent), measure
the airflow at three (3) positions equally spaced across the front of the filter face. Position the
particle monitoring probe approximately 6 inches above the filter face with the minienvironment
in the down (Home) position. Figure PSP-2-6 shows the placement of the probe-holes. Early
style filters; the air velocity must average 140 – 160 FPM calculated from the three
measurement positions. Later style filters; average of 100 FPM with fan at full speed. If the
velocity is not proper, refer to procedure CAP 14 for adjustment procedures.
Hole 1 + Hole 2 + Hole 3 ÷ 3 = Average Airflow
JJ. Apply power to the airborne particle counter. Perform any calibration procedures necessary as
prescribed in the manufacturers documentation.
KK. Remove the minienvironment test window.
LL. Using lint-free wipes and alcohol, wipe the interior of the minienvironment, the port door top and
bottom, the rotating arm and gripper, minienvironment window, cassette landing platform, and
loadlock (if equipped). DO NOT wipe the ULPA filter or let any alcohol get into the filter
element.
MM. After the alcohol has dried, replace the minienvironment standard window.
NN. With the LPT fully Homed, using the Teach Pendant, select <PORT UP> to raise the
minienvironment. Let the fan run for 10 minutes to allow the LPT internal components to self-
clean. After 10 minutes, lower the minienvironment
OO. Position the particle monitoring probe near the cassette landing position where the LPT places
the cassette in the Process Tool or load lock. Figure PSP-2-7 shows the placement of the
probe.
PP. Place a clean SMIF-Pod with a clean cassette onto the LPT port plate.

2000-0900-01 Revision A
QQ. Using the Teach Pendant, from the AUTO CYCLE menu, select BEGIN AUTOCYCLE.
RR. Sample the LPT contamination level continuously while the unit autocycles for 10 complete
cycles (load + unload = 1 complete cycle).
SS. Set pass / fail criteria as follows:

Pass – Average of 35 particles over 10 complete cycles. The accumulative particles measured
over 10 complete cycles shall be equal to or less than 35 particles at 0.10 microns.
TT. From the AUTOCYCLE menu, select STOP AUTOCYCLE.
UU. Evaluate the test results as follows:

Test passes: log the test results in the service records for the Process Tool / LPT and the
date of this certification.
Test does not pass:
1. Verify that the average air velocity with the minienvironment test-window panel inplace:
Early-model filter – from the FFU is 140 – 160 FPM at 6 inches above the filter face, or
Later-style filter – 100 FPM at 6 inches above the filter face.
2. If the filtered air particle count is good at the filter, inspect the minienvironment / rotating
arm cable assemblies for rubbing contact or any other contaminating possibilities. Correct
problems as required.
V V. Retest per paragraphs AA through AH above.
WW. Using the Teach Pendant, verify the teach points to ensure that the LPT properly places the
cassette into the Process Tool.
3. POSTSERVICE
A. At the minienvironment, ensure that the operating window panel is installed.
B. Place the LPT three-sided plastic safety cover with the metal brackets in place above the
screws on the sides of the LPT. Lower the cover onto the screws and using hex drivers and a
phillips screwdriver, tighten two (2) screws located at one side of the cover and two screws on
the bottom at the other side. Tighten the captive at the top of one side to secure the cover to
the LPT.
C. Return the LPT to standard operating conditions.

2000-0900-01 Revision A
Vertical
Support Plastic
Cover Shield
Panels
Fans
Mylar
Strip
Gripper-Tilt
Cover
(See Figure
PSP-1-4)
Vertical Arm
Guide Wheel
(1 of 2)
Flex Cables
Fan Inside
Minienvironment
LPT Front
Cover
LPT Plastic
Safety Shield
Figure PSP-2-1. LPT Components (Series 2 Shown)

2000-0900-01 Revision A
Auto-tensioner
Screw
Vertical Arm
Assembly
Figure PSP-2-2. LPT Arm Assembly
Series 2
Cover Screws
(2 each)
Series 1
Cover Screws
(2 each)
Gripper Tilt
Assembly
Cover
Gripper Cable
Clamp and Screw
LPT Series 1 LPT Series 2
Figure PSP-2-3. LPT Arm Rotate Assembly Covers

2000-0900-01 Revision A
Series 2 Drive
Minienvironment
Drive Assembly
Drive Belt
Slide-Bearing
Block
Drive Nut
Assembly
Leadscrew
Slide
Vertical Arm
Drive
Assembly
Drive Belt
Drive-Nut
Assembly
Series 1 Drive
Figure PSP-2-4. LPT Vertical Drive Assembly (Side View)

2000-0900-01 Revision A
Figure PSP-2-5. Gripper Assembly Lubrication Points

2000-0900-01 Revision A
Minienvironment
3-Holes, Equally Test-Window
Spaced at 6-
Inches Above
Filter Surface
Figure PSP-2-6. FFU Air Velocity Measurement Points
Process Tool
Load Lock
(If Equipped)
Placement of
Placement of Particle Probe
Particle Probe at Cassette
When Testing Landing
FFU Platform
Cassette Load
Platform
Fan / Filter
Unit (FFU)
Airborne
Particle
Counter
Figure PSP-2-7. Airborne Particle Counter Setup At LPT / Process Tool

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2000-0900-01 Revision A
CALIBRATION / ALIGNMENT PROCEDURES
EQUIPMENT
Calibration/Alignment is typically scheduled service based on elapsed time, a certain number of LPT
cycles, or because corrective service was performed. It consists of adjustments that have to be made
periodically to ensure that the LPT's movements are exact and repeatable. If corrective service is
performed on the LPT, most likely a calibration or alignment will have to be performed. An individual
familiar with the operation of the LPT will periodically observe movements or hear noises which indicate
that a component may be out of alignment. The following section of this chapter, Calibration / Alignment
Procedures, lists those adjustments that are to be performed on an as-needed basis.
LIST OF PROCEDURES
CAP
01 Optical Detector System Adjustment
02 Excessive Wafer Protrusion Sensor Adjustment
03 Gripper Finger Adjustment; V- and H-Move
04 Gripper Adjustment; V-Move
05 Stop Plate Adjustment; V-Move
06 Squat Switch Adjustment; V- and H-Move
07 Gripper Level Adjustment; V- and H-Move
08 Gripper Adjustment; H-Move
09 Over-Travel Switch Adjustment; V- and H-Move
10 Port Door Leveling and Adjustment
11 Pod Hold-Down Latch Adjustment; LPT 2200
12 Pod-In-Place Switch Adjustment; LPT 2200
13 Port Lock / Unlock Mechanism Adjustment; LPT 2150
14 Wafer Seater Adjustment
15 Fan / Filter Air Velocity Adjustment
CAUTION
The LPT should be removed from the Process Tool prior to
performing mechanical adjustments if access to make the
adjustment is physically difficult or damage to the LPT, Process
Tool, or product material is possible.

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CALIBRATION / ALIGNMENT PROCEDURE CAP 01
EQUIPMENT
TASK
OPTICAL DETECTOR SYSTEM ADJUSTMENT

1) Allen wrench (or hex driver), 3/32 inch 6) Red Varnish (Asyst P/N 7500-0848-01)
2) Screwdriver, common, small (1/8 inch)
3) Screwdriver, phillips, #0 tip
4) SMIF-Pod with a full cassette of dummy or reject wafers
5) Teach Pendant
PROCEDURE [Perform all procedure steps in the order presented below unless otherwise instructed]
1. PRESERVICE
NOTES
1. This procedure must only be performed by a service engineer
qualified to align laser systems and aware of laser safety practices.
2. Laser beam alignment may be performed with the LPT in the
Process Tool. If the Tool does not afford enough access to the LPT, the
LPT may be removed to a suitable location (see step 1.A).
A) (Optional) With the port door in Home position, remove power from the LPT. Remove all cable
connectors attached to the LPT. Remove the LPT from the Process Tool. Place the LPT in a
suitable location for service.
B) Remove the minienvironment plastic window panel by pressing fingers onto the panel and
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel. Set
panel aside.
C) Connect the Teach Pendant, then connect power to the LPT. Place a SMIF-Pod on the port
plate.
D) Using the Teach Pendant, press <PORT UP> to raise the minienvironment up so that the light
beam has an unobstructed path to the sensors.
NOTE
There are two (2) versions of the optical assembly (laser bracket). An early
version and a later version. The operation is identical. See Figure CAP-1-1
2. SERVICE

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CAUTION
Laser radiation when power is applied to LPT and
interlock defeated. Avoid direct eye exposure.
CAUTION
When the Pod top or minienvironment smoke-colored
plastic cover is removed from the LPT, the laser
protection is defeated and personnel may be exposed
to the laser light beam. Especially when the technician
is aligning the mirrors, beamsplitters or beam sensors,
the technician will be exposed to the beam and direct
eye exposure is to be avoided.
Laser Product. Avoid Direct Eye Exposure.
A. Taking a white piece of paper, insert the paper into the light beam path. Observe the beam
orientation. The beam emitted from the laser is oval. The elongated part of the beam must be
parallel with the port plate. See Figure CAP-1-2.
B. If the beam is other than parallel to the port plate, refer to Corrective Service Procedure CSP 04,
Replacing Laser Diode, for alignment information.
C. WAFER SENSOR CALIBRATION
1. At the Teach Pendant: Press the <DIAG> key.
2. From the diagnostic menu, select SENSOR ALIGNMENT.
3. From the submenu select WAFER SENSOR.
4. Wait for the message on the Teach Pendant LCD. The message should read:
DAC #0 threshold = xx
This number (xx) needs to be as small as possible. If the displayed DAC threshold value is
less than 30, proceed to the next sensor.
If the displayed DAC threshold value is greater than 30, proceed to adjust the angle of the
beamsplitter which directs the light beam onto the wafer-presence sensor aperture (see
Figure CAP-1-3).
5. For early style; using a phillips screwdriver, remove the five (5) screws securing the optical
assembly cover. Carefully remove the cover and screws and set aside.
For later style laser assemblies, cover need not be removed.
The beamsplitter adjustment can be accomplished by slightly turning either one or both of the
adjustment screws that hold the beamsplitter support in place. See Figure CAP-1-1 to ensure
that the proper screws are adjusted. Visually verify that the center of the light beam is hitting
directly on the center of the sensor aperture.

2000-0900-01 Revision A
6. Repeat step 5 above until the reported threshold value is less than *30.
*Use the best effort to calibrate the threshold value to ≤30. If this is not possible, get the
number as close as possible to 30.
7. On the Teach Pendant, press the <ESC> key to stop calibration.
D. SLOT SENSOR CALIBRATION
1. At the Teach Pendant: Press the <DIAG> key.
2. From the diagnostic menu, select SENSOR ALIGNMENT.
3. From the submenu select SLOT SENSOR.
less than 30, proceed to the next sensor.
beamsplitter which directs the light beam onto the slot sensor aperture (see Figure CAP-1-3).
5. If not done previously, using a phillips screwdriver, remove the five (5) screws securing the
optical assembly cover. Carefully remove the cover and screws and set aside.
The beamsplitter adjustment can be accomplished by slightly turning either one or both of the
adjustment screws that hold the beamsplitter support in place. See Figure CAP-1-1 to ensure
that the proper screws are adjusted. Visually verify that the center of the light beam is hitting
directly on the center of the slot sensor aperture.
7. *Use the best effort to calibrate the threshold value to ≤30. If this is not possible, get the
8. On the Teach Pendant, press the <ESC> key to stop calibration.
E. CALIBRATION OF THE WAFER PROTRUSION SENSOR

1. Load a cassette with a wafer in slot 3. Ensure that the cassette is pushed fully forward
toward the light beam to take out any free space.
2. Verify that the wafer protrusion light beam is approximately 1/16 inch away from and parallel
to the front edge of the cassette. If necessary, carefully readjust the position of the mirror for
the wafer protrusion beam (see Figure CAP-1-3) until it is within 1/16 inch of the cassette on
both sides.
3. At the Teach Pendant: Press <DIAG> key.

2000-0900-01 Revision A
4. From the diagnostic menu, select Sensor Alignment.
5. From the submenu select Protrude Sensor.
less than 30, proceed to step F (below).
mirror which directs the light beam onto the wafer-protrusion sensor aperture (see Figure
CAP-1-3).
7. If not done previously, using a phillips screwdriver, remove the five (5) screws securing the
optical assembly cover. Carefully remove the cover and screws and set aside.
The mirror adjustment can be accomplished by slightly turning either one or both of the
adjustment screws that hold the mirror support in place. See Figure CAP-1-1 to ensure that
the proper screws are adjusted. Visually verify that the center of the light beam is hitting
directly on the center of the wafer-protrusion sensor aperture.
NOTE
At times it may be necessary to adjust the first mirror in the beam path
so that the light beam is positioned in the center of the second mirror.
This allows the beam to be properly aligned with the sensor.
*Use the best effort to calibrate the threshold value to ≤30. If this is not possible, get the
F. On the Teach Pendant, press the <ESC> key to stop calibration.
G. When all adjustments have been performed and verified, using red varnish (Asyst part number
7500-0848-01), apply a small amount to the heads of any adjustment screws that were disturbed
during adjustment.
H. Replace the optical assembly cover and secure with the five (5) screws.
I. At the Teach Pendant press the <PORT DOWN> key.
J. Replace the Pod top.
K. At the Teach Pendant press the <LOCK PORT> key.
L. Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
<VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT DOWN> keys to
position all axes back to their Home positions.

2000-0900-01 Revision A

3. POSTSERVICE
A) Replace the minienvironment window panel.
B) Disconnect the AC power and then the Teach Pendant from the LPT.
C) If removed, return the LPT back to the Process Tool and secure. Connect communications and
power cables to the LPT.
D) Return LPT to standard operation.
Mirror or Beam Adjustment

Splitter Screws (2)
DO NOT
ADJUST
Early Style Laser Bracket
Mirror or Beam
Splitter DO NOT
ADJUST
Adjustment
Screws (2)
Later Style Laser Bracket
Figure CAP-1-1. Optical Assembly Bracket

2000-0900-01 Revision A
Proper Beam Wafers

Orientation
Figure CAP-1-2. Light Beam Orientation
Mirrors
Cassette Slot Beamsplitter

Sensor
Wafer Position
Sensor
Beam Path
Beam Aperture
1mW @ 670nm
Laser Diode
Beam Aperture
Silicon Wafer
Wafer Protrusion Sensor
Figure CAP-1-3. Light Beam Diagram

(Viewed Down Through Port Plate)
(200mm Port Plate Shown)

2000-0900-01 Revision A
EQUIPMENT
LOAD PORT TRANSFER™
TASK
EXCESSIVE WAFER PROTRUSION SENSOR ADJUSTMENT

1) Screwdriver, common, small
2) Screwdriver, phillips, No. 2
3) Allen wrench (or hex driver), 5/32 inch
5)
1. PRESERVICE
securing the LPT to the Process Tool and remove the LPT. Place the LPT in a location suitable
for servicing.
B. Attach the Teach Pendant and replace the power to the LPT.
2. SERVICE
A. On the side of the LPT that mounts to the Process Tool (LPT front side) remove the front cover
(flat metal cover that covers the bottom half of the LPT) (see Figure CAP-2-1). Set cover aside.
B. Using the Teach Pendant, press the <PORT UP> key and hold it until the port is raised seven (7)
inches as indicated on the LCD display. Next press the <VERT UP> key until the vertical arm
raises five (5) inches.
C. Through the front of the LPT, reaching inside remove the panel (see Figure CAP-2-1) to gain
access to the Indexer circuit board (see Figure CAP-15-2).
D. On the Teach Pendant press the <VERT DOWN> and then the <PORT DOWN> keys. Place a
SMIF-Pod with a cassette (with a dummy wafer in a middle slot) on the port plate of the LPT.
E. With the port plate Homed, raise the minienvironment by pressing the <PORT UP> key. Stop the
port (push in on the ESTOP switch on the top of the Teach Pendant) when the wafer is at one (1)
inch below the bottom of the port plate.
F. Reach into the cassette and extend the wafer from the cassette approximately 1/4 inch (0.6 cm).
G. Reaching through the access area on the front of the LPT, on the main processor board, the
adjustment potentiometer is placed under the connector plate located through the hole near the
J10 connector on the board, (see Figure CAP-2-2).

2000-0900-01 Revision A

H. Using a small common screwdriver, adjust the potentiometer to just light the LED which is
located very near to the potentiometer. The lighted LED can be viewed through the hole in the
connector plate.
I. Repeat the adjustment in the above step to verify the set point where the light just lights.
J. Raise the minienvironment. With the wafer extended, lower the minienvironment to verify that the
port is halted with the wafer at one (1) inch below the port plate.
K. If adjustment is complete, replace the front port plate cover and secure with two (2) screws.
3. POSTSERVICE
A) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
C) Return the LPT back to the Process Tool and secure. Connect communications and power
cables to the LPT.
Pinch Hazard
Keep hands out
of this area when
LPT is operating.
Front
Cover
Side View Front View

Figure CAP-2-1. LPT Views
2000-0900-01 Revision A
Indexer Circuit Board

(Viewed Through Access
Panel in Front of LPT)
Adjustment
Screw and
LED
Access Panel
Figure CAP-02-2. LPT Tool-Side View

(Shown With Front Cover Removed and Minienvironment Raised)

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
GRIPPER FINGER ADJUSTMENT; V- and H-MOVE

1) Teach Pendant
4) SMIF-Pod with empty cassette
1. PRESERVICE
securing the LPT to the Process Tool and remove the LPT and place in a location suitable to
service the LPT.
B. Connect the Teach Pendant and place a Pod containing an empty cassette onto the port plate.
C. Using Teach Pendant:
1) Depress <AUTO CYCLE>.
2) From the AUTO CYCLE menu select LOAD / UNLOAD / HOME.
3) From the submenu select LOAD.

The gripper will squat on the cassette, gripper fingers will close, and then depress the ESTOP
switch on top of the Teach Pendant before the cassette is moved. Observe:
V-move: two (2) yellow LEDs light on gripper top cover.

H-move: two (2) yellow LEDs and one (1) green LED light on gripper top cover.
NOTES
1) If the red LED is lighted, proceed to procedure CAP 07; Over-Travel
Switch Adjustment.
2) If the green LED is not lighted (H-move only), proceed to procedure
CAP 06; Gripper Adjustment, H-Move.
D) Pull the ESTOP out and depress <NEXT PT> for:

V-move: cassette is moved off of pod door, yellow LEDs go out.
H-move: rotating arm moves back slightly, yellow LEDs go out and green LED stays lighted.

2000-0900-01 Revision A

E) Depress <NEXT PT> for:
V-move: arm moves toward Process Tool.
H-move: arm moves LPT.
F) Grasp cassette by hand, and using only moderate pressure, attempt to slide cassette back and
forth within gripper fingers:
1) If cassette does not slide, observe that the grip is not too tight where the cassette begins to
deform.
2) If gripper-finger adjustment is proper, no adjustment is not required.
STOP! Do not proceed.
3) If cassette slides or grip is too tight, gripper-finger adjustment is necessary.
Proceed with Service section, below.
2. SERVICE
A) Using the Teach Pendant, to bring the gripper into a working position, use a combination of
<HORZ IN> / <HORZ OUT>, <VERT UP> / <VERT DOWN>, and <TILT UP> / <TILT DOWN>
keys.
B) At the H-move or V-move gripper, using a phillips screwdriver, remove nine flathead screws
(Figure CAP-3-1) securing gripper cover to gripper body. Retain screws and cover.
C) Loosen, do not remove, screw on gripper-close limit-switch flag, adjust flag, then tighten screw:
• If grip is too loose, move flag away from switch.
• If grip is too tight, move flag into switch.
D) Place an empty cassette in a position to be gripped. Press <CLOSE GRIP> on the Teach
Pendant.
E) Test gripper by placing hands, a palm on each side of the cassette, and a thumb on each
gripper finger. Using only moderate pressure, push gripper forward:
• If cassette does not slide on gripper, adjustment is correct.
• If cassette slides, repeat steps 2C thorough 2E as required.
F) Press <OPEN GRIP> on the Teach Pendant.
G) Replace gripper cover and screws removed in step 2B.

2000-0900-01 Revision A

3. POSTSERVICE
C) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
Yellow LEDs
Red LED
Green LED
(H-Move)
Figure CAP-3-1. Gripper Cover, Top View

2000-0900-01 Revision A
Cover Screw
(1 of 9) Flag Screw Gripper Close-
Limit Flag
Gripper Close-
Limit Switch
Figure CAP-3-2. Gripper, Finger Adjustment, Top View

(Cover Broken Away and Harness Removed for Clarity)

2000-0900-01 Revision A
EQUIPMENT
TASK
GRIPPER ADJUSTMENT: V-MOVE

1) Teach Pendant
1. PRESERVICE
A) With the minienvironment in the Home position, remove power from the LPT. Remove all cable
service the LPT.
B) With LPT in Home position and Teach Pendant connected, place a Pod containing an empty
cassette onto the port plate.
C) Using Teach Pendant, starting at Home, depress < NEXT PT > and step through the set points
to step "ABOVE INDEXER".
D) With a cassette under the gripper, align by eye the nylon tipped standoffs with the cassette
ensuring equal distances between the standoff and the cassette (cassette centered under
gripper).
1) If gripper is level and centered over the cassette, adjustment is not required. STOP! Do
not proceed.
2) If cassette does not line up, adjustment is necessary.
Proceed with Service section, below.
2. SERVICE
A) While holding the gripper securely, loosen gripper level locking screws. See Figure CAP-4-1.
B) Slide gripper shaft either in or out of gripper support bracket depending on which direction will
center gripper. See Figure CAP-4-1.
C) Tighten gripper level locking screws.

2000-0900-01 Revision A
D) Check gripper front-to-back level.
1) Place a bubble level on the top surface of the port door and note the location of the
bubble for reference.
2) Place a bubble level on the top surface of the gripper.
3) Using a 5/32 inch hex driver, loosen two gripper-level locking screws (Figure CAP-4-1)
on the gripper-support bracket. This will relax the tension on the gripper shaft allowing
the gripper to rotate within the support bracket.
4) Rotate gripper until the level's bubble is in the same location as when the level was on
the port door. Tighten the two gripper-level locking screws and check the level again.
Repeat adjustment, if necessary.
E) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
F) Depress the < AUTO CYCLE > key. From the AUTO CYCLE menu, depress BEGIN
AUTOCYCLE key. Cycle through a minimum of two load and unload cycles to verify proper
adjustment. When finished select STOP AUTOCYCLE.
3. POSTSERVICE
A) Disconnect the AC power and then the Teach Pendant from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
C) Return LPT to standard operation.

2000-0900-01 Revision A

Gripper Level
Gripper Locking Screw
(1 of 2)
Gripper
Support Shaft
Gripper Support Support Locking

Bracket Screw (1 of 2)
Figure CAP-4-1. Gripper, V-Move

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
STOP-PLATE ADJUSTMENT; V-MOVE

1) Teach Pendant
2) SMIF-Pod with an empty Cassette
1. PRESERVICE
The cassette stop plate, located on the underside of the gripper, locates cassettes front and
back to prevent cassettes from sliding during load and unload cycles.
A) Before proceeding, verify that LPT components are at their Home positions.
B) With the minienvironment in the Home position, remove power from the LPT. Remove all cable
service the LPT.
2. SERVICE
A) With the LPT at the Home position connect the Teach Pendant, place a Pod containing an
empty cassette onto the port plate.
B) Using the Teach Pendant, starting from Home position, depress <NEXT PT> and step through
the teach points until the point "ABOVE PORT" is found.
C) With the cassette sitting on the port door and the gripper above the cassette, depress <NEXT
PT> ("ELEV PICKUP") while observing how the cassette's handle aligns with the stop plate.
1) If cassette handle and stop plate align correctly (see Figure CAP-5-1), STOP, no further
action is required.
2) If cassette handle and stop plate are misaligned, depress < PREV PT > ("ABOVE EL").
D) Using a phillips screwdriver, loosen (do not remove) two pan-head stop-plate mounting screws
(Figure CAP-5-1) and adjust stop plate to correct location. Secure screws.
E) Using the Teach Pendant, depress <NEXT PT> ("ELEV PICKUP") to check adjustment. Repeat
adjustment step D. above if required.
F) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
2000-0900-01 Revision A
G) Depress the <AUTO CYCLE> key. From the AUTO CYCLE menu, select BEGIN
AUTOCYCLE. Cycle through a minimum of two (2) load and unload cycles to verify proper
adjustment.
H) On the Teach Pendant, select STOP AUTOCYCLE from the AUTO CYCLE menu.
3. POSTSERVICE
cables to the LPT.
C) Return the LPT to standard operation.
V-Move Gripper
Stop Plate Screw
Cassette
Figure CAP-5-1. Gripper, V-Move (Right-Side View)

2000-0900-01 Revision A
EQUIPMENT
TASK
SQUAT SWITCH ADJUSTMENT; V- AND H-MOVE

1) Teach Pendant 6) SMIF-Pod with empty cassette
2) Cassette, empty
3) Squat Switch Adjustment Tool, Asyst part no. 1000-0096-01, Rev. B
If LPT stops while picking up a cassette from the Pod door or Process Tool indexer or stage,
squat-switch adjustment may be required.
1. PRESERVICE
A) With the LPT in the Home position and the Teach Pendant connected, place a Pod containing
an empty production-type cassette onto the port plate.
B) Using the Teach Pendant, depress the < AUTOCYCLE > key and at the point where the gripper
moves out to the cassette, observe as the gripper grips the cassette. Three possible actions may
occur:
1) Cassette lines up and grip occurs, adjustment is not necessary.
2) Cassette lines up, grip occurs, but is jerky.
3) Cassette does not line up, and no grip occurs – system will halt and alarm.
C) Where the cassette is not gripped (step 1.B.3), re-teach a teachpoint closer to the cassette.
Using the TEACH POINT (TP) ACQUISITION OVERVIEW at the end of this procedure, reteach
the gripper position. Repeat from the beginning of this procedure. If it still does not grip, proceed
to step 1.E below.
D) Where the gripper holds the cassette:

1) If cassette fully lines up and gripper is level, then two yellow LEDs (and the additional green
LED on the H-move only) will be lighted and the red LED will be off. STOP! Do not
proceed, adjustment is not necessary.
2) If cassette lines up, but was jerky, proceed with the Service section below.
3) If cassette does not line up:
a) H-MOVE: Where the inner wedge does not fit into the wafer slot, use the Teach
Pendant to teach the proper cassette alignment position.
b) V-MOVE: Where stop plate does not line up, proceed to procedure CAP 05; Stop Plate
Adjustment; Gripper, V-Move.

2000-0900-01 Revision A
4) If red LED is lighted, proceed to procedure CAP 09; Over-Travel Switch Adjustment; V- and
H-Move.
5) If either yellow LED or green LED (H-move only) does not light, proceed with Service
section, below.
2. SERVICE
A) If the gripper is not close to the cassette, using the Teach Pendant motion keys (see Appendix
B), manually position the gripper close to the cassette. Depress the Teach Pendant ESTOP to
stop the movement.
B) On the Teach Pendant, pull the ESTOP out. Using the Teach Pendant keys, use <NEXT
STEP> key to step the gripper onto the face of the cassette (H-Move) or to the top of the
cassette (V-Move).
C) At the gripper, verify that the bodies of sensor adjustment screws are at the bottoms of their
slots (locations shown on Figure CAP-6-1). If necessary, use a 5/64 inch hex driver to loosen,
position, and then tighten the adjustment screws.
D) Insert the pins of the squat-switch adjustment tool into the access holes at the locations shown
on Figure CAP-6-1. Depending on the orientation of the LPT, left hand or right hand, orient the
tool with the long pin in the hole nearest the shaft. Short pin on the tool will contact the bottom
of the adjustment-screw head cavity and the longer pin will contact the gripper shaft.
E) While squeezing the tool and gripper together firmly by hand, insert a 3/32 inch hex driver into
the adjustment access hole nearest the non-lighted yellow LED. Turn the adjustment screw
clockwise until the yellow LED just lights. Repeat for the second LED if necessary.
F) Turn each screw counter-clockwise slightly until associated LED goes off.
G) Verify adjustment by loading a cassette. Both LEDs should light at the same time during gripper
squat.
H) Repeat steps 2D through 2G as necessary to ensure that proper LEDs light.
I) If adjusting squat switches does not satisfy the problem, troubleshoot.
3. POSTSERVICE
cables to the LPT.

2000-0900-01 Revision A
Squat Switch
Adjustment
Tool
Tool
Access
Holes (2)
Yellow
LEDs (2)
Adjustment
Access
Holes (2) Arm
Sensor
Adjustment
Screws (2)
NOTE
V-Move gripper shown,
H-Move is a similar configuration
Figure CAP-6-1. Gripper, Extended Position, Top View

(Right-Configured LPT Shown)

2000-0900-01 Revision A
______________________________________________________________________________________
TEACH POINT (TP) ACQUISITION OVERVIEW
__________________________________________________________________________________________
NOTES
1. Press and hold, either <NEXT PT> or <PREV PT> keys. The LPT arm
moves to the appropriate TP and stops. When stopped, release the key.
2. The first time <NEXT PT> key on the Teach Pendant is pressed, the
system goes through a Homing calibration of all axes.
1. To stop movement before reaching the programmed TP, release the key...
• A display appears indicating the actual X and Y locations and that the arm is between the
indicated TPs.
• Present X and Y locations are updated each time the LPT movement stops.
• During the movement from one TP to the next TP, the destination TP name appears on the LCD
line 4.
2. Upon arrival at the programmed TP, release the key. The LCD displays ”Key action done”.
3. To modify a pre-programmed (existing) TP location, proceed as follows...
NOTE
Some TP locations may be modified either before, or after, the original
programmed TP location is reached, it is not necessary to reach the pre-
programmed TP first.
• Using the MOTION keys (see Appendix B, paragraph B.4.6), (NOT <NEXT PT> or <PREV PT>)
move to the desired new TP location.
• Once achieving, confirming, and re-confirming, the desired new TP location, press <MOD PT>
key. The pendant will prompt, "ENTER to confirm, or ESC to abort".
Use <NEXT PT> and <PREV PT> keys repeatedly to examine entering and exiting the new TP from
different angles.
4. Upon complete examination of all TPs, press <SAVE PT> key. The Teach Pendant will prompt
“ENTER” for confirmation.
The new set of TPs will be stored in NOVRAM in a file called, D:\V_MOVES.NEW and
V_MOVES.OLD (backup).
______________________________________________________________________________________

2000-0900-01 Revision A
EQUIPMENT
TASK
GRIPPER LEVEL ADJUSTMENT; V- and H-MOVE

1) Teach Pendant 6) SMIF-Pod with a production type cassette
2) Level, bubble, circular
4) Cassette, weighted, 3.0 pounds ±2.0 ounces
5) Cassette, empty
1. PRESERVICE
A) Before attempting any gripper-level adjustment, verify that the gripper-tilt adjustments are secure.
B) Place a SMIF-Pod with a production-type cassette on the port plate. Using the Teach Pendant,
depress the <AUTOCYCLE> key and then select BEGIN AUTOCYCLE. When the gripper is
close to the cassette, depress the Teach Pendant ESTOP to stop the movement.
C) Place a bubble level on top of the cassette, as close to the center as possible. Observe the
location of the bubble.
D) Set the level on top of the gripper. Bubble should be in the same location on gripper as it is on
the cassette. If a difference between each location is half a bubble or greater, the gripper must
be leveled. Proceed with Service section below.
2. SERVICE
A) Front-To-Back Leveling.
1) Using a 5/32 inch hex driver, loosen two gripper-level locking screws (Figure CAP-7-1)
on gripper-support bracket. This will relax tension on gripper shaft, allowing gripper to
rotate within support bracket.
2) With the bubble level on top of the gripper, rotate the gripper until the bubble is in the
same location as when the level was on the cassette. Tighten two (2) gripper-level
locking screws and check the level again. Repeat adjustment, if necessary.

2000-0900-01 Revision A
B) Side-To-Side Leveling.
NOTE
This adjustment should be performed ONLY after paragraph 2A above
has been successfully accomplished. Utilize a weighted production-
type cassette to perform the following adjustment.
1) Align a weighted production-type cassette with the gripper assembly and using the
Teach Pendant, pull the ESTOP out. On the Teach Pendant, depress <NEXT STEP>
key to move the gripper to the cassette and then to close the gripper fingers.
2) Place a bubble level on top of the gripper. Observe the bubble and note in which
direction adjustment is required.
3) Insert a 5/32 inch hex driver into the socket-head adjustment screw, accessible through
the tool-access hole farthest from the shaft in the gripper top cover (see Figure CAP-7-
2). Adjust this screw until the gripper body is parallel to the cassette top surface to
within ±0.02 inches. (±0.02 inches is approximately equivalent to 1/8 diameter of
bubble.)
4) Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT
UP> / <VERT DOWN>, <TILT UP> / <TILT DOWN>, and <PORT UP> / <PORT
DOWN> keys to position all axes back to their Home positions.
5) On the Teach Pendant, depress the <AUTO CYCLE> key. From the AUTO CYCLE
menu, select BEGIN AUTOCYCLE. Perform several load and unload cycles to test
adjustments, alternately using both a weighted and an empty cassette. Re-adjust if
required.
6) On the Teach Pendant, select STOP AUTOCYCLE from the AUTO CYCLE menu.
3. POSTSERVICE
cables to the LPT.

2000-0900-01 Revision A

Gripper Level
Gripper Locking Screw
(1 of 2)
Gripper
Support Shaft
NOTE
V-Move – Back surface of Gripper Support Support Locking
gripper support bracket to Bracket Screw (1 of 2)
remain vertical.
Figure CAP-7-1. Gripper Level Adjustment, V- and H-Move

(V-Move Gripper Shown, H-Move Similar)

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Tool Access
Holes (2)
Figure CAP-7-2. Gripper Side-To-Side Level Adjustment, V- and H-Move

(Arm Shown Extended)

2000-0900-01 Revision A
EQUIPMENT
TASK
GRIPPER ADJUSTMENT; H-MOVE

1) Teach Pendant 6) Allen wrench (or hex driver), 5/32 inch
2) Level, bubble 7) SMIF-Pod with empty cassette
3) Level, torpedo
4) Cassette, half full of dummy wafers
5) Cassette, empty
1. PRESERVICE
NOTE
This procedure should be performed only if the gripper is level. If gripper
is questionable, perform CAP 07; Gripper-Level Adjustment; V-and H-
Move.
A) With the LPT in the Home position and the Teach Pendant connected, place a SMIF-Pod
containing an empty production-type cassette onto the port plate.
B) Using the Teach Pendant, starting at Home, depress <NEXT PT> and step through to step "REL
SQUAT SWITCH".
C) Observe gripper:
1) If cassette fully lines up and gripper is level, then green LED and two yellow LEDs will be
lighted and red LED will be off. STOP! Do not proceed, adjustment not necessary.
2) If cassette does not line up, where the inner wedge does not fit into the wafer slot, use the
Teach Pendant to teach the proper cassette alignment position.
3) If red LED is lighted, proceed to procedure CAP 09; Over-Travel Switch Adjustment; V- and
H-Move.
4) If green LED or either yellow LED does not light, proceed with Service section, below.
2. SERVICE
A) Using the Teach Pendant, depress <PREV PT> and step back for gripper to release cassette.
B) Using the Teach Pendant, depress <HORZ OUT> to center gripper under port. Depress
<UNLK PORT> and remove the Pod top.

2000-0900-01 Revision A

C) Gripper Vertical Alignment:
1) Using a 5/32 inch hex driver or allen wrench, loosen two gripper level-locking screws
(Figure CAP-8-1) on gripper-support bracket.
2) Place a torpedo level on the center top of the cassette on the port. Observe the bubble
location, then move the torpedo level to the top side of the gripper. Bubble should be in
the same location on the gripper as it was on the cassette. Manually rotate gripper until
bubbles match, then tighten two gripper level locking screws on gripper support bracket
(see Figure CAP-8-1).
3) Using the Teach Pendant, depress <PREV PT> and step back to Home. Replace
cassette and Pod top. Depress <NEXT PT> and step through to step "ELEV PICKUP".
4) If the cassette fully lines up and gripper is level, then green LED and two (2) yellow
LEDs will be lighted and red LED will be off.
NOTE
The green LED indicator is for monitoring the nipple on the cassette
face for the cassette present switch. There is no adjustment for this
squat switch. If the green LED does not light when the switch is made,
on the squat switch printed circuit board check jumper JP1. This jumper
should be on pins 2 and 3 (EN position) for H-Move. If jumper is good,
replace circuit board or perform gripper electrical cable troubleshooting.
5) If the green LED does not light, repeat steps 1 through 5 above.
6) If only one yellow LED lights, proceed with horizontal alignment procedure, following.
D) Horizontal Alignment:
1) Using the Teach Pendant, depress <PREV PT> key to release the gripper fingers
carrying the empty cassette. Mount a half-full cassette on the port plate.
2) Using the Teach Pendant, depress <NEXT PT> key for the gripper to squat, depress
<NEXT PT> again to close gripper fingers, depress <NEXT PT> again to move
minienvironment, then depress <NEXT PT> again to rotate the gripper approximately
ninety (90) degrees.
3) Front-to-rear leveling is accomplished by adjusting the tilt-up limit switches. Place a

bubble level on the gripper top surface. Place a bubble level on the port door and
compare the gripper orientation in reference to where it was on the gripper top surface.
a) If the bubble is in the same location, STOP! No adjustment is required.
b) If the bubble has moved, adjustment is necessary, adjust the tilt-up (home) limit
switch.
4) Adjust Tilt-Up (Home) Limit switch (see Figure CMP-8-2). Using a 3/32 inch hex wrench,
carefully loosen the setscrew securing the home limit flag and adjust the flag a very
small amount and then tighten the screw.

2000-0900-01 Revision A

5) Using the Teach Pendant, depress <PREV PT> key, then depress <NEXT PT> again to
rotate the gripper approximately ninety (90) degrees. Check the level.
6) Perform steps 4 and 5 above as necessary to ensure that the gripper is level.
3. POSTSERVICE
cables to the LPT.
Figure CAP-8-1. Gripper, H-Move

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Flag
Home Sensor
Forward
Sensor
Figure CAP-8-2. Gripper-Tilt Switches

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EQUIPMENT
TASK
OVER-TRAVEL SWITCH ADJUSTMENT; V- AND H-MOVE

1) Teach Pendant
2) Cassette, empty
4) Gage, thickness, 0.015 − 0.025 inches
1. PRESERVICE
The red LED on the gripper indicates an improper adjustment of the over-travel switch. If the LED is
lighted when a cassette is present, proceed with Service section below.
2. SERVICE
A) V-Move: Using the Teach Pendant, step through the teach points by depressing <NEXT PT>
until the gripper squats and the gripper fingers close (V-move; "EL REV SQ").
H-Move: Using the Teach Pendant, step through the teach points by depressing <NEXT PT>
key until the gripper squats and the gripper fingers close (H-move; "CLEAR EL CLOSE").
Depress <TILT DOWN>, then <HORZ IN> to place the gripper into the proper position. Then
depress <VERT DOWN> to place the cassette on the Pod door.
B) Using the Teach Pendant, depress <UNLK PORT> to unlock the port door. Remove the Pod
top.
C) Using a phillips screwdriver, remove nine (9) flat-head screws securing the gripper cover. Set
the cover and screws aside.
D) With a cassette placed in the gripper, depress <CLOSE GRIP> to grip the cassette.
E) Loosen two screws (Figure CAP-9-1) on the over-travel switch mounting bracket and slowly
move the switch until the LED just goes off, then move the switch 0.030 inches (0.076 cm)
farther and tighten two screws.
F) Test switch operation by:
V-Move: depress <OPEN GRIP> key to open gripper and release the cassette. Remove the
cassette. Then depress <CLOSE GRIP> to close gripper without a cassette and observe if the
red LED lights. Repeat adjustment step E above as required.

2000-0900-01 Revision A
H-Move: depress <OPEN GRIP> to open gripper and release cassette. Remove cassette. Then
depress <CLOSE GRIP> to close gripper without a cassette and observe if LED lights. Repeat
adjustment step E above as required.
G) Replace gripper cover and nine (9) screws removed in step C.
3. POSTSERVICE
B) Disconnect the Teach Pendant and then AC power from the LPT.
cables to the LPT.
Cover Screw
(1 of 9)
Overtravel Switch Actuator Overtravel Switch

Screws (2)
Figure CAP-9-1. Gripper, Overtravel Switch, Top View

(Cover Broken Away and Harness Removed for Clarity)

2000-0900-01 Revision A
EQUIPMENT
TASK
PORT DOOR LEVELING AND ADJUSTMENT

1) Allen wrench (or hex driver), 5/64 inch 6) Allen wrench (or hex driver), 0.050 inch
2) Allen wrench (or hex driver), 3/32 inch 7) Screwdriver, phillips No. 2
3) Allen wrench (or hex driver), 9/64 inch 8) Gage, Port-Door clearance, P/N 1000-0126-01
4) Allen wrench (or hex driver), 3/16 inch 9) Teach Pendant
5) Adhesive, thread, Loctite 242 (blue), Asyst part no. 7500-0278-01
With the minienvironment in the Home position, check that the outer edge of the port door is level with
the port plate. Next, grab by hand one of the pod-door guides on the port door and wiggle it to see if the
door moves a small amount. The port plate must not rest on the port door or deflect the door when at
the Home position. The door must move freely in the opening. If either of these requirements are not
met, continue with this procedure.
1. PRESERVICE
A. Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and remove
the LPT. Place the LPT in a location suitable for servicing.
2. SERVICE
A. If the port door is not level with the port plate, move the minienvironment up a small amount.
This is done by using the Teach Pendant. Depress the <JOG> key. Next depress the <PORT
UP> key and hold the key down until the minienvironment raises approximately 13 mm (0.5
inches).
B. Remove the minienvironment plastic window panel by pressing fingers onto the panel and
Set panel aside. Place a cover over the exposed filter face.
NOTE
For proper operation, the port door must be centered within the port
plate opening as well as being level with the perimeter of the port plate.
C. Port Door Leveling.

1) Using a torpedo level, place onto the port door in a front to back and also a left to right
orientation to find which axis is not level.
2) Reaching in through the minienvironment window, using a 9/64 inch hex wrench, loosen
one of the 8-32 cap screws at the end of the bracket arm that affects the level (front-to-
back or left-to-right). See Figure CMP-10-1.
2000-0900-01 Revision A
3) Using a 5/64 inch hex wrench, turn in or out the set screw next to the cap screw loosened in
step above, to affect the level. When level, tighten the cap screw to lock the adjustment.
D. Using the Teach Pendant, depress the <PORT DOWN> key and hold the key down until the
minienvironment fully lowers. Remove power from the LPT
E. Port Door Centering.

1) Reaching in through the minienvironment window, using a 3/16 inch hex wrench, loosen
two (2) 1/4-20 cap screws that secure the bracket arm. See Figure CMP-10-1.
2) Using a 9/64 inch hex wrench, loosen the three (3) 8-32 cap screws (see Figure CMP-10-1).
3) Place the door shims (1000-0126-01), one (1) on each side between the door and the port
plate.
4) Tighten the two (2) 1/4-20 cap screws to lock the left-to-right adjustment.
5) Tighten the three (3) 8-32 cap screws to lock the front-to-back adjustment.
F. Minienvironment Height.
1. Using a phillips screwdriver, remove one (1) screw on the top, center, of the vertical support
cover. Using a 3/32 inch hex driver, remove three (3) hex screws located at the top. Using
the hex driver, loosen one screw at the bottom. Grasp the handle at the top of the cover and
lift and pull straight off. Set cover aside.
2. Using a 5/64 inch hex wrench, loosen the hard stop set screw (see Figure CMP-10-2).
3. By hand turn the minienvironment drive nut to lower the minienvironment down until it rests
on the port door. The hard stop should be bottomed on the garage (sheet metal shield).
4. Tighten the hard stop set screw
5. Apply power to the LPT and using the Teach Pendant, depress the <JOG/STEPS> key and
select 10 mils/0.1 deg. Next depress the <PORT UP> key and raise the minienvironment in
10 mil increments to raise the minienvironment off of the port door. The port door should be
free to move in the port plate opening when at Home.
6. using a 0.050 inch allen wrench or hex driver, adjust the port home flag to trip the sensor at
the minienvironment Home position. See Figure CMP-10-3.
E. Place a Pod with cassette on the port plate. Using the Teach Pendant, depress the <AUTO
CYCLE> key. Next select START AUTO-CYCLE.
Observe that when gripped, the cassette is picked up evenly. If cassette is not picked up evenly,
repeat this procedure and CAP 04, if necessary.
F. On the Teach Pendant, select STOP AUTOCYCLE from the AUTO CYCLE menu.
3. POSTSERVICE
A. Replace the minienvironment plastic window panel.
B. Replace the vertical support cover and secure.
C. Disconnect the AC power and then the Teach Pendant from the LPT.
D. Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
E. Return the LPT to standard operation.

2000-0900-01 Revision A
8-32 Cap
Screw
8-32 Cap
Screw 8-32 Set Screw
¼-20 Cap
Screws
Figure CAP-10-1. Door Bracket, Top View
Set Screw
Stop Block
Figure CAP-10-2. Minienvironment, Side View

2000-0900-01 Revision A
Port Home
Sensor
Port Home
Flag
Figure CAP-10-3. Port Home Flag and Sensor

2000-0900-01 Revision A
EQUIPMENT
TASK
POD HOLD-DOWN LATCH ADJUSTMENT; LPT 2200

3) Pliers, electronic needlenose
4) Teach Pendant
NOTE
This procedure is performed when the actuator cable or other
component must be replaced, or the cable had become detached from
a slide. It is not necessary to remove the LPT from the Process Tool
for this procedure.
1. PRESERVICE
None.
2. SERVICE
A. Using a 3/32 inch hex wrench, remove the two (2) flathead screws securing the port plate top
rear cover. This will expose the Pod hold-down latch/unlatch paws and the slide assemblies
(see Figure CAP-11-1). Place the rear cover to the side. Set the hardware aside.
B. Set the LPT power switch to the to O/off position. Connect the Teach Pendant. Command the
hold-down motor using the command below:
1) Press the <LOCK PORT> key.
C. The hold-down latches are synchronized when they move out and stop when they are
perpendicular (or nearly perpendicular) to the port opening. Two conditions would require an
adjustment:
• A loose actuator cable where the rear latch is not reasonably perpendicular and the sensor
flag needs to be adjusted (located on the front end), or
• A cable that needs replacement.

2000-0900-01 Revision A

If these conditions are not met, proceed with the following adjustments:
1) A loose actuator cable. To adjust the latch synchronization, or to set up the latches when a
cable is replaced or re-attached:
a) Visually verify that the angle of the latch is less that one tooth off of optimum
adjustment. If the angle indicates an excess of one tooth, remove the screw in center of
latch using a 1/8 inch hex wrench. Lift the latch and carefully reseat one tooth over.
Replace the screw and tighten.
b) If necessary, to fine tune the latch angle, use needlenose pliers to bend the angle of the
vertical rise portion of the flag to change the angle of the rise. This will either extend the
flag more or retract it more to actuate the sensor to stop the motor either sooner or
later. Ensure that the horizontal portion of the flag is horizontal to the sensor; bend as
necessary using needlenose pliers.
Flag With
Adjustment
Flag Without
Adjustment
c) At the Teach Pendant, press <UNLK PORT> key.
d) At the Teach Pendant, press <LOCK PORT> then <UNLK PORT> keys.
2) If the cable is replaced or re-attached, set the cable end into a notch in the slide to adjust the
cable length to where the latches are as close to the correct orientation as possible. Ensure
that the cable clamp screw is tight.
3) Perform steps 1a) through 1d) above. The latch should be perpendicular to the port opening
when open and close to parallel to the port opening when closed.
4) Repeat step 1c and 1d to ensure that the latches function properly. Repeat the above steps
as necessary.
3. POSTSERVICE
A. Using the Teach Pendant, use a combination of <HORZ IN> / <HORZ OUT>, <VERT UP> /
B. Disconnect the AC power and then the Teach Pendant from the LPT.
C. Return the LPT back to the Process Tool and secure. Connect communications and then power
cables to the LPT.
D. Return LPT to standard operation.

2000-0900-01 Revision A
Sensors (2) Flag
Port Opening
Cable Clamp Screw
Port Plate
(Rear) Cover
Shown
Removed
Figure CAP-11-1. Pod Hold-Down Latch Adjustment

(Port Plate Front Cover Shown Removed)

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
POD-IN-PLACE SWITCH ADJUSTMENT; LPT 2200

1) Screwdriver, phillips, no. 1
2) Screwdriver, phillips, no. 2
3) Scale or measuring device graduated in thousandths of an inch
4) Empty Pod
1. PRESERVICE
A) Remove the minienvironment plastic window panel by pressing fingers onto the panel and
sheet metal, grasp the bottom of the panel by hand and pull straight out removing the panel. Set
panel aside.
CAUTION
B) With the plastic panel removed, where the pod-in-place switch is located, the technician is
exposed to the laser beam. Ensure that proper laser safety precautions are observed.
2. SERVICE
A) On the bottom of the port door, using a No. 2 phillips screwdriver, remove the four (4) screws
and lock washers securing the port door cover and remove the cover exposing the Pod door
lock/unlock mechanism (see Figure CAP-12-1). Set the cover with gasket attached and
hardware aside.
B) Using a measuring device, depress switch plunger on the port door top down 0.030 to 0.040
inches (see Figure CAP-12-2).
C) With the plunger on the underside of the port door depressed down 0.030 to 0.040 inches, using
a No. 1 phillips screwdriver, slowly and alternately turn the screws that hold the pod-in-place
switch clockwise ensuring that the switch remains parallel to the port plate. Continue to turn the
screws until the POD-IN-PLACE light lights.
D) Test the switch by depressing the plunger several times to see if the light lights when the plunger
is depressed down 0.030 to 0.040 inches. Repeat paragraph 2.C as necessary to adjust.

2000-0900-01 Revision A
E) Replace the port door cover and secure with the four (4) washers and screws.
F) Place an empty 200mm Pod on the LPT and observe the POD-IN-PLACE light. If the light lights,
adjustment was successful. If light does not light, repeat procedure or troubleshoot.
G) Replace the minienvironment plastic window panel.
3. POSTSERVICE
cables to the LPT.
Port Door
Cover Screws
(4-Places)
Pod-In-Place
Switch
Screw (1 of 2)
Figure CAP-12-1. 200mm Port Plate (Bottom) Pod-In-Place Switch

(Shown With Port Door Cover Removed)

2000-0900-01 Revision A
Figure CAP-12-2. 200mm Port Plate Pod-In-Place Switch

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
PORT LOCK / UNLOCK MECHANISM ADJUSTMENT; LPT 2150

1) Wrench, open end or box, 11/32 inch
2) Hex driver, 3/32 inch
3) Screwdriver, Phillips, No. 1
4) Teach Pendant
NOTE
This procedure is performed when the pod latch / unlatch pins are
not all fully seated at the end of their slots. If one or more pins need
adjustment, proceed with this procedure.
1. PRESERVICE
A. With the minienvironment in the Home position, remove power from the LPT. Attach the
Teach Pendant and then replace the power to the LPT.
2. SERVICE
A. Using a 3/32 inch hex driver, remove the two (2) screws each securing the port plate top-
rear and top-front covers. Move the covers aside and set the hardware aside (see Figure
CAP-13-1).
B. Loosen the slider adjustment screw (see Figure CAP-13-1). Reposition the cam assemblies
so that the dowel pins on sliders are at the outside end of their travel (not toward the middle
of the port plate). See Figure CAP-13-2.
C. Tighten the slider adjustment screw and inspect the pod-lock-dowel pins for correct
placement. If not properly aligned after tightening the screw, perform step B again.
D. Using the Teach Pendant, press <LOCK PORT>. Observe the pod-lock-dowel pins move
toward the center of the port plate. All pins should be at the end of the slot. If one or more
pins did not move to the end of the slot, perform step B again.
E. Using the Teach Pendant, press <UNLK PORT>. Observe the pins return to the other end of
the slot. All should be at the end of the slot, if not, perform step B again.
F. If adjustments will not work, troubleshoot or contact Field Service. If all adjustments are
correct, proceed.

2000-0900-01 Revision A
3. POSTSERVICE
A. Disconnect the AC power and then the Teach Pendant from the LPT.
B) Return LPT to standard operation.
Port Plate
Top-Rear
Cover
Slider
Adjustment
Screw
Figure CAP-13-1. Port Lock / Unlock Mechanism
Pod-Lock-
Dowel Pins
Pod-Lock-
Dowel Pins
Figure CAP-13-2. LPT 2150 Port Plate

2000-0900-01 Revision A
EQUIPMENT
TASK
WAFER SEATER MECHANISM ADJUSTMENT

1) Screwdriver, phillips, no. 1 6) Locktite® 222 adhesive
2) Allen wrench (or hex driver), 1/16 inch 7) SMIF-Pod and cassette with a test wafer
5) Teach Pendant
1. PRESERVICE [Perform all procedure steps in the order presented below unless otherwise instructed]
A. With the minienvironment in the Home position, remove power from the LPT.
2. SERVICE
A. Using a 3/32 inch allen wrench, remove the two (2) screws that secure the front port plate cover.
Carefully lift the cover and lay over the side.
B. Using a 3/32 inch allen wrench, loosen the screws holding the motor bracket, push the motor
evenly forward toward the sensor printed-circuit board and tighten. The drive screw of the motor
should point directly towards the tapped hole (see Figure CAP-14-1).
C. Using a phillips screwdriver, loosen the screws holding the sensor PC board (3200-1040-01) and
push the board evenly toward the drive motor and tighten. Insure edge of the board is parallel
with edge of the port plate (see Figure CAP-14-1).
D. Using the Teach Pendant, move the wafer seater mechanism out, then back to Home to insure
that the seater arm is at rest in the Home position.
a) Press <DIAG> key
b) From the diagnostic menu, select CONTROLS . . .
c) From the Controls submenu select DC MOTOR CONTROL . . .
d) From the DC Motor Control submenu select DO WAFER SEATER OUT
e) Press <DIAG1> key
f) From the diagnostic menu, select CONTROLS . . .
g) From the Controls submenu select DC MOTOR CONTROL . . .
h) From the DC Motor Control submenu select DO WAFER SEATER HOME.
Check that the seater arm is Home by grabbing the actuator arm by hand and moving it back
and forth (see Figure CAP-14-3). If the seater arm is seen to move when moving the actuator
arm, the mechanism is not jammed and the adjustment is OK. If the seater arm does not move
easily, the mechanism is jammed and must be adjusted. To readjust, perform the following
procedures.

2000-0900-01 Revision A
E. Using a 5/64 inch allen wrench, loosen the two (2) set screws holding the actuator arm to the
seater arm shaft.
F. Using the Teach Pendant, move the mechanism out, then back in to insure the seater arm is at
rest in the Home position.
a) Press <DIAG> key
b) From the diagnostic menu, select CONTROLS . . .
c) From the Controls submenu select DC MOTOR CONTROL . . .
d) From the DC Motor Control submenu select DO WAFER SEATER OUT
e) Press <DIAG> key
f) From the diagnostic menu, select CONTROLS . . .
g) From the Controls submenu select DC MOTOR CONTROL . . .
h) From the DC Motor Control submenu select DO WAFER SEATER HOME.
G. Press together by hand the base of the wafer seater arm and the actuator arm to insure that
there is a preload on the wave washers (see Figure CAP-14-3). Tighten one of the set screws
on the actuator arm, insuring a 0.030 to 0.050 inch gap between the wafer seater roller and the
edge of the port plate (see Figure CAP-14-2). Tighten the second set screw when the gap is
proper.
1. There must be a gap between the roller and the laser bracket (see Figure CAP-14-2). This is
easily checked visually, or by being able to slightly move the actuator arm and seater arm as
described in paragraph D.
2. There must be approximately 1 to 2 pounds of preload on the wave washer. This loads the
bearings for proper use and keeps the wafer seater arm away from the laser bracket.
3. If the gap is too big between the roller and the laser bracket, the excessive wafer protrusion
sensor will be tripped during self test or the seater will push wafers against the back of the
cassette.
H. Repeat step F, above, to move the seater arm out and then back to Home. Check to see that the
gap between the wafer seater roller and the edge of the port plate is maintained. If not repeat
step G.
I. Check for proper seating of the wafers into the cassette. Wafers must not hit the back of the
cassette when seated. If necessary, adjust second flag on wafer seater mechanism to achieve
proper reseating of the wafer.
NOTE
There should be approximately 0.030 inches of play in the wafer before
it hits the back of the cassette.
J. Remove one set screw from the actuator arm and place a small drop of Loctite on the threads
and reinstall. Repeat for the second set screw. Repeat steps H. and I.

2000-0900-01 Revision A
3. POSTSERVICE
A) Replace the front port plate cover and secure with two (2) screws.
C) Reconnect power cable to the LPT.
PORT PLATE
COVER
SENSOR PC BOARD
(edge parallel to port plate)
WAFER SEATER FLAGS (2)
WAFER SEATER FLAG

ADJUSTMENT SCREW
WAFER SEATER MOTOR
Figure CAP-14-1. Wafer Seater Mechanism, Port Plate Top View

2000-0900-01 Revision A
WAFER
SEATER
ARM
LASER BRACKET
WAFER
EXCESSIVE
PROTRUSION
SENSOR
.03 / .05 GAP

WAFER REQUIRED
SEATER
ROLLER
Figure CAP-14-2. Wafer Seater Mechanism, Bottom View
Push down on actuator arm slightly

to preload wave washer
SHAFT ON ACTUATOR ARM
WAVE WASHER UNDER ACTUATOR ARM
LASER BRACKET
Increasing preload will raise wafer seater arm.

WAFER SEATER ARM
Reducing preload will lower wafer seater arm.
Figure CAP-14-3. Wafer Seater Mechanism, Side View

2000-0900-01 Revision A
EQUIPMENT
TASK
FAN / FILTER AIR VELOCITY ADJUSTMENT

1) Screwdriver, common, small
2) Screwdriver, phillips, No. 2
5) Teach Pendant
1. PRESERVICE
Ensure that the minienvironment (port) is in the Home position.
2. SERVICE
A. Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the cover.
Grasp the cover at the top and lift up and pull straight off. Set cover aside.
B. Power down the LPT and attach the Teach Pendant. Reapply power to the LPT.
C. Using the Teach Pendant, press the <PORT UP> key and hold until the minienvironment fully
raises then release the key.
D. Using the common blade screwdriver, adjust the air velocity control on the bottom of the FFU (see
Figure CAP-15-1) using the adjustment criteria listed below:
1) For LPT Series 1 fan/filter units, using early style filter – adjust air velocity control for
approximately ¾ of full speed.
2) For LPT Series 2 fan/filter units, using later style filter – adjust air velocity control for full
speed.
NOTE
Series 1 LPTs have serial numbers of 4x97-00448 and below
Series 2 LPTs have serial numbers of 4x97-00449 and above
E. If replacing a filter on a Series 1 LPT with a new style filter, adjust the air velocity control for full
speed.
NOTE
Later (new) style filters are made of Teflon paper and show no seams.
Early style filters have glued seams and is made of paper.

2000-0900-01 Revision A
G. Using the Teach Pendant, press the <PORT DOWN> key and hold until the minienvironment is
Home then release the key.
3. POSTSERVICE
A. Place the LPT three-sided plastic safety cover with the metal brackets in place above the screws
on the sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the bottom
at the other side. Tighten the captive at the top of one side to secure the cover to the LPT.
B. Return LPT to standard operation.
Minienvironment
Air Velocity
Adjustment Screw

2000-0900-01 Revision A
CORRECTIVE SERVICE PROCEDURES

EQUIPMENT
Corrective service is non-scheduled service. It consists of procedures for replacing electrical or

mechanical components in the LPT that have failed or no longer meet the adjustment criteria. Following
the replacement procedure, calibration may have to be performed. The following section of this chapter,
Corrective Service Procedures, lists the procedures for replacing LPT components on an as-needed
basis.
LIST OF PROCEDURES
CSP
01A Minienvironment-Drive or Arm Servo-Motor Replacement
01B Minienvironment-Drive or Arm Servo-Motor Assembly Replacement
02 Gripper-Tilt Motor-Drive Replacement
03 Fan Motor Replacement
04 Electronic Circuit Board Replacement
05 Optical Detector System, Laser Diode Replacement
06 Particle Protection Strip Replacement
07A Motor Brake Replacement, Series 1 LPT
07B Motor Brake Replacement, Series 2 LPT
08 Encoder Replacement

2000-0900-01 Revision A

2000-0900-01 Revision A
CORRECTIVE SERVICE PROCEDURE CSP 01A

EQUIPMENT
TASK
MINIENVIRONMENT DRIVE OR ARM SERVO-MOTOR REPLACEMENT
1) Motor Assy, Asyst P/N 9700-4317-01 7) Allen wrench (or hex driver), 5/32 inch
2) Wire cutters, electronic, small 8) Plastic cable ties, small
3) Screwdriver, phillips, #1 tip 9) Teach Pendant
1. PRESERVICE
Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process Tool or
Host computer. Release the latch(es) securing the LPT to the Process Tool. Remove the LPT and
place into a location suitable for servicing.
2. SERVICE
A) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
B) Using a 3/32 inch hex driver, remove three (3) hex screws located at the top-sides of the vertical
support cover. Using the hex driver, loosen one screw at the bottom. Using a phillips
screwdriver, remove one (1) screw on the top. Grasp the handle at the top of the cover and lift
C) Locate the servo motor that is to be replaced and make note of the orientation of the encoder
(this is necessary as the encoder wiring will rub on the metal enclosure if improperly aligned).
D) At the drive motor assembly, detach the connectors at the motor terminals, unplug the encoder
cable connector from the encoder.
E) Series 1 motor removal:

1) Locate the brake tension spring attached to both the mounting bracket and the brake
retainer assembly. Remove the spring very carefully so that it will not fly off and become
misplaced.
2) Unplug the cable connector below the motor.
3) Using a 5/64 inch allen wrench, remove two screws securing the brake bracket to the side of
the drive assembly. Pull down on the brake to separate the brake from the motor shaft. Let
the brake hang on the electrical wires.
4) Using a 7/64 inch allen wrench, remove four (4) screws, from the bottom, that secure the
motor. Set screws aside.
5) Discard the servo motor.

2000-0900-01 Revision A

F) Series 2 motor removal:
1) Unplug the cable connector below the motor.
2) Using a 3/32 inch allen wrench, remove two (2) screws and washers securing the brake to
the brake bracket. Gently pull down on the brake to separate the brake from the motor
shaft. Let the brake hang on the electrical wires.
3) Using a 7/64 inch allen wrench, remove four screws, from the bottom, that secure the
motor. Set the screws aside.
4) Discard the servo motor.
G) Place the new motor inplace (observe the orientation of the encoder electrical connection). Pull
motor to tension drive belt to have 1/8 inch play at center of span then secure motor with four (4)
screws.
H) Align the motor shaft with the brake and push it into place.
Series 2: Secure the brake bracket with two (2) screws.
Series 1: Secure the brake to the brake bracket with two (2) screws and washers. Next,
carefully reattach the spring.
I) Reattach the motor terminal connectors and the encoder connector.
J) Connect the Teach Pendant. Connect an AC power cable to the LPT and set the power switch
on the control panel to ON / I position.
K) On the Teach Pendant, depress the <HOMING> key.

From the Homing menu select HOME PORT AXIS.
From the Homing menu select HOME X AXIS.
L) Wait until the LPT has Homed the minienvironment and then the vertical arm. Place a Pod with
cassette on the port plate.
M) Depress the <AUTO CYCLE> key. From the submenu select START AUTOCYCLE.
N) Auto cycle the LPT to verify that the motor assembly is functioning properly.
From the AUTO CYCLE menu select STOP AUTOCYCLE to halt the auto cycle when
verification is complete.
3. POSTSERVICE
A) Disconnect AC power and then the Teach Pendant from the LPT.
B) Grasp the handle at the top of the side cover and place back onto the LPT. Using a 3/32 inch
hex driver, replace and tighten three (3) hex screws located at the top-side of the vertical
support cover and one (1) screw at the bottom. Replace the phillips screw on the top of the
cover.
C) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
screwdriver, tighten two (2) screws located at one side of the cover and two screws on the
LPT.

