3.155J/6.

152J Lecture 21:

Fluids Lab Testing

Prof. Akintunde I. Akinwande

Massachusetts Institute of Technology
5/2/2005

Slides prepared by Professor Martin Schmidt

Information
„ Take Home Quiz
„ Due Friday, May 6, Room 39-553
„ No Electronic Submissions
„ Course evaluations at the end of the
lecture on Wednesday, May 4.

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 2

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 Outline
„ Review of the Process and Testing
„ Fluidics
„ Solution of Navier-Stokes Equation
„ Solution of Diffusion Problem
„ Lab Report Guidance
„ References
„ Senturia, Microsystems Design, Kluwer, Sect.13.3
„ 6.021 Web Site on Microfluidics Lab
„ Plummer, Chapter 7, p.382-384

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 3

Process Flow - Overview

Unexposed
Si SU-8 (100 µm) Surface treatment &
casting PDMS
photolithography
PDMS
UV light
Si
mask

removing elastomer from

Si master

PDMS
development

seal against glass after plasma

treatment and insert tubing
“master”
Si
tubing Our process
was changed
here

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 4

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 The Mixer

Width = 250µm, 500 µm

Depth = 100 µm
Inlet Length = 25 mm
Outlet Length = 35 mm

Images: Prof. D. Freeman

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 5

Packaging/Testing

Images: Prof. D. Freeman

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 6

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 Experiment
„ Gravity feed of fluids
„ Requires ‘priming’ of channel
„ Particles for velocity measurement
„ We will attempt this
„ Dye for diffusion experiments
„ Food color
„ Measurements
„ Particle velocity
„ Diffusion

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 7

Navier-Stokes
„ The Navier-Stokes equation for
incompressible flow:
DU
ρm = η∇ 2 U − ∇P *
Dt
„ U = velocity P* = P − ρm g • r
„ P* = pressure (minus gravity body force)
„ ρm = fluid density (103 kg/m3 for water)
„ η = viscosity (10-3 Pa-s for water)

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 8

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 Poiseuille Flow
„ Assume width (w) >> height (h)
„ Neglect entrance effects (L >> h)
L
w

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 9

Simplify to our problem

„ No time dependence DU
„ d/dt = 0 ρm = η∇ 2 U − ∇P *
Dt
„ Flow is constant in x-
direction (and 0 in z)
„ U = f(y)
„ Pressure is only a ∂2Ux K
function of x = −
„ A linear pressure drop
∂y 2 η
dP Stokes Flow
= −K (constant)
dx

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 10

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 Poiseuille Flow
h
high
τw low
pressure τw pressure
Ux
Umax
Senturia, Figure 13.5

„ ‘No-Slip’ Boundary conditions

„ Ux(y=0) = 0
„ Ux(y=h) = 0

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 11

Solution
∂2Ux K
= −
∂y 2 η

„ Solution is a quadratic polynomial

„ Ux = a + by + cy2
„ Using boundary conditions and
substitution
1
Ux = ⎡⎣ y ( h − y ) ⎤⎦ K
2η
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 12

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 Parabolic Flow Profile
h Ux =
1
⎡ y ( h − y ) ⎤⎦ K
τw 2η ⎣
high low
pressure τw pressure
Ux
Umax

h2
„ Maximum velocity U max = K
8η
h Wh 3
„ Flow rate Q = W ∫ U x dy = K
0 12η

Average velocity Q h2 2
„ U= = K = U max
Wh 12η 3
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 13

Pressure drop over length

∆P 12ηL ∆P 12ηL
K= ∆P = Q R pois = =
L Wh 3 Q Wh 3

∆P = ρgH

H = height of water
g = gravity
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 14

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 Flow Issues
„ Edge effects
„ Flow rate
„ Particle location in channel
„ Dimensions
„ Merging of channels
„ How to model

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 15

The Mixer – Mixing by diffusion

Width = 250µm, 500 µm

Depth = 100 µm
Inlet Length = 25 mm
Outlet Length = 35 mm

Images: Prof. D. Freeman

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 16

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 Diffusion Image Sequence

Think of this axis as length or time

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 17

Imaging System Output

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 18

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 Diffusion
„ Same problem as diffusion in an epi layer
„ As in the case of the design problem

Dopant
n - epi Concentration

n+ - silicon

Solution in Plummer, Chapter 7, p.382

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 19

Solution
„ Initial Conditions

C
„ Identical to Infinite
Source Problem:

C⎡ ⎛ x ⎞⎤
C ( x, t ) = ⎢1 − erf ⎜ ⎟⎥
2⎣ ⎝ 2 Dt ⎠ ⎦

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 20

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 An ‘Intuitive’ way to look at it…
„ Think of the uniform
concentration as a
sum of dopant
‘pulses’
„ Each ‘pulse’ has a
Gaussian diffusion
profile
„ Dose = C ∆x
C n ⎡ ( x − x i )2 ⎤
„ Apply superposition C ( x, t ) =
2 πDt
∑ ∆x i exp ⎢ −
⎢⎣ 4Dt ⎥
⎥
since diffusion is i =1
⎦
linear
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 21

Solution
„ Taking the limit of ∆x
C n ⎡ ( x − x i )2 ⎤
C ( x, t ) =
2 πDt
∑ ∆x i exp ⎢ −
⎢⎣ 4Dt ⎥
⎥
i =1
⎦
C ⎡ ( x − α )2 ⎤
C ( x, t ) =
x

2 πDt 0
∫ exp ⎢⎢− 4Dt ⎥⎥dα
⎣ ⎦
(x − α) = η
2 Dt
C x 2 Dt
C ( x, t ) = ∫ exp ⎡⎣ −η2 ⎤⎦dη
π −x
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 22

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 Solution
C
C ( x, t ) =
x 2 Dt

π ∫−x
exp ⎡⎣ −η2 ⎤⎦dη

C⎡ ⎛ x ⎞⎤
C ( x, t ) = ⎢1 − erf ⎜ ⎟⎥
2⎣ ⎝ 2 Dt ⎠ ⎦
erfc ( x ) = 1 − erf ( x )
C⎡ ⎛ x ⎞⎤
C ( x, t ) = ⎢ erfc ⎜ ⎟⎥
2⎣ ⎝ 2 Dt ⎠ ⎦
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 23

Error Function Solution

C⎡ ⎛ x ⎞⎤
C ( x, t ) = ⎢1 − erf ⎜ ⎟⎥
2⎣ ⎝ 2 Dt ⎠ ⎦
Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 24

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 Diffusion Issues
„ Fitting ideal curve to measured profiles
„ Scaling time to position
„ Choice of velocity
„ Non-ideal flow profiles

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 25

Fluids Lab Report

„ Follow the Letters format
„ Purpose: Characterization of a Liquid
Micromixer
„ Report Flow Velocity
„ Compare to calculated
„ Estimate errors
„ Extract an effective diffusion coefficient
„ Utilize ‘best estimate’ for flow velocity
„ Compare to expected (D ~ 2x10-6 cm2/s)
„ Identify relevant non-idealities

Spring 2005 – A. I. Akinwande 3.155J/6.152J – Lecture 21 – Slide 26

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