KOMISJA BUDOWY MASZYN PAN – ODDZIAŁ W POZNANIU

Vol. 26 nr 2 Archiwum Technologii Maszyn i Automatyzacji 2006

ANDRZEJ MILECKI *

MODELLING AND INVESTIGATIONS OF ELECTROHYDRAULIC

SERVO VALVE WITH PIEZO ELEMENT

The paper presents the new concept of electrohydraulic servo valve with piezo bender actuator.
The main properties of piezo elements are described. The theoretical and simulation model of
valve with this element is proposed and discussed in the paper. The chosen simulation results are
presented and discussed. These results are compared with laboratory investigations. The advan-
tages and disadvantages of described servo valve are shortly demonstrated.

Key words: electrohydraulics, piezo elements, servo drives

1. INTRODUCTION

In precise electrohydraulic servo drives servo valves are commonly used [4,
5]. Their usage allows obtaining very good parameters, both dynamic and static.
One of the most precise elements in servo valve is the torque motor. The neces-
sity of assuring high precision and usage of modern materials is the cause of its
high cost. Only a few companies mastered the technology of its production. At
present different research centres have taken on investigations in order to substi-
tute the torque motor by other electromechanical transducer. A number of them
have already studied the way in which the piezo actuators can be used in the
servo valves [1, 2, 3]. They are characterized by low power consumption, low
manufacturing costs and good dynamic properties.
At Poznan Univeristy of Technology a new solutions that use piezo actuators
instead of torque motors in an order to minimize the drive power and improve
the dynamic properties is worked out. The main objective of this work is to con-
struct a valve which meets particularly high dynamic requirements. In the de-
signed valve the dynamic response of the piezo effect, (which is significantly
greater than that of the valve actuators based on the electromagnetic effects, that
are commonly used today), will be utilized. This article provides an overview of
model creation of the servovalve with piezo actuator. The prepared model is
described and some simulation results are shown.

*
Prof. dr hab. inż. – Institute of Mechanical Technology, Poznan University of Technology.
182 A. Milecki

2. PIEZOELECTRIC ELEMENTS

Piezoelements make use of the deformation of electro-active piezo-ceramics

when they are exposed to electrical fields. This deformation can be used to pro-
duce motions and/or forces. The piezoelements can generate forces, depending
on the construction, from mN to many kN obtaining movements from μm to
mm. They require application of high voltage, which can reach 1000 V. Basic,
applied today forms of piezoelectric actuators are: stacks, plates or benders
called also bimorphical constructions, tubes and rings [6, 7, 8, 10].
There are two displacement
Δl modes in piezoelectric actuators:
+U longitudal – in which the lengthen
-U direction is the same as electric filed
F direction, and shear – lengthen di-
rection is perpendicular to polariza-
Fig. 1. Piezoelectric bender tion direction. The second effect is
Rys. 1. Przetwornik płytkowy (zginający) used in bender piezo actuators.
Bender transducer is build similarly
to bimetal. It consists of two plates,
one lengthens and the second one shortens after putting electrical voltage (Fig.
1) to them resulting in a bending moment. The main advantage of these piezo-
elements is relatively big displacement (> 1 mm) and low supply voltage (< 50
V), but such transducer produces forces only till 5 N [8]. After supplying the
piezoelement by the voltage U = l ⋅ E the external force F can be described as
follows [6]
F = −cm Δl + cm d ⋅ U (1)
where: l, a, h – piezo crystal length, width and thickens,
Bm – bulk modulus in lengthen direction,
d31 – piezo coefficient in shear direction.
The equation of motion of piezo actuator can be written as follows
m ef &x&m ( t ) + k tl x& m ( t ) + c m x m ( t ) = Fz (t ) + c m d ⋅ U ( t ) (2)
where: mef – effective mass,
cm – piezoelement mechanical stiffness,
Fz – external load force,
ktl – movement resistance coefficient,
xm – linear movement of piezoelement ending.
Simplifying one can assume that the electrical circuit of the transducer con-
sists of serially connected resistor and capacitor. Its equation is as follows
 Modelling and investigation of electrohydraulic servo valve with piezo element 183