2000-0900-01 Revision A
D) Return the LPT back to the Process Tool and secure. Connect communications cable(s) and
then power to the LPT.
E) Return the LPT to standard operation.
Minienvironment
Drive Motor
Vertical Arm
Drive Motor
Assembly
Figure CSP-1A-1. LPT Side View (Without Minienvironment)

2000-0900-01 Revision A
Encoder
Motor Connectors
(2 each)
Motor
Drive Nut
Brake Bracket
Brake
(Series 1 Shown)
Encoder
Motor Terminals
Motor
Brake
(Series 2 Shown)
Figure CSP-1A-2. Servo-Motor Assembly

2000-0900-01 Revision A
CORRECTIVE SERVICE PROCEDURE CSP 01B

EQUIPMENT
TASK
MINIENVIRONMENT DRIVE OR ARM SERVO-MOTOR ASSEMBLY REPLACEMENT
1) Motor Assy, Asyst P/N 9700-4089-01 7) Allen wrench (or hex driver), 7/64 inch
2) Wire cutters, electronic, small 8) Allen wrench (or hex driver), 5/32 inch
3) Screwdriver, phillips, #1 tip 9) Adhesive, Asyst P/N 7500-0016-01
4) Allen wrench (or hex driver), 1/16 inch 10) Plastic cable ties, small
6) Allen wrench (or hex driver), 3/32 inch 12) SMIF-Pod with cassette
1. PRESERVICE
Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process Tool or
Host computer. Release the latch(es) securing the LPT to the Process Tool. Remove the LPT and
place into a location suitable for servicing.
2. SERVICE
A) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
B) Using a 3/32 inch hex driver, remove three (3) hex screws located at the top-sides of the vertical
support cover. Using the hex driver, loosen one screw at the bottom. Using a phillips
screwdriver, remove one (1) screw on the top. Grasp the handle at the top of the cover and lift
C) On the sensor rod, find the flag actuator (see Figure CSP-1B-1) and mark its exact placement.
Using a 1/16 inch hex driver, loosen the lower flag actuator’s set screws and slide the flag to the
bottom of the rod.
D) Using a 3/32 inch allen wrench, remove two (2) screws that secure the vertical arm servo-motor
brake to the brake bracket. Pull the brake off of the motor shaft.
E) At the vertical arm servo-motor drive nut (see Figure CSP-1B-1), turn the nut by hand so as to
lower the arm assembly as far down as it will go.
F) On the top of the drive column (see Figure CSP-1B-1), using a 5/32 inch hex driver, remove the
two (2) setscrews securing the lead screw anti-rotation pin.
G) Using a 3/32 inch allen wrench, remove two (2) screws that secure the minienvironment servo-
motor brake to the brake bracket. Pull the brake off of the motor shaft.
H) At the minienvironment servo-motor drive nut, turn the nut by hand so as to raise the lead screw
up until it comes out free of the drive nut and the motor assembly is free of the lead screw. Lift
the lead screw out of the drive column and set the lead screw aside.

2000-0900-01 Revision A
I) At the drive motor assembly, using small wire cutters, carefully cut any tie wraps that would
prevent the motor wiring harness from becoming free. At the drive motor assembly, detach
motor terminal connectors and separate the brake connector and encoder connector from the
wiring harness.
J) Using a 3/16 inch hex driver, remove two (2) screws securing the minienvironment drive motor
assembly to the minienvironment (see Figure CSP-1B-2).
K) Using a 3/32 inch hex driver, remove four (4) screws securing the lead nut housing to the drive
motor assembly. Place the lead-nut housing on the new motor assembly and secure with four
screws.
L) Using a 3/32 inch allen wrench, remove two (2) screws that secure the brake to the brake
bracket.
M) Place the new motor assembly onto the carriage assembly and secure with two (2) screws.
N) Taking the lead screw, thread the lead screw down to the minienvironment drive nut and turning
the lead screw by hand, screw the motor assembly drive nut onto the lead screw. Continue to
turn the screw until the screw contacts the vertical arm motor. Using the vertical arm motor
drive nut, turn the nut to pull the leadscrew down until the anti-rotation pin settles into the slot on
the upper lead screw mounting casting.
O) Apply a small amount of screw adhesive, Asyst part no. 7500-0016-01, to the two (2) setscrews
that secure the anti-rotation pin to the casting. Insert the screws and tighten.
P) Reattach the brake, motor terminal connectors, brake connector, and encoder connector.
Q) Replace the flag actuator to its proper position (see Figure CSP-1B-1) on the sensor rod and
tighten the setscrew to secure.
R) Connect the Teach Pendant. Connect an AC power cable to the LPT and set the power switch
on the control panel to ON / I position.
S) On the Teach Pendant, depress the <HOMING> key.

From the Homing menu select HOME PORT AXIS.
From the Homing menu select HOME X AXIS.
T) Wait until the LPT has Homed the minienvironment and then the vertical arm. Place a SMIF-
Pod with cassette on the port plate.
U) Depress the <AUTO CYCLE> key. From the submenu select START AUTOCYCLE.
V) Autocycle the LPT to verify that the motor assembly is functioning properly.
From the AUTO CYCLE menu select STOP AUTOCYCLE to halt the auto cycle when
verification is complete.
3. POSTSERVICE
A) Disconnect AC power and then the Teach Pendant from the LPT.

2000-0900-01 Revision A
B) Grasp the handle at the top of the side cover and place back onto the LPT. Using a 3/32 inch
hex driver, tighten three (3) hex screws located at the top of the vertical support cover and one
(1) screw at the bottom. Replace the phillips screw on the top.
C) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on the
sides of the LPT. Lower the cover onto the screws and using hex drivers and a phillips
LPT.
D) Return the LPT back to the Process Tool and secure. Connect communications cable(s) and
then power to the LPT.
E) Return the LPT to standard operation.
Lead Screw
Mounting Casting
Minienvironment
Drive Motor
Assembly
Port Home Flag
Leadscrew Actuator
Sensor Rod
Vertical Arm
Drive Motor Lead Nut
Assembly Housing
Figure CSP-1B-1. LPT Side View (Without Minienvironment)

2000-0900-01 Revision A
Encoder
Motor
Drive Nut
Housing
Brake
Figure CSP-1B-2. Servo-Motor Assembly

(Series 2 Shown, Series 1 Similar)

2000-0900-01 Revision A
CORRECTIVE SERVICE PROCEDURE

CSP 02
EQUIPMENT
TASK
GRIPPER-TILT MOTOR-DRIVE REPLACEMENT
1) Allen wrench (or hex driver),9/64 inch
3) Gripper Tilt Motor, Asyst P/N 9700-4102-01
4) Teach Pendant
1. PRESERVICE
Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process Tool
or Host computer. Release the latch(es) securing the LPT to the Process Tool and remove the
LPT. Place the LPT into a location suitable for servicing.
2. SERVICE
A. At the front of the LPT, locate the gripper-tilt motor-drive assembly (see Figure CSP-2-1).
Using a 3/32 inch hex driver, loosen two (2) hex screws located on the top of the gripper-tilt
cover. Using the hex driver, remove one screw at the end holding the cable clamp. Remove
the screw and clamp and set aside. Move the cable out of the way. Grasp the cover at the top
and pull out and then up. Set cover aside.
B. At the tilt motor, disconnect two (2) motor electrical connectors.
C. Using a 7/64 inch hex wrench, remove three (3) motor attaching screws.
D. Maneuver the motor to remove the drive belt from the pulley. Throw the motor away.
E. Taking the replacement motor assembly, slip the pulley into the drive belt. Pull the motor over
to tension the belt. The belt should have 1/8 inch play at the center of the span. Keeping
tension on the belt, secure the motor with three (3) screws.
F. Connect the two (2) electrical connectors to their respective motor connectors – red to
connector labeled 1 and black to connector labeled 2.
G. Replace the cover over the tilt drive assembly and ensure that the cover slips into the groove in
the reducer housing. Secure with two (2) screws on top and one (1) screw and a cable clamp
on the end.
H. Connect the Teach Pendant and connect AC power to the LPT. Set POWER switch to the O-
position.
I. On the Teach Pendant, depress the <HOMING> key. From the submenu select HOME TILT
AXIS.

2000-0900-01 Revision A
CORRECTIVE SERVICE PROCEDURE CSP 02

J. Wait until after the homing has been completed, on the Teach Pendant, depress the
<AUTOCYCLE> key. From the submenu select START AUTOCYCLE.
K. After the LPT has successfully run a number of cycles, from the AUTOCYCLE menu, select
STOP AUTOCYCLE.
3. POSTSERVICE
A. Disconnect the AC power and then the Teach Pendant from the LPT.
B. Return the LPT back to the Process Tool and secure. Connect communications and then
power cable to the LPT.
C. Return the LPT to standard operation.
Gripper-Tilt
Drive Motor
Figure CSP-2-1. Gripper-Tilt Drive Motor

(Shown with cover removed)

2000-0900-01 Revision A
EQUIPMENT
TASK
FAN MOTOR REPLACEMENT, ULPA FAN / FILTER ASSEMBLY

1) Screwdriver, phillips, #1 tip 6) Cable ties, small
2) Nutdriver or socket wrench, 5/16 inch
3) Fan Assembly, Asyst P/N 9700-3706-01
4) Teach Pendant
5) Wire cutters, electronic, small
1. PRESERVICE
A) Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and remove
the LPT. Place the LPT into a location suitable for servicing.
B) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover . Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
C) Connect the Teach Pendant and then AC power to the LPT. Set the POWER switch to the ON /I
position. On the Teach Pendant, depress the <PORT UP> key.
D) After the minienvironment raises and stops, set the POWER switch to OFF / O position. Remove
the AC cable from the LPT.
2. SERVICE
A) On the bottom of the minienvironment (see Figure CSP-3-1), loosen two (2) captive thumb
screws on the rear half of the bottom cover. When the screws are free, slip the bottom cover
forward then down and off. Set cover aside.
B) While applying upward pressure to the bottom of the fan/filter unit, using a 5/16 inch socket
wrench or nut driver, remove two (2) hex nuts that secure the fan/filter unit to the
minienvironment chassis.
C) Carefully separate the fan unit from the filter. The fan assembly has wires attached and must be
placed out of the way. The filter unit can be removed from the chassis, bagged for protection,
and set aside.
D) Separate the fan wires which are bundled with other wires. Cut cable ties as necessary to free
the fan wires. Trace the wires back to the circuit board where the fan cable connector is plugged
into J12 on the top edge of the board.

2000-0900-01 Revision A

E) Taking the replacement fan, route the wires back through the wire bundle and secure with cable
ties as necessary. Plug the cable connector into J12 on the circuit board.
F) Taking the filter unit, place into the bottom portion of the minienvironment and mate together
with the fan unit. Place the fan/filter unit into position with the threaded rod inserted through the
holding flange. Take care that the fan wiring is properly routed and that the gaskets are
positioned correctly. Taking the two (2) hex nuts, thread onto the threaded rod and secure.
G) Take the minienvironment bottom cover and put into place. Tighten the two (2) captive screws
to secure.
H) Apply power to the LPT. Set the POWER switch (if available) to the ON / I position. Listen for
the sound of the fan. If no problem is encountered, remove power cable from the LPT and
replace the front cover.
I) Return the LPT back to the Process Tool and secure. Connect communications and power
cables to the LPT and set the POWER switch to the ON / I position.
J) Perform fan speed calibration. The fan speed is adjusted to ensure proper air flow for reduced
particle count within the minienvironment. There may or may not be an interaction between the
LPT air flow and the Process Tool air flow and a balance of flow may need to be established.
The fan speed control is accessed from the underside of the minienvironment. A 1/4-inch hole
is located on the right side (facing the LPT), bottom cover of the minienvironment. The
procedure to adjust the fan speed is given below.
1) The LPT must be attached to the Process Tool and the LPT must have power applied.
2) All shields and covers must be in place on the LPT.
3) Follow the Process Tool manufacturer’s directions, if available, for setting the proper air
flow in the LPT or, if no procedure exists, proceed with the next step.
4) If the Process Tool is large, perform CAP 14; Fan / Filter Air Velocity Adjustment, to
adjust the air velocity.
5) After setting the fan speed, use a particle counter to verify that the particle count inside
the minienvironment is low. Perform the airborne particle contamination test as
contained in PSP-02; Inspect, Clean, Lubricate and Cleanliness Assurance.
6) After verifying the count, vary the fan speed to check the relationship between the fan
speed and particle count. When the count is within specifications, measure the air flow
in the minienvironment and note the air speed (flow) for future reference.
NOTE
Use the minimum airflow to achieve the desired conditions.

2000-0900-01 Revision A
3. POSTSERVICE
A) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
LPT.
B) Return the LPT to standard operation.
Fan / Filter
Assembly
Fan Power Connection
Fan / Filter Screws Bottom Plate Thumb Screw (1 of 2)

(1 of 2)
Figure CSP 03-1. Fan / Filter Assembly

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
ELECTRONIC CIRCUIT BOARD REPLACEMENT

2) Screwdriver, phillips, #1
4) Teach Pendant
1. PRESERVICE
A) Set the POWER switch to the OFF / O-position. Connect the Teach Pendant to the LPT. On
the Teach Pendant, depress the <PORT UP> key until the minienvironment is fully raised.
B) Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and
remove the LPT. Place the LPT into a location suitable for servicing.
2. SERVICE
NOTE
After removal of the circuit board, prior to mounting the replacement board,
compare boards. Ensure that all jumpers and DIP switches are configured
on the replacement board the same as on the bad board.
A) Removal and replacement of the Indexer Board Assembly.

1. At the bottom of the minienvironment, loosen four (4) captive screws securing the bottom
cover. Carefully drop the cover with circuit board assembly attached short distance. At the
main circuit board, grasp the power connector, twist the barrel of the connector counter-
clockwise and remove. Grasp P3, P6, P7, and P20 connectors at the circuit board and
pull each to remove. Remove circuit boards.
2. Remove any remaining cables attached to the circuit boards. Loose the two (2) captive
screws securing the circuit board assemblies to the bottom cover. Remove the cover and
set aside.
3. With the circuit board assembly accessible, each board or module can be removed and
replaced as needed.
Indexer board (Board C1)
CPU module (Module C2).

2000-0900-01 Revision A
4. Replacement of the Indexer Board Assembly is the reverse of the disassembly. Pay
particular attention to the replacement of electrical cable connectors back to the circuit
board connectors.
B) Removal and replacement of the Communications Processor Board and Power Supply
Assembly.
1. Remove the LPT front cover panel. Grasp connectors at the circuit boards and carefully
pull each to remove.
2. Using a phillips screwdriver, loosen four (4) LPT frame screws which secure the Process
chassis in place. Lift up slightly on the chassis for the slots in the sheet metal to clear the
screws. Remove the chassis. The following boards or assemblies can be removed and
replaced.
a) System Control Board Assembly (Boards A1, A2, and A3)
b) Power Supply
c) Power Distribution Board (Board A4).
3. Replacement of the System Control Board and Power Supply Assembly is the reverse of
the disassembly. Pay particular attention to the replacement of electrical cable connectors
back to the circuit board connectors.
C) Removal and replacement the Motion Control and Servo Amplifier Boards:
1. Remove the vertical arm servo motor cover:

a) Early models – Using a phillips screwdriver, remove three (3) screws securing the
cover. Lift cover off and set aside with screws.
Using a small common screwdriver, loosen the captive screw securing the servo-
electronics cover. Cover swings down for access to electronics.
b) Using a phillips screwdriver, loosen (4) captive screws securing the circuit board
chassis cover. Remove cover and set aside.
2. Carefully remove electrical connectors from the circuit boards and move the wires out of
the way. The following boards or assemblies can be removed and replaced.
a) Servo Amplifier Board (Board B1)
b) Servo Controller Board (Board B2)
3. Using a phillips screwdriver, remove the screws that secure the Servo Amplifier board.
Remove and replace this board if necessary or remove the standoffs which secure the
Motion Control board to the chassis. Remove and replace this board if necessary.
4. When the removal and replacement is completed, replace electrical cable connectors to
the proper connectors on the circuit boards.
5. Replace the chassis cover and secure the four (4) captive screws. Replace the servo-
motor cover and secure with two (2) screws.

2000-0900-01 Revision A

D) Connect the Teach Pendant to the LPT. Apply power to the LPT. Using the Teach Pendant,
press <HOMING> key then select HOME ALL AXIS.
E) If all axes Home without an error, place a Pod with cassette onto the port plate and on the
Teach Pendant press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the
LPT operation for a few cycles. If no problem is seen, select STOP AUTOCYCLE to stop the
autocycle at the Home position.
F) Replace the LPT front cover.
3. POSTSERVICE
A) Disconnect the Teach Pendant and AC power from the LPT.
B) Return the LPT back to the Process Tool and secure. Connect communications and then
power cables to the LPT.
C) Return the LPT to standard operation.

2000-0900-01 Revision A
LPT User
Side View
Module C2
Minienvironment (Behind
Side View Board C1)
Board C1
Board B1
Board B2
(Underneath)
Board
A2
Board A3
Board
A4
Power Supply
Figure CAP-4-1. LPT Electronic Circuit Boards

2000-0900-01 Revision A
EQUIPMENT
LOAD PORT INTERFACE™ SYSTEM
TASK
LASER DIODE REPLACEMENT

1) Screwdriver, phillips, No. 1 6) Extraction tool, Molex (Model No. WHT-2285-P
2) Allen wrench (or hex driver), 5/64 inch 7) Laser Diode Kit , 1mW (Asyst P/N 9700-4863-01)
3) Wire cutters, electronic 8) Laser Diode Kit , 3mW (Asyst P/N 9700-4863-02)
4) Teach Pendant
5) Crimp Tool, Molex/Waldom (Model No. WHT-1921, WHTR-2262, or W-HTR-1719C)
1. PRESERVICE
NOTE
This procedure must only be performed by a service engineer qualified to
align laser systems and aware of laser safety practices.
A) Set the POWER switch to the OFF / O position. Remove the Process Tool or Host
communications cable from LPT. Connect the Teach Pendant.
B) Set the POWER switch to the ON / I position. On the Teach Pendant depress the <PORT UP>
key to raise the minienvironment.
C) Set the POWER switch to the OFF / O position and remove the power cord.
D) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
plastic cover . Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of the
E) Remove the minienvironment plastic window panel by pressing fingers onto the panel and
pushing inward and upward a small amount. When the bottom of the panel has cleared the sheet
metal, grasp the bottom of the panel by hand and pull straight out removing the panel. Set panel
aside. Place a cover over the exposed ULPA filter.
2. SERVICE
A) Using a phillips screwdriver, remove five (5) screws securing the optical system bracket cover on
the bottom of the port plate (see Figure CSP-5-1). Carefully remove cover to gain access to the
Laser tube.
B) Using a phillips screwdriver, remove two (2) screws securing the short access cover and remove
five (5) screws securing the long access cover on the bottom of the port plate as shown in Figure
CSP-5-1.

2000-0900-01 Revision A

B) At the Laser tube, noting wire color code, measure back from the laser approximately 25 cm (10
inches). At this point cut the Laser wires. Strip and clean Laser wires in preparation for crimping
connector pins.
C) From the Laser Diode Kit, 1mW or 3mW (depending on LPT) locate the two (2) connector pins
(0.062, male). Using the proper crimp tool, crimp the pins onto the wires on the harness side,
not the laser side (see Figure CSP-5-2).
D) Taking the new Laser diode assembly with cable, unplug the two (2) connector halves. Taking
the connector half that has wires (not laser), using the extraction tool (WHT-2285-P) remove the
connectors plugged into the connector. Discard the wire with connectors.
E) Observing wire color code, taking the new connector, plug the wiring harness wires with new
male crimp pins into the connector.
F) Using a 5/64 inch allen wrench, loosen one (1) or two (2) screws securing Laser clamping
bracket (see Figure CSP-5-1). Remove old laser and discard.
G) Slip new Laser tube into mounting fixture. Using a 5/64 inch allen wrench, tighten screw(s) on
laser clamping bracket, but do not tighten fully.
H) Plug the two (2) connector halves together. Lay the wires and connector into the port plate
cavity. Replace the short and long covers and secure with two (2) and five (5) screws
respectively.
CAUTION
I) Plug in the AC power cord to the LPT. Set the POWER switch to the ON / I position.
J) On the Teach Pendant depress the <DIAG> key and select SENSOR ALIGNMENT to turn on
the Laser.
K) With the Laser diode in the fully seated position in its bracket, pull it back slightly.
L) The beam shape emitted from the Laser is oval. Rotate the Laser tube body until the elongated
part of the beam is parallel with the port plate. See Figure CSP-5-3.
M) After the beam has been correctly oriented, seat the Laser fully into the laser clamping fixture
and secure by tightening the two (2) allen screws while maintaining alignment.
N) Perform procedure CAP 12; Optical Detector System Adjustment to verify that the wafer sensor
system is aligned.
O) Take the Caution label (1mW laser) or Danger label (3mW laser) from the kit and cut the label
to separate the CAUTION or DANGER part of the label from the date and serial number part.
Apply the date and serial number part of the label to the laser’s wires inside the port plate where
the long cover fits.
P) On the bottom of the port plate, replace the short access cover and using a phillips screwdriver,
secure with two (2) screws. Replace the long access cover and secure with five (5) screws
Q) Carefully replace laser bracket cover and secure with five (5) screws.

2000-0900-01 Revision A

3. POSTSERVICE
A) Replace the minienvironment window panel.
B) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
bottom at the other side. Tighten the captive screw at the top of one side to secure the cover to
the LPT.
C) Return LPT to standard operating conditions.
Port Plate Viewed

From The Bottom
Long
Access
Cover
Laser Mounting Fixture

With (1 or 2) Screws
Optical Bracket
Assembly
Short
Access
Laser Bracket Cover
Laser Tube Cover
With (5) Screws
Figure CSP-5-1. Optical Detector System

(200mm Port Plate Shown, 150mm Port Plate Similar)

2000-0900-01 Revision A
Long
Access
Cover
Long Access
Cover Shown
Removed
Cut Laser
Wires Here To
Add Connector
Laser Serial
Number Label
Wrapped
Around The
Wires Here
Short Access
New
Cover Shown
Connector
Removed
Laser Wires
Figure CSP-5-2. Port Plate Bottom
Figure CSP-5-3. Light Beam Orientation

2000-0900-01 Revision A
EQUIPMENT
TASK
PARTICLE PROTECTION STRIP REPLACEMENT

4) Screwdriver, phillips, #1
5) Protection strip; Asyst P/N 401-8672-01
1. PRESERVICE
A) Connect the Teach Pendant to the LPT. Set the POWER switch to the O-position. On the
Teach Pendant, depress the <VERT UP> key to move the vertical arm up to gain access to
the lower protection-strip bracket.
B) Remove power from the LPT. Remove all cable connectors attaching the LPT to the Process
Tool or Host computer. Release the latch(es) securing the LPT to the Process Tool and
remove the LPT. Place the LPT into a location suitable for servicing.
C) Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-
sided plastic cover . Using a 7/64 inch hex driver, unscrew the captive screw at the side, top,
of the cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the
cover. Grasp the cover at the top and lift up and pull straight off. Set cover aside.
2. SERVICE
NOTE
Observe the way the protection strip is threaded through the rollers. As the
brackets that secure the strip are removed, observe the way the strip is
threaded through the bracket.
A) Using the allen wrench, remove the upper shield assembly by removing two screws located on
the top of the lower shield bezel cap (see Figure CSP-6-1). Set cap and screws aside.
B) Lift the upper shield assembly straight up and off. Set shield aside.
C) Using the phillips screwdriver, remove the lower protection strip retainer bracket observing the
way the strip is threaded into the bracket.
D) Using the phillips screwdriver, remove the upper protection strip retainer bracket observing the
way the strip is threaded into the bracket.

2000-0900-01 Revision A
E) Remove the protection strip observing the way the strip is threaded through the rollers.
F) Taking the new strip, thread the strip into the upper bracket (see Figure CSP-6-2).
G) Attach the upper bracket with the protection strip attached.
H) Thread the strip down through the rollers centering the strip on the rollers.
I) Taking the bottom of the strip, thread the strip into the lower bracket (see Figure CSP-6-3) so
that when the bracket is placed into the location on the side support assembly, the screw holes
in the bracket will align just above the holes in the side support (see Figure CSP-6-4).
J) Ensure that the bracket (with strip attached) rests above the holes approximately 3 to 5mm.
Pull the bracket down into alignment (holes in the bracket with the holes in the side support)
which will put tension on the strip.
K) Connect the Teach Pendant to the LPT. Apply power to the LPT. Using the Teach Pendant,
select <VERT DOWN>. Observe the way the vertical arm moves down the strip. The rollers
should ride centered on the strip. If the strip does not ride centered on the strip, remove the
lower bracket and perform steps H through K. If the tension on the strip is not proper, perform
steps J and K again.
L) Evaluate the LPT operation for a few cycles by pressing <VERT UP> key on the Teach
Pendant followed by <VERT DOWN >.
M) If no problem is seen, place a Pod with cassette onto the port plate and on the Teach Pendant
press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the LPT operation for a
few cycles. If no problem is seen, select STOP AUTOCYCLE to stop the autocycle at the
Home position.
3. POSTSERVICE
A) Replace the upper shield assembly. Replace the lower shield bezel cap and secure with two
(2) screws.
B) Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
bottom at the other side. Tighten the captive screw at the top of one side to secure the cover
to the LPT.
C) Return the LPT to standard operating conditions.

2000-0900-01 Revision A
Protection
Bracket Strip
Figure CSP-6-1. Upper Protection Strip Retainer Bracket
Upper Shield
Lower Shield
Bezel Cap
Lower Shield
Figure CSP-6-2. LPT Rear View

2000-0900-01 Revision A
Figure CSP-6-3. Lower Protection Strip Retainer Bracket
Protection Strip
Retainer
Bracket
Hole In Bracket
Side Assembly
Hole In Side
Assembly
Figure CSP-6-4. Bracket Placement For Proper Shield Strip Tension

2000-0900-01 Revision A
EQUIPMENT
TASK
MOTOR BRAKE REPLACEMENT [For LPT Serial Numbers less than 4x97-00448]

1) Allen wrench (or hex driver), 3/32 inch 7) Brake Assembly (Asyst P/N 9700-4104-01)
2) Allen wrench (or hex driver), 5/32 inch 8) Wire cutters
3) Allen wrench (or hex driver), 7/64 inch 9) Soldering iron and solder
4) Screwdriver, phillips, #1 10) Shrink tube, 1/8 inch diameter, 1-inch long
5) Teach Pendant 11) Cable ties, small, four (4) each
6) SMIF-Pod with cassette
There are three (3) motor brakes on the LPT: minienvironment motor brake, vertical drive motor brake,
and arm rotate motor brake. In the Service section below, chose the paragraph for the brake that is to
be replaced.
1. PRESERVICE
latch(es) securing the LPT to the Process Tool and remove the LPT. Place the LPT in a
location where it can be serviced. Soldering may be required.
B. Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-sided
2. SERVICE
A. Rotate motor brake remove and replace:
1. Using a phillips screwdriver, remove three (3) screws that secure the gripper-tilt cover. Lift
cover off and set aside with the screws. Using a small common screwdriver, loosen the
captive screw on the servo-electronics cover. The cover is hinged, lower cover to gain
access the circuit boards. See Figure PSP-2-3 in the first section of this chapter.
2. Using small wire cutters, follow the wires from the brake and cut away the cable ties to free
the wires. Disconnect the brake cable connector at the servo controller board below the
motor.
3. Using a 3/32 inch allen wrench, remove two (2) screws that secure the brake to the brake
bracket (see Figure CSP-7A-1). Pull the brake off of the motor shaft. Discard the brake
and set the screws aside.
4. Place the new brake onto the motor shaft. Ensure that the electrical cable is positioned
toward the outside of the LPT. Replace the brake screws, and tighten to secure the brake
to the bracket.
5. Plug the brake cable connector into the wiring harness.

2000-0900-01 Revision A
B. Vertical drive or minienvironment drive motor brake remove and replace:

1. Using a 3/32 inch hex driver, remove three (3) hex screws located near the top of the
vertical support cover. Using the hex driver, loosen one (1) screw at the bottom, front.
Using a phillips screwdriver, remove one (1) screw on the top of the cover. Grasp the
handle at the top of the cover and lift and pull straight off.
2. At the brake to be replaced, using small wire cutters, follow the wires from the brake and
cut away the cable ties to free the wires. Using the wire cutters, cut the brake wires near
the middle of the wires’ length.
4. Place the new brake onto the motor shaft. Ensure that the electrical cable is positioned
toward the outside of the LPT. Replace the brake screws, and tighten to secure the brake
to the bracket.
5. Cut the cable attached to the brake to be only 7.5cm [three (3) inches] long. Discard the
remainder of the wire and the connector attached. Strip back the wire insulation on each of
the four (4) wires. Cut two (2) pieces of shrink tubing and place onto each of the wires
coming from the brake. Solder splice the wires together. Pull the shrink tube over the
splice on each wire and shrink in place. Push the wires into the wiring harness and cable
tie into place.
C. Connect the Teach Pendant to the LPT. Apply power to the LPT.
D. Testing the brake:

1. Rotate motor brake – Using the Teach Pendant, press the DIAG key. From the menu
select CONTROLS, then select SERVO CONTROL, then select SET/RESET BRAKES
followed by ENGAGE X BRAKE. Brake should be heard to engage. Select DISENGAGE
X BRAKE and another click should be heard.
2. Vertical drive – Using the Teach Pendant, press the DIAG key. From the menu select
CONTROLS, then select SERVO CONTROL, then select SET/RESET BRAKES followed
by ENGAGE Y BRAKE. Brake should be heard to engage. Select DISENGAGE Y BRAKE
and another click should be heard.
E. If all axes are at Home, place a SMIF-Pod with cassette onto the port plate and on the Teach
Pendant press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the LPT
operation for a few cycles. Listen at the brake that was changed for a sound of a brake
dragging or a motor laboring. Select STOP AUTOCYCLE to stop the autocycle at the Home
position.
If sounds (problem) are heard, it may be the brake dragging – Engage the brake and loosen
the attaching hardware. Rotate or shift the brake to align the drive tab of the motor, then tighten
the brake mounting screws.
If no problem sounds are heard, proceed.

2000-0900-01 Revision A
3. POSTSERVICE
A. Covers (replace as necessary):
1. Vertical support cover – grasp the handle at the top and place onto the LPT. Using a hex
driver, replace three (3) screws at the top-side, one (1) screw at the bottom-front of the
cover and one (1) phillips screw on top-center.
2. Tilt drive cover – close the electronics cover and tighten the screw. Replace the tilt-drive
cover over the assembly. Secure with three (3) phillips screws. Ensure that the cable is
under the clamp when securing.
B. Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
bottom at the other side. Tighten the captive screw at the top of one side to secure the cover
to the LPT.
C. Return the LPT to standard operating conditions.
Brake
Figure CSP-7A-1. Brake Assembly

(Series 1 Vertical Drive Assembly Shown)

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
MOTOR BRAKE REPLACEMENT [For LPT Serial Numbers greater than 4x97-00449]

1) Allen wrench (or hex driver), 3/32 inch 6) Brake Assembly (Asyst P/N 9700-4104-01)
2) Allen wrench (or hex driver), 5/32 inch or
3) Allen wrench (or hex driver), 7/64 inch Brake Assembly (Asyst P/N 9700-4312-01)
4) Screwdriver, phillips, #1 7) SMIF-Pod with cassette
5) Teach Pendant
There are three (3) motor brakes on the LPT: minienvironment motor brake, vertical drive motor brake,
and arm rotate motor brake.
The minienvironment motor and vertical drive motor brakes use the same brake; Asyst P/N 9700-
4312-01. The rotate motor brake is Asyst P/N 9700-4104-01.
1. PRESERVICE
location where it can be serviced. Soldering may be required.
C. Using a 5/32 inch hex driver, loosen two (2) hex screws located at the bottom of the three-
sided plastic cover. Using a 7/64 inch hex driver, unscrew the captive screw at the side, top, of
the cover. Using a phillips screwdriver, loosen two (2) screws located at the other side of the
cover. Grasp the cover at the top and lift up and pull straight off. Set cover aside.
2. SERVICE
A. Rotate motor brake remove and replace:
1. If necessary remove the gripper-tilt cover. Using a 3/32 inch hex driver, loosen two (2)
captive screws located on the top of the gripper-tilt cover. Using the hex driver, loosen one
screw on the end of the cover securing a latch. Rotate the clamp to free the cover. Move
the cable out of the way. Grasp the cover at the top and pull out and then up. Set cover
aside. See Figure PSP-2-3 in the first section of this chapter.
2. Using small wire cutters, follow the wires from the brake and cut away the cable ties to free
the wires. Disconnect the brake cable connector at the servo controller board below the
motor.
4. Place the new brake (Asyst P/N 9700-4104-01) onto the motor shaft. Ensure that the
electrical cable is positioned toward the outside of the LPT. Replace the brake screws, and
tighten to secure the brake to the bracket.

2000-0900-01 Revision A
5. Plug the brake cable connector into the circuit board. Push the wires into the wiring
harness and cable tie into place.
B. Vertical drive or minienvironment drive motor brake remove and replace:

1. Using a 3/32 inch hex driver, remove three (3) hex screws located near the top of the
vertical support cover. Using the hex driver, loosen one (1) screw at the bottom, front.
Using a phillips screwdriver, remove one (1) screw on the top of the cover. Grasp the
handle at the top of the cover and lift and pull straight off.
2. At the brake to be replaced, using small wire cutters, follow the wires from the brake and
cut away the cable ties to free the wires. Disconnect the small 2-pin connector in the line.
4. Place the new brake (Asyst P/N 9700-4312-01) onto the motor shaft. Ensure that the
electrical cable is positioned toward the outside of the LPT. Replace the brake screws, and
tighten to secure the brake to the bracket.
5. Plug the connector at the end of the brake wires into the 2-pin connector on the brake
wires in the harness. Push the wires into the wiring harness and cable tie into place.
C. Connect the Teach Pendant to the LPT. Apply power to the LPT.
D. Testing the brake:

1. Rotate motor brake – Using the Teach Pendant, press the DIAG key. From the menu
select CONTROLS, then select SERVO CONTROL, then select SET/RESET BRAKES
followed by ENGAGE X BRAKE. Brake should be heard to engage. Select DISENGAGE
X BRAKE and another click should be heard.
2. Vertical drive – Using the Teach Pendant, press the DIAG key. From the menu select
CONTROLS, then select SERVO CONTROL, then select SET/RESET BRAKES followed
by ENGAGE Y BRAKE. Brake should be heard to engage. Select DISENGAGE Y BRAKE
and another click should be heard.
E. If all axes are at Home, place a SMIF-Pod with cassette onto the port plate and on the Teach
Pendant press <AUTO CYCLE> key and select START AUTOCYCLE. Evaluate the LPT
operation for a few cycles. Listen at the brake that was changed for a sound of a brake
dragging or a motor laboring. Select STOP AUTOCYCLE to stop the autocycle at the Home
position.
If sounds (problem) are heard, it may be the brake dragging – Engage the brake and loosen
the attaching hardware. Rotate or shift the brake to align the drive tab of the motor, then tighten
the brake mounting screws.
If no problem sounds are heard, proceed.

2000-0900-01 Revision A
3. POSTSERVICE
A. Grasp the handle at the top of the vertical support cover and place onto the LPT. Using a hex
driver, replace three (3) screws on the top-side and tighten one (1) screw at the bottom-front of
the cover. Using a phillips screwdriver secure one (1) screw on the top of the cap.
B. If removed, replace the cover over the tilt drive assembly and ensure that the cover slips into
the groove in the reducer housing. Secure cover with two (2) screws on the top. Swing the
clamp into the notch on the cover and one tighten the screw on the latch. Ensure that the cable
is under the clamps after securing the cover.
C. Place the LPT three-sided plastic cover with the metal brackets in place above the screws on
LPT.
D. Reconnect the communications cable(s) and then the power cable.
E. Return the LPT to standard operating conditions.
Brake
Figure CSP-7B-1. Brake Assembly

(Series 2 Vertical Drive Shown)

2000-0900-01 Revision A

2000-0900-01 Revision A
EQUIPMENT
TASK
ENCODER REPLACEMENT

1) Allen wrench (or hex driver), 0.035 inch
3) Screwdriver, straight blade, medium
4) Teach Pendant
1. PRESERVICE
location where it can be serviced.
B. If necessary remove the gripper-tilt cover. Using a 3/32 inch hex driver, loosen two (2) hex
screws located on the top of the gripper-tilt cover. Using the hex driver, remove one screw at
the end holding the cable clamp. Remove the screw and clamp and set aside. Move the cable
out of the way. Grasp the cover at the top and pull out and then up. Set cover aside.
If necessary remove the vertical support cover. Using a 3/32 inch hex driver, remove three (3)
hex screws located at the top of the vertical support cover and one (1) screw at the bottom.
Using a phillips screwdriver, remove one (1) screw on the top cover. Grasp the handle at the
top of the cover and lift and pull straight off. Set cover aside.
2. SERVICE
A. At the encoder that is to be replaced, disconnect the encoder cable connector that plugs into
the encoder.
CAUTION
It is important that the encoder be properly unlocked prior to
dismounting. Failure to comply may damage encoder base
plate, encoder wheel, or encoder housing.
B. At encoder, (see Figure CSP-8-1) using straight blade screwdriver, place into slot on top of
encoder (see Figure CSP-8-2) and turn so that the single dot on the center turnable section
matches the single dot on encoder housing.
C. After the turnable section is rotated, a hole on side of encoder becomes visible. Place 0.035
inch allen wrench (angle slightly upward) into hole and feel for screw (see Figure CSP-8-2).
Turn wrench counter-clockwise to loosen setscrew.

2000-0900-01 Revision A
NOTE
It may be necessary to move the motor-drive belt slightly one way or the
other to align the setscrew in the encoder disk.
D. Loosen four (4) plastic tabs holding encoder body to its base. Remove encoder by pulling
straight off. Discard encoder body, but leave the base in place.
Important: Do not loosen or in any way move the encoder base. The base is factory aligned to
the shaft. If the base is moved, the new encoder may be damaged.
E. Take the replacement encoder, ensure that the single dots are matched on the top surface, and
insert the 0.035 inch allen wrench into encoder hub. Place the encoder onto the motor shaft
while matching with the encoder base, and then press into place.
F. Turn the allen wrench clock-wise until the screw is tight. Do not over tighten. Remove allen
wrench.
G. Take the straight blade screwdriver and turn the center turnable section of the encoder to align
the two dots on the center part with the single dot on the encoder housing.
H. Connect the Teach Pendant to the LPT. Apply power to the LPT.
I. Using the Teach Pendant, press < HOMING > key followed by selecting the HOME ALL AXES
to Home the LPT.
3. POSTSERVICE
A. Remove the LPT power cable, then remove the Teach Pendant connection.
B. If removed, replace the cover over the tilt drive assembly and ensure that the cover slips into the
groove in the reducer housing. Secure with two (2) screws on top and one (1) screw and a cable
clamp on the end. Ensure that the cable is under the clamp when securing.
If removed, grasp the handle at the top of the side cover and place it back onto the LPT. Using a
3/32 inch hex driver, tighten three (3) hex screws located at the top of the vertical support cover.
Using the hex driver, tighten one screw at the bottom.
C. Replace the LPT back onto the Tool and secure. Reconnect the communications cable(s) and

2000-0900-01 Revision A
Encoder
Encoder
Connector
Figure CSP-8-1. Vertical Drive Motor Assembly Showing Encoder
Single Dot
Two
Dots
Turnable
Section
Figure CSP-8-2. Encoder Assembly

2000-0900-01 Revision A

2000-0900-01 Revision A
Appendix A
LPT SPARE PARTS LISTS

TABLE A-1. LPT LEVEL 1 SPARES KIT
ASYST PART NUMBER 9700-3993-01
[For LPT Serial Numbers less than 4x97-00448 – Series 1]
Item Description Part Number Qty

1 Grease Pump 1000-0306-01 1
2 Sensor Assy, Limit Vertical Drive 3200-1023-02 4
3 PCB Assy, Pod Lock 3200-1034-01 1
4 PCB Assy, LED 3200-1038-02 1
5 PCB Assy, Dual Mini Reflective Sensor (Wafer Seater) 3200-1040-01 1
6 PCB Assy, Probe 3201-1100-01 1
7 Push Pull Cable 4001-6971-01 1
8 Filter 4002-0229-01 1
9 Protection Strip 4001-8672-01 1
10 Sensor, Pod in Place 6300-0044-01 1
11 Sensor, Wafer/Slot 6900-1016-01 1
12 Sensor, Excessive Port 6900-1128-01 1
13 Grease Black 6.5 oz tube 7500-0441-01 1
14 Timing Belt, Vertical Drive 7500-0786-01 1
15 NSK-2 Grease 2oz.tube 7500-2004-01 1
16 KRYTOX Oil 7500-2029-01 1
17 KRYTOX Grease 1 pound container 7500-2030-01 1
18 THK Grease 7500-2078-01 1
19 Motor, Pod Lock 9600-0463-01 1
20 Gripper Assy, Right 9700-2971-01 1
21 Gripper Assy, Left 9700-2971-02 1
22 Cable Assy, Gripper 9700-3139-03 1
23 Motor, Pod Hold Down 9700-3263-01 1
24 Fan Assy, Mini Environment 9700-3706-01 1
25 PC Board INX 9700-3717-01 1
26 Motor, Servo Vertical Drive 9700-3720-01 1
27 Switch Panel Assy 9700-3732-01 1
28 Motor, Wafer Seater 9700-3738-01 1
29 Speed Reducer Assy 120:1 9700-3953-01 1
30 Gripper Tilt Assy 9700-3954-01 1
31 Servo/Driver Assy 9700-3965-01 1
32 CPU Assy, LPT Right 9700-3970-01 1
33 CPU Assy, LPT Left 9700-3970-02 1
34 Connector Panel Assy I/O Right 9700-4084-01 1
35 Arm Assy, Rotate Right 9700-4085-01 1
36 Arm Assy, Rotate Left 9700-4085-02 1
37 Harness Assy, Mini-Environment to Carriage 9700-4086-01 1
38 Motor Assy, Vertical Drive 9700-4089-01 1
39 Motor Assy, Arm Rotate 9700-4102-01 1
40 Arm Opto Assy, Right 9700-4103-01 1
41 Arm Opto Assy, Left 9700-4103-02 1
42 Brake Assy 9700-4104-01 1
43 Motor, Gripper Tilt Assy 9700-4116-01 1
ASYST TECHNOLOGIES Page A-1

2000-0900-01 Revision A

[For LPT Serial Numbers greater than 4x97-00449 – Series 2]

1. Grease Pump 1000-0306-01 1
2. PCB Assy, Mini Optical 3200-1023-02 4
3. PCB, Assy, Pod lock/unlock 3200-1034-01 1
4. Assy, LED Indicator Panel PCB 3200-1038-02 1
5. PCB Assy, Dual Mini Reflective Sensor (Wafer Seater) 3200-1040-01 1
6. Assy, Smart Probe 3201-1100-01 1
7. Push Pull Cable 4001-6971-01 1
8. Filter 4002-0229-01 1
9. Protection Strip 4001-8672-01 1
10. Sensor, Pod in Place 6300-0044-01 1
11. Sensor, Wafer/Slot 6900-1016-01 1
12. Sensor, Excessive Port 6900-1128-01 1
13. Grease, Black, 6.5 oz tube 7500-0441-01 1
14. Timing Belt, Vertical Drive 7500-0786-01 1
15. NSK-2 Grease, 2 oz tube 7500-2004-01 1
16. Krytox Oil 7500-2029-01 1
17. Krytox Grease, 1 pound 7500-2030-01 1
18. THK Grease 7500-2078-01 1
19. Motor / Gearhead Shaft Mod, 9600-0463-01 1
20. Gripper Assy, Right 9700-2971-01 1
21. Gripper Assy, Left 9700-2971-02 1
22. Cable Assy, Gripper 9700-3139-03 1
23. Motor Assy, Pod Hold Down 9700-3263-01 1
24. Fan Assy, Mini-Environment 9700-3706-01 1
25. PC Board INX 9700-3717-01 1
26. Switch Panel Assy 9700-3732-01 1
27. Motor Assy, Wafer Seater 9700-3738-01 1
28. CPU Assy, LPT Right 9700-3970-01 1
29. CPU Assy, LPT, Left 9700-3970-02 1
30. Connector Panel Assy, I/O Right 9700-4084-01 1
31. Servo/Driver Assy 9700-4274-01 1
32. Arm Opto Assy, Right 9700-4276-01 1
33. Arm Opto Assy, Left 9700-4276-02 1
34. Gripper Tilt Assy 9700-4278-01 1
35. Arm Assy, Rotate Right 9700-4280-01 1
36. Arm Assy, Rotate Left 9700-4280-02 1
37. Speed Reducer Assy 80:1 9700-4281-01 1
38. Harness Assy, Mini Environment to Carriage 9700-4291-01 1
39. Motor Assy, Gripper Tilt 9700-4305-01 1
40. Motor Assy, Vertical Drive 9700-4310-01 1
41. Cable Assy, Brake, Arm Rotate 9700-4312-01 1
42. Motor Assy, Arm Rotate/Vertical Drive 9700-4317-01 1
43. Kit, Pod Latch Bracket and Link 9700-4906-01 1
Page A-2 ASYST TECHNOLOGIES

2000-0900-01 Revision A

[For LPT 2150]

1 Grease Pump 1000-0306-01 1
2 Sensor Assy, Limit Vertical Drive 3200-1023-02 4
3 PCB Assy, Pod Lock 3200-1034-01 1
4 PCB Assy, LED 3200-1038-02 1
5 PCB Assy, Dual Mini Reflective Sensor (Wafer Seater) 3200-1040-01 1
6 PCB Assy, Probe 3201-1100-01 1
7 Push Pull Cable 4001-6971-01 1
8 Filter 4002-0229-01 1
9 Protection Strip 4001-8672-01 1
10 Sensor, Pod in Place 6300-0044-01 1
11 Sensor, Wafer/Slot 6900-1016-01 1
12 Sensor, Excessive Port 6900-1128-01 1
13 Grease Black 6.5 oz tube 7500-0441-01 1
14 Timing Belt, Vertical Drive 7500-0786-01 1
15 NSK-2 Grease 2oz.tube 7500-2004-01 1
16 KRYTOX Oil 7500-2029-01 1
17 KRYTOX Grease 1 pound container 7500-2030-01 1
18 THK Grease 7500-2078-01 1
19 Motor, Pod Lock 9600-0463-01 1
20 Gripper Assy, Right 9700-2971-01 1
21 Gripper Assy, Left 9700-2971-02 1
22 Cable Assy, Gripper 9700-3139-03 1
23 Motor, Pod Hold Down 9700-3263-01 1
24 Fan Assy, Mini Environment 9700-3706-01 1
25 PC Board INX 9700-3717-01 1
26 Motor, Servo Vertical Drive 9700-3720-01 1
27 Switch Panel Assy 9700-3732-01 1
28 Motor, Wafer Seater 9700-3738-01 1
29 Speed Reducer Assy 120:1 9700-3953-01 1
30 Gripper Tilt Assy 9700-3954-01 1
31 Servo/Driver Assy 9700-3965-01 1
32 CPU Assy, LPT Right 9700-3970-01 1
33 CPU Assy, LPT Left 9700-3970-02 1
34 Connector Panel Assy I/O Right 9700-4084-01 1
35 Arm Assy, Rotate Right 9700-4085-01 1
36 Arm Assy, Rotate Left 9700-4085-02 1
37 Harness Assy, Mini-Environment to Carriage 9700-4086-01 1
38 Motor Assy, Vertical Drive 9700-4089-01 1
39 Motor Assy, Arm Rotate 9700-4102-01 1
40 Arm Opto Assy, Right 9700-4103-01 1
41 Arm Opto Assy, Left 9700-4103-02 1
42 Brake Assy 9700-4104-01 1
43 Motor, Gripper Tilt Assy 9700-4116-01 1

2000-0900-01 Revision A
REQUIRED TOOLS
Specific tools are required to perform certain service tasks. These tools may be purchased from Asyst:
Description Part No.
Grease gun 1000–0306–01

Squat switch adjustment tool 1000-0096, Rev B
Port-door clearance gage 1000-0126-01
Minienvironment test window 1000-0427-01

2000-0900-01 Revision A
ELECTRICAL AND MECHANICAL ASSEMBLY DRAWINGS

Assembly drawings and bills of material for the assemblies listed below are supplied in this appendix. Each
drawing is in numerical order followed by the applicable single-level bill of material (BOM).
• Unless otherwise stated, all dimensions are in inches.
• Unless otherwise stated, all fasteners are stainless steel.
• Explanations for the abbreviations on the drawings and bills of material may be found in
ANSI Y1.: American National Standard, Abbreviations For Use On Drawings And In Text;
American Society of Mechanical Engineers.
TABLE A-4. ASSEMBLY DRAWINGS AND BILLS OF MATERIAL

___________________________________________________________________________ ________
Part Number Title

_______________________________________________________________________________________
3200-1061-XX DC-DC CONVERTER PCB ASSY

3200-1062-01 I/O CONNECTOR PCB ASSY
3400-0018-01 ELECTRONICS FUNCTIONAL BLOCK DIAGRAM, INX 2200
3400-0057-01 ELECTRONICS FUNCTIONAL BLOCK DIAGRAM, LPT
9700-2182-01 CAM DRIVE ASSEMBLY, LPT 2150
9700-2183-01 CAM DRIVE ASSEMBLY, LPT 2150
9700-2971-XX GRIPPER ASSEMBLY
9700-3361-01 LASER BRACKET ASSY, LPT 2200 [Series 1 only]
9700-3706-01 MINIENVIRONMENT FAN ASSY
9700-3707-01 PORT DOOR ASSY, LPT 2200
9700-3716-XX PORT PLATE ASSEMBLY, LPT 2200
9700-3717-XX PCB CHASSIS ASSY
9700-3740-XX LPT ASSEMBLY, FORWARD PORT PLATE, LPT 2200 [Series 1 only]
9700-3952-XX ARM SERVO ASSY [Series 1 only]
9700-3954-01 GRIPPER TILT ASSY [Series 1 only]
9700-3965-01 SERVO / DRIVER ASSY [Series 1 only]
9700-3970-XX CPU ASSY
9700-4040-01 BASE ASSY
9700-4084-XX CONNECTOR PANEL ASSY, I/O
9700-4085-XX ROTATE ARM ASSY [Series 1 only]
9700-4274-01 SERVO/DRIVER ASSY
9700-4276-XX ARM ROTATE SENSORS ASSY
9700-4278-01 GRIPPER TILT ASSY
9700-4279-XX ARM SERVO ASSY
9700-4280-XX ROTATE ARM ASSY
9700-4284-XX LPT ASSEMBLY, FORWARD PORT PLATE, LPT 2200
9700-4303-01 LASER BRACKET ASSY, LPT 2200
9700-4304-01 LASER BRACKET ASSY, LPT 2150
9700-4310-01 VERTICAL DRIVE MOTOR ASSY
9700-4317-01 ARM ROTATE MOTOR ASSY
9700-4337-01 DRIVE COLUMN FAN ASSY
9700-4349-01 VERTICAL DRIVE ASSY
9700-4350-XX FRAME ASSY, LPT 2200
2000-0900-01 Revision A
Part Number Title
9700-4351-XX MINIENVIRONMENT ASSY, LPT 2200

9700-4370-XX MINIENVIRONMENT ASSY, REVERSE PORT PLATE, LPT 2150
9700-4371-XX LPT ASSEMBLY, REVERSE PORT PLATE, LPT 2200
9700-4464-XX FRAME ASSY, LPT 2150
9700-4465-XX MINIENVIRONMENT ASSY, LPT 2150
9700-4466-XX LPT ASSEMBLY, LPT 2150
9700-4467-XX PORT PLATE ASSEMBLY, LPT 2150
9700-4991-XX INX 2-BOARD CONTROL ASSEMBLY
________________________________________________________________ _____________________

2000-0900-01 Revision A
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING:
Reproduction Forbidden without the specific written permission of Asyst DESCRIPTION APPROVED
ZONE REV. DATE
Technologies Inc., Fremont, California. this drawing is only conditionally
issued and neither receipt norpossession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any . A ECN N3920; PRODUCTION RELEASE JK 4/14/97
designs or technical information shown theron, oranyright to reproduce
the drawing or any part thereof, except for manufacture by vendors for . B ECN N3951 JK 5/14/97
Asyst Technologies, Inc. and for manufacture under the corporation's
written license. No right to reproduce this drawing is granted for the
subject matter thereof unless by written agreement with or written
15 . C ECN N4030 M. AU 7/29/97
permission from the Company. . D ECN N4145 JK 10/20/97
. E ECN N4559 JK 12/7/98
7
8 4
D D
ASYST TECHNOLOGIES
POWERDISTRIBUTION
3200-1061- REV:
R1 U1
SERVO INDEXER
P4 P5 P3 P2 P1
F3 F2 F1
+
C1
R2
C C
B1 C2
REF POSITION NO. 1
3 3
5 3X
5 6 2
7 2
6 2
.125 ±.06
NOTES: UNLESS OTHERWISE SPECIFIED
B 1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP B
STANDARDS 2000-0311-01.
2 INSTALL FUSES ITEMS 6 AND 7 IN FUSEHOLDER ITEM 5

AFTER WAVE SOLDER.
3 ON CONNECTOR P2, ITEM 3 , REMOVE PIN 3 FOR KEYING.

ON CONNECTOR P3, ITEM 3 , REMOVE PIN 4 FOR KEYING. 12 4X
13 4X
4 MARK CURRENT ASSEMBLY REVISION LEVEL IN AREA INDICATED
WITH PERMANENT INK. VENDOR TO MARK I.D. ON BOARD.
5 INSTALL CONNECTOR P5 WITH THE TRIANGLE POSITION NO. 1

MARKING LOCATED AT PIN NO. 1 ON THIS SIDE. -01 SHOWN
6 TRIM PINS ON ITEM 8 TO WITHIN .06 OF THE SOLDER SIDE SINGLE MODULE
OF BOARD. DO NOT WAVE SOLDER OR WASH THIS COMPONENT.
7 INSTALL POLARIZING KEY ITEM 15 FOR CONNECTOR P5

QTY MATERIAL
AS SHOWN. ITEM
REQD
PART NUMBER DESCRIPTION
SPECIFICATION
PARTS LIST
8 MARK CURRENT ASSEMBLY SUFFIX -01 OR -02 IN AREA INDICATED UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A WITH PERMANENT INK. VENDOR TO MARK I.D. ON BOARD.
DIMENSIONS AREININCHES.
TOLERANCES ARE:
. TECHNOLOGIES, INC.
A
FRACTIONS DECIMALS ANGLES
.XX -
. .XXX - -
APPROVALS DATE
NOTES CONTINUED ON PAGE 2 MATERIAL
DRAWN PCB ASSY, DC-DC
9700-3970-02 LPT .
B.CARLSON 3/13/96
SEE BOM
. CHECKED CONVERTER
9700-3970-01 LPT FINISH J. KYFFIN 4/12/96
. DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT N/A
M. NG 4/12/96
.
MFG. ENGR.
D P1061D1E 3200-1061-XX E
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/12/96 SCALE 2/1 SHEET 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
Reproduction Forbidden without the specific written permission of Asyst
ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceipt norpossession thereof confers or transfers
any right in, or license to use the subject matter of the drawing orany . . SEE SHEET 1 . .
designs or technical information shown theron, or any right to reproduce
thedrawing or any part thereof, except for manufacture by vendors for
subject matter thereof unless by written agreement with orwritten
permission from the Company. 15 4 8
7
D D
10 10
INDEXER
REF POSITION NO.1

C C
W1
REF R1 & R2 9 3
5 5 3X
6
7 2 2
6
2
B B
.125 ±.06
NOTES CONTINUED FROM PAGE 1:
12 4X
13 4X
9 INSTALL JUMPER PLUG , ITEM 20 TO CONNECT W1-1 TO W1-2.
AFTER WAVE SOLDER.
-02 SHOWN
10 APPLY SUFFICIENT AMOUNT OF ADHESIVE, ITEM 23 UNDER
U3, ITEM 16 AND U4 ITEM 17 TO HOLD U3 VERTICAL
MULTIPLE MODULES ITEM
QTY
REQD
MATERIAL
SPECIFICATION
PARTS LIST
UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 11. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE
DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
A
PROCEDURE 2000-0311-01. FRACTIONS DECIMALS
.XX -
ANGLES
. .XXX - -
APPROVALS DATE
12. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01

. .
MATERIAL
.
DRAWN PCB ASSY, DC-DC
B.CARLSON 3/13/96
COSMETIC PART: YES X NO SEE SHEET 1
CONVECTER
. CHECKED
SEE SHEET 1 SEE SHEET 1 FINISH J. KYFFIN 4/12/96
SEE SHEET 1
NEXT ASSY PRODUCT M. NG 4/12/96
.
MFG. ENGR.
D P1061D2E 3200-1061-XX E
8 7 6 5 4 3 2 1
A SINGLE LEVEL BOM REPORT

3200-1061-01 REV E PCB ASSY,DC-DC CONVERTOR,SINGL
ITEM COMPONENT REV QTY UNIT DESCRIPTION
0001 3000-1061-02 A 1 EA FAB,PCB,DC-DC CONVERTER

0001 3000-1061-01 B 1 EA FAB,PCB,DC-DC CONVERTER
0002 3100-1061-01 E 1 EA SCHEMATIC,DC-DC CONVERTOR
0003 6100-2292-04 4 EA HEADER, 4 PIN MTA, .156 CTR
0004 6100-2300-10 1 EA HEADER, 10 PIN, DBL ROW, LATCH
0005 6100-3042-01 3 EA FUSE HOLDER PC MTG 5X20MM
0006 6100-3053-01 2 EA FUSE,6.3A,FAST-ACTING,250V
0006 6100-3043-01 2 EA FUSE,10AMP,TIME-LAG,250V,5X20M
0006 6100-3048-01 2 EA FUSE,6.3 AMP,TIME LAG,250V,5 X
0007 6100-3044-01 1 EA FUSE,2AMP,FAST-ACTING,250V,5X2
0008 6200-2023-01 1 EA CONVERTER,DC-DC,24V TO 5V & +/
0009 6601-0005-01 1 EA CAP,ELECT,RDL,220UF,20%,50V
0010 6620-1044-50 1 EA CAP, CER X7R, RDL, 0.1 uF, 10%
0011 7500-1090-01 1 EA FERRITE BEAD,AXIAL,.138 OD .35
0012 7000-0421-04 4 EA SCREW, PHIL PAN HD, SS 4-40 X1
0013 7200-0013-01 4 EA WASHER, SPLIT LOCK, SS, #4
0014 6501-0022-01 2 EA RES, CARB, 1W, 5%, 470 OHM
0015 6100-2093-01 1 EA KEY, POLARIZING
A
x SYST TECHNOLOGIES 2000-0900-01 Revision A Page A-9
8 7 6 5 4 3 2 1
REVISION
Reproduction Forbidden without the specific written permission of Asyst DESCRIPTION
ZONE REV. APPROVED DATE
designs or technical information shown theron, oranyrighttoreproduce
the drawing oranypartthereof,except for manufacture by vendors for . B ECN N4283 JK 3/4/98
Asyst Technologies, Inc. and for manufacture under the corporation's 20 2X
permission from the Company. 2 6X 3
5
D D
1.50
2
9 11 2X
3 3
6
2
C C
7
.47 2
10 2X
21 2X
3
REF POSITION NO. 1
1. MANUFACTURE PER IPC-610 CLASS 2.
B 2 CONNECTORS J1-J6 ITEMS 4 AND 6 ARE TO BE SOLDERED B

IN PLACE PERPENDICULAR TO THE BOARD AT THE HEIGHT
SHOWN, AND IN LINE TO THE DIMENSION SHOWN.
3 ATTACH CONNECTOR P1 ITEM 5 TO THE BOARD WITH

THE HARDWARE AS SHOWN ITEMS 9 10 11 AND 21 ,
THEN SOLDER P1 IN PLACE.
4 INSTALL CONNECTORS J7 AND J8 ITEMS 7 AND 8 WITH

THE TRIANGLE LOCATED AT POSITION NO. 1 ON THIS SIDE.
5 INSTALL JUMPER ITEM 20 BETWEEN; W1-1 AND W1-2,

AND BETWEEN W1-3 AND W1-4.
6 MARK CURRENT ASSEMBLY REVISION LEVEL IN AREA INDICATED

WITH PERMANENT INK. VENDOR TO MARK I.D. ON BOARD.
22 4X 4 4 8
7 TRIM PINS ON J6 ITEM 6 TO WITHIN .06 OF THE
QTY
SOLDER SIDE OF THE BOARD. 8 ITEM
REQD
MATERIAL
SPECIFICATION
PARTS LIST
A 8 INSTALL POLARIZING KEY ITEM 22 FOR CONNECTORS J7 AND J8 UNLESS OTHERWISE SPECIFIED
CONTRACT NO.
A
AS SHOWN. TOLERANCES ARE:
.XX .01
. .XXX .005 1/2
APPROVALS DATE
9. IDENTIFY PART PER MARKING METHOD 12 9. OF ASYST CORPORATE
PROCEDURE 2000-0311-01.
MATERIAL
.
DRAWN PCB ASSY, CONNECTOR
B.CARLSON 3/14/96
SEE BOM
. CHECKED I/O
9700-4084-01 LPT
10. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 FINISH
.
J. KYFFIN 4/12/96
DES. ENGR.
COSMETIC PART: YES X NO NEXT ASSY PRODUCT N/A M. NG 4/12/96
SIZE CAD FILE NAME DWG NO. REV.
.
MFG. ENGR.
D P1062D1B 3200-1062-01 B
8 7 6 5 4 3 2 1

3200-1062-01 REV B PCB ASSY,CONNECTOR I/O
0001 3000-1062-01 A 1 EA PCB,FAB,CONNECTOR I/O

0002 3100-1062-01 B 1 EA SCHEMATIC,CONNECTOR I/O
0004 6100-2371-09 5 EA CONN, D-SUB, 9-P, PCB-P, STR P
0005 6100-2478-01 1 EA CONN,DSUB,PCB-S,25P,STR POST
0006 6100-2477-01 1 EA CONN,CPC,8P,RCPT,REVERSE SEX,P
0007 6100-2048-40 1 EA CONN, 40P, DBL ROW, .100 CNTR,
0007 6100-2583-01 1 EA HDR,40P,2-ROW,LATCH/EJECTOR
0008 6100-2480-64 1 EA HEADER,64P,.100 CTR,2 ROW,4-WA
0008 6100-2584-01 1 EA HDR,64P,2-ROW,LATCH/EJECTOR
0009 6900-1047-01 1 EA SCREWLOCK,KIT,F,4-40X3/16LOCK
0011 7500-1071-01 2 EA STANDOFF,1/4 RND,FEM,4-40 X 7/
0013 6200-1060-01 3 EA IC, ILQ-2, QUAD OPTO-ISOLATOR
0014 6522-1002-22 2 EA RESISTOR, CARBON, 1/4W, 10K OH
0015 6522-1001-22 1 EA RESISTOR, CARBON, 1/4W, 1K OHM
0016 6590-2700-10 2 EA RES NETWORK, 270 OHM, 10P, BUS
0017 6590-1001-01 2 EA RES NETWORK, 1K OHM, 10P, SIP
0019 6100-2479-02 1 EA HEADER,2POS,DUAL-ROW
0020 6100-2085-01 2 EA JUMPER FOR PC BOARD
ASYST TECHNOLOGIES 2000-0900-01 Revision A Page A-11

8 7 6 5 4 3 2 1
REVISION
Reproduction Forbidden without the specific written permission of Asyst . A ECN N2848; PRODUCTION RELEASE AR 3/17/95
Technologies Inc., Milpitas, California. This drawing is only conditionally
issued and neither receipt nor possession therof confers or transfers
any right in, or license to use the subject matter of the drawing or any CIRCULATION FAN
designs or technical information shown thereon, or any right to reproduce (24VDC)
the drawing or any part therof, except for manufacture by vendors for
P/N 9700-2734-01
SAM HOST EQUIP AUX1 9 PIN AUX2
Asyst Technologies, Inc. and for manufacture under the corporation's D-SUB
written license. No right to reproduce this drawing is granted for the J12
J6 J7 J8 J9
permission from the Company. TRANSISTOR
POWER SWITCH 9 PIN 9 PIN 9 PIN
D OVER RS232
D-SUB D-SUB D-SUB D
CURRENT +24V RS232/RS485
RS232 RS232
J5 SENSE SW
J13
+24VDC OVER/UNDER +5V
INPUT +24VDC VOLTAGE & OVER PORT A PORT B PORT C PORT D
DC-DC
POWER CURRENT CONVERTER QUAD SERIAL I/O UART
REVERSE ON/OFF CONTROL +12V
VOLTAGE -12V
OVER/UNDER POWER FAIL
PROTECTION VOLTAGE POWER FAIL
DIODE EPROM OR SRAM
4 PIN SIGNALING -5V * FLASH * MEMORY
CIRCULAR -5V UART UART PROGRAM (BATTERY
REGULATOR
SPEED PULSES (LASER EMITTER A&B C&D MEMORY BACKUP)
POWER) INTERRUPTS INTERRUPTS
TO/FROM
UART C & D INTERRUPT SERVO INT. TO +24V SW SMART TAG
ELEVATOR
INTERRUPTS INTERRUPT CONTR.
UART C & D NMI AMPLIFIER/ DC
DATA BUS/ADDRESS SELECT SERVO/MOTION DRIVER WITH J2 MECH
INTERRUPTS MOTOR
CONTROLLER OVER CURRENT
SERVO INTERRUPT * SHUT DOWN
CPU
INTERRUPT PROBE
SENSOR INTERRUPTS POSITION ENCODER ENC PCB
* * CAPTURE J19 UP
DIGITAL WATCHDOG
C I/O INTERRUPT
RESET
TIMER
CIRCUITRY OPTICAL (OPTIONAL) C
DN LIMITS
J17
INTERRUPT
+24V SW
CONTROLLER
POD LOCK POD HOLD DOWN LATCH
AMPLIFIER/ DC
I/O INTERRUPT DRIVER WITH DC STEPPER
MOTOR MECH MECH
OVER CURRENT MOTOR
SHUT DOWN POD-IN-PLACE
J3 J53
LOCK LATCHED
* OPTICAL SWITCH OPTICAL
DIGITAL OPTICAL
LIMITS UNLATCHED LIMITS
+24V STS PROBE UNLOCK
I/O
SW CURRENT
WAFER LIMITER
PRESENT J4
SENSOR STEPPER
HORIZ. VIEW ON/OFF MOTOR
J17 DRIVER J6
COMPARATORS
STEP CLOCK J20 J2
WITH
LASER CASSETTE
SLOT PROGRAMMABLE J3
EMITTER SENSOR THRESHOLD
DIRECTION 3200-1037-01
STEP PORT PLATE
B SEQUENCER
INTERCONNECT
WAFER SEATER
B
WAFER STEPPER PCB DC
PROTRUSION ON/OFF MOTOR STEPPER
SENSOR J5 MECH
DRIVER MOTOR
HORIZ. VIEW
J3
OUT
LEDS OPTICAL
VERT. VIEW J1
HOME LIMITS
WAFER MODULATED
IR
PRESENT
EMITTER AMPLIFIER
SENSOR
SEVEN OPTICALLY
ISOLATED
25 PIN D-SUB
OUTPUTS J10 LED PCB
POD-IN
POWER READY PLACE
SEVEN OPTICALLY INTERLOCKS/
3200-1044-01 INDEXER CONTROL INTERFACE (MAIN BD.) ISOLATED PARALLEL COM J1
INPUTS
3200-1045-01 INDEXER CPU (PIGGY BACK BD.)
3200-1038-02
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION
REQD SPECIFICATION
PARTS LIST
NOTES: UNLESS OTHERWISE SPECIFIED UNLESS OTHERWISE SPECIFIED CONTRACT NO.

A DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
-
A
TECHNOLOGIES, INC.
1. BLOCKS IDENTIFIED WITH '*' ARE ON 3200-1045-01, INDEXER CPU BD. FRACTIONS
.
DECIMALS
.XX -
ANGLES
-
.XXX - APPROVALS DATE
MATERIAL ELECTRONICS FUNCTIONAL
DRAWN
NONE
.
A. REYES 9/9/93 BLOCK DIAGRAM
. INX 2200 FINISH
CHECKED
K.C. 9/30/93 INX 2200
NONE DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT . K.C. 2/2/94
.
MFG. ENGR.
D E0018D1A 3400-0018-01 A
FIRST USED ON DO NOT SCALE DRAWING AR 3/27/95 SCALE NONE SHEET 1 OF 1
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
issuedandneither receipt nor possession thereof confers or transfers
any right in, or licenseto use the subject matter of the drawing or any
A ECN N4242: PRODUCTION RELEASE JK 1/19/98
the drawing oranypartthereof,except for manufacture by vendors for
permission from the Company. 6900-1283-01
SERVO CONTROLLER
D TO MOTOR J1 P1 PARALLEL I/O CONNECTOR PANEL D
SERVO AMP PCM-U1048 P2 P/O P8
WINSYSTEMS 9700-4081-01 P/O J8
P1 J1 J2 PARALLEL PORT
SERVO PWR (1-34) P1
34 DB25F
6900-1195-01
6900-1284-01
J2 PORT A (SPARE)
(See page 2 for more details) DB9M
PC/104 BUS
9700-4346-01 9700-4346-01
9700-4084-XX
9 5 P6B
P10 SERIAL I/O PORT B (TEST)
COPLEY P3 PCM-COM4A J1
J10 DB9M
6900-1272-01 WINSYSTEMS J6B
U2 J6 P6 CHAN2
J3 CHAN3 (TAG)
J1 INDEXER CHAN2(11-20)
P3 J6 P6
J1 P1 5 SERVO 10
P1 9700-4108-01 JDC J3 9700-4109-01 PORT C (LAPTOP)
J4
P5 J5 J7 P7 DB9M
10 CHAN1(1-10) 20
C 2 2 C
SPARE
9 10
P22 P22 5 CHAN4 (HOST)
2 9700-3717-01 J6A P6A P/O P7
6900-1290-01 9700-4080-01 P/O J7 J3 PORT D (HOST)
2 INDEX PWR (See page 3 for more details) DB9M
(11-20)
CHAN1 10
P/O P7
11 4 PC/104 BUS 9700-4080-01 P/O J7
TEST (N/C)
AMPRO (1-10)
10
CPU PCB J11 P11 P/O P7
SERIAL1(1-10)
486i-50MHz 9700-4080-01 P/O J7
HOST
DC-DC CONVERTER (21-40)
SERIAL2(11-20) 20
P2 P2
(LAPTOP)
J13 P13 P/O P8
INX PWR 2 SERIAL3(1-10)
9700-4081-01 P/O J8
(TOOL)
(35-54)
20
P4 SERIAL4(11-20)
P10 (TEACH PENDANT)
P4 CPU POWER
9700-4075-01 J7 P7
B J10 B
P3 P3 6900-1282-01 J9 LAN
4 4 ETHERNET RJ45
POWER 8 8
SERVO PWR 2
J16 P16
9700-4267-01 J5 PORT E (TOOL)
UTILITY I/O 6900-1115-01 DB9M
P21
(7-8) 2
J6 TEACH PENDANT
6900-1285-01
P21 CPC8F
2 P5 P5 P/O P8
9700-4081-01 9700-4081-01 P/O J8 J10 AC POWER
FRONT (55-62)
7 (CONN POWER) 7
SWITCH
PANEL P1 P1 9700-4509-01 P20 J20
ASSY 9700-4074-01 POWER SUPPLY 9700-4078-01
24V PWR 2 3
3200-1061-01
3 OUT IN QTY MATERIAL
P24 AC LINE FILTER ITEM
REQD
SPECIFICATION
J24 6200-2009-01 GND

PARTS LIST
A 2 DIMENSIONS AREININCHES.
TOLERANCES ARE:
A
9700-4338-01 .
.XX
.XXX
-
-
- APPROVALS DATE
MATERIAL
DRAWN INTERCONNECT
MAGILL 10/29/96
N/R
CHECKED BLOCK DIAGRAM LPT SERIES II
FAN 9700-4284-XX LPT 2200 FINISH E.CORTEZ 11/15/96
9700-4337-01 N/R
DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT
(ON/OFF CONTROL) 2 MFG. ENGR.
M.NEADS 11/15/96
D E0057D1A 3400-0057-01 A
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE NONE SHEET 1 OF 3
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
ZONE REV. DATE
any right in, or license to use the subject matter of the drawing or any GR CLOSED . - SEE SHT 1 . .
GRIPPER-ASSY
permission from the Company.
D D
C C
FROM
CPU ASSY
P1 J1
9700-4346-01
P6B
5
RS232C SERVO CONTROLLER
6900-1283-01
J90
P90
B B
P3
FROM DC-DC CONVERTER

A DIMENSIONS AREININCHES.
TOLERANCES ARE:
A
.XX -
NOTES: UNLESS OTHERWISE SPECIFIED . .XXX - -
APPROVALS DATE
MATERIAL
DRAWN
INTERCONNECT
1. THIS DIAGRAM REPRESENTS LPT'S -01 CONFIGURATION WITH SEE SHT 1 MAGILL 10/29/96
CHECKED BLOCK DIAGRAM LPT SERIES II
RESPECT TO CABLES AND OTHER ASSEMBLIES IN MOST CASES. SEE SHT 1 SEE SHT 1 FINISH E.CORTEZ 11/15/96
NEXT ASSY PRODUCT SEE SHT 1
MFG. ENGR.
M.NEADS 11/15/96
D E0057D2A 3400-0057-01 A
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALLPERSONS RECEIVING THISCONFIDENTIAL DRAWING:
any right in, or license to use the subject matter of the drawing or any . - SEE SHT 1 . .
the drawing or any part thereof, except for manufacture by vendors for
Asyst Technologies,Inc.andformanufacture under the corporation's
9700-4052-02
J3 ENCODER BRAKE PCB ASSY

1 4 5 6 9700-4291-01 3200-1066-01
PORT DOOR ASSY (9700-3707-01)
D 9700-4317-01
UP
D
J3 7 COPLEY
9700-3724-02 ELEVATOR
POD OPEN SW U2 8 PWM J1 J1 P1
MOTOR
3 10 AMPLIFIER
POD HOME
6900-1272-01
POD CLOSED SW LOCK
INDEXER PWA J1
MOTOR P59
3200-1042-01 P19 (3A6)
PIP(1) SW J19
J3 5 J61/P61 5
P4
J4
2 9700-4312-01 2
PORT PLATE ASSY (9700-3716-01) 5

9700-3272-01
HOME WAFER PORT PLATE ASSY

SEATER
9700-3716-01
STEPPER
OUT
C J20 J17 PRESENCE SENSOR WAFER PRESENT C
(IDC-26) (IDC-24) SENSOR,
HORIZONTAL
LATCH LIMIT SW1 FRONT

INDEXER WAFER
POD
CPU PROTRUSION
LATCH LIMIT SW2 LATCH SENSOR, HORIZ.
PWA
WAFER
3200-1045-01 PROTRUSION
SENSOR, VERT.
LATCH LIMIT SW1 REAR
POD
LATCH
LATCH LIMIT SW2 SLOT SENSOR CASSETTE
SLOT SENSOR
B LASER B
STS
DIODE
PROBE
EMITTER
P17
POWER STATUS
READY PANEL
INDICATORS P22
POD IN PLACE
P10 2 P21/J21
P6 FRONT
TAG J10 9700-4072-01
CPU/COM4A (1-10) J6 SWITCH PANEL
P3 SERIAL
5 9 ASSY
9700-4108-01
FROM CPU/COM 4A
P7 9700-3732-01
CPU/COM4A (11-20) P12
HOST
J7 9700-3706-01
SERIAL J12
5
P2 2
P5
9700-4079-01
FROM DC-DC CONV J5 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A +24VDC
P1 2 DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
A
.XX -
. -
TO COPLEY .XXX - APPROVALS DATE
(3D4) 2 INDEXER SUB-ASSY

MATERIAL
DRAWN INTERCONNECT
(9700-3717-01)
SEE SHT 1
CHECKED
MAGILL 10/29/96
BLOCK DIAGRAM LPT SERIES II
SEE SHT 1 SEE SHT 1 FINISH E.CORTEZ 11/15/96
DES. ENGR. SIZE CAD FILE NAME DWG N O. REV.
MFG. ENGR.
M.NEADS 11/15/96
D E0057D3A 3400-0057-01 A
8 7 6 5 4 3 2 1
4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIAL DRAWING: REVISIONS
Technologies Inc., Fremont, California. this drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
any right in, or license to use the subject matter of the drawing or any
designs or technical information shown theron, or any right to reproduce A PRODUCTION RELEASE BH 10/24/86
Asyst Technologies, Inc. and for manufacture under the corporation's B ECN N252 BH 4/7/87
subject matter therof unless by written agreement with or written C ECN N4408 JK 6/16/98
D D
1
2X 3 2X
2
2
C C
.275 4 2X
B B
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP

STANDARDS 2000-0311-01.
2 USE TOOL ITEM 5 AND ARBOR PRESS TO INSERT ITEM 3 ,

2X, INTO MATING HOLES OF ITEM 2 AND ITEM 1 . ITEM 3
MUST BE INSTALLED FLUSH OR BELOW OUTER SURFACE OF ITEM 2 . ITEM
QTY
MATERIAL
REQD SPECIFICATION
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST PARTS LIST

CORPORATE PROCEDURE 2000-0311-01 DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A . .
FRACTIONS
.
DECIMALS
.XX .02
ANGLES
1/2
TECHNOLOGIES, INC.
A
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS .XXX .010 APPROVALS DATE
CAM IDLER ASSY, 150 MM

MATERIAL .
. . DRAWN
2000-0311-01, COSMETIC PART X YES NO SEE BOM

.
CHECKED
A. REYES 6/10/98
9700-2186-01 PORT PLT 150MM
FINISH . J. KYFFIN 6/12/98 SIZE CAD FILE NAME DWG. NO. REV.
C
NONE
NEXT ASSY PRODUCT .
DES. ENGR.
. . A2182C1C 9700-2182-01 C
MFG. ENGR.
SCALE 1/1 SHEET 1 OF 1
FIRST USED ON DO NOT SCALE DRAWING . .
4 3 2 1

9700-2182-01 REV C ASSEMBLY, CAM IDLER, 150MM
0001 4001-1429-01 E 1 EA CAM IDLER, 150 MM

0002 4001-1507-01 F 2 EA SLIDER, PORT PLATE
0003 7500-0129-01 2 EA PIN, DOWEL, .125 DIA X .562 LG
0005 1000-0070-01 A 0 EA FIXTURE,PIN GAGE CAM IDLER/DR
ASYST
x TECHNOLOGIES 2000-0900-01 Revision A Page A-18
4 3 2 1
designs or technical information shown theron, or any right to reproduce A PRODUCTION RELEASE BH 10/24/86
Asyst Technologies, Inc. and for manufacture under the corporation's B ECN N252 BH 4/7/87
subject matter therof unless by written agreement with or written C ECN N393 BH 4/13/88
D ECN N483 / N570 DAW 12/19/88

D E ECN N4115 JK 9/30/97 D
F ECN N4408 JK 6/16/98
4 2X 5
3 2X
7
C 2 C
.275 6 2X
B B

STANDARDS 2000-0311-01.
2 USE TOOL ITEM 7 AND AN ARBOR PRESS TO INSERT ITEM 5 ,

2X, INTO MATING HOLES OF ITEM 3 AND ITEM 4 . ITEM 5
MUST BE INSTALLED FLUSH OR BELOW OUTER SURFACE OF ITEM 3 . ITEM
QTY
PART NUMBER
MATERIAL
DESCRIPTION
REQD SPECIFICATION
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST UNLESS OTHERWISE SPECIFIED

PARTS LIST
CONTRACT NO.
CORPORATE PROCEDURE 2000-0311-01 DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A . .
FRACTIONS
.
DECIMALS
.XX -
ANGLES
-
TECHNOLOGIES, INC.
A
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS .XXX - APPROVALS DATE
CAM DRIVE ASSY, 150 MM

MATERIAL .
. . DRAWN
2000-0311-01, COSMETIC PART YES X NO 9700-2186-01 PORT PLT 150MM

SEE BOM
.
CHECKED
A. REYES 6/11/98
FINISH . J. KYFFIN 6/12/98 SIZE CAD FILE NAME DWG. NO. REV.
C
NONE
NEXT ASSY PRODUCT .
DES. ENGR.
. . A2183C1F 9700-2183-01 F
MFG. ENGR.
DO NOT SCALE DRAWING SCALE 1/1 SHEET 1 OF 1
FIRST USED ON . .
4 3 2 1

9700-2183-01 REV F ASSEMBLY, CAM DRIVE, 150MM
0001 4001-1423-01 D 1 EA CAM DRIVE, 150 MM

0002 7500-0258-01 1 EA NUT, SQ, SS, #6-32 X .31
0003 4001-1507-01 F 2 EA SLIDER, PORT PLATE
0004 4001-1525-01 B 1 EA BRACKET, CAM DRIVE, 150 MM
0007 7000-0436-06 1 EA SCREW, SOC HD CAP, SS, 6-32 X
0007 1000-0070-01 A 0 EA FIXTURE,PIN GAGE CAM IDLER/DR
0008 7200-0014-06 1 EA WASHER, FLAT, SS, #6
ASYST
8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONS RECEIVINGTHIS CONFIDENTIALDRAWING:
REVISION REVISION
Reproduction Forbidden without the specificwrittenpermissionofAsyst
Technologies Inc., Milpitas,California. Thisdrawing isonlyconditionally
ZONE REV. DESCRIPTION APPROVED DATE ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfers or transfers
any right in,orlicensetousethesubjectmatterofthedrawing or any P ECN N3540 JK 4/23/96 . A ECN N1644; PRODUCTION RELEASE DB 4/15/92
designsortechnicalinformationshownthereon,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor R ECN N3737 JK 8/27/96 B ECN N1763 DB 7/2/92
AsystTechnologies, Inc. and formanufacture under thecorporation's
writtenlicense. Norighttoreproducethisdrawingis granted for the
subject matter thereofunless bywrittenagreementwithorwritten
C ECN N2695 AR 7/11/94
permission from theCompany.
D ECN N2761 AR 10/6/94
E ECN N2803 AR 11/15/94
F ECN N3187 AR 10/12/95
27 G ECN N3315 JK 11/21/95
D 2X 14 H ECN N3398 JK 2/9/96 D
2X 25 20 J ECN N3418 JK 2/9/96
2X
103 25 17 K ECN N3434 JK 2/9/96
23 L ECN N3445 JK 2/13/96
9X 99 2X
12 16 45 M ECN N3445 JK 2/13/96
6 N ECN N3516 JK 4/19/96

4
2
99 2X
REF REF
6 94 83
93
4X 99
11
26 23
82
3X
6 99 3
A/R 85
21 6
26 2X 5
C C
79 99 7 12
79 20
2X
2X 9
21 27 2X
10
43 6
-01 80 102
90 8
7 87
-02 81
NOTES: UNLESS OTHERWISE SPECIFIED 101 2X 11
18 2X
43
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP 13 29 6 100
STANDARDS 2000-0311-01. 25
89
2X 99 6 2X 41
2. REFER TO ASYST MANUFACTURING ASSEMBLY GUIDE 27
42 9
NO. P9700-2971 FOR SEQUENCE OF ASSEMBLY. 7
22
3 USE ITEM 85 , IF NECESSARY, TO ELIMINATE
AXIAL PLAY OF THE WORM GEAR, ITEM 83 .
2 26
4 LUBRICATE AREA INDICATED WITH GREASE, ASYST PART NO. 99 4X 94 2X
B REF 23
B
7500-2030-01.
5 ASSEMBLE TERMINAL FLUSH WITH INSIDE MOUNTING SURFACE AS

SHOWN, TO PREVENT INTERFERANCE WITH THE SHAFT ASSEMBLY.
6 APPLY ADHESIVE, ASYST NO. 7500-0716-01, AS REQUIRED. 83

TABULATION
7 ITEMS 80 AND 81 DIFFER FOR -01 AND -02. DASH DESCRIPTION
10 2X -01 RIGHT HAND (SHOWN)

8. WIRE LIST 1 4 7
-02 LEFT HAND (OPPOSITE)
FROM COLOR TO
J58-6 BLU MOTOR (+)
J58-7 VIO MOTOR (-)

12 APPLY COMPLETED TEST LABEL AT LOCATION SHOWN AFTER
TESTING MOTOR FOR ROTATION WITH BENCH TEST FIXTURE, ITEM
QTY
REQD
MATERIAL
SPECIFICATION
P/N 1000-0265-01. PARTS LIST
9 PRIOR TO INSTALLATION OF ITEM 89 , ENSURE THAT THE JUMPER UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A JP1 IS LOCATED ON THE TWO LEFT PINS (3 PINS PROVIDED). 13. IDENTIFY PART PER MARKING METHOD 12 OF ASYST
DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
-
A
FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
REF DRAWING 3200-1022-01. CORPORATE PROCEDURE 2000-0312-01. ENCLOSE . .XX - -
IN BUBBLE WRAP/BAG AND APPLY EXTERNAL LABEL. .XXX - APPROVALS DATE
MATERIAL
10 APPLY VENDORS SERIALIZED LABEL AT APPROX. LOCATION SHOWN. 9700-3080-XX ARM 2200X SEE BOM
DRAWN
HOANG N. 2/11/91 GRIPPER ASSEMBLY
14. PACKAGE PER ASYST WORKMANSHIP STANDARDS CHECKED
ED CORTEZ 11/14/91
11 TYPE PART NO., REV LEVEL AND VENDOR I.D. ON ITEM 102 AND 2000-0311-01 SEC. 15.0 9700-2768-XX ARM 2200 FINISH
NONE
APPLY AT APPROX. LOCATION SHOWN. COSMETIC PART: YES X NO NEXT ASSY PRODUCT
DES. ENGR.
. .
MFG. ENGR.
D A2971D1R 9700-2971-XX R
FIRST USED ON DO NOT SCALE DRAWING . . SCALE 1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1

9700-2971-01 REV R GRIPPER ASSEMBLY, RIGHT
0001 4001-6137-01 F 1 EA HOUSING, GRIPPER

0002 4001-6530-01 B 1 EA COVER, TOP GRIPPER
0006 4001-6235-01 B 1 EA COVER, SIDE, GRIPPER
0007 4001-6211-01 A 2 EA PIN, SPRING, GRIPPER
0008 4001-6135-01 A 1 EA GUIDE, CENTER, GRIPPER
0009 4001-6198-01 A 2 EA SPACER, STD GRIPPER
0010 9700-2969-01 D 2 EA CABLE ASSY, GROUND WIRE, GRIPP
0011 7500-0361-50 1 EA BEARING, BALL, FLANGE, .1875 I
0012 7500-0076-02 1 EA BEARING, BALL, .500 OD X .187
0013 7500-0298-03 2 EA SPRING, COMPRESS, .30 OD X 1.2
0014 7500-0477-48 2 EA SPRING, EXT, .24OD 1.12LG 1.72
0016 7000-0431-06 2 EA SCREW, PHIL PAN HD, SS, 6-32 X
0017 7200-0015-06 2 EA WASHER, LOCK, INTERNAL, SS, #6
0018 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0021 7000-0424-06 4 EA SCREW,PHIL FLAT HD,4-40 X 3/8,
0027 7200-0014-04 5 EA WASHER, FLAT, SS, #4
0042 7200-0014-02 2 EA WASHER, FLAT, SS, #2
0043 7500-0254-03 3 EA CLAMP, CABLE, NYLON, 1/8" MAX
0045 7500-0108-01 1 EA CABLE TIE,.74MAX D,.3875L,.10W
0079 7100-0114-40 4 EA NUT, KEP, SS, #4
0080 9700-2970-01 F 1 EA SHAFT ASSEMBLY, GRIPPER, RIGHT
0082 9700-2967-01 F 1 EA MOTOR DRIVE ASSEMBLY, GRIPPER
0083 9700-2968-01 G 1 EA WORM GEAR DRIVE ASSEMBLY, GRI
0085 7500-0391-01 6 EA SPACER, SHAFT, .187 ID X .002
0086 7500-2021-01 0.15 FT TUBING, SHRINK, 1/16 DIA., BLA
0087 7100-0116-32 2 EA NUT, KEP, SS, #6-32
0089 3200-1022-01 C 1 EA PCB ASSY, GRIPPER LOGIC BOARD
0090 9700-3073-01 E 1 EA HARNESS, LOGIC BOARD, GRIPPER
0093 4001-7536-01 A 1 EA FLAG, GRIPPER FINGER, OVERTRAV
0094 4001-6521-01 A 1 EA PLATE, DRIVE, GRIPPER
0095 4001-6520-01 D 1 EA FLAG, OPEN LIMIT GRIPPER
0096 4001-6519-01 A 1 EA FLAG, CLOSED LIMIT GRIPPER
0097 7000-1424-04 1 EA SCREW, PHIL FLAT HD, 4-40 X 1/
ASYST

9700-2971-01 REV R GRIPPER ASSEMBLY, RIGHT
0098 7200-0036-01 1 EA WASHER, FLAT, #4, .209 OD

0100 7000-0611-02 0 EA SCREW, SOC HD SET, SS, 4-40 X
0100 7000-1434-12 2 EA SCREW, PHIL HD, 6-32 X
0102 7500-0743-02 1 EA LABEL, COMPONENT MARKER W/AD
0103 7500-1030-01 1 EA LABEL,TESTED,GREEN/WHITE
1000 7000-1434-12 2 EA SCREW, PHIL HD, 6-32 X
ASYST TECHNOLOGIES 2000-0900-01 Revision A Page A-23 x


9700-2971-02 REV R GRIPPER ASSEMBLY, LEFT
0001 4001-6137-01 F 1 EA HOUSING, GRIPPER

0002 4001-6530-01 B 1 EA COVER, TOP GRIPPER
0006 4001-6235-01 B 1 EA COVER, SIDE, GRIPPER
0007 4001-6211-01 A 2 EA PIN, SPRING, GRIPPER
0008 4001-6135-01 A 1 EA GUIDE, CENTER, GRIPPER
0009 4001-6198-01 A 2 EA SPACER, STD GRIPPER
0010 9700-2969-01 D 2 EA CABLE ASSY, GROUND WIRE, GRIPP
0012 7500-0076-02 1 EA BEARING, BALL, .500 OD X .187
0013 7500-0298-03 2 EA SPRING, COMPRESS, .30 OD X 1.2
0014 7500-0477-48 2 EA SPRING, EXT, .24OD 1.12LG 1.72
0018 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0027 7200-0014-04 5 EA WASHER, FLAT, SS, #4
0042 7200-0014-02 2 EA WASHER, FLAT, SS, #2
0079 7100-0114-40 4 EA NUT, KEP, SS, #4
0081 9700-2970-02 F 1 EA SHAFT ASSEMBLY, GRIPPER, LEFT
0082 9700-2967-01 F 1 EA MOTOR DRIVE ASSEMBLY, GRIPPER
0083 9700-2968-01 G 1 EA WORM GEAR DRIVE ASSEMBLY, GRI
0087 7100-0116-32 2 EA NUT, KEP, SS, #6-32
0089 3200-1022-01 C 1 EA PCB ASSY, GRIPPER LOGIC BOARD
0090 9700-3073-01 E 1 EA HARNESS, LOGIC BOARD, GRIPPER
0093 4001-7536-01 A 1 EA FLAG, GRIPPER FINGER, OVERTRAV
0094 4001-6521-01 A 1 EA PLATE, DRIVE, GRIPPER
0095 4001-6520-01 D 1 EA FLAG, OPEN LIMIT GRIPPER
0096 4001-6519-01 A 1 EA FLAG, CLOSED LIMIT GRIPPER
ASYST

9700-2971-02 REV R GRIPPER ASSEMBLY, LEFT
0098 7200-0036-01 1 EA WASHER, FLAT, #4, .209 OD

0100 7000-1434-12 2 EA SCREW, PHIL HD, 6-32 X
ASYST
4 3 2 1
REVISIONS
Technologies Inc., Milpitas, California. This drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceipt nor possession therof confers or transfers
designs or technical information shown thereon, or anyright to reproduce A ECN N2817; PRODUCTION RELEASE AR 1-10-95
Asyst Technologies, Inc. andformanufacture underthecorporation's B ECN N2880 AR 3-31-95
written license. No right to reproducethis drawing is grantedforthe
permission from the Company. OBS ECN N3755 JK 10/22/96
D D
(MIRROR) .05
3
CLEAR
AREA
2
.03
10
2X 13
12
SEE DETAIL 'A' 1
2
4
C C
2X 14
DETAIL 'B'
SCALE: 4/1
TYP 8 2X
3
4 7
2X 14 6 5 FIRST SURFACE (COATED)
3 2X 14 2X 14 2 REF
11 3
B .050 (APPROX.) B
.060
14 REF
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP STANDARDS.

REFER TO ASYST MANUFACTURING INTERNAL ASSEMBLY GUIDE
DETAIL 'A'
SCALE: 2/1
P9700-3361 FOR SEQUENCE OF ASSEMBLY.
4X
2 APPLY A SPOT OF ADHESIVE P/N 7500-0946-01 TO BOTH SIDE EDGES
AND THE BACK EDGE OF MIRRORS AS SHOWN. (SEE DETAIL 'A'.)
3 AREA TO BE FREE OF SCRATCHES AND ADHESIVE.

QTY MATERIAL
REQD SPECIFICATION
4. IDENTIFY PART PER MARKING METHOD 12 OF ASYST PARTS LIST
CORPORATE PROCEDURE 2000-0312-01. UNLESS OTHERWISE SPECIFIED

CONTRACT NO.
TOLERANCES ARE:
.
A 5. PACKAGE PER ASYST WORKMANSHIP STANDARDS - -
-
.XX
.XXX
-
-
-
APPROVALS DATE
TECHNOLOGIES, INC.
A
2000-0311-01, SEC. 15.0. LASER BRACKET ASSEMBLY
MATERIAL
DRAWN
- - SEE BOM A. REYES 1/3/94
COSMETIC PART: YES X NO 9700-3260-01 INX 2200 FINISH

CHECKED
EDC 7-29-94
SIZE CAD FILE NAME DWG. NO. REV.
C
NONE
NEXT ASSY PRODUCT -
DES. ENGR.
FTR 7-29-94 A3361C1O 9700-3361-01 OBS
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING
DB 1-19-95 SCALE 1/1 SHEET 1 OF 1
4 3 2 1

9700-3361-01 REV OB LASER BRACKET ASSEMBLY
0001 4001-6948-01 INC 1 EA BRACKET, LASER

0002 4001-6993-01 INC 1 EA BRACKET, MIRROR, LASER
0003 4001-7244-01 INC 3 EA SUPPORT, MIRROR, 45 DEG
0004 4001-7273-01 B 2 EA MIRROR, OPTICAL, FIRST SURFACE
0005 4001-7272-01 INC 1 EA BEAMSPLITTER, OPTICAL, 30R/70T
0006 4001-7271-01 C 1 EA BEAMSPLITTER, OPTICAL, 50R/50T
0008 7000-2108-08 8 EA SCREW, PHIL FLAT HD, 2-56 X .2
0010 7200-0014-02 2 EA WASHER, FLAT, SS, #2
0011 4001-7244-02 INC 1 EA SUPPORT, MIRROR, 37 DEG.
0012 7000-0411-05 2 EA SCREW, PHIL PAN HD, 2-56 X 5/1
0014 7500-0835-01 8 EA SPRING, COMP, .180 OD, .31 LG
ASYST
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without thespecificwrittenpermissionof Asyst
Technologies Inc., Milpitas, California. This drawing isonly conditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherofconfersortransfers
anyright in, orlicense to usethesubjectmatterofthedrawingorany
31 . A ECN N3939 ; PRODUCTION RELEASE M. AU 4/16/97
designsor technicalinformation shown thereon, oranyrighttoreproduce
the drawing oranyparttherof,exceptformanufacturebyvendors for
Asyst Technologies, Inc.andfor manufacture under the corporation's
. B ECN N4137 JK 11/5/97
written license. No rightto reproduce this drawing isgrantedfor the
subject matterthereof unlessbywrittenagreementwithorwritten 28 30 1.75 ±.25 36.00 ±1.00 . C ECN N4416 JK 7/1/98
D ECN N4486 JK 8/26/98
SEE DETAIL 'A'

D D
6 MANUFACTURING PROCESS INSTRUCTIONS

SEE DETAIL 'B'
OPERATIONS NO: 001
SET = SET-UP REQUIRED FOR TASK
9700-3706-01
REV _ 22 TQC = QUALITY CHECK POINT MOVE = MOVEMENT OF PRODUCT
2 VAL = VALUE ADDED OPERATION VER = VERIFICATION OF TASK
3 23
25 REF
1 R1 24
STEP SYM INSTRUCTIONS
1 CHECK FOR SCRATCHES AND DAMAGES
26 POSITION 1 2 CLEAN 21 WITH COMPRESSED AIR TO REMOVE PARTICLES
3 MOUNT 1 ON 21 USING 16 AND 17 (4X)
11 HARDWARE SUPPLIED 4 MOUNT 5 ONTO 2 USING 15 (4X)
5 INSTALL 8 (4X) ONTO 2 USING 32

C 6 INSTALL 10 (4X) ON 8 USING 32, TORQUE TO 2.0 IN-LBS.
C
7 PLACE 1 AND 21 ONTO 10
8 SECURE 1 ONTO 10 USING 15 (4X) AND 32
16 9 MOUNT 11 TO 2 AS SHOWN
4X 10 4X
29
4X 15 17 10 SLIDE 27 ONTO RED WIRE OF FAN. J-HOOK AND SOLDER 25 TO
1 REF 32
REF 32 X RED WIRE OF FAN. COVER WITH 27 AND HEAT SHRINK.
X (SEE DETAIL A)
9700-3706-01
REV _ 11 TWIST 25 AND 26 TOGETHER, TWO 360 TWISTS PER INCH
21 12 TYPE "P12" ON 6 AND APPLY AS SHOWN
2.00 ±.50
13 WIRE ASSY PER WIRING TABLE AND DETAIL 'B'
5
14 TYPE ASSY P/N AND REV ON 29 AND APPLY AS SHOWN
3.25 ±.50
15 4X FARSIDE
B 4X 8 15 INSPECT FINAL ASSY PER DWG FOR CORRECTNESS B
WIRE TABLE
2 FROM COLOR TO SIG NAME-REF

RED WIRE(FAN)
4X 33 REF 11 RED WIRE MOTOR RED P12-1 +24VDC
30 MOTOR - P12-2 KEY
27 .30
15 25 MOTOR BLU R1-1 -
31 R1-3 BLU P12-3 GND (+24V)
NOTES: UNLESS OTHERWISE SPECIFIED DETAIL 'A' R1-1 BUS R1-2 -
LENGTH IS 8.5" TWIST HERE
1. MANUFACTURE PER ASYST TECHNOLOGIES 2 3
WORKMANSHIP STANDARDS 2000-0311-01.
QTY MATERIAL
REQD SPECIFICATION
2 APPLY BUBBLE WRAP OVER SCREW AND NUT TO PREVENT DAMAGE 1 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
PARTS LIST
A DURING HANDLING. REMOVE BUBBLE WRAP AT NEXT ASSEMBLY. R1 DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
A
.XX .
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST . .XXX . . APPROVALS DATE
CORPORATE PROCEDURE 2000-0311-01. MATERIAL
DRAWN
FAN ASSY,
C.MOLERIN 12/4/95
DETAIL 'B'
SEE BOM
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS CHECKED MINI-ENVIRONMENT
9700-4002-XX LPI FINISH J. KYFFIN 4/3/96
2000-0311-01. SCALE: NONE SIZE DWG NO. REV.
DES. ENGR.
COSMETIC PART: YES X NO NEXT ASSY PRODUCT NONE
MFG. ENGR.
M. NEADS 4/3/96
D A3706D1D 9700-3706-01 D
8 7 6 5 4 3 2 1

9700-3706-01 REV D FAN ASSY,MINI-ENVIRONMENT
0001 4001-9408-01 A 1 EA BRACKET,MOTOR

0001 4001-7833-01 OB 1 EA BRACKET, MOTOR
0002 4001-7834-01 A 1 EA SUPPORT, FAN
0005 7500-0669-01 1 EA RING, INLET, FAN
0008 7500-2127-01 4 EA STANDOFF,1/2 HEX,FM 8-32 3.5
0008 7500-1017-01 4 EA STANDOFF,1/2 HEX,FM,8-32 X
0010 7500-1021-01 4 EA MOUNT,SHOCK,8-32 THD,.5P LG
0010 7500-2125-01 4 EA MOUNT,SHOCK,8-32 THD .50 LG M/
0011 6900-1277-01 1 EA POTENTIOMETER,RHEOSTAT,35 OH
0016 7000-2076-06 4 EA SCREW, SOC HD CAP, SS, M4 X 6
0016 7000-2142-10 4 EA SCREW,SKT HD CAP,M4 X 10MM LG,
0019 7200-0014-08 4 EA WASHER, FLAT, SS, #8
0021 6400-0024-01 001 1 EA MOTOR IMPELLER DC, 24V
0022 6100-2391-04 001 1 EA CONN, MTA-100 CBL-S, 4P, 22 AW
0023 6100-2146-04 001 1 EA STRAIN RELIEF, 4 PIN
0024 6100-2028-00 001 1 EA KEY, .100 CNTR CONN
0025 6100-0122-24 3.2 FT WIRE, 24 AWG, UL 1007, STRD, R
0026 6100-0166-24 3.5 FT WIRE, 24 AWG, UL 1007, STRD, B
0027 7500-0163-01 0.2 FT TUBING, SHRINK, 1/8" DIA, BLAC
0028 6100-0910-24 0.05 FT WIRE, BUS, 24 AWG
0029 7500-0155-01 1 EA LABEL, CABLE MARK W/ADH, 1.0 X
0030 7500-0109-01 1 EA CABLE TIE, ADHESIVE BACKED MOU
0031 7500-0912-01 1 EA CLAMP, CABLE, 1/8 MAX DIA, .34
0032 7200-0014-08 1 EA WASHER, FLAT, SS, #8
0032 7500-0716-01 0 EA ADHESIVE, LOCTITE 222, PURPLE
0033 7200-0055-10 4 EA WASHER, FENDER, #10
ASYST
8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONSRECEIVING THIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden withoutthe specific written permissionofAsyst
Technologies Inc., Milpitas, California. Thisdrawingisonlyconditionally
issuedandneitherreceiptnor possession therof confersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany . A ECN N3910 ; PRODUCTION RELEASE JK 3/20/97
designs or technicalinformation shownthereon, or anyright to reproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor B ECN N4005 JK 7/8/97
Asyst Technologies, Inc. andformanufactureunderthecorporation's
writtenlicense. Noright to reproduce thisdrawingisgrantedforthe
subjectmatterthereofunlessby written agreementwithorwritten C ECN N4079 JK 10/29/97
permissionfromtheCompany.
D ECN N4190 JK 11/5/97
E ECN N4265 JK 3/4/98
F ECN N4414 JK 7/23/98
D 49 2X
D
REF 100
.54 .02
8 REF
55 2X
64 2X
TAB DOWN
50
(PORT DOOR) 59 2X 56 2X REF

46
60
DETAIL 'G' SEE DETAIL 'A'
9 REF
- SEE DETAIL 'E'

C +
C
2X 65 26
66 2X
(SENSOR)
1
SEE DETAIL 'G'
R1 R3
R2
SEE DETAIL 'F' S1 1 2 3 4 5 6 S2
(PORT DOOR) 52 2X
SEE DETAIL 'A'

DETAIL 'F'
B 16 REF B
68 57
2X
51
SEE DETAIL 'D'

STANDARDS 2000-0311-01.
2. APPLY ADHESIVE, ASYST P/N 7500-0716-01 TO ALL SCREWS ITEM

QTY
REQD
MATERIAL
SPECIFICATION
WITHOUT LOCK WASHERS. PARTS LIST
A 3. IDENTIFY PART PER MARKING METHOD 12 OF
TOLERANCES ARE:
.
A
ASYST CORPORATE PROCEDURE 2000-0311-01. .XX .
.
. .XXX . APPROVALS DATE
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS

MATERIAL
.
DRAWN PORT DOOR
STEVE 12/20/95
2000-0311-01. SEE BOM
. CHECKED
ASSEMBLY
COSMETIC PART: YES X NO 9700-3710-XX LPI FINISH J. KYFFIN 4/3/96
NEXT ASSY PRODUCT NONE
.
MFG. ENGR.
M. NEADS 4/3/96
D A3707D1F 9700-3707-01 F
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without the specificwritten permission o f A s y s t
Technologies Inc.,Milpitas, California. This drawing isonly conditionally
issuedandneither receipt norpossession therof confersortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshownthereon, oranyrighttoreproduce . . SEE SHEET 1 . .
thedrawingor any parttherof, except for manufacture byvendorsfor
Asyst Technologies, Inc. andformanufacture under the corporation's
written license. No right to reproducethis drawing isgrantedforthe
subjectmatter thereof unlessbywrittenagreement withorwritten
D D
REF 9
68
12 RADIUS
8 SPHERICAL 24
2X 50
61 68 REF
48
62
2X 56
2X 60 29
9 (PORT DOOR)
C CSK SIDE
C
DETAIL 'A' 11
100 1 REF
DETAIL 'E'
DETAIL 'D'
B B
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
.
A
.XX .
. .XXX . . APPROVALS DATE
MATERIAL
DRAWN PORT DOOR
SEE SHT 1 STEVE 12/20/95
CHECKED
ASSEMBLY
SEE SHT 1 SEE SHT 1 FINISH J. KYFFIN 4/3/96
SEE SHT 1 DES. ENGR. SIZE DWG NO. REV.
NEXT ASSY PRODUCT
MFG. ENGR.
M. NEADS 4/3/96
D A3707D2F 9700-3707-01 F
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 1/1 2 OF 2
4/3/96 SCALE SHEET
8 7 6 5 4 3 2 1

9700-3707-01 REV E PORT DOOR ASSEMBLY
0001 4001-6927-01 J 1 EA PORT DOOR CASTING

0002 4001-6913-01 D 0 EA LINK
0003 4001-6914-01 A 1 EA FLAG, SWITCH
0004 4001-6915-01 A 1 EA NUT, DRIVE
0004 9700-3986-01 A 1 EA KIT, LEAD SCREW & DRIVE NUT
0005 4001-6916-01 B 1 EA LEAD SCREW
0006 4001-6917-01 A 1 EA HOUSING, SCREW
0007 4001-6918-01 D 0 EA HUB
0008 4001-6920-01 A 1 EA CLAMP, MOTOR
0008 4002-0366-01 1 EA CLAMP,MOTOR
0009 4001-6921-01 A 1 EA SUPPORT, BEARING
0009 4002-0365-01 A 1 EA SUPPORT,BEARING
0011 4001-7040-01 A 1 EA BUSHING
0012 4001-7165-01 C 1 EA ACTUATOR, SWITCH
0015 9600-0463-01 A 1 EA MOTOR/GEARHEAD SHAFT MOD, PO
0015 7500-0373-01 1 EA MOTOR WITH GEARHEAD, 24 VOLT,
0016 4001-7252-01 A 1 EA PULLEY, 30 GROOVE, .080 PITCH,
0019 3200-1034-01 A 1 EA PCB, ASSY, POD LOCK/UNLOCK SEN
0024 7500-0849-01 1 EA BRG, BALL, .250ID .625OD .196W
0025 4001-7255-01 B 1 EA PULLEY, 15 GRV, .080 PITCH MXL
0026 7500-0827-01 1 EA BELT, TMG, 95 GR, .080 P,.125
0027 7500-0216-01 1 EA PIN, DOWEL, .1876 DIA X 1/2" L
0028 7500-0372-03 1 EA PIN, ROLL, SS, 1/16 X 5/8 LONG
0029 7500-0790-01 1 EA SPRING, COMP, .240 OD .38 LG,
0032 7500-0792-01 0 EA RTNR, RING, EXT, CRES, .188 SH
0037 7500-0779-01 2 EA GROMMET, INSUL, 1.06 OD, .75 I
0038 6300-0044-01 1 EA SWITCH, OPTICAL W/MTG TABS, 26
0039 6100-2138-10 1 EA CONN, 10P, GRIPPER, IDM, W/FLA
0045 6100-1049-10 0.61 FT CABLE, RIBBON, 10 COND, 26 AWG
0046 7500-0337-01 0.13 FT TUBING, SHRINK, 1/16 DIA, CLEA
0051 7000-0441-08 001 2 EA SCREW, PHIL PAN HD, SS, 8-32 X
0052 7000-0444-04 2 EA SCREW, PHIL FLAT HD, SS, 8-32


9700-3707-01 REV E PORT DOOR ASSEMBLY
0059 7200-0014-04 2 EA WASHER, FLAT, SS, #4

0060 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0061 7200-0026-01 1 EA WASHER, FLAT, #4, .12 ID, .28
0062 7200-0078-01 1 EA WASHER, WAVE, .367 OD .265 ID
0063 7200-0052-20 1 EA WASHER, SS, .20ID X .325OD X .
0064 7200-0079-01 2 EA WASHER, LOCK, TAB, #4, SST
0065 7500-0835-01 2 EA SPRING, COMP, .180 OD, .31 LG
0067 7500-0012-01 0 EA ADHESIVE, LOCTITE 680, GREEN
0068 9700-4822-01 A 1 EA ASSY,POD DOOR LOCK
0099 2000-0946-01 A 0 EA INSTRUCTION,PORT DR ADJ & TEST
0100 9700-4749-01 D 1 EA ASSY,DRIVE,PT/DOOR LOCK

8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONS RECEIVINGTHIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without thespecificwrittenpermissionof Asyst
TechnologiesInc., Milpitas, California. This drawing isonly conditionally
13 33 22 11
A
. A ECN N3848 ; PRODUCTION RELEASE JK 1/29/97
any right in,orlicensetousethesubjectmatterofthedrawingorany
designs ortechnical information shown thereon, oranyrighttoreproduce 26 SEE DETAIL
the drawingoranyparttherof,exceptformanufacturebyvendors for B ECN N3927 JK 4/9/97
27 134
written license. Norighttoreproducethisdrawingisgrantedfor the
subject matterthereofunlessbywrittenagreement withorwritten 94 C ECN N3933 JK 5/21/97
2X D ECN N3967 M. AU 6/6/97
92
35 2X 5 82 E ECN N4047
2X 55 2 M. AU 7/30/97
76 F ECN N4203 JK 1/7/97
D
3
81
C G ECN N4335 JK 3/31/98
D
92
2X
82
2 3
1 4
25
81 2X
26
3X 58
C 52 2X C
3 REF
14 92
2X
82
4 (.38)
31
2X 15
DETAIL A 24 74
SCALE: 2/1
26
94
5 82 2X
20 92
81
B -01 ONLY B
.12 APPROX 138 17
6
NOTES: UNLESS OTHERWISE SPECIFIED 18
1. MANUFACTURE PER ASYST TECHNOLOGIES 4 1 J6 4 1 J5 7 J4 1 7 J3 1

10
P6 P5 P4 P3
REV
9700-3271-01
94 TABULATION
2. APPLY ADHESIVE ASYST P/N 7500-0716-01, P1
J2 26
92 4X DASH NO. DESCRIPTION
ITEM 143 , TO ALL SCREWS
1 J1 10
ASYST TECHNOLOGIES, INC ASSY. NO. 3200-1037-01 REV.
-01 RIGHT
WITHOUT LOCK WASHERS. 35 82
-02 LEFT
3 ATTACH ITEM 60 4 PLACES AT OTHER END OF 81
CABLES AND MARK SENSOR NAMES AND 142
LASER DIODE. 139 23 92
28 2X 1 16 ITEM
QTY
MATERIAL
4 TRIM AND DISCARD BEFORE 2X 140 32

REQD SPECIFICATION
58 3X 77 PARTS LIST
INSTALLATION. (1 PIECE ONLY) 92 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 58 94 2X DIMENSIONS ARE IN INCHES
A
TOLERANCES ARE:
141 . TECHNOLOGIES, INC.
5 TORQUE AT 1 INCH/LB. 92
FRACTIONS DECIMALS
.XX .
ANGLES
.
.
.XXX . APPROVALS DATE
6 DO NOT APPLY ADHESIVE ON SCREWS AT THIS 76 MATERIAL
TOP VIEW
DRAWN
ASSEMBLY. FINAL ASSEMBLY WILL APPLY ADHESIVE. SEE BOM

STEVE 3/15/96 PORT PLATE ASSEMBLY
CHECKED
9700-4002-XX LPI FINISH J. KYFFIN 4/3/96
(NOTES CONTINUED ON SHEET 2) NEXT ASSY PRODUCT NONE
MFG. ENGR.
M. NEADS 4/3/96
D A3716D1G 9700-3716-XX G
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden withoutthe specificwrittenpermissionof Asyst
TechnologiesInc., Milpitas, California. This drawingisonlyconditionally 108 10 ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossessiontherof confers ortransfers
any right in,orlicensetousethesubjectmatter of thedrawingorany 75 8 66
designs ortechnicalinformationshownthereon, or any righttoreproduce
the drawingoranyparttherof,exceptfor manufactureby vendors for
17 2X 109
. SEE SHEET 1 . .
Asyst Technologies, Inc.andformanufactureunderthecorporation's

91 82
writtenlicense. Norighttoreproducethis drawingisgrantedforthe
subject matter thereof unless bywrittenagreement with or written 3X 81 133 2X 8 12
3 60 79 4X
6 7 65 107
7D
SEE DETAIL B 117
D 29 D
92
2X
83
36.00 ±1.00 110

8 5 113
92 115
2X WAFER
83 EXCESSIVE 43
PROTRUSION
3 60 WAFER PROTRUSION SENSOR 79 5X
SENSOR
18
111
4X 81
2X 114
C 65 REF
112 C
84 116
DETAIL B 9 4
SECTION C-C
P20
NOTES: CONTINUED FROM SHEET 1 OF 4
7 BEFORE INSTALLATION OF ITEM 65 :
a) REMOVE LASER DIODE FROM PROTECTIVE PACKAGING.

b) CUT OFF CONNECTOR SUPPLIED WITH LASER DIODE,
LEAVING APPROXIMATELY 4.00 INCHES OF LEAD WIRE.
c) REMOVE SPANNER WRENCH, WARNING LABEL AND
END CAP FROM LASER DIODE.
B d) ATTACH LASER WARNING LABEL AS SHOWN. -01 ONLY B

e) BAG AND TAG SPANNER WRENCH AND END CAP CASSETTE
FOR SHIPMENT WITH UNIT. WAFER PRESENCE SENSOR SLOT SENSOR
8 PASS LASER DIODE, WAFER PROTRUSION SENSOR AND

WAFER EXCESSIVE PROTRUSION SENSOR WIRES THRU
OPENING SHOWN.
19
9 PASS PORT PLATE INTERCONNECT CABLE, WAFER 81 4X
PRESENCE SENSOR AND CASSETTE SLOT SENSOR
WIRES THRU OPENING SHOWN. 25
P2
10 WHEN IN HOME POSITION THERE SHOULD BE .03/.05 INCH
26 J2 2
CLEARANCE BETWEEN ROLLER AND LASER BRACKET.

8
11 PLACE A SMALL AMOUNT OF ADHESIVE,
P/N 7500-0302-01, ITEM 144 , TO THREADS. 34
2X 8 5 30
INSURE ADHESIVE ONLY TO THREADED AREAS. 9 46
CLEAN UP ANY EXCESS. REF 4 92 92 ITEM
QTY
MATERIAL
REQD SPECIFICATION
95 4X 2X PARTS LIST
12 USE PROCEDURE P9700-3360 TO ALIGN MIRRORS. 5X 83 83 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 78 DIMENSIONS ARE IN INCHES
A
TOLERANCES ARE:
.
13 PLACE ADHESIVE, 7500-0761-01, ITEM 135 ON 2X 3 60 FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
. .XX - -
SOLDER CONNECTIONS AS SHOWN. .XXX - APPROVALS DATE
MATERIAL
DRAWN
14 PLACE TAPE ON CABLE AS REQUIRED TO HOLD IN PLACE STEVE 3/15/96 PORT PLATE ASSEMBLY
DURING ASSEMBLY.
BOTTOM VIEW SEE SHT 1 SEE SHT 1 FINISH
SEE SHT 1
CHECKED
J. KYFFIN 4/3/96
(NOTES CONTINUED ON PAGE 3) NEXT ASSY PRODUCT SEE SHT 1
MFG. ENGR.
M. NEADS 4/3/96
D A3716D2G 9700-3716-XX G
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
Technologies Inc.,Milpitas,California. Thisdrawingisonlyconditionally
33 22 11
A
issuedandneither receipt norpossession therof confersor transfers
designs or technicalinformation shown thereon, oranyrighttoreproduce 26 SEE DETAIL . . SEE SHEET 1 . .
the drawing or any parttherof, except for manufacture by vendors for
27 134
written license. No right to reproducethisdrawingisgrantedfor the
subjectmatter thereof unlessbywrittenagreementwithorwritten
13 94
2X 55 2X
35 92
2X 5 82
2
3 81 76
C
D 92 D
2X
82 25
2 3
1 4
20
C 81 2X
81
52 2X
3X 58
26 3 REF
92
2X
82
C C
138 17
14
4 (.38) 18
31
DETAIL A 24
74
2X 15
SCALE: 2/1
26
94
B
5 82 2X
-02 ONLY B
92
15. POD LATCH ALIGNMENT CAN BE DONE 6 10

AT FINAL ASSEMBLY. 94
16. LEAVE THREE THREADS EXPOSED TO MINIMIZE

4 1 J6 4 1 J5 7 J4 1 7 J3 1
92 4X
P6 P5 P4 P3
ADJUSTMENT AT FINAL ASSEMBLY.

REV
82
9700-3271-01
P1
17. USE SCOTCH TAPE TO TEMPORARILY ATTACH ITEM J2 26
1 J1 10
138 TO PORT PLATE. DO NOT PERMANENTLY

ASYST TECHNOLOGIES, INC ASSY. NO. 3200-1037-01 REV.
ATTACH LABEL UNTIL LP FINAL TEMPORARILY
18. USE SCOTCH TAPE TO TEMPORARILY ATTACH

LASER DIODE SERIAL NUMBER LABEL TO 35 142
139 23 1
PORT PLATE. DO NOT PERMANENTLY ATTACH 92 16
28 2X ITEM
QTY
MATERIAL
LABEL TO LASER BRACKET COVER UNTIL LP 81 2X 140 32 58 3X

REQD SPECIFICATION
77 PARTS LIST
FINAL ASSY. 92 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 58 94 2X DIMENSIONS ARE IN INCHES
A
TOLERANCES ARE:
141 FRACTIONS DECIMALS ANGLES
19. IDENTIFY PART PER MARKING METHOD 12 OF ASYST 92 . .XX . .
CORPORATE PROCEDURE 2000-0311-01.
76 MATERIAL
TOP VIEW
DRAWN
SEE SHT 1 STEVE 3/15/96 PORT PLATE ASSEMBLY

20. PACKAGE PER ASYST WORKMANSHIP STANDARDS CHECKED
SEE SHT 1 SEE SHT 1
2000-0311-01. FINISH J. KYFFIN 4/3/96
COSMETIC PART: YES X NO NEXT ASSY PRODUCT SEE SHT 1
MFG. ENGR.
M. NEADS 4/3/96
D A3716D3G 9700-3716-XX G
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
Reproduction Forbidden without the specificwrittenpermissionofAsyst
Technologies Inc.,Milpitas,California. This drawingisonlyconditionally
issued andneitherreceipt nor possession therof confersortransfers
75 8 66
21
anyright in, or licensetousethesubjectmatter of the drawing or any
. SEE SHEET 1
designsortechnicalinformationshownthereon, or anyrighttoreproduce
the drawing or anyparttherof, except for manufacture byvendorsfor
2X . .
Asyst Technologies,Inc. andformanufactureunderthecorporation's

91 82 WAFER
writtenlicense. No right to reproducethis drawingisgrantedforthe
subjectmatterthereof unlessbywrittenagreement with or written 3X 81 137 12
permission fromtheCompany.
EXCESSIVE
3 60 79 4X
6 7 65 PROTRUSION
SENSOR 7D
SEE DETAIL B
D D
29
92 WAFER PROTRUSION
2X SENSOR
36.00 ±1.00 83
43
5 8 79 5X
19 92
2X
4X 81 83
60 3
C C
18
65 REF
81 3X
P20
DETAIL B
4
9
110
2X 113 WAFER PRESENCE SENSOR
B
2X 115 -02 ONLY B
136 84 CASSETTE
SLOT SENSOR
17
111
81 4X
2X 114 112 25
P2
116 26 J2 2
SECTION C-C 8
34
9 2X 8 5
46
REF 4 30 92 ITEM
QTY
MATERIAL
95 4X
REQD
PARTS LIST
SPECIFICATION
5X 92 83 UNLESS OTHERWISE SPECIFIED CONTRACT NO.

A 78 A
2X DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
83 2X 3 60 FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
. .XX - -
MATERIAL
DRAWN
STEVE 3/15/96 PORT PLATE ASSEMBLY
BOTTOM VIEW SEE SHT 1 SEE SHT 1 FINISH
SEE SHT 1
CHECKED
J. KYFFIN 4/3/96
MFG. ENGR.
M. NEADS 4/3/96
D A3716D4G 9700-3716-XX G
8 7 6 5 4 3 2 1

9700-3716-01 REV G PORT PLATE ASSY, RIGHT
0001 9700-3263-01 C 1 EA MOTOR ASSEMBLY, POD HOLD DOW

0002 9700-3738-01 B 1 EA MOTOR ASSEMBLY, WAFER SEATER
0003 9700-3265-01 D 1 EA HARNESS, PORT PLATE SENSORS
0004 9700-3725-01 A 1 EA CABLE ASSY, PORT PLATE/BASE
0005 6900-1016-01 3 EA SENSOR, IR RECEIVER, PT 300
0005 9700-3493-01 A 5 EA CABLE ASSY, SENSOR IR RECEIVER
0006 9700-3271-01 A 1 EA CABLE ASSY, STATUS LIGHTS/SWIT
0008 9700-3361-01 OB 1 EA LASER BRACKET ASSEMBLY
0008 9700-4303-01 C 1 EA LASER BRACKET ASSY,200MM
0008 9700-4539-01 OB 1 EA LASER BRACKET ASSY,1mW,200MM
0010 3200-1037-01 A 1 EA PCB, ASSY, PORT PLATE INTERCON
0017 4001-8113-01 A 1 EA COVER, OPTIC CABLE, RIGHT
0018 4001-8114-01 A 1 EA COVER, BOTTOM POCKET
0019 4001-8115-01 A 1 EA COVER, BOTTOM TROUGH
0020 4001-8116-01 A 1 EA COVER, CONTROL CABLE
0022 4001-6953-01 A 1 EA TRUNNION, DRIVE
0022 4001-8145-01 B 1 EA TRUNNION, DRIVE
0023 4001-7270-01 A 1 EA CLAMP, CABLE
0024 4001-6971-01 C 1 EA PUSH-PULL MECHANISM
0025 4001-7891-01 B 1 EA PORT PLATE
0026 4001-6931-01 B 2 EA HOUSING, HOLD DOWN
0027 4001-6949-01 A 1 EA FLAG
0028 4001-6961-01 B 1 EA BRACKET, SCREW
0028 4001-9993-01 A 1 EA BRACKET,SLIDE
0029 4001-6991-01 C 1 EA BLOCK, SENSOR MOUNT
0030 4001-6992-01 B 1 EA BLOCK, DUAL SENSOR MOUNT
0031 4001-7049-01 B 2 EA POD HOLD DOWN PAW
0032 4001-7050-01 A 1 EA SLIDE
0033 4001-7051-01 A 1 EA SLIDE
0034 4001-7712-01 B 1 EA INSULATOR, PCB
0035 4001-6983-01 C 2 EA COVER, LINKAGE CABLE
0039 4001-7267-01 A 1 EA LABEL, POWER
0043 4001-6994-01 F 1 EA COVER, LASER BRACKET
0046 4001-8119-01 A 1 EA BRACKET, PORT PLATE
0052 7500-0788-01 2 EA STANDOFF, 3/16 HEX, 4-40 X .75
0052 7500-2111-01 2 EA STANDOFF,3/16 HEX,M/F 4-40 X
0055 7500-2028-01 2 EA SPACER, .250 OD X .140 ID X .1
0056 7500-0240-01 0.1 FT TUBING, SHRINK, 3/32 DIA, BLAC



0065 6900-1159-01 OB 1 EA LASER, DIODE, 670NM, 3 MILLIWA
0065 6900-1278-01 OB 1 EA LASER,DIODE,1 MILLIWATT,670 NM
0065 9700-4834-01 B 1 EA ASSY,LASER DIODE W/CABLE,1mW
0066 6900-1128-01 1 EA SENSOR, OPTICAL, DIFFUSE MODE
0068 6100-0111-26 6 FT WIRE, 26 AWG, UL 1007, STRD, B
0069 6100-0177-26 6 FT WIRE, 26 AWG, UL 1007, STRD, V
0070 6100-2386-24 1 EA CONN, 24P DBL ROW, .1 CNTR, ID
0073 7100-0032-56 1 EA NUT, HEX, SS, #2-56
0074 7300-3420-20 2 EA SCREW, SOC HD SHLDR, 10-32 X 1
0078 7000-0446-06 5 EA SCREW,SKT HD CAP,8-32X3/8,SST
0094 7200-0014-01 001 9 EA WASHER, FLAT, S.S, #10
0094 7200-0014-10 9 EA WASHER, FLAT, SS, #10
0094 7200-0026-01 9 EA WASHER, FLAT, #4, .12 ID, .28
0107 4001-6956-01 A 1 EA PIN, ROLLER
0108 4001-6952-01 D 1 EA ARM, WAFER SEATER
0109 4001-6814-01 B 1 EA ROLLER
0110 4001-6935-01 B 1 EA FLAG
0110 4001-9008-01 004 1 EA COVER,RIGHT,LPO BASE
0110 4001-9208-01 A 1 EA FLAG,ARM,HOME
0111 4001-6936-01 C 1 EA ARM, ACTUATOR
0113 7000-0411-02 002 2 EA SCREW, PHIL PAN HD, 2-56 X 1/8



0133 7500-0406-01 2 EA BRG, BALL, .250 ID, .500 OD, .
0134 4001-8146-01 B 1 EA PIN
0135 7500-0761-01 0 EA ADHESIVE,LOCTITE 382,CLEAR,PCB
0136 4001-9209-01 A 1 EA FLAG,ARM,OUT
0138 4001-9361-01 A 1 EA LABEL,CAUTION,LASER RADIATION
0139 7500-2216-01 2 EA MOUNT,CABLE TIE,#4 SCREW
0142 9700-3273-01 B 1 EA CABLE ASSY, PROBE, PLUG TYPE


9700-3716-02 REV G PORT PLATE ASSY, LEFT
0001 9700-3263-01 C 1 EA MOTOR ASSEMBLY, POD HOLD DOW

0002 9700-3738-01 B 1 EA MOTOR ASSEMBLY, WAFER SEATER
0003 9700-3265-01 D 1 EA HARNESS, PORT PLATE SENSORS
0004 9700-3725-01 A 1 EA CABLE ASSY, PORT PLATE/BASE
0005 9700-3493-01 A 3 EA CABLE ASSY, SENSOR IR RECEIVER
0006 9700-3271-01 A 1 EA CABLE ASSY, STATUS LIGHTS/SWIT
0008 9700-3361-01 OB 1 EA LASER BRACKET ASSEMBLY
0008 9700-4539-01 OB 1 EA LASER BRACKET ASSY,1mW,200MM
0010 3200-1037-01 A 1 EA PCB, ASSY, PORT PLATE INTERCON
0017 4001-7889-01 A 1 EA COVER, BOTTOM REAR
0018 4001-7892-01 A 1 EA COVER, BOTTOM FRONT
0019 4001-7893-01 A 1 EA COVER, BOTTOM POCKET
0020 4001-7894-01 A 1 EA COVER, LOCK CABLE
0021 4001-7895-01 A 1 EA COVER, OPTIC CABLE
0022 4001-6953-01 A 1 EA TRUNNION, DRIVE
0023 4001-7270-01 A 1 EA CLAMP, CABLE
0024 4001-6971-01 C 1 EA PUSH-PULL MECHANISM
0025 4001-7890-01 D 1 EA PORT PLATE,LEFT
0026 4001-6931-01 B 2 EA HOUSING, HOLD DOWN
0027 4001-6949-01 A 1 EA FLAG
0028 4001-9993-01 A 1 EA BRACKET,SLIDE
0028 4001-6961-01 B 1 EA BRACKET, SCREW
0030 4001-6992-01 B 1 EA BLOCK, DUAL SENSOR MOUNT
0031 4001-7049-01 B 2 EA POD HOLD DOWN PAW
0032 4001-7050-01 A 1 EA SLIDE
0033 4001-7051-01 A 1 EA SLIDE
0034 4001-7712-01 B 1 EA INSULATOR, PCB
0035 4001-6983-01 C 2 EA COVER, LINKAGE CABLE
0039 4001-7267-01 A 1 EA LABEL, POWER
0046 4001-8119-01 A 1 EA BRACKET, PORT PLATE
0052 7500-2111-01 2 EA STANDOFF,3/16 HEX,M/F 4-40 X
0052 7500-0788-01 2 EA STANDOFF, 3/16 HEX, 4-40 X .75
0055 7500-2028-01 2 EA SPACER, .250 OD X .140 ID X .1



0065 6900-1159-01 OB 1 EA LASER, DIODE, 670NM, 3 MILLIWA
0073 7100-0032-56 1 EA NUT, HEX, SS, #2-56
0074 7300-3420-20 2 EA SCREW, SOC HD SHLDR, 10-32 X 1
0094 7200-0014-01 001 9 EA WASHER, FLAT, S.S, #10
0094 7200-0014-10 9 EA WASHER, FLAT, SS, #10
0094 7200-0026-01 9 EA WASHER, FLAT, #4, .12 ID, .28
0107 4001-6956-01 A 1 EA PIN, ROLLER
0108 4001-6952-01 D 1 EA ARM, WAFER SEATER
0109 4001-6814-01 B 1 EA ROLLER
0110 4001-6935-01 B 1 EA FLAG
0110 4001-9208-01 A 1 EA FLAG,ARM,HOME
0111 4001-6936-01 C 1 EA ARM, ACTUATOR



0133 7500-0406-01 2 EA BRG, BALL, .250 ID, .500 OD, .
0134 4001-8146-01 B 1 EA PIN
0135 7500-0761-01 0 EA ADHESIVE,LOCTITE 382,CLEAR,PCB
0136 4001-9209-01 A 1 EA FLAG,ARM,OUT
0139 7500-2216-01 2 EA MOUNT,CABLE TIE,#4 SCREW

8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONSRECEIVING THISCONFIDENTIALDRAWING:
REVISION
Technologies Inc., Milpitas, California. Thisdrawingisonlyconditionally
issued andneitherreceiptnorpossessiontherof confers or transfers
anyrightin,orlicensetousethesubjectmatterofthedrawingorany . A ECN N3939 ; PRODUCTION RELEASE M. AU 4/16/97
designsortechnicalinformation shownthereon, oranyrighttoreproduce
the drawing oranyparttherof,exceptformanufacturebyvendors for B ECN N4083 JK 8/28/97
Asyst Technologies, Inc. and formanufacture under thecorporation's
written license. Norighttoreproducethisdrawingisgrantedfor the
subjectmatterthereof unlessbywrittenagreementwithorwritten C ECN N4218 JK 12/11/97
D ECN N4326 AR 7/8/98
21
D D
HOST
EQUIP AUX 2 13
POWER
SAM AUX 1 PARALLEL/
INTERLOCK 32
4X
6
35
U1
J12
1
30
J17
C 3X 50 C
J16 33
34
1 J2
J3 2
14
10 5
J1
22
1 19
J5 J7 J9
J6 J8 J10
B B
30
2X 33
30 30
34
33 33 2X
JUMPER SETTING
34 34 LOCATION CONNECTION TABULATION
-01
W36 1 TO 2 DASH DESCRIPTION
4 W38 OPEN -01 2200
W36 2 TO 3 -02 2150/2100
NOTES: UNLESS OTHERWISE SPECIFIED -02
W38 1 TO 2 51
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP STANDARDS
2000-0311-01.
2. IDENTIFY PART PER MARKING METHOD 12 OF ITEM

QTY
REQD PART NUMBER DESCRIPTION
MATERIAL
SPECIFICATION
ASYST CORPORATE PROCEDURE 2000-0311-01. PARTS LIST
A 3. PACKAGE PER ASYST WORKMANSHIP STANDARDS
TOLERANCES ARE:
.
A
2000-0311-01. .XX .
. .
COSMETIC PART: YES X NO .XXX . APPROVALS DATE
MATERIAL
DRAWN
4 THE -01 CONFIGURATION IS PRESET AT LOWER LEVEL ASSEMBLY (ITEM 1 ). SEE BOM C.MOLERIN 3/22/96 PCB CHASSIS ASSEMBLY
CHECKED
9700-4002-01 LPI FINISH J. KYFFIN 4/3/96
NEXT ASSY PRODUCT N/R
MFG. ENGR.
M. NEADS 4/3/96
D A3717D1D 9700-3717-XX D
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONS RECEIVINGTHISCONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden without thespecific written permission of Asyst
TechnologiesInc., Milpitas, California. This drawing isonly conditionally
anyright in, orlicense to use the subjectmatter ofthedrawingorany . - SEE SHEET 1 . .
designs ortechnicalinformationshownthereon, oranyrighttoreproduce
the drawingoranyparttherof,exceptformanufacturebyvendorsfor
AsystTechnologies, Inc. and formanufacture underthecorporation's
written license. Norighttoreproducethis drawing isgrantedforthe
subject matterthereofunlessbywrittenagreement withorwritten
D D
MANUFACTURING PROCESS INSTRUCTIONS
OPERATIONS NO: X
TQC = QUALITY CHECK POINT MOVE = MOVEMENT OF PRODUCT
VAL = VALUE ADDED OPERATION VER = VERIFICATION OF TASK
1 INSPECT ALL ITEMS FOR DAMAGES.
2 LAY 1 INTO 6 , SECURE GROUND WIRE FROM 1 ONTO 6
X WITH 30 , 34 , AND 33 .
3 SLIDE 1 INTO PCB GUIDES OF 6 AND SECURE WITH
X 30 , 33 , AND 34 .
C C
4 SECURE 1 TO 6 WITH 30 , 33 , AND 34 .
5 INSTALL 2 ONTO J21 OF 1 , ROUTE 2 AS SHOWN.
6 INSTALL 13 ON BOTTOM SIDE OF 6 WITH 32 AND 35 .
7 INSERT 50 INTO J2 OF 13 .
8 PLUG 2 INTO J3 OF 13 .
9 PLUG 5 PIN CONNECTOR INTO J1 OF 13 .
10 PLACE 20 , 19 ONTO 6 . ROUTE AS SHOWN.
11 APPLY 21 TO 6 AS SHOWN.
12 STAMP WITH ASSEMBLER NUMBER ON BOTTOM OF 6 .
B B
TOOL LIST
TOOL QTY PART NUMBER DESCRIPTION
T1 1 HTR-2262-A CRIMPER
T2 1 304-8MTR 28 AWG BUS BAR WIRE
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
.
A
.XX .
. .
MATERIAL
DRAWN
SEE SHT 1 C.MOLERIN 3/22/96 PCB CHASSIS ASSEMBLY

CHECKED
SEE SHT 1 SEE SHT 1 FINISH J. KYFFIN 4/3/96
MFG. ENGR.
M. NEADS 4/3/96
D A3717D2D 9700-3717-XX D
8 7 6 5 4 3 2 1

9700-3717-01 REV D PCB CHASSIS ASSY,2200
0001 9700-4282-01 C 1 EA DUAL BOARD,INX/LP CONTROL ASSY

0001 9700-4991-01 A 1 EA DUAL,BD CONTROL ASSY,LPT/LPI
0001 9700-3390-01 OB 1 EA DUAL-BOARD CONTROL ASSEMBLY,
0002 9700-4526-01 A 1 EA CABLE ASSY,AMPLIFIER TO INX PC
0005 4001-8345-01 B 1 EA PLATE, SUPPORT, CONNECTOR
0006 4001-7879-01 A 1 EA TRAY, PCB SUPPORT
0013 6900-1272-01 1 EA AMPLIFIER,MOTOR,PWM,50VDC,
0014 6900-1136-01 1 EA HEATSINK, TO-220, .375H X .520
0015 7500-0791-01 1 EA SPACER, .250 OD, .115 ID, .125
0016 6200-1154-01 1 EA IC, IR6220, SIP-5, MOS HIGH-SI
0017 6100-2293-04 1 EA HEADER, 4 PIN MTA, .100 CTR
0018 6100-2085-02 1 EA PLUG, INSUL JUMPER, .100 CNTR,
0021 4001-7267-01 A 1 EA LABEL, POWER
0033 7200-0014-04 8 EA WASHER, FLAT, SS, #4
0037 7100-0114-40 1 EA NUT, KEP, SS, #4
0043 6100-0799-26 1 FT WIRE, 26 AWG, MIL-W-16878D B,
0046 6100-0755-26 0.5 FT WIRE, 26 AWG, MIL-W-16878D B,
0047 7500-0844-01 10 EA STANDOFF, 3/16 HEX, FEM, 4-40
0050 9700-4678-01 A 1 EA JUMPER,COPLEY P2


9700-3717-02 REV D PCB,CHASSIS ASSEMBLY,2150
0001 9700-4991-01 A 1 EA DUAL,BD CONTROL ASSY,LPT/LPI

0001 9700-3390-02 OB 1 EA DUAL-BORAD CONTROL ASSEMLBY,
0002 9700-4526-01 A 1 EA CABLE ASSY,AMPLIFIER TO INX PC
0006 4001-7879-01 A 1 EA TRAY, PCB SUPPORT
0013 6900-1272-01 1 EA AMPLIFIER,MOTOR,PWM,50VDC,
0021 4001-7267-01 A 1 EA LABEL, POWER
0033 7200-0014-04 8 EA WASHER, FLAT, SS, #4
0046 6100-0755-26 0.5 FT WIRE, 26 AWG, MIL-W-16878D B,
0050 9700-4678-01 A 1 EA JUMPER,COPLEY P2
0051 6100-2085-02 1 EA PLUG, INSUL JUMPER, .100 CNTR,

8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbidden withoutthespecificwrittenpermissionofAsyst
B B
TechnologiesInc., Fremont, California. this drawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
4 PCN P0250;PILOTRELEASE JK 4/24/96
(SEE SHT 2)
anyrightin,orlicensetousethesubjectmatterofthedrawingorany
designsortechnicalinformationshowntheron,oranyrighttoreproduce
thedrawing oranyparttherof,exceptformanufacturebyvendorsfor 5 PCN P0271 JK 7/8/96
H
Asyst Technologies,Inc.andformanufactureunderthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe 6 PCN P0283 JK 7/22/96 H
C C
subject mattertherof unlessby written agreement with orwritten
permissionfromtheCompany. 7 PCN P0305 JK 8/6/96
8 PCN P0364 JK 10/3/96
8 PCN P0364 JK 12/16/96
(SEE SHT 1) OBS PCN P0381; OBSOLETE JK 1/9/97
16
PACKAGED
SEPARATELY
A SEE DETAIL P
(SEE SHT 2)
2X 41
2X 78
G 6 2X 66 G
2X 71
74
4X
73
20
VIEW H-H
74 2X (REF SHT 2)
F F
73 2X
34
27
32 REF
DANGER
21
LASERRADIATION WHEN OPEN
AVOID DIRECTEYE EXPOSURE.
E CABLE FEEDTHRU E
CUTOUT
E (SEE SHT 2)
E
LOAD
31
2X 50 UNLOAD
55 4X
REF 3
2X 68
D
HOME
2X 67 30
(SEE SHT 1)
D D
VIEW F-F
POWER
(REF SHT 1)
VIEW D-D
SEE DETAIL R (REF SHT 1)
37
1. MANUFACTURE PER ASYST TECHNOLOGIES

D 2. APPLY ADHESIVE, ASYST P/N 7500-0716-01,
TO ALL SCREWS WITHOUT LOCK WASHERS.
C 32 3. SEE WIRE TABLES (SHEET 4) FOR C
HARNESS TERMINATIONS.
F
THREAD INTO
ITEM 27 , AS 4 APPLY ITEM 84 AS SHOWN.
SHOWN, AND (SEE SHT 1)
PULL TAUT 5 APPLY LUBRICANT, ASYST P/N 7500-2004-01
35
F (NSK-2), ITEM 90 TO ID OF ROLLER TRACK
PRIOR TO INSERTING ROLLERS INTO TRACK.
A
23 6 ENSURE THAT ITEMS 91 AND 92 DO NOT
50 2X
INTERFERE WITH ANY COMPONENTS ON
68 2X FULL TRAVEL.
B 67 2X NOTES CONTINUED ON SHEET 4 OF 4 B
61 TABULATION
66 -01 AS SHOWN (RIGHT)
71 -02 MIRROR IMAGE (LEFT)

27
QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION SPECIFICATION
REQD
PARTS LIST
VIEW C-C UNLESSOTHERWISESPECIFIED

TOLERANCESARE:
CONTRACT NO.
- TECHNOLOGIES, INC.
.XX± -
(REF SHT 1) - - ± - .XXX± -
± - APPROVALS DATE
- -
MATERIAL DRAWN LPT ASSEMBLY,
MAGILL
A
4/20/96
SEE B.O.M.
CHECKED FORWARD PPLT A
N/R LPT FINISH J. KYFFIN 4/22/96
(SUB-BASE) NEXT ASSY
N/R DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
PRODUCT
MFG.ENGR.
M. NG 4/22/96
E A3740E1O 9700-3740-XX OBS
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONSRECEIVING THISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbidden without the specificwrittenpermission ofAsyst
TechnologiesInc.,Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshown theron,or anyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor
H H
AsystTechnologies,Inc.andformanufactureunderthecorporation's
writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherofunlessbywrittenagreementwithorwritten
28 79 3X
8X 57
36
3
58
25
40 (SEE 55 5X
G 2X 56 SHT 2)
G G G
26
THREAD
ITEM 32 THRU
5
ROLLERS
IN ITEMS
1 AND 2 REF 2
4 LOCATIONS
4 REF
F F
91 POWER READY
PODIN
PLACE
6
DETAIL N
SCALE: 1/1
2X 50
VIEW A-A VIEW B-B

(REF SHT 1)
(REF SHT 1)
24
72 5X
E E
SECTION G-G
SCALE: 1/1
(REF SHT 2)
86 2X
SEE DETAIL N
POSITION WHEEL
92 IN TRACK IN
6 COLUMN
BOARD E1
D 2X 93 4 VIEW E-E (SEE SHEET 4)
D
(REF SHT 1)
44 2X
49 3X
48 8X
66 3X
2 REF
71 3X
1 REF
P53
43 2X
C C
(SEE SHEET 3) 22 REF
J
1 2
SEE VIEW L
(SEE SHT 3)
K
(SEE SHT 3)
69
B 76 B
J1
11 42 2X
77 4X
J3 63 4X 73 2X
66 4X
66 4X 81 2X
71 4X
J
71 4X 80 2X
(SEE SHT 1)
K
QTY MATERIAL
M
REQD SPECIFICATION
5 SEE VIEW
H H
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACT NO.
(SEE SHT 3) DIMENSIONSAREININCHES.
TOLERANCES ARE:
-
.XX± -
22 - - ± - .XXX± -
± - APPROVALS DATE
A FIT BOTTOM FLANGE - -
SEE SHEET 1 MAGILL 4/20/96
A
85 INTO BASE PLATE AND SEE SHEET 1 SEE SHEET 1
CHECKED FORWARD PPLT
FINISH J. KYFFIN 4/22/96
SNAP INTO PLACE NEXTASSY PRODUCT
SEE SHEET 1 DES. ENGR. SIZE CADFILE NAME DWG.NO. REV.
M. NG 4/22/96
MFG.ENGR.
E A3740E2O 9700-3740-XX OBS
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONS RECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
ReproductionForbidden without thespecificwrittenpermissionofAsyst
TechnologiesInc., Fremont, California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
SHOWN WITH
designsor technicalinformationshown theron, oranyrighttoreproduce
thedrawingorany parttherof, except formanufacturebyvendorsfor
AsystTechnologies,Inc. andformanufactureunderthecorporation's
(BLUE) (RED)
H writtenlicense. Norighttoreproducethisdrawingisgrantedforthe
subjectmattertherofunlessbywrittenagreementwithorwritten
COVER REMOVED H
POWER SUPPLY A5
(+) (-)
VIEW M + -
CPU ASSEMBLY
TO DRIVE
(REF SHT 2)
FG
REF 5 COLUMN FAN
G RC TERMINAL RCG TERMINAL G
BOARD A1
SIDE OF CHASSIS
NOT SHOWN FOR CLARITY
J4
BOARD A4
J1
BOARD B1
BOARD A3 P2 J3
J1
J1
CABLE H1
P1
P3
F CABLE B3 F
BOARD A2 ENET
J6 SERIAL3/SERIAL4 SERIAL1/SERIAL2
P5
BOARD B2 2 REF
(UNDERNEATH)
VIEW L
P20
ARM SERVO ASSEMBLY END OF SPRINGS 84 4 GRN/YEL TERM

AT HOLES
SHOWN WITH COVERS REMOVED
(REF SHT 2) CABLE A6
E E
.50
CABLE F1
P6
CABLE G1
CABLE H2
31 REF
REF 84
P7
D D
ITEM 14 GUIDE RAIL

Y-CABLE
MODULE C2
DETAIL R ITEM 9
SCALE: 1/1 I/O CABLE
GND BLOCK H3
SEE DETAIL P-P
REF 3
C C
HOST
EQUIP AUX2
POWER
AUX1 PARALLEL/
SAM
INTERLOCK
LAN JACK
BOARD D1
REF 1
FROM
MINIENVIRONMENT
B
CABLE C4
REV
9700-4086-01
PANEL D2 ITEM 3 B
CABLE D3
CN1 FRAME ASSEMBLY
FROM 9700-4072-01
REV_
VENDOR_
J20
MINIENVIRONMENT J5 J7
CABLE C3 J6 J10
GRN/YEL TERM
QTY DESCRIPTION MATERIAL
ITEM REQD PARTNUMBER SPECIFICATION
VIEW K-K
PARTS LIST
UNLESS OTHERWISESPECIFIED CONTRACTNO.
DIMENSIONSAREININCHES.
TOLERANCESARE:
BOARD C1 FRACTIONS DECIMALS ANGLES
VIEW J-J I/O PANEL ±

.XX± - ±
- - - .XXX± - - APPROVALS DATE
PART OF ITEM 3 - -
MAGILL 4/21/96
A MINIENVIRONMENT (REF SHT 2)
SEE SHEET 1
SEE SHEET 1 SEE SHEET 1
(REF SHT 2) FINISH
SEE SHEET 1 DES. ENGR.
J. KYFFIN 4/22/96
SIZE CAD FILENAME DWG.NO. REV.
NEXTASSY PRODUCT M. NG 4/22/96
MFG.ENGR.
E A3740E3O 9700-3740-XX OBS
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
Reproduction Forbidden without thespecificwrittenpermissionofAsyst
issued and neitherreceipt norpossession therofconfersortransfers
H written license. Norighttoreproducethisdrawingisgrantedforthe
subject mattertherof unlessbywrittenagreementwithor written
H
G G
FRAME WIRE TABLE ITEM 3
FROM (CONN. LABEL, TO (JACK, PLUG,

ITEM NO. PART NO. PORT DOOR WIRE TABLE ITEM 4
WIRE COLOR, ETC. ) TERMINAL, ETC.)
H1/CN1 C4/CN1 FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO.
H2/CN1 B3/CN1 WIRE COLOR, ETC. ) TERMINAL, ETC.)
3 9700-3962-XX
RED RING TERM (1) A5/(+) 11 9700-3724-01 P53 E1/J53
BLUE RING TERM (2) A5/(-)
F F
Y-CABLE WIRE TABLE ITEM 14

ITEM NO. PART NO.
CPU WIRE TABLE ITEM 5
PART OF 8 9700-4082-01 P6B F1/J6B
ITEM NO. PART NO.
FROM (CONN. LABEL, TO (JACK, PLUG, I/0 PANEL WIRE TABLE ITEM 3 9 9700-4080-01 P6A F1/J6A
ITEM NO. PART NO.
J2 A4/P2 WIRE COLOR, ETC. ) TERMINAL, ETC.)
7 9700-4079-01 GRAY RING TERM A5/RC 9 9700-4080-01 P7 D1/J7
WHITE RING TERM A5/RCG 10 9700-4081-01 P8 D1/J8
9 9700-4080-01 P11 A1/J11 15 6900-1282-01 A1/J7 D2/LAN JACK
J5 A4/P5
E D3/J20 A6/P20 E
10 9700-4081-01 P13 A1/J13 3 9700-3962-XX
D3/GRN-YEL RING TERM A5/FG
P2 A2/J2
12 9700-4083-01 P3 A4/P3
13 9700-4108-01 P3 A3/J3
14 9700-4109-01 P6 A3/J6
15 6900-1282-01 - A1/J7 I/O CABLE WIRE TABLE ITEM 14
5 9700-3970-XX A6/P20 D3/J20 FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO.
14 9700-4109-01 J6A G1/P6A
MINIENVIRONMENT WIRE TABLE ITEM 1
9 9700-4080-01 TEST N/C
D ITEM NO. PART NO.
FROM (CONN. LABEL, TO (JACK, PLUG, D
P5 C1/J5
ARM SERVO WIRE TABLE ITEM 2 7 9700-4079-01 P22 C3/J22
P1 J1
ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) 11 9700-3724-01 P3 C1/J3
8 9700-4082-01 P1 B2/SERIAL JACK P6 C1/J6 BASE GROUNDING BLOCK PART OF
13 9700-4108-01
12 9700-4083-01 P1 B1/J1 P7 C1/J7 WIRE LIST 3
2 9700-3952-XX B3/CN1 H2/CN1 C4/CN1 H1/CN1
1 9700-3947-XX FROM (CONN. LABEL, TO (JACK, PLUG,
C3/P10 C1/J10 ITEM NO. PART NO.
8 9700-4082-01 GRN RING TERM H3
C 13 9700-4108-01 GRN RING TERM H3
C
A6 (GRN/YEL TERM) H3
3 9700-3962-XX
D3 (GRN/YEL TERM) H3
4X 82 83 4X
83 4X
SEE BASE GROUNDING
B BLOCK WIRE LIST B

QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION
REQD SPECIFICATION
7. IDENTIFY PART PER MARKING METHOD 12 OF
ASYST CORPORATE PROCEDURE 2000-0312-01. DETAIL P UNLESSOTHERWISESPECIFIED
CONTRACT NO.
PARTS LIST
TOLERANCESARE:
.XX± -
8. PACKAGE PER ASYST WORKMANSHIP STANDARDS - - ± - .XXX± -
± - APPROVALS DATE
2000-0311-01 SEC. 15.0 - -

MAGILL 4/21/96
A COSMETIC PART: YES X NO SEE SHEET 1
SEE SHEET 1 DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
NEXTASSY PRODUCT
MFG. ENGR.
M. NG 4/22/96
E A3740E4O 9700-3740-XX OBS
8 7 6 5 4 3 2 1

9700-3740-01 REV OB LPT ASSY,FORWARD PPLT,RIGHT
0001 9700-3947-01 INC 1 EA MINI ENVIRONMENT ASSY,LPT,RIGH

0002 9700-3952-01 INC 1 EA ARM SERVO ASSEMBLY,RIGHT
0003 9700-3962-01 INC 1 EA FRAME ASSEMBLY,RIGHT
0004 9700-3707-01 E 1 EA PORT DOOR ASSEMBLY
0005 9700-3970-01 D 1 EA CPU ASSY,LPT,RIGHT
0006 9700-3960-01 A 1 EA SHIELD ASSEMBLY,TOP
0007 9700-4079-01 A 1 EA CABLE ASSY,INDEXER DC PWR/TTL
0008 9700-4082-01 INC 1 EA CABLE ASSY,SERIAL SERVO
0009 9700-4080-01 A 1 EA CABLE ASSY,40 PIN I/O
0011 9700-3724-01 B 1 EA CABLE ASSY,PORT DOOR
0012 9700-4083-01 INC 1 EA CABLE ASSY,DC PWR TO SERVO
0013 9700-4108-01 A 1 EA CABLE ASSY,SERIAL,INDEXER
0014 9700-4109-01 A 1 EA CABLE ASSY,Y/20 TO 10 (2X)
0015 6900-1282-01 1 EA CABLE ASSY,RJ45,100 OHM,2FT
0016 9600-0496-01 C 1 EA TEACH PENDANT
0017 9700-3941-01 A 1 EA CABLE ASSY,GRIPPER,TILT,RIGHT
0020 4001-8570-01 A 1 EA COVER,OUTSIDE GUIDE COLUMN,EL
0021 4001-8571-01 A 1 EA COVER,INSIDE,GUIDE COLUMN,ELEC
0022 4001-8225-01 OB 1 EA GARAGE,FRONT
0022 4001-9138-01 A 1 EA COVER,GARAGE,FRONT,ELECTROPO
0022 4001-8817-01 OB 1 EA REPLACED BY 4001-9138-XX
0023 4001-8256-01 A 1 EA PANEL,ACCESS,GARAGE
0024 4001-8230-01 A 1 EA SPACER,GARAGE,ELECTROPOLISH
0025 4001-7853-01 B 1 EA CAP, END, VERTICAL DRIVE
0026 4001-8284-01 A 1 EA COVER,DRIVE COLUMN,ELECTROPO
0027 4001-8339-01 A 2 EA RETAINER,PROTECTION STRIP UPPE
0028 4001-8660-01 A 1 EA PLATE,MOUNT,HANDLE
0029 4001-8551-01 OB 1 EA CAP,DOOR BRACKET
0030 4001-8530-01 A 1 EA BRACKET,CABLE,MINI-ENVIRONMEN
0031 4001-8566-01 OB 1 EA CLAMP,CABLE
0031 4001-8805-01 A 1 EA GUIDE,ROLLER
0032 4001-8672-01 A 1 EA PROTECTION STRIP
0034 4001-7744-01 C 1 EA LABEL, DANGER, LASER
0035 4001-7743-01 B 1 EA LABEL, MODEL
0036 4001-8338-01 A 1 EA PIN,GUIDE,INTERFACE
0037 4001-8125-02 C 1 EA WINDOW,MINI-ENVIRONMENT
0040 7500-1068-01 1 EA HANDLE,CHASSIS,4.5 X 1.5 SST,T



0044 7500-1096-01 2 EA PIN,DOWEL,.187 OD X .625 LG,SS
0044 7500-0315-03 2 EA PIN,DOWEL,3/16 DIA X 3/8,SST
0048 7000-0466-26 8 EA SCREW, SOC HD CAP, SS, 1/4-20
0049 7000-0446-24 3 EA SCREW, SOC HD CAP, SST, 8-32 X
0056 7000-0454-12 2 EA SCREW,PHIL FLAT HD,10-32 X 3/4
0058 7000-0467-14 1 EA SCREW, SOC FLAT HD, SS, 1/4-20
0060 7000-0445-08 2 EA SCR,SKT BTN HD,8-32x1/2,SST
0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0069 4001-6926-01 A 1 EA COVER, PORT DOOR CASTING, W/O
0071 7200-0014-08 10 EA WASHER, FLAT, SS, #8
0074 7500-0181-03 6 EA STANDOFF, SS, 6-32 X 3/8 MALE/
0076 4001-6947-01 B 1 EA GASKET, PORT DOOR COVER
0081 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0083 7200-0016-06 8 EA WASHER, LOCK, EXTERNAL, SS, #6
0084 7500-0772-01 0.2 EA GASKET, STRIPS 1/8 X 1/2
0085 4001-8743-01 A 1 EA COVER,CONNECTOR PANEL
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0090 7500-2004-01 0 EA LUBRICANT,GREASE,TURCITE,LITHI


0091 4001-9133-01 A 1 EA SHIELD,MAIN,GUSSET

0092 4001-9135-01 003 1 EA SHIELD,ROLLER STRIP,ARM
0093 7000-2160-06 2 EA SCREW,PHIL PAN HD,6-32 X 3/8 Z
0094 9700-4343-01 002 0 EA KIT,UPGRADE,FAN,DRIVE COLUMN ,
0095 6100-1002-03 1 EA POWER CORD, 3 COND, 110V, UNSH
0097 3400-0055-01 003 0 EA INTERCONNECT BLOCK DIAGRAM,LP


9700-3740-02 REV OB LPT ASSY,FORWARD PPLT,LEFT
0001 9700-3947-02 INC 1 EA MINI ENVIRONMENT ASSY,LPT,LEFT

0002 9700-3952-02 INC 1 EA ARM SERVO ASSEMBLY,LEFT
0003 9700-3962-02 INC 1 EA FRAME ASSEMBLY,LEFT
0005 9700-3970-02 D 1 EA CPU ASSY,LPT,LEFT
0008 9700-4082-01 INC 1 EA CABLE ASSY,SERIAL SERVO
0012 9700-4083-01 INC 1 EA CABLE ASSY,DC PWR TO SERVO
0016 9600-0496-01 C 1 EA TEACH PENDANT
0017 9700-3941-02 A 1 EA CABLE ASSY,GRIPPER,TILT,LEFT
0022 4001-8225-01 OB 1 EA GARAGE,FRONT
0022 4001-8817-01 OB 1 EA REPLACED BY 4001-9138-XX
0029 4001-8551-01 OB 1 EA CAP,DOOR BRACKET
0031 4001-8566-01 OB 1 EA CLAMP,CABLE
0031 4001-8805-02 A 1 EA GUIDE,ROLLER
0035 4001-7743-01 B 1 EA LABEL, MODEL



0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0071 7200-0014-08 10 EA WASHER, FLAT, SS, #8
0081 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0086 4001-7570-01 A 2 EA LABEL, HAZARD



0092 4001-9135-01 003 1 EA SHIELD,ROLLER STRIP,ARM
0093 7000-2160-06 2 EA SCREW,PHIL PAN HD,6-32 X 3/8 Z
0094 9700-4343-02 002 0 EA KIT,UPGRADE,FAN,DRIVE COLUMN,#
0097 3400-0055-01 003 0 EA INTERCONNECT BLOCK DIAGRAM,LP

8 7 6 5 4 3 2 1
REVISION
issued and neither receipt norpossession thereof confers or transfers 8 82 77 60 20 8 21 8
any right in, or license to use the subject matter of the drawing or any - 1 PROTOTYPE . .
designs or technical information shown theron, or any right to reproduce 64
the drawing oranypartthereof, except for manufacture by vendors for
6X 6X 6X

D D
2. APPLY ADHESIVE, ASYST P/N 7500-0716-01,

3 AFTER MOUNTING ITEM 5 TO ITEM 22 , SLIDE

ITEM 22 OVER SHAFT OF ITEM 30 . SLIP BELT
10
OF ITEM 1 OVER PULLEY OF ITEM 5 AND
TENSION THE BELT BY TIGHTENING ITEM 56 UNTIL 23 68 TO MATING PEM NUT IN ITEM 28
IT CONTACTS ITEM 30 AND PIVOTS ITEMS 5 AND 79
22 ABOUT THE SHAFT. PRESS ITEM 11 INTO THE
84
RECESSED AREA IN ITEM 22 AND RETAIN IN PLACE 3X, MOUNT TO
WITH ITEMS 65 , 78 , AND 83 . 3X, MOUNT 72 BACK OF ITEM 30
43
TO ITEM 24 72
4X 60
5 FIT THE TWO TABS OF ITEM 2 INTO THE MATING 44
T-SLOTS IN ITEM 30 . PIVOT ITEM 2 INTO ITEM 30
C AND MOUNT WITH ITEMS 68 AND 79 . 4
86 7 C
6 POSITION ITEM 19 , 2X, ON SHAFT OF ITEM 1

BEFORE INSTALLING WITH ITEM 54 , 2X. 4X 42 50
151
10 1
24 BELT
(PART OF
10 ITEM 1 ) 18
SPEED REDUCER 68 2X 7
10
(PART OF ITEM 1 ) 2X 19
57 2X 79 2X
PIN 2X 54
3 SHAFT 84 2X
6
(PART OF ITEM 30 )
B 3 B
71 7
DIMPLE
2X 17 74 4X
11
65 2X
78 2X 3
11
83 2X
4
55 2X 3
PEM NUT 11
68
5 REF 22 3
CABLE 9 (PART OF TABULATION
79 ITEM 28 ) REF 3
FEEDTHRU
HOLE
9 -02 MIRROR IMAGE (LEFT)
27 ITEM
QTY
MATERIAL
2X 60 REQD SPECIFICATION
31 29 40 PARTS LIST
61
A 2X 77 REF 28 4 2X 2X 2X
UNLESS OTHERWISE SPECIFIED
CONTRACT NO.
A
TOLERANCES ARE:
77 (SHOWN IN FRACTIONS DECIMALS ANGLES
2X 82 INSTALLED .XX .01
- - - .XXX - -
APPROVALS DATE
82 POSITION) MATERIAL
2 DRAWN
35 2X
- -
SEE B.O.M.
MAGILL 4/3/96 ARM SERVO ASSEMBLY
25 CHECKED
9700-3740-XX LPT FINISH J. KYFFIN 4/12/96
40 2X 5 5 5 DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
30 2X T-SLOT NEXT ASSY PRODUCT N/R
M. NG
2X TAB 11 28 2X 41 D A3952D1I 9700-3952-XX INC
(PART OF ITEM 30) FIRST USED ON DO NOT SCALE DRAWING
MFG. ENGR.
A. DEPEW SCALE 1/2 SHEET 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
any right in, or license to use the subject matter of the drawing orany
SEE DETAIL C - - SEE SHEET 1 - -
6
3
LABEL OTHER END 7
NOTES: CONTINUED FROM SHEET 2 OF 2 2X 56 WITH "ER"
D D
7 AFTER FITTING ITEM 3 ONTO SHAFT OF ITEM 1 , 5 REF
22
INSERT ITEM 86 THRU SLOT IN ITEM 3
SEE DETAIL B 94
AND HOLE IN ITEM 1 UNTIL IT IS CENTERED.
68 12
8 MOUNT ITEM 21 TO ITEM 20 WITH ITEMS 60 , 9.50
79 9
77 , AND 82 PRIOR TO MOUNTING ITEM 21 TO
ITEM 23 OR ITEM 28 . 85
9 FEED ALL CABLES THRU CABLE FEEDTHRU HOLE

IN ITEM 30 BEFORE MOUNTING ITEM 27
WITH ITEMS 61 , 77 , AND 82 .
10 MOUNT ITEM 24 TO ITEM 30 . AFTER MOUNTING

16 -01 ONLY 7 LABEL OTHER END -02 ONLY
ITEM 23 TO 24 , INSTALL ITEM 57 AND WITH "ER"
ROTATED 180
TIGHTEN UNTIL ITEM 23 FITS SNUGLY AROUND 60
SPEED REDUCER (PART OF ITEM 1 ). 77 2X
11 ALIGN HOLES OF ITEM 28 WITH HOLES IN 82
VIEW A-A
C C
ITEM 30 AND PRESS ITEM 41 THRU THE
HOLES UNTIL IT IS CENTERED. PIVOT ITEM 28
INTO ITEM 30 UNTIL ITS DIMPLE FITS INTO (.44) 13
THE MATING HOLE. REF 94
12 USE CABLE TIES, ITEM 91 , AND CABLE TIE

MOUNTS, ITEM 90 , AS REQUIRED. SHOWN WITH ITEMS 20 AND
21 REMOVED FOR CLARITY
13 GENTLY SLICE THRU CABLE JACKET, WHERE SHOWN, 99 85 REF
AND PULL APART .44 INCHES SO THAT BRAID IS
ESPOSED. INSERT INTO CABLE CLAMP, ITEM 94 , 60
2X
SO THAT THE CLAMP CONTACTS THE BRAID. 77 DETAIL B
14. IDENTIFY PART PER MARKING METHOD 12 OF SCALE: 1/1
ASYST CORPORATE PROCEDURE 2000-0312-01. D 92
15. PACKAGE PER ASYST WORKMANSHIP STANDARDS WIRE TABLE
2000-0311-01, SEC 15.0.
COSMETIC PART: YES X NO CABLE CONN. REF. HEADER REF.
ITEM NO.
95 PART NO. DESIGNATOR DESIGNATOR
B D 93 B
60 7 9700-3135-09 ET ENC_T
7 9700-3135-09 ER ENC_R
77
6 9700-3139-03 P12 GRIPPER
82
100 9700-3941-XX LT LIMITT
PART OF 4 9700-3944-01 LR LIMITR
REF 27 ET LT
EV LV
ER LR
J3
PART OF 3 9700-3958-01 MT MOTORT

ENC_G LIMITG ENC_T LIMITT ENC_V LIMITV ENC_R LIMITR J3
REF 3 BV BR
MT MR
MV
10 9700-4100-01 LV LIMITV
BRAKEG BRAKET BRAKEV BRAKER
MOTORG MOTORT MOTORV MOTORR
J4
SEE DETAIL B 10 9700-4100-01 BV BRAKEV
10 9700-4100-01 EV ENC_V
100 100 REF 10 9700-4100-01 MV MOTORV
9 9700-4101-01 MR MOTORR
10
11 9700-4104-01 BR BRAKER
4.00
QTY MATERIAL
REQD SPECIFICATION
2X 101 101 2X PARTS LIST

A DIMENSIONS ARE IN INCHES.
TOLERANCES ARE:
A
76 MOUNT ON FARSIDE FRACTIONS DECIMALS ANGLES
OF COVER - - -
.XX
.XXX
.01
- -
APPROVALS DATE
VIEW D-D
MATERIAL
DRAWN
- -
SEE SHT 1
MAGILL 4/3/96 ARM SERVO ASSEMBLY
1.50 9.00 CHECKED
GRIPPER TILT SENSOR MTG SEE SHT 1 SEE SHT 1 FINISH J. KYFFIN 4/12/96
M. NG 4/12/96
MFG. ENGR.
D A3952D2I 9700-3952-XX INC
8 7 6 5 4 3 2 1

9700-3952-01 REV INC ARM SERVO ASSEMBLY,RIGHT
0001 9700-4085-01 INC 1 EA ARM ASSEMBLY ROTATE,RIGHT

0001 9700-3953-01 005 1 EA SPEED REDUCER ASSEMBLY
0002 9700-3965-01 INC 1 EA SERVO/DRIVER ASSEMBLY
0003 9700-3954-01 INC 1 EA GRIPPER TILT ASSEMBLY
0004 9700-4103-01 INC 1 EA ARM OPTO ASSEMBLY,RIGHT
0005 9700-4102-01 INC 1 EA MOTOR ASSEMBLY,ARM ROTATE
0006 9700-3139-03 F 1 EA CABLE ASSY, GRIPPER, APL
0007 9700-3135-09 B 2 EA CABLE ASSY, ENCODER, GRIPPER
0009 9700-4101-01 A 1 EA CABLE ASSEMBLY,ARM ROTATE
0010 9700-4100-01 INC 1 EA CABLE ASSEMBLY,ARM VERTICAL
0011 9700-4104-01 INC 1 EA CABLE ASSY,BRAKE,ARM ROTATE
0016 4001-8514-01 INC 1 EA GUIDE,CABLE,GRIPPER
0017 4001-8725-01 INC 1 EA BRACKET,ANTI-ROTATION,GRIPPER
0018 4001-8718-01 INC 1 EA ROTOR
0019 4001-8716-01 INC 2 EA RING,PRELOAD
0020 4001-8281-01 INC 1 EA HOUSING,REDUCER,RIGHT
0021 4001-8280-01 INC 1 EA PLATE,COVER
0022 4001-8251-01 INC 1 EA BRACKET,MOUNTING,MOTOR
0023 4001-8264-01 INC 1 EA CLAMP,BAND
0024 4001-8265-01 INC 1 EA SADDLE,BAND
0025 4001-8694-01 INC 1 EA SHIELD,PROTECTION STRIP,RIGHT
0026 4001-8340-01 A 2 EA ROLLER,PROTECTION STRIP
0027 4001-8695-01 INC 1 EA SHIELD,CABLE CRADLE,RIGHT
0028 4001-8413-01 INC 1 EA COVER,CHASSIS,MOTOR CONTROL,
0029 4001-7877-01 A 2 EA GUIDE WHEEL
0030 4001-8277-01 INC 1 EA CRADLE,ARM RIGHT
0031 4001-8124-01 A 2 EA GUIDE PIN, UPPER
0035 4001-9132-01 A 2 EA ROLLER,PROTECTION
0040 7500-0113-01 6 EA RTNR, RING, EXT E, .188 SHAFT
0041 7500-0943-01 2 EA PIN, ROLL, .135 OD X .562 LG,
0042 7500-0675-01 4 EA STANDOFF, 1/4 HEX, M/F, 4-40 X
0044 7500-0073-01 1 EA BEARING, BALL, .125ID X .250 O
0051 7200-0014-01 001 1 EA WASHER, FLAT, S.S, #10
0051 7200-0014-10 1 EA WASHER, FLAT, SS, #10
0053 7000-2101-01 2 EA SET SCREW, SKT HD, 4-40 X 9/32


9700-3952-01 REV INC ARM SERVO ASSEMBLY,RIGHT
0055 7000-0612-03 2 EA SCREW, SOCKET HD SET, 6-32 X 3

0076 7500-0774-01 1 EA GASKET, PORON, 0.5 X 0.5 X 1.8
0082 7200-0014-04 12 EA WASHER, FLAT, SS, #4
0083 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0084 7200-0014-08 3 EA WASHER, FLAT, SS, #8
0085 7200-0016-08 1 EA WASHER, LOCK, EXTERNAL, #8
0086 7500-0389-01 1 EA PIN, DOWEL
0087 7500-1089-01 1 EA CLAMP,CABLE,3/16 FIXED DIA,BLK
0092 7500-0108-02 1 EA CABLE TIE, 11"
0093 7500-0171-01 2 EA CLAMP, CABLE, FLAT RIBBON, 1 1
0094 9600-0372-01 B 1 EA CLAMP, CABLE, GOLD ALODINE, 3/
0095 7500-2037-01 1 EA CLAMP,CABLE,1/8 DIA NYL,OPEN
0096 7500-2061-01 1 EA STANDOFF,1/4 RND,M/F,4-40 X 1-
0097 7500-0677-01 1 EA RTNR, RING, E, EXT, .094 SHAFT
0098 7000-2154-01 1 EA SCREW,CAPTIVE,4-40 X 15/32,SST
0099 4001-8901-02 INC 1 EA GUIDE,UPPER,CABLE,GRIPPER,LEFT
0151 7200-0014-10 1 EA WASHER, FLAT, SS, #10


9700-3952-02 REV INC ARM SERVO ASSEMBLY,LEFT
0001 9700-4085-02 INC 1 EA ARM ASSEMBLY ROTATE,LEFT

0002 9700-3965-01 INC 1 EA SERVO/DRIVER ASSEMBLY
0003 9700-3954-01 INC 1 EA GRIPPER TILT ASSEMBLY
0004 9700-4103-01 INC 1 EA ARM OPTO ASSEMBLY,RIGHT
0004 9700-4103-02 INC 1 EA ARM OPTO ASSEMBLY,LEFT
0005 9700-4102-01 INC 1 EA MOTOR ASSEMBLY,ARM ROTATE
0010 9700-4100-01 INC 1 EA CABLE ASSEMBLY,ARM VERTICAL
0011 9700-4104-01 INC 1 EA CABLE ASSY,BRAKE,ARM ROTATE
0016 4001-8514-01 INC 1 EA GUIDE,CABLE,GRIPPER
0016 4001-8514-02 OB 1 EA GUIDE,CABLE,GRIPPER
0017 4001-8725-02 INC 1 EA BRACKET,ANTI-ROTATION,GRIPPER
0018 4001-8718-01 INC 1 EA ROTOR
0019 4001-8716-01 INC 2 EA RING,PRELOAD
0020 4001-8281-02 INC 1 EA HOUSING,REDUCER,LEFT
0021 4001-8280-01 INC 1 EA PLATE,COVER
0022 4001-8251-01 INC 1 EA BRACKET,MOUNTING,MOTOR
0023 4001-8264-01 INC 1 EA CLAMP,BAND
0024 4001-8265-01 INC 1 EA SADDLE,BAND
0025 4001-8694-02 INC 1 EA SHIELD,PROTECTION STRIP,LEFT
0027 4001-8695-02 INC 1 EA SHIELD,CABLE CRADLE,LEFT
0028 4001-8413-02 INC 1 EA COVER,CHASSIS,MOTOR CONTROL,L
0029 4001-7877-01 A 2 EA GUIDE WHEEL
0030 4001-8277-02 INC 1 EA CRADLE,ARM LEFT
0031 4001-8124-01 A 2 EA GUIDE PIN, UPPER
0041 7500-0943-01 2 EA PIN, ROLL, .135 OD X .562 LG,
0042 7500-0675-01 4 EA STANDOFF, 1/4 HEX, M/F, 4-40 X
0044 7500-0073-01 1 EA BEARING, BALL, .125ID X .250 O
0051 7200-0014-01 001 1 EA WASHER, FLAT, S.S, #10
0051 7200-0014-10 1 EA WASHER, FLAT, SS, #10


9700-3952-02 REV INC ARM SERVO ASSEMBLY,LEFT

0076 7500-0774-01 1 EA GASKET, PORON, 0.5 X 0.5 X 1.8
0082 7200-0014-04 12 EA WASHER, FLAT, SS, #4
0083 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0084 7200-0014-08 3 EA WASHER, FLAT, SS, #8
0085 7200-0016-08 1 EA WASHER, LOCK, EXTERNAL, #8
0086 7500-0389-01 1 EA PIN, DOWEL
0087 7500-1089-01 1 EA CLAMP,CABLE,3/16 FIXED DIA,BLK
0092 7500-0108-02 1 EA CABLE TIE, 11"
0093 7500-0171-01 2 EA CLAMP, CABLE, FLAT RIBBON, 1 1
0094 9600-0372-01 B 1 EA CLAMP, CABLE, GOLD ALODINE, 3/
0096 7500-2061-01 1 EA STANDOFF,1/4 RND,M/F,4-40 X 1-
0097 7500-0677-01 1 EA RTNR, RING, E, EXT, .094 SHAFT
0098 7000-2154-01 1 EA SCREW,CAPTIVE,4-40 X 15/32,SST
0099 4001-8901-01 INC 1 EA GUIDE,UPPER,CABLE,GRIPPER,RIGH
0151 7200-0014-10 1 EA WASHER, FLAT, SS, #10

8 7 6 5 4 3 2 1
REVISION
Reproduction Forbidden without the specific written permission of Asyst ZONE REV. DESCRIPTION APPROVED DATE
any right in, or license to use the subjectmatter of the drawing orany - 1 PROTOTYPE - -
designs or technicalinformation shown theron, or any right to reproduce NOTES: UNLESS OTHERWISE SPECIFIED
the drawing oranypartthereof,except for manufacture by vendors for - 3 PCN PO238 PILOT RELEASE JK 4/11/96
Asyst Technologies, Inc. and for manufacture under thecorporation's
written license. Noright to reproduce this drawing is granted for the
subjectmatter thereof unless by written agreement with or written
REF, SNAP-IN 22 TO ALL SCREWS WITHOUT LOCK WASHERS.
2 MOUNTING PLATE
D D
3 22 3 LUBRICATE GEAR TEETH OF ITEMS 2 AND 7
WITH GREASE, ITEM 53 .
4 ALIGN ITEM 22 TO ITEM 2 USING ALIGNMENT
TOOL SUPPLIED WITH ITEM 22 .
ASYST CORPORATE PROCEDURE 2000-0312-01.
2000-0311-01,SEC 15.0. COSMETIC?: YES X NO
31 3X 10 30 2X REF 22
STEP 1 WORM HOUSING 2X 8

2X 34
2X 42 WORM GEAR
C C
2X 17
12 WORM HOUSING
6
18
2X 36 26
TILT SENSOR
2X 44
2X 48
STEP 4 GRIPPER TILT
50 6X
7
3 19 40 2X
B B
STEP 2 WORM GEAR

11
WIRE LIST
SIGNAL
FROM COLOR TO
NAME
MT-1 BLK MOTOR-2 DR- 4
MT-2 - N/C E GRIPPER TILT
MT-3 - N/C KEY
MT-4 RED MOTOR-1 DR+
MOTOR
STEP 5 FINAL
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
A
MOTOR-1 3X 35 - - -
.XX -
-
3X 43
MATERIAL
DRAWN
VENDOR_
REV_
9700-3958-01
- -
SEE B.O.M. MAGILL 3/22/96 GRIPPER TILT ASSEMBLY
3X 47 9700-3952-XX LPT FINISH
CHECKED
J.KYFFIN 4/2/96
3 M.NG 4/2/96
D 9700-3954-01 INC
STEP 3 MOTOR FIRST USED ON DO NOT SCALE DRAWING
MFG. ENGR.
A.DEPEW 4/2/96 SCALE
A3954D1I
1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1

9700-3954-01 REV INC GRIPPER TILT ASSEMBLY

0002 9700-3984-01 A 1 EA SHAFT ASSEMBLY,WORM
0003 9700-3958-01 A 1 EA CABLE ASSY,MOTOR,GRIPPER,TILT
0004 9700-4116-01 INC 1 EA MOTOR ASSY,GRIPPER TILT
0006 4001-8242-01 INC 1 EA FRAME,GRIPPER TILT
0007 4001-8243-01 INC 1 EA GEAR,WORM,COUPLER
0008 4001-8244-01 A 2 EA FLAG,GRIPPER TILT
0009 4001-8245-01 INC 1 EA POST,OPTO SWITCH
0010 4001-8246-01 INC 1 EA HOUSING,WORM
0011 4001-8249-01 INC 1 EA PLATE,GRIPPER TILT
0012 4001-8696-01 INC 1 EA SHAFT COUPLOR
0017 7500-0507-01 2 EA BEARING, RADIAL, 1.0625 OD X .
0018 7500-1013-01 1 EA RTNR,RING,EXT,.625 SHAFT DIA S
0019 7500-1043-01 1 EA BELT,TMG,85 GRV,.080P,.25W,6.8
0022 6900-1134-01 1 EA ENCODER, OPTICAL, 3-CHANNEL, 5
0026 7000-0613-04 1 EA SCREW, SET, SOC HD, SS, 8-32 X
0047 7200-0014-06 3 EA WASHER, FLAT, SS, #6
0048 7200-0014-10 2 EA WASHER, FLAT, SS, #10
0052 7200-0014-02 4 EA WASHER, FLAT, SS, #2
0053 7500-0441-01 0 EA LUBRICANT, GREASE, HI-TEMP, DI

8 7 6 5 4 3 2 1
REVISION
issuedandneitherreceipt nor possession thereof confers or transfers
any right in, orlicense to use the subject matter of the drawing orany - 1 PROTOTYPE - -
the drawing or any part thereof, except for manufacture by vendors for - 2 PCN PO238, PILOT RELEASE JK 4/11/96
- 3 PCN P0253 JK 5/14/96
4 PCN P0267 JK 6/19/96
5 PCN P0281 JK 6/26/96
6 PCN P0305 JK 8/6/96
D PIN 1 VIO INC PCN P0381; INACTIVATE JK 1/9/97 D
2 SEE SHT 2 FOR

ASSY INSTRUCTIONS
PRIOR TO MOUNTING
J90 J3
TO ASSY J90 J3
3
PIN 1
C C
J2 J5
6
5
5 REF
6 REF
1

7X 8
B B
2. APPLY ADHESIVE, ASYST P/N 7500-0716-01, BRN BRN
3 CLIP ALL PINS FROM ITEM 9 EXCEPT PINS 7, 7 7X

12, 13, 14.
1 2 3 4 5
4 ON ITEM 2 , CUT PIN 12 FROM EXISTING CHIP
AT U11 AND REMOVE FROM PC BOARD.
5 PIGGYBACK ITEM 9 ON EXISTING CHIP AT U11 (ON

ITEM 2 ) AND SOLDER PINS 7, 13, AND 14 TOGETHER.
11 DETAIL A
6 ON ITEM 2 , SOLDER JUMPER WIRE, ITEM 10 , FROM DIP SWITCH SETTINGS
ITEM 9 (PIN 12) TO PAD U11-12. SEE DETAIL A
7 ON ITEM 2 , CUT TRACE BETWEEN J5-11 AND 10 ON ITEM 2 , ADD LOCTITE TAK PAK 382 ADHESIVE,
ASYST P/N 7500-0761-01, OR EQUIVALENT, WHERE
U10-4 ON COMPONENT SIDE OF BOARD. REQUIRED TO SECURE JUMPERS TO PCB.
QTY MATERIAL
REQD SPECIFICATION
8 ON ITEM 2 , ADD JUMPER, ITEM 10 , BETWEEN
11 SET DIP SWITCH AS SHOWN IN DETAIL A: SWITCHES 1, 2, PARTS LIST
U10-4 FEED THRU AND U11-12 ON SOLDER SIDE OF 3, AND 5 IN DOWN POSITION, SWITCH 4 IN UP POSITION.
A BOARD. JUMPER TO BE MINIMUM LENGTH REQUIRED
TOLERANCES ARE:
A
SO THAT JUMPER LIES FLAT AGAINST BOARD. 12. IDENTIFY PART PER MARKING METHOD 12 OF .XX -
- - - .XXX - -
APPROVALS DATE
ASYST CORPORATE PROCEDURE 2000-0312-01. MATERIAL
9 ON ITEM 2 , ADD JUMPER, ITEM 10 , BETWEEN DRAWN
- -
SEE B.O.M. MAGILL 3/26/96 SERVO/DRIVER ASSEMBLY
U11-13 AND J5-11 ON SOLDER SIDE OF BOARD. 13. PACKAGE PER ASYST WORKMANSHIP CHECKED
9700-3952-XX LPT
JUMPER TO BE MINIMUM LENGTH REQUIRED SO STANDARDS 2000-0311-01, SEC 15.0
FINISH J.KYFFIN 4/2/96
THAT JUMPER LIES FLAT AGAINST BOARD. COSMETIC PART: YES X NO NEXT ASSY PRODUCT N/R
MFG. ENGR.
M.NG 4/2/96
D A3965D1I 9700-3965-01 INC
FIRST USED ON DO NOT SCALE DRAWING A.DEPEW SCALE 1/1 SHEET 1 OF 2
4/2/96
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALLPERSONSRECEIVING THIS CONFIDENTIAL DRAWING:
ZONE REV. DATE
issued and neither receipt nor possession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any - - SEE SHEET 1 - -
D COMPONENT SIDE D
9
3
U10
6 10
C C
J5
4
U11
REF 2
10 9 10 2 REF
EXISTING JUMPER
10 8 10
B B
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
A
SOLDER SIDE
.XX -
- - - .XXX - - APPROVALS DATE
MATERIAL
DRAWN
- -
SEE SHEET 1 MAGILL 4/24/96 SERVO DRIVER ASSEMBLY
CHECKED
NEXT ASSY PRODUCT SEE SHEET 1
MFG. ENGR.
M. NG 4/2/96
D A3965D2I 9700-3965-01 INC
FIRST USED ON DO NOT SCALE DRAWING A. DEPEW 4/2/96 SCALE SHEET
1/1 2 OF 2
8 7 6 5 4 3 2 1

9700-3965-01 REV INC SERVO/DRIVER ASSEMBLY
0001 4001-8279-01 INC 1 EA PLATE,HANGER

0002 6900-1284-01 OB 1 EA RELACED BY 3200-1077-01
0003 6900-1283-01 1 EA PCB,MOTION CONTROLLER,SERVO,3
0004 9700-4105-01 A 1 EA CABLE ASSY,SERVO,AMP POWER
0005 9700-4106-01 A 1 EA CABLE ASSY,SERVO/AMP J5
0007 7500-0399-07 7 EA STANDOFF,1/4 HEX,M/F,6-32 X 1.
0009 6200-1009-01 1 EA IC, 74LS04
0010 6100-0923-30 0.42 FT WIRE,30 AWG,UL 1423,SOLID,KYNA

8 7 6 5 4 3 2 1
NOTICETOALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISION
ReproductionForbiddenwithoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Milpitas,California. Thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
designsortechnicalinformationshownthereon,oranyrighttoreproduce . A ECN N4205: PRODUCTION RELEASE JK 12/5/97
. B ECN N4266 JK 2/9/98
H subjectmatterthereofunlessbywrittenagreementwithorwritten
W23 . C ECN N4272 JK
H
2/17/98
D ECN N4559 JK 12/7/98
J6 J9
U1 J7
J3
U2 4
J10
J4
J11
J15 MANUFACTURING PROCESS INSTRUCTIONS

J12
OPERATIONS NO: 001
J5 W1
G G
J13
W3
W4 W5
J14
W12 W7
W6
W11
W8
1 CHECK PARTS FOR DAMAGES AND SCRATCHES.
W10
W21 2 INSTALL JUMPERS PER JUMPER CONFIGURATIONS.
W19 J15
W2 W18
W14 W15 W17 J16
W9 3 CLIP AND REMOVE FROM ITEM 5 , J11, ROW B PIN 10.
1 3 1 3 S0 S1 W16
4 CLIP AND REMOVE FROM ITEM 5 , J12, ROW C PIN 20.

W22
13 15 13 15
F 5 VERIFY ABOVE STEPS. F
W13 W24
W20
E 5 J1 J2 E
6
JUMPER CONFIGURATION (ITEM 4) JUMPER CONFIGURATION (ITEM 5)

J4
NAME PLACEMENT NAME PLACEMENT
J3
W1 1-2 J7 OPEN
D J7 J8
J9 J11 W2 1-2 J8 1-2, 3-4, 5-6, 7-8 D
J10 W3 OPEN J9 3-4, 5-6
J11
W4 2-3 3-4 COM6-IRQ11, SERVO
J12 W5 2-3 7-8 COM8-IRQ15, INX SERIAL
J10
W6 1-2 13-14 COM5-IRQ7, SPARE(LPT I/O)
W7 1-2 17-18 COM7-IRQ5, TAG SERIAL
W8 OPEN
W9 1-2
JUMPER CONFIGURATION (ITEM 6)
W10 OPEN
W11 OPEN NAME PLACEMENT
C C
W12 OPEN 1-2, 3-4, 5-6, 9-10,
J3
W13 OPEN 11-12, 15-16
W14 4-5, 7-10, 8-9, 11-12, 13-14 J4 OPEN
W15 9-12, 10-11, 14-15
W16 1-2
W17 1-2
W18 OPEN
TABULATION
W19 OPEN
W20 OPEN -01 RIGHT
B W21 1-2 -02 LEFT B
W22 OPEN
W23 1-2
W24 OPEN
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
DIMENSIONSAREININCHES
TOLERANCES ARE:
TECHNOLOGIES, INC.
. .XX - -
. . .XXX - APPROVALS DATE
MATERIAL
. DRAWN
. . SEE BOM B.CARLSON 3/25/96 CPU ASSY
A 9700-3740-01 LPT
. CHECKED
4/12/96
A
FINISH
. J. KYFFIN
N/A DES. ENGR. SIZE CAD FILENAME DWG NO. REV.
NEXTASSY USED ON
M. NG 4/12/96
.
MFG.ENGR.
E A3970E1D 9700-3970-XX D
APPLICATION DO NOT SCALE DRAWING 4/12/96
A. DEPEW SCALE
3/4 SHEET 1 OF 3
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
designsortechnicalinformationshownthereon,oranyrighttoreproduce . - SEE SHEET 1 - -
permissionfromtheCompany. H
13 2X
16 2X
G G
GRN/YEL (TERM 2)
20 REF 4
9
2X 13 4X 11
25
2X 21 4X 15
A A GRN/YEL
8X 23 BRN
4X 11 REF 9 VIO
TB2
4X 15 J1
BLU 8 REF
F1 3 GRN/YEL 1
18 J3
BRN 2 9700-4074-01
F F
REV_
J3
P2 22 4X 3 VENDOR_ BRN 8 REF
16 VIO 4
2X 4X
F2 16
17
24 P3
+ -
F3 PART OF ITEM 8
4X 19 V.ADJ ON RC RCG VB CB +S -S AC(L) AC(N) FG
ENET
GRN/YEL 8 REF
PARALLEL SERIAL3/SERIAL4 SERIAL1/SERIAL2 TB1
J6 (PART OF P5
FLOPPY SCSI
J6 (PART OF VIEW A-A

IDE
ITEM 5 )
UTIL
P4 ITEM 5 ) P10 J4
E P16
TOP VIEW OF ITEM 3 E
LEFT SIDE OF ITEM 1 1

NOT SHOWN FOR CLARITY
26 10 14 REF
12 2X P20
16 2X GRN/YEL
(TERM 1)
14 4X FAR SIDE
GRN/YEL
1 3
(TERM 2)
D D
8
13 2X
5 REF
6 REF 21 2X
OPERATIONS NO: 002

J6
C C
TABULATION
-01 RIGHT 1 CHECK PARTS FOR DAMAGES AND SCRATCHES.
-02 LEFT REMOVE AND DISCARD JUMPER ACROSS PS-TB1-RCG

4 REF 2
AND PS/TB1-RC. 3
3 INSTALL 19 FOR CONNECTOR J11 AND J13 OF 4 AS SHOWN.

WIRE TABLE
4 ADJUST 3 OUTPUT TO 24.75 TO 25.0 V PRIOR TO ASSEMBLY.
FROM COLOR TO SIGNAL NAME/REF
5 ASSEMBLE ITEMS NOT IDENTIFIED PER DRAWING.
J20-1 BRN TB1-AC(L) ITEM 8 TO ITEM 3
B 6 VERIFY ABOVE STEPS. B
TERM 2 GRN/YEL TB1-FG ITEM 8 TO ITEM 3
J20-3 BLU TB1-AC(N) ITEM 8 TO ITEM 3
J1-1 GRN/YEL TB1-FG ITEM 9 TO ITEM 3
J1-2 BRN TB2(-) ITEM 9 TO ITEM 3
-01 SHOWN
J1-3 NC - -
J1-4 VIO TB2(+) ITEM 9 TO ITEM 3 ITEM
QTY
REQD
PARTNUMBER DESCRIPTION
MATERIAL
SPECIFICATION
PARTS LIST
J1 - P1 ITEM 9 TO ITEM 26 UNLESS OTHERWISE SPECIFIED CONTRACTNO.
TOLERANCES ARE:
TECHNOLOGIES, INC.
J4 - P4 ITEM 10 TO ITEM 26 FRACTIONS DECIMALS
-
ANGLES
. .XX -
P10 - J10 ITEM 10 TO ITEM 4 MATERIAL . DRAWN
. . SEE SHEET 1 B.CARLSON 3/25/96 CPU ASSY
A P16 - J16 ITEM 20 TO . CHECKED A
.
N/A DES. ENGR. SIZE CADFILENAME DWGNO. REV.
NEXT ASSY USED ON
M. NG 4/12/96
.
MFG.ENGR.
E A3970E2D 9700-3970-XX D
APPLICATION DO NOTSCALE DRAWING A. DEPEW 4/12/96 SCALE 3/4 SHEET 2 OF 3
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
designsortechnicalinformationshownthereon,oranyrighttoreproduce . . SEE SHEET 1 . .
permissionfromtheCompany. H
2
2X 13
2X 16
G G
GRN/YEL
BRN
VIO
TB2 9 REF
BLU 8 REF
25
GRN/YEL 1 GRN/YEL
9700-4074-01 2 BRN
(TERM 2) REV_
GRN/YEL VENDOR_ 3
20 4 VIO
9 8 REF
13 2X
F BRN 8 REF F
21 2X
A A + -
4 REF
23 8X
RC V.ADJ ON RCG VB CB +S -S AC(L) AC(N) FG
11 4X
PART OF
15 4X P1 ITEM 8
J1
TB1
3 F1
J3
4X 22 J3
P2
4X 16 19 4X F2 VIEW A-A
P3 TOP VIEW OF ITEM 3
E F3
E
26
ENET 2X 12
2X 16
4X FAR SIDE 14
FLOPPY SCSI
UTIL IDE P5
J4 P10
J6 (PART OF P4
P16 ITEM 5 )
REF 14
D 18 RIGHT SIDE OF ITEM 1 D
GRN/YEL NOT SHOWN FOR CLARITY
(TERM 1) P20 16
2X
1 17
10
GRN/YEL 24
(TERM 2)
3 1 MANUFACTURING PROCESS INSTRUCTIONS

J6 (PART OF
ITEM 5 )
OPERATIONS NO: 003
8 TQC = QUALITY CHECK POINT MOVE = MOVEMENT OF PRODUCT
13 2x VAL = VALUE ADDED OPERATION VER = VERIFICATION OF TASK
C C
21 2x
5 REF
6 REF
1 CHECK PARTS FOR DAMAGES AND SCRATCHES.
REMOVE AND DISCARD JUMPER ACROSS PS-TB1-RCG

2
AND PS/TB1-RC. 3
WIRE TABLE
3 INSTALL 19 FOR CONNECTOR J11 AND J13 OF 4 AS SHOWN.
J20-1 BRN TB1-AC(L) ITEM 8 TO ITEM 3 4 ADJUST 3 OUTPUT TO 24.75 TO 25.0V PRIOR TO ASSEMBLY.
J6
TERM 2 GRN/YEL TB1-FG ITEM 8 TO ITEM 3 5 ASSEMBLE ITEMS NOT IDENTIFIED PER DRAWING.
B J20-3 BLU TB1-AC(N) ITEM 8 TO ITEM 3 B

6 VERIFY ABOVE STEPS.
J1-1 GRN/YEL TB1-FG ITEM 9 TO ITEM 3
J1-2 BRN TB2(-) ITEM 9 TO ITEM 3
J1-3 NC - -
4 REF
J1-4 VIO TB2(+) ITEM 9 TO ITEM 3
J1 - P1 ITEM 9 TO ITEM 26
QTY MATERIAL
J4 - P4 ITEM 10 TO ITEM 26 REQD
PARTS LIST
SPECIFICATION
P10 - J10 ITEM 10 TO ITEM 4

UNLESS OTHERWISESPECIFIED
CONTRACTNO.
TOLERANCESARE: TECHNOLOGIES, INC.

