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JOURNAL OF APPLIED PHYSICS 102, 054514 共2007兲

Inversion layer formation in organic field-effect devices


Th. Lindner and G. Paascha兲
Leibniz Institute for Solid State and Materials Research IFW Dresden, PF 270116, D-01171 Dresden,
Germany
共Received 20 April 2007; accepted 17 July 2007; published online 14 September 2007兲
One of the challenges for polymer electronics is the realization of complementary
metal-oxide-semiconductor circuits, requiring both n- and p-channel transistors on the chip. The
difficulty to create both accumulation and inversion layers in the same material has been attributed
to obstacles to the synthesis of metallic source/drain contacts for efficient injection of both electrons
and holes, and also to the fact that the electron and hole mobilities differ often by several orders
of magnitude. Although the formation of inversion layers has been well understood in
microelectronics, it has to be studied anew for organics, since the mobility and the intrinsic density
are many orders of magnitude lower. An analytical estimate of the relation between relevant
characteristic times reveals the peculiarities occurring in the organics. Detailed insight is obtained
from a numerical simulation study for metal-oxide-semiconductor capacitors and transistors of
different design. In simulated quasistatic capacitance-voltage characteristics hysteresis effects
are obtained due to the inversion layer formation process. This mechanism can be understood
by inspecting the internal density profiles obtained by the simulation. In addition, capaci-
tance-frequency characteristics are simulated and analyzed in more detail with equivalent circuit
models that describe the simulated characteristics well. Here, the relaxation times characterizing the
transition between the maximum capacitance and the geometrical capacitance are determined by
resistances and capacitances of sublayers, which can be ascribed different regions as oxide, bulk,
depletion, accumulation, or inversion. Both the design and the source/drain contact properties
influence the characteristics significantly. © 2007 American Institute of Physics.
关DOI: 10.1063/1.2776235兴

I. INTRODUCTION contacts for the injection of both holes and electrons into the
same material are possible, e.g., by bilayer source/drain con-
There has been an increasing interest in organic electron- tacts. Also, a high work function, nonoxidizing metal 共gold兲
ics in recent years. Organic field-effect transistors 共FETs兲 are as source/drain contact material can give good performance
particularly attractive for low-cost and low-performance ap- for both p- and n-channel transistors.5 The low electron mo-
plications, such as organic displays,1 organic complementary bility values can be caused by charge trapping in the semi-
circuits,2–5 and all-polymer integrated circuits.6–8 One of the conductor or at the semiconductor-insulator interface. In the
challenges for polymer electronics is the realization of second case, extrinsic impurities are important. Indeed, cur-
complementary metal-oxide-semiconductor 共CMOS兲 circuits rent limiting trap states can be avoided by improved techno-
requiring both n- and p-channel transistors on the chip. Ad- logical processing. Thus, the data presented in Ref. 10 pro-
vantages of digital circuits using complementary logic in- vide evidence that silanol groups present at the commonly
clude lower power dissipation, more robust operation, better used SiO2 dielectric interface can quench n-channel activity
noise margins, and ease of circuit design. This counts, of of organic semiconductors.
course, also for organic-based electronics. Both p- and n-channel operation in a single organic
Organic semiconductors are usually unintentionally field-effect transistor is realized in so-called ambipolar or-
p-doped, i.e., application of a negative gate voltage in or- ganic TFTs. The first report on ambipolar operation was for a
ganic thin-film transistors 共TFTs兲 results in the formation of device employing a heterostructure with two separate or-
a hole accumulation layer at the semiconductor-insulator in- ganic semiconductors as active layers; one electron- and one
terface forming the current channel. For the reversed polar- hole-conducting material.11 In this structure, identical Au
ity, an inversion layer of electrons should appear, but this is electrodes as source and drain contacts are used, leading to a
usually not observed. This has been attributed, on the one limitation of electron injection. In another ambipolar hetero-
hand, to the difficulty in engineering the metallic source/ structure organic FET with two active organic semiconductor
drain contacts for efficient injection of both electrons and layers, source and drain electrodes of Au and Mg,
holes,9 and on the other hand, to the fact that in the past respectively,12,13 are used to optimize hole and n-electron
reported electron mobilities are usually several orders of injection. In order to achieve n- and p-channel conduction, as
magnitude lower than those of the holes. But, good ohmic well as efficient injection of both types of carriers in the
same material, a single layer device based on an interpen-
a兲
Corresponding author. Electronic mail: g.paasch@ifw-dresden.de. URL: etrating network of two materials as active layer was
http://www.ifw-dresden.de/institutes/itf/members/paasch realized.14 Even single layer devices with an active layer

0021-8979/2007/102共5兲/054514/12/$23.00 102, 054514-1 © 2007 American Institute of Physics

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054514-2 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

consisting of a single organic material were realized, which


are capable of operating in both p- and n-channel
regimes.4,10,14
In view of the experimental progress in realizing
single layer organic TFTs with both p-accumulation and
n-inversion channels, it is worth to consider the conditions
for the inversion layer formation theoretically by numerical
simulation. Here, the interplay of different influencing fac-
tors will be demonstrated, such as the width of the gap 关more
common are at present organic wide gap materials, but
smaller gaps as 1.5 eV 共Ref. 15兲 or even below 1 eV 共Refs.
16 and 17兲 are known兴, different geometries of TFTs and
metal-oxide-semiconductor 共MOS兲 capacitors, material prop-
erties of contacts and the organic layer, and measuring con-
ditions.