R ⋅ CU& (t ) + U (t ) = U z (t ) (3)
where: Uz – supply voltage,
U – voltage on a piezo transducer plates.
Taking into account dynamic properties of mechanical part of piezoelectric
actuator, characterized by equation (2) and its electrical part, characterized by
equation (3) the whole piezoelectric actuator can be described by the following
transfer function:

xm ( s ) k pz ⋅ ω02
G(s) = =
( )
(4)
U z ( s ) (RCs + 1) s 2 + 2ζω0 s + ω02
cm
where: ω0 = – undamped natural frequency,
mef
k tl
ζ= – damping ratio,
2 mef c m
kpz = cm·d = 2.7·10–6 m/V – proportional gain coefficient.
The capacity C of the transducer PL111 is equal to 2 × 1.1 μF [8]. The resis-
tance depends on applied control circle and not exceeds 300 Ω. Piezo element
resonant frequency reaches 1000 Hz, however for the sake of its work in oil and
the necessity of moving oil particles therefore author reduced it in the model to
about 700 Hz. Working in oil considerably increases the value of damping coef-
ficient. For initial simulation, it was assumed that the value of damping coeffi-
cient vary from 0.8 to 1.2.

3. SERVOVALVE WITH PIEZO TRANSDUCER AND ITS MODEL

In presented here solution the torque motor is replaced by piezo bender actua-
tor (Fig. 2). Its plate acts as a flapper placed between two nozzles. To obtain the
feedback the application of spool displacement measure transducer is necessary.
Its output signal (spool position) is compared with assumed one and the control
amplifier produces the voltage to the piezo element.
In the mentioned above solution the piezo bender transducer type PL 112.11
is applied [8]. It is characterized by displacement equal to ±0.08 (± 20%) mm
after putting the maximum voltage equal to ±30 V. It produces the maximum
output force equal to 2 N. In produced nowadays servovalves, torque motors
with maximum torque from 20 to 50 mN·m are applied. Those data show that
the torque motor can be replaces by piezo bender actuator. If there is no Cou-
lombic friction and hydrodynamic forces the spool movement equation can be
written as follows
184 A. Milecki

d 2 xs dx
Δpm As = ms 2
+ Ds s (5)
dt dt
where: ms – the spool mass and moved working fluid (about 0.02 kg),
Ds – movement resistance coefficient (estimating: from 50 to 100 N⋅m⋅s).

Uin
1
Control
Amplifier

2
3 xm 5
4
p p Position
0 θm 0
p p0 p2 measurement
1 T T
5

A B

Fig. 2. Servo valve with piezo actuator: 1 – piezoelement, 2 – nozzles, 3 – spool, 4 – displacement
transducer, 5 – throttle
Rys. 2. Serwozawór z przetwornikiem piezo: 1 – piezoelement, 2 – dysze, 3 – suwak, 4 – prze-
twornik położenia, 5 – dławik

The corresponding to the equation (5) transfer function is as follows

k mp ⋅ As Ds km
xs ( s ) = xm ( s ) = xm ( s ) (6)
⎛m ⎞ s ⋅ (Ts ⋅ s + 1)
s ⋅ ⎜⎜ s s + 1⎟⎟
⎝ Ds ⎠
where: km = (0.44 ÷ 0.88)·104 1/s – gain coefficient,
Ts – time constant.
The time constant Ts can vary in dependence of movement resistance from
0.2 to 0.4 ms. In real valve some basic non-linearities exists [4, 5]. In more accu-
rate model the hydrodynamic and friction forces should be taken into account.
The spool friction can increase significantly when in the oil contamination ap-
pears. The value of friction changes during work and therefore its value can be
only estimated. In the servovalve many parameters are saturated and in the
model the most important of them should be included. It may be for example
 Modelling and investigation of electrohydraulic servo valve with piezo element 185

maximum spool movement velocity limitation. It is a result of throttle flow satu-

ration. These flow supplies the nozzle-flapper amplifier. Therefore the maximum
spool velocity must be saturated to 1 m/s in the model [4]. Also the maximum
movement of the flapper is limited to ±0.08 mm and the spool to (±0.5 mm). The
hydrodynamic force can be simplified into following form
Fh = k hsl ⋅ x s + k hdl ⋅ v s (7)

where: khsl, khdl – substitute gain coefficients.

