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Lecture Note http://www.faculty.iu-
By Dereje K. bremen.de/dknipp/
Source: Apple
Ref.: Apple
Ref.: IBM
Critical
10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 dimension (m)
Ref.: Palo Alto Research Center
Fundamentals of Semicondutors 1
Introduction to Electronic Devices
2 Fundamentals of Semiconductors
Fundamentals of Semicondutors 2
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 3
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
The purpose of this part of the lecture is to introduce the solid state physics
concepts, which are needed to understand semiconductor materials and
semiconductor devices. This part of the lecture is kept as comprehensive as
possible.
Fundamentals of Semicondutors 4
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Range of electrical
conductivities σ.
Corresponding
resistivity:
ρ = 1σ
Fundamentals of Semicondutors 5
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
All materials listed in this periodic table are of interest for electronic
applications. However, silicon (Si) and gallium arsenide (GaAs) are the most
most important materials. Germanium (Ge) is only of interest for niche
applications. Silicon has substituted germanium mainly due to the properties
of silicon oxide.
Ref.: M.S. Sze, Semiconductor Devices
Fundamentals of Semicondutors 6
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 7
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 8
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 10
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 11
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 12
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Zincblende lattice.
Fundamentals of Semicondutors 13
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Miller Indices
of some
important
planes in a
cubic crystal.
Crystal properties along different planes are different and the electrical,
thermal and mechanical properties can be dependent on the crystal
orientation.
Indices (Miller indices) were introduced to define various planes in a crystal.
Fundamentals of Semicondutors 14
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 15
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 16
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 17
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 18
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 19
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 20
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
q2
EB = Bohr engery
8πε 0 aB
where aB is the Bohr radius. q is the charge of the electron, which is the
elementary charge and ε0 is the permittivity. Electron energies between these
energy levels En are not allowed.
Fundamentals of Semicondutors 22
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
ε 0h2
aB = Bohr radius
π ⋅ me q 2
Fundamentals of Semicondutors 23
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Bohr's atom model can be combined with Einstein's photon theory (2. Bohr‘s
Postulate). The energy difference between two energy levels n and m is given by
where En corresponds to the higher energy level. The transition from a higher to
a lower energy level leads to an energy loss. The energy can be released in the
form of a photon, where f is the frequency of the emitted light. The frequency and
the corresponding wavelength of the light is given by
q 4 me 1 1
f n ,m = 2 2⋅ 2− 2
8ε 0 h m n Frequency of the emitted light.
c
λn,m = Wavelength of the emitted light.
f n ,m
Fundamentals of Semicondutors 24
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 25
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 26
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 27
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 28
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 29
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
If an electron is excited to the conduction band it can move freely in the crystal,
since the electron can be treated like a particle in free space. The propagation
of the free electron can be described by the wave function, which is the solution
of the Schrödinger equation. The wave function for a free electron is given by
p
k= Wave vector
h 2π
P is the momentum of the electron. Due to this expression the electron energy
can be given as a function of the wave factor. We speak about the k-space
representation. The energy bands can now be determined as a function of the
k-vector.
Fundamentals of Semicondutors 30
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
me v 2
En =
2
Energy of a free electron
p = me v
Energy momentum diagram for a
Momentum of a free electron free electron
Fundamentals of Semicondutors 31
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
h
λ= DeBroglie equation
me v
Dualism of waves and matter for
hk electromagentic waves.
p=
2π k: wave vector
We can rewrite the equation so that the wave vector is expressed in terms of
the momentum of the electron.
p Wave vector
k=
h 2π
Fundamentals of Semicondutors 32
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Silicon GaAs
Fundamentals of Semicondutors 33
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
h2k 2
En (k ) = EC + 2 Energy of a electron in the
8π ⋅ mn conduction band
where mn is the effective mass of the electron. The effective mass can be
calculated by:
1
mn = Effective mass of an electron
∂ En ∂ p
2 2
Fundamentals of Semicondutors 34
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Energy-momentum relation-ship
of a special semi-conductor with
an electron effective mass of
mn=0.25m0 in the conduction
band and a hole effective mass
of mp=m0. The actual energy-
momentum relationship (also
called energy-band diagram) for
silicon and gallium arsenide are
much more complex.
Fundamentals of Semicondutors 35
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 36
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
For an insulator the valence electrons are strongly bonded to the neighboring
atoms. This bonds are difficult to break and consequently there are no free
electrons, which can participate in an current flow.
Insulators are characterized by a large bandgap. All energy levels in the
valance band are occupied, whereas all energy levels in the conduction band
are empty.
Thermal energy or an applied
electrical field is not sufficient to raise
the uppermost electron in the
valence band to the conduction
band.
One of the best insulators is silicon
oxide.
Fundamentals of Semicondutors 38
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 39
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 40
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
ECtop
EVtop
Hole concentration
p= ∫ N h (E )⋅ Fh (E )dE
EVbot
where n and p are the electron and hole concentration [1/cm3] (Number of
electrons and holes per unit volume. Ne(E) and Nh(E) are Density of States
(Allowed energy states per energy range and per unit volume). Fe(E) and Fh(E)
are the Fermi-Dirac distributions for electrons and holes. The Fermi-Dirac
distribution is a probability function, which indicates whether a state is occupied
by an electron or a hole.
Fundamentals of Semicondutors 41
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
In the first step the product of the Density of States Ne(E), Nh(E) and the Fermi-
Dirac Distribution Fe(E), Fh(E) is calculated. The product states whether the
states in the conduction and the valence band are occupied by free electrons
and holes. The product corresponds to a carrier density for a given energy. In
order to determine the overall carrier concentration the integral over all energies
(conduction and the valence band) has to be determined.
Fundamentals of Semicondutors 42
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 43
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
4π
N C (E ) = 2me3 (E − Ec ) Density of states for electrons
h3
4π
NV (E ) = 2mh3 (EV − E ) Density of states for holes
h3
The Density of States is determined by a single material parameter, which
is the effective mass of the electron or the hole. Therefore, the density of
states for electrons and holes are very often different.
Fundamentals of Semicondutors 44
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 45
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
1.0 1
Fe (E ) =
Fh(h) 1 + exp(E − EF kT )
Fe(E)
Fermi energy for electrons
0.5
Fh (E ) = 1 − Fe (E ) =
0 1
=
-0.5 -0.4 -0.3 -0.2 -0.1 0 0.1 0.2 0.3
1 + exp(EF − E kT )
Energy E-EF [eV]
Fermi energy for holes
Fundamentals of Semicondutors 46
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 47
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
E E E
Ec
EF
EC EF
EC
EF
EV EV EV
Fundamentals of Semicondutors 48
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
How can we apply now the concept of the Fermi level do different materials like
conductors, insulators and semiconductors?
In the case of a conductor the Fermi level is in the conduction band. Therefore,
the conduction band is always occupied with electrons.
The situation is quite different for insulators and semiconductors. In the case of a
semiconductor it is assumed that the material is an intrinsic semiconductor. As a
consequence the Fermi level is (approximately) in the middle of the bandgap.
However, the bandgap of an insulator is much larger than the bandgap of a
semiconductor.
The bandgap for a semiconductor is in the range of 0.6eV to 4eV, whereas the
bandgap of an insulator is larger than 5.0eV. For example silicon oxide, which is
the insulator in microelectronics, has a bandgap of 9.0eV. As a consequence it is
very difficult to overcome such a high energy barrier.
Fundamentals of Semicondutors 49
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
3
m kT Effective Density of States
N C = 2 2π e 2 in the conduction band
h
3
m kT Effective Density of States
NV = 2 2π h 2 in the valence band
h
Fundamentals of Semicondutors 51
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
n = p = ni
Intrinsic carrier
concentration
Electron, hole and intrinsic carrier concentration. Ref.: M.S. Sze, Semiconductor Devices
Fundamentals of Semicondutors 52
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
EF (n = p = ni ) = Ei
The electron and hole concentration is given by
EV + EC kT NV
Ei = + ln Intrinsic energy
2 2 NC
Fundamentals of Semicondutors 53
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
At room temperature the second term is much smaller than the first term.
Therefore, the intrinsic energy is very close to the middle of the bandgap
(EC-EV)/2=Eg/2. For silicon the intrinsic energy deviates from the middle of the
bandgap by Ei-(EC+EV)/2≈-kT/2=-13meV. The intrinsic energy is shifted towards
the valence band. For Gallium Arsenide the situation is opposite and the
intrinsic energy is slightly shifted towards the conduction band: Ei-
(EC+EV)/2≈3kT/2=39meV
Fundamentals of Semicondutors 54
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
EC − Ei
N C = ni ⋅ exp
kT
E − EV
NV = ni ⋅ exp i
kT
Eg Intrinsic carrier
ni = N C NV ⋅ exp −
concentration
Intrinsic carrier concentration
2kT for silicon and GaAs.