II. DEVICE SIMULATION AND MATERIAL


PARAMETERS

Simulations using the drift-diffusion model 共DDM兲 were


carried out for both MOS capacitors and TFTs with an or-
ganic semiconductor as an active layer. In the present inves-
tigation, the two-dimensional 共2D兲 device simulation pro-
gram ISE-TCAD18 is used. The applicability of the DDM to
organic materials has been discussed in Refs. 19–21. Suc-
cessful simulations of organic light-emitting diodes19,22–24
and field-effect devices25–29 have been performed. The pro-
gram solves simultaneously the Poisson equation for the
electrical potential ␾ and the continuity equations for the
hole 共p兲 and electron 共n兲 densities. Here we mention FIG. 1. 共a兲 Simulated MOS structure, 共b兲 top contact 共TOC兲 field-effect
shortly19,20 that the Poisson equation and the continuity equa- thin-film transistor, and 共c兲 bottom contact 共BOC兲 field-effect thin-film
tions are of course of general validity. The current density as transistor.
composed of drift and diffusion contributions as used in the
DDM is also valid for transport in the organics. In the and drain as top contacts 共TOC兲 关Fig. 1共b兲兴 or bottom con-
nondegenerate limit the hole 共p兲 and electron 共n兲 den- tacts 共BOC兲 关Fig. 1共c兲兴 are considered. The channel length is
sities are connected with the hole and electron quasi- L = 1 ␮m, the source and drain contact lengths are 1 ␮m. In
Fermi potentials ␾Fp and ␾Fn by p = ni exp关e共␾Fp − ␾兲 / kBT兴 the simulations the device width is always w = 1 ␮m and the
and n = ni exp关e共␾ − ␾Fn兲 / kBT兴. The intrinsic density ni insulator thickness dox = 50 nm. The gate contact area is in
= 冑NVNC exp关−Eg / 2kBT兴 is connected with the gap energy all cases 3 ␮m ⫻ 1 ␮m. The gate contact material is char-
Eg and the effective densities of states NV and NC. For a acterized solely by its work function. Here we have chosen
molecular material one has to use the molecular or monomer ⌽G = 4.05 eV for both devices, which corresponds to the us-
density instead of the “effective density of states.”19 For a age of n+-poly-Si as contact material. The metal work func-
polymer with a Gaussian 共or exponential兲 density of trans- tions of the bulk contact ⌽B and of the source/drain contacts
port states it has been shown in Ref. 21 that the nondegen- ⌽S/D, respectively, are varied in order to describe either a
erate approximation results in a surprising good approxima- neutral ohmic contact for holes or an accumulation contact
tion for the accumulation charge per unit area, which is just for either holes or electrons.
the quantity that determines the current in the transistor The following material parameters are used: The dielec-
channel. There remains only a small error in the flatband tric constant of the insulator is ␧ox = 3.9 共SiO2兲. For the band
voltage, which can be corrected afterwards if needed. Details gap Eg of the organic semiconductor three different values
of the simulation method are summarized in Refs. 27–29. are used: 2.0, 1.2, and 0.8 eV. The larger value is typical for
The simulated device structures are shown in Fig. 1. The the material used at present but low-band-gap organics have
MOS capacitor has a thickness of the organic layer of dorg cap
been reported also.15–17 Further parameters of the organic
= 150 nm 关Fig. 1共a兲兴, which is larger than the depletion material are chosen as follows; dielectric constant ␧ = 3.24;
length for the chosen doping. In the case of the frequency electron affinity ␹ = 3.0 eV; minority carrier life time ␶n
response also a layer thickness dorg cap
= 50 nm less than the = 10−5 s for electrons and ␶ p = 3 ⫻ 10−6 s for holes 共Si values
depletion length is chosen. For the thin-film transistor 关Figs. have been used due to the lack of reliable data for organics;
1共b兲 and 1共c兲兴 an organic layer thickness of dorgtft
= 50 nm is one estimate of ␶n = 10−4 s has been given only for electrons
chosen, since a thickness less than the depletion layer length in poly-phenylenevinylene in Ref. 30; the relevant relaxation
is essential for the TFT operation.20 TFTs with either source time for inversion layer formation 关Eq. 共3兲兴 is much stronger

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054514-3 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

influenced by the uncertainty concerning the intrinsic den-


sity兲; mobilities ␮n = ␮ p = 10−3 cm2 / V s; and effective den-
sity of states NC = NV = 1021 cm−3 共monomer density兲. As a
basic doping concentration a value of NA = 1017 cm−3 is cho-
sen modeling the usually occurring unintentional p doping.
Quasistatic capacitance-voltage 共C − V兲 characteristics
were simulated as follows. At first, a gate-bulk voltage 共gate-
source voltage兲 of VGB共VGS兲 = + 20 V is applied and held
fixed over a waiting time of 100 s and then the voltage is
changed linearly in time with a ramp rate of R = 0.1 V / s up
to VGB共VGS兲 = −20 V. After a further waiting time of 100 s
the back sweep starts with the same ramp rate. The voltage
applied to the gate electrode of the device changes with time
FIG. 2. Relaxation times as function of the gap energy: Measurement
共R = dVGB / dt兲. By simulation the resulting charging current 共dashed兲 Eq. 共1a兲 and 共1b兲, dielectric of minority carriers 共dash-dotted兲 Eq.
flowing to the gate electrode IG is obtained, which is con- 共2兲, dielectric of majority carriers 共dotted兲 Eq. 共2兲, generation of inversion
nected to the charge at the gate electrode QG by IG charge of minority carriers 共solid兲 Eq. 共3兲. A doping concentration of Ndop
= dQG / dt. Finally, the capacitance can be calculated after- = NA = 1017 cm−3 is supposed.
wards using one of the two relations: C共VGB兲 = 兩IG共VGB兲兩 / R
or C共VGB兲 = dQG共VGB兲 / dVGB. tion of minority carriers. The quasistatic measurements are
For the frequency response the dependency of the ca- carried out with a ramp rate R, which is determined by the
pacitance on the frequency of an applied high-frequency 共hf兲 measuring equipment 共developed especially for Si devices兲.
signal 关capacitance-frequency 共C − f兲 characteristics兴 for a Thus a range of R = 0.1, . . . , 1 V / s is typical.25 For a ramp
given gate-bulk voltage is simulated as follows: At first, the rate of R = 0.1 V / s the characteristic time constant is
gate-bulk voltage of VGB = + 10 V and VGB = −10 V, respec- 1 V
tively, is applied successively in steps of 1 V and then held ␶meas = = 10 s. 共1a兲
R
fixed while the simulation of the C − f curve is performed.
In contrast, dynamic measurements are usually carried out at
a fixed frequency f and thus
III. VOLTAGE SWEEP, TRANSPORT, AND CARRIER
GENERATION ␶meas = f −1 . 共1b兲

