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Samuel R. Wilton
Acoustic wave applications within microfluidics have made an enormous impact on the
state of the industry and continue to be imperative to the evolution of fully integrated lab-
on-a-chip devices. Innovations utilizing acoustic wave phenomena to manipulate
particles and fluids have allowed scientists to perform functions faster, more easily, more
efficiently, with less power consumption, and in certain applications, better than any
other methods. Various applications of acoustics to manipulate particle flow and
alignment, mix low Reynolds number microfluidic solutions, and propagate fluids in a
microfluidic channel are discussed thoroughly in this review paper.
I. INTRODUCTION
Particle separation is often necessary for analyzing chemicals and cells that cannot easily
be separated using standard mechanical processes. Using acoustic waves is an excellent
way to separate, entrap, and direct particles to move in a desired direction, and can be
done with particles of almost any shape, size, or material type. Other popular methods of
particle separation require specific material properties, such as dielectrophoresis (DEP),
which uses an applied electric field to separate particles based on their electrical
properties [6]. Standing surface acoustic wave (SSAW) particle separation works
extremely quickly and efficiently. It also does not require any specific material property
for the process to work. Non surface, bulk acoustic waves can also be used for particle
separation, but it requires larger transducers and requires that the microfluidic channel
material is capable of reflecting acoustic waves between the channel walls [2].
Particle manipulation in microfluidic channels allows for both the separation of
impurities from a fluid and the exchange of a fluid medium. By utilizing different
particles with positive and negative φ values, otherwise known as the acoustic contrast
factor, engineers can create microfluidic devices that separate particles with different
density, compressibility, and size. In the biomedical field, one can harness this
technology to separate various biological particulates such as lipids and red blood cells
[7]. Figure 1.1 shows an example acoustic contrast factor particle separation.
Petersson et al. in 2005 measured efficiencies up to 98% in tests separating red blood
cells from contaminated plasma to clean solution. They also found, similar to other
experiments, that acoustic forces were harmless to the cells. If doctors are able to harness
this microfluidic technology, blood that is currently disposed of can be recycled to
patients [7].
Standing surface acoustic waves (SSAWs) can be used to separate and align particles in a
microfluidic channel based on various geometric and material properties such as volume,
density, and compressibility. A SSAW can be created by using two inter-digital
transducers (IDT) on opposite sides of a microfluidic channel. The IDTs are placed on a
piezoelectric substrate to convert an alternating electric field to surface acoustic waves.
When the acoustic pressure frequencies from each transducer are aligned, a standing
wave can be generated and used to capture particles at a node or anti-node of the standing
pressure wave [2].
The same approach used to align particles in a single one dimensional array can be
translated to align particles in multiple one dimensional arrays by using multiple nodes to
trap a series of particles. The line separation can be modeled as a function of frequency,
whereas, higher frequency standing waves cause the distance between parallel particle
lines to decrease [8].
According Jinjie Shi et al. at the Pennsylvania State University in 2009, separation
efficiency has been noted at 90% for small particles and 80% for large particles. This is
an exceptionally good efficiency for particle separation, and it makes this type of
microfluidic particle separation extraordinarily attractive to chemists and biologists who
desire to separate one type of particle or cell from another in a quick and easy way [2].
Surface acoustic waves can also be used to directly guide particles to a certain direction
rather than simply aligning them to a node. Momentum from the acoustic waves can be
transferred to the particles in solution, allowing them to move in the direction of wave
propagation. Microfluidic channels can be designed so that, at a junction, one branch has
a higher flow resistance than the other branch. Similar to electrons in a circuit, particles
in a microfluid desire to go along the path of least resistance. All of the particles coming
toward a junction designed in this way will flow along the path of least resistance unless
an external force is applied which causes them to change paths. With an externally
generated surface acoustic wave created by an IDT, the particles can be pushed toward
the branch of naturally higher resistance and flow along that route [9].
SSAW based tweezers are low power, easy to miniaturize, fast, and effective. Parallel
inter-digital transducers are capable of creating parallel lines of particles along a channel,
whereby the parallel lines of particles settle on the acoustic wave node or anti-node lines.
Likewise, perpendicular inter-digital transducers are capable of forming a two
dimensional pattern of particles, whereby the particles align on an acoustic wave node or
anti-node point within the solution. Figure 1.6 shows an example of acoustic tweezers set
up in a parallel and perpendicular fashion. Once particles are immersed in solution and
the IDT’s are turned on, particles quickly align to the nodes, and the user can alter the
size of the particle groupings just by adjusting the power of the acoustic waves. Higher
power causes the amplitude of the pressure waves to be more extreme, thus, causing the
particles to form more closely together within the node or anti-node [12].