P16 - J16 ITEM 20 TO -
-02 SHOWN
. .XX -
MATERIAL .
CPU ASSY
DRAWN
. . 3/25/96
BOM B.CARLSON
A 9700-3740-02 LPT
. CHECKED
4/12/96
A
FINISH
. J. KYFFIN
N/A DES. ENGR. SIZE CAD FILENAME DWGNO. REV.
NEXT ASSY USEDON
. M. NG 4/12/96
MFG.ENGR.
E A3970E3D 9700-3970-XX D
APPLICATION DO NOTSCALE DRAWING A. DEPEW 4/12/97 SCALE 3/4 SHEET 3 OF 3
8 7 6 5 4 3 2 1

9700-3970-01 REV D CPU ASSY,LPT,RIGHT
0001 4001-8548-01 A 1 EA CHASSIS,MSC/P.S. ELECTRONICS,R

0002 4001-8549-01 A 1 EA PLATE,CPU/P.S. COVER
0003 6200-2009-01 1 EA POWER SUPPLY, 24V/14A, ENCLOSE
0004 6900-1285-01 1 EA PCB,CPU 486/50 W/4M RAM
0005 6900-1220-01 1 EA PCB ASSY, QUAD RS232 SERIAL CA
0005 6900-1290-01 1 EA PCB,RS-232,QUAD SERIAL,16 BIT,
0006 6900-1355-01 . 1 EA PCB,48 CHAN I/O W/INTERRUPT
0006 6900-1195-01 1 EA PCB, 48 CHAN PI/O W/INTERRUP,P
0007 3200-1061-01 E 1 EA PCB ASSY,DC-DC CONVERTOR,SING
0007 3200-1061-02 E 1 EA PCB ASSY,DC-DC CONV MULTI MOD
0008 9700-4073-01 INC 1 EA CABLE ASSY,A.C.TO P.S.
0008 9700-4509-01 A 1 EA CABLE ASSY, AC LINE FILTER
0009 9700-4074-01 A 1 EA CABLE ASSY,P.S.TO DC-DC PCB
0010 9700-4075-01 A 1 EA CABLE ASSY,DC-DC TO CPU
0011 7000-2036-05 8 EA SCREW, PHIL PAN HD, SS, #4 X 5
0012 7000-2034-08 2 EA SCREW, PHIL PAN HD, SS, M4 X 1
0014 7500-0673-01 4 EA SPACER, .310 OD X .194 ID X .2
0017 7200-0045-01 2 EA WASHER, FLAT, SS, .174ID X .30
0018 7500-0645-01 2 EA CLAMP, CABLE, NYLON, 5/16 DIA,
0020 9700-4227-01 A 1 EA CABLE ASSEMBLY,SPEAKER,CPU
0021 7100-0118-32 4 EA NUT, KEP, SS, 8-32
0022 7000-2051-16 4 EA SCREW, PHIL PAN HD, M4 X 16, S
0023 7500-2090-01 8 EA STANDOFF,3/16 RND,M/F,4-40 X .
0024 7000-2054-16 2 EA SCREW, PHIL PAN HD, M4 X 16


9700-3970-02 REV D CPU ASSY,LPT,LEFT
0001 4001-8548-02 A 1 EA CHASSIS,MSC/P.S. ELECTRONICS,L

0002 4001-8549-01 A 1 EA PLATE,CPU/P.S. COVER
0003 6200-2009-01 1 EA POWER SUPPLY, 24V/14A, ENCLOSE
0004 6900-1285-01 1 EA PCB,CPU 486/50 W/4M RAM
0005 6900-1220-01 1 EA PCB ASSY, QUAD RS232 SERIAL CA
0005 6900-1290-01 1 EA PCB,RS-232,QUAD SERIAL,16 BIT,
0006 6900-1355-01 . 1 EA PCB,48 CHAN I/O W/INTERRUPT
0006 6900-1195-01 1 EA PCB, 48 CHAN PI/O W/INTERRUP,P
0007 3200-1061-02 E 1 EA PCB ASSY,DC-DC CONV MULTI MOD
0008 9700-4073-01 INC 1 EA CABLE ASSY,A.C.TO P.S.
0008 9700-4509-01 A 1 EA CABLE ASSY, AC LINE FILTER
0009 9700-4074-01 A 1 EA CABLE ASSY,P.S.TO DC-DC PCB
0010 9700-4075-01 A 1 EA CABLE ASSY,DC-DC TO CPU
0011 7000-2036-05 8 EA SCREW, PHIL PAN HD, SS, #4 X 5
0012 7000-2034-08 2 EA SCREW, PHIL PAN HD, SS, M4 X 1
0014 7500-0673-01 4 EA SPACER, .310 OD X .194 ID X .2
0017 7200-0045-01 2 EA WASHER, FLAT, SS, .174ID X .30
0018 7500-0645-01 2 EA CLAMP, CABLE, NYLON, 5/16 DIA,
0020 9700-4227-01 A 1 EA CABLE ASSEMBLY,SPEAKER,CPU
0021 7100-0118-32 4 EA NUT, KEP, SS, 8-32
0022 7000-2051-16 4 EA SCREW, PHIL PAN HD, M4 X 16, S
0023 7500-2090-01 8 EA STANDOFF,3/16 RND,M/F,4-40 X .
0024 7000-2054-16 2 EA SCREW, PHIL PAN HD, M4 X 16

8 7 6 5 4 3 2 1
REVISION
ZONE REV. DATE
issued and neitherreceipt norpossession thereof confers or transfers
any right in, or license to use the subject matter of the drawing orany
A ECN N4139; PRODUCTION RELEASE JK 10/29/97
designs or technicalinformation shown theron, or any right to reproduce
subject matter thereof unless by written agreement with or written 12
11 2X
14 10 MANUFACTURING PROCESS INSTRUCTIONS

D D
13 REF 3 4
OPERATIONS NO: X
4 REF TQC = QUALITY CHECK POINT MOVE = MOVEMENT OF PRODUCT
1 INSPECT ALL PARTS FOR SCRATCHES AND DAMAGE.
2 USE T1 AND T3 TO INSTALL 9 INTO 2, LEAVE ONE

2X 6
X INCH OF THREAD. SEE DETAIL "B".
SECTION A-A 3 USE T4 TO MOUNT SPRING, 13 TO THE BASE, 1 PER VIEW A-A.
4 INSTALL ITEMS 15, 16, 17 ON SHAFT 5 PER DETAIL C, SLIDE THE

SCALE: 2/1
1
X SHAFT THRU THE SPRING 13, INSTAILL ITEMS 15, 16, 17 TO THE
C X OTHER SIDE OF 8 BY LIFTING UP THE END. C

5 REMOVE SET SCREW SUPPLIED WITH 17 AND INSTALL 18.
6 PUSH 8 AGAINST ONE SIDE OF 1, TIGHTEN SET SCREW 18 OF 17.

9 2X
X USE T2 TO SET CLEARANCE AT OTHER SIDE OF 1 AND THEN
X TIGHTEN THE SET SCREW 18 OF THE OTHER 17.
4X 10 7 USE T2 TO INSTALL THE PLATE, 3 (2X) USING 10.
1.00±.10 X USE LOCTITE, 14.
A 8
9
INSTALL 6 TO THE SHAFT, 4 .
INSTALL PLATE, 3 USING 11, 10 AND 12 .

4 REF
14 10 CHECK THE ASSEMBLY TO MAKE SURE WHEELS ARE TURNING
3X 3 X FREELY.
B REF 2 A 2X .010 B
SEE DETAIL TOOL LIST
SEE DETAIL C 5
B T1 1 X POWER DRILL
2 2X
15 T2 1 X FEELER GAUGE .010 THK
2X 16
B 18 REMOVE SUPPLIED T3 1 X VISE
DETAIL SET SCREW AND
REPLACE WITH 18 T4 1 X LONG NOSE PLIERS
SCALE: 2/1
NOTES: UNLESS OTHERWISE SPECIFIED QTY MATERIAL

REQD SPECIFICATION
17 PARTS LIST
C
A
2000-0311-01.
DETAIL TOLERANCESARE:
FRACTIONS DECIMALS
.XX
ANGLES
2. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE . .XXX APPROVALS DATE
SCALE: 2/1 MATERIAL
PROCEDURE 2000-0311-01. 001 .
DRAWN
BASE ASSEMBLY
2X SEE B.O.M. D.FRALEY 3/21/96
PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 1 . CHECKED

3. 9700-3962-XX LPT FINISH
J.KYFFIN 4/2/96
.
COSMETIC PART: YES X NO NEXT ASSY PRODUCT N/A
.
MFG. ENGR.
M.NG 4/2/96
D A4040D1A 9700-4040-01 A
FIRST USED ON DO NOT SCALE DRAWING SCALE 1/1 SHEET 1 OF 1
A.DEPEW 4/2/96
8 7 6 5 4 3 2 1

9700-4040-01 REV A BASE ASSEMBLY
0001 4001-8524-01 B 1 EA BASE

0002 4001-8525-01 A 2 EA BLOCK,ADJUSTABLE
0003 4001-8526-01 A 3 EA PLATE,RETAINING
0004 4001-8707-01 A 1 EA SHAFT,WHEEL,14.43
0005 4001-8708-01 A 1 EA SHAFT,KINEMATIC,16.41
0006 7500-1022-01 2 EA WHEEL, 1.38 W X 3" OD .50 BORE
0007 7500-1064-01 1 EA SPRING,EXT,.240 OD,2.00 LG,2.0
0008 7500-1063-01 2 EA BRG,BALL,.500 ID,1.125 OD,.312
0009 7000-2146-32 2 EA SCREW,BUT HD CAP,5/16-24 X 3.5
0011 7200-0014-08 2 EA WASHER, FLAT, SS, #8
0013 7500-2038-01 1 EA SPRING,EXT,.187 OD X 2.00 LG,3
0015 4001-9861-01 A 2 EA ROLLER,KINEMATIC
0016 7200-0102-01 4 EA WASHER,THR,.5X.813,.093THK,NYL
0017 7500-0081-01 2 EA COLLAR,SET SCR,.5X1.0X.437,SST
0018 7000-0615-04 2 EA SCREW,SET,SKT HD,1/4-20 X 1/4

8 7 6 5 4 3 2 1
REVISION
ZONE REV. DATE
the drawing oranypartthereof,except for manufacture by vendors for AC LINE (L) B ECN N4212 JK 12/30/97
AC NEUTRAL (N)
5 5X P1 4X
11 12
FL1 3 17 13 4X
D 2X 8 D
2X 9
OPERATIONS NO: 001

AC POWER LAN TEACH
PENDT SET = SET-UP REQUIRED FOR TASK
REF CHASSIS GND STUD
PORT A PORT C PARALLEL TQC = QUALITY CHECK POINT MOVE = MOVEMENT OF PRODUCT
PORT B PORT D PORT E
1 INSPECT PARTS FOR DAMAGES AND SCRATCHES.
2 REMOVE STANDOFFS FROM P1 CONNECTOR OF 1.
3 PLACE 7 OVER 1 USING 12, 13 (4X), 11 (5X) AND 17.
4 INSERT 5 INTO 7 AS SHOWN.

REF FUSEHOLDER PART OF ITEM 3 EARTH GND (E)
5 INSERT 3 INTO 7 USING 8 AND 9 (2X).
C C
7 6 WIRE 6 TO 3 USING 16, PER WIRE TABLE.
7 CRIMP 14 TO 15 USING T1 AND SOLDER TO GROUND OF

REF PART OF ITEM 1 X 3 AS SHOWN.
2X 4 REMOVE AND REINSTALL
14 AS SHOWN 8 INSTALL 4 INTO 3 (2X) AFTER SOLDERING WIRES.
15 4.00 .25 LONG

TOOL LIST
T1 1 90298-2 CRIMP TOOL
B B
2X 10 (E)
1
(N) (L)
3X 16
WIRE TABLE
GRN/YEL
TABULATION
BLU BRN -01 RIGHT,
J20-1 BRN FL1-L AC LINE
AS SHOWN
J20-2 - NC -
-02 LEFT,
J20-3 BLU FL1-N AC NEUTRAL SEE NOTE 7
6 ITEM 6 GRN/YEL GND STUD CHASSIS GND
NOTES: UNLESS OTHERWISE SPECIFIED FL1-E GRN/YEL GND STUD CHASSIS GND, ITEM 14
J20
1. MANUFACTURE PER ASYST TECHNOLOGIES ITEM
QTY
MATERIAL
REQD SPECIFICATION
WORKMANSHIP STANDARDS 2000-0311-01. PARTS LIST
GRN/YEL UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 2 ROTATE ITEM 3 180 FOR -02 ONLY.
TOLERANCES ARE:
A
.XX -
. .XXX - -
APPROVALS DATE
MATERIAL
.
DRAWN CONNECTOR PANEL
B.CARLSON 3/20/96
SEE BOM
. CHECKED ASSY, I/O
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 9700-3962-XX LPT FINISH J. KYFFIN 4/12/96
.
COSMETIC PART: YES X NO PIN 1 NEXT ASSY PRODUCT N/A
DES. ENGR.
M. NG 4/12/96
.
MFG. ENGR.
D A4084D1B 9700-4084-XX B
8 7 6 5 4 3 2 1

9700-4084-01 REV B CONNECTOR PANEL ASSY,I/O,RIGHT
0001 3200-1062-01 B 1 EA PCB ASSY,CONNECTOR I/O

0003 6200-6007-01 1 EA FILTER,POWER LINE,6AMP,W/5X20M
0004 6100-3045-01 2 EA FUSE,4 AMP,SLO-BLO,250V,5 X 20
0005 6100-2475-00 1 EA JACK,RJ45,COUPLER,SNAP-IN PNL
0006 9700-4078-01 A 1 EA CABLE ASSEMBLY,AC POWER
0007 4001-8573-01 B 1 EA PANEL,CONNECTOR I/O
0009 7100-0114-40 2 EA NUT, KEP, SS, #4
0010 7100-0118-32 2 EA NUT, KEP, SS, 8-32
0014 6100-2079-01 1 EA TERM,RING,INSUL,#8,22-18 AWG,
0015 6100-0254-18 0.35 FT WIRE, 18 AWG, UL 1015, GRN/YEL
0016 7500-2022-01 0.19 FT TUBING, SHRINK, 1/4" DIA., BLA
0017 7500-0716-01 0.01 EA ADHESIVE, LOCTITE 222, PURPLE
0017 7500-0278-01 0.001 EA ADHESIVE, LOCTITE 242, BLUE


9700-4084-02 REV B CONNECTOR PANEL ASSY,I/O,LEFT
0001 3200-1062-01 B 1 EA PCB ASSY,CONNECTOR I/O

0003 6200-6007-01 1 EA FILTER,POWER LINE,6AMP,W/5X20M
0004 6100-3045-01 2 EA FUSE,4 AMP,SLO-BLO,250V,5 X 20
0005 6100-2475-00 1 EA JACK,RJ45,COUPLER,SNAP-IN PNL
0006 9700-4078-01 A 1 EA CABLE ASSEMBLY,AC POWER
0007 4001-8573-01 B 1 EA PANEL,CONNECTOR I/O
0009 7100-0114-40 2 EA NUT, KEP, SS, #4
0010 7100-0118-32 2 EA NUT, KEP, SS, 8-32
0014 6100-2079-01 1 EA TERM,RING,INSUL,#8,22-18 AWG,
0015 6100-0254-18 0.35 FT WIRE, 18 AWG, UL 1015, GRN/YEL
0016 7500-2022-01 0.19 FT TUBING, SHRINK, 1/4" DIA., BLA
0017 7500-0716-01 0.01 EA ADHESIVE, LOCTITE 222, PURPLE
0017 7500-0278-01 0.001 EA ADHESIVE, LOCTITE 242, BLUE

8 7 6 5 4 3 2 1
REVISION
any right in, or license to use the subject matter of the drawing or any - A ECN N3979 PRODUCTION RELEASE JK 7/2/97
the drawing or any part thereof, except for manufacture by vendors for - B ECN N4192 JK 11/19/97
C ECN N4420 JK 6/16/98
PIN 1 VIO
D 4 D
2 SEE SHT 2 FOR

ASSY INSTRUCTIONS J90 J3
PRIOR TO MOUNTING J90 J3
TO ASSY
PIN 1
C C
6 5
J2 J5
6 REF 5 REF
REF 2
7X 8
BRN BRN 7X 14
B B
15 7X
1 2 3 4 5
7X
1 2 3 4 5
7
20
WORKMANSHIP STANDARDS 2000-0311-01. T3
2. APPLY ITEM 20 TO ALL SCREWS WITHOUT

LOCK WASHERS.
SEE DETAIL A 11
16
2X
2X
DETAIL A
DIP SWITCH SETTINGS 3
3 SET DIP SWITCH AS SHOWN IN DETAIL A: T1
SWITCHES 1, 2, 3, AND 5 IN DOWN POSITION,
SWITCH 4 IN UP POSITION.
QTY MATERIAL
REQD SPECIFICATION
4. IDENTIFY PART PER MARKING METHOD 12 OF PARTS LIST

ASYST CORPORATE PROCEDURE 2000-0311-01. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
TOLERANCES ARE:
A
5. PACKAGE PER ASYST WORKMANSHIP - - -
.XX -
-
STANDARDS 2000-0311-01. MATERIAL
COSMETIC PART: YES X NO - -
DRAWN
MAGILL 7/30/96 SERVO/DRIVER ASSEMBLY
SEE B.O.M.
CHECKED
9700-4279-XX LPT FINISH E.CORTEZ 11/15/96
NEXT ASSY PRODUCT N/R M.NG 11/15/96
MFG. ENGR.
D A4274D1C 9700-4274-01 C
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE SHEET
1/1 1 OF 2
8 7 6 5 4 3 2 1

9700-4085-01 REV INC ARM ASSEMBLY ROTATE,RIGHT

0003 4001-8222-01 A 1 EA WASHER,SPROCKET
0004 4001-8224-01 INC 1 EA BUSHING,SPROCKET,SHAFT
0005 4001-8257-01 INC 1 EA CASE,ARM GRIPPER,RIGHT
0006 4001-8258-01 A 1 EA COVER,ARM,RIGHT
0007 4001-8260-01 A 1 EA BRACKET,TENSIONING
0008 4001-8261-01 A 1 EA BUSHING,TENSIONING
0009 4001-8262-01 A 1 EA CAP,GRIPPER SHAFT
0010 4001-8305-01 A 1 EA SHAFT,SPEED REDUCER
0011 4001-8306-01 A 1 EA SHAFT,GRIPPER
0012 4001-8513-01 A 1 EA PLATE,SCUFF,ARM
0013 4001-8678-01 1 EA CAM,TENSIONING
0014 4001-8679-01 A 1 EA PLATE,TENSIONING,RIGHT
0015 9600-0633-01 A 1 EA SPROCKET,MODIFIED
0019 7500-1026-01 1 EA PIN,DOWEL,.1875 DIA X .875 LG,
0020 7500-1027-01 1 EA PIN,DOWEL,.250 DIA X .625 LG,S
0021 7500-1037-01 1 EA CHAIN,RLR,.250 P,.156 PITCHES
0028 7500-1080-01 1 EA SPRING,EXT,.36 OD 2.25 LG 17.2
0030 7200-0014-04 1 EA WASHER, FLAT, SS, #4
0031 7500-1088-01 0 EA LUBRICANT,GREASE,BEARING,SYNT


9700-4085-02 REV INC ARM ASSEMBLY ROTATE,LEFT

0004 4001-8224-01 INC 1 EA BUSHING,SPROCKET,SHAFT
0005 4001-8257-02 INC 1 EA CASE,ARM GRIPPER,LEFT
0006 4001-8258-02 A 1 EA COVER,ARM,LEFT
0007 4001-8260-02 A 1 EA BRACKET,TENSIONING,LEFT
0013 4001-8678-01 1 EA CAM,TENSIONING
0014 4001-8679-02 A 1 EA PLATE,TENSIONING,LEFT
0030 7200-0014-04 1 EA WASHER, FLAT, SS, #4

8 7 6 5 4 3 2 1
REVISION
any right in, or license to use the subject matter of the drawing or any - A ECN N3979 PRODUCTION RELEASE JK 7/2/97
the drawing or any part thereof, except for manufacture by vendors for - B ECN N4192 JK 11/19/97
C ECN N4420 JK 6/16/98
PIN 1 VIO
D 4 D
2 SEE SHT 2 FOR

ASSY INSTRUCTIONS J90 J3
PRIOR TO MOUNTING J90 J3
TO ASSY
PIN 1
C C
6 5
J2 J5
6 REF 5 REF
REF 2
7X 8
BRN BRN 7X 14
B B
15 7X
1 2 3 4 5
7X
1 2 3 4 5
7
20
WORKMANSHIP STANDARDS 2000-0311-01. T3
2. APPLY ITEM 20 TO ALL SCREWS WITHOUT

LOCK WASHERS.
SEE DETAIL A 11
16
2X
2X
DETAIL A
DIP SWITCH SETTINGS 3
3 SET DIP SWITCH AS SHOWN IN DETAIL A: T1
SWITCHES 1, 2, 3, AND 5 IN DOWN POSITION,
SWITCH 4 IN UP POSITION.
QTY MATERIAL
REQD SPECIFICATION

ASYST CORPORATE PROCEDURE 2000-0311-01. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
TOLERANCES ARE:
A
5. PACKAGE PER ASYST WORKMANSHIP - - -
.XX -
-
STANDARDS 2000-0311-01. MATERIAL
COSMETIC PART: YES X NO - -
DRAWN
MAGILL 7/30/96 SERVO/DRIVER ASSEMBLY
SEE B.O.M.
CHECKED
9700-4279-XX LPT FINISH E.CORTEZ 11/15/96
NEXT ASSY PRODUCT N/R M.NG 11/15/96
MFG. ENGR.
D A4274D1C 9700-4274-01 C
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE SHEET
1/1 1 OF 2
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONS RECEIVING THISCONFIDENTIAL DRAWING:
issued andneither receipt nor possession thereof confers or transfers
any right in, or license to use the subject matter of the drawing or any - - SEE SHEET 1 - -
designs or technicalinformation shown theron, or anyright to reproduce
D D
OPERATIONS NO: OO1

1 INSPECT FOR COSMETIC DEFECTS AND REV LEVEL OF 2
2 INSTALL 7 ON TO 3 7X
3 ADD 20 TO 7 (7X), TIGHTEN 15 (7X) WITH T3
4 PLUG 4 INTO 3 (J90)
5 PLUG 5 INTO 3 (J5) NOTE ORIENTATION OF BROWN WIRE

C C
6 PLUG 6 INTO 3 (J2) NOTE ORIENTATION OF BROWN WIRE
7 PLACE 2 ON 15
8 SECURE 2 WITH 8 AND 14 (7X) USING T2
12 SET DIP SWITCH PER DETAIL "A"

3
13 OPEN 11 KEEP STANDOFFS ONLY, (2X) DISCARD EXTRA HARDWARE
14 INSTALL 11 AND 16 TO 3 (J7) TIGHTEN WITH T1
TOOL LIST
B B
T1 1 X #4 NUT DRIVER 3/16
T2 1 X PHILLIPS HEAD SCREWDRIVER
T3 1 X #6 NUT DRIVER
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
A
.XX -
- - - .XXX - -
APPROVALS DATE
MATERIAL
DRAWN
- -
SEE SHEET 1 MAGILL 7/30/96 SERVO DRIVER ASSEMBLY
CHECKED
SEE SHEET 1 SEE SHEET 1 FINISH - -
MFG. ENGR.
- -
D A4274D2C 9700-4274-01 C
FIRST USED ON DO NOT SCALE DRAWING SHEET
- - SCALE 1/1 2 OF 2
8 7 6 5 4 3 2 1

9700-4274-01 REV C SERVO/DRIVER ASSY
0002 6900-1284-01 OB 1 EA RELACED BY 3200-1077-01

0002 3200-1077-01 C 1 EA PCB ASSY,LPT 4 MTR DRIVE INT
0003 6900-1283-01 1 EA PCB,MOTION CONTROLLER,SERVO,3
0004 9700-4105-01 A 1 EA CABLE ASSY,SERVO,AMP POWER
0009 6200-1009-01 1 EA IC, 74LS04
0010 6100-0923-30 0.42 FT WIRE,30 AWG,UL 1423,SOLID,KYNA
0015 7500-2082-01 7 EA STANDOFF, 1/4 HEX, FEM,6-32X1,

4 3 2 1
the drawing or any part therof, except for manufacture by vendors for 7 2X - A ECN N4242: PRODUCTION RELEASE JK 1/21/98

subject matter therof unless by written agreement with or written
3
D D
-01 SHOWN
RIGHT
C C
2X 7
2X 7 3X 5
B 1 B
NOTES: UNLESS OTHERWISE SPECIFIED 1
1. MANUFACTURE PER ASYST

2
TECHNOLOGIES WORKMANSHIP 3
STANDARDS 2000-0311-01.
TABULATION
2. INSPECT PARTS FOR SCRATCHES
AND DAMAGE. -01 RIGHT (SHEET 1)
3. APPLY ADHESIVE, ASYST P/N -02 LEFT (SHEET 2)
7500-0716-01, ITEM 2 TO ALL SCREWS
WITHOUT LOCK WASHERS.
QTY MATERIAL
4. VERIFY ASSY IS BUILT PER ASSY DWG AND ITEM
REQD
PART NUMBER DESCRIPTION SPECIFICATION
CHECK FOR DAMAGE. UNLESS OTHERWISE SPECIFIED CONTRACT NO.

PARTS LIST
5. IDENTIFY PART PER MARKING METHOD TOLERANCES ARE:
A FRACTIONS DECIMALS
.XX -
ANGLES - TECHNOLOGIES, INC.
A
12 OF ASYST CORPORATE PROCEDURE - - -
MATERIAL
.XXX -
-
APPROVALS DATE
ASSEMBLY,
DRAWN
2000-0311-01. - -
SEE B.O.M. MAGILL 7/31/96
ARM ROTATE SENSORS
CHECKED
9700-4279-XX LPT
FINISH E.CORTEZ 11/15/96 SIZE CAD FILE NAME DWG. NO. REV.
6. PACKAGE PER ASYST WORKMANSHIP NEXT ASSY PRODUCT
N/R DES. ENGR.
C A4276C1A 9700-4276-XX A
M.NG 11/15/96
STANDARDS 2000-0311-01. COSMETIC PART: YES X NO FIRST USED ON DO NOT SCALE DRAWING
MFG. ENGR.
A.TAHERI 11/15/96
4 3 2 1
4 3 2 1
- - SEE SHEET 1 - -
7 2X
D D
3
C C
2X 7
-02 SHOWN
LEFT
2X 7
B B
2X 5
1
2
3
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
A - -
FRACTIONS
-
DECIMALS
.XX
.XXX
-
-
ANGLES
-
APPROVALS
A
ASSEMBLY,
DATE
MATERIAL
DRAWN
- -

SEE SHEET 1
CHECKED
MAGILL 7/31/96
ARM ROTATE SENSORS
NEXT ASSY PRODUCT

M.NG 11/15/96 C A4276C2A 9700-4276-XX A
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 2/1 SHEET 2 OF 2
4 3 2 1

9700-4276-01 REV A ASSY,ARM ROTATE SENSORS,RIGHT
0001 9700-4344-01 A 1 EA HARNESS,ARM ROTATE SENSORS,RI

0003 4001-8950-01 A 1 EA BRACKET, SENSOR


9700-4276-02 REV A ASSY,ARM ROTATE SENSORS,LEFT
0001 9700-4344-02 A 1 EA HARNESS,ARM ROTATE SENSORS,L

0003 4001-8950-01 A 1 EA BRACKET, SENSOR
ASYST
8 7 6 5 4 3 2 1
REVISION
NOTICE TO ALL PERSONSRECEIVING THIS CONFIDENTIAL DRAWING:
ZONE REV. DATE
anyright in, or license to use the subject matter of the drawing or any . A ECN N3926 ; PRODUCTION RELEASE JK 4/25/97
the drawing or any part thereof, except for manufacture by vendors for B ECN N4248 JK 1/14/98
D D
T3 T4
2X 17 MANUFACTURING PROCESS INSTRUCTIONS
T1 T2 12 OPERATIONS NO: 001

T5 SET = SET-UP REQUIRED FOR TASK
6
18
1 WARM UP 6 TO 125F T1 T2
C 2 PRESS 17 (1X) ONTO 12 (NEXT TO GEAR) T3 T4 C

3 APPLY 55 TO I.D. OF 6 (2X)
4 PUSH 6 ON ASSY PER STEP 2
T6 5 PRESS 17 (1X) INTO ASSY PER STEP 4 T3 T4
2X 40 6 INSTALL 18 INTO GROOVE OF SHAFT OF ASSY PER STEP 5 T5
7 FASTEN 11 TO ASSY PER STEP 6 USING 40 (2X) T6
11 8 VERIFY THAT 12 SPINS FREELY IN ASSY PER STEP 7
X X
X X
TOOL LIST
B TOOL QTY PART NUMBER DESCRIPTION B
T1 1 8000-0020-01 WARMER PLATE
T2 1 8000-0020-02 DIAL THERMOMETER
T3 1 1000-0357-01 TOOL, PUSH BEARING I.D. .625
T4 1 X HAND PRESS
T5 1 X RETAINING RING APPLICATOR
T6 1 X SCREWDRIVER, PHILLIPS
001
1
QTY MATERIAL
REQD SPECIFICATION
2. APPLY ADHESIVE, ASYST P/N 7500-0716-01, PARTS LIST
TO ALL SCREWS WITHOUT LOCK WASHERS. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A DIMENSIONSARE IN INCHES.
TOLERANCES ARE:
A
3. IDENTIFY PART PER MARKING METHOD 12 OF .XX .01
. .XXX .005 1/2
ASYST CORPORATE PROCEDURE 2000-0311-01. MATERIAL
APPROVALS DATE
DRAWN
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS SEE B.O.M. M.MUELLER 3/23/97 GRIPPER TILT ASSEMBLY
. CHECKED
2000-0311-01. COSMETIC?: YES X NO 9700-4279-01 . FINISH 3/24/97
J.KYFFIN
.
MFG. ENGR.
M.NG 11/15/96
D A4278D1B 9700-4278-01 B
T.RADMILOVICH 3/7/97
8 7 6 5 4 3 2 1

9700-4278-01 REV B GRIPPER TILT ASSY
0002 9700-3984-01 A 1 EA SHAFT ASSEMBLY,WORM

0003 9700-3958-01 A 1 EA CABLE ASSY,MOTOR,GRIPPER,TILT
0004 9700-4305-01 A 1 EA MOTOR ASSY, GRIPPER TILT
0006 4001-9013-01 INC 1 EA FRAME,GRIPPER TILT
0006 4001-9570-01 B 1 EA FRAME,GRIPPER TILT
0008 4001-8244-01 A 2 EA FLAG,GRIPPER TILT
0010 4001-8867-01 INC 1 EA HOUSING, WORM
0010 4001-9571-01 A 1 EA HOUSING,WORM
0011 4001-8249-01 INC 1 EA PLATE,GRIPPER TILT
0011 4001-9573-01 B 1 EA PLATE,GRIPPER TILT
0012 4001-8833-01 A 1 EA WORM GEAR, TILT
0017 7500-0507-01 2 EA BEARING, RADIAL, 1.0625 OD X .
0018 7500-1013-01 1 EA RTNR,RING,EXT,.625 SHAFT DIA S
0019 7500-1043-01 1 EA BELT,TMG,85 GRV,.080P,.25W,6.8
0022 6900-1134-01 1 EA ENCODER, OPTICAL, 3-CHANNEL, 5
0047 7200-0014-06 3 EA WASHER, FLAT, SS, #6
0048 7200-0014-10 2 EA WASHER, FLAT, SS, #10
0054 7000-0440-10 1 EA SCREW,HEX HD MACH,SS 8-32 X .6
0054 7000-0440-11 1 EA SCR,HEX HD MACH,8-32X11/16,SST
0056 7000-0436-26 2 EA SCREW,SOC HD CAP,SS 6-32 X 2.0
0057 1000-0362-02 A 0 EA TOOL,FIXTURE,GRIPPER TILT,.250
0058 1000-0357-01 A 0 EA TOOL,PUSH ON INNER RACE,BRG,.6
0059 8000-0021-01 0 EA BRUSH,ACID,38"W X 6"L
0060 8000-0020-01 0 EA PLATE,HOT,EXPLOSION PROOF
0061 8000-0020-02 0 EA THERMOMETER,DIAL


9700-4279-01 REV B ARM SERVO ASSY, RIGHT
0001 9700-4280-01 B 1 EA ARM ASSY,ROTATE,RIGHT

0002 9700-4274-01 C 1 EA SERVO/DRIVER ASSY
0003 9700-4278-01 B 1 EA GRIPPER TILT ASSY
0004 9700-4276-01 A 1 EA ASSY,ARM ROTATE SENSORS,RIGHT
0005 9700-4317-01 A 1 EA MOTOR ASSY
0009 9700-4340-01 B 1 EA HARNESS ASSY,VERTICAL ARM
0011 9700-4312-01 A 1 EA BRAKE ASSY,POWER OFF
0012 9700-4339-01 A 1 EA CABLE ASSY,BRAKE EXTENSION
0014 4001-7877-01 A 1 EA GUIDE WHEEL
0015 4001-9572-01 A 1 EA POST,OPTO SWITCH
0017 4001-8858-01 A 1 EA BLOCK ROLLER
0018 4001-8859-01 A 1 EA BRACKET PANEL
0019 4001-8861-01 A 1 EA BLOCK, MOUNTING, MOTOR
0020 4001-8865-01 A 1 EA COVER GRIPPER TILT
0021 4001-8866-01 A 1 EA ENDCAP, COVER, GRIPPER TILT
0023 4001-8885-01 A 1 EA CRADLE, ARM
0024 4001-8887-01 A 1 EA PLATE, LOWER, RIGHT
0025 4001-8889-01 A 1 EA CARRIAGE, RIGHT
0027 4001-8924-01 A 1 EA BRACKET, AMP
0028 4001-8925-01 A 1 EA GUIDE, HARNESS
0029 4001-8927-01 A 1 EA CHASSIS, SERVO
0030 4001-8928-01 A 1 EA COVER, CHASSIS, SERVO
0031 4001-8929-01 A 1 EA PLATE, CABLES, SERVO
0032 4001-8930-01 A 1 EA PLATE, UPPER
0033 4001-8931-01 A 1 EA PLATE, ACCESS
0034 4001-8937-01 A 2 EA SCREW, CAPTIVE
0035 4001-8942-01 A 1 EA PLATE,GRIPPER CABLE, ARM
0037 4001-8947-01 A 4 EA BLOCK,NUT
0038 4001-8948-01 A 2 EA FLAG, LIMIT
0039 4001-8949-01 A 1 EA FLAG, HOME
0048 7500-0389-01 1 EA PIN, DOWEL


9700-4279-01 REV B ARM SERVO ASSY, RIGHT

0054 7300-3420-05 2 EA SCREW,SKT SHLDR SST,10-32 X
0081 7000-2128-16 1 EA SCREW,PHIL TRUSS HD, 8-32 X 1,
0087 7200-0014-04 11 EA WASHER, FLAT, SS, #4
0088 7200-0014-06 5 EA WASHER, FLAT, SS, #6
0089 7200-0014-08 3 EA WASHER, FLAT, SS, #8


9700-4279-02 REV B ARM SERVO ASSY,LEFT
0001 9700-4280-02 B 1 EA ARM ASSY,ROTATE,LEFT

0002 9700-4274-01 C 1 EA SERVO/DRIVER ASSY
0003 9700-4278-01 B 1 EA GRIPPER TILT ASSY
0004 9700-4276-02 A 1 EA ASSY,ARM ROTATE SENSORS,LEFT
0005 9700-4317-01 A 1 EA MOTOR ASSY
0009 9700-4340-01 B 1 EA HARNESS ASSY,VERTICAL ARM
0012 9700-4339-01 A 1 EA CABLE ASSY,BRAKE EXTENSION
0014 4001-7877-01 A 1 EA GUIDE WHEEL
0015 4001-9572-01 A 1 EA POST,OPTO SWITCH
0017 4001-8858-01 A 1 EA BLOCK ROLLER
0018 4001-8859-01 A 1 EA BRACKET PANEL
0019 4001-8861-01 A 1 EA BLOCK, MOUNTING, MOTOR
0020 4001-8865-01 A 1 EA COVER GRIPPER TILT
0021 4001-8866-01 A 1 EA ENDCAP, COVER, GRIPPER TILT
0023 4001-8885-01 A 1 EA CRADLE, ARM
0024 4001-8888-01 A 1 EA PLATE, LOWER, LEFT
0025 4001-8889-02 A 1 EA CARRIAGE, LEFT
0027 4001-8924-01 A 1 EA BRACKET, AMP
0028 4001-8925-01 A 1 EA GUIDE, HARNESS
0029 4001-8927-01 A 1 EA CHASSIS, SERVO
0030 4001-8928-01 A 1 EA COVER, CHASSIS, SERVO
0031 4001-8929-01 A 1 EA PLATE, CABLES, SERVO
0032 4001-8930-01 A 1 EA PLATE, UPPER
0033 4001-8931-01 A 1 EA PLATE, ACCESS
0034 4001-8937-01 A 2 EA SCREW, CAPTIVE
0035 4001-8942-01 A 1 EA PLATE,GRIPPER CABLE, ARM
0037 4001-8947-01 A 4 EA BLOCK,NUT
0038 4001-8948-01 A 2 EA FLAG, LIMIT
0039 4001-8949-01 A 1 EA FLAG, HOME
0048 7500-0389-01 1 EA PIN, DOWEL


9700-4279-02 REV B ARM SERVO ASSY,LEFT

0054 7300-3420-05 2 EA SCREW,SKT SHLDR SST,10-32 X
0081 7000-2128-16 1 EA SCREW,PHIL TRUSS HD, 8-32 X 1,
0087 7200-0014-04 11 EA WASHER, FLAT, SS, #4
0088 7200-0014-06 5 EA WASHER, FLAT, SS, #6
0089 7200-0014-08 3 EA WASHER, FLAT, SS, #8


9700-4280-01 REV B ARM ASSY,ROTATE,RIGHT
0001 9700-4281-01 A 1 EA SPEED REDUCER ASSY

0004 4001-8985-01 A 1 EA BUSHING, SPROCKET, SHAFT
0005 4001-8940-01 A 1 EA CASE, ARM, RIGHT
0006 4001-8258-01 A 1 EA COVER,ARM,RIGHT
0030 7200-0014-04 1 EA WASHER, FLAT, SS, #4
0037 1000-0359-01 A 0 EA TOOL,SUPPORT,INNER RACE,.625 I


9700-4280-02 REV B ARM ASSY,ROTATE,LEFT
0001 9700-4281-01 A 1 EA SPEED REDUCER ASSY

0004 4001-8985-01 A 1 EA BUSHING, SPROCKET, SHAFT
0005 4001-8940-02 A 1 EA CASE, ARM, LEFT
0006 4001-8258-02 A 1 EA COVER,ARM,LEFT
0007 4001-8260-02 A 1 EA BRACKET,TENSIONING,LEFT
0014 4001-8679-02 A 1 EA PLATE,TENSIONING,LEFT
0030 7200-0014-04 1 EA WASHER, FLAT, SS, #4
0037 1000-0359-01 A 0 EA TOOL,SUPPORT,INNER RACE,.625 I

8 7 6 5 4 3 2 1
NOTICE TO ALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
TechnologiesInc., Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issued and neitherreceiptnorpossessiontherofconfersortransfers
designs or technicalinformationshowntheron,oranyrighttoreproduce
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor PART OF
H
written license. Norighttoreproducethis drawingisgrantedforthe
I/0 PANEL WIRE TABLE ITEM 3 H
ITEM NO. PART NO.
DETAIL 'W' 9700-4080-01 P7 D1/J7
FRAME WIRE TABLE ITEM 3 REF 9700-4081-01 P8 D1/J8 Y-CABLE WIRE TABLE ITEM 14
REF 6900-1282-01 A1/J7 D2/LAN JACK
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. D3/J20 A6/P20 ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) 3 9700-4350-XX WIRE COLOR, ETC. ) TERMINAL, ETC.)
8 9700-4346-01 P6B F1/J6B
3 9700-4350-XX
DETAIL 'W' 9700-4080-01 P6A F1/J6A
MINIENVIRONMENT WIRE TABLE ITEM 1
G FROM (CONN. LABEL, TO (JACK, PLUG, G

ITEM NO. PART NO.
CPU WIRE TABLE ITEM 5 WIRE COLOR, ETC. ) TERMINAL, ETC.)
FROM (CONN. LABEL, TO (JACK, PLUG, P5 C1/J5
ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) 7 9700-4079-01 P22 C3/J22
J2 A4/P2 P1 J1
7 9700-4079-01 GRAY RING TERM A5/RC REF 9700-3724-02 P3 C1/J3
I/O CABLE WIRE TABLE ITEM 14
WHITE RING TERM A5/RCG P6 C1/J6 FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO.
13 9700-4108-01 WIRE COLOR, ETC. ) TERMINAL, ETC.)
DETAIL 'W' 9700-4080-01 P11 A1/J11 P7 C1/J7
J5 A4/P5 14 9700-4109-01 J6A G1/P6A
REF 9700-4081-01 P13 A1/J13 C3/P10 C1/J10 DETAIL 'W' 9700-4080-01 TEST N/C
P2 A2/J2 C4/P59 H1/J59
12 9700-4347-01 P3 A4/P3
F 9700-4351-XX F
13 9700-4108-01 P3 A3/J3
14 9700-4109-01 P6 A3/J6
REF 6900-1282-01 - A1/J7
5 9700-3970-XX A6/P20 D3/J20
ARM SERVO WIRE TABLE ITEM 2

ITEM NO. PART NO.
BASE GROUNDING BLOCK PART OF
8 9700-4346-01 P1 B2/SERIAL JACK
WIRE LIST ITEM 3
E 12 9700-4347-01 P1 B1/J1 FROM (CONN. LABEL, TO (JACK, PLUG, E
ITEM NO. PART NO.
B3/P59 H2/J59 WIRE COLOR, ETC. ) TERMINAL, ETC.)
8 9700-4346-01 GND RING TERM H3
13 9700-4108-01 GND RING TERM H3
A6 (GRN/YEL TERM 1) H3
3 9700-4350-XX
D3 (GRN/YEL TERM) H3
PORT DOOR WIRE TABLE ITEM 4

ITEM NO. PART NO.
D D
REF 9700-3724-02 P53 E1/J53
4X 82 83 4X
83 4X
SEE BASE GROUNDING
C BLOCK WIRE LIST C
DETAIL P
B B

ITEM PART NUMBER SPECIFICATION
REQD
PARTS LIST
13. IDENTIFY PART PER MARKING METHOD 12 OF UNLESS OTHERWISESPECIFIED CONTRACT NO.
ASYST CORPORATE PROCEDURE 2000-0311-01. DIMENSIONSAREININCHES.
TOLERANCESARE:
.XX -
- - - .XXX -
- APPROVALS
DATE
2000-0311-01. - -
MAGILL 9/9/96
A COSMETIC PART: YES X NO
SEE SHEET 1
FINISH
SEE SHEET 1 DES. ENGR. SIZE CAD FILENAME DWG.NO. REV.
NEXTASSY PRODUCT
MFG.ENGR.
E A4284E4E 9700-4284-XX E
8 7 6 5 4 3 2 1

9700-4284-01 REV E LPT ASSY, FORWARD PPLT, RIGHT
0001 9700-4351-01 C 1 EA MINI-ENVIRONMENT ASSY,LPT,RIGH

0002 9700-4279-01 B 1 EA ARM SERVO ASSY, RIGHT
0003 9700-4350-01 B 1 EA FRAME ASSY, RIGHT
0008 9700-4346-01 B 1 EA CABLE ASSY, SERIAL SERVO
0012 9700-4347-01 A 1 EA CABLE ASSY, DC PWR TO SERVO
0016 9600-0702-01 A 1 EA TEACH PENDANT
0031 4001-8805-01 A 1 EA GUIDE,ROLLER
0035 4001-7743-01 B 1 EA LABEL, MODEL



0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0071 7200-0014-08 21 EA WASHER, FLAT, SS, #8
0081 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0087 4001-9088-01 C 2 EA BRACKET,CARRIAGE CABLE,RIGHT
0088 4001-8999-01 C 2 EA BRACKET,ENCODER CABLE
0090 4001-8301-01 A 1 EA BEZEL,CAP,LOWER SHIELD
0090 4001-9301-01 INC 1 EA FINGER,GRIPPER V-MOVE,LPT 2150
0092 4001-8923-01 A 1 EA CAP,ROLLER,UPPER,RIGHT
0093 4001-8303-01 A 1 EA SHIELD,LOWER
0094 9600-0674-01 A 1 EA MODIFIED,EXTRUSION,BEZEL,DRIVE
0096 4001-8876-01 A 1 EA CAP, ROLLER
0097 9600-0675-01 A 1 EA MODIFIED,EXTRUSION,BEZEL,GUIDE
0098 4001-9216-01 A 1 EA SHIELD,CARRIAGE


0099 4001-9191-01 B 1 EA COVER,PLEX,RIGHT

0100 4001-9197-01 A 2 EA BRACKET,SIDE,RT
0101 4001-9199-01 A 1 EA BRACKET,CORNER
0102 4001-9459-01 A 1 EA LABEL,FUSE WARNING
0103 4001-9460-01 A 1 EA LABEL,PINCH POINT BODILY INJUR
0104 7000-2110-01 1 EA SCREW, CAPTIVE, 6-32 X .655, S
0105 7000-0468-08 2 EA SCREW,SOC BUTT HD,1/4-20 X 1/2
0110 4001-4422-01 A 1 EA LABEL, WARNING
0111 4001-8358-01 A 1 EA LABEL, ELEC HAZARD WARNING
0112 4001-8750-01 A 1 EA LABEL,CE MARKING
0150 3400-0057-01 A 0 EA INTERCONNECT BLOCK DIAGRAM, L


9700-4284-02 REV E LPT ASSY, FORWARD PPLT, LEFT
0001 9700-4351-02 C 1 EA MINI-ENVIRONMENT ASSY,LPT,LEFT

0002 9700-4279-02 B 1 EA ARM SERVO ASSY,LEFT
0003 9700-4350-02 B 1 EA FRAME ASSY, LEFT
0031 4001-8805-02 A 1 EA GUIDE,ROLLER
0035 4001-7743-01 B 1 EA LABEL, MODEL



0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0071 7200-0014-08 21 EA WASHER, FLAT, SS, #8
0081 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0087 4001-9088-02 C 2 EA BRACKET,CARRIAGE CABLE,LEFT
0092 4001-8923-02 A 1 EA CAP,ROLLER,UPPER,LEFT
0093 4001-8303-01 A 1 EA SHIELD,LOWER
0096 4001-8876-01 A 1 EA CAP, ROLLER



0099 4001-9191-02 B 1 EA COVER,PLEX,LEFT
0100 4001-9197-02 A 2 EA BRACKET,SIDE,LT

4 3 2 1
any right in, or license to use the subject matter of the drawing or any JK 10/29/96
A ECN N3755; PRODUCTION RELEASE
the drawing or any part therof, except for manufacture by vendors for JK 1/22/97
B ECN N3862
C ECN N3933 JK 5/21/97
D D
4X 8
4X 15 REF 15
FARSIDE
5 8X
4X 7 8X
14
4
16
DETAIL A
SCALE: 2/1
C C
3
2
SEE DETAIL A
10 4 6 6
2X 12 16 16 16
13
3 11 1 3
B B
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP STANDARDS 2000-0311-01.

2000-0887-01 FOR SEQUENCE OF ASSEMBLY.
QTY MATERIAL
2. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE
12 REQD SPECIFICATION
PARTS LIST
PROCEDURE 2000-0311-01. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
TOLERANCES ARE:
.
A 3. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 . .
FRACTIONS
.
DECIMALS
.XX -
ANGLES
-
TECHNOLOGIES, INC.
A
LASER BRACKET
COSMETIC PART: YES NO X . .
MATERIAL
DRAWN
ASSY, 200MM
SEE BOM A. REYES 10/7/96
9700-3260-01 INX CHECKED
FINISH J. KYFFIN 10/22/96 SIZE CAD FILE NAME DWG. NO. REV.
C
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/23/96 A4303C1C 9700-4303-01 C
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING M.VODEGEL 10/29/96
4 3 2 1

9700-4303-01 REV C LASER BRACKET ASSY,200MM
0001 4001-9582-01 B 1 EA BRACKET,LASER,KINEMATIC,200MM

0001 4001-9017-01 OB 1 EA BRKT,LASER KINEMATIC,200MM
0002 4001-9018-01 B 1 EA BRKT,ADJUST,KINEMATIC,200MM
0003 4001-9019-01 A 3 EA BRKT MIRROR KINEMATIC 45 DEG
0005 7000-0416-08 6 EA SCREW, SOC HD CAP, SS 2-56 X 1
0007 7000-2157-04 4 EA SET SCREW,4-48 X 1/4,SST,CONE
0008 7000-2156-04 4 EA SET SCREW,4-48 X 1/4,SST OVAL
0010 7200-0014-02 2 EA WASHER, FLAT, SS, #2
0014 7500-2080-01 8 EA SPRING,COMP .15 OD .25 LG 39.5
0015 7500-2081-01 4 EA BALL,.125 DIA,440 SST
0016 7500-1092-01 0 EA ADHESIVE,UV CURE
0017 2000-0887-01 B 0 EA PROCEDURE,LASER BRKT ASSY

4 3 2 1
REF 15
designs or technical information shown theron, or any right to reproduce A ECN N3755; PRODUCTION RELEASE JK 11/15/96
Asyst Technologies, Inc. and for manufacture under the corporation's B ECN N3862 JK 1/22/97
FARSIDE C ECN N3933 . .
D D
4X 8
4X 15
5 8X
4X 7 8X
14
4 DETAIL A
16 SCALE: 2/1
2
C C
3
SEE DETAIL
4 6 6
10
16 16 16
2X 12
13
3 11 1 3
B B
6" CONFIGURATION
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP STANDARDS 2000-0311-01.

2000-0887-01 FOR SEQUENCE OF ASSEMBLY.
QTY MATERIAL
2. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE REQD SPECIFICATION
PARTS LIST
PROCEDURE 2000-0311-01. UNLESS OTHERWISE SPECIFIED CONTRACT NO.
TOLERANCES ARE:
.
A 3. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 . .
FRACTIONS
.
DECIMALS
.XX -
ANGLES
-
TECHNOLOGIES, INC.
A
LASER BRACKET
COSMETIC PART: YES X NO . .
MATERIAL
DRAWN
ASSY, 6", 5", 4"

9700-3360-01 INX CHECKED

C
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/29/96 A4304C1C 9700-4304-01 C
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING M. VODEGEL 10/29/96
4 3 2 1
4 3 2 1
designs or technical information shown theron, or any right to reproduce - SEE SHT 1 . .
D REF 15 D
FARSIDE
4X 8 REF 7
15 REF
8X FARSIDE
5 REF 15
4X 15
4X 7 8X REF 8
14
C DETAIL B DETAIL C C
SCALE: 2/1 SCALE: 2/1
4
2
16
3 SEE DETAIL B
6 6
4 16 16
10
B
2X 12
16 SEE DETAIL C B
13
3 11 1 3 5" CONFIGURATION
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
.
A . .
FRACTIONS
.
DECIMALS
.XX -
-
ANGLES
-
TECHNOLOGIES, INC.
A
LASER BRACKET
.XXX APPROVALS DATE
MATERIAL
. . DRAWN
ASSY, 6", 5", 4"

. . CHECKED
C C
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/29/96 A4304C2C 9700-4304-01
MFG. ENGR.
DO NOT SCALE DRAWING SCALE 1/1 SHEET 2 OF 3
FIRST USED ON M. VODEGEL 10/29/96
4 3 2 1
4 3 2 1
designs or technical information shown theron, or any right to reproduce - SEE SHT 1 . .
written license. No right to reproduce this drawing is granted for the REF 15
FARSIDE
D D
4X 8
5 8X
4X 15
4X 7 8X
14
DETAIL D
SCALE: 2/1
C C
4
16
3 SEE DETAIL D
4 6 6
10
16 16 16
2X 12
13
B B
3 11 1 3
4" CONFIGURATION
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
.
A . .
FRACTIONS
.
DECIMALS
.XX
.XXX
-
-
ANGLES
-
TECHNOLOGIES, INC.
A
MATERIAL
DRAWN
APPROVALS DATE
LASER BRACKET
. .
ASSY, 6", 5", 4"
. . CHECKED
NONE
NEXT ASSY PRODUCT
DES. ENGR.
T. SURBER 10/29/96 C A4304C3C 9700-4304-01 C
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING M. VODEGEL 10/29/96
4 3 2 1

9700-4304-01 REV C LASER BRKT,ASSY,6",5",4"
0001 4001-9583-01 A 1 EA BRACKET,LASER,KINEMATIC,150MM,

0001 4001-9015-01 OB 1 EA BRKT,LASER KINEMATIC 150MM
0002 4001-9016-01 A 1 EA BRKT,ADJUST KINEMATIC 150MM
0007 7000-2157-04 4 EA SET SCREW,4-48 X 1/4,SST,CONE
0008 7000-2156-04 4 EA SET SCREW,4-48 X 1/4,SST OVAL
0010 7200-0014-02 2 EA WASHER, FLAT, SS, #2
0014 7500-2080-01 8 EA SPRING,COMP .15 OD .25 LG 39.5
0015 7500-2081-01 4 EA BALL,.125 DIA,440 SST
0016 7500-1092-01 0 EA ADHESIVE,UV CURE
0017 2000-0887-01 B 0 EA PROCEDURE,LASER BRKT ASSY

8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIALDRAWING:
REVISION
TechnologiesInc., Milpitas,California. This drawing isonlyconditionally
any right in, or license to use the subjectmatter of the drawing or any . A ECN N3939 ; PRODUCTION RELEASE M. AU 4/16/97
designsortechnical information shownthereon,oranyrighttoreproduce
AsystTechnologies, Inc. and formanufactureunderthecorporation's
B ECN N4212 JK 12/30/97
written license. No right to reproduce this drawing isgranted forthe
subjectmatterthereofunless bywrittenagreement with or written
D D
1
25
5 TEST LABEL
24 4X
2 20
C C
3
13
S2 S1
6 2X
19 4X
B B
2
27
26 2X
17
1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP ITEM

QTY
REQD PART NUMBER DESCRIPTION
MATERIAL
SPECIFICATION
STANDARDS 2000-0311-01. PARTS LIST

A 2 APPLY TEST LABEL, ITEM 5 , AS SHOWN.
TOLERANCES ARE:
.
A
.XX - -
. .XXX - APPROVALS DATE
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST
CORPORATE PROCEDURE 2000-0311-01.
MATERIAL
DRAWN MOTOR ASSY,
STEVE 8-27-96
SEE BOM
CHECKED
VERTICAL DRIVE
9700-4311-01 LPI
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS FINISH E.CORTEZ 11/15/96
2000-0311-01. COSMETIC PART: YES X NO NEXT ASSY PRODUCT NONE

DES. ENGR.
M.NEADS
SIZE DWG NO. REV.
MFG. ENGR.
11/15/96
D A4312D1B 9700-4310-01 B
8 7 6 5 4 3 2 1

9700-4310-01 REV B MOTOR ASSY, VERTICAL DRIVE
0001 9700-4317-01 A 1 EA MOTOR ASSY

0003 9700-4307-01 B 1 EA MOTOR ASSY,BASE
0006 4001-8939-01 A 2 EA BRACKET,BRAKE,V-DRIVE
0013 7500-0138-01 1 EA BELT, 225T, 3MM HTD X 6 MM
0025 7200-0014-06 4 EA WASHER, FLAT, SS, #6
0027 7200-0014-04 2 EA WASHER, FLAT, SS, #4

2 1
Reproduction Forbidden without the specific written permission of Asyst REVISIONS
issued and neither receipt nor possession therof confers or transfers ZONE REV. DESCRIPTION APPROVED DATE
designs or technical information shown theron, or any right to reproduce A ECN N3939 ; PRODUCTION RELEASE M. AU 4/16/97
1.169±.010
.800±.010 (.369)
(RED)
B B
2 2
(BLACK)
5 2
1 2
NOTE DIRECTION OF ENCODER
1. MANUFACTURE PER ASYST

2 WORKMANSHIP STANDARDS 2000-0311-01. 1
2 CLEAN SHAFT OF MOTOR WITH ISOPROPYL ALCOHOL AND THEN APPLY

ADHESIVE ASYST #7500-0012-01, EVENLY ON CONTACT SURFACES
OF BOTH SHAFT OF ITEM 1 AND BORE OF ITEM 2 . SLIDE ITEM 2
ONTO SHAFT OF ITEM 1 , PRESS ITEM 5 THRU BOTH ITEMS 1 AND 2 .
A A
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE
PROCEDURE 2000-0311-01. ITEM
QTY
MATERIAL
REQD SPECIFICATION
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01, PARTS LIST

COSMETIC PART: YES X NO DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
-
.XX -
- - APPROVALS
.XXX DATE
MATERIAL
SEE B.O.M.
DRAWN
MAGILL 8/21/96 MOTOR ASSY
CHECKED
9700-4311-01 LPT
B
N/R DES. ENGR.
NEXT ASSY PRODUCT
M.NEADS 11/15/96
A4317B1A 9700-4317-01 A
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING A.TAHERI 11/15/96

9700-4317-01 REV A MOTOR ASSY
0001 6400-0025-01 1 EA MOTOR,DC SERVO,19.1V,W/3-CHAN

0002 7500-2114-01 1 EA PULLEY,TMG,3MMP,18GRV,SPECIAL
0005 7500-0394-03 1 EA PIN, ROLL, SS, .099 X .44 LG

4 3 2 1
REVISIONS
Technologies Inc., Milpitas, California. This drawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
designs or technical information shown thereon, or any right toreproduce
A ECN N4102; PRODUCTION RELEASE JK 10/21/97
written license. Noright toreproduce this drawing is granted forthe
D D
1 8.00 ±.50
3.00 ±.50
2
4 2 2X
C C
9700-4337-01
BLU 1
REV_ J24
RED 2
5 4 3 3
B B

1. MANUFACTURE PER ASYST TECHNOLOGIES WORKMANSHIP STANDARDS WIRE LIST
2000-0311-01. FROM COLOR TO SIGNAL NAME/REF
2 USE HAND TOOL AMP HANDLE ASSY. #90325-1 TO CRIMP WIRES 5 FAN BLU J24-1 GND
INTO ITEM 4 .
FAN RED J24-2 PWR
3 TYPE "J24" ON LABEL, ITEM 3 , AND APPLY TO ITEM 2 AS SHOWN.
4 TYPE ASSEMBLY PART NUMBER, CURRENT REVISION AND ASYST

DESIGNATED VENDOR ID ON ITEM 5 AND APPLY AS SHOWN. QTY
REQD SPECIFICATION
5 NOTE THAT SECOND SOURCE (SANYO) WIRE COLORS ARE RED AND BLACK. UNLESS OTHERWISE SPECIFIED
PARTS LIST
CONTRACT NO.
TOLERANCES ARE:
.
A 5. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE . .
.XX
. .XXX
.
.
TECHNOLOGIES, INC.
A
FAN ASSY,
. APPROVALS DATE
PROCEDURE 2000-0311-01. . .
MATERIAL
DRAWN
DRIVE COLUMN
SEE BOM C.MOLERIN 8-30-96
6. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01

CHECKED
9700-4343-XX LPT FINISH E. CORTEZ 9/26/96 SIZE CAD FILE NAME DWG. NO. REV.
N/A
COSMETIC PART: YES X NO NEXT ASSY PRODUCT
DES. ENGR.
M. NG 9/26/96 C A4337C1A 9700-4337-01 A
MFG. ENGR.
FIRST USED ON DO NOT SCALE DRAWING B. STOLTZ 9/26/96 SCALE NONE SHEET 1 OF 1
4 3 2 1

9700-4337-01 REV A FAN ASSY,DRIVE COLUMN
0001 6900-1299-01 1 EA FAN,24 VDC,14 CFM,2.44 SQ .59

0002 6100-2245-01 1 EA CONN, 2 PIN, PIN HOUSING
0004 6100-2248-01 2 EA CONTACT, PIN, CRIMP, 26-18 AWG

8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHISCONFIDENTIAL DRAWING: REVISIONS
ReproductionForbiddenwithout thespecificwrittenpermissionofAsyst
TechnologiesInc., Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
anyrightin,orlicensetousethesubjectmatterofthedrawingorany . A ECN N4205; PRODUCTION RELEASE JK 12/5/97
subject mattertherof unlessbywrittenagreementwithorwritten
H
25.88 53 16X
38 16X
10 27
55
33 2X 47
47
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
G SEE DETAIL A G
33 2X
46 19X
62
40.00
60 2X
60 2X
4
SEE DETAIL E 2X 1 63
9 14
63 8 2X
59
F 61 32 F
13
D
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
E E
SEE DETAIL C
D 57
2X 3 26 4X 5 21
NOTE ORIENTATION OF GROOVE
(ON THIS THIS SIDE ONLY)
50
49 4X
D D
OPERATIONS NO: 001

C C
1 INSPECT PARTS FOR DAMAGES AND SCRATCHES.
2 SET POSITION ASSY VERTICALLY, 4 ON TOP AND 13 ON BOTTOM.
3 PLACE 9 ON ASSY, SECURE WITH 47, 55, AND 33 4X.
4 CUT OFF ARM SENSOR AT CUT OFF LINE.
5 ALIGN 13 WITH 21. SECURE WITH 49 4X.
6 APPLY 58 EVENLY ALONG THE LENGTH OF TRAVEL ON 5.