For silicon electronics, the different processes determin- In the case of impedance measurement a large frequency
ing inversion layer formation have been analyzed in Refs. range is accessible 共f = 10−3 , . . . , 107 Hz, ␶meas
3 −7
31–33. For temperatures below ⬇410 K generation recom- = 10 , . . . , 10 s兲.
bination is dominant; for higher temperatures diffusion be- Transport is characterized by the dielectric relaxation
comes dominant 共in these devices a bulk region is present兲. time for the carrier species “j,”
Thereby, generation recombination through traps in the junc- ␧ 0␧
tion region is much more effective than through surface ␶d,j = , 共2兲
␬j
states, since only trap levels near midgap and close to the
Fermi level contribute significantly. The minority carrier re- where ␬ j = en j␮ j is the electrical conductivity of the respec-
sponse time is then determined by generation 关see Eq. 共3兲 tive species with concentration n j and mobility ␮ j. The car-
below兴. For minority carriers in silicon at room temperature riers can follow the external signal for ␶d,j  ␶meas 关or equiva-
the response time is typically 0.01− 1 s, i.e., they respond to lently n j␮ j  ␧0␧ / 共e␶meas兲兴. For an unintentionally p-doped
a maximum frequency of 100 Hz. The fact that silicon tran- polymer 共n j = p = 1017 cm−3兲 with a relatively high mobility
sistors operate also at GHz frequencies is due to a third as required in a transistor, say ␮ j = ␮ p = 10−3 cm2 V−1 s−1,
mechanism: In the conventional transistor structure minority one has 共␧ = 3 as typical value兲 for majority carriers ␶d,p
carriers can be injected easily from the source and drain re- ⬇ 10−8 s and this condition is fulfilled not only for the qua-
gions, which are doped oppositely to the substrate and which sistatic regime according to Eq. 共1a兲 and 共1b兲, but also for
are in close contact to the channel region. the frequency response up to f ⬇ 107 Hz 共compare Fig. 2兲.
In organic electronics based on large band-gap organic Under this condition the p-accumulation layer can be formed
materials, the generation process is very inefficient. More- 共if the contacts are ohmic for holes兲 for large negative gate-
over, another device structure is used, usually the thin-film bulk and gate-source voltages, respectively. Since the semi-
design with bottom or top source/drain contacts. In addition, conductor capacitance increases strongly in accumulation,
the usual MOSFET has a back contact which is missing in one measures then the oxide capacitance 共see Figs. 3 and 6兲
the TFT, but is present in capacitors used for C − V and C because both are in series.
− f measurements. Thus, for organic electronics there is a It must be mentioned here that the response time of the
need to consider anew the processes determining inversion. carriers depends on the actual concentration n j, which varies
For a qualitative understanding of C − V and C − f char- within the MOS device by orders of magnitude. Therefore,
acteristics, it is useful to discuss the relevant time constants the carrier response time is locally different within the device
characterizing the measuring process, transport, and genera- depending on the variation of the carrier concentration n j.

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054514-4 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

tion process for a gap ⱖ0.75 eV. However, for a gap


Eg  1.25 eV, the measurement is faster and there is no in-
version layer formation. On the other hand, for very low gap
共Eg ⬍ 0.75 eV兲 one has ␶d,n  ␶inv  ␶meas; the inversion
layer is formed by the minority carrier current even without
generation. For somewhat larger gap, generation dominates
and at about Eg = 1.25 eV measuring is as fast as generation.
Then, the formation of the inversion layer is slowed down.
And since recombination for the back voltage sweep is fast,
one has in this region a hysteresis, for an even larger gap
inversion layer generation is too slow and only depletion is
obtained. Corresponding simulated dependencies will be dis-
cussed in the next section.

IV. FORMATION OF THE INVERSION LAYER


FIG. 3. Simulated quasistatic C − V characteristics of the MOS structure IN ORGANICS WITH DIFFERENT GAP WIDTH
关Fig. 1共a兲兴 共ramp rate 0.1 V / s兲 for different values of the band gap. The
A. MOS capacitor
work function of the bulk contact material is always aligned with the maxi-
mum of the valence band, so its absolute value changes with the band gap The conditions for the formation of an inversion layer
共ohmic contact, accumulation contact兲. Work function of the gate contact
material 4.05 eV, doping NA = 1017 cm−3, contact area 3 ␮m ⫻ 1 ␮m. have been discussed in Sec. III. Determinative are the relax-
ation times for generation of minority charge carriers ␶inv 共3兲
共Refs. 25 and 31兲 and the dielectric relaxation time for mi-
Regions with a low carrier concentration are most limiting. nority carriers 共electrons for p material兲 ␶d,n = ␧␧0NA / 共e␮n2i 兲,
Such inhomogeneities and the influence of the oxide capaci- both compared to the characteristic time of the measurement
tance can be described by equivalent circuit models as dem- 共1a兲 and 共1b兲. Depending on the width of the gap of the used
onstrated below. semiconductor material, different C − V characteristics are
The run of the C − V curve between accumulation and expected as discussed in connection with Fig. 2. Now in Fig.
depletion is determined by the depletion length in the semi- 3 an example will be presented for different gap widths Eg
conductor. If it is small, i.e., if there are many charge carriers = 2.0, 1.2, 0.8 eV 共and the same affinity兲. We have chosen
共high doping兲, the capacitance decreases gradually. On the bulk p doping with completely ionized acceptors of the con-
other hand, if there are only few carriers, the depletion zone centration 1017 cm−3; the bulk Fermi energy lies 0.238 eV
increases very fast with increasing voltage and the capaci- above the valence band edge. To ensure similar conditions at
tance drops down in a narrow voltage range near the flatband the bulk contact, the work function of the metallic contact
voltage. was chosen such that it is aligned with the valence band
There are several mechanisms which are able to supply edge. Thus, its value changes with the band gap but there is
minority carriers to change the charge in the inversion always a hole accumulation 共ohmic兲 contact. The work func-
layer.31 Generation of minority carriers by light is not con- tion of the gate contact material is ⌽G = 4.05 eV. Then, for
sidered here. Then one has in the MOS capacitor two mecha- the chosen three values of the gap the flatband voltages are
nisms. Generation of minority carriers is determined by the −0.712, +0.088, +0.488 V. This shift is clearly visible in
relaxation time25,31 Fig. 3 at the transition into the oxide capacitance 共where the
curvature changes兲. For a large band gap of 2 eV, as dis-
␶inv =
1 Ndop
冑␶ n ␶ p . 共3兲
冑2 ni cussed in Sec. III, transport of minority carriers is negligible,
and compared to the ramp rate generation of minority carri-
Here ␶n and ␶ p are the minority charge carrier lifetimes of ers is too slow for the formation of the inversion layer. In-
electrons and holes, respectively, Ndop is the concentration deed, there is only a transition of the C − V characteristic
of ionized dopants, and the intrinsic density from the oxide capacitance at negative voltages 共accumula-
ni ⬀ exp关−Eg / 2kBT兴 decreases exponentially with increasing tion兲 to the geometrical capacitance at positive voltages. The
gap energy Eg. The other mechanism is generation/injection value of the latter corresponds to a fully depleted organic
of minority carriers at the bulk contact followed by diffusion layer. Since the gate electric field cannot be screened by an
through the bulk region of the semiconductor and drift inversion layer, the width of the depletion in the semiconduc-
through the depletion layer. For p material with concentra- tor increases until the whole layer is depleted. In contrast, in
tion NA of ionized acceptors the bulk minority density is n the case of a small band gap of 0.8 eV, the time for the
= n2i / NA, and the corresponding dielectric relaxation time formation of the inversion layer is small compared to the
␶d,n ⬀ n−2
i . The relations between the relaxation times deter- measuring period and a usual quasistatic C − V characteristics
mine what happens during the measurement. Minority carrier is obtained. Especially in this case one gets the same behav-
current and generation of minority carriers act in parallel in ior even without including any recombination process in the
the formation of the inversion layer; in this case, the faster calculation 关Shockley-Hall-Read 共SHR兲 is normally used兴 as
process is determinative. As demonstrated in Fig. 2 共param- discussed above. Evidently, due to the small band gap the
eters according to the preceding section兲, this is the genera- charge carrier concentration in the material is high enough