The high precision, low power consumption, high tunability, speed, minimalism, and
gentle mechanical nature make acoustic tweezers a useful and innovative tool for many
industries within chemistry and biology [12]. In fact, a number of biological applications
have already been tested in the laboratory to see the effects that acoustic waves have on
living cells. Studies have shown that acoustic trapping does virtually no harm to the
biological cells [13]. The low stress environment of acoustic waves can allow live cells
to live and reproduce freely while trapped in solution, and it allows the user to have
precise control over his or her microenvironment [14].
As well to these three experiments, at Penn State University in 2009, JinJie Shi et al.
performed an experiment using a trapped, two dimensional arrays of e-coli cells for 12
hours. A control sample was heated to 70 degrees Celsius to compare cells which had
obvious visible membrane damage to undamaged cells trapped in the acoustic tweezers.
Results showed no visible signs of membrane damage for the acoustically trapped e-coli
cells, further verifying that using acoustic trapping methods on biological structures
leaves them virtually unharmed [12].
Microfluidic mixing is one of the most important processes required to create true lab on
a chip devices. In a microfluidic device, turbulent fluid mixing does not naturally occur
due to highly laminar flow. Diffusion does occur between fluids, but is too kinetically
slow to be very useful for most mixing purposes [16]. A variety of IDT setups can be
used to generate surface acoustic waves to agitate fluid streams and mix them much faster
than diffusion can occur. Single or multiple transducers at the same power output yield
excellent mixing results [4] [16]. Transducers can also be used at varying power outputs,
taking advantage of wave interference, to create a mixing effect known as chaotic
advection [17].
Transducers can be used to generate acoustic waves
capable of thoroughly mixing a series of laminar fluid
streams. By placing a transducer underneath fluid
flow, the generated acoustic waves have enough
energy to disturb the laminar flow and create violent
uniform mixing across the channel. However, if fluid
flow rate is too high, the transducer may not be able
to mix the fluid well enough to create a homogeneous
Figure 2.1: [16]
solution. To alleviate this problem, grid-like Multiple variations of transducer
structures of transducers can be placed underneath the arrays are shown. These transducers
channel to more thoroughly mix multiple streams of are placed below the microfluidic
channel to create acoustic waves
laminar fluids. Figure 2.1 depicts various transducer which mix the fluid above.
patterns that can be used to mix fluid [16].
Surface acoustic waves can be produced to agitate and mix fluids by using an IDT to
excite a piezoelectric substrate. Previous discussions of IDTs in this paper were used to
create standing waves to align particles, but they can also be used to agitate fluids with
proper orientation and power output. SAWs applied to fluid droplets create an effect
called acoustic streaming. In acoustic streaming, the acoustic pressure wave can push
droplets along a surface in the direction of wave propagation [18]. Figure 2.2 depicts
acoustic streaming for a droplet. Internal streaming within a droplet can mix the fluid as
Chaotic advection [21] can be used to agitate and mix multiple fluids together to allow
mixing of fluids with incredibly low Reynolds numbers [22], less than .1, and high Peclet
numbers [23], greater than 4x105. The Peclet number is the product of the Reynolds
number and the Prandtl number [24]. It is defined as the heat transport by convection
divided by the heat transport by conduction. The Prandtl number is a number describing
the convection of a fluid, and is defined as the quotient between the kinematic viscosity
and the thermal diffusivity. Chaotic advection can be induced using a surface acoustic
wave to create streaming patterns. When two IDTs are operate at separate, variable, and
out of phase powers, they can be used to effectively mix two laminar flowing fluids.
Figure 2.3 shows an experiment using SAWs to
produce chaotic advection mixing. The process
used in these photographs was done using two
tapered IDTs to create interfering SAWs. The
power of one IDT was held constant, while the
power of the other IDT was modulated over various
frequencies to create acoustic pressure disturbance
within the fluid, causing mixing to occur. Each
picture represents a different frequency of power
Figure 2.3: [17]
Two tapered IDTs were used to create mixing oscillation for the second IDT. Power modulation
between fluids. One IDT was held at constant at a frequency of .17Hz is the only frequency that
power, while another IDT had an oscillating
power at 0Hz, .042Hz, .083Hz, .17Hz, .34Hz, could produce a uniform distribution in the
and .68Hz for pictures a, b, c, d, e, and f. experiment [17].
Microfluidic systems are often difficult to operate without proper control mechanisms,
which are often large relative to the small microfluidic system. Improving control
mechanisms to change flow rate and pressure is essential to the evolution of microfluidics
because reliance on externally applied pressures from relatively bulky equipment resists
developments of completely integrated lab-on-a-chip devices [26]. New and innovative
ways of propagating fluid through a microfluidic channel using acoustic waves will help
promote microfluidics in mainstream applications and allow engineers to develop self-
contained systems.
In recent research done at Harvard University, Langelier et al. devised a way to control
pressure of a microfluidic system using acoustic wave signals. Their device can control
pressures between 0 and 200 Pascal’s, have a control sensitivity of 10 Pascal’s, and can
potentially reduce the need for external pressure control systems. Figures 3.1 and 3.2
show a drawing of these different sized acoustic resonator cavities and a possible series
of musical notes can be played to induce resonant frequencies in the resonance cavities to
cause fluid motion in the device [26].