B B
7 TIGHTEN 57.
8 ASSEMBLE REMAINING ITEMS PER DRAWING.
2000-0311-01.
2. APPLY ADHESIVE, ASYST #7500-0716-01 TO ALL SCREWS WITHOUT LOCK WASHERS. QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
3. IDENTIFY PART PER MARKING METHOD 12 OF ASYST CORPORATE UNLESS OTHERWISESPECIFIED CONTRACT NO.
PROCEDURE 2000-0311-01. TOLERANCES ARE:

.XX .01
. .XXX APPROVALS DATE
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS 2000-0311-01 MATERIAL DRAWN

MAGILL VERTICAL DRIVE ASSEMBLY
A COSMETIC PART: YES X NO SEE BOM
CHECKED
9/10/96
A
9700-4350-XX LPT
FINISH E.CORTEZ 11/15/96
N/R DES. ENGR. SIZE CAD FILE NAME DWG. NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
M.NG 11/15/96
E A4349E1A 9700-4349-01 A
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONS RECEIVING THISCONFIDENTIALDRAWING: REVISIONS
Reproduction ForbiddenwithoutthespecificwrittenpermissionofAsyst
issuedandneitherreceiptnorpossessiontherofconfers ortransfers
any rightin,orlicensetousethesubjectmatterofthedrawingorany . - SEE SHT. 1 . .
H H
writtenlicense. Norighttoreproducethis drawingisgrantedforthe
REF 46 27 REF
G G
21 REF
F F
SECTION D-D DETAIL E

E E
25
2X 34 28 2X
D D
2X 48 12
24
REF 5
.12±.06
C C
5
4 REF
54 4X
45 4X
DETAIL C
TYP 2X
B SCALE: 2/1 B
DETAIL A
SCALE: 4/1

ITEM REQD PART NUMBER SPECIFICATION
PARTS LIST
TOLERANCES ARE:
.XX -
. .XXX - -
APPROVALS DATE
MATERIAL DRAWN
MAGILL VERTICAL DRIVE ASSEMBLY
A SEE SHEET 1
CHECKED
9/10/96
A
SEE SHEET 1 DES. ENGR. SIZE CAD FILENAME DWG. NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
M.NG 11/15/96
E A4349E2A 9700-4349-01 A
8 7 6 5 4 3 2 1

9700-4349-01 REV A VERTICAL DRIVE ASSY
0001 9700-4310-01 B 2 EA MOTOR ASSY, VERTICAL DRIVE

0003 4001-7846-01 B 2 EA CARRIAGE, PORT PLATE
0004 4001-7856-01 B 1 EA CASTING,MOUNTING,LEAD SCREW
0005 4001-7857-02 A 1 EA LEAD SCREW, VERTICAL DRIVE, 44
0007 4001-7888-01 B 2 EA HOUSING, LEAD NUT
0008 4001-7969-01 A 1 EA FLAG, ACTUATOR
0009 4001-8107-02 A 1 EA ROD,SENSOR,45.62 "
0010 4001-8460-01 002 2 EA SPRING,GROUNDING
0010 4001-9610-01 A 1 EA STOP,CARRIAGE
0011 4001-8467-01 A 1 EA ROD,ANTI COLLISION
0012 4001-8556-01 B 2 EA NUT,LEAD,SAFETY
0013 4001-8557-01 A 1 EA GUSSET,EXTRUSION SUPPORT
0014 4001-8565-01 A 1 EA BRIDGE,TENSIONER
0021 9600-0672-01 A 1 EA MOD,EXTRUSION,DRIVE COLUMN
0024 7500-0410-01 1 EA PIN, DOWEL, SS, .187 DIA X 1.0
0025 7500-1009-01 2 EA O-RING,1.19 OD,.787 ID,.190 W,
0026 7500-1020-01 4 EA BLOCK, LINEAR, STEEL BALLS, WI
0027 7500-1050-01 1 EA GUIDE,RAIL, 12.5 X 1120 MM STE
0028 7500-2077-01 4 EA SPRING,COMP .18 OD .312LG 3.33
0034 7000-0615-04 2 EA SCREW,SET,SKT HD,1/4-20 X 1/4
0035 7000-1614-08 1 EA SET SCREW,NYL TIP,10-32X1/2SST
0038 7000-2016-06 INC 16 EA SCREW, SOC HD CAP, SS, M4 X 16
0050 7000-0476-12 1 EA SCREW. SOC HD CAP, SS, 5/16-24
0053 7200-0048-01 16 EA WASHER, LOCK SPLIT, M4
0056 7200-0091-01 10 EA WASHER, BLVL, .138 ID .281 OD
0057 7000-0614-04 1 EA SCREW, SET, SOC HD, SS, 10-32
0059 7500-0874-01 2 EA SPACER, .312 OD, .194 ID, .375


9700-4349-01 REV A VERTICAL DRIVE ASSY
0061 4001-9316-01 A 1 EA GUIDE,ROD

0062 4001-9315-01 A 1 EA ROD,DOWN LIMIT,ARM
0063 9700-4308-01 A 2 EA SENSOR ASSY, ELEVATOR LIMITS


9700-4350-01 REV B FRAME ASSY, RIGHT
0001 9700-4349-01 A 1 EA VERTICAL DRIVE ASSY

0002 9700-4040-01 A 1 EA BASE ASSEMBLY
0003 9700-4084-01 B 1 EA CONNECTOR PANEL ASSY,I/O,RIGHT
0004 4001-8287-01 A 1 EA BRACE,COLUMN
0005 4001-8572-01 A 1 EA HANDLE,TOP PLATE
0006 4001-8289-01 A 1 EA PLATE,TOP
0007 4001-8285-01 A 1 EA COVER,FRONT,GUIDE COLUMN
0008 4001-8582-01 A 1 EA RETAINER,COVER,DRIVE COLUMN
0009 4001-8550-01 A 1 EA FRAME,DOOR BRACKET
0010 4001-8552-01 B 1 EA DOOR BRACKET
0011 4001-8575-01 A 1 EA PEM,STRIP,GARAGE
0012 9600-0673-01 A 1 EA MODIFIED,EXTRUSION,GUIDE COLU
0013 4001-8214-01 A 1 EA GARAGE,REAR
0014 4001-8562-01 A 1 EA BASE,SUB,RIGHT
0015 4001-8574-01 A 1 EA BEZEL,CONNECTOR,I/O
0016 4001-6400-01 A 1 EA BUS BAR, GROUND
0017 7500-2012-02 2 EA BUMPER, STICK-ON, BLACK, .44 D
0018 4001-8359-01 A 1 EA LABEL, ELEC GROUND
0031 7200-0013-25 1 EA WASHER, SPLIT LOCK, SS, #1/4
0032 7200-0014-08 12 EA WASHER, FLAT, SS, #8
0033 7200-0014-25 1 EA WASHER, FLAT, SS, #1/4
0035 7200-0096-01 2 EA WASHER,.255 ID,.468 OD,.06 THK
0037 9700-4338-01 A 1 EA CABLE ASSY,P.S. TO FAN
0040 9700-4337-01 A 1 EA FAN ASSY,DRIVE COLUMN
0041 4001-9075-01 A 1 EA BRKT,FAN MOUNTING
0042 4001-9074-01 A 1 EA PLATE,FAN MOUNTING,RIGHT


9700-4350-01 REV B FRAME ASSY, RIGHT
0043 4001-9076-01 A 1 EA COVER,FAN MOUNTING

0048 7100-0116-32 1 EA NUT, KEP, SS, #6-32
0049 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0050 7500-2086-01 2 EA STANDOFF,1/4 HEX,FEM,6-32 X .5
0051 4001-9195-01 A 1 EA BRACKET,BASE,RIGHT
0060 7500-0453-01 0.19 FT EDGE PROTECTOR


9700-4350-02 REV B FRAME ASSY, LEFT

0003 9700-4084-02 B 1 EA CONNECTOR PANEL ASSY,I/O,LEFT
0004 4001-8287-01 A 1 EA BRACE,COLUMN
0006 4001-8289-02 A 1 EA PLATE,TOP
0009 4001-8550-02 A 1 EA FRAME,DOOR BRACKET
0010 4001-8552-01 B 1 EA DOOR BRACKET
0013 4001-8214-02 A 1 EA GARAGE,REAR
0014 4001-8562-02 B 1 EA BASE,SUB,LEFT
0032 7200-0014-08 12 EA WASHER, FLAT, SS, #8
0033 7200-0014-25 1 EA WASHER, FLAT, SS, #1/4
0042 4001-9074-02 A 1 EA PLATE,FAN MOUNTING,MIR LEFT


9700-4350-02 REV B FRAME ASSY, LEFT

0048 7100-0116-32 1 EA NUT, KEP, SS, #6-32
0049 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0051 4001-9195-02 A 1 EA BRACKET,BASE,LEFT
0060 7500-0453-01 0.19 FT EDGE PROTECTOR

8 7 6 5 4 3 2 1
Reproduction Forbiddenwithoutthespecific writtenpermissionofAsyst
- A ECN N4242: PRODUCTION RELEASE JK 1/21/98
the drawing oranyparttherof,exceptformanufacturebyvendorsfor
- B ECN N4332 JK 4/6/98
H
AsystTechnologies, Inc. andformanufactureunderthecorporation's
writtenlicense. No righttoreproducethis drawingisgrantedforthe TO CONN ITEM 104 H
subject mattertherofunless bywrittenagreementwithorwritten 2 3
- C ECN N4401 JK 6/4/98

SEE WIRE LIST
1 4
(SEE DETAIL G
)
65 2X
TO CONN ITEM 104
11 55 5X SEE WIRE LIST
82 5X (SEE DETAIL )F
30 2X
2X 93
1
27
TO PCB CHASSIS ASSY ITEM 7
G 64 2X G
P20
SECTION C-C 4 1 J6 4 1 J5 7 J4 1 7 J3 1
2X 61
P6 P5 P4 P3
2X 117
P1
J2 26
1 J1 10
ASYS T TE CHNOLOGIE S, INC ASSY. N O. 3200-1037-01 RE V.
2X 119
C
12
P51
2X 66
F F
9 C 2X 61
DETAIL B
BACKSIDE
SECTION A-A
18 4X
51 3X
17
E E
63 2X 74 4X 74 3X 74 3X
A A
32
74 56 2X SECTION E-E
LOAD
22 100
2X
UNLOAD
73
D 23 D
HOME
8
111 2X
POWER
21 74 7X
14
C C
E E -01 SHOWN
61
87 4X
94
24
29
118 20 2X
61
61 4X TABULATION
B 87 2X B
5 -01 AS SHOWN, (RIGHT ), SHEETS 1 & 2
2X 94
61 -02 MIRROR IMAGE, (LEFT), SHEETS 3 & 4
6
FILTER
10 2X 26 REF 60 2X SEE SHEET 2 FOR NOTES
26 4
19 ITEM
QTY
MATERIAL
REQD SPECIFICATION
PARTS LIST
41 7 UNLESS OTHERWISESPECIFIED CONTRACT NO.
77 REF 2X 81
TOLERANCESARE:
TECHNOLOGIES, INC.
.XX .02
- .XXX - -
APPROVALS DATE
69 MATERIAL DRAWN
MAGILL 9/11/96 MINI ENVIRONMENT ASSY, LPT
A 28
SEE B.O.M.
A
2 87 2X 9700-4284-XX LPT
FINISH
CHECKED
E.CORTEZ 11/15/96
3 42 N/R DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
94 77 2X NEXT ASSY PRODUCT M.NG 11/15/96

E A4351E1C 9700-4351-XX C
MFG.ENGR.
FIRST USED ON DO NOT SCALE DRAWING L. TURNER 11/15/96 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
ReproductionForbiddenwithout the specificwrittenpermissionofAsyst
issued andneitherreceiptnorpossessiontherofconfersortransfers
the drawingoranyparttherof,exceptformanufacturebyvendorsfor PLACE
POD IN
POWER READY
H
46 16
120
13 WIRE LIST 104 P17

3
112
67 4X FROM COLOR TO
DETAIL H 5 5 LASER DIODE
BRN P17-1
4
3
116 VIO P17-2
BACKSIDE OF PCB CHASSIS ASSY 2
1
1.00
121 2X WAFER PRESENCE BLK P17-3
SENSOR RED P17-4
G 40 REF DETAIL F 6 CASSETTE SLOT BLK P17-5
G
WAFER EXCESSIVE PROTRUSION SENSOR AND SENSOR RED P17-6

ELEVATOR LIMITS CABLE WAFER PROTRUSION BLK P17-7
FLAT RIBBON CABLE SENSOR
106 RED P17-8
3.50 2X
BRN P17-13
15 ELEVATOR LIMITS RED P17-14
RED WIRE CABLE
BLACK WIRE DETAIL G 67 2X ORN P17-15
YEL P17-16
3X 6 5 GRN P17-21
105 .30 107
WHT P17-22
F .60 WAFER EXCESSIVE F
PROTRUSION SENSOR BLK P17-23
RED P17-24
YEL P17-10
44
113 51
TB2
TB1
E J61
P1 P59
1. MANUFACTURE PER ASYST WORKMANSHIP E
STANDARDS 2000-0311-01.
2. INSPECT PARTS FOR SCRATCHES OR DAMAGE.
3 ROUTE WIRES/CABLES TO CONNECTION AND

40 REF ADD 12.00 .25 INCHES TO WIRE LENGTH.
USE HAND TOOL 3M 3430-1000 AS REQUIRED.
4 TYPE 'P17' ON LABEL, ITEM 103 , AND APPLY

AS SHOWN.
2X 90
5 SEPARATE CABLE WIRES 1.00 INCH BEFORE
D 2X 51 D
INSERTING INTO ITEM 104 PER DETAIL F INSERTING INTO ITEM 104 .
6 STRIP 3.50 INCHES OF CABLE JACKET. TRIM

CABLE SHIELD WIRE BACK TO .30 INCHES.
J-HOOK AND SOLDER BLACK WIRE, ITEM 107 ,
TO CABLE SHIELD WIRE. COVER WITH ITEM 105 .
COVER CABLE END WITH ITEM 106 PER DETAIL G.
P21
7 CABLE ITEM 43 CONNECTS TO J10 OF

ITEM 7 .
8. APPLY ADHESIVE, ITEM 116 TO SCREWS

C WITHOUT LOCK WASHERS. C
9 SLIDE EDGE PROTECTOR, ITEM 115 ALONG

54
THE EDGES OF THE SLOT.
FROM FAN 10. VERIFY ASSY IS BUILT PER DWG AND CHECK
4 REF FOR DAMAGE.
U1 11. IDENTIFY PART PER MARKING METHOD 12 OF

J12
104 ASYST CORPORATE PROCEDURE 2000-0311-01.
40 REF 40 P17
103 12. PACKAGE PER ASYST WORKMANSHIP STANDARDS
J16
2000-0311-01.
3 COSMETIC PART: YES X NO
FROM PORT PLATE
B B
1 REF 4
SEE DETAIL H -01 SHOWN

J7 J9
J6 J8 J10 91
43
7 114 REF
QTY MATERIAL
ITEM PARTNUMBER DESCRIPTION SPECIFICATION
REQD
PARTS LIST
9 115
DIMENSIONS ARE ININCHES.
TOLERANCES ARE:
TECHNOLOGIES, INC.
39 FRACTIONS DECIMALS
.XX .02
ANGLES
- .XXX - -
APPROVALS DATE
MATERIAL DRAWN
MAGILL MINI ENVIRONMENT ASSY, LPT
A SEE SHEET 1
CHECKED
9/11/96
A
SEE SHEET 1 DES.ENGR. SIZE CADFILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
M.NG 11/15/96 E A4351E2C 9700-4351-XX C
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
TO CONN ITEM 104 - - SEE SHEET 1 - -
SEE WIRE LIST

H
(SEE DETAIL G )
subjectmattertherofunlessbywrittenagreementwithorwritten 1
2 3
4
TO CONN ITEM 104

SEE WIRE LIST
(SEE DETAIL F)
55 5X
82 5X
1
P20
G G
DETAIL P
BACKSIDE
4 1 J6 4 1 J5 7 J4 1 7 J3 1
P6 P5 P4 P3
REV
9700-3271-01
2X 117 J2 26
1
P1
J1 10
A SYST T ECH NO LO GIE S, INC AS SY. NO. 32 00 -1 0 37 -0 1 R EV.
119 2X
2X 61
C 45
12 P51
2X 66 61 2X
F F
C 9
(SEE SHT 1)
SECTION M-M
17
32
4X 18
56 2X
3X 51
E E
23 3X 74 3X 74 4X 74 2X 63
M M
SECTION N-N
74
LOAD
22
UNLOAD
D HOME D
100 8
2X 73 111 2X
POWER
7X 74 21
14
C C
N N
61
4X 87
94
24
29 118
2X 20
61
4X 61
B 2X 87 B
5
94 61 2X
FILTER
2X 10
6
-02 SHOWN
2X 60
26 REF
26
19 ITEM
QTY
MATERIAL
REQD SPECIFICATION
PARTS LIST
7 4 REF 77 41 UNLESSOTHERWISESPECIFIED CONTRACT NO.
81
TOLERANCESARE:
.XX .02
- -
.XXX - APPROVALS
2X
DATE
69 MATERIAL DRAWN
A 2X 87
SEE SHEET 1
CHECKED
9/11/96
A
28 2 FINISH E.CORTEZ 11/15/96
42 3 SEE SHEET 1 DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
2X 94 E
77 MFG.ENGR.
M.NG 11/15/96 A4351E3C 9700-4351-XX C
DO NOT SCALE DRAWING L. TURNER 11/15/96 SCALE 1/2 SHEET 3 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONSRECEIVING THISCONFIDENTIALDRAWING: REVISIONS
TechnologiesInc.,Fremont,California. thisdrawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
any right in, orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
PLACE POWER READY
POD IN
H
16
46
WIRE LIST 104 P17 3

13 FROM COLOR TO
120 RED/BRN P17-1
67 4X LASER DIODE
BLK/VIO P17-2
WAFER PRESENCE BLK P17-3
SENSOR RED P17-4
116
CASSETTE SLOT BLK P17-5
2X 121 6
G SENSOR RED P17-6 G
WAFER PROTRUSION BLK P17-7
SENSOR RED P17-8
15
BRN P17-13
2X 67
ELEVATOR LIMITS RED P17-14
CABLE ORN P17-15
YEL P17-16
5 GRN P17-21
WHT P17-22
WAFER EXCESSIVE
F RED P17-24 F
YEL P17-10
113
E E
REF 40
D D
P21
C C
54
FROM FAN
4 REF
U1
J12
104
40
P17
103
J16
FROM PORT PLATE 3

1 REF
B 4 B
SEE DETAIL H
(SEE SHT 2)
J7 J9 -02 SHOWN
J6 J8 J10
43 7
QTY MATERIAL
ITEM PART NUMBER DESCRIPTION SPECIFICATION
REQD
PARTS LIST
TOLERANCES ARE:
TECHNOLOGIES, INC.
39 91 115 9 FRACTIONS
-
DECIMALS
.XX .02
ANGLES
-
114 REF MATERIAL DRAWN

A SEE SHEET 1
CHECKED
9/11/96
A
SEE SHEET 1 DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
MFG.ENGR.
M.NG 11/15/96
E A4351E4C 9700-4351-XX C
DO NOT SCALE DRAWING A.TAHERI 11/15/96 SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1

9700-4351-01 REV C MINI-ENVIRONMENT ASSY,LPT,RIGH
0001 9700-3716-01 G 1 EA PORT PLATE ASSY, RIGHT

0002 4001-8534-01 A 1 EA PANEL,CARD CAGE ACCESS
0003 4001-8533-01 A 1 EA PANEL,FFU ACCESS
0004 9700-3706-01 D 1 EA FAN ASSY,MINI-ENVIRONMENT
0005 4001-8240-01 A 1 EA GUIDE,GARAGE
0006 4001-8528-01 A 1 EA BLOCK,ROLLER
0007 9700-3717-01 D 1 EA PCB CHASSIS ASSY,2200
0008 9700-3732-01 B 1 EA SWITCH ASSY
0009 9600-0687-01 A 1 EA MODIFIED,EXTRUSION,STRIP,COVER
0010 4001-8517-01 A 2 EA BRACKET,MOUNTING,FFU
0011 3201-1100-03 K 1 EA PCB ASSY,SMART PROBE,INX 2200
0011 9700-3437-01 OB 1 EA SMART PROBE PCB ASSY, W/HEADE
0012 3200-1038-02 G 1 EA PCB, ASSY, LED INDICATOR PANEL
0013 4001-6928-01 B 1 EA COVER, TOP REAR
0014 9600-0641-02 A 1 EA MODIFIED, EXTRUSION, SWITCH CO
0015 4001-6929-01 B 1 EA COVER, TOP FRONT
0016 4001-8448-01 A 1 EA LABEL,LED
0017 4001-8238-01 B 1 EA GUSSET,MAIN,RIGHT
0018 4001-7877-01 A 4 EA GUIDE WHEEL
0020 4001-8120-01 A 2 EA CLAMP, EXTRUSION
0021 9600-0660-02 A 1 EA MODIFIED, COLUMN, MINI-ENVIRON
0022 4001-8126-01 B 1 EA COVER,MINI-ENVIRONMENT
0023 9600-0669-01 A 1 EA MODIFIED,EXTRUSION,GUIDE WIRE,
0024 4001-8206-01 A 1 EA PLATE,SUB
0026 4001-7832-01 A 1 EA FILTER, 11.25 X 6.81 X 7.48 DP
0026 4002-0229-01 A 1 EA FLTR,ULPA,11.25X6.81X7.48,DP
0027 4001-1831-01 F 1 EA IR FILTER
0028 4001-7836-01 A 1 EA CAP,END
0029 4001-8529-01 A 1 EA GUIDE,CARD CAGE
0030 7500-0257-01 2 EA STANDOFF, 4-40 X .250 OD X 3/8
0031 7500-0812-01 3 EA GASKET,.0625 X .38 PORON
0032 4001-8229-01 A 1 EA COVER,GUSSET
0033 4001-8303-01 A 1 EA SHIELD,LOWER
0039 7500-0868-01 2 EA CLAMP, CABLE, ADJ-RELEASABLE,
0040 9700-4291-01 A 1 EA HARNESS,MINI-ENVR. TO CARRIAGE
0041 4001-8531-01 A 1 EA BRACKET, CABLE SPRING, MINI-EN


0042 4001-8532-01 A 1 EA PLATE,COVER

0043 9700-4072-01 A 1 EA CABLE ASSY,SWITCH PANEL EXTENS
0046 4001-8663-01 A 1 EA LABEL,LPT 2200,LOGO
0054 7500-0859-01 1 EA GASKET,PORON,.50W .25T 48 LG,
0065 7000-2040-04 2 EA SCREW, SLOTTED PAN, NYLON, 4-4
0067 7000-0447-24 6 EA SCREW, SOC FLAT HD CAP, SS, 8-
0077 7000-2135-06 2 EA SCREW, CAPTIVE 8-32 X 3/8 SST
0081 7500-1023-01 2 EA STANDOFF,5/16 HEX,FEM,10-32 X
0082 7500-1069-01 5 EA CAP PLUG
0091 6200-1139-01 1 EA IC, EPROM, 27C020, DIP-32, 150
0094 7200-0014-08 8 EA WASHER, FLAT, SS, #8
0100 4001-8699-01 A 1 EA BLOCK,STOP,ADJUSTMENT,PORT PL
0112 9700-4052-02 B 1 EA CABLE ASSEMBLY,DC POWER AMPLI



0114 6005-1012-10 E 0 EA FIRMWARE,LPT MINI-ENVR CONT
0115 7500-2131-01 0.35 FT EDGE,PROTECTOR,0.18 GAP,NYLON
0120 7500-2291-01 1 EA PLUG,BUTTON,FLUSH,.50 DIA


9700-4351-02 REV C MINI-ENVIRONMENT ASSY,LPT,LEFT
0001 9700-3716-02 G 1 EA PORT PLATE ASSY, LEFT

0005 4001-8240-01 A 1 EA GUIDE,GARAGE
0006 4001-8528-01 A 1 EA BLOCK,ROLLER
0008 9700-3732-01 B 1 EA SWITCH ASSY
0015 4001-6929-01 B 1 EA COVER, TOP FRONT
0016 4001-8448-01 A 1 EA LABEL,LED
0017 4001-8238-02 C 1 EA GUSSET,MAIN,LEFT
0018 4001-7877-01 A 4 EA GUIDE WHEEL
0023 9600-0669-02 A 1 EA MODIFIED,EXTRUSION,GUIDE,WIRE,
0024 4001-8206-01 A 1 EA PLATE,SUB
0026 4001-7832-01 A 1 EA FILTER, 11.25 X 6.81 X 7.48 DP
0027 4001-1831-01 F 1 EA IR FILTER
0028 4001-7836-01 A 1 EA CAP,END
0030 7500-0257-01 2 EA STANDOFF, 4-40 X .250 OD X 3/8
0031 7500-0812-01 3 EA GASKET,.0625 X .38 PORON
0032 4001-8229-02 A 1 EA COVER,GUSSET
0033 4001-8303-01 A 1 EA SHIELD,LOWER
0039 7500-0868-01 2 EA CLAMP, CABLE, ADJ-RELEASABLE,


0042 4001-8532-01 A 1 EA PLATE,COVER

0082 7500-1069-01 5 EA CAP PLUG
0091 6200-1139-01 1 EA IC, EPROM, 27C020, DIP-32, 150
0094 7200-0014-08 8 EA WASHER, FLAT, SS, #8



0120 7500-2291-01 1 EA PLUG,BUTTON,FLUSH,.50 DIA

8 7 6 5 4 3 2 1
Reproduction Forbidden withoutthespecificwrittenpermissionofAsyst
TechnologiesInc.,Fremont,California. thisdrawingis only conditionally
45 TO CONN ITEM 11 ZONE REV. DESCRIPTION APPROVED DATE
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - A ECN N4242: PRODUCTION RELEASE JK 1/21/98

thedrawingoranyparttherof,exceptformanufacture byvendorsfor
- B ECN N4332 JK 4/08/98
H
Asyst Technologies, Inc. and formanufactureunderthecorporation's
TO CONN ITEM 104 H
SEE WIRE LIST
(SEE DETAIL G)
2 3
1 4
95 2X
8
27 TO CONN ITEM 104
1 47
SEE WIRE LIST
64 2X 55 5X 117 (SEE DETAIL F )

82 5X 87
G 94 9 G
SECTION J-J DETAIL B

BACKSIDE 13 59 TO PCB CHASSIS ASSY ITEM 7
45 REF
P20
118
119
4 1 J6 4 1 J5 7 J4 1 7 J3 1
P6 P5 P4 P3
2X 120
P1
J2 26
1 J1 10
ASYST TECHNOLOGIES, INCASSY. NO. 3200-1037-01 RE V.
J 8 122 2X 61 2X 61 2X
F 12 F
P51
9 2X 66
J
57 3X
SECTION A-A
18 4X
51 3X
58 2X
17
E E
63 2X 74 4X 74 3X 74 3X
A A
32
74 56 2X
LOAD
100
73
UNLOAD
D
22
HOME
23 SECTION E-E D
8
111 2X 65 2X
POWER
11
30 2X
2X 93
21 74 7X
27
14 7
REF 37 64 2X
C C
61
E E
-01 SHOWN SECTION C-C
87 4X
94
24
121 29
20 2X
61 TABULATION
61 4X
B 87 2X -01 MIRROR FINISH, RIGHT (SHEETS 1 AND 2) B
5
94 -02 MIRROR FINISH, LEFT (SHEETS 3 AND 4)
2X 61
6
FILTER -03 #4 FINISH, RIGHT (SHEETS 1 AND 2)
10 2X 26 REF 60 2X -04 #4 FINISH, LEFT (SHEETS 3 AND 4)
26 4
19 ITEM
QTY PART NUMBER DESCRIPTION
MATERIAL
REQD SPECIFICATION
PARTS LIST
41 7 UNLESSOTHERWISESPECIFIED CONTRACT NO.
77 REF 2X 81
TECHNOLOGIES, INC.
.XX .02
- -
69 MATERIAL DRAWN MINI ENVIRONMENT ASSY,

MAGILL
A 28
SEE B.O.M. 9/12/96
LPT, REV PPLT A
2 87 2X 9700-4371-XX LPT
FINISH
CHECKED
E.CORTEZ 11/15/96
3 42 N/R DES.ENGR. SIZE DWG. NO. REV.
94 77 2X NEXTASSY PRODUCT
E
M.NG 11/15/96 A4370E1B 9700-4370-XX B
SEE SHEET 2 FOR NOTES FIRST USED ON DO NOT SCALE DRAWING
MFG.ENGR.
L. TURNER 11/15/96 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
ReproductionForbiddenwithout the specific written permissionofAsyst
. - SEE SHT 1 . .
thedrawing oranyparttherof,exceptformanufacturebyvendorsfor PLACE
POD IN
POWER READY
AsystTechnologies,Inc.and formanufactureunderthecorporation's
H
46 16 WIRE LIST 104 P17 3
FROM COLOR TO
13 RED/BRN P17-1
112 LASER DIODE
BLK/VIO P17-2
DETAIL H 5
67 4X
4
1.00 SENSOR RED P17-4
2
1
5 CASSETTE SLOT BLK P17-5
6
40 SENSOR RED P17-6
G
REF
DETAIL F SENSOR RED P17-8 G
WAFER EXCESSIVE PROTRUSION SENSOR AND BRN P17-13
ELEVATOR LIMITS CABLE
106
3.50 C FLAT RIBBON CABLE
ELEVATOR LIMITS
CABLE
RED
ORN
P17-14
P17-15
2X
YEL P17-16
RED WIRE
GRN P17-21
BLACK WIRE DETAIL G 3X 6 15 5
WHT P17-22
67 2X WAFER EXCESSIVE
105 .30 107
.60 C RED P17-24
YEL P17-10
F F
1. MANUFACTURE PER ASYST WORKMANSHIP

37 STANDARDS 2000-0311-01.
2. INSPECT PARTS FOR SCRATCHES AND DAMAGE.
44 38
113 3 ROUTE WIRES/CABLES TO CONNECTION AND
51 56 2X ADD 12.00 .25 INCHES TO WIRE LENGTH.
TB2
TB1
E
E J61
P1 P59
AS SHOWN.
39
5 SEPARATE CABLE WIRES 1.00 INCH BEFORE
70 4X
INSERTING INTO ITEM 104 PER DETAIL F.

40 REF
J-HOOK AND SOLDER BLACK WIRE, ITEM 107 ,
{12.5 .5} TO CABLE SHIELD WIRE. COVER WITH ITEM 105 .
2X 90
7 FOR -01 AND -02 VERSIONS ONLY:
2X 51 PARTIALLY PEEL BACK PROTECTIVE COVERING
D D
FROM ITEM 14 , WITH FINGERS ONLY, WHERE
REQUIRED TO COMPLETE ASSEMBLY. DO NOT USE
KNIFE, RAZOR BLADE, OR ANY OTHER TOOL TO
CUT AWAY PROTECTIVE COVERING AS THIS WILL
MAR THE MIRROR FINISH. READHERE THIS
PROTECTIVE COVERING, WHERE POSSIBLE AFTER
ASSEMBLY IS COMPLETE. DO NOT WIPE
P21
FINGERPRINTS OR SMUDGES FROM ITEM 14
AS THIS WILL MAR THE FINISH, AT THIS LEVEL.
REF ITEM 150 FOR CLEANING PROCEDURE.
8 REMOVE MIRROR, SPRING AND SCREWS

C FROM LASER ASSY AT LOCATION SHOWN AND C
REMOUNT TO ITEM 47 .
54
9 MOVE LASER SENSOR FROM POSITION AS
FROM FAN MOUNTED ON PORT PLATE ASSY, ITEM 1 , AND
REMOUNT IN LOCATION SHOWN.
4 REF
U1
10 CABLE ITEM 43 CONNECTS TO J10 OF
J12
104 ITEM 7 .
40 REF 40 P17 103
J16
11. APPLY ADHESIVE, ITEM 116 , TO SCREWS
WITHOUT LOCK WASHERS.
3
FROM PORT PLATE
B 12 SLIDE EDGE PROTECTOR, ITEM 115 ALONG B
1 REF 4 THE EDGES OF THE SLOT.
SEE DETAIL H
NOTES: CONTINUED ON SHEET 3
J7 J9
J6 J8 J10
91
43
114 REF
10 ITEM
QTY
REQD
MATERIAL
SPECIFICATION
PARTS LIST
12 115
UNLESS OTHERWISESPECIFIED CONTRACT NO.
TOLERANCESARE:
TECHNOLOGIES, INC.
.XX .02
-01 SHOWN
- .XXX - -
APPROVALS DATE
MATERIAL
DRAWN
MINI ENVIRONMENT ASSY,
SEE SHEET 1 MAGILL 9/12/96
A CHECKED
LPT, REV PPLT A
SEESHEET 1 SEE SHEET 1
NEXTASSY
9700-4370-XX
PRODUCT
MFG. ENGR.
M.NG 11/15/96
E A4370E2B B
FIRST USED ON DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
anyrightin,orlicensetousethesubjectmatterofthedrawingorany TO CONN ITEM 104 . SEE SHEET 1 . .
Asyst Technologies, Inc. and for manufactureunderthecorporation's
SEE WIRE LIST
H H
(SEE DETAIL G )
subject mattertherofunlessbywrittenagreementwithorwritten 1
2 3
4
45 8
47 TO CONN ITEM 104
TO CONN ITEM 11
SEE WIRE LIST
117 (SEE DETAIL F )
87
5X 55
94 9
5X 82

13 59 P20
1 118
G G
119
DETAIL P 45 REF
BACKSIDE
4 1 J6 4 1 J5 7 J4 1 7 J3 1
P6 P5 P4 P3
RE V
9700-3271-01
2X 120 J2 26
1
P1
J1 10
A SYST T EC H NOLOG IES, INC ASS Y. NO. 32 00 - 10 37 -0 1 RE V.
122 2X
J 2X 61
12
P51
2X 66
F F
61 2X
J 9
(SEE SHT 1)
SECTION M-M
3X 57
17
32 2X 58 4X 18
56 2X
3X 51
E E
23 3X 74 3X 74 4X 74 2X 63
M M
SECTION N-N
74
LOAD
UNLOAD
D 22 HOME D
100 8
73 111 2X
POWER
7X 74 21 NOTES: CONTINUED FROM SHEET 2
13 REMOVE EXISTING SCREW AND REPLACE WITH

14 7
ITEMS 59 , 118 AND 119 .
C C
14. VERIFY ASSY IS BUILT PER DWG AND
CHECK FOR DAMAGE.
N N 15. IDENTIFY PART PER MARKING METHOD 12 OF

61
4X 87 16. PACKAGE PER ASYST WORKMANSHIP STANDARDS
2000-0311-01, COSMETIC PART: YES X NO
94
24
29
2X 20 121
61
4X 61
B 2X 87 B
-02 SHOWN
5
94 61 2X
2X 10
FILTER
2X 60 6
26 REF
26
QTY MATERIAL
19 ITEM REQD PART NUMBER DESCRIPTION SPECIFICATION
4 PARTS LIST
7 REF 77 CONTRACT NO.
41
81 TOLERANCES ARE:
TECHNOLOGIES, INC.
.XX .02
- .XXX - -
APPROVALS
2X
DATE
69 MATERIAL DRAWN MINI ENVIRONMENT ASSY,
MAGILL 9/12/96
A 87
SEE SHEET 1
LPT, REV PPLT A
28 2 FINISH
CHECKED
E.CORTEZ 11/15/96
42 3 SEE SHEET 1 DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
2X 77 94 M.NG 11/15/96
E A4370E3B 9700-4370-XX B
MFG. ENGR.
DO NOT SCALE DRAWING L. TURNER 11/15/96 SCALE 1/2 SHEET 3 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
Technologies Inc., Fremont,California. thisdrawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
the drawing or anyparttherof,exceptformanufacturebyvendorsfor
PLACE POWER READY
POD IN
AsystTechnologies, Inc.andformanufactureunderthecorporation's
H writtenlicense. Norighttoreproducethisdrawingis grantedforthe
subject matter therof unlessbywrittenagreementwithorwritten
H
16
46
13 WIRE LIST 104 P17 3

67 4X FROM COLOR TO
RED/BRN P17-1
LASER DIODE
BLK/VIO P17-2
SENSOR RED P17-4
G 6 SENSOR G
RED P17-6
(SEE SHT 1) WAFER PROTRUSION BLK P17-7
15
C SENSOR RED P17-8
2X 67 BRN P17-13
CABLE ORN P17-15
YEL P17-16
5 GRN P17-21
C WAFER EXCESSIVE
WHT P17-22
F RED P17-24 F
YEL P17-10
37
38
113
2X 56
E E
39
4X 70
REF 40
12.5 ± .5
D D
P21
C C
54
FROM FAN
4 REF
U1
40
J12
104
P17
103
J16
FROM PORT PLATE 3

B B
1 REF 4
SEE DETAIL H
(SEE SHT 2)
J7 J9
J6 J8 J10
43 115 12
QTY MATERIAL
10 ITEM
REQD
PART NUMBER DESCRIPTION SPECIFICATION
PARTS LIST
-02 SHOWN
TOLERANCESARE:
.02
91
.XX
- .XXX - -
APPROVALS DATE
REF
MATERIAL DRAWN
MINI ENVIRONMENT ASSY,
114 MAGILL
A SEE SHEET 1
CHECKED
9/12/96
LPT, REV PPLT A
MFG. ENGR.
M.Ng 11/15/96
E A4370E4B 9700-4370-XX B
DO NOT SCALE DRAWING L.TURNER 11/15/96 SCALE 1/2 SHEET 4 OF 4
8 7 6 5 4 3 2 1

9700-4370-01 REV B MINI-ENVR.ASSY,LPT,REV.PPLT,
0001 9700-3716-01 G 1 EA PORT PLATE ASSY, RIGHT

0005 4001-8240-01 A 1 EA GUIDE,GARAGE
0006 4001-8528-01 A 1 EA BLOCK,ROLLER
0008 9700-3732-01 B 1 EA SWITCH ASSY
0015 9600-0692-01 A 1 EA MODIFIED,COVER,TOP FRONT
0016 4001-8448-01 A 1 EA LABEL,LED
0018 4001-7877-01 A 4 EA GUIDE WHEEL
0024 4001-8206-01 A 1 EA PLATE,SUB
0026 4001-7832-01 A 1 EA FILTER, 11.25 X 6.81 X 7.48 DP
0027 4001-1831-01 F 2 EA IR FILTER
0028 4001-7836-01 A 1 EA CAP,END
0030 7500-0257-01 2 EA STANDOFF, 4-40 X .250 OD X 3/8
0031 7500-0812-01 3 EA GASKET,.0625 X .38 PORON
0032 4001-8229-01 A 1 EA COVER,GUSSET
0033 4001-8599-01 A 1 EA SHIELD,LOWER,REVERSE PROBE,RI
0037 4001-8596-01 A 1 EA HOUSING PROBE
0038 4001-8597-01 A 1 EA COVER,HOUSING PROBE
0039 4001-8598-01 A 1 EA BRACKET,HOUSING,PROBE



0042 4001-8532-01 A 1 EA PLATE,COVER
0045 9700-4076-01 A 1 EA CABLE ASSY,PROBE,PLUG TYPE,EXT
0047 4001-9576-01 A 1 EA BLOCK,MOUNTING,MIRROR,KINEMAT
0047 4001-8519-01 INC 1 EA BLOCK,MOUNTING,MIRROR
0070 7000-2149-18 12 EA SCREW,PHIL FLAT HD,SST,8-32 X
0082 7500-1069-01 5 EA CAP PLUG
0091 6200-1139-01 1 EA IC, EPROM, 27C020, DIP-32, 150
0094 7200-0014-08 13 EA WASHER, FLAT, SS, #8
0095 7100-0034-40 2 EA NUT, HEX, SS, #4-40



0119 7200-0014-04 1 EA WASHER, FLAT, SS, #4
0150 2000-0840-01 A 0 EA PROCEDURE,STAIN REMOVAL PROC


0001 9700-3716-02 G 1 EA PORT PLATE ASSY, LEFT

0005 4001-8240-01 A 1 EA GUIDE,GARAGE
0006 4001-8528-01 A 1 EA BLOCK,ROLLER
0008 9700-3732-01 B 1 EA SWITCH ASSY
0015 9600-0692-01 A 1 EA MODIFIED,COVER,TOP FRONT
0016 4001-8448-01 A 1 EA LABEL,LED
0018 4001-7877-01 A 4 EA GUIDE WHEEL
0024 4001-8206-01 A 1 EA PLATE,SUB
0026 4001-7832-01 A 1 EA FILTER, 11.25 X 6.81 X 7.48 DP
0027 4001-1831-01 F 2 EA IR FILTER
0028 4001-7836-01 A 1 EA CAP,END
0030 7500-0257-01 2 EA STANDOFF, 4-40 X .250 OD X 3/8
0031 7500-0812-01 3 EA GASKET,.0625 X .38 PORON
0032 4001-8229-02 A 1 EA COVER,GUSSET
0033 4001-8599-02 A 1 EA SHIELD,LOWER,REVERSE PROBE,LE
0037 4001-8596-01 A 1 EA HOUSING PROBE
0038 4001-8597-01 A 1 EA COVER,HOUSING PROBE
0039 4001-8598-01 A 1 EA BRACKET,HOUSING,PROBE



0042 4001-8532-01 A 1 EA PLATE,COVER
0045 9700-4076-01 A 1 EA CABLE ASSY,PROBE,PLUG TYPE,EXT
0047 4001-9576-01 A 1 EA BLOCK,MOUNTING,MIRROR,KINEMAT
0047 4001-8519-01 INC 1 EA BLOCK,MOUNTING,MIRROR
0070 7000-2149-18 12 EA SCREW,PHIL FLAT HD,SST,8-32 X
0082 7500-1069-01 5 EA CAP PLUG
0091 6200-1139-01 1 EA IC, EPROM, 27C020, DIP-32, 150
0094 7200-0014-08 13 EA WASHER, FLAT, SS, #8
0095 7100-0034-40 2 EA NUT, HEX, SS, #4-40



0119 7200-0014-04 1 EA WASHER, FLAT, SS, #4
0150 2000-0840-01 A 0 EA PROCEDURE,STAIN REMOVAL PROC

8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONSRECEIVING THISCONFIDENTIALDRAWING: REVISIONS
B B
issued andneitherreceipt nor possession therof confers or transfers - A ECN N4242: PRODUCTION RELEASE JK 1/21/98
any right in, or license to use the subject matter of the drawing or any (SEE SHT 2)
designs or technical information shown theron, or anyright to reproduce - B ECN N4332 JK 4/08/98
H the drawing or any part therof, except for manufacture by vendors for H
C C
C ECN N4425 JK 6/22/98
written license. No right to reproduce this drawing is granted for the D ECN N4565 JK 1/12/99
27 (SEE SHT 1)
32 REF
A 24 8
(SEE SHT 2) 72 5X
32
90
THREAD INTO
107 2X
ITEM 27 , AS
SHOWN, AND
G PULL TAUT G
2X 50
REF 3
2X 68 6
2X 67
SECTION G-G
50 2X SCALE: 1/1
74
3X (REF SHT 2)
68 2X
73
VIEW F-F 20 67 2X
(REF SHT 1) 8
94 74 2X
97
F F
27
93
13 REF 73 2X
VIEW C-C 11
4X
89 7 REF
(REF SHT 1)
AA CABLE
FEEDTHRU
151 DANGER
45 -01 & -02 21 CUTOUT
LASERRADIATION WHEN OPEN
ONLY
AVOID DIRECT EYEEXPOSURE.
8
89 2X
-01 & -02
E 17 E
ONLY
12 REF E (SEE SHT 2)

E 30
31
LOAD
8 7 6
55 4X
(9.00) UNLOAD
(3.50)
D
8 HOME
REF
(SEE SHT 1) SEE DETAIL R
(SEE SHT 3) VIEW D-D
D POWER
(REF SHT 1) D
104 37 1. MANUFACTURE PER ASYST TECHNOLOGIES

(7.50) WORKMANSHIP STANDARDS 2000-0311-01.
(19.20) 81
2. INSPECT PARTS FOR SCRATCHES AND DAMAGE.
3. APPLY ADHESIVE, ITEM 113 ,TO ALL
D 100 2X
4.
SCREWS WITHOUT LOCK WASHERS.
SEE WIRE TABLES (SHEET 4) FOR
106 4X HARNESS TERMINATIONS.
C C
5 APPLY ITEM 84 AS SHOWN.
99
F 6 APPLY LUBRICANT, ITEM 114 , (NSK-2),
(SEE SHT 1) TO ID OF ROLLER TRACK
63
(8.50)
F PRIOR TO INSERTING ROLLERS INTO TRACK.
NOTES CONTINUED ON SHEET 4 OF 4
A
23
8
(4.00) TABULATION
103
B DASH NO. DESCRIPTION B
(2.00)
-01 MIRROR FINISH, RIGHT (AS SHOWN)
-02 MIRROR FINISH, LEFT (MIRROR IMAGE)
109
105 -03 #4 FINISH, RIGHT (AS SHOWN)
2X -04 #4 FINISH, LEFT (MIRROR IMAGE)
! CAUTION
VIEW AA-AA
MECHANICALPINCH
9
POINTS.WILLRESULT
INBODILYINJURY
QTY MATERIAL
IFPROTECTIVECOVER
ISREMOVED.
REQD
PARTS LIST
ITEM 20, 90 REMOVED UNLESS OTHERWISESPECIFIED CONTRACTNO.
FOR CLARITY
TOLERANCESARE:
(REF SHT 1) - - -
.XX
.XXX
-
-
- APPROVALS DATE
A
- -
MAGILL 9/13/96
(SUB-BASE)
SEE B.O.M.
CHECKED REVERSE PPLT A
N/R LPT
AA
(SUB-BASE) NEXT ASSY
N/R DES.ENGR. SIZE CAD FILENAME DWG.NO. REV.
PRODUCT
MFG.ENGR.
M.NG 11/15/96
E A4371E1D 9700-4371-XX D
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALL PERSONSRECEIVINGTHIS CONFIDENTIALDRAWING: REVISIONS
any rightin,orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
Asyst Technologies,Inc.and formanufactureunderthecorporation's
H
permissionfromtheCompany. TECHNOLOGIES,INC.
79 3X
48761KATORD.
FREMONT, C A . 9 4 5 3 8
28 MODEL:
55
PARTNO.:
SERIALNO.:
MANUFACTURED:
8X 57
PRODUCTCOMPLIESWITHRADIATIONPERFORMANCE
STANDARDS21CFRSUBCHAPTERJ
35
3
25
40 (SEE
G 2X 56 SHT 2)
G G 54 4X
G
26
8
THREAD
ITEM 32 THRU
ROLLERS
IN ITEMS
6
1 AND 2
4 LOCATIONS
12
REF 2
4 REF
F F
7 91
DETAIL N
PODIN
POWER READY PLACE
SCALE: 1/1 .030±.010

(REF SHT 2)
VIEW A-A 111
(REF SHT 1)
VIEW B-B
(REF SHT 1)
110
2X 130
E E
86 2X
N
SEE DETAIL
(SEE SHT 2)
REMOVE PAINT ON THIS BOSS OF
PORT DOOR PRIOR TO ASSY.
POSITION WHEEL
7 92 IN TRACK IN
COLUMN 69
1 76
2X 50
D VIEW E-E 4X 78 D
.030 ±.010 (REF SHT 1)
4X 66
4
4X 71
48 8X 49 3X
44 2X
2 REF 66 3X
1 REF 71 3X
30
98
3X 130 43 2X
C ADJUST UNTIL ITEM 4 C
IS LEVEL WITH PORT
J 7 96
PLATE (PART OF ITEM 1 )
BEFORE TIGHTENING
ITEM 49 TORQUE TO
P53
(SEE SHT 3) 2X 50
K 20 IN-LBS.
(SEE SHT 3)
2 BOARD E1
(SEE SHEET 4)
SEE VIEW L
B (SEE SHT 3) (SEE SHT 3) B
J1
T T J3 63
66
4X
4X
J
71 4X
(SEE SHT 1) QTY MATERIAL
K
M
REQD SPECIFICATION
5 SEE VIEW
H H
PARTS LIST
TOLERANCESARE:
-
.XX -
- - - .XXX -
- APPROVALS DATE
22 8 - -
MAGILL 9/13/96
A 85
SEE SHEET 1
FIT BOTTOM FLANGE SEESHEET 1 SEE SHEET 1 FINISH E.CORTEZ 11/15/96
INTO BASE PLATE AND NEXT ASSY PRODUCT
SNAP INTO PLACE MFG.ENGR.

M.NG 11/15/96 E A4371E2D 9700-4371-XX D
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
TechnologiesInc.,Fremont,California. thisdrawing is only conditionally ZONE REV. DESCRIPTION APPROVED DATE
any right in, orlicensetousethesubjectmatterofthedrawingorany - - SEE SHEET 1 - -
designsortechnicalinformationshowntheron,oranyrighttoreproduce SHOWN WITH (BLUE)
CABLE G1 COVER REMOVED (RED)
H H
VIEW M
POWER SUPPLY A5
P7
CPU ASSEMBLY
(REF SHT 2) (+) (-)
REF 2 + -
DETAIL 'W' (REF) FG

TO DRIVE
REF 5 COLUMN FAN
I/O CABLE
G RC TERMINAL RCG TERMINAL G

ENC_G LIMITG
ET
ENC_T
LT
LIMITT
EV
ENC_V
LV
LIMITV
ER
ENC_R
LR
LIMITR
J3 J3 SIDE OF CHASSIS BOARD A1
J61 BRAKEG BRAKET
MT BV
BRAKEV
MV BR
BRAKER
MR NOT SHOWN FOR CLARITY MOTOR ASSY H1
X
P59 P60
CABLE B3 TB1
TB2 J4 SEE DETAIL

REMOVE COVER TO ALLOW (SEE SHT 4)
CABLE ROUTING, THEN J1
REINSTALL
BOARD A4 J3
BOARD A3 P2
BOARD B1 J2 J5
J1
J1
P1
P3
F 8 REF F
ENET
12 REF BOARD A2
30 REF
VIEW L
PARALLEL SERIAL3/SERIAL4 SERIAL1/SERIAL2
FLOPPY SCSI
UTIL IDE
P5
BOARD B2 2X .80 .06
ARM SERVO ASSEMBLY P10 J4
P16
(UNDERNEATH)
SHOWN WITH COVER REMOVED
(REF SHT 2) REMOVE COVER TO GAIN GRN/YEL-TERM 1
ACCESS TO B2/SERIAL JACK,
THEN REINSTALL
P20
REF SHIELD FROM CABLE\PMOUNT TO MASKED 6-32 HOLE

END OF SPRINGS GRN/YEL-TERM 2 1 3
84 5 CABLE A6
E 82 J5 AT HOLES MOTOR ASSY H2 E
(REF SHT 4)
SEE DETAIL
(SEE SHT 4)
X
REF 1
{.50}
101
{.50}
{1.00} Z
108 {.75}
2X 83
9 66 31
H
REF
2X 87
71 REF 84
4X 50
D D
5 4X 66 Z
CABLE F1
4X 71
GUIDE RAIL
P6P6
VIEW T-T
MODULE C2
(REF SHT 2)
DETAIL R
SCALE: 1/1 GND BLOCK H3
(REF SHT 1) SEE DETAIL P-P
(SEE SHT 4)
C VIEW Y C
ITEM 14 HOST
REF 3
SCALE: 2/1
(REF SHT 4)
EQUIP AUX2
POWER
SAM AUX1 PARALLEL/
Y-CABLE
INTERLOCK
FROM
REF 1
MINIENVIRONMENT
CABLE C4
LAN JACK BOARD D1
REF SHIELD FROM CABLE\PMOUNT TO 6-32 PEMNUT
ITEM 3
TB2
TB1
B TB2 B
RE V_
9700-4291-01
J61
P1 P59
BOARD C1
FRAME ASSEMBLY
TB1
82
PANEL D2
J61 P1 P59 J5 J7
J6 J10
J20
ITEM PART NUMBER
GRN/YEL TERM REQD
PARTS LIST
SPECIFICATION
CABLE D3 UNLESS OTHERWISESPECIFIED

CONTRACT NO.
TOLERANCES ARE:
FROM
VIEW K-K
9700-4072-01
REV_
VIEW J-J
VENDOR_ .XX -
MINIENVIRONMENT - - - .XXX -
- APPROVALS DATE
CABLE C3 - -
MAGILL 9/13/96
A I/O PANEL
SEE SHEET 1
REVERSE PPLT A
MINIENVIRONMENT SEE SHEET 1 SEE SHEET 1 FINISH
CHECKED
(REF SHT 2) 2X 83 PART OF ITEM 3 SEE SHEET 1

NEXT ASSY PRODUCT
(REF SHT 2) MFG.ENGR.

E A4371E3D 9700-4371-XX D
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
H
I/0 PANEL WIRE TABLE PART OF
ITEM 3
ITEM NO. PART NO. WIRE COLOR, ETC. ) TERMINAL, ETC.)
FRAME WIRE TABLE ITEM 3 DETAIL 'W' 9700-4080-01 P7 D1/J7 Y-CABLE WIRE TABLE ITEM 14
REF 9700-4081-01 P8 D1/J8
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. REF 6900-1282-01 A1/J7 D2/LAN JACK ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.)
D3/J20 A6/P20
RED RING TERM (1) A5/(+) 3 9700-4373-XX 8 9700-4346-01 P6B F1/J6B
3 9700-4373-XX D3/GRN-YEL RING TERM A5/FG
BLUE RING TERM (2) A5/(-) DETAIL 'W' 9700-4080-01 P6A F1/J6A
G CPU WIRE TABLE ITEM 5 G

ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) MINIENVIRONMENT WIRE TABLE ITEM 1
7 9700-4079-01
J2
GRAY RING TERM
A4/P2
A5/RC
ITEM NO. PART NO.
FROM (CONN. LABEL,
WIRE COLOR, ETC. )
TO (JACK, PLUG,
TERMINAL, ETC.) I/O CABLE WIRE TABLE ITEM 14
WHITE RING TERM A5/RCG P5 C1/J5 FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. WIRE COLOR, ETC. )
DETAIL 'W' 9700-4080-01 P11 A1/J11 7 9700-4079-01 P22 C3/J22 TERMINAL, ETC.)
J5 A4/P5 P1 J1 14 9700-4109-01 J6A G1/P6A
REF 9700-4081-01 P13 A1/J13 REF 9700-3724-02 P3 C1/J3 DETAIL 'W' 9700-4080-01 TEST N/C
P2 A2/J2 P6 C1/J6
13 9700-4108-01
12 9700-4347-01 P3 A4/P3 P7 C1/J7
13 9700-4108-01 P3 A3/J3 13 9700-4108-01 RING TERM. CHASSIS GND
F F
14 9700-4109-01 P6 A3/J6 C3/P10 C1/J10
REF 6900-1282-01 - A1/J7 C4/P59 H1/J59
5 9700-3970-XX A6/P20 D3/J20 C4/P1 H1/J1
1 9700-4351-XX
C4/J61 H1/P61
ARM SERVO WIRE TABLE ITEM 2 C4/TB1 MOTOR 1 (RED) BASE GROUNDING BLOCK PART OF

C4/TB2 MOTOR 2 (BLK)
WIRE LIST ITEM 3
ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO.
8 9700-4346-01 P1 B2/SERIAL JACK
8 9700-4346-01 RING TERM. CHASSIS GND 8 9700-4346-01 GND RING TERM H3
12
12 9700-4347-01 P1 B1/J1 13 9700-4108-01 GND RING TERM H3
E B3/P59 H2/J59 8 A6 (GRN/YEL TERM 1) H3 E

13 3 9700-4373-XX
B3/P1 H2/J1 D3 (GRN/YEL TERM) H3
2 9700-4279-XX B3/J61 H2/P61 7 3 9700-4373-XX A6 GRN/YEL TERM 2) H3
B3/TB1 H2/MOTOR 1 (RED)
B3/TB2 H2/MOTOR 2 (BLK)
PORT DOOR WIRE TABLE ITEM 4

P3 P2 P6B
P3

ITEM NO. PART NO. WIRE TB2
(RED)
REF 9700-3724-02 P53 E1/J53 CABLE P59
D 7 REF D
TO BE
4X 82 83 4X
VIEW H-H CONNECTED
TO P/S
4X 89 ITEM 37 OF FRAME ASSY\P9700-4464-01
(REF SHT 2) : STEP 1
WIRE TB1 (BLK)
83 4X
SEE BASE GROUNDING
BLOCK WIRE LIST 41 2X 88
78 4X 50
J61 66 4X 66
71 4X 71
C DETAIL P C
(REF SHT 3)

VIEW Z 12 89
CABLE P61
5X
SCALE: 2/1 151 ITEM 3 OF FRAME ASSY
7 ENSURE THAT ITEMS 91 , 92 , AND 96 DO (REF SHT 4) TO P/S
NOT INTERFERE WITH ANY COMPONENTS ON 15 -02 ONLY
FULL TRAVEL.
Y
8 FOR -01 AND -02 VERSIONS ONLY:
PARTIALLY PEEL BACK PROTECTIVE COVERING
11 APPLY CAUTION OR DANGER LABEL THAT COMES
VIEW H-H
FROM ITEMS 20 , 21 , 22 , 23 , 24 , AND 26 , SUPPLIED WITH PORT PLATE ASSY. (REF SHT 2) : STEP 2
J1 Y
B WITH FINGERS ONLY, WHERE REQUIRED TO (SEE SHT 4) B
COMPLETE ASSEMBLY. DO NOT USE KNIFE, 12 APPLY LASER SERIAL NUMBER LABEL THAT COMES
RAZOR BLADE, OR ANY OTHER TOOL TO CUT SUPPLIED WITH PORT PLATE ASSY JUST BEFORE DETAIL X
AWAY PROTECTIVE COVERING AS THIS WILL UNIT IS MOVED TO SHIPPING.
SCALE: 1/1
MAR THE MIRROR FINISH. RE-ADHERE THIS
(REF SHT 3)
PROTECTIVE COVERING, WHERE POSSIBLE. 13 SECURE CABLE TIES, ITEM 89 AFTER ALL CABLES
AFTER ASSEMBLY IS COMPLETE. FROM STEPS 1 & 2 ARE ROUTED.
9 REMOVE EXISTING FASTENING HARDWARE AND REPLACE 14. VERIFY ASSY IS BUILT PER DWG AND CHECK FOR DAMAGE. QTY MATERIAL
REQD SPECIFICATION
WITH THE HARDWARE SHOWN. PARTS LIST
15. IDENTIFY PART PER MARKING METHOD 12 OF UNLESSOTHERWISESPECIFIED CONTRACT NO.
ASYST CORPORATE PROCEDURE 2000-0311-01. DIMENSIONSAREININCHES.
10 INSTALL THESE SCREWS BY FINGER- TIGHTENING ONLY A TOLERANCESARE:

.XX -
FEW TURNS PRIOR TO INSTALLING ITEM 99 . 16. PACKAGE PER ASYST WORKMANSHIP STANDARDS - - - .XXX - - APPROVALS DATE
INSTALL ITEM 99 BY ALIGNING SLOTS WITH THE SHAFTS OF 2000-0311-01. - -

MAGILL 9/13/96
A THESE SCREWS, THEN TIGHTEN UNTIL SNUG. COSMETIC PART: YES X NO
SEE SHEET 1
SEE SHEET 1 SEE SHEET 1 FINISH
SEE SHEET 1 DES. ENGR. SIZE CAD FILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG. ENGR.
E A4371E4D 9700-4371-XX D
8
8 7 6 5 4 3 2 1

9700-4371-01 REV D LPT ASSY, REVERSE PPLT, MIR.FI
0001 9700-4370-01 B 1 EA MINI-ENVR.ASSY,LPT,REV.PPLT,

0003 9700-4373-01 B 1 EA FRAME ASSY, MIR.FINISH,RIGHT
0017 4001-8331-01 A 1 EA COVER, SWITCH
0020 4001-8570-02 A 1 EA COVER,OUTSIDE,GUIDE COLUMN
0021 4001-8571-02 A 1 EA COVER,INSIDE,GUIDE COLUMN
0022 4001-9138-02 A 1 EA COVER,GARAGE,FRONT,#8 FINISH
0023 4001-8256-02 A 1 EA ACCESS PANEL,GARAGE
0024 4001-8230-02 A 1 EA SPACER,GARAGE
0026 4001-8284-03 A 1 EA COVER,DRIVE COLUMN,SHOWN RIG
0031 4001-8805-01 A 1 EA GUIDE,ROLLER
0035 4001-7743-01 B 1 EA LABEL, MODEL



0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0071 7200-0014-08 21 EA WASHER, FLAT, SS, #8
0081 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0093 4001-8599-01 A 1 EA SHIELD,LOWER,REVERSE PROBE,RI
0096 4001-8876-01 A 1 EA CAP, ROLLER





9700-4371-02 REV D LPT ASSY, REVERSE PPLT,MIR FI
0001 9700-4370-02 B 1 EA MINI-ENVR.ASSY,LPT,REV.PPLT,

0003 9700-4373-02 B 1 EA FRAME ASSY, MIR.FINISH,LEFT
0017 4001-8331-01 A 1 EA COVER, SWITCH
0020 4001-8570-02 A 1 EA COVER,OUTSIDE,GUIDE COLUMN
0021 4001-8571-02 A 1 EA COVER,INSIDE,GUIDE COLUMN
0022 4001-9138-02 A 1 EA COVER,GARAGE,FRONT,#8 FINISH
0023 4001-8256-02 A 1 EA ACCESS PANEL,GARAGE
0024 4001-8230-02 A 1 EA SPACER,GARAGE
0026 4001-8284-04 A 1 EA COVER,DRIVE COLUMN,MIR LEFT
0031 4001-8805-02 A 1 EA GUIDE,ROLLER
0035 4001-7743-01 B 1 EA LABEL, MODEL



0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0071 7200-0014-08 21 EA WASHER, FLAT, SS, #8
0081 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0093 4001-8303-01 A 1 EA SHIELD,LOWER
0096 4001-8876-01 A 1 EA CAP, ROLLER




8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
anyrightin,orlicensetousethesubjectmatterofthedrawingorany A ECN N4264: PRODUCTION RELEASE JK 2/2/98
designs ortechnicalinformationshowntheron,oranyrighttoreproduce
H written license. Norighttoreproduce thisdrawingisgrantedforthe
subject mattertherof unlessbywrittenagreementwithorwritten
H
32
43 REF
20 10 3X 30
17 2X 24
31 53
33
A 19
REF 42
A
32
6
G G
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
F F
E E
3X 61 20 28
20
13
5
B 3X 62
31
2X
30
THRU ITEM 9
9 22 53
27
3X, FROM
30 FARSIDE
32
D D
11
9X, FROM
24 14
7 FARSIDE
12
C C
SECTION B-B
RIGHT
B B
1. MANUFACTURE PER ASYST TECHNOLOGIES TABULATION

-01 SEE SHEETS 1 AND 2 (RIGHT)
-02 SEE SHEETS 3 AND 4 (LEFT)
3 CONNECT J24 CONNECTOR TO P24 CONNECTOR. -01 SHOWN ITEM
QTY
REQD
MATERIAL
SPECIFICATION
PARTS LIST
4. IDENTIFY PART PER MARKING METHOD CONTRACT NO.
RIGHT
UNLESSOTHERWISESPECIFIED
12 OF ASYST CORPORATE PROCEDURE

TOLERANCES ARE:
2000-0311-01. .
.XX
.XXX
.
. .
APPROVALS DATE
MATERIAL DRAWN
5. PACKAGE PER ASYST WORKMANSHIP STEVE FRAME ASSEMBLY,
A STANDARDS 2000-0311-01,
SEE BOM
CHECKED
12/17/97
LPT 2150 A
9700-4466-XX LPT 2150 B.CARLSON
FINISH 6/4/97
COSMETIC PART: YES X NO NEXT ASSY PRODUCT
N/R DES.ENGR. SIZE CAD FILENAME DWG. NO. REV.
MFG. ENGR.
B.CARLSON 6/4/97
E A4464E1A 9700-4464-XX A
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 1 OF 5
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
18
any right in, orlicensetousethesubjectmatterofthedrawingorany . SEE SHEET 1 . .
G C 34
H written license. No righttoreproducethisdrawingisgrantedforthe 2X 51 H
permissionfrom theCompany. 20 16 36
52 2X
G G
58
F F
J24 P24
J20
4
H G C H 22 4X 2
8 56
20 5X 2X 29
J7
E 3 E
J8
3
25
55
SNAP TABS INTO 30 4X
SEE DETAIL J 15 4X TAB
SLOTS IN ITEM 3 32
13 REF
24
D 24 REF 2X D
4X, FROM
FARSIDE 24 32
PORT E PORT D PORT B
PARALLEL PORT C PORT A

VENDOR_ VENDOR_
REV_ REV_
PENDT
9700-4312-01 9700-4312-01
TEACH LAN AC POWER
C C
16 FARSIDE
22 36 2X REF 1
VIEW A-A
34 2X
RIGHT
B B
22

REQD
-01 SHOWN
PARTS LIST
TOLERANCES ARE:
.XX .
. .
VIEW C-C
14 REF RIGHT MATERIAL DRAWN

STEVE
FRAME ASSEMBLY
A SEE SHEET 1
CHECKED
12/17/97
LPT 2150 A
SEE SHEET 1 SEE SHEET 1 B.CARLSON
FINISH 6/4/97
ROTATED 90 C.W. NEXTASSY PRODUCT
RIGHT MFG. ENGR.

B.CARLSON 6/4/97
E A4464E2A 9700-4464-XX A
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
. SEE SHEET 1 . .
H
12
7
G G
SECTION E-E 24
9X, FROM
FARSIDE 14
LEFT
11
F F
5
27
3X, FROM
30 FARSIDE
32 9
3X 62
E 31
2X
30
THRU ITEM 9 13
22 53
E 20 3X
E
61 20 28
E
D D
C C
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
19 REF 42
D 32 D
17 2X REF
20 43 24
10 3X 30
31 3X 30
53
B 32 B
33
-02 SHOWN
LEFT
PARTS LIST
TOLERANCESARE:
.XX .
. .
MATERIAL DRAWN FRAME ASSEMBLY
STEVE
A SEE SHEET 1
A
12/17/97
CHECKED LPT 2150
FINISH 6/4/97
NEXT ASSY PRODUCT B.CARLSON
MFG. ENGR.
6/4/97
E A4464E3A 9700-4464-XX A
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
anyrightin,orlicensetousethesubjectmatterofthedrawingorany . SEE SHEET 1 . .
H
VIEW F-F REF

14
LEFT
VIEW D-D ROTATED 90 C.W.
LEFT
G G
22
9700-4312-01 9700-4312-01
REV_ REV_
VENDOR_ VENDOR_
PORT E PORT D PORT B
PARALLEL PORT C PORT A
22
PENDT
TEACH LAN AC POWER
F F
24
24 REF 2X
32
4X, FROM
24 13 REF
FARSIDE
4X TAB
E E
SLOTS IN ITEM 3 25
15
SNAP TABS INTO 30 4X
J8 32
5X J7
20
8 56
3
2X 29
3
F 22 4X 2
4 J20
D D
J24
55
C C
58
B B
16 51
20 18 34
2X
F 36
2X 52
-02 SHOWN
PARTS LIST
TOLERANCESARE:
LEFT .
.XX .
.
MATERIAL DRAWN FRAME ASSEMBLY
STEVE
A SEE SHEET 1
A
12/17/97
CHECKED LPT 2150
FINISH 6/4/97
MFG. ENGR.
6/4/97
E A4464E4A 9700-4464-XX A
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALLPERSONSRECEIVING THIS CONFIDENTIALDRAWING: REVISIONS
issuedandneitherreceiptnorpossessiontherofconfers ortransfers
. SEE SHEET 1 . .
H writtenlicense. Norighttoreproducethis drawingisgrantedforthe
H
43
40 REF
44 2X
F
42
G G
DIRECTION
OF FLOW
41 45 2X
24
40
F F
46 2X 2X 50
J24
LABEL SIDE
F FACES OUT
48 49 47
VIEW F-F DETAIL J

E E
-01 SHOWN -01 SHOWN
REF 37
D TO BE CONNECTED TO D
P/S AT FINAL ASSY
P24 1 REF
12 REF
37
C C
38 2X
39 2X
FOR CONTINUATION
B
SEE SECTION G-G REF 14
SECTION G-G B
-01 SHOWN
VIEW H-H ITEM

QTY
REQD
UNLESSOTHERWISESPECIFIED
PART NUMBER
CONTRACTNO.
DESCRIPTION
PARTS LIST
MATERIAL
SPECIFICATION
-01 SHOWN
TOLERANCESARE:
.XX .
. .XXX . .
APPROVALS DATE
MATERIAL DRAWN
STEVE
FRAME ASSEMBLY
A SEE SHEET 1
A
12/17/97
CHECKED LPT 2150
FINISH 6/4/97
SEE SHEET 1 DES.ENGR. SIZE CAD FILENAME DWG. NO. REV.