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054514-5 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

displacement currents are depicted. They are different for the


two sweep directions. Of course, in the oxide there is only a
displacement current density. Since the reduction of the in-
version layer takes place much faster 共accordingly a faster
change of the electric field across the oxide occurs兲 this den-
sity has to be larger for the sweep from positive to negative
voltages. For this sweep direction the displacement current is
zero in the semiconductor 共apart from the decrease in a nar-
row region immediately at the interface兲. However, for the
opposite sweep direction, the displacement current density is
at first 2 ⫻ 10−9 A / cm2 and drops down to zero in the middle
of the semiconductor layer with approaching the bulk con-
tact. Since inversion builds up slowly, the depletion zone
extends at first deep into the semiconductor, with gradually
increasing inversion layer formation; its width decreases un-
til the inversion layer is completely formed. Finally, the
width of the depletion zone reaches a value, which is con-
nected with the surface potential at inversion 共this is the
usual maximum depletion layer width, but if there is no in-
version layer the depletion zone has, of course, a larger
width兲. In case of a completely depleted semiconductor layer
the displacement current density would not drop down to
zero up to the bulk contact. The electron current is prominent
only near the oxide interface, where electrons are generated
or where they recombine 关compare with Fig. 4共c兲兴. Directly
at the interface this current drops down to zero and is not
relevant in the bulk p-type semiconductor. Toward the inter-
face the hole current decreases, corresponding to the rise of
the electron current, and is of course zero directly at the
oxide interface. The sum of both is called conduction cur-
rent. In the bulk material it is solely given by the hole current
FIG. 4. Profiles of the 共a兲 current densities, 共b兲 charge carrier densities, and and it is different for both sweep directions at the bulk con-
共c兲 recombination/generation rate in the middle of the MOS capacitor from
the bulk contact 共y = 0兲 to the gate 共y = 0.2 ␮m兲 for the CV characteristics tact. These two values of the hole current density, or equiva-
with Eg = 1.2 eV in Fig. 3 at VGB = + 5 V. lently, the difference of the total current densities 共jtot = jn
+ j p + jdisplace兲 at the gate and the bulk contact results in the
corresponding currents and capacitances of the C − V charac-
for a minority carrier current from the bulk to the interface. teristic, respectively, at VGB = + 5 V for both sweep direc-
But for a larger band gap 共Eg ⬎ 1 eV, compare Fig. 2兲 the tions. In Fig. 4共b兲 the electron and hole densities are de-
bulk minority carrier concentration is too low and the inver- picted. They differ substantially for both voltage sweep
sion charges can be created only by generation. In case of the directions 共note the logarithmic scale兲. For the sweep from
medium band gap of 1.2 eV, during the measuring period negative to positive voltages the semiconducting layer be-
inversion is formed slowly and thus with increasing positive comes at first partially depleted, since the generation of in-
voltages the capacitance increases gradually until the oxide version charges is very slow. This results in much lower
capacitance is reached. In contrast to the formation, the re- charge carrier concentrations 共and stronger band bending兲
duction of the inversion layer takes place rather fast and the than for the opposite sweep. The recombination and genera-
characteristics for the sweep direction from positive to nega- tion rate is determined by the deviation of the carrier densi-
tive voltages is identical with the common quasistatic char- ties from equilibrium. The rate is largest at the position
acteristics. The sharp increase of the capacitance from VGB where both carrier concentrations are equal. As these densi-
= + 20 V to VGB = + 18 V is discussed below. ties are different for the two sweep directions, the generation
The reason for this hysteresis is a recombination rate rate for the creation of inversion charges and the recombina-
considerably higher than the generation rate for the forma- tion rate for their reduction are different. This is explicitly
tion of the inversion layer. This is demonstrated in Fig. 4, shown in Fig. 4共c兲. Even though the generation of carriers
where profiles of 共a兲 current densities, 共b兲 carrier concentra- occurs in a broader region of the semiconductor, its rate is
tions, and 共c兲 recombination rate are shown along the middle significantly lower than the recombination rate. This explains
of the MOS capacitor. The bulk contact is at y = 0 ␮m, the the observed hysteresis in Fig. 3. The maximum recombina-
interface at y = 0.15 ␮m, and the gate contact at y = 0.2 ␮m. tion rate is at the position where electron- and hole-charge
All profiles correspond to an applied gate voltage of VGB densities, as well as the current densities, are equal.
= + 5 V, i.e., in the range of hysteresis 共Fig. 3, Eg = 1.2 V兲. Now we consider in more detail the capacitance at VGB
In Fig. 4共a兲 the current densities for electron-, hole-, and = + 20 V for the medium band gap of Eg = 1.2 V. As already

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054514-6 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