In a static state the value of the first component depends mainly on spool po-
sition. In the dynamic states the second component begins to play more impor-
tant role. It decreases the dynamic parameters of the valve.
On the basics of presented above equations the model of servovalve with
piezo actuator was created in Matlab-Simulink software. It is shown on Fig. 3.
Mentioned previously spool velocity saturation was taken into account and mod-
elled. In the model the special hysteresis model and submodel of electrohydrau-
lic single rood cylinder were added [4]. Saturation of piezo bender maximum
position and spool velocity were also included into simulation model.
It was assumed, that on servovalve control card input, the control signal
which ranges ±10 V will be given. This voltage will cause the displacement of
the spool within a range of ±0.5 mm. It follows, that the measurement unit gain
coefficient is equal to kfm = 10 V/0.00005 m = 20 000 V/m.
Assuming that the servovalve should transmit the signals with frequency 300
Hz, the throttles flow on nozzles inputs must guarantee achieving by the spool
the necessary velocity. If the displacement of the spool is equal to xsmax = ±0.5
mm then the spool’s maximum velocity should be equal to 0.9 m/s and the
maximum acceleration will be equal to 1780 m/s2. For the spool diameter
ds = 0.008 m its cross section area is As ≈ 5·10–5 m2. It follows that achieving
mentioned above spool velocity requires maximum flow equal to 2.7 dm3/min
(average 1.9 dm3/min). Supposing that spool mass equals ms = 0.02 kg the re-
quired pressure difference on nozzles inputs can be calculated from the equation
Δp max = m s ⋅ &x&s max As ≈ 0.71 MPa (8)

If the pressure difference Δpm=p1 – p2 on nozzle’s inlets depends only on

flapper position the following equation governs the flapper-nozzle amplifier
Δpmax
Δpm = xm = k mp xm (9)
xm max
where: xmmax – maximum flapper movement from central position,
kmp ≈ 8.9·109 N/m3 – coefficient.
The calculated above values of parameters are taken into simulation model.
 t x
U
To Workspace
To Workspace2 Clock To Workspace1
Repeating
Scope1
Sequence 3 1 1 1000 1
1 1 1 In1 Out1
0.00067s+1 s s 0.0005s+1 s
Regul. Obwod RC piezo k*w*w Integrator2 Integrator1 Gain Saturation xm Spool Integrator3 Scope
Sine Wave Saturation v
2*dz*w khdl Subsystem

8000 du/dt -K-

0.0001
Step w*w
Derivative Sign Gain1 khsl

19324000
0.005
khsl1

40

Fig. 3. Prepared in Matlab-Simulink simulation model of the whole servo drive with piezo actuator
Rys. 3. Zbudowany w programie Matlab-Simulink model serwonapędu z przetwornikiem piezoelektrycznym

a) 30 b) 30
Q [dm3/min] Q [dm3/min]
20 20

10 10

0 0

-10 -10

-20 -20
U [V] U [V]
-30 -30
-10 -8 -6 -4 -2 0 2 4 6 8 10 -10 -8 -6 -4 -2 0 2 4 6 8 10

Fig. 4. Hysteresis of servo valve with piezo actuator obtained in investigation (a) and in simulation (b)
Rys. 4. Wartości histerezy serwozaworu otrzymane z badań: a) doświadczalnych, b) symulacyjnych
 Modelling and investigation of electrohydraulic servo valve with piezo element 183

On Fig. 4 hysteresis obtained by investigation of real servo valve and ob-

tained during simulation with the usage of a model presented on Fig. 4 are
shown. One can notice that the hysteresis may be one of most important disad-
vantages of proposed solution.

a) 20 y [m m] b) 16
y [mm]