NEXTASSY PRODUCT B.CARLSON
MFG.ENGR.
6/4/97
E A4464E5A 9700-4464-XX A
8 7 6 5 4 3 2 1

9700-4464-01 REV A FRAME ASSY,LPT 2150,RIGHT

0003 9700-4084-01 B 1 EA CONNECTOR PANEL ASSY,I/O,RIGHT
0004 4001-8287-01 A 1 EA BRACE,COLUMN
0006 4001-8289-01 A 1 EA PLATE,TOP
0009 4001-9363-01 A 1 EA FRAME,DOOR BRACKET,RIGHT
0010 4001-9362-01 A 1 EA DOOR BRACKET
0013 4001-8214-01 A 1 EA GARAGE,REAR
0014 4001-8562-01 A 1 EA BASE,SUB,RIGHT
0017 7500-2012-01 2 EA BUMPER, FEET, RUBBER
0019 9600-0103-01 D 1 EA DOOR, PORT, PLATE/PIN ASSY, 15
0032 7200-0014-08 12 EA WASHER, FLAT, SS, #8
0033 7200-0014-25 1 EA WASHER, FLAT, SS, #1/4
0042 4001-9074-01 A 1 EA PLATE,FAN MOUNTING,RIGHT


9700-4464-01 REV A FRAME ASSY,LPT 2150,RIGHT

0048 7100-0116-32 1 EA NUT, KEP, SS, #6-32
0049 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0051 4001-9195-01 A 1 EA BRACKET,BASE,RIGHT
0054 7200-0014-10 3 EA WASHER, FLAT, SS, #10


9700-4464-02 REV A FRAME ASSY,LPT 2150,LEFT

0003 9700-4084-02 B 1 EA CONNECTOR PANEL ASSY,I/O,LEFT
0004 4001-8287-01 A 1 EA BRACE,COLUMN
0006 4001-8289-02 A 1 EA PLATE,TOP
0009 4001-9363-02 A 1 EA FRAME,DOOR BRACKET,LEFT
0010 4001-9362-01 A 1 EA DOOR BRACKET
0013 4001-8214-02 A 1 EA GARAGE,REAR
0014 4001-8562-02 B 1 EA BASE,SUB,LEFT
0019 9600-0103-01 D 1 EA DOOR, PORT, PLATE/PIN ASSY, 15
0032 7200-0014-08 12 EA WASHER, FLAT, SS, #8
0033 7200-0014-25 1 EA WASHER, FLAT, SS, #1/4
0042 4001-9074-02 A 1 EA PLATE,FAN MOUNTING,MIR LEFT


9700-4464-02 REV A FRAME ASSY,LPT 2150,LEFT

0048 7100-0116-32 1 EA NUT, KEP, SS, #6-32
0049 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0051 4001-9195-02 A 1 EA BRACKET,BASE,LEFT
0054 7200-0014-10 3 EA WASHER, FLAT, SS, #10

8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVING THISCONFIDENTIAL DRAWING: REVISIONS
issuedand neither receipt norpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany A ECN N4187: PRODUCTION RELEASE JK 12/30/97
ECN N4332
H
written license. Norighttoreproducethisdrawingisgrantedforthe TO CONN ITEM 104 B JK 4/08/98
H
C ECN N4566 JK 1/12/99
SEE WIRE LIST
(SEE DETAIL G
)
TO CONN ITEM 104

SEE WIRE LIST
(SEE DETAIL )F
17
55
5X TO PCB CHASSIS ASSY ITEM 7
1 82
G G
P20
2X 61
2X 119
2X 117
F F
WAFER EXCESSIVE
9 PROTRUSION SENSOR 2X 61
57 3X
SECTION A-A
18 4X
51 3X
58 2X
.25 ±.03 74 3X
E 63 2X E
74 4X 74 3X
A POWER READY
PODIN
PLACE
LPT 2150
A
32
74 .250 ±.03 56 2X SECTION E-E

LOAD
46
22 100
UNLOAD
73
D 23 D
HOME
8
111 2X
POWER
21 74 7X
14
C C
118
E E -01 SHOWN
61
87 4X
94
24
29
20 2X
61
61 4X TABULATION
B 87 2X B
5 -01 AS SHOWN, (RIGHT ), SHEETS 1 & 2
2X 94
61 -02 MIRROR IMAGE, (LEFT), SHEETS 3 & 4
6
FILTER
10 2X 26 REF 60 2X SEE SHEET 2 FOR NOTES
19 26
4 ITEM
QTY
REQD
PARTNUMBER DESCRIPTION
MATERIAL
SPECIFICATION
PARTS LIST
41 7 UNLESS OTHERWISESPECIFIED CONTRACT NO.
77 REF 2X 81
TOLERANCES ARE:
TECHNOLOGIES, INC.
.XX .
. .XXX . .
APPROVALS DATE
69 MATERIAL DRAWN MINIENVIRONMENT ASSEMBLY

STEVE
A 28
SEE BOM 12/17/97
LPT 2150 A
2 87 2X 9700-4466-XX LPT 2150
FINISH
CHECKED
B.CARLSON 6/4/97
3 42 N/R DES. ENGR. SIZE CAD FILENAME DWG.NO. REV.
94 77 2X NEXT ASSY PRODUCT B.CARLSON

E 9700-4465-XX
MFG.ENGR.
6/4/97
A4465E1C C
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
ReproductionForbiddenwithoutthespecificwrittenpermissionof Asyst
anyrightin,orlicensetousethesubjectmatterofthedrawingorany - SEE SHEET 1 . .
AsystTechnologies,Inc. andformanufactureunderthecorporation's
H writtenlicense. No righttoreproducethisdrawingisgrantedforthe
subjectmatter therofunlessbywrittenagreementwithorwritten
H
WIRE LIST 104 P17

112
FROM COLOR TO
DETAIL H 5 4 LASER DIODE
RED/BRN P17-1
4
3 BLK/VIO P17-2
1
1.00
SENSOR RED P17-4
40 REF
G DETAIL F 6 CASSETTE SLOT BLK P17-5
G
WAFER EXCESSIVE PROTRUSION SENSOR AND SENSOR RED P17-6

ELEVATOR LIMITS CABLE WAFER PROTRUSION BLK P17-7
FLAT RIBBON CABLE SENSOR
106 RED P17-8
3.50 2X
BRN P17-13
RED WIRE CABLE
BLACK WIRE DETAIL G ORN P17-15
YEL P17-16
3X 6 4 GRN P17-21
105 .30 107
WHT P17-22
F .60 WAFER EXCESSIVE F
RED P17-24
YEL P17-10
44
113 51
T B2
TB1
E J61
P1 P59 NOTES: UNLESS OTHERWISE SPECIFIED E
1. MANUFACTURE PER ASYST WORKMANSHIP
STANDARDS 2000-0311-01.
2 ROUTE WIRES/CABLES TO CONNECTION AND

40 REF ADD 12.00 .25 INCHES TO WIRE LENGTH.

AS SHOWN.
90
2X 4 SEPARATE CABLE WIRES 1.00 INCH BEFORE
D 51 INSERTING INTO ITEM 104 PER DETAIL F INSERTING INTO ITEM 104 . D
5. NOTE NOT USED.

J-HOOK AND SOLDER BLACK WIRE,ITEM 107 ,
P21
TO CABLE SHIELD WIRE. COVER WITH ITEM 105 .
7 CABLE ITEM 43 CONNECTS TO J10 OF ITEM 7 .

C C
8. APPLY ADHESIVE ITEM 116 , TO SCREWS
54 WITHOUT LOCK WASHERS.
FROM FAN 9 SLIDE EDGE PROTECTOR, ITEM 115 ALONG THE

EDGES OF THE SLOT.
4 REF
10. IDENTIFY PART PER MARKING 12 OF
U1
J12
104 ASYST CORPORATE PROCEDURE 2000-0311-01.
40 REF 40 11. PACKAGE PER ASYST WORKMANSHIP STANDARDS
P17
103 2 3
J16
2000-0311-01, COSMETIC PART: YES X NO
FROM PORT PLATE

B B
1 REF
SEE DETAIL H -01 SHOWN
J7 J9
J6 J8 J10
91
43
7 114 REF
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
UNLESSOTHERWISESPECIFIED CONTRACTNO.
TOLERANCESARE:
9 115 FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.

.XX .
MATERIAL DRAWN MINIENVIRONMENT ASSEMBLY
STEVE
A SEESHEET 1
CHECKED
12/17/97
LPT 2150 A
SHEET 1 SHEET 1 B.CARLSON
FINISH 6/4/97
SEESHEET 1 DES.ENGR. SIZE CADFILENAME DWG. NO. REV.
MFG.ENGR.
6/4/97
E A4465E2C 9700-4465-XX C
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICETO ALL PERSONSRECEIVINGTHISCONFIDENTIALDRAWING: REVISIONS
TO CONN ITEM 104 - SEE SHEET 1 . .
SEE WIRE LIST

H H
Asyst Technologies,Inc.and formanufactureunderthecorporation's
(SEE DETAIL G )
17 TO CONN ITEM 104

55 SEE WIRE LIST
5X
82
(SEE DETAIL F)
1
P20
G G
DETAIL P
BACKSIDE
119 2X
2X 117
2X 61
WAFER EXCESSIVE
PROTRUSION SENSOR
61 2X
F F
SECTION M-M 9
32
56 2X
3X 57
3X 74
2X 58 4X 74
23 3X 74
M PODIN
M
LPT 2150
POWER READY PLACE
E E
46
LOAD 74
SECTION N-N
UNLOAD
22
18 4X
HOME
51 3X
100 8
73 111 2X
D POWER D
63 2X
7X 74 21 14
61
4X 87
94
C N N 2X 20 C
4X 61
24 118
29
61 61 2X
2X 87
5
94
6
2X 10
FILTER
B 2X 60 B
26 REF
26
19 -02 SHOWN
7 REF 77 41
69 ITEM
QTY PART NUMBER DESCRIPTION MATERIAL
REQD SPECIFICATION
PARTS LIST
2X 87
28 2
CONTRACT NO.
42 2X 81 4 3 TOLERANCES ARE:
TECHNOLOGIES, INC.
2X 94 FRACTIONS DECIMALS ANGLES
77 .
.XX
.XXX
.
. .
APPROVALS DATE
MATERIAL DRAWN MINIENVIRONMENT ASSEMBLY
STEVE
A SEE SHEET 1
CHECKED
12/17/96
LPT 2150 A
FINISH 6/4/97
MFG. ENGR.
6/4/97
E A4465E3C 9700-4465-XX C
FIRST USED ON DO NOT SCALE DRAWING G.KOUBIAR 6/9/97 SCALE 1/2 SHEET 3OF4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
any right in, orlicensetousethesubjectmatterofthedrawingorany - SEE SHEET 1 . .
H written license. No righttoreproducethisdrawingisgrantedforthe
H
permissionfrom theCompany.
WIRE LIST 104 P17
FROM COLOR TO
RED/BRN P17-1
LASER DIODE
BLK/VIO P17-2
SENSOR RED P17-4
6
G SENSOR RED P17-6 G
SENSOR RED P17-8
BRN P17-13
CABLE ORN P17-15
YEL P17-16
4 GRN P17-21
WHT P17-22
WAFER EXCESSIVE
F RED P17-24 F
YEL P17-10
113
E E
REF 40
D D
P21
C C
54
FROM FAN
4 REF
U1
J12
104
40
P17
103 2 3
J16
FROM PORT PLATE

1 REF
B B
SEE DETAIL H
(SEE SHT 2)
J7 J9 -02 SHOWN
J6 J8 J10
43 7
115 9
REQD
PARTS LIST
TOLERANCES ARE:
TECHNOLOGIES, INC.
91 FRACTIONS DECIMALS
.XX .
ANGLES
. .
114 REF MATERIAL DRAWN MINIENVIRONMENT ASSEMBLY

STEVE
A SEE SHEET 1
CHECKED
12/17/97
LPT 2150 A
FINISH 6/4/97
MFG. ENGR.
6/4/97
E A4465E4C 9700-4465-XX C
8 7 6 5 4 3 2 1

9700-4465-01 REV C MINI ENVIR ASSY,LPT 2150,RIGHT
0001 9700-4467-01 A 1 EA PORT PLATE ASSY,LPT 2150,RIGHT

0005 4001-8240-01 A 1 EA GUIDE,GARAGE
0006 4001-8528-01 A 1 EA BLOCK,ROLLER
0008 9700-3732-01 B 1 EA SWITCH ASSY
0018 4001-7877-01 A 4 EA GUIDE WHEEL
0024 4001-8206-01 A 1 EA PLATE,SUB
0026 4001-7832-01 A 1 EA FILTER, 11.25 X 6.81 X 7.48 DP
0028 4001-7836-01 A 1 EA CAP,END
0032 4001-8229-01 A 1 EA COVER,GUSSET
0033 4001-9714-01 A 1 EA SHIELD,LOWER
0035 9600-0800-01 A 1 EA MOD,EXTRN,BEZEL,GDE,LWR SHIELD
0042 4001-8532-01 A 1 EA PLATE,COVER
0046 4001-9219-01 A 1 EA LABEL,LPT 2150


9700-4465-01 REV C MINI ENVIR ASSY,LPT 2150,RIGHT

0082 7500-1069-01 5 EA CAP PLUG
0091 6200-1139-01 1 EA IC, EPROM, 27C020, DIP-32, 150
0094 7200-0014-08 8 EA WASHER, FLAT, SS, #8


9700-4465-02 REV C MINI ENVIR ASSY,LPT 2150,LEFT
0001 9700-4467-02 A 1 EA PORT PLATE ASSY,LPT 2150,LEFT

0005 4001-8240-01 A 1 EA GUIDE,GARAGE
0006 4001-8528-01 A 1 EA BLOCK,ROLLER
0008 9700-3732-01 B 1 EA SWITCH ASSY
0018 4001-7877-01 A 4 EA GUIDE WHEEL
0024 4001-8206-01 A 1 EA PLATE,SUB
0026 4001-7832-01 A 1 EA FILTER, 11.25 X 6.81 X 7.48 DP
0028 4001-7836-01 A 1 EA CAP,END
0032 4001-8229-02 A 1 EA COVER,GUSSET
0033 4001-9714-01 A 1 EA SHIELD,LOWER
0042 4001-8532-01 A 1 EA PLATE,COVER
0046 4001-9219-01 A 1 EA LABEL,LPT 2150


9700-4465-02 REV C MINI ENVIR ASSY,LPT 2150,LEFT

0082 7500-1069-01 5 EA CAP PLUG
0091 6200-1139-01 1 EA IC, EPROM, 27C020, DIP-32, 150
0094 7200-0014-08 8 EA WASHER, FLAT, SS, #8

8 7 6 5 4 3 2 1
NOTICETO ALL PERSONSRECEIVINGTHIS CONFIDENTIALDRAWING: REVISIONS
B B
A ECN N4264: PRODUCTION RELEASE JK
(SEE SHT 2) 2/2/98
Asyst Technologies,Inc.and formanufactureunderthecorporation's B ECN N4425 JK 6/22/98
H
C C
32 REF
6 (SEE SHT 1)
32 A
(SEE SHT 2)
THREAD INTO
ITEM 27 , AS
SHOWN, AND
PULL TAUT 38
50
G VIEW F-F 27
2X 68 24 G
(REF SHT 1) 35
67 72 5X
50
68 2X
74 67
3X
73
TECHNOLOGIES,INC.
48761KATORD.
FREMONT, CA. 94538
MODEL:
PARTNO.:
SERIALNO.:
20 MANUFACTURED:
PRODUCTCOMPLIESWITHRADIATIONPERFORMANCE
STANDARDS21CFRSUBCHAPTERJ
REF 3
33
74 2X SECTION G-G
F SCALE: 1/1 F
(REF SHT 2)
VIEW C-C 27
(REF SHT 1) 73 2X
13 REF 9
39 AA
89 7 REF
4X
151 POWER READY
PODIN
PLACE
LPT 2150
21
E E
89 2X
CABLE FEEDTHRU
CUTOUT
12 REF LOAD
8 7 6 UNLOAD 31
(9.00) 55 4X
D
HOME
8 (3.50)
(SEE SHT 1) 30
REF
D POWER
SEE DETAIL R D
(SEE SHT 3)
VIEW D-D
(REF SHT 1)
104 37
81
100 2X
(7.50)
(19.20) 1. MANUFACTURE PER ASYST TECHNOLOGIES
106 4X
D
C 3. SEE WIRE TABLES (SHEET 4) FOR C
F
HARNESS TERMINATIONS.
99
4 APPLY ITEM 84 AS SHOWN.
(SEE SHT 1)
63
F
5 APPLY LUBRICANT, ASYST P/N 7500-2004-01
(NSK-2), ITEM 90 TO ID OF ROLLER TRACK
(8.50) PRIOR TO INSERTING ROLLERS INTO TRACK.
A
23
6 ENSURE THAT ITEMS 91 , 92 , AND 96 DO
NOT INTERFERE WITH ANY COMPONENTS ON
FULL TRAVEL.
103
B NOTES CONTINUED ON SHEET 4 OF 4
B
(4.00)
(2.00)
TABULATION
109
2X -02 MIRROR IMAGE (LEFT)
! CAUTION
MECHANICALPINCH
8
POINTS.WILLRESULT
INBODILYINJURY
IFPROTECTIVECOVER
ISREMOVED. ITEM REQD PART NUMBER SPECIFICATION
PARTS LIST
VIEW AA-AA UNLESSOTHERWISESPECIFIED

TOLERANCESARE:
CONTRACT NO.
TECHNOLOGIES, INC.
ITEM 20, 99 REMOVED .
.XX
.XXX
.
.
.
APPROVALS DATE
FOR CLARITY MATERIAL DRAWN FINAL ASSEMBLY,
A (REF SHT 1) (SUB-BASE) SEE BOM STEVE 12/17/96
LPT 2150 A
CHECKED
FINAL LPT 2150
AA
FINISH B.CARLSON 6/4/97
N/R DES.ENGR. SIZE CAD FILE NAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
B.CARLSON 6/4/97
E A4466E1B 9700-4466-XX B
FIRST USED ON DO NOT SCALE DRAWING G.KHOUBIAR 6/9/97 SCALE 1/2 SHEET 1 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TOALLPERSONSRECEIVING THISCONFIDENTIAL DRAWING: REVISIONS
issuedand neither receipt norpossessiontherofconfersortransfers
any right in, orlicensetousethesubjectmatterofthedrawingorany
. SEE SHEET 1 . .
H
28 79 3X
8X 57
36
3
58
40 (SEE
G 2X 56 SHT 2)
G G 25
55 5X
G
26
THREAD
ITEM 32 THRU
ROLLERS
IN ITEMS
1 AND 2 5
4 LOCATIONS
REF 2
F F
10
91
DETAIL N 6
SCALE: 1/1
(REF SHT 2)
VIEW A-A .030±.010 111
(REF SHT 1)
110
2X 50
VIEW B-B
E (REF SHT 1) E
12
1
86 2X
13 8
7
SEE DETAIL
(SEE SHT 2)
N POSITION WHEEL
92 IN TRACK IN
6
COLUMN
2X 50
D P3 P2 P6B
P3
D
.030 ±.010
48 8X 7 REF
2 REF TO BE
CONNECTED
1 REF VIEW H-H TO P/S
114 (REF SHT 2) : STEP 1
98
ITEM 37 OF FRAME ASSY
3X 50 9700-4464-01
C C
6 96
J 41
(SEE SHT 3) 2X 50 78
113
K 66
(SEE SHT 3)
71
2
112 SEE VIEW L
(SEE SHT 3) 11
B (SEE SHT 3) 89 B
J1 5X
VIEW H-H
T T
151 TO P/S
J3 63
(REF SHT 2) : STEP 2 15 -02 ONLY
66 4X
ITEM 3 OF FRAME ASSY
J
71
(SEE SHT 1) MATERIAL
K
QTY PARTNUMBER DESCRIPTION
ITEM
M
REQD SPECIFICATION
5 SEE VIEW
H H
PARTS LIST
TOLERANCES ARE:
.XX .
22 . .XXX . .
APPROVALS DATE
MATERIAL DRAWN FINAL ASSEMBLY,
A FIT BOTTOM FLANGE SEE SHEET 1 STEVE 12/17/96
LPT 2150 A
85 INTO BASE PLATE AND SEE SHEET 1 SEE SHEET 1
CHECKED
B.CARLSON
102 SNAP INTO PLACE
FINISH
6/4/97
SIZE CAD FILENAME DWG.NO. REV.
NEXT ASSY PRODUCT
MFG.ENGR.
B.CARLSON 6/4/97
E A4466E2B 9700-4466-XX B
FIRST USED ON DO NOT SCALE DRAWING G.KHOUBIAR 6/9/97 SCALE 1/2 SHEET 2 OF 4
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
Technologies Inc., Fremont,California. thisdrawing isonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
. SEE SHEET 1 . .
thedrawingoranyparttherof,exceptformanufacturebyvendorsfor SHOWN WITH (BLUE)
H
written license. Norighttoreproducethisdrawingisgrantedforthe
COVER REMOVED (RED) H
POWER SUPPLY A5
(+) (-)
REF 2 VIEW M + -
CPU ASSEMBLY
TO DRIVE
FG
(REF SHT 2)
REF 5 COLUMN FAN
G BOARD B2 RC TERMINAL RCG TERMINAL G

(UNDERNEATH)
ENC_G LIMITG ENC_T
ET
LIMITT
LT EV
ENC_V LIMITV
LV
ENC _R
ER
LIMITR
LR
J3 J3
SIDE OF CHASSIS BOARD A1
J61 BRAKEG BRAKET
MT BV
BRAKEV
MV BR
BRAKER
MR NOT SHOWN FOR CLARITY MOTOR ASSY H1
X
P59 P60
CABLE B3
TB1
TB2 J4
SEE DETAIL
REMOVE COVER TO ALLOW (SEE SHT 4)
CABLE ROUTING, THEN
REINSTALL
BOARD A4
J1
J3
BOARD A3 P2
BOARD B1 J2 J5
J1
J1
P1
P3
F 8 REF F
BOARD A2
ENET
30 12 REF
VIEW L
J6 SERIAL3/SERIAL4 SERIAL1/SERIAL2
P5
ARM SERVO ASSEMBLY 2X .80 .06

SHOWN WITH COVER REMOVED
(REF SHT 2) REMOVE COVER TO GAIN
ACCESS TO B2/SERIAL JACK, P20
THEN REINSTALL
J5 GRN/YEL TERM
END OF SPRINGS 84 4
REF SHIELD FROM CABLE
E AT HOLES MOTOR ASSY H2 E
MOUNT TO MASKED 6-32 HOLE
CABLE A6
SEE DETAIL X
.50 (SEE SHT 4)
1 REF 1.00
101 .50
CABLE G1
.75
108
31 REF
7 66 P7
REF 84
71
D D
CABLE F1
GUIDE RAIL
P6
MODULE C2
VIEW T-T
DETAIL R DETAIL W (REF)
I/O CABLE
SCALE: 1/1 GND BLOCK H3
(REF SHT 1) SEE DETAIL P-P
(SEE SHT 4)
C REF 3 C
ITEM 14 POWER
HOST
EQUIP AUX2
Y-CABLE
AUX1 PARALLEL/
SAM
INTERLOCK
LAN JACK
BOARD D1
FROM REF 1
MINIENVIRONMENT
CABLE C4
REF SHIELD FROM CABLE
MOUNT TO 6-32 PEMNUT
ITEM 3
TB2
TB1
B RE V_
9700-4291-01
J61
P1 P59
TB2 BOARD C1 PANEL D2 B
FRAME ASSEMBLY
TB1 CABLE D3
J20
J61 P1 P59 J5 J7
J6 J10
GRN/YEL TERM
QTY PART NUMBER DESCRIPTION MATERIAL
ITEM REQD SPECIFICATION
VIEW K-K
PARTS LIST
FROM 9700-4072-01
REV_
TOLERANCESARE:
TECHNOLOGIES, INC.
VENDOR_
MINIENVIRONMENT
VIEW J-J I/O PANEL .XX .
. .
.
CABLE C3 .XXX APPROVALS DATE
PART OF ITEM 3 MATERIAL DRAWN FINAL ASSEMBLY,

STEVE
A SEE SHEET 1
A
12/17/97
MINIENVIRONMENT (REF SHT 2) CHECKED LPT 2150
(REF SHT 2) FINISH 6/4/97

MFG.ENGR.
6/4/97
E A4466E3B 9700-4466-XX B
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
Reproduction Forbidden without the specificwrittenpermission ofAsyst
any rightin,orlicensetousethesubjectmatterofthedrawingorany . SEE SHEET 1 . .
H H
Asyst Technologies, Inc.andformanufacture underthecorporation's
PART OF
FRAME WIRE TABLE ITEM 3 I/0 PANEL WIRE TABLE ITEM 3 Y-CABLE WIRE TABLE ITEM 14
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. ITEM NO. PART NO. ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.)
H1/CN1 C4/CN1 DETAIL W 9700-4080-01 P7 D1/J7 8 9700-4346-01 P6B F1/J6B
H2/CN1 B3/CN1 REF 9700-4081-01 P8 D1/J8 DETAIL W 9700-4080-01 P6A F1/J6A
3 9700-4350-XX
RED RING TERM (1) A5/(+) REF 6900-1282-01 A1/J7 D2/LAN JACK
BLUE RING TERM (2) A5/(-) D3/J20 A6/P20
3 9700-4350-XX
G G
CPU WIRE TABLE ITEM 5 MINIENVIRONMENT WIRE TABLE ITEM 1 I/O CABLE WIRE TABLE ITEM 14
FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG, FROM (CONN. LABEL, TO (JACK, PLUG,
ITEM NO. PART NO. ITEM NO. PART NO. ITEM NO. PART NO.
WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.) WIRE COLOR, ETC. ) TERMINAL, ETC.)
J2 A4/P2 P5 C1/J5 14 9700-4109-01 J6A G1/P6A
7 9700-4079-01 GRAY RING TERM A5/RC 7 9700-4079-01 P22 C3/J22 DETAIL W 9700-4080-01 TEST N/C
WHITE RING TERM A5/RCG P1 J1
DETAIL W 9700-4080-01 P11 A1/J11 P6 C1/J6
13 9700-4108-01
J5 A4/P5 P7 C1/J7
F 10 9700-4081-01 P13 A1/J13 C3/P10 C1/J10 F
P2 A2/J2 C4/P59 H1/J59
12 9700-4347-01 P3 A4/P3 C4/P1 H1/J1 BASE GROUNDING BLOCK PART OF
1 9700-4351-XX
13 9700-4108-01 P3 A3/J3 C4/J61 H1/P61 WIRE LIST ITEM 3
14 9700-4109-01 P6 A3/J6 C4/TB1 MOTOR 1 (RED)
REF 6900-1282-01 - A1/J7 C4/TB2 MOTOR 2 (BLK) ITEM NO. PART NO.
5 9700-3970-XX A6/P20 D3/J20
8 9700-4346-01 GRN RING TERM H3
13 9700-4108-01 GRN RING TERM H3
A6 (GRN/YEL TERM) H3
3 9700-4350-XX
ITEM 2 D3 (GRN/YEL TERM) H3
ARM SERVO WIRE TABLE
E FROM (CONN. LABEL, TO (JACK, PLUG, E
ITEM NO. PART NO.
4X 82 83 4X
8 9700-4346-01 P1 B2/SERIAL JACK
12 9700-4347-01 P1 B1/J1
83 4X B3/P59 H2/J59
SEE BASE GROUNDING
B3/P1 H2/J1
BLOCK WIRE LIST
2 9700-4279-XX B3/J61 H2/P61
B3/TB1 H2/MOTOR 1 (RED)
B3/TB2 H2/MOTOR 2 (BLK)
CABLE P59
D D
DETAIL P 4X 89 WIRE TB1 (BLK)

(REF SHT 3)
WIRE TB2
(RED)
(REF SHT 4) 2X 88
J61
4X 50
Z
4X 66
C NOTES: CONTINUED FROM SHEET 1 OF 4 4X 71 C
7 REMOVE EXISTING FASTENING HARDWARE AND

REPLACE WITH THE HARDWARE SHOWN. CABLE P61
8 INSTALL THESE SCREWS BY FINGER-TIGHTENING ONLY

VIEW Z
A FEW TURNS PRIOR TO INSTALLING ITEM 99 . INSTALL SCALE: 2/1 Z
ITEM 99 BY ALIGNING SLOTS WITH THE SHAFTS OF THESE (REF SHT 4)
SCREWS, THEN TIGHTEN UNTIL SNUG.
Y
9 APPLY CAUTION OR WARNING LABEL THAT COMES
SUPPLIED WITH THE PORT PLATE ASSY.
B 2X 87 B
J1 Y
10 APPLY LASER SERIAL NUMBER LABEL THAT COMES 4X 50 (REF SHT 4)
SUPPLIED WITH THE PORT PLATE ASSY JUST BEFORE
MOVEMENT TO SHIPPING. 4X 66
DETAIL X
SCALE: 1/1
4X 71
11 SECURE CABLE TIES, ITEM 89 AFTER ALL CABLES (REF SHT 3)
FROM STEPS 1 & 2 ARE ROUTED. VIEW Y
SCALE: 2/1
QTY MATERIAL
REQD
(REF SHT 4)
ASYST CORPORATE PROCEDURE 2000-0311-01. UNLESS OTHERWISESPECIFIED
CONTRACT NO.
TOLERANCES ARE:
.XX .
13. PACKAGE PER ASYST WORKMANSHIP STANDARDS . .XXX . .
APPROVALS DATE
2000-0311-01, COSMETIC PART: YES X NO MATERIAL DRAWN FINAL ASSEMBLY,

STEVE
A SEE SHEET 1
CHECKED
12/17/97
LPT 2150 A
FINISH 6/4/97
NEXT ASSY PRODUCT
MFG.ENGR.
B.CARLSON 6/4/97
E A4466E4B 9700-4466-XX B
8 7 6 5 4 3 2 1

9700-4466-01 REV B LPT ASSY, FWD PPLT,RIGHT,150MM
0001 9700-4465-01 C 1 EA MINI ENVIR ASSY,LPT 2150,RIGHT

0003 9700-4464-01 A 1 EA FRAME ASSY,LPT 2150,RIGHT
0031 4001-8805-01 A 1 EA GUIDE,ROLLER
0033 4001-9714-01 A 1 EA SHIELD,LOWER
0035 4001-7743-01 B 1 EA LABEL, MODEL


0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4

0071 7200-0014-08 14 EA WASHER, FLAT, SS, #8
0081 7200-0014-06 1 EA WASHER, FLAT, SS, #6
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0096 4001-8876-01 A 1 EA CAP, ROLLER
0112 6900-1162-01 5 EA CAPLUG, DSUB, 9P, CONDUCTIVE,
0113 6900-1163-01 1 EA CAPLUG, DSUB, 25P, CONDUCTIVE
0114 6900-1164-01 1 EA CAPLUG, 11/16 ID, .84 LG, RED




9700-4466-02 REV B LPT ASSY,FWD PPLT,LEFT,150MM
0001 9700-4465-02 C 1 EA MINI ENVIR ASSY,LPT 2150,LEFT

0003 9700-4464-02 A 1 EA FRAME ASSY,LPT 2150,LEFT
0031 4001-8805-02 A 1 EA GUIDE,ROLLER
0033 4001-9714-01 A 1 EA SHIELD,LOWER
0035 4001-7743-01 B 1 EA LABEL, MODEL



0067 7200-0014-04 4 EA WASHER, FLAT, SS, #4
0071 7200-0014-08 14 EA WASHER, FLAT, SS, #8
0086 4001-7570-01 A 2 EA LABEL, HAZARD
0096 4001-8876-01 A 1 EA CAP, ROLLER
0112 6900-1162-01 5 EA CAPLUG, DSUB, 9P, CONDUCTIVE,
0113 6900-1163-01 1 EA CAPLUG, DSUB, 25P, CONDUCTIVE


0114 6900-1164-01 1 EA CAPLUG, 11/16 ID, .84 LG, RED


8 7 6 5 4 3 2 1
REVISION
TechnologiesInc.,Milpitas,California. This drawingisonlyconditionally
designs or technicalinformationshownthereon, or anyright to reproduce
103 19 A ECN N4264: PRODUCTION RELEASE JK 2/2/98
Asyst Technologies,Inc. and formanufacture under the corporation's
written license. No righttoreproducethisdrawing isgrantedforthe
subject matterthereofunlessbywritten agreement withorwritten
20
D D

WORKMANSHIP STANDARDS 2000-0311-01. SW4 17
2 INSTALL MICRO SWITCH, ITEM 75 FIRST THEN ROUTE
HARNESS AS SHOWN. SOLDER WIRES TO ITEM 75
PER WIRING DIAGRAM (SHT 7). 22 19
2
3 APPLY ADHESIVE, ITEM 98 TO ITEM 38 .
23 62
2X 2X
4. APPLY ADHESIVE, ITEM 99 TO ALL
35 64
SCREWS WITHOUT LOCK WASHERS.
5 APPLY GREASE, ITEM 101 TO MATING/SLIDING 75
SURFACES OF PORT PLATE SLIDERS, SLOTS IN CAM DRIVER,
40 5
IDLER ASSEMBLY AND MOTOR LEADSCREW. 4X
53 84 2X
6 APPLY ADHESIVE, ITEM 100 AT INDICATED
POINTS, AFTER INSTALLATION.
7 ATTACH ITEM 60 4 PLACES AT OTHER END OF CABLES 18

C AND MARK SENSOR NAMES. 3X 69
66 C
8 TORQUE TO 12 IN/LBS, USING TORQUE KIT 2 E.D.P. 85002-00.
THEN APPLY ADHESIVE, ITEM 100 . 16
3
9 TO CRIMP ITEM 71 , USE HAND TOOL AMP HANDLE #58074-1
41
WITH HEAD ASSY #58336-1. 4X
SEE DETAIL 'D' FOR MOTOR WIRE PREPARATION. 42 2 3
10
1 4
6
11 PREPARE RESISTORS AND CAPACITORS, ITEM 72 AND 73
PER DETAIL 'B' AND INSTALL PER DETAIL 'C'. 25 67
12 TYPE 'P53' ON LABEL, ITEM 74 AND APPLY AS SHOWN. 85 2X
36
2X
13 LENGTH PRIOR TO ATTACHING ITEM 71 . 37 64
14 SLIDE SHRINK TUBING, ITEM 49 , OVER RESISTORS AND

17 SW3
LEADS OF CAPACITORS (UP TO BODY OF CAPACITORS). 71
REF
15 COVER RESISTORS AND CAPACITORS OVERALL WITH ITEM 50 . 74
6
16 PLACE A SMALL AMOUNT OF ADHESIVE, ITEM 100 TO THREADS,
B B
INSURE ADHESIVE IS ONLY ON THREADED AREA. CLEAN OFF ANY
EXCESS ADHESIVE. 73
REF 72
17 USE TOOL #1000-0155-01 TO ADJUST MICRO SWITCH SETTING. 69
50
18 BEFORE INSTALLATION OF ITEM 77 :
a) REMOVE LASER DIODE FROM PROTECTIVE PACKAGING. 9
b) CUT WIRES TO APPROXIMATELY 4 INCHES FROM BACK OF LASER. 69
c) REMOVE SPANNER WRENCH, WARNING LABEL AND END CAP
FROM LASER DIODE.
d) ATTACH WARNING LABEL TO PRODUCTION RECORD.
e) BAG AND TAG SPANNER WRENCH AND END CAP FOR SHIPMENT
WITH LPT 2150. -01 SHOWN
19 USE SCOTCH TAPE TO TEMPORARY ATTACH ITEM 103 TO PORT PLATE.
QTY MATERIAL
DO NOT PERMANENTLY ATTACH LABEL UNTIL FINAL ASSY. REQD SPECIFICATION
TABULATION PARTS LIST

A 20 USE SCOTCH TAPE TO TEMPORARY ATTACH LASER DIODE SERIAL NUMBER DASH NO. DESCRIPTION DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
LABEL TO PORT PLATE. DO NOT PERMANENTLY ATTACH LABEL UNTIL FINAL ASSY. FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
-01 PORT PLATE ASSY (RIGHT) .
.XX
.XXX .
.
. APPROVALS DATE
21. IDENTIFY PART PER MARKING METHOD 12 OF ASYST -02 PORT PLATE ASSY (LEFT) MATERIAL
DRAWN PORT PLATE ASSEMBLY,
STEVE 12/13/97
CORPORATE PROCEDURE 2000-0311-01. SEE BOM
CHECKED LPT 2150
9700-4465-XX LPT 2150 FINISH
B.CARLSON 6/4/97
22. PACKAGE PER ASYST WORKMANSHIP STANDARDS DES. ENGR. SIZE DWG NO. REV.
2000-0311-01. COSMETIC PART: X YES NO B.CARLSON 6/4/97 D A4467D1A 9700-4467-XX A
MFG. ENGR.
G.KOUBIAR 6/4/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
designs or technicalinformation shown thereon, or any rightto reproduce
. SEE SHEET 1 . .
the drawing or anyparttherof,exceptformanufacture byvendorsfor
Asyst Technologies, Inc.andformanufacture under the corporation's
writtenlicense. Noright to reproducethis drawing isgranted for the
subject matterthereof unlessbywrittenagreement with or written
D D
12
57
61
65
2X 85
4X 89
2X 79 J J
C 51 C
88 54
53 80 2X
N N 2X 94 95
26
96
91
97
30
P53
32
34
31
B 39 B
DETAIL J
DETAIL K
BACKSIDE
56
20
87 2X 21
28 86
89 2X 29
3X 82 2X
93
-01 SHOWN
86
2X QTY MATERIAL
2X 83 8 93 REQD SPECIFICATION
PARTS LIST
A SEE DETAIL K UNLESS OTHERWISE SPECIFIED

TOLERANCES ARE:
CONTRACT NO.
A
92 2X .
.XX
.XXX -
-
- APPROVALS DATE
MATERIAL
SECTION N-N SEE SHEET 1 SEE SHEET 1 FINISH
SEE SHEET 1
CHECKED
STEVE 12/13/97
LPT 2150
B.CARLSON 6/4/97
DES. ENGR. SIZE DWG NO. REV.
MFG. ENGR.
B.CARLSON 6/4/97
D A4467D2A 9700-4467-XX A
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
TechnologiesInc.,Milpitas,California. This drawingisonlyconditionally
any right in, or license to use the subjectmatter of thedrawingorany
designsortechnicalinformationshown thereon,or anyright to reproduce 6 REF 11 . SEE SHEET 1 . .
thedrawingorany part therof,exceptformanufactureby vendors for
written license. Norighttoreproducethis drawingisgrantedforthe
WAFER PROTRUSION SENSOR 70
subjectmatterthereofunlessbywrittenagreementwithorwritten
permission from the Company. 7
59
4X
64
17
D D
2X 39
34
SEE DETAIL 'G' 77
31
REF
18
32
SW2 39
5 2
53
81
C SEE DETAIL A 8 6 C
CASSETTE SLOT
SENSOR
7 7
39 4X
WAFER PRESENCE 4
SENSOR
7 10 4 REF
2X 70
27
59
6X 58
64
6 WAFER EXCESSIVE 7
PROTRUSION SENSOR
B B
5
DETAIL A
SQUARE NUT REMOVED
SW1 1 5 FOR CLARITY
16 15
8X 39
33
13 75 2X
14
24 3
4X 39 -01 SHOWN
90 40 4X
6X 2 38
2X 39
63 52 4X
16 ITEM
QTY
MATERIAL
53 REQD SPECIFICATION
6X 39 PARTS LIST
UNLESSOTHERWISE SPECIFIED CONTRACT NO.
TOLERANCES ARE:
.
A
.XX -
. .XXX - - APPROVALS DATE
MATERIAL
STEVE 12/13/97
SEE SHEET 1
LPT 2150
BOTTOM VIEW SEE SHEET 1 SEE SHEET 1 FINISH
CHECKED
B.CARLSON 6/4/97
MFG.ENGR.
B.CARLSON 6/4/97
D A4467D3A 9700-4467-XX A
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONSRECEIVING THISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden withoutthe specificwrittenpermissionofAsyst
Technologies Inc.,Milpitas,California. Thisdrawingisonlyconditionally
issued andneitherreceipt norpossessiontherof confers or transfers
anyright in,orlicense to use thesubjectmatterofthedrawingorany
designs or technical information shownthereon, or any righttoreproduce
. SEE SHEET 1 . .
the drawing or anyparttherof,except formanufacture byvendors for
written license. No righttoreproduce thisdrawing isgranted for the
subjectmatter thereof unless bywrittenagreement with or written
permission fromthe Company.
103 19
20
D D
SW4 17
22 19
2
23 62
2X 2X
35 64
75
40 5
4X
53 84 2X
C C
18
3X 69
66 16
3
41
4X
42 1
2 3
4
67
25
85 2X
36
2X
64
37
17 SW3
B 71 B
REF
74
6
73
REF 72
69
50
9
69
-02 SHOWN
QTY MATERIAL
REQD SPECIFICATION
PARTS LIST
TOLERANCES ARE:
.
A
.XX .
MATERIAL
STEVE 12/13/97
SEE SHEET 1
CHECKED
LPT 2150
SEE SHEET 1 SEE SHEET 1 FINISH 6/4/97
B.CARLSON
MFG. ENGR.
B.CARLSON 6/4/97 D A4467D4A 9700-4467-XX A
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVINGTHISCONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without thespecific written permissionofAsyst
Technologies Inc., Milpitas, California. This drawing is only conditionally
issued and neither receipt nor possession therofconfersortransfers
anyright in, or license to usethesubject matter ofthedrawingorany
designs or technical information shown thereon,or anyrighttoreproduce
. SEE SHEET 1 . .
the drawingoranyparttherof,exceptformanufacturebyvendors for
written license. No right to reproduce thisdrawingis granted for the
D D
12
57
61
65
2X 85
4X 89
2X 79 J J
C C
51
88 54
53 80 2X
2X 94 95
N N 96
26
91
97 30
32
34
P53
B 31 B
39
DETAIL J
DETAIL K
BACKSIDE
56
87 2X
21
2X 3X 20 -02 SHOWN
89 82
28 86
2X
29 93 ITEM
QTY
MATERIAL
2X 83 8
REQD SPECIFICATION
PARTS LIST
86 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 2X DIMENSIONS ARE IN INCHES
TOLERANCES ARE:
.
A
93 FRACTIONS DECIMALS ANGLES TECHNOLOGIES, INC.
92 2X .XX .
SEE DETAIL K .
MATERIAL
.XXX . .
DRAWN
APPROVALS DATE
PORT PLATE ASSEMBLY,

SECTION N-N SEE SHEET 1 SEE SHEET 1 FINISH
SEE SHEET 1
CHECKED
STEVE 12/13/97
LPT 2150
B.CARLSON 6/4/97
MFG. ENGR.
B.CARLSON 6/4/97
D A4467D5A 9700-4467-XX A
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
REVISION
Reproduction Forbidden withoutthe specific written permission of Asyst
Technologies Inc., Milpitas,California. This drawingisonlyconditionally ZONE REV. DESCRIPTION APPROVED DATE
issuedandneitherreceiptnorpossession therofconfersortransfers
any rightin, orlicense to use the subject matter of thedrawingorany
designsortechnical information shownthereon, or anyright to reproduce
11 . SEE SHEET 1 . .
the drawing or anyparttherof,exceptformanufactureby vendors f o r
AsystTechnologies, Inc. andformanufactureunderthecorporation's 6 REF
written license. No right to reproduce this drawingisgrantedforthe 70
subject matter thereof unless by written agreement withorwritten
permission fromthe Company. 7 WAFER PROTRUSION SENSOR
59
4X
64
17
D D
2X 39
34
SEE DETAIL 'H' 77
31
REF
18
32
SW2 39
5 2
53
81
C SEE DETAIL A 8 6 C
CASSETTE SLOT
SENSOR
7 7
39 4X
WAFER PRESENCE 4
SENSOR
7 10
2X 70
27
59
6X 58 REF
64 33 4
39 4X
6 WAFER EXCESSIVE 7
PROTRUSION SENSOR
B B
5
SW1 1 5
DETAIL A
SQUARE NUT REMOVED
FOR CLARITY
15
8X 39
75 2X 3
-02 SHOWN
14 24
13 4X
40 2X 39 16 38
2 QTY MATERIAL
90 ITEM
REQD
SPECIFICATION
6X 52 4X 6X 39 PARTS LIST
63 UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A 53
TOLERANCES ARE:
.
A
.XX .
MATERIAL
STEVE 12/13/97
SEE SHEET 1
LPT 2150
BOTTOM VIEW SEE SHEET 1 SEE SHEET 1 FINISH
CHECKED
B.CARLSON 6/4/97
MFG. ENGR.
B.CARLSON 6/4/97
D A4467D6A 9700-4467-XX A
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1
8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONS RECEIVING THIS CONFIDENTIALDRAWING:
REVISION
Reproduction Forbidden without the specific written permission o f A s y s t
Technologies Inc., Milpitas,California. Thisdrawingis onlyconditionally
anyright in,orlicense to use the subjectmatterofthedrawing or any
designsortechnicalinformationshown thereon,oranyrighttoreproduce
SWITCH -#4 SWITCH-#3 . SEE SHEET 1 . .
Asyst Technologies, Inc.andformanufacture under thecorporation's
(POD CONTACT) (POD CONTACT)
subject matter thereof unlessbywrittenagreementwithorwritten
PORT LOCK MOTOR 10 ON SIDE WITH
WAFER SEATER MOTOR
D 10 BLK D
RED
9 71 48
C NO NC NC NO C P53 6X SOLDER
1.20
46 BLU (10A) APPROX WHT (2A)
WHT (12A)
47 2 A B
BRN (9A) COM
6 YEL (6A)
BRN (11A) BRN (1A)
5 BLK (5A) R 1
A B C D
4 RED (4A) SWITCH-#2 SWITCH-#1 73 2X
44
3 GRN (13A) 44 (PORT OPEN) (PORT CLOSED)
GRN (13A) GRN (3A)
2 WHT (12A) C 3
C D E F
1 BRN (11A)
NC NC
C
A B WHT (2A) 1.00/.14
E F
NO NO
PIN 1 47 R
72 2X 50 15
C D BRN (1A)
12 74 C C
C 49 14 6X C
3X SOLDER
BRN (8A)
E F GRN (3A)
45
DETAIL B DETAIL C
47
45
11 SEE DETAIL 'B' & 'C' WIRE TABLE

(PORT LOCK MOTOR) COLOR CODE LENGTH SIG NAME/REF
BRN (1A) 4.00 -
WHT (2A) 4.00 -
GRN (3A) 14.00 -
RED (4A) A/R MOTOR +
MOTOR WIRES
BLK (5A) A/R MOTOR -
.30 4.00 ±.50 .30 4.00 ±.50
YEL (6A) 17.50 POD IN PLACE
26 AWG
BRN 47 RED 77 REF BRN 47 RED 77 REF BRN (8A) 12.00 -
STRANDED WIRE
B 18 18 BRN (9A) 1.50 - B
BLU (10A) 24.00 -
BRN (11A) 2.00 GROUND
VIO 102 VIO 102 WHT (12A) 2.00 PORT OPEN
BLK BLK 1.00
(APPROX 3 TWISTS) GRN (13A) 2.00 PORT CLOSED
2X 43
.50
3.00 (APPROX 1-2 TWISTS)
FINAL LENGTH
13
TO P53
QTY MATERIAL
REQD SPECIFICATION
DETAIL D UNLESS OTHERWISE SPECIFIED CONTRACT NO.

PARTS LIST

TOLERANCES ARE:
.
A
.XX .
DETAIL G DETAIL H MATERIAL
DRAWN
STEVE 12/13/97
PORT PLATE ASSEMBLY,
SEE SHEET 1
CHECKED
LPT 2150
SEE SHEET 1 SEE SHEET 1 FINISH 6/4/97
B.CARLSON
-01 ONLY -02 ONLY NEXT ASSY PRODUCT SEE SHEET 1
DES. ENGR.
B.CARLSON 6/4/97
SIZE
D A4467D7A
DWG NO.
9700-4467-XX
REV.
A
MFG. ENGR.
G.KOUBIAR 6/9/97
8 7 6 5 4 3 2 1

9700-4467-01 REV A PORT PLATE ASSY,LPT 2150,RIGHT
0001 9700-2182-01 C 1 EA ASSEMBLY, CAM IDLER, 150MM

0002 9700-2183-01 F 1 EA ASSEMBLY, CAM DRIVE, 150MM
0003 9700-2185-01 E 1 EA ASSEMBLY, MOTOR BRACKET, 150M
0004 9700-2145-01 F 1 EA CABLE ASSY, PORT PLATE ASSY
0005 9700-3372-01 D 1 EA MOTOR ASSEMBLY, WAFER SEATER
0006 9700-4290-01 A 1 EA HARNESS,PORT/INX PCB,INTERCON
0007 9700-4304-01 C 1 EA LASER BRKT,ASSY,6",5",4"
0008 9700-3437-02 OB 1 EA SMART PROBE PCB ASSY,W/ HEADE
0009 4001-8842-01 A 1 EA PORT PLATE,2150
0010 4001-7276-01 C 1 EA BLOCK, DUAL SENSOR MOUNT
0012 9700-3380-01 B 1 EA CABLE ASSY, SMART-PROBE
0013 4001-9378-01 B 1 EA BRACKET,PORT PLATE
0014 4001-8846-01 A 1 EA COVER,PORT PLATE,BOTTOM LEFT
0015 4001-8843-01 A 1 EA COVER,PORT PLATE,BOTTOM FRON
0016 4001-8844-01 A 1 EA COVER,PORT PLATE, BOTTOM REAR
0017 4001-8845-01 A 1 EA COVER,PORT PLATE,BOTTOM RIGHT
0019 4001-7288-01 D 1 EA BRACKET, MOTOR
0020 4001-7289-01 A 1 EA MOUNT, POD GUIDE
0021 4001-6889-01 A 1 EA GUIDE, POD, 150MM (1000 & 2000
0022 4001-1471-01 A 2 EA TOUCHDOWN CAM-PORT PLATE
0023 4001-1490-01 B 2 EA SPRING HOLDER, TOUCHDOWN SWI
0024 4001-1508-01 A 4 EA PULLEY, PORT PLATE
0025 4001-1426-01 B 1 EA NUT ACTUATOR, 150MM
0026 4001-6922-01 A 1 EA LABEL, COVER TOP, WITH HOLES
0028 4001-6923-01 A 1 EA LABEL, COVER, SIDE
0029 4001-6907-01 B 1 EA COVER, PORT PLATE
0030 4001-7291-01 A 1 EA SPACER, WAFER SEATER
0031 4001-6814-01 B 1 EA ROLLER
0032 4001-6956-01 A 1 EA PIN, ROLLER
0034 4001-7278-01 C 1 EA ARM, WAFER SEATER
0035 7500-0054-01 2 EA SPRING
0037 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0038 7300-3104-04 4 EA SCR, SKT SHLDR, SST, 4-40 X 1/



0043 7500-0110-01 2 EA FERRITE BEAD, .14 DIA X .27 LG
0044 6100-0199-26 0.5 FT WIRE, 26 AWG, UL 1007, STRD, W
0045 6100-0155-26 1.33 FT WIRE, 26 AWG, UL 1007, STRD, G
0046 6100-0144-26 1.46 FT WIRE, 26 AWG, UL 1007, STRD, Y
0050 7500-0553-01 0.13 FT TUBING, SHRINK, 3/4 DIA, BLACK
0051 4001-7287-01 B 1 EA FLAG
0052 7200-0014-02 4 EA WASHER, FLAT, SS, #2
0054 4001-6936-01 C 1 EA ARM, ACTUATOR
0056 4001-1831-01 F 1 EA IR FILTER
0057 4001-7726-01 A 1 EA COVER, LED
0061 4001-6930-01 B 1 EA LABEL, LED, COVER, TOP REAR
0066 4001-8146-01 B 1 EA PIN
0067 7500-0788-01 2 EA STANDOFF, 3/16 HEX, 4-40 X .75
0068 9700-4289-01 A 1 EA CABLE ASSY,PORT DOOR CONTROL
0071 6100-2254-06 1 EA CONN, 6 PIN, SOCKET HOUSING, S
0075 6300-0004-01 4 EA SWITCH, MICRO
0080 7000-0613-02 2 EA SET SCREW, SOC HD, SS, 8-32 X



0084 7000-1424-03 2 EA SCREW, PHIL FLT HD, 4-40 X 3/1
0086 7000-0447-23 4 EA SCREW, SOC FLAT HD, SS, 8-32 X
0092 7500-0257-01 2 EA STANDOFF, 4-40 X .250 OD X 3/8
0093 7500-0798-01 4 EA PLUG, HOLE, .375 DIA, NYLON, B
0094 7500-0406-01 2 EA BRG, BALL, .250 ID, .500 OD, .
0095 7500-0395-01 1 EA RING, RETAINING, CRESCENT, .25
0097 7500-0213-01 1 EA PLUG,.250 DIA,BLACK NYLON
0098 7500-0278-01 0 EA ADHESIVE, LOCTITE 242, BLUE
0101 7500-0210-01 0 LB LUBRICANT, GREASE, KRYTOX, GPL


9700-4467-02 REV A PORT PLATE ASSY,LPT 2150,LEFT
0001 9700-2182-01 C 1 EA ASSEMBLY, CAM IDLER, 150MM

0002 9700-2183-01 F 1 EA ASSEMBLY, CAM DRIVE, 150MM
0003 9700-2185-01 E 1 EA ASSEMBLY, MOTOR BRACKET, 150M
0004 9700-2145-01 F 1 EA CABLE ASSY, PORT PLATE ASSY
0005 9700-3372-01 D 1 EA MOTOR ASSEMBLY, WAFER SEATER
0006 9700-4290-01 A 1 EA HARNESS,PORT/INX PCB,INTERCON
0007 9700-4304-01 C 1 EA LASER BRKT,ASSY,6",5",4"
0008 9700-3437-02 OB 1 EA SMART PROBE PCB ASSY,W/ HEADE
0009 4001-9343-01 002 1 EA PORT PLATE,LPT 2150,LEFT
0010 4001-7276-01 C 1 EA BLOCK, DUAL SENSOR MOUNT
0012 9700-3380-01 B 1 EA CABLE ASSY, SMART-PROBE
0013 4001-9378-01 B 1 EA BRACKET,PORT PLATE
0014 4001-8846-01 A 1 EA COVER,PORT PLATE,BOTTOM LEFT
0015 4001-9353-01 002 1 EA COVER,PORT PLATE BOTTOM,FRON
0016 4001-8844-01 A 1 EA COVER,PORT PLATE, BOTTOM REAR
0017 4001-8845-01 A 1 EA COVER,PORT PLATE,BOTTOM RIGHT
0019 4001-7288-01 D 1 EA BRACKET, MOTOR
0020 4001-7289-01 A 1 EA MOUNT, POD GUIDE
0021 4001-6889-01 A 1 EA GUIDE, POD, 150MM (1000 & 2000
0022 4001-1471-01 A 2 EA TOUCHDOWN CAM-PORT PLATE
0023 4001-1490-01 B 2 EA SPRING HOLDER, TOUCHDOWN SWI
0024 4001-1508-01 A 4 EA PULLEY, PORT PLATE
0025 4001-1426-01 B 1 EA NUT ACTUATOR, 150MM
0026 4001-6922-01 A 1 EA LABEL, COVER TOP, WITH HOLES
0028 4001-6923-01 A 1 EA LABEL, COVER, SIDE
0029 4001-6907-01 B 1 EA COVER, PORT PLATE
0030 4001-7291-01 A 1 EA SPACER, WAFER SEATER
0031 4001-6814-01 B 1 EA ROLLER
0032 4001-6956-01 A 1 EA PIN, ROLLER
0034 4001-7278-01 C 1 EA ARM, WAFER SEATER
0035 7500-0054-01 2 EA SPRING
0037 7200-0014-06 2 EA WASHER, FLAT, SS, #6
0038 7300-3104-04 4 EA SCR, SKT SHLDR, SST, 4-40 X 1/



0043 7500-0110-01 2 EA FERRITE BEAD, .14 DIA X .27 LG
0044 6100-0199-26 0.5 FT WIRE, 26 AWG, UL 1007, STRD, W
0045 6100-0155-26 1.33 FT WIRE, 26 AWG, UL 1007, STRD, G
0046 6100-0144-26 1.46 FT WIRE, 26 AWG, UL 1007, STRD, Y
0050 7500-0553-01 0.13 FT TUBING, SHRINK, 3/4 DIA, BLACK
0051 4001-7287-01 B 1 EA FLAG
0052 7200-0014-02 4 EA WASHER, FLAT, SS, #2
0054 4001-6936-01 C 1 EA ARM, ACTUATOR
0056 4001-1831-01 F 1 EA IR FILTER
0057 4001-7726-01 A 1 EA COVER, LED
0061 4001-6930-01 B 1 EA LABEL, LED, COVER, TOP REAR
0066 4001-8146-01 B 1 EA PIN
0067 7500-0788-01 2 EA STANDOFF, 3/16 HEX, 4-40 X .75
0068 9700-4289-01 A 1 EA CABLE ASSY,PORT DOOR CONTROL
0071 6100-2254-06 1 EA CONN, 6 PIN, SOCKET HOUSING, S
0075 6300-0004-01 4 EA SWITCH, MICRO
0080 7000-0613-02 2 EA SET SCREW, SOC HD, SS, 8-32 X



0084 7000-1424-03 2 EA SCREW, PHIL FLT HD, 4-40 X 3/1
0086 7000-0447-23 4 EA SCREW, SOC FLAT HD, SS, 8-32 X
0092 7500-0257-01 2 EA STANDOFF, 4-40 X .250 OD X 3/8
0093 7500-0798-01 4 EA PLUG, HOLE, .375 DIA, NYLON, B
0094 7500-0406-01 2 EA BRG, BALL, .250 ID, .500 OD, .
0095 7500-0395-01 1 EA RING, RETAINING, CRESCENT, .25
0097 7500-0213-01 1 EA PLUG,.250 DIA,BLACK NYLON
0098 7500-0278-01 0 EA ADHESIVE, LOCTITE 242, BLUE
0101 7500-0210-01 0 LB LUBRICANT, GREASE, KRYTOX, GPL

8 7 6 5 4 3 2 1
NOTICE TO ALL PERSONSRECEIVINGTHIS CONFIDENTIAL DRAWING:
REVISION
Reproduction Forbidden withoutthe specific written permission of Asyst
Technologies Inc.,Milpitas, California. Thisdrawingisonlyconditionally
anyright in, orlicense to use thesubject matterofthedrawingorany . A ECN N4326; PRODUCTION RELEASE AR 7/8/98
designsortechnicalinformationshownthereon,oranyrighttoreproduce
the drawing or anyparttherof,exceptformanufacture by vendors f o r
written license. No right toreproducethis drawing is granted for the
permission fromthe Company.
D D
11
4X
12
C C
3
7 2X
8 2X
B 2 B
14 6X
NOTES: UNLESS OTHERWISE SPECIFIED 5X 10

STANDARDS 2000-0311-01.
2 PRINT J5 THROUGH J10 ON ITEM 14 USING BRADY LABELING

SYSTEM (LS2000) OR EQUIVALENT AND APPLY ITEM 14 TO 9
ITEM 9 . ITEM
QTY
REQD
MATERIAL
SPECIFICATION
PARTS LIST
3. IDENTIFY PART PER MARKING METHOD 12 OF UNLESS OTHERWISE SPECIFIED CONTRACT NO.
A ASYST CORPORATE PROCEDURE 2000-0311-01.
TOLERANCES ARE:
-
A
. .XX - -
- APPROVALS DATE
4. PACKAGE PER ASYST WORKMANSHIP STANDARDS .XXX
2000-0311-01, COSMETIC PART: YES X N0

MATERIAL
DRAWN
M. AU 6/30/98
DUAL BD,
SEE BOM
CHECKED LP CTRL ASSY
9700-3717-01 LPT FINISH A. REYES 7/8/98
NONE DES. ENGR. SIZE CAD FILE NAME DWG NO. REV.
NEXT ASSY PRODUCT . .
MFG. ENGR.
D A4991D1A 9700-4991-01 A
FIRST USED ON DO NOT SCALE DRAWING . . SCALE 1/1 SHEET 1 OF 1
8 7 6 5 4 3 2 1

9700-4991-01 REV A DUAL,BD CONTROL ASSY,LPT/LPI
0001 3200-1065-03 H 1 EA PCA,CONTROL I/F,LPT/LPI

0002 3200-1045-01 D 1 EA PCB, ASSY, INDEXER CPU
0003 6100-2400-01 1 EA SOCKET, SMART, DS1213D, DIP-32
0004 6200-1079-01 1 EA IC, SRAM, CMOS, 128K X 8, 120

Appendix B
TEACH PENDANT
B.0 INTRODUCTION
The quickly-attachable/detachable Teach Pendant (Asyst P/N 9600-0496-01) allows the service engineer to
perform a variety of functions. These functions include configuring the LPT interface with the Process Tool
and Host computer. The Teach Pendant configures the LPT for a large number of options including
communications options, cassette selection, and sensor enabling and disabling. Another important function is
the teaching of the Process Tool cassette landing position which entails teaching the points the LPT must
execute during the load and unload cycles.
Upon initial interface with an LPT, the Teach Pendant must be configured to communicate properly with that
LPT. This configuration is performed directly from the Teach Pendant using Setup Mode.
B.1 TEACH PENDANT OPERATION

The Teach Pendant is attached to the LPT at the connector panel on the lower side of the LPT. The
connector at the top, labeled TEACH PENDT, is where the Teach Pendant is attached. The Teach Pendant
connector at the end of the coiled cable is pushed into the LPT connector and the barrel of the cable
connector is turned clockwise to lock the connectors together.
B.1.1 EMERGENCY STOP BUTTON.

The Red button (Figure B-1) located on top of the Teach Pendant. Pressing this switch stops all motion and
engages the drive motor brakes. This switch is also referred to as the ESTOP.
B.1.2 LIQUID CRYSTAL DISPLAY (LCD).

Located across the top-front face of the Teach Pendant (Figure B-1). The LCD displays data relative to the
actions being input.
B.1.3 INITIAL POWERUP.

Upon initial powerup of the LPT with the Teach Pendant plugged in, the Teach Pendant will present three
sequential (LCD) displays in the following order:
• Automatic self-test (for verification of LCD character segments).
• System boot. During system boot, software is uploaded to perform system tasks and drive
the brakes. Motor brakes may be heard engaging or disengaging.
• Position coordinates and status, such as, “Booting . . .”.
ASYST TECHNOLOGIES Page B-1

2000-0900-01 Revision A
Emergency
Stop Switch
(ESTOP)
LCD Display
Keypad
Figure B-1. Teach Pendant
Page B-2 ASYST TECHNOLOGIES

2000-0900-01 Revision A
B.2 TEACH PENDANT SETUP MODE

Setup mode is used to configure the Teach Pendant to communicate properly with the LPT. This should be
done when the Teach Pendant is initially used to interface with an LPT. The Teach Pendant can be placed in
Setup mode during power-up. While in the Setup mode, incoming data is ignored and the four keys indicated
in Figure B-2, are active as soft keys.
To enter Setup during power-up, press <MOD PT> and <ENTER>, on the bottom row of the Teach Pendant
keys at the same time power is applied to the LPT. These keys must be pressed while the unit is in the
Power-Up / Self-Test mode. The Main Menu appears on the LCD display when the Teach Pendant is in
Setup mode.
NOTE
If it becomes necessary to enter the setup mode when the LPT is presently
powered, the following will allow entry into the Setup Mode:
1. Twist the Teach Pendant cable connector back shell counterclockwise to
unlock the connector from the LPT. Remove the cable connector.
While pressing the <MOD PT> and <ENTER> keys on the Teach Pendant,
reconnect the cable connector and turn the backshell clockwise to lock. The
Teach Pendant will enter the Setup Mode.
B.2.1 PENDANT SETUP MENUS.