FIG. 5. Hole and electron densities in the middle of the MOS capacitor from
the bulk contact 共y = 0兲 to the insulator interface 共y = 0.15 ␮m兲 at an applied FIG. 6. Simulated quasistatic C − V characteristics of the TOC transistor
voltage of VGB = + 20 V. Compared are density profiles before 共dashed line兲 关Fig. 1共b兲兴 共ramp rate 0.1 V / s兲 for different values of the band gap. The
and after 共dotted line兲 the waiting time of 100 s at VGB = + 20 V with equi- work function of the source- and drain-contact material is always aligned
librium distribution 共solid line兲. with the maximum of the valence band, so its absolute value changes with
the band gap 共ohmic contact, accumulation contact兲. The gate contact area is
3 ␮m ⫻ 1 ␮m and 1 ␮m ⫻ 1 ␮m for source and drain. Other parameters
discussed in connection with Fig. 4共b兲 inversion builds up as in Fig. 3.
slowly, a depletion zone extends at first deep into the semi-
conductor, and with gradually increasing inversion layer for-
mation its width decreases until the inversion layer is com- structure 关Fig. 1共b兲兴 if source and drain are set to zero volt-
pletely formed leading to the gradual increase of the age while the voltage ramp is applied to the gate. The result-
capacitance for the sweep direction from negative to positive ing characteristics are depicted in Fig. 6, again for three dif-
gate voltages. However, the formation of this deep depletion ferent gap widths. Compared to the capacitor only the device
zone takes place very fast while its following reduction is a structure is changed, since in contrast to the bulk contact in
slow process. Due to the low carrier densities in that region the capacitor the source and drain contacts are separated by
the dielectric relaxation time is very large and therefore the the channel. In addition, the organic layer is only 50 nm
redistribution to equilibrium 共especially of the electrons兲 is thick. All other parameters are the same as for the quasistatic
very slow, in addition to the slow carrier generation. In Fig. C − V characteristics of the capacitor 共Fig. 3兲. As visible from
5 carrier density profiles are depicted from the bulk contact Fig. 6, the qualitative dependencies remain the same. The
to the insulator interface in the middle of the MOS capacitor oxide capacitance 共which is equal for both device structures兲
at VGB = + 20 V. It is clearly visible that the charge density is obtained for sufficiently large negative gate voltages. The
distribution at the end of the voltage sweep from negative to flatband voltage depends on the gap width for the same rea-
positive gate voltage 共dashed lines, before waiting time兲 is son as explained for the capacitor in Sec. IV A. Again, the
far away from equilibrium 共solid lines兲, even though the ox- appearance of inversion for sufficiently large positive gate
ide capacitance is nearly reached in the C − V characteristics voltages depends on the gap width. For a small gap, inver-
at this point 共compare Fig. 3兲. Solely direct at the interface sion charges can be generated fast enough and a usual qua-
the electron density is equal to the equilibrium value. Also, sistatic characteristic is obtained. In case of the large band
after the waiting time 共here 100 s兲, before starting the back gap the inversion layer is not formed, and for positive volt-
voltage sweep 共dotted lines兲, equilibrium is not completely ages there is only a transition of the C − V characteristics to
reached; carrier generation still takes place. This causes the the geometrical capacitance. In the TOC structure its value
C − V curve for the back sweep from positive to negative must be determined numerically. But a good estimate is ob-
voltage to start with a value below the oxide capacitance. tained if one considers, besides the smaller organic layer
Until equilibrium is reached, there is no effective recombi- thickness, only the area of source and drain as contact area,
nation 共because there are less charge carriers than in equilib- i.e., 2 ⫻ 共1 ␮m ⫻ 1 ␮m兲. With the common analytic expres-
rium兲 that results in a reduced hole current from bulk contact sions a value of 0.626 fF is then obtained for the geometrical
to the recombination zone connected with a lower capaci- capacitance compared to a simulated value of 0.656 fF ex-
tance. Simulation shows that this behavior at VGB = + 20 V is tracted from Fig. 6. Of course, for the value of the oxide
still present for a longer waiting time of 500 s, i.e., a fairly capacitance the whole device area of 3 ␮m ⫻ 1 ␮m must be
long time is necessary to reach the equilibrium charge carrier considered because the accumulation layer formed at the in-
distribution, because in approaching equilibrium the genera- terface to the insulator extends over the whole length of the
tion rate will decrease. device. Finally, for a medium gap width hysteresis arises. For
both sweep directions the increase of the capacitance is much
B. Thin-film top contact transistor
slower than in the capacitor. Because of the much thinner
Similarly, as in the capacitor 关Fig. 1共a兲兴 one can also organic layer the carrier generation zone cannot expand as
obtain quasistatic C − V characteristics for the TOC transistor much as in the capacitor. Therefore, in this transistor struc-

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054514-7 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

ture generation is lower and the reduction of the deep deple-


tion zone 共which is formed because the generation of inver-
sion charges is too slow兲 takes much more time.