16
12

12

8
8

4 4

t [s]
0
t [s
0 0,1 0,2 0,3 0,4 0,5 0,6 0
0.1 0.2 0.3 0.4 0.5 0.6

Fig. 5. Step responses of servo valve with piezoelectric bender actuator obtained: a) in investiga--
tions, b) in simulations
Rys. 5. Odpowiedzi skokowe serwozaworu z pioezoelektrycznym przetwornikiem płytkowym
otrzymane: a) w badaniach doświadczalnych, b) z symulacji

On Fig. 5 obtained during investigations and simulation step responses of in-

vestigated servovalve with piezo bender actuator are presented. The investiga-
tions have shown that designed servovalve can easily become unstable. The
conducted simulation investigations have shown particularly high significance of
coefficient km. It concerns especially the choice of working pressure of the spool
that is the choice of range of acceptable pressure changes on nozzle inlets. This
is connected with the choice of nozzles and throttles diameters. The spool time
constant, which depends on spool mass and its movement resistance, is also very
significant.

4. SUMMARY

The made out first design and investigations of created servo valve with
piezo bender actuator confirmed usability of such actuator in servo valve instead
of commonly used torque motors. The laboratory research enables the creation
of simulation model of investigated servo valve. Nowadays wide accessibility to
computer programs such as Matlab-Simulink software allows modeling of elec-
trohydraulic elements, which can take into account basic nonlinearities.
In the paper basic equations, which allow creation of static or dynamic ser-
vovalve model with piezo bender element, are presented. The idea of substitut-
184 A. Milecki

ing of torque motor for piezo bender actuator is shown and discused. The pro-
posed simulation model enables to make different investigations which are very
important in the design phase. In the future to created simulation model other
nonlinearities will be added, what will improve the model accuracy.
The main advantages of application of piezo element in servo valve are: low
cost and high frequency band. Using it one can increase the servo valve maxi-
mum frequency and improve other dynamic parameters.

Acknowledgements: The work was made by support of Polish Ministry of

Science and Education as a research project: 4T07C06628.

REFERENCES

[1] Hagemeister W., Piezoelektrisch vorgesteuertes 3/3-Wegeservoventil, O+P, 1999, Nr 1.

[2] Linden D., Hydraulisches Piezoservoventil NG10, O+P, 1999, Nr 7.
[3] Kasper R., Schroeder J., Wagner A., Schnellschaltendes Hydraulikventil mit piezoelektri-
schem Stellantrieb, O+P, 1997, Nr 9.
[4] Milecki A., Liniowe serwonapędy elektrohydrauliczne. Modelowanie i sterowanie, Poznań,
Wyd. Politechniki Poznańskiej 1999.
[5] Murrenhoff H., Servohydraulik, Aachen, Verlag Meinz 1998.
[6] Piefort V., Finite Element Modelling of Piezoelectric Active Structures, Ph.D. thesis, Active
Structures Laboratory, Department of Mechanical Engineering and Robotics, Bruksela 2001.
[7] Park C.H., Dynamics modeling of beams with shunted piezoelectric elements, Journal of
Sound and Vibration, 2003, 268.
[8] http://www.piceramic.de/products.html.
[9] http://www.moog.com/Media/1/DesignofEHValveTechpaper.pdf, J.C. Jones, Developments
in design of electrohydraulic control valves from their initial design concept to present day
design and applications.
[10] www.marco.de.

Praca wpłynęła do Redakcji 12.04.2006 Recenzent: prof. dr hab. inż. Edward Palczak

MODELOWANIE I BADANIA SERWONAPĘDU ELEKTROHYDRAULICZNEGO

Z ELEMENTEM PIEZOELEKTRYCZNYM

S t r e s c z e n i e

W artykule zaprezentowano nową koncepcję serwozaworu elektrohydraulicznego z płytko-

wym przetwornikiem piezoelektrycznym. Zaproponowano model teoretyczny oraz symulacyjny
tego zaworu. Pokazano i omówiono wybrane rezultaty badań symulacyjnych proponowanego
serwozaworu. Porównano je z wynikami badań doświadczalnych zbudowanego serwozaworu.
Krótko scharakteryzowano podstawowe wady i zalety zaproponowanego rozwiązania.

Słowa kluczowe: elektrohydraulika, piezoelementy, serwonapędy