The actual communication parameter selection (configuration) and Teach Pendant setup is performed from
within menus that are accessed from the Main Menu using one of four (4) Teach Pendant keys: <HOMING>,
<PREV ITEM>, <NEXT ITEM>, or <DIAG> (see Figure B-2). Each of these keys performs an alternate
function to select an item from the Main Menu and is located in the top row of keys, directly below the LCD.
Each key evokes one or more menus or sub-menus.
B.2.2 GENERAL MENU NAVIGATION.

Once a MENU has been selected, viewing the entire list is performed by depressing <NEXT ITEM> or
<PREV ITEM> keys. A menu list is then displayed on the LCD. Each item of the list will flash as it is selected.
Depressing <ENTER> will activate the selection. When the last item of the menu is selected, if <NEXT ITEM>
is depressed, the menu will come back around and display the first item of the menu again and it will flash.
Depressing <ESC> will exit the menu.
B.2.3 SUB-MENU NAVIGATION.

A menu which has sub-menus is identified on the display by three (3) dots following the menu title. To view
any of the sub-menus, if available, depressing <ENTER> will select the flashing item and change the display
to the sub-menu. Some sub-menus have a sub-menu. Viewing the entire list is performed by depressing
<NEXT ITEM> or <PREV ITEM>. Each item of the list will flash as it is selected. If a selection is to be made
from the sub-menu list, depressing <ENTER> will activate that selection. Depressing <ESC> will exit the
selection and return to the previous menu or sub-menu.
B.2.4 MAIN MENU.

The Main Menu (Figure B-2) items access the menus that are used to select the parameters and
configuration. The Main Menu consists of:
• COM (Communication) Refer to Figure B-3
• DISP (Display) Refer to Figure B-4)
• KBD (Keyboard) ( Refer to Figure B-5)
• EXIT Refer to Figure B-6.

2000-0900-01 Revision A
B.2.5 SAVING CHANGES.

The EXIT menu provides the data storage option. After EXIT is selected from the MAIN menu, the Teach
Pendant displays “STORE CHANGES?” on the top display line, “NO” on the next line, and the soft key
legends “YES NO EXIT” on the bottom line. Select “YES” to toggle the second line to YES and NO to
return it to NO. When EXIT is selected, the display will be cleared, the cursor will be placed in the upper left
hand corner, and the Teach Pendant will return to normal operational mode. If NO was selected, changes will
be made only to operational memory. After the next power cycle, the settings will return to their previously
stored values. If YES was selected, the changes will be stored in memory for use until changes are made
again.
Figure B-2. Teach Pendant Setup Main Menu

2000-0900-01 Revision A
B.2.6 COMMUNICATIONS SETUP MENU.

Select COM on the Main Menu and then press the <HOMING> key to open the first level menu as seen in
Figure B-3. Many of the first level functions produce a list of second level functions and inturn a list of third
level selections as shown in the figure.
REQUIRED
SELECTION
19.2k
NONE
8,1
NO
YES
NO
Figure B-3. Communications Setup Menu Hierarchy

2000-0900-01 Revision A
B.2.7 DISPLAY SETUP MENU.

Select DSP on the Main Menu then press the <PREV ITEM> key to open the first level menu as seen in
Figure B-4. Many of the first level functions produce a second level function as shown in the figure.
REQUIRED
SELECTION
NO
NO
NO
YES
YES
YES
YES
Figure B-4. Display Setup Menu Hierarchy

2000-0900-01 Revision A
B.2.8 KEYBOARD SETUP MENU.

Select KBD on the Main Menu then press the <NEXT ITEM> key to open the first level menu as seen in
Figure B-5. Many of the first level functions produce a second level function as shown in the figure.
REQUIRED
SELECTION
NO
OFF
YES
YES
(MAIN)
Figure B-5. Keyboard Setup Menu Hierarchy

2000-0900-01 Revision A
B.2.9 EXIT SETUP MODE.

Select EXIT on the Main Menu then press the <DIAG> key to exit from Setup mode and return to normal
operational mode. You may save or discard setup changes by selecting YES or NO.
Figure B-6. Exit Setup Mode Hierarchy
B.3 NORMAL OPERATIONAL MODE

The only time that the Teach Pendant is not in Normal Operational mode is when it is in Setup mode. The
Teach Pendant’s Normal Operational mode is used to teach the points that the LPT must execute during the
load and unload cycles.
NOTE
When teaching arm movements, only one function key on the Teach
Pendant can be used at a time. When one key is pressed, all other key
presses are ignored until the first key is released. This does not apply to the
<ENTER> key.

2000-0900-01 Revision A
B.3.1 HOMING MENU.

Press the <HOMING> key to select the axis that needs to be calibrated. The menu selections are shown in
Figure B-7.
Figure B-7. Homing Menu Hierarchy
B.3.2 DIAGNOSTIC MENU.

Press the <DIAG> key to open the first level menu as seen in Figure B-8. Many of the first level functions
produce a second level function as shown in the figure.
B.3.2.1 DIAGNOSTIC SUB-MENUS.

The Diagnostic first level menu is divided into four (4) types of functions:
1. REVIEW MESSAGES –
2. SENSOR ALIGNMENT – Optical detector system alignment prompts
3. CONTROLS – Motor and servo manual-activation menus
4. STATUS –.
When the selected item is flashing, to access a sub-menu, select the item then press <ENTER>.
Sensor Alignment prompts for optical detector system alignment which consists of the following
submenu selections:
• Wafer Sensor
• Slot Sensor
• Protrusion Sensor
• Indexer Item (Displays Indexer variable)
The Controls functions consist of the following submenu selections:
• Servo Control . . . (Engage and disengage brakes and servo motors)
• DC Motor Control . . . (Enabling motors)
• Reset System . . .
The Status message submenu items are:
• Software Part Number
• Motor Status . . .
• Request Status . . . (Port and arm status, Fetch Records, VTN Log File)
• I/O Status . . . (For engineering use only)
NOTE
The Request Status messages are text messages displayed on the Teach
Pendant with the last message displayed first. To review messages, use the
PREV ITEM key.

2000-0900-01 Revision A
Under Request Status, the Fetch Records file contains some bookkeeping information
relating to the LPT’s operations. It is an ASCII text file. It can be displayed through the
terminal or a connected laptop computer. The time stamp entries are: mm/dd/yy hh:mm:ss
while the count entries are totals which may range from 0 to 2,147,483,648.
The RECORDS.LOG file resides on the LPT’s drive D (NOVRAM). If records file does not
exist during the LPT’s power-on cycle, then the file is created with all numeric entries which
are zeroed and the date and time stamp entries are assigned the current date and time. This
normally occurs when the system is first powered on during manufacturing. It can also occur
after replacement of the battery-backed RAM, drive D.
The following table describes the various entries in the RECORDS.LOG file.
LINE TITLE DATA TYPE DESCRIPTION

LPT system record created Time stamp Date and time when RECORDS.LOG file was
first created.
Teachpoint file update Time stamp Date and time when the teachpoint file was
last modified.
Current power on Time stamp Date and time when the LPT was last
powered on.
Power on count Count Number of times that the LPT has been
powered on.
Load cycles count Count Number of times that LPT has transferred the
cassette from LPT to Process Tool.
Home cycles count Count Number of times that LPT has transferred
cassette from tool to LPT.
Recoverable errors count Count Number of recoverable errors that have been
declared, corrected via Home button.
Nonrecoverable errors count Count Number of nonrecoverable errors that have
been declared, requires user action to clear.
Auto cycle count Count Number of times that the LPT has performed
an auto cycle sequence; load and unload.
EOF N/A End of records file
To access the records file entries, via the Teach Pendant, perform the following:
Review Message... Software Part Number Port Status...

Sensor Alignment... Motor status... Arm Status...
Diag Controls... Request status... Fetch Records
Status... IO Status... VTN log file...
Use the PREV key to Review Message... **END OF MESSAGES**

scroll towards start of Sensor Alignment...
file, use ESC key to quit Controls... Hit ESC key to go back
display. Status... one menu level.

2000-0900-01 Revision A
B.3.2.2 DISPLAYING INDEXER VARIABLES. Selected indexer variables may be displayed on

the Teach Pendant for determining various indexer parameters and for troubleshooting. These are accessed
using the Teach Pendants diagnostic menu. The basic operations is:
Review message... Wafer Sensor Use ENTER, PREV

DIAG Sensor Slot Sensor and NEXT keys to
key alignment... Protrusion Sensor specify variable
Controls... Indexer Item = nn 1 thru 99. On
Status... completion, variable
message is
displayed on line 4.
The Indexer variables are specified by item number as shown in table below. All items are converted
to a 16 bit value so any position counts are represented in mils.
Item Indexer global variable Text displayed

1 wafer_cassette.min_pos W min_pos
2 wafer_cassette.max_pos W max_pos
3 wafer_cassette.separation W separ
4 wafer_cassette.max_cnt W max_cnt
5 wafer_cassette.at_xfer_offset W xfr_off
6 wafer_cassette.wafer_offset W wfr_off
7 wafer_cassette.slot_offset W slt_off
8 wafer_slot.min_pos S min_pos
9 wafer_slot.max_pos S max_pos
10 wafer_slot.separation S separ
11 wafer_slot.max_cnt S max_cnt
12 wafer_slot.at_xfer_offset S xfr_off
13 wafer_slot.wafer_offset S wfr_off
14 wafer_slot.slot_offset S slt_off
15 sys_map.end_cassette_test M end_cas
16 sys_map.end_protrude_test M end_pro
17 sys_map.wafer_separation M separ
18 sys_map.max_cross_slot M max_cs
19 sys_map.half_wafer M half_wf
20 sys_map.min_wafer_ht M min_wf
21 sys_map.unblock_sensor_pos M unbk_sns
22 sys_map.slot1_base M s1_base
23 sys_map.slot1_top M s1_top
24 sys_map.wafer1_top M w1_top

2000-0900-01 Revision A
Item Indexer global variable Text displayed

25 sys_map.wafer1_max_cl M w1_mx_cl
26 sys_map.slot1_base_cnt M s1_base
27 sys_map.slot1_top_cnt M s1_top
28 sys_map.wafer1_top_cnt M w1_top
29 sys_map.max_cl_cnt M max_cl
30 sys_map.half_deadzone_cnt M half_d
31 sys_map.reseat_offset_cnt M rst_off
32 sys_map.wafer_xfer_margin M w_xfr_mgn
33 sys_map.slot_xfer_margin M s_xfr_mgn
34 sys_map.max_tweek_dist M max_twk
35 sys_map.slot_cnt M slt_cnt
36 fan_count P fan_rps
37 fan_error P fan_err

2000-0900-01 Revision A
Sub-Menus Sub-Menus
(2nd Level) (3nd Level)
DAC #0, threshold = 255
Press PREV ITEM END OF MESSAGES
WAFER SENSOR Hit ESC to exit
button to see
messages DAC #1, threshold = 255
SLOT SENSOR Hit ESC to exit
DAC #2, threshold = 255

PROTRUSION SENSOR Hit ESC to exit
Diagnostic Menu
(1ST Level)
REVIEW MESSAGES . . . INDEXER ITEM = XX
KEY
SENSOR ALIGNMENT . . .
DIAG SERVO CONTROL . . .
CONTROLS . . .
STATUS . . .
SET/RESET BRAKES . . .
NOTE
This will be the ENGAGE X BRAKE
software revision for LPT SOFTWARE PART
software loaded. Numbers
shown are only examples. NUMBER . . . DISENGAGE X BRAKE
ENGAGE Y BRAKE
L : 6006-4000-10D
DISENGAGE Y BRAKE
I : 6005-1012-10 REV. A
A : 6006-4101-10B
Press
ENTER to
S : 6016-0001-10B
activate
MOVES CONFIG . . .
ENABLE SERVO . . .
MOVES_FILE_TYPE 1
X SERVO
MOVES_FILE_REQD 1
MOTOR STATUS . . .
Y SERVO
TILT SERVO
COMM TIMEOUT . . .
PORT SERVO
PORT: NO TMOUT ERR
ARM: NO TMOUT ERR Press ENTER to activate
NOTE
CO-ORDINATES . . . Active Menu
Selections Flash
DISABLE SERVO . . .
VERT: 0
X SERVO
HORZ: 0
Y SERVO
TILT: 1
TILT SERVO
PORT: 155
C B A PORT SERVO
Figure B-8. Diagnostic Menu Hierarchy (1 of 3)

2000-0900-01 Revision A
C B A
HOME POSITION . . . DC MOTOR CONTROL . . .
OPEN POD DOOR

VERT: AT HOME
ROT: AT HOME
CLOSE POD DOOR
TILT: AT HOME
OPEN HOLDDOWN LATCH
PORT: AT HOME
CLOSE HOLDDOWN LATCH
LIMITS . . . DO WAFER SEATER HOME
DO WAFER SEATER OUT

VERT: WITHIN LIMITS
ROT: WITHIN LIMITS DO WAFER RESEAT
TILT: WITHIN LIMITS

Press ENTER to activate
PORT: WITHIN LIMITS
RESET SYSTEM . . .
TERMINATE PROGRAM
ESTOP . . .
UP/DOWN LOAD PROGRAM

ARM: ESTOP NOT SET
PORT: ESTOP NOT SET LOAD MOVES FILES
LOAD MOVESA FILES
ERROR STATUS . . .
REQUEST STATUS . . . Enter to confirm
ESC to cancel / exit
ARM: NO ERROR
PORT: NO ERROR
PORT STATUS . . .
SERVO . . . PORT MOTOR STATUS
PORT SELF-TEST
VERT: SERVO ON
ROT: SERVO ON
PORT I/O STATUS
TILT: SERVO ON
PORT: SERVO ON
ARM STATUS . . .
EOM
ARM ERROR
ARM MOTOR
NOTE
Press PREV ITEM D E F
key to see messages

2000-0900-01 Revision A
D F
BRAKE . . .
FETCH RECORDS . . .
VERT: BRK OFF

EOM
ROT: BRK OFF
VTN LOG FILE . . .

GRIPPER: OPEN
OPEN VTN LOG FILE
PORT: CLOSE
CLOSE VTN LOG FILE
POD DOOR: CLOSE

ERASE VTN LOG FILE
POD LATCH: CLOSE

DUMP VTN LOG FILE
SQUAT: NO SQUAT
I O STATUS . . .
Press ENTER to activate
WAF SEATER: HOME

1: 0
2: 0
3: 1 NOTE
Press PREV ITEM
4: 0 key to see messages
I O Status is for
engineering use
only. 5: 0
6: 9b
7: 1
15: 0
16: 88f9
17: 776
18: 0
19: 1

2000-0900-01 Revision A
B.3.3 CONFIGURATION MENU.

Press the <CFG> key to open the first level menu as seen in Figure B-9. Many of the first level functions
produce a second level function as shown in the figure.
B.3.3.1 CONFIGURATION SUB-MENUS.

The Configuration first level menu lists all of the types of functions that can be configured. Selecting each of
the first level functions activates the display of the second level menu selections. To access a sub-menu,
select the item then press <ENTER>.
Example: Selecting Wafer Sensor Opts displays the sub-menu which has two (2) selections; enable wafer
sensor and disable wafer sensor. If the sensor is currently enabled, the item will be flashing on the display.
To change to the disable function, press <NEXT ITEM> to select the disable function and press <ENTER>
to activate the selection. Press <ESC> to exit and return to the previous menu.
Some selections will require a number to be changed. If the item requires the entry of a number, a pointer (up-
pointing arrow) will indicate the item position that can be changed. For example, if a digit is to be changed,
pressing the <NEXT ITEM> or <PREV ITEM> key will increment or decrement the digit respectively. Pressing
<ENTER>will enter the selection and move the pointer to the next digit to be changed. When the last digit has
been changed, and <ENTER> is pressed, the pointer will move to the first digit again. Press <ESC> to exit
this selection and return to the previous menu.
B.3.3.2 CONFIGURATION FILE DEFAULT VALUES.

The Configuration file has the following default information programmed from the factory.
TABLE B-1. CONFIGURATION FILE DEFAULT VALUES

Item Data
Load Options MULTI LOAD
Wafer Sensor Opts ENABLE – D
Host Options LOCAL
PIO Interlock PIO is Manual Status
Device ID 9000
Baud Rate 9600
Audio Alarm Motion and Error Alarm
Slot Count 25
Slot Width 250
Wafer Position 3050
[117.5mm (3.05 inches)]
Parll Prt Opts Host and Control Panel
Tilt Type NORMAL
Tilt Angle –15 degrees

2000-0900-01 Revision A
Sub-Menus
Sub-Menus
(2nd Level)
(3nd Level)
PICKUP POINT OPTS . . .
Sub-Menus Sub-Menus 0.50 inch height
0.75 inch height
(3nd Level) (2nd Level) 1.00 inch height
PORT ARRIVAL HT
Enter to confirm SET TOOL 1.25 inch height
1.50 inch height
ESC to cancel / exit PICKUP POSN PORT DEPARTURE HT 1.75 inch height
2.00 inch height
TOOL ARRIVAL HT 2.50 inch height
Enter to confirm SET PORT 3.00 inch height
ESC to cancel / exit PICKUP POSN 3.50 inch height
TOOL DEPARTURE HT
4.00 inch height
5.00 inch height
LOAD OPTIONS . . .
NOTE
Active Menu
SINGLE LOAD LOAD/UNLD
Selections Flash
SINGLE LOAD LOAD ONLY
Configuration Menu MULTI LOAD

(1ST Level)
Enter to continue
SET PICKUP POINT . . .
KEY ESC to backup / exit
READ / WRITE ITEMS . . . WAFER SENSOR OPTS . . .

CFG
READ ONLY ITEMS . . . ENABLE WAFER SENSOR
SELECT PLATFORM . . . DISABLE WAFER SENSOR
SELECT PLATFORM
CASSETTE TYPE . . .
SELECT PLATFORM 1 SLOTTED, 6 INCH CAS/POD
SLOTTED, 8 INCH CAS/POD

SELECT PLATFORM 2
NO SLOT, 6 INCH CAS/POD
Enter to confirm NO SLOT, 8 INCH CAS/POD
ESC to cancel / exit

SPCL – SLOTTED, 6 INCH POD
NOTE SPCL – SLOTTED, 8 INCH POD

Platform 2 selection will
appear only if 2-platforms SPCL – NO SLOT, 6 INCH POD
are selected under READ/
WRITE ITEMS – SPCL – NO SLOT, 8 INCH POD
HARDWARE SPECIFIC –
PLATFORMS
Enter to continue
ESC to backup / exit
X A
Figure B-9. Configuration Menu Hierarchy (1 of 9)

2000-0900-01 Revision A
Enter to continue
SERIAL HOST OPTS . . .
LOCAL CONTROL
PARTIAL REMOTE CNTL
FULL REMOTE CONTROL
BYPASS HOST ENABLE
CASSETTE SLOTS . . .
CASSETTE SLOTS = 25
CASSETTE SLOTS = 26
Enter to continue
SLOT SEPARATION . . .
SEPARATION OF 0.188
SEPARATION OF 0.250
SLOT HEIGHT = 3050
1000 TO 4000

2000-0900-01 Revision A
READ ONLY ITEMS X B READ / WRITE ITEMS

(continued) (continued)
Current selection
flashes SERIAL HOST
DEVICE ID=(1–29999)
ID=9000
SERIAL HOST Enter to continue

BAUD . . . ESC to backup / exit
BAUD RATE = 2400 AUDIO ALARM . . .
BAUD RATE = 9600

NO ALARM
BAUD RATE = 19200 MOTION ALARM ONLY
ERROR ALARM ONLY
MOTION & ERROR

MOVES TYPE = 1 ALARM
MOVES TYPE = 1
Enter to continue
TILT RESEAT . . .
SCRN DEBUG
LEVEL . . . NO TILT RESEAT
RESEAT AT PORT AREA

DEBUG LEVEL 2
RESEAT AT TOOL AREA

DEBUG LEVEL 3
DEBUG LEVEL 4
TILT RESEAT
TILT ANGLE=(0 to -6000)
DEBUG LEVEL 5 ANGLE = -1500
Enter to continue
PARALLEL PORT
OPTS . . .
NO HOST OR PANEL
PARALLEL HOST ONLY
CONTROL PANEL ONLY
C HOST & CONTROL PANEL

2000-0900-01 Revision A
C
READ / WRITE ITEMS NOTE
PARALLEL SIGNALS . . .
(continued) SPARE 1 and SPARE 2
selections will change
PARALLEL INPUTS . . . according to the
HARDWARE SPECIFIC
selection.
SPARE 1 . . .
SPARE 1 – LOW
SPARE 1 – HIGH
SPARE 2 . . .
SPARE 2 – LOW
SPARE 2 – HIGH
READY TO LOAD . . .
READY TO LOAD – LOW
READY TO LOAD – HIGH
PORT LOCK . . .
PORT LOCK – LOW
PORT LOCK – HIGH
READY TO UNLOAD . . .
READY TO UNLOAD – LOW
READY TO UNLOAD – HIGH
LOAD / UNLOAD . . .
LOAD / UNLOAD – LOW
LOAD / UNLOAD – HIGH
TEST 3 . . .
TEST 3 – LOW
TEST 3 – HIGH
D Y
SPARE 3 . . .
SPARE 3 – LOW
SPARE 3 – HIGH

2000-0900-01 Revision A
D Y
NOTE
READ / WRITE ITEMS SPARE 1 and SPARE 2
(continued) selections will change
PARALLEL according to the
OUTPUTS . . . HARDWARE SPECIFIC
selection.
SPARE 1 . . .
SPARE 1 – LOW
SPARE 1 – HIGH
SPARE 2 – LOW
SPARE 2 – HIGH
ARM READY – LOW
ARM READY – HIGH
RDY UNLOAD / UNLOAD – LOW
RDY UNLOAD / UNLOAD – HIGH
POD IN PLACE – LOW
POD IN PLACE – HIGH
MANUAL / ERROR – LOW
MANUAL / ERROR – HIGH
TEST 1 – LOW
TEST 1 – HIGH
TEST 2 – LOW
TEST 2 – HIGH

2000-0900-01 Revision A
E READ / WRITE ITEMS

(continued)
PIO INTERLOCK . . .
PIO IS ERROR STATUS
PIO IS MANUAL STATUS ESC to backup / exit
CURRENT TILT TYPE . . .
NORMAL TILT
Enter to continue
CENTER TILT
TAG PORT SELECT . . .
PORT D WITH HNDSHK
PORT E - WITH RTS/CTS PORT E WITH HNDSHK
PORT E - NO RTS/CTS PORT E IGNRE HNDSHK
SERIAL HOST, PORT D

SECS PROTOCOL - PORT D
SECS PROTOCOL
NOTE A
These are the teachpoints
currently selected as the
points at which Pre-load and
SIO PRE-LOAD . . .
Pre-unload are reported as Enter to continue
being completed.
ENABLE PRE-LOAD
DISABLE PRE-LOAD
NOTE B PORT DWN

PRE-LOAD = PORT UP
One of three (3) teachpoints See HOME See
can be selected where the Note A PORT UP Note B
displayed order is: Previous PRE-UNLD = ABV HOME CUR: HOME
TP, Current TP, and Next TP.
CUR: This is the current TP
where the arm was stopped.
PRELOAD ARM READY . . .
ARM READY TRUE
ARM READY FALSE

F

2000-0900-01 Revision A
READ / WRITE ITEMS

F (continued)
SIO CLEAR OF TOOL . . . NOTE B

One of three (3) teachpoints
can be selected where the
ENABLE CLR OF TOOL displayed order is: Previous
CUR: This is the current TP
DISABLE CLR OF TOOL where the arm was stopped.
CLEAR OF TPs . . .
See
LOAD (P1) = ABV HOME
Note B
UNLOAD (P1) = PORT UP PORT DWN

See
Note B
HOME
PORT UP
LOAD (P2) = ABV HOME CUR: HOME
UNLOAD (P2) = PORT UP
LEAVE PORT UP . . .
ENABLE AND HOME NOTE C

List of TPs at which leave the port up
between Load and Unload operations
ENABLE W/O HOME is completed for Load and Unload.
P1 = Platform 1 & P2 = Platform 2
DISABLE LEAVE UP
LEAVE UP TPs

See
Note B
See UNLOAD (P1) = PORT UP PORT DWN
Note C HOME
PORT UP
LOAD (P2) = ABV HOME CUR: HOME
CHECK POSITIONING . . .
POSITION CHECKS ON DO POSITION CHECKS
POSITION CHECKS OFF

Enter to continue
G

2000-0900-01 Revision A
READ / WRITE ITEMS

G (continued)
RESEATING WAFER . . .
ALLOW WAFER RESEAT

MANUAL RESEATING ON
BY OPERATOR
NO WAFER RESEAT BY
MANUAL RESEATING OFF
OPERATOR
Enter to continue
POSITION DRIFT CHECK . . . ESC to backup / exit
CHECK POSITION DRIFT

DRIFT CHECK = 0.020
FOR MAX = 0.020

DRIFT CHECK = 0.040
FOR MAX = 0.040

DRIFT CHECK = 0.060
FOR MAX = 0.060
DISABLE POSITION DRIFT

DRIFT CHECK OFF
CHECKS
LOOK AHEAD MOVES . . .
DISABLE LOOK AHEAD

DISABLE LOOK AHEAD
MOVES
ENABLE LOOK AHEAD

ENABLE LOOK AHEAD
MOVES
Enter to continue
POSITIONING SPEED . . . ESC to backup / exit
USE NORMAL SPEED

NORMAL SPEED
DURING POSITIONING
USE MEDIUM SPEED

MEDIUM SPEED
DURING POSITIONING
USE FASTEST SPEED

FASTEST SPEED
DURING POSITIONING
MONITOR FAN . . .
MONITOR FILTER FAN Enter to continue

H DON'T MONITOR FAN

2000-0900-01 Revision A
READ / WRITE ITEMS

H (continued)
HARDWARE SPECIFIC . . .
THREE WIRE PIO . . .
ENABLE 3-WIRE PIO
DISABLE 3-WIRE PIO
PROGRAM SPARES . . .
PLATFORMS =
(1 - 2)
Enter to continue
PLATFORMS = 1 ESC to backup / exit
CAS PRES TIME =

(0-200 tks)
CAS PRESENT TIME 0
Enter to continue
PORT LOCK STATUS . . .

NOTE B
One of three (3) teachpoints
can be selected where the DISABLE PORT LOCK STATUS
displayed order is: Previous
CUR: This is the current TP ENABLE PORT LOCK STATUS
where the arm was stopped.
PIO CLEAR OF TOOL . . . Enter to continue

NOTE D
List of TPs at which clear of tool will be
reported to SIO for Load and Unload. ENABLE CLR OF TOOL
P1 = Platform 1 & P2 = Platform 2
DISABLE CLR OF TOOL
CLEAR OF TPs

See
Note B
PORT DWN UNLOAD (P1) = PORT UP See

Note D
HOME
PORT UP
CUR: HOME LOAD (P2) = ABV HOME

2000-0900-01 Revision A
B.4 KEY FUNCTIONS

The following are descriptions of the Teach Pendant's key functions.
B.4.1 TEACH KEYS.

The Teach keys consist of six (6) keys that enable the engineer to teach the LPT cassette-transfer arm the
points it will follow during a load or unload cycle (see Figure B-10).
• NEXT PT (Next Point) Moves to the next teach point (operates at full-auto speed)
• PREV PT (Previous Point) Moves to the previous teach point (operates at full-auto speed)
• INS PT (Insert Point) Inserts a teach point between the next point and the previous point
• DEL PT (Delete Point) Deletes a teach point between the next point and the previous point
• MOD PT (Modify Point) Sets current value as a new value for one of the current point, next
point, or previous points (also used for Teach Pendant configuration)
• SAVE PT (Save Point) Saves teach-point location to NOVRAM permanently.
Figure B-10. Teach Keys

2000-0900-01 Revision A
B.4.2 PAUSE/RESUM KEY.

Not available.
B.4.3 ENTER KEY.

See Figure B-11. Loads (and saves) data from previous keystroke(s) (Used for Teach Pendant
configuration).
B.4.4 ESC KEY.

Escape Key. See Figure B-11.
• Cancels (de-selects) previous keystroke(s) or exits from menus.
• When used with the <CFG> key it evokes an LPT-status display.
B.4.5 MENU KEYS.

Five (5) keys are used for menu selection. See Figure B-11.
• HOMING Selects Homing Menu (Figure B-7).
• PREV ITEM Moves up through menu selections.
• NEXT ITEM Moves down through menu selections.
• DIAG Selects Diagnostic Menu (Figure B-8).
• CFG Selects Configuration Menu (Figure B-9).
Evokes an LPT-status display when used with the <ESC> key.

2000-0900-01 Revision A
Figure B-11. Menu Keys
B.4.6 MOTION KEYS.

There are thirteen (13) keys that provide manual manipulation of the LPT-servo motors for programming
teach points, see Figure B-12. A key is provided to move each of the four (4) servo axis in the indicated
direction.
CAUTION
These keys will move the LPT without safeguarding against
collision. Do not use these keys with product in the cassette.
Failure to comply may cause damage to the LPT or Process
Tool.

2000-0900-01 Revision A
• VERT DOWN (Vertical Down) Moves gripper down in a straight line.

• VERT UP (Vertical Up) Moves gripper up in a straight line.
• HORZ OUT (Horizontal Out) Moves gripper out in a straight line (toward the Process Tool)
• HORZ IN (Horizontal In) Moves gripper back in a straight line (toward the LPT).
NOTE
Horizontal functions move both the vertical and rotational drives in a
synchronized fashion such that a smooth straight/horizontal motion of the
cassette/gripper results
• ROT OUT (Rotate Out) Moves the rotational arm out toward the Process Tool.
• ROT IN (Rotate In) Moves the rotational arm in toward the LPT.
• PORT DOWN (Port Down) Moves the minienvironment down.
• PORT UP (Port Up) Moves the minienvironment up.
• TILT DOWN (Tilt Down) Tilts the gripper toward horizontal.
• TILT UP (Tilt Up) Tilts the gripper up at approximately a 30 degree angle.
NOTES
1. When one of these keys is pressed, the motor runs until the key is
released. When the key is released, the motor stops. (The motor will also
stop if a limit switch is activated or ESTOP is pressed.)
2. Motion keys must be utilized for LPT movement during the teaching of
moves.
3. The current X/Y position is displayed (in inches) on the LCD each time
one of these keys is pressed and released.
4. When the Home position (0/0) is reached, the LPT arm motion
automatically stops. If one of these keys is released and pressed again,
the unit will pass the Home position. Use extreme CAUTION!

2000-0900-01 Revision A
Figure B-12. Motion Keys
• EXPCT SQUAT key Not Used.

• JOG/STEPS key Used to set the LPT arm motion into the jog mode.
JOG Jog mode is used when a specific distance movement is needed and is
performed at the current selected speed. The jog menu brings up a sub-
menu from which the current position increment can be selected and causes
the motion keys to perform incremental motion (jog) when they are held
down. The increment selection represents a fixed position change increment
relative to current position.

2000-0900-01 Revision A
STEPS Sets movement in one of five (5) increments:

1000 mils / 10 deg
500 mils / 5 deg
250 mils / 2.5 deg
100 mils / 1 deg
10 mils / 0.1 deg
• CONT/ SPEED key Used to set LPT arm motion into continuous mode.
CONT (Default) Continuous mode causes motion to be performed at the current
speed towards the maximum or minimum position while the button is
depressed.
SPEED Sets the speed of movement in one of five (5) increments:
75% SPD-CONT MODE
50% SPD-CONT MODE
25% SPD-CONT MODE
10% SPD-CONT MODE
1% SPD-CONT MODE
B.4.7 DC MOTOR FUNCTION KEYS.

There are four (4) keys that control DC motor functions (Figure B-13).
• OPEN GRIP (Open Gripper)

• CLOSE GRIP (Close Gripper)
• LOCK PORT (Lock Port)
• UNLK PORT (Unlock Port)
NOTE
A single press (the key need not be held) of any of these keys will cause
continuous function. For example, press and release the <LOCK PORT>
key and the Pod will be locked in place, then the Pod door is unlocked.
B.4.8 OTHER FUNCTION KEYS.

See Figure B-14.
• AUTO CYCLE Depressing this button displays the auto-cycle menu.
BEGIN AUTOCYCLE Automatically alternates between performing a load and unload
cycle. The system pauses for ten (10) seconds after each load /
unload cycle has been completed. The status line on the LCD
displays the current number of auto cycles completed.
STOP AUTOCYCLE Causes the auto cycle to terminate at the end of the next unload
cycle.
LOAD / UNLOAD / HOME Brings up a sub-menu from which the user can initiate a
load, unload, or home cycle, if it is valid to do so.
• F1 Spare
• F2 Spare

2000-0900-01 Revision A
(LOCATOR4.PCX)
Figure B-13. DC Motor Function Keys

2000-0900-01 Revision A
(LOCATOR6.PCX)
Figure B-14. Other Function Keys

2000-0900-01 Revision A

2000-0900-01 Revision A
Appendix C
FluoroTrac® OPTION
C.0 INTRODUCTION
The FluoroTrac system is used within a factory environment to collect and display data concerning the
movement of materials and to receive inputs from or provide directions to operators of equipment within the
facility. These activities are made possible by monitoring the location of a particular material lot or operator by
reading or writing to passive transponders known as MicroTags. These MicroTags are attached to the
material lot, the lot carrier or transporter, or are carried by the Operator. The LPT-FluoroTrac integrated
system consists of two major electronic components, a FluoroTrac Master Controller and a SMART-Comm (a
multiplexing and communication protocol converting device). Master Controllers have the ability to read and
write to MicroTags. FluoroTrac read points (antennas) operate under the direct control of the Master
Controller which in turn operates under the control of a Host computer system through the SMART-Comm.
The various electronic components which make up a FluoroTrac system communicate over serial data
cables. The Master Controller communicates with the Host over an RS-232 interface.
C.1 ELECTRONIC COMPONENTS

The FluoroTrac system is composed of a number of electronic components cabled together in a specific
configuration. System architecture can be divided into two (2) basic categories in the LPT. Those categories
are as follows:
• Host system – the system that the electronic components receive commands from and communicate
information to using the RS-232 host interface as defined by the host software system.
• Read Points – Read Points (RP) are the heart of the FluoroTrac System. A Read Point consists of an
antenna. A Read Point is physically connected via the antenna port of the Master Controller.
C.2 ELECTRONIC COMPONENT DESCRIPTIONS
C.2.1 MASTER CONTROLLER.

This device is the heart of the FluoroTrac hardware system. It contains a single multiplexed radio used to
communicate with the read point and MicroTags, an internal power source that provides power to the antenna
port. The Master Controller contains two (2) CPU’s, one to control the radio and the other to control
communications with the Host.
The antenna is attached to the Master Controller antenna port via a common cable type and connector. The
read range of any antenna is limited by the total length of the cable attaching it to the Master. The Master
Controller has the ability to automatically tune each antenna to optimum performance as part of the initial
configuration setup process.
C.2.2 MICROTAGS.
The transponder or MicroTag used with the FluoroTrac System comes in a variety of packages and formats.
Two (2) of these packages, a glass encapsulated pill-type package and a credit card sized, plastic
encapsulated version are commonly used. They are identical electrically and differ only in their packaging.
Each is a passive unit containing no battery or other internal power source, but rather are powered by the
transmitted signal from the radio in the FluoroTrac Master Controller. An internal circuit in the MicroTag
charges up sufficiently when in range for the transponder to send out its own relatively weak return signal to
the Master Controller. This signal contains the information stored in the MicroTag. MicroTags are available in
ASYST TECHNOLOGIES Page C-1
2000-0900-01 Revision A
either single page (64 data bits / 16 hexadecimal characters) or multi-page (17 pages of 64 data bits / 16
hexadecimal characters each). The write range for any antenna / MicroTag combination is approximately 30-
40% of its read range.
While MicroTags may be written to and read many times, the normal FluoroTrac mode is to operate in a write
once, read many times scenario.
C.3 LPT FLUOROTRAC HARDWARE CONFIGURATION

This section describes the FluoroTrac electronics as integrated within the LPT. Figure C-1 shows the
electronics as it is installed into the LPT base assembly. Figure C-2 (page 1 of 2) shows the overall
FluoroTrac-LPT integration. Figure C-2 (page 2 of 2) shows the connector panel and the connector pinout for
the serial ports. Port D is the host connection for communicating with the FluoroTrac.
J7 J3
BOARD RF2
(SMART-COMM) J2
POWER
BOARD RF1
(MASTER CONTROLLER)
DATA
ANTENNA
PORT A
Figure C-1. LPT FluoroTrac Electronics
Page C-2 ASYST TECHNOLOGIES

2000-0900-01 Revision A
Technologies Inc., Fremont, California. This drawing is only conditionally
designs or technical information shown thereon, or any right to reproduce 6 FLUOROTRAC
the drawing or any part therof, except for manufacture by vendors for ANTENNA
Asyst Technologies, Inc. and for manufacture under the corporation's ASYST LPT LEFT
(9700-5005-02) (9700-4939-01)
subject matter thereof unless by written agreement with or written ASYST LPT RIGHT P/O TOP ASSEMBLY
permission from the Company. (9700-5005-01)
ASYST TECHNOLOGIES
NOTES:
1. PREPARING FOR POWER AND COMMUNICATIONS: ON THE SIDE OF THE LPT

VERTICAL DRIVE COLUMN ARE CONNECTIONS FOR POWER AND
COMMUNICATIONS. COMMUNICATIONS PORTS FOR THE HOST COMPUTER,
PROCESS TOOL, TEACH PENDANT, AUXILIARY COMPUTER, AND POWER (110 TO
230 VAC, 50 TO 60HZ, SINGLE PHASE) (SEE DETAIL A). PREPARE ALL APPLICABLE
COMMUNICATIONS CABLES AND THE POWER CABLE FOR CONNECTION TO THE
LPT. THE FOLLOWING DESCRIBE THE CONNECTOR WIRING IF CABLES NEED TO
BE MADE TO INTERFACE THE LPT TO THE PROCESS TOOL OR HOST COMPUTER.
2. POWER: THE PROCESS TOOL PROVIDES AC POWER FOR THE LPT. POWER
MUST BE SUPPLIED THROUGH THE PROCESS TOOL’S EMO SWITCH, SUCH THAT
IN CASE OF AN EMERGENCY, IF THE EMO SWITCH ON THE PROCESS TOOL IS
PRESSED, POWER IS REMOVED FROM THE LPT. THE CUSTOMER IS TO SUPPLY
POWER CONNECTOR TYPE (IEC 320 STD C13 AND CABLE) TO INTERFACE WITH
AC POWER.
3. LPT SERIAL CONNECTORS: THE LPT SERIAL PORTS A, B, C, D, AND E ARE

CONFIGURED AS RS232C PORTS WITH THE AT-STANDARD DB9M CONNECTORS
(SEE DETAIL B). DEPENDING ON THE COMPUTER TYPE CONNECTED TO THE LPT,
A NULL MODEM MAY BE REQUIRED.
SEE DETAIL A
4. LPT COMMUNICATION WITH THE HOST: THE CUSTOMER-PROVIDED HOST
INTERFACE CABLE CONNECTS TO PORT D ON THE LPT INTERFACE CONNECTOR
PANEL (SEE DETAIL A). THE MASTER CONTROLLER AND SMART-COMM
INTERFACE IS CONNECTED THROUGH PORT D. SEE DETAIL B FOR PIN OUTS. A
NULL MODEM CABLE MAY BE REQUIRED.
2000-0900-01 Revision A
4
5. PARALLEL COMMUNICATIONS: THE PARALLEL COMMUNICATIONS BETWEEN THE SEE DETAIL C
LPT AND THE HOST EQUIPMENT CONSISTS OF AN ASYST STANDARD PARALLEL
INTERFACE. THERE ARE FOUR (4) INPUT AND FOUR (4) OUTPUT SIGNALS, TWO
(2) SPARE INPUTS, TWO (2) SPARE OUTPUTS, THREE (3) TEST SIGNALS, AND
+5VDC VOLTAGE SOURCE, A 5V RETURN , AND CHASSIS GROUND. THE SIGNALS
(EXCEPT TEST SIGNALS) ARE OPTO-ISOLATED AT THE LPT. THE PARALLEL
CONNECTOR IS A STANDARD 25-PIN D-SUBMINIATURE TYPE CONNECTOR WITH
FEMALE PINS. 3
Figure C-2 (1 of 2). FluoroTrac-LPT Integration

6. THESE ARE THE TOP ASSEMBLY NUMBER FOR THE ASYST LPT, SMART-COMM,
MASTER CONTROLLER AND ANTENNA OPTION.
7. THIS DOCUMENT IS ONLY SUPPLEMENTAL DOCUMENTATION AND SHOULD BE

USED IN CONJUNCTION WITH ANY AND ALL TECHNICAL AND INSTALL MANUALS
FOR COMPLETE SYSTEM INTEGRATION. FLUOROWARE
MASTER CONTROLLER 5
ASYST SMART-COMM
P/O TOP ASSEMBLY
HOST
TOOL
TECHNOLOGIES, INC.
SINGLE LPT SMART-COMM

FLUOROTRAC CONFIGURATION
SHEET 1 OF 2
Page C-3

Technologies Inc., Fremont, California. This drawing is only conditionally
designs or technical information shown thereon, or any right to reproduce
SERIAL PORTS PARALLEL PORT DCD 1

RX 2
TX 3
DTR 4
SIGNAL GROUND 5
DSR 6
RTS 7
CTS 8
R1 9
POWER CONNECTOR SERIAL PORT, HOST TEACH PENDANT
SERIAL PORT B RESERVED FOR TEST SERIAL PORT (TAG OPTION) DCD DATA CARRIER DETECT
RX RECEIVE DATA
TX TRANSMIT DATA
DETAIL A DTR
DSR
DATA TERMINAL READY
DATA SET READY
ROTATED 90° CW RTS REQUEST TO SEND
CTS CLEAR TO SEND
R1 RING INDICATOR
DETAIL B
PORTS A, B, C, D, & E
TECHNOLOGIES, INC.
SINGLE LPT SMART-COMM

FLUOROTRAC CONFIGURATION
SHEET 2 OF 2
Figure C-2 (2 of 2). FluoroTrac-LPT Integration
C.4 HOST COMMUNICATION, SECS PROTOCOL

The Host can communicate with the Master Controller using SECS protocol through the SMART-Comm.
This communication is limited to reading and writing to the MicroTag.
The following are the messages that are used for information transfer between the SMIF I/Os and the Host
computer system.
In the following messages, “H” signifies the Host system, and “E” signifies the SMART-Comm.
S4,F111 FT_Tag Read Request (FRR) S,H –> E, reply

S4,F112 FT_Tag Read Data (FRD) S,H <– E
S4,F113 FT_Tag Write Request (FWR) S,H –> E, reply
S4,F114 FT_Tag Write Acknowledge (FWA) S,H <– E

2000-0900-01 Revision A
S4,F111 FT_Tag Read Request (FRR) S,H –> E, reply

Description:
The Host sends this message to request FluoroTrac MicroTag data. When performing this request,
the Host places the device ID of the SMART-Comm on the SECS message header. SMART-Comm
performs the FluoroTrac MicroTag protocol to the Tag device, gets the data and returns it to the Host
as a SECS message.
Structure:
L, 3
1. <DEVID>
2. <TAGLOC> (bin number)
3. <PAGE_NUMBER > (A through P)
Exceptions: None
S4,F112 FT_Tag Read Data (FRD) S,H <– E

Description:
SMART-Comm returns the FluoroTrac MicroTag data for the requested page
Structure:
L, 5
1. <DEVID>
4. <ACK6>
5. <FT_TAGDATA>
Exceptions: If ACK6 is not zero, the last field FT_TAGDATA will be either blanks or null.
S4,F113 FT_Tag Write Request (FWR) S,H –> E, reply

Description:
The Host sends this message to write FluoroTrac MicroTag data. When performing this request, the
Host places the device ID of the SMART-Comm on the SECS message header. SMART-Comm
performs the FluoroTrac tag protocol to the tag device, update the data on the Tag and returns
success status to the Host.
Structure:
L, 4
1. <DEVID>
4. <FT_TAGDATA>
Exceptions: None.

2000-0900-01 Revision A
S4,F114 FT_Tag Write Acknowledge (FWA) S,H <– E

Description:
SMART-Comm updates the FluoroTrac MicroTag and sends the acknowledgment code back to Host.
Structure:
L, 4
1. <DEVID>
4. <ACK6>
Exceptions: None.
C.5 LPT FLUOROTRAC CABLE INFORMATION

This section describes the FluoroTrac option-specific cables. This section can be used for troubleshooting
and diagnostics when signal tracing is necessary.
SMART COMM PWR CABLE ASSEMBLY – 9700-5006-01

CONN COLOR CONN SIGNAL NAME / REF CONN SIGNAL NAME / REF
P5-1 Brown J5-1 Return P7-6 Ground
P5-2 Red J5-2 Return P7-5 Ground
P5-3 Orange J5-3 +5 VDC P7-4 +5 VDC
P5-4 Yellow J5-4 +5 VDC P7-3 +5 VDC
P5-5 Green J5-5 –12 VDC – –
P5-6 Blue J5-6 –12 VDC P7-1 –12 VDC
P5-7 Violet J5-7 +12 VDC P7-2 +12 VDC
P5-8 Gray J5-8 +12 VDC – –
P5-9 White J5-9 N/C – –
P5-10 Black J5-10 N/C – –
– – – – P7-7 N/C
– – – – P7-8 Key
RF PCB PWR CABLE ASSEMBLY – 9700-5007-01

TERM COLOR CONN SIGNAL NAME / REF
1 Brown P1-1 Ground
1 Red P1-2 Ground
2 Orange P1-7 +24 VDC
2 Yellow P1-8 +24 VDC
RF ID CABLE ASSEMBLY – 9700-5008-01

RF PCB-2 TX RF ID Orange J2-13 RX COM 4 SMART COM
RF PCB-3 RX RF ID Green J2-15 TX COM 4 SMART COM
RF PCB-7 Ground RF ID White J2-19 Ground SMART COM
J2-1 – Brown N/C –
J2-2 – Red N/C –
J2-3 RX COM 3 SMART COM Orange J11-5 TXD COM 1 LPT CPU

2000-0900-01 Revision A
RF ID CABLE ASSEMBLY – 9700-5008-01 (Continued)

J2-4 RTS COM 3 SMART COM Yellow J11-6 CTS COM 1 LPT CPU
J2-5 TX COM 3 SMART COM Green J11-3 RXD COM 1 LPT CPU
J2-6 CTR COM 3 SMART COM Blue J11-4 RTS COM 1 LPT CPU
J2-7 – Violet N/C –
J2-8 – Gray N/C –
J2-9 Ground SMART COM White J11-9 Ground LPT CPU
J11-11 DCD COM 2 LPT CPU Brown P11-11 DCD Port C
J11-12 DSR / RX+ COM 2 LPT CPU Red P11-12 DSR / RX+ Port C
J11-13 RXD / RX– COM 2 LPT CPU Orange P11-13 RXD / RX– Port C
J11-14 RTS COM 2 LPT CPU Yellow P11-14 RTS Port C
J11-15 TXD COM 2 LPT CPU Green P11-15 TXD Port C
J11-16 CTS / TX+ COM 2 LPT CPU Blue P11-16 CTS / TX+ Port C
J11-17 DTR / TX– COM 2 LPT CPU Violet P11-17 DTR / TX– Port C
J11-18 RI COM 2 LPT CPU Gray P11-18 RI Port C
J11-19 Ground White P11-19 Ground
J11-20 N/C Black P11-20 N/C
P11-1 DCD Port D LPT Black J3-10 DCD COM 2 SMART COM
P11-2 DSR Port D LPT Brown J3-11 DSR COM 2 SMART COM
P11-3 RXD Port D LPT Red J3-12 RXS COM 2 SMART COM
P11-4 RTS Port D LPT Orange J3-13 RTS COM 2 SMART COM
P11-5 TXD Port D LPT Yellow J3-14 TXD COM 2 SMART COM
P11-6 CTS Port D LPT Green J3-15 CTS COM 2 SMART COM
P11-7 DTR Port D LPT Blue J3-16 DTR COM 2 SMART COM
P11-8 RI Port D LPT Violet J3-17 RI COM 2 SMART COM
P11-9 Ground Port D LPT Gray J3-18 Ground SMART COM
P11-10 – White N/C –
J3-1 DCD COM 1 SMART COM Brown Test-1 DCD Port B LPT
J3-2 DSR COM 1 SMART COM Red Test-2 DCR Port B LPT
J3-3 DXR COM 1 SMART COM Orange Test-3 DCD Port B LPT
J3-4 RTS COM 1 SMART COM Yellow Test-4 RTS Port B LPT
J3-5 TXD COM 1 SMART COM Green Test-5 TXD Port B LPT
J3-6 CTS COM 1 SMART COM Blue Test-6 CTS Port B LPT
J3-7 DTR COM 1 SMART COM Violet Test-7 DTR Port B LPT
J3-8 RI COM 1 SMART COM Gray Test-8 RI Port B LPT
J3-9 Ground COM 1 SMART COM White Test-9 Ground Port B LPT
RF ID MINIENVIRONMENT FRAME CABLE ASSEMBLY – 9700-5009-01 (CABLE 1)

P53-1 Brown P3-1 +5 VDC
P53-2 Red P3-2 Ground
P53-3 Orange P3-3 Pod Unlocked
P53-4 Yellow P3-4 Pod Locked
P53-5 Green P3-5 Motor (+)
P53-5 White P3-7 Motor (+)
P53-6 Blue P3-6 Motor (–)
P53-6 Gray P3-8 Motor (–)
P53-7 Violet P3-9 Pod In Place
P53-10 Clear P3-10- Chassis Ground

2000-0900-01 Revision A

P3-3 RXD Brown P6-3 TXD
P3-4 RTS Red P6-8 CTS
P3-5 TXD Orange P6-2 RXD
P3-6 CTS Yellow P6-7 RTS
P3-9 Ground Green P6-5 Ground
P3-13 RXD Blue P7-3 TXD
P3-14 RTS Violet P7-8 CTS
P3-15 TXD Gray P7-2 RXD
P3-16 CTS White P7-7 RTS
P3-19 Ground Clear P7-5 Ground
Terminal 1 Braided Shield – Terminal 2 Braided Shield

Terminal 1 Black P22-1 POWER EN (RC)
Terminal 2 White P22-2 POWER EN RTN (RCG)
Terminal 3 Braided Shield Terminal 4 Braided Shield

ANT 1 COLOR ANT 2
Pin 1 Black Pin 3
Pin 2 Green Pin 6
Pin 3 Red Pin 5
Pin 4 White Pin 8

P2-1 Red P5-1 +24 VDC
P2-4 Black P5-4 24 VDC RTN
P5-1 Red P1-1 +24 VDC (J1-4)
P5-3 Black P1-2 24 VDC RTN (J1-5)
Terminal 1 Shield Terminal 2 Shield
RF ID ANTENNA ONLY ADAPTER CABLE ASSEMBLY – 9700-5048-01

ANT 2 COLOR TEST SIGNAL NAME / REF
Pin 3 Black Pin 1 LPT Port B-1
Pin 5 Red Pin 5 LPT Port B-3
Pin 6 Green Pin 3 LPT Port B-2
Pin 8 White Pin 7 LPT Port B-4
Solder Lug Braided Shield N/C Chassis Ground

2000-0900-01 Revision A
INDEX
A
Asyst-SMIF (definition)............................................ 1-5 F
Auto cycle key ........................................................B-31 Fan / filter air velocity adjustment .......................... 4-81
Automatic recovery................................................... 3-6 Fan motor replacement, ULPA fan/filter assembly . 4-95
FFU (definition) ........................................................ 1-5
B Filtered air system (definition).................................. 1-5
FluoroTrac (definition) ............................................. 1-5
C FluoroTrac ............................................................... C-1
Cable wire lists........................................................ 3-17 Following error ..............................................................
Cassette gripper ........................................................ 2-7 See Problem identification table
Cassette pick-up position (specification) .................. 1-1 Following errors........................................................ 3-4
Cassette positioning (specification) .......................... 1-1 Fuse warning label .........................................................
Cassette-transfer mechanism (definition).................. 1-5 See Labels
Cautions (definition) ................................................. 1-5 Fuses ..................................................................1-4, 4-2
Communications (specification) ............................... 1-1
Communications I/O interface board ...................... 2-19 G
Communications setup menu ....................................B-5 General inspection .................................................... 4-4
Configuration menu ................................................B-16 General menu navigation ......................................... B-3
Configuration sub-menus ................................................ Gripper adjustment: V-move................................... 4-43
See Configuration menu Gripper adjustment; H-move................................... 4-57
Control panel ............................................................ 2-2 Gripper finger adjustment; V- and H-move ............ 4-39
Gripper level adjustment; V- and H-move .............. 4-53
D Gripper-tilt motor-drive replacement ...................... 4-93
DC motor function keys ..........................................B-31 Ground labels.................................................................
DC stepper motors .......................................................... See Labels
See LPT 2150 motor controls
See LPT 2200 motor controls H
Depth (specification)................................................. 1-1 Hazard label ...................................................................
Diagnostic menu .......................................................B-9 See Labels
Diagnostic sub-menus ..................................................... Height (specification)................................................ 1-1
See Diagnostic menu H-move (definition) .................................................. 1-5
Diagnostics and troubleshooting ............................... 3-1 Home (definition)...................................................... 1-5
Display setup menu...................................................B-6 Home position criteria............................................... 2-3
Displaying indexer variables...................................B-11 Home switch ..................................................................
Drive column ............................................................ 2-6 See Control panel
Homing menu........................................................... B-9
E Host communication, SECS protocol.............................
Electrical and mechanical assembly drawings ......... A-5 See LPT Host Communications Manual
Electrical power ..............................................................
See Safety I
Electronic assemblies.............................................. 2-10 Indexer board indicators ......................................... 3-15
Electronic circuit board replacement ...................... 4-99 Initial powerup ...............................................................
Emergency stop button.................................................... See Teach pendant operation
See Teach pendant operation Inspect and clean the LPT and lubricate vertical lead
Encoder replacement............................................. 4-119 screw ..................................................................... 4-7
ENTER key.............................................................B-27 Inspect, clean, lubricate and perform cleanliness
Environmental (specification)................................... 1-2 assurance ............................................................. 4-15
Equipment tagout / lockout procedure ...................... 1-3 Interconnect diagram .....................................................
Error recovery........................................................... 3-5 See Simplified system interconnect diagram
ESC key ..................................................................B-27 Interlock label ................................................................
Excessive wafer protrusion sensor .......................... 2-14 See Labels
Excessive wafer protrusion sensor adjustment........ 4-35 J
Exit setup mode ........................................................B-8 Jog/steps................................................................. B-28
Index-1
Motor brake replacement, series 1........................ 4-111

K Motor brake replacement, series 2........................ 4-115
Key functions, other................................................B-31 Mounting (specification)........................................... 1-1
Keyboard setup menu ...............................................B-7 MSC (Definition)...................................................... 1-6
Kinematic (definition) ...............................................1-5 Multi-load (Definition) ............................................. 1-6
L N
Labels ........................................................................1-7 Nonrecoverable errors .............................................. 3-6
Laser .................................................................. 1-1, 1-4
Laser caution .................................................................. O
See Laser safety Operating mode (definition) ..................................... 1-6
Laser diode replacement........................................4-103 Operating sequence................................................... 2-3
Laser interlock ................................................................ Optical detector system........................................... 2-10
See Laser See Laser
Laser safety........................................................ 1-3, 4-1 Optical detector system adjustment ........................ 4-29
Liquid crystal display (LCD). ......................................... Optical sensors................................................................
See Teach pendant operation See Sensors
Load (definition)........................................................1-5 Optical-limit switches ............................................. 2-14
Load switch .................................................................... Over-travel switch adjustment; V- and H-move ..... 4-61
See Control panel
Loading and unloading sequence.................................... P
See Operating sequence Particle protection strip replacement .................... 4-107
LPT 2150 motor controls.........................................2-15 Pause/resum key .....................................................B-27
LPT 2200 motor controls.........................................2-15 Pendant setup menus.................................................B-3
LPT conventions........................................................1-7 Pinch labels.....................................................................
LPT FluoroTrac cable information...........................C-6 See Labels
LPT FluoroTrac hardware configuration..................C-2 Pinch points .............................................................. 1-5
LPT spare parts lists .................................................A-1 Pod hold-down latch adjustment; LPT 2200........... 4-67
LPT system controller board ...................................2-16 Pod-door lock motor.......................................................
LPT system overview ................................................2-1 See LPT 2200 motor controls
Lubrication ................................................................4-3 Pod-in-place light............................................................
See Status indicators
M Pod-in-place switch adjustment; LPT 2200 ............ 4-71
Main menu................................................................B-3 Port assembly............................................................ 2-7
Maximum reach of load arm (specification)..............1-1 Port control ............................................................. 2-11
Mechanical assemblies ..............................................2-6 Port door ................................................................... 2-8
Menu keys ..............................................................B-27 Port door leveling and adjustment .......................... 4-63
MicroTag (definition)................................................1-6 Port lock/unlock mechanism adjustment; LPT 2150 4-75
MicroTag........................................................................ Port plate (definition)................................................ 1-6
See FluoroTrac Power (specification) ................................................ 1-1
Minienvironment (definition) ....................................1-6 Power light......................................................................
Minienvironment .......................................................2-7 See Status indicators
Minienvironment drive or arm servo-motor assembly Power distribution board......................................... 2-19
replacement..........................................................4-89 Power fuses............................................................... 4-2
Minienvironment drive or arm servo-motor Power supply .......................................................... 2-17
replacement..........................................................4-85 Power switch...................................................................
Minienvironment servo-motor ........................................ See Control panel
See LPT 2150 motor controls Power switch label ..........................................................
See LPT 2200 motor controls See Labels
Model and serial numbers............................................... Preventive service (definition).................................. 4-3
See Labels Preventive service procedures .................................. 4-5
Motion control board...............................................2-18 Printed circuit board assemblies ............................. 2-10
Motion keys ............................................................B-28 Problem identification table...................................... 3-2
Index-2 ASYST TECHNOLOGIES

2000-0900-01 Revision A
Product (definition)................................................... 1-6 Status indicators ...................................................... 2-16

Protrusion sensor ............................................................ Stop-plate adjustment; V-move............................... 4-47
see Optical sensors STS (definition) ........................................................ 1-6
Sub-menu navigation................................................ B-3
Q
T
R Teach keys ............................................................. B-26
Ready .............................................................................. Teach pendant ................................................... 1-7, B-1
See Status indicators Teach pendant operation .......................................... B-1
Recommended lubricants table ....................................... Teach pendant setup mode....................................... B-3
See Lubrication Teach point (TP) acquisition overview ................... 4-52
Recommended preventive service schedule.............. 4-3 Terminology.............................................................. 1-5
Recoverable errors .................................................... 3-6 Tilt .................................................................................
Required tools................................................... 4-4, A-4 See Gripper
Rotating arm drive .......................................................... Troubleshooting servo amplifier indicators ............ 3-14
See Drive column
U
S Ulpa................................................................................
Safety ........................................................................ 1-3 See FFU
Safety interlocks........................................................ 1-4 Unload (definition).................................................... 1-7
Safety requirements................................................... 4-1 Unload switch ................................................................
Saving changes..........................................................B-4 See Control panel
SECS communications (definition)........................... 1-6 User................................................................................
Sensors.................................................................... 2-13 See Laser safety
Service technician ...........................................................
See Laser safety V
Servo amplifier board ............................................. 2-18 Vertical arm drive ..........................................................
Servo amplifier home indicators ............................. 3-15 See Drive column
Servo controller board indicators............................ 3-15 V-move (definition) .................................................. 1-7
Simplified system interconnect diagram ................. 2-10
Slot sensor....................................................................... W
See Optical sensors Wafer seater (definition) ........................................... 1-7
SMART-Comm................................................. 1-6, C-1 Wafer seater mechanism adjustment ....................... 4-77
SMART-Tag (definition) .......................................... 1-6 Wafer sensor ..................................................................
SMIF-E (definition) .................................................. 1-6 See Optical sensors
SMIF-Pod (definition) .............................................. 1-6 Wafer size (specification) ......................................... 1-1
SMIF-Pod load height (specification)....................... 1-1 Warning label.................................................................
SMIF-port (definition) .............................................. 1-6 See Labels
Speed of travel (specification) .................................. 1-1 Warnings (definition)................................................ 1-7
Squat (definition) ...................................................... 1-6 Weight (specification)............................................... 1-1
Squat switch adjustment; V- and H-move............... 4-49 Width (specification) ................................................ 1-1
Standard load (definition) ......................................... 1-6
Status and error reporting ......................................... 3-4
ASYST TECHNOLOGIES Index-3

2000-0900-01 Revision A
Index-4 ASYST TECHNOLOGIES

2000-0900-01 Revision A

Asyst LPT 2200

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

LOAD PORT TRANSFER

Manual Part Number 2000-0900-01 Revision A

ASYST-SMIF, Load Port Transfer, SMIF-Pod, SMART-Tag, SMART-Traveler System, SMART-Storage,

Asyst Technologies, Inc.

Copyright Asyst Technologies, Inc., January 1997. All Rights Reserved

Service Manual for Load Port Interface LPT 2150 / 2200

Chapter 1 - GENERAL INFORMATION (Pages 1-1 thru 1-12)

1.0 Introduction ...................................................................................................................... 1-1

Chapter 2 - THEORY OF OPERATION (Pages 2-1 thru 2-20)

2.0 Introduction ...................................................................................................................... 2-1

2.5.2.5 Quad-Serial I/O...............................................................................................................2-12

Chapter 3 - DIAGNOSTICS AND TROUBLESHOOTING (Pages 3-1 thru 3-30)

3.0 Introduction .......................................................................................................................3-1

Chapter 4 - SERVICE (Pages 4-1 thru 4-122)

4.1 Safety Requirements ........................................................................................................4-1

Preventive Service Procedures .................................................................................... 4-5

Calibration / Alignment Procedure............................................................................... 4-27

Corrective Service Procedures .................................................................................... 4-83

Appendix B TEACH PENDANT (Pages B-1 thru B-34)

B.2.7 Display Setup Menu......................................................................................................... B-6

Appendix C FluoroTrac Option (Pages C-1 thru C-8)

1-1 Load Port Transfer.........................................................................................................................1-2

2-1 Load Port Transfer System............................................................................................................2-1

2-4 LPT Vertical Drive......................................................................................................................... 2-6

3-1 Servo Amplifier Board................................................................................................................... 3-16

4-1 Laser Danger Label ...................................................................................................................... 4-2

PSP-1-1 LPT Components............................................................................................................. 4-11

CAP-1-1 Optical Assembly Bracket................................................................................................ 4-33

CAP-14-3 Wafer Seater Mechanism, Side View.............................................................................. 4-80

CSP-1A-1 LPT Side View ................................................................................................................. 4-87

B-1 Teach Pendant ............................................................................................................................. B-2

C-1 LPT FluoroTrac Electronics .......................................................................................................... C-2

1-1 Product Specifications ...................................................................................................................1-1

3-1 User Identifier Problems ................................................................................................................3-2

4-1 Fuse Ratings By Location..............................................................................................................4-2

4-2 Recommended Preventive Service Schedule .............................................................................. 4-3

A-1 LPT Level 1 Spares Kit (Series 1) ................................................................................................ A-1

B-1 Configuration File Default Values .............................................................................................. B-14

Preliminary Jan 1999 Load Port Transfer System ...

LIST OF EFFECTIVE PAGES

Page No. Change in Effect Page No. Change in Effect

ABOUT THIS MANUAL

MANUAL CHANGES AND REVISIONS

1.1 PRODUCT SPECIFICATIONS

TABLE 1-1. PRODUCT SPECIFICATIONS

Wafer Size: LPT 2150 = 150mm LPT 2200 = 200mm

Communications: Serial RS-232C (SECS Ι / SECS ΙΙ), RS-485 (optional), Bi-directional

ASYST TECHNOLOGIES Page 1-1

Table 1-1. Product Specifications (Continued)

Figure 1-1. Load Port Transfer

Page 1-2 ASYST TECHNOLOGIES

1.2.2 EQUIPMENT TAGOUT / LOCKOUT PROCEDURE.

1.2.3 LASER SAFETY

1.2.3.2 SERVICE TECHNICIAN.

1.2.3.3 LASER CAUTION.

ASYST TECHNOLOGIES Page 1-3

1.2.4 ELECTRICAL POWER.

1.2.4.1 POWER FUSES.

1.2.5 SAFETY INTERLOCKS.

1.2.5.1 LASER INTERLOCK.

Page 1-4 ASYST TECHNOLOGIES

1.2.6 PINCH POINTS.

ASYST TECHNOLOGIES Page 1-5