V. QUASISTATIC C − V CURVES FOR TFTS WITH WIDE


GAP ORGANICS AND WITH DIFFERENT SOURCE/
DRAIN WORK FUNCTIONS

In most organic materials generation of carriers is too


inefficient due to the large gap, even at low frequencies. To
obtain both accumulation and inversion in a thin-film tran-
sistor with such material, it is necessary to inject both types
of carriers via source and drain. This can be achieved either
by using different contact materials or by contacts which
allow for efficient injection of both carrier types for some
reason 共both have been realized in ambipolar transistors; see
Sec. I兲. This is in contrast to a conventional transistor struc-
ture, which is usually a 4-terminal device. There, the bulk
contact is ohmic for majority carriers and allows for injection
to obtain accumulation. Source and drain are doped oppo-
sitely to the substrate and allow therefore injection of minor-
ity carriers. But in a thin-film structure the bulk contact is
missing. FIG. 7. Quasistatic C − V characteristics 共ramp rate 0.1 V / s兲 for the 共a兲
In the preceding Sec. IV the work function of the bulk TOC and 共b兲 BOC transistors. The work functions of the source/drain con-
contact or of the source/drain contacts was chosen such that tacts are chosen as indicated.
it is aligned with the valence band edge. Thus, with the cho-
sen p doping, these contacts are hole accumulation 共ohmic兲 VI. FREQUENCY RESPONSE OF MOS CAPACITORS
contacts. In this case inversion at the interface of the organic
layer with the oxide could not be achieved for the wide gap The frequency response is characterized by the complex
organic material. In this section it is demonstrated how dif- frequency dependent impedance Ẑ, or alternatively the ad-
ferent choices of the materials for source and drain influence mittance Ŷ, the dielectric function ⑀ˆ , or the modulus M̂,
the channel formation of TOC and BOC transistors. We con- which are connected among each other by
sider the cases when the contact work function is as before
aligned with the valence band 共⌽ = 5 eV, hole injecting con- dV̂GS
Ẑ = = Z⬘ + iZ⬙ = Ŷ −1 = 共i␻C + G兲−1 , 共4兲
tact兲 or with the conduction band 共⌽ = 3 eV, electron inject- dÎ
ing contact兲. Quasistatic C − V characteristics 共ramp rate
0.1 V / s兲 are shown for the TOC transistor in Fig. 7共a兲 and Ŷ
for the BOC transistor in Fig. 7共b兲. The work functions of the ⑀ˆ = ⑀⬘ + i⑀⬙ = = M̂ −1 . 共5兲
source/drain contacts are chosen as indicated in the figure. If i␻Cgeo
the work functions for source and drain are the same, one Since real and imaginary parts of each quantity are not inde-
obtains for the larger 共lower兲 work function accumulation pendent, one of them contains the full information. However,
共inversion兲 for larger negative 共positive兲 gate-source voltage due to the different asymptotic dependencies, usually one
and hence the capacitance approaches the oxide capacitance, quantity gives at best an immediate insight. For a capacitive
whereas for larger positive 共negative兲 gate-source voltage the device this is of course the capacitance C. Nevertheless, di-
geometric capacitance is approached, which is different for rect information on relaxation times can be better seen from
the TOC and BOC structures. Due to the used p doping the the imaginary part ⑀⬙ of the dielectric function.
transition from accumulation to depletion is different from In the following, examples for the simulated frequency
the transition from inversion to depletion. On the other hand, response are analyzed for MOS capacitors with the structure
for different work functions for source and drain one has shown in Fig. 1共a兲. The gap width of the organic semicon-
good inversion charge injection from one contact and good ductor is 2 eV. Inspection of internal density profiles allows
accumulation charge injection from the other contact. There- one to understand the rather different dependencies obtained
fore, both inversion and accumulation do occur. Thus, the for capacitors with thickness of the organic layer smaller or
oxide capacitance value is reached for negative and positive larger than the depletion length. Moreover, lumped equiva-
gate-source voltages as well. Such a structure has been ex- lent circuit models will be discussed, which are suitable to
ploited in ambipolar TFTs, but the disadvantage of such de- analyze measured data and the elements of which are
vices is that they do not really have an off-state. uniquely assigned to sublayers of the organic layer.

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054514-8 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

FIG. 8. C − f characteristics for the MOS capacitor according to Fig. 1共a兲 FIG. 9. Electron 共n兲 and hole concentration profiles from the bulk contact
with a reduced organic layer thickness of dorg = 50 nm for a positive gate- 共y = 0兲 to the interface to the oxide 共y = 0.05 ␮m兲 for the C − f characteristics
bulk voltage of VGB = + 10 V 共a兲 and a negative gate-bulk voltage of VGB of Fig. 8 of the MOS capacitor with a reduced organic layer thickness of
= −10 V 共b兲. For the work function of the bulk contact material two differ- dorg = 50 nm for a positive gate-bulk voltage of VGB = + 10 V 共a兲 and a nega-
ent values are used: ⌽B = 3 eV and ⌽B = 5 eV. The curves with open sym- tive gate-bulk voltage of VGB = −10 V 共b兲. For the work function of the bulk
bols are for the equivalent circuit models. In 共a兲 also the imaginary part of contact material two different values are used: ⌽B = 3 eV and ⌽B = 5 eV.
the dielectric function is shown for ⌽B = 3 eV.

the p-type material at the interface to the oxide and Fig. 8共b兲
As mentioned above, a p-doped organic semiconductor for a negative gate-bulk voltage of VGB = −10 V, leading to
is considered 共NA− = 1017 cm−3 for dorg = 50 nm and NA− = 5 hole accumulation at the interface to the oxide. At first the
⫻ 1017 cm−3 for dorg = 150 nm兲. With such a doping a hole- situation will be analyzed for the positive gate-bulk voltage.
accumulation bulk contact is usually chosen 共we use in the Here, for the hole injection bulk contact with the larger work
simulation the bulk contact work function ⌽B = 5.0 eV兲 and function the geometrical capacitance is obtained for the
the notation 共p-兲accumulation 共inversion兲 refers to the charge whole frequency range. On the other hand, for the low work
at the interface when a negative 共positive兲 gate-bulk voltage function bulk contact one has a clear transition between the
is applied. However, being interested in an n channel in the p oxide capacitance at low frequencies and the geometrical ca-
material one could also consider the influence of a bulk con- pacitance at high frequencies with a transition frequency of
tact with electron accumulation; thus we consider also a bulk 2 ⫻ 105 Hz marking the maximum of ⑀⬙ in Fig. 8共a兲. In ad-
contact work function of ⌽B = 3.0 eV, but the notations dition, at higher frequencies there is a plateau of the capaci-
共p-兲accumulation and inversion will be used as defined be- tance, which is 1.04 fF slightly larger than the geometrical
fore. Thin-film MOS capacitors are considered with a thick- capacitance and the final transition to the latter is flattened
ness of the organic layer of dorg = 50 nm 共150 nm兲, which is and occurs at about 5 ⫻ 107 Hz. In ⑀⬙ a hint for a second
smaller 共larger兲 than the depletion length for the chosen dop- maximum is visible also. The reason for these dependencies
ing. The capacitance of the semiconductor layer is Corg becomes clear from the simulated concentration profiles de-
= ␧0␧orgA / dorg and the oxide capacitance is Cox = ␧0␧oxA / dox picted in Fig. 9共a兲. For the larger bulk contact work function
= 2.07 fF. Thus the geometrical capacitance is for the thinner the electron density is so small there, that in the thin layer,
organic layer Cgeo = 共Cox −1
兲 = 0.95 fF and 0.45 fF for
−1 −1
+ Corg inversion is not achieved at the interface to the oxide. Apart
the thicker layer. It should be noticed that in the inversion from a tiny region near the hole injecting bulk contact both
regime charge carrier generation/recombination is negligible concentrations are negligibly small, the layer is depleted, and
in the considered frequency range due to the large band gap hence only the geometrical capacitance occurs. But for the
as mentioned before. lower work function one has at the bulk contact and at the
In Fig. 8 the C − f characteristics are shown for the MOS interface to the oxide a high electron concentration, the mini-
capacitor with the thinner organic layer. Figure 8共a兲 is for a mum in between is n ⬇ 2 ⫻ 1015 cm−3, and the whole layer is
positive gate-bulk voltage of VGB = + 10 V, i.e., inversion of flooded by minority carriers. Disregarding first the transition

