Using the E-beam: 1) Verify that the gate valve to chamber is open.

2) Verify that the flow controller shows approximately 1.6 GPM. 3) Flip the on-switch located on the voltage controller at the bottom of the rack with the oxygen controllers. 4) Turn on both screens directly above voltage controller (these are the sweep and emission controllers). 5) On the right screen go to Fil Time Hours to ensure that all interlocks are OK (green). 6) On the left screen turn DC is Off to DC is On. This directs the beam at the crucible. The standard settings are X-offset: -1.5; Y-offset: -1.1. 7) On voltage controller turn on high voltage (yellow ON button). It will light up. *Note: If the Arc error is lit, reset, turn down the voltage to zero and ramp up to 10 V.* 8) On right screen turn Emission is OFF to Emission is ON. The filament current idle is 15 A. 9) Increase emission current to 10-20 mA for the purpose of finding the beam on the crucible. This is done by pushing Edit emission, turning the knob to increase the emission current, then pushing Save emission. 10)Find the beam in the crucible by visually inspecting the crucible! 11)If the beam is centered, proceed to step 12. Otherwise, use the X- and Yoffsets to center the beam in the crucible. 12)On left screen go to Select Pattern and use the knob to choose Pattern 4 (Spiral). The standard setting is Sweep Amplitude: 2.3. 13)Turn Sweep is Off to Sweep in On 14)Find the beam in the crucible by visually inspecting the crucible! 15)If the beam is centered, proceed to step 16. Otherwise, use the X- and Yoffsets and sweep amplitude to center the beam and sweep in the crucible. 16)If this is new material ramp the emission by 15 mA per minute until all of the material is melted in one piece. 17)Ramp to the desired emission current in 4 approximately even steps from current level with 1-2 min intervals. i.e. for Silicon which is used at 150 mA the following ramp can be used: From 15 mA, ramp to 50 mA and hold for 2 min. Then ramp to 90 mA and hold for 2 min. Then ramp to 120 mA and hold for 2 min. Finally ramp to 150 mA for growth emission. *Note: Verify beam position is centered after each adjustment or every 10 minutes!* 18)Ensure that QCM 1 (growth chamber QCM) is in and main shutter is closed. 19)Open e-beam shutter and change emission (holding for 1-2 min after each change) until a suitable flux at the substrate is achieved. Note that QCM 2 (ebeam chamber QCM) should be different than QCM 1. For Silicon, QCM2:QCM1 is 0.6:0.4

20)Once e-beam is calibrated you may proceed with growth! *Note: Verify that the beam position is centered after each adjustment or every 10 minutes!* 21)Monitor the flux at QCM 2 as this may indicate changes in the e-beam position or flux. 22)After growth ramp down the e-beam emission to zero in 4 even steps from current level with 1-2 min intervals. This minimizes thermal damage to the crucible. *Note: Verify beam position is centered after each adjustment or every 10 minutes!* 23)Turn Emission is ON to Emission is OFF. 24)Turn off the high voltage by hitting the green RESET button. You may now flip the switch off. 25)Turn DC is On to DC is Off and also Sweep in On to Sweep is Off. Additional Details: Monitor the flux of QCM 2. It should be relatively stable at any given emission. If the flux becomes unstable, find out why. Re-check the beam position and the fill-level of the crucible. If the crucible appears low or empty, power down the e-beam and refill it. If the material appears smaller than the sweep size reduce the sweep size, or power down and add more material. The crucible will glow strongly at high emission and it may damage your eyes. You may use the green goggles to inspect the crucible. If the e-beam turns off at random it could be from arcing. In this case, turn emission current to zