RF MEMS Applications

The term “RF MEMS” encompasses several distinct types of devices, including RF switches
and relays, resonators, varactors (variable capacitors) and inductors. Applications of RF
MEMS include all types of wireless communications, radar, satellites, military radio,
instrumentation and test equipment. Compared to conventional RF components, RF MEMS
offer significant benefits, including lower power consumption, lower insertion loss, lower cost
and smaller form factor. RF MEMS have come to market more recently than other types of
MEMS, but the RF MEMS market is now growing rapidly.

Coventor has worked closely with leading semiconductor companies, specialty RF

component suppliers, and research organizations to support their development of RF MEMS.
Our commercial and university customers have used CoventorWare to design an amazing
variety of RF switches, relays, resonators and varactors.

RF Switches and Relays

CoventorWare offers a comprehensive environment for designing and analyzing RF switches

and relays, and comes with an extensive tutorial on RF switch design. ARCHITECT is the
place to start for switches and relays that are actuated with electrostatic or piezoelectric
effects. ARCHITECT is unique in offering a single environment where you can perform all
phases of design and analysis: high-level concept exploration, detailed geometry design,
coupling with control circuitry, and evaluation of S-parameters. With its comprehensive
electromechanical component library, you can quickly assemble a fully parameterized design.
Steady-state (DC) simulations to determine pull-in and lift-off voltage run almost
instantaneously. But that’s just the start. Fully coupled, transient simulations of the switch
operation take only a few seconds. You can simulate complex behavior like bouncing when
the switch closes. With the full parameterization of the design and fast simulation times, you
can quickly explore a broad parameter space to optimize the design. Then, with the built-in
transmission line solver, you can compute the S-parameters of the switch in both closed and
open positions, for export to your favorite RF simulation environment.

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 ARCHITECT schematic of an ohmic RF switch

ANALYZER also has much to offer for RF switch design. For designs that are electrostatically
actuated, the CoSolve-EM module can be used to accurately compute pull-in and lift-off
voltages. Unlike some competing FEA tools, the hybrid finite element / boundary element
approach used by CoSolve-EM fully captures electrostatic fringing fields, assuring accurate
results. And the sophisticated Abaqus finite-element solver in MemMech accurately
computes contact deformation in the switch-closed position. Other actuation methods, such
as piezoelectric and thermoelectric actuation, can be simulated in MemMech as well.
MemDamping offers a comprehensive, unique approach to analyzing damping; it fully exploits
the physical effects that are characteristic of MEMS, such as squeeze films and low Reynolds
number, to deliver accurate answers quickly. Results from MemDamping can be used in
ARCHITECT or MemMech to perform transient simulations of switch operation.

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 This 3D model of ohmic RF switch was automatically generated
from the ARCHITECT Schematic shown in the preceding figure

Varactors

MEMS varactors are variable capacitors in which the capacitance is controlled by varying the
gap between two plates, typically by means of electrostatic force. Both ARCHITECT and the
ANALYZER are suitable for simulating varactors – both tools will fully account for electrostatic
fringing fields, unlike some competing FEA tools, which neglect fringing fields. In particular,
the MemMech, MemElectro and CoSolve-EM modules in ANALYZER are applicable to
electrostatically actuated varactors.

Inductors

MEMS fabrication processes can be used to build spiral inductors that stand off from the
substrate, with the benefits of reducing parasitic capacitance and dielectric losses. The
MemHenry module in ANALYZER can be used to compute resistance and inductance (RL) of
spiral inductors, and the MemElectro module can be used to compute the parasitic
capacitance (C).

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Resonators

Resonators are the fundamental building block for more complex components like duplexers,
filters, and oscillators (frequency or timing sources). MEMS resonators for duplexers and
filters typically exploit Bulk Acoustic Wave (BAW) resonance modes in a suspended or
otherwise isolated volume of material. The MemMech solver in ANALYZER is ideal for
simulating BAW-based resonators, including those characterized as Film Bulk Acoustic
Resonators (FBARs). Oscillators tend to rely on mechanical resonance modes (bending
modes in beam- or plate-like parts, possibly in combination with mass effects). ARCHITECT
is the ideal tool for mechanical resonators, because it enables simulation not only of the
resonant mode shapes and frequencies, but the full frequency response of the resonator,
including Rayleigh and gas damping effects. Behavior such as temperature
sensitivity/stability and nonlinearity can easily be included in ARCHITECT simulations. The
MemMech solver in ANALYZER can be used to verify mode shapes and frequency predicted
by ARCHITECT.

“Saddle” mode of a square resonator,

simulated with the MemMech solver in ANALYZER

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Designer and MEMulator

As always, the automated 2D-to-3D solid model builder and mesh generation in Designer
have been optimized for the multi-layered construction that is typical of RF MEMS inertial
sensors, whether fabricated with dedicated processes, or as pre- or post-processing steps on
a standard CMOS process. Designer can export solid models in ACIS .SAT format. This
export capability is useful for exporting the geometry of a MEMS switch in open and closed
positions to 3rd-party electromagnetics field solvers, such as HFSS from Ansoft.

When it’s time to send your design to the fab, you’ll find that MEMulator quickly proves its
worth, both for communicating and resolving fabrication issues. Because it builds highly
realistic, 3D models of the fabricated device, starting from GDSII layout, it’s often possible to
identify potential fabrication issues before tape out. MEMulator also provides a quick way to
understand the impact of manufacturing variations.