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054514-9 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

at higher frequency, this situation can be modeled 共see Ap-


pendix兲 by an equivalent circuit with the oxide capacitance
in series with a parallel connection of the capacitance of the
organic layer and its resistance 共Rn兲 with an averaged elec-
tron concentration 关model 1, Eq. 共A1兲 with only one R − C
term兴. This leads to the capacitance
1 + ␻2R2nCorg共Corg + Cox兲 1 + ␻ 2␶ 1␶ 2
C = Cox = Cox , 共6兲
1 + ␻2R2n共Corg + Cox兲2 1 + ␻2␶22

␶1 = RnCorg, ␶2 = Rn共Corg + Cox兲, 共7兲


describing the transition from the oxide capacitance to the
geometrical capacitance, and the inflection point is deter-
mined by the relaxation time ␶2 and not simply by the dielec-
tric relaxation time ␶1 of the minority carriers. The simulated
capacitance is well described by this simple dependency as
visible in Fig. 8共a兲 with Rn = 1.58⫻ 108 ⍀ as the only param-
eter. From this value and the chosen mobility, one obtains the
averaged electron density as n = 6.6⫻ 1015 cm−3, which is
close to the simulated minimum. Using the full Eq. 共A1兲
共model 2兲 the whole frequency dependence of the capaci-
tance is described well including the low plateau and the
transition at higher frequency. From the two capacitances
and resistances obtained from the nonlinear fit 共and using the
mobility as used in the simulation兲 one obtains for the thick-
ness and the averaged electron concentration in the inversion
layer d2 ⬇ 8 nm and n2 ⬇ 1.2⫻ 1018 cm−3 and for the re-
maining part of the organic layer d1 ⬇ 41 nm and n1 ⬇ 5.2 FIG. 10. C − f characteristics for the MOS capacitor according to Fig. 1共a兲
with layer thickness of dorg = 150 nm for a positive gate-bulk voltage of
⫻ 1015 cm−3. Values close to these ones are obtained already VGB = + 10 V 共a兲 and a negative gate-bulk voltage of VGB = −10 V 共b兲. For
from the three capacitances and two transition frequencies the work function of the bulk contact material two different values are used:
extracted from Fig. 8共a兲 and Eqs. 共A2兲 and 共A3兲. It is re- ⌽B = 3 eV and ⌽B = 5 eV. The curves with open symbols are for the equiva-
markable that the simple model 共A1兲 with only two R − C lent circuit models.
terms results in such good description, although the electron
density is strongly inhomogeneous as seen in Fig. 9共a兲兲. ⫻ 106 ⍀ is smaller corresponding to an averaged hole con-
Moreover, though the large inversion capacitance is not vis- centration of p = 1.9⫻ 1017 cm−3, again close to the simu-
ible directly 共since it is larger than the oxide capacitance兲 it lated minimum. With the full Eq. 共A1兲 共model 2兲 the whole
determines the higher transition and can therefore be de- frequency dependence of the capacitance is described well
tected. including the smeared out transition. From the two capaci-
The situation is almost analog for the negative gate-bulk tances and resistances obtained from the nonlinear fit 共and
voltage of VGB = −10 V 关Fig. 8共b兲兴. Now for the electron using the mobility as used in the simulation兲 one obtains for
injection bulk contact with the lower work function the geo- the thickness and the averaged hole concentration in the ac-
metrical capacitance is obtained for the whole frequency cumulation layer d2 ⬇ 8.5 nm and p2 ⬇ 1.9⫻ 1018 cm−3, and
range. For the hole injecting bulk contact with the higher for the remaining bulk part of the organic layer d1 ⬇ 41 nm
work function one has the transition between the oxide ca- and p1 ⬇ 1.5⫻ 1017 cm−3 共close to the doping level of
pacitance at low frequencies and the geometrical capacitance 1017 cm−3兲.
at high frequencies, but with a higher transition frequency. The capacitance-frequency dependency is quite different
Thus, it is close to the second, higher transition frequency for the thicker layer 共Fig. 10兲. Here the oxide capacitance is
and instead of the low plateau in the capacitance one has reached as maximum capacitance at low frequencies only for
only a smeared out transition. Indeed, simulated concentra- the negative gate-bulk voltage and the hole injecting large
tions 关Fig. 9共b兲兴 show that for the smaller bulk contact work work function bulk contact. For the electron injecting 共hole
function the whole layer is almost depleted from both elec- blocking兲 low work function contact the maximum capaci-
trons and holes, apart from a narrow region near the bulk tance is much lower and the same is the case for inversion
contact 共with high electron concentration兲. On the other for both types of contacts. The transition frequencies are near
hand, for the larger work function one has at the bulk contact together for the four cases, however slightly larger when the
and at the interface to the oxide a high hole concentration, maximum capacitance is lower. For an understanding one
the minimum in between is p ⬇ 1.1⫻ 1017 cm−3, larger than can inspect at first the simulated profiles of holes in Fig. 11
for electrons in the former case due to the doping. Again, for the curves from Fig. 10. The electron concentration is
already model 1 关Eq. 共6兲兴 describes the simulations well, of negligibly small, except for a 2-nm accumulation layer at the
course with Rn replaced by R p. The chosen value of 5.42 low work function bulk contact. It is clearly seen that in the

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054514-10 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

␶1 = R p,bulkCbulk, ␶2 = R p,bulk共Cbulk + Cins兲. 共10兲


The maximum capacitance is reduced to Cins and the transi-
tion frequency is determined by ␶2, which explains the
slightly different values visible in Fig. 10. The model depen-
dency is shown also in Fig. 10. Thereby ddepl is chosen to fit
the maximum capacitance; the values for accumulation with
electron injection bulk contact, inversion with hole contact,
and electron contact are 38, 32, and 45 nm, almost the same
as obtained directly in the simulation. From the value of
R p,bulk needed to fit the transition frequency one obtains for
the bulk hole concentration values between 4.2⫻ 1017 cm−3
and 5.3⫻ 1017 cm−3 near the simulation input of 5
⫻ 1017 cm−3.
Thus, the frequency response of thin organic capacitors
can be rather different depending on doping, thickness, and
type of the bulk contact. However, it can be modeled rather
simply by appropriately specifying the equivalent circuit
model 共A1兲.