Ref.: M.S. Sze, Semiconductor Devices
Fundamentals of Semicondutors 55
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
E − Ei
N C = ni ⋅ exp C
kT
Electron concentration
E − Ei
n = ni ⋅ exp F
kT
Ei − EF
p = ni ⋅ exp Hole concentration
kT
Fundamentals of Semicondutors 56
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Schematic silicon
lattice for p-type
doping with donor
atoms (boron).
Elements out of column III and column V of the perodic table are of
particualr interest to intentionally dope silicon. Elements out of column III
form acceptor states, whereas elements from column V tend to form donor
states.
Fundamentals of Semicondutors 59
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
EC
Energy
ED Donor levels
Schematic energy band
representation of a
EV semiconductor with donor ions.
Distance
Fundamentals of Semicondutors 60
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
EC
Energy
Distance
Fundamentals of Semicondutors 62
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
The product of the electron and hole concentration is equal to the square of
the intrinsic carrier concentration if the semiconductor is in thermal
equilibrium. In this case it does not matter, whether the semiconductor is an
intrinsic semiconductor or an extrinsic semiconductor. In the second case the
semiconductor is doped by acceptors or donors.
If the semiconductor is intrinsic the following relationship applies
Intrinsic semiconductor
p = n = ni and p ⋅ n = ni2
in thermal equilibrium
Fundamentals of Semicondutors 63
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
n + NA = p + N D Charge neutrality
If we assume that the material is only doped by donors so that NA=0 the
equation is simplified to n=p+ND. Therefore, the semiconductor is an n-type
semiconductor. The hole concentration can now be calculated by
Hole concentration for an
pn = ni2 nn n-type semiconductor
Fundamentals of Semicondutors 64
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
nn =
1
2
(
N D + N D2 + 4ni2 ) Electron concentration for
an n-type semiconductor
In most of the cases we can assume that the Donor concentration is higher
than the intrinsic carrier concentration so that the expression is reduced to
Fundamentals of Semicondutors 65
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
pn = ni2 N D
So that the Fermi level can be calculated by using the Boltzmann distribution
Fundamentals of Semicondutors 66
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
1
(
p p = N A + N A2 + 4ni2
2
) Hole centration for an p-
type semiconductor
If we again assume that the defect levels are very close to the band (valence
band) most of the acceptors will be ionized so that
So that the Fermi level can be calculated by using the Boltzmann distribution
Si Measured ionization
engeries for various
impurities in silicon and
GaAs.
GaAs
Fundamentals of Semicondutors 68
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Influence of the
temperature and the
doping concentration on
the Fermi level in silicon.
Fundamentals of Semicondutors 69
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
n + NA = p + N D Charge neutrality
However, in most of the cases the concentration of one dopant species is much
higher than the concentration of the other species so that the semiconductor
properties are determined by the higher dopant concentration.
Fundamentals of Semicondutors 70
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
ni2
ND > N A
Assumption:
1
[
nn = ⋅ N D + N D2 + 4ni2
2
] pn =
1
2
[
⋅ N D + N D2 + 4ni2 ]
(n-type
semiconductor) N D >> ni ⇒ nn ≈ N D N D >> ni ⇒ pn ≈ ni2 N D
ni2
N A > ND
Assumption:
1
[
p p = ⋅ N A + N A2 + 4ni2
2
] np =
1
2
[
⋅ N A + N A2 + 4ni2 ]
(p-type N A >> ni ⇒ p p ≈ N A N A >> ni ⇒ n p ≈ ni2 N A
semiconductor)
Fundamentals of Semicondutors 72
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Fundamentals of Semicondutors 73
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
E − Ei Ei − EF
n = ni ⋅ exp F p = ni ⋅ exp
kT kT
Instead of using the energy difference between the intrinsic energy level and
the Fermi level the term can be substituted by the bulk potential.
1
ϕb = − ⋅ (Ei − EF ) Bulk potential
q
Fundamentals of Semicondutors 74
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
Therefore, the bulk potential is directly related with the carrier concentration.
Fundamentals of Semicondutors 75
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
1
ϕbn = Vth ⋅ ln ( )
2
N D + N D + 4 ⋅ ni
2
2 ⋅ ni
In most of the cases the Donor concentration is large than the intrinsic carrier
concentration so that:
ND
ϕbn ≈ Vth ⋅ ln > 0 Bulk potential for an n-type semiconductor
ni
NA
ϕbp = −Vth ⋅ ln < 0 Bulk potential for an p-type semiconductor
ni
Fundamentals of Semicondutors 76
Introduction to Electronic Devices, Fall 2006, Dr. Dietmar Knipp
References
Fundamentals of Semicondutors 77