The operation of the device is quite unique. Musical
notes cause fluidic motion using resonance cavities to
convert the oscillating pressure into a net directional
flow. These resonance cavities react to acoustic wave
matching their individual resonant frequencies.
Shorter cavities have higher resonant frequencies,
while longer cavities have lower resonant frequencies.
Resonance within the cavities occurs due to the
Figure 3.1: [26] creation of standing waves that arise when the
Resonance cavities resonate at different
frequencies depending on their length. acoustic reflections inside the cavity create perfectly
constructive interference. This constructive
interference occurs when the length of
the cavity is ¼ the wavelength of the
acoustic signal and on every
consecutive odd integer harmonic.
Groups of these acoustic resonators
can be clustered together and used as
multiple pumps for a microfluidic
system. By generating a code of
Figure 3.2: [26] musical notes, information can be sent
Signals generated from musical notes can be played into the from a speaker to the resonators and
resonance cavities to cause fluid motion within the
microfluidic channels.
cause the fluids to move according to
the notes played by the speaker [26].
Rectifiers are structures that cause the oscillating resonance to impart a unidirectional
fluid motion instead of allowing the fluid to oscillate back and forth with the acoustic
wave. It works by using a flap valve which only opens during one direction of fluid input
and closes if the fluid tries to move in the opposite direction. The flap valve is
engineered so that oscillating pressure is strong enough to open the flap valve only if
resonance is achieved within the cavity. Using a computer to control the frequency,
duration, and amplitude of the acoustic signal allows for precise control over the velocity
and distance traveled by the fluid [26].
Modern day ink-jet printers use nozzle based printing techniques in which the ink
ejection direction is fixed perpendicular to the nozzle surface. This scheme has draw
backs due to the fact that the printing head must be moved if the user desires to use more
than one type of ink. Utilizing focused acoustic waves with a nozzleless ejector design
allows atomized ink droplets to be precisely ejected in any desired direction. Without the
acoustic waves to guide the liquid, the nozzleless system will spray ink in random
directions. In addition, using this technique allows for multiple inks to be used without
requiring the printer head to move [27].
Both acoustic lenses and constructive interference can be used to focus acoustic waves.
Constructive interference, also known as self-focusing, can be produced by using fresnel
ring electrodes on a piezoelectric surface to generate acoustic pressure orthogonal or
angled to the surface of the substrate. Piezoelectric substances, along with the sectioned
annular electrodes, allow the nozzleless printer to direct the ink droplet. Acoustic waves
generated by the piezoelectric material create a constructive pressure interference wave
orthogonal to the ink surface and allow a small particle of ink to be ejected from the
liquid due to the accumulated pressure [27].
Changing the angle of the open slice allows for ink droplets to be ejected at many
different angles. The smaller the slice angle, the closer the ejection angle comes to 90
degrees perpendicular to the ink surface. For ZnO piezoelectric material, as the slice
angle increases to 90 degrees the ink ejection angle can change all the way to 62.5
degrees from the surface. Using this process, ink drops of 10 micrometers or larger in
diameter can be ejected using a nozzleless, piezoelectric, Fresnel ring electrode
stimulated device [27].
It is also possible to create a nozzleless device with multiple ejection angles based on a
single concentric annular ring design. One can change the acoustic vibrations by
blocking one of the electrode slices. With an electrode design using 8 slices, 8 different
ejection directions can be used for the ink. By turning off a slice of an electrode, the ink
drop becomes influenced to eject in the direction of the non-powered electrode due to a
lack of acoustic pressure in that area. Figure 3.4 shows a simple diagram explaining this
process of ink ejection in the direction of the un-powered electrode ring slice [27].
As previously discussed, SAW streaming effects applied to droplets can push them along
a surface. When SAWs are directed along the flow of fluid in a microchannel, they are
capable of pushing entire streams of fluid. At higher powers, SAW induced fluid
propagation can create jetting [5] [18] or even atomization of liquid [5] [29-30].
Moreover, SAWs can push liquid through microchannels at an extraordinarily fast rate,
up to speeds ranging from1cm/s and 10cm/s [5].
Acoustic microfluidic technology has steadily improved as new and creative applications
have been developed and researched. Acoustics has proven itself to be one of the most
useful ways of separating particles, mixing fluids, and propagating microfluidic solutions,
in addition to its capabilities of miniaturizing microfluidic control systems. Biology,
biomedicine, chemistry, forensics, ink-jet printing, and nano-particle fabrication are just a
few of the many potential avenues that acoustic microfluidics can assist. Ultimately,
acoustics is just one solution of many to solve problems within the field of microfluidics,
but few other methods provide the generality, tunability, and development potential of
utilizing acoustic waves.
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