Electron Beam

3/28/2016
Machining

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
Er. Mohit Ostwal
Assistant Professor
Department of Mechanical Engineering
Jodhpur Institute of Engineering and Technology, Jodhpur

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Content
• Introduction
• Equipment/Setup

3/28/2016
• Process
• Mechanism of material removal

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• How vacuum is created?
• Process capabilities
• Advantages
• Disadvantages
• Application

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Introduction - EBM
• Electron beam machining (EBM) is a thermal material removal
process that utilizes a focused beam of high-velocity electrons

3/28/2016
to perform high-speed drilling and cutting.
• Used with high power density to machine materials.
• The mechanism of material removal is primarily by melting

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
and rapid vaporization due to intense heating by the electrons
• Also known as “Electro-optical-thermal process”.
• Very high drilling rates are achievable.
• Can machine almost any material.

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 Equipment/Setup
Cathode Cartridge
High voltage supply to
cathode

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Bias grid

Anode

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
Port for vacuum Diffusion pump
gauge
Magnetic Lens
Aperture
Illuminating
Telescope system

Electromagnetic coils
Deflector coils 4
Slotted Disc
Equipment/Setup
• Cathode Cartridge
• Tungsten/Tantalum

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• High voltage is
applied

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• 2500’C
• Thermo-ionic
emission of
electrons (Vacuum)-
thermally induced
flow of electrons
from surface.
• Negatively biased – 5
repel the electrons
Equipment/Setup
• Bias Grid
• Highly negatively

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biased
• Controls the flow of

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
electrons.
• To avoid the
divergence of the
electrons and send
them as a beam to
the next step
(anode)

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Equipment/Setup
• Anode
• Positively biased

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terminal
• Due to the potential

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
difference b/w
cathode and anode
the electrons
accelerates.
• Velocity is approx.
half the velocity of
light – passing
through anode.
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Equipment/Setup
• Magnetic Lens
• Same function as

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that of any lens.
• Concentrates the

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
beam of electrons.
• Shape the beam.
• Reduce the
divergence of the
beam.

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Equipment/Setup
• Aperture
• Capture the stray

3/28/2016
electrons present
near the frame.

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• (Diverged low
energy electrons.)
• Captured electrons
are then set for
obtaining a
concentrated beam
of electrons.

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Equipment/Setup
• Electromagnetic
Lens

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• Focuses the electron
beam onto the

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
workpiece.
• On a particular spot.

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Equipment/Setup
• Deflector coils
• Deflect the electron

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beam by small
amount.

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• Correct the beam in
case of not getting
proper hold-ship.
• Improve the shape
of the machined
holes.

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Equipment/Setup
• Illuminating system
& Telescope

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• Both are used
simultaneously to

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
align the electron
beam with the
workpiece.

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Equipment/Setup
• Slotted Disc
• To avoid obstruction

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of vapor of metal
into the optical

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
window of EBM.
• Allow Electron beam
to pass but not the
vapors/metal fumes
to pass through it.
• Synchronized with
the pulsed beam.

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How vacuum is created ?
Nozzle

Cooling
Coils

3/28/2016
Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
Backing
Pump

Boiler
Heater 14

DIFFUSION PUMP
How vacuum is created ?
 Main element for creating the vacuum is DIFFUSION PUMP.

 The oil diffusion pump is operated with an oil of low vapor pressure. Its
purpose is to achieve higher vacuum.

3/28/2016
 Diffusion pump is essentially an oil heater. As the oil is heated the oil
vapour rushes upward where gradually converging structure.

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
 The nozzles change the direction of motion of the oil vapour and the oil
vapour starts moving downward at a high velocity as jet.
 Such high velocity jets of oil vapour entrain any air molecules present
within the gun. (Due to the high momentum of oil jet air is removed)

 This oil is evacuated by a rotary pump via the backing line.

 Level of vacuum – 10-4 to 10-6 Torr 15

Mechanism of material
removal
• As high voltage is applied across the Cathode filament ,
thermo-ionic emission of electrons takes place.

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• These Thermo-ionic electrons are replied by the cathode and
attracted by anode through the bias grid, electrons are
accelerated to the half of the velocity of the light.

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• These electron/beam of electron is shaped and focused with
the help of series of magnetic and electromagnetic lenses.
• Finally the electron beam impinges the workpiece.
• Upon impingement the kinetic energy of the electron is
absorbed by the workpiece which will result into heating,
melting and vaporization – drilling.
• Spot size – 10 to 100 microns – high energy density 16
Mechanism of material removal

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W/P W/P

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
Auxiliary Auxiliary
workpiece workpiece

Localized heating by
Gradual formation of hole
focused electron beam

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Mechanism of material removal

3/28/2016
W/P W/P

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
Auxiliary Auxiliary
workpiece workpiece

Penetration till the Removal due to high

auxiliary support vapour pressure
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Process Parameters
• Accelerating Voltage (Va )– 100 KV
• Beam current (Ib)– 250 μA to 1 A

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• Pulse duration (ton) – 50 μs to 50 ms
• Energy per pulse – 100 J/Pulse

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• Spot size - 10 μm to 500 μm
• Power Density

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Process capabilities
• EBM can provide holes of diameter in the range of 100 μm to 2 mm
with a depth upto 15 mm, i.e., with a l/d ratio of around 10.
• The hole can be tapered along the depth or barrel shaped. By

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focusing the beam below the surface a reverse taper can also be
obtained.
• Generally burr formation does not occur in EBM.

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
• A wide range of materials such as steel, stainless steel, Ti and Ni
super-alloys, aluminium as well as plastics, ceramics, leathers can be
machined successfully using electron beam. Typically the heat-
affected zone is around 20 to 30 μm.
• Some of the materials like Al and Ti alloys are more readily
machined compared to steel.
• EBM does not apply any cutting force on the workpieces. Thus very
simple work holding is required. This enables machining of fragile
and brittle materials by EBM. Holes can also be drilled at a very 20
shallow angle of as less as 20 to 300.
Advantages
 EBM provides very high drilling rates when small holes with
large aspect ratio are to be drilled.

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 Moreover it can machine almost any material irrespective

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
of their mechanical properties. As it applies no mechanical
cutting force, work holding and fixturing cost is very less.

 Further for the same reason fragile and brittle materials

can also be processed. The heat affected zone in EBM is
rather less due to shorter pulses.

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Disadvantages
 The primary limitations are the high capital cost of the
equipment and necessary regular maintenance applicable for

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any equipment using vacuum system.

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
 Moreover in EBM there is significant amount of non-
productive pump down period for attaining desired
vacuum.

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Application
1. Drilling

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2. Perforating of sheet

Jodhpur
Er. Mohit Ostwal Asst. Prof. JIET-
3. Pattern generation (associated with integrated circuit fabrication)

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