VII. CONCLUSIONS
In the usually unintentionally p-doped organics used in
TFTs with high work function metal contacts as source and
drain, a p-accumulation channel is formed as the on state for
negative gate voltage. For using the advantages of CMOS
FIG. 11. Hole concentration profiles from the bulk contact 共y = 0兲 to the circuitry, and also inversion, that means n-channel formation
interface to the oxide 共y = 0.15 ␮m兲 for the C − f characteristics of Fig. 10 of
the MOS capacitor with the organic layer thickness of dorg = 150 nm for a is needed. Since the organic TFTs differ from the usual
positive gate-bulk voltage of VGB = + 10 V 共a兲 and a negative gate-bulk volt- MOSFETs by the missing back contact and usage of metals
age of VGB = −10 V 共b兲. For the work function of the bulk contact material for source and drain contacts, and since the organics for the
two different values are used: ⌽B = 3 eV and ⌽B = 5 eV.
active layer are until now usually wide gap materials and
have a low mobility, inversion layer formation has been ana-
middle of the layer one has bulk concentrations since the lyzed for organic field-effect devices. This work is intended
layer thickness is larger than the depletion length. Thus, in partly also to stimulate experimental investigations on the
all cases one has a bulk region with the hole concentration inversion layer formation in organic TFTs and MOS struc-
given by the doping level and a negligible electron concen- tures. So far, only steady-state measurements have been re-
tration. But for the low work function contact one has a ported on the ambipolar devices, where an inversion channel
depletion zone of holes of a width ddepl = 39 nm. In inversion is formed.
and for the hole injecting contact there is a depletion zone A general insight is obtained comparing relaxation times.
near the interface to the oxide with ddepl = 32 nm, and for the For the chosen characteristic mobility values 关for very low
electron injecting contact there are depletion zones on both gap 共Eg ⬍ 0.75 eV兲 one has ␶d,n  ␶inv  ␶meas兴, the inversion
sides of the layer, the total width of which is ddepl = 49 nm. layer is formed by the minority carrier current without gen-
Thus, the model 共A1兲 can be simplified by setting the resis- eration. For somewhat larger gap, generation dominates
tance of the depletion layer as very large. Then one can de- compared with minority carrier current, the formation of the
scribe the system by an equivalent circuit model, which is a inversion layer is slowed down, and since recombination for
series connection of the oxide capacitance with the capaci- the back voltage sweep is fast, one has in this region a hys-
tance Cdep of the respective depletion layer and with a paral- teresis. For a gap Eg  1.25 eV, the measurement is faster
lel connection of the bulk capacitance Cbulk and resistance and there is no inversion layer formation.
R p,bulk, the latter with the bulk hole concentration and a More details are obtained from the numerical simula-
length dbulk = dorg − ddepl. The total capacitance is then given tions taking into account the geometry of MOS capacitors
by and TFTs and the type of contacts. For the MOS capacitors
with different gap widths Eg = 2.0, 1.2, and 0.8 eV of the
organics and a hole injecting bulk contact, the qualitative
1 + ␻ 2␶ 1␶ 2 expectations are confirmed. For a large band gap transport of
C = Cins , 共8兲 minority carriers is negligible, and compared to the ramp rate
1 + ␻2␶22
generation of minority carriers is too slow for the formation
of the inversion layer and the layer becomes fully depleted
for larger positive gate voltage; whereas for small band gap a
CoxCdep usual quasistatic C − V characteristic is obtained indeed with-
Cins = , 共9兲
Cox + Cdep out generation of minority carriers. In case of the medium

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054514-11 Th. Lindner and G. Paasch J. Appl. Phys. 102, 054514 共2007兲

band gap, during the measuring period inversion is formed ␶ 1 = R 1C 1, ␶ 2 = R 2C 2, ␶1,ox = R1Cox, ␶2,ox = R2Cox .
slowly, whereas the reduction of the inversion layer takes
place rather fast and the characteristics for the sweep direc- Actually, a closer inspection shows that one has only two
tion from positive to negative voltages are identical with the resonance frequencies. The relaxation time for the lower fre-
common quasistatic characteristics. Simulated profiles of quency is given by
current densities, concentrations, and recombination support
this interpretation in detail and also a peculiar dependency ␶low = ␶1 + ␶2 + ␶1,ox + ␶2,ox = R1共C1 + Cox兲 + R2共C2
occurring when changing the sweep direction at larger posi-
tive voltage. + Cox兲 → R1共C1 + Cox兲 for R1  R2 , 共A2兲
The qualitative dependencies and the influence of the
gap width remain the same for quasistatic C − V characteris- and that one for the higher frequency is determined by
tics of a top contact transistor 共source/drain at zero voltage兲
while the voltage ramp is applied to the gate. Quantitative 1 ␶low
=
differences occur only due to the different geometry and ␶high ␶1␶2 + ␶1␶2,ox + ␶2␶1,ox

冉 冊 冉 冊
layer thickness.
For TOC and BOC TFTs with a wide gap organic layer 1 Cgeo 1 Cgeo
= 1− + 1−
accumulation and inversion are possible if the source and R 1C 1 C1 R 2C 2 C2
drain contacts are from different materials, one hole injecting
and the other one electron injecting. Such structures have
been used in ambipolar TFTs, but the disadvantage of such

1

R 2C 2
1−
Cgeo
C2
冊 for R1  R2 . 共A3兲

devices is that they do not really have an off state.


The simulations show that the frequency response of thin Remarkably, in both cases the corresponding simple R − C
organic MOS capacitors can be rather different depending on product is only an approximation.
doping, thickness, and type of the bulk contact. Of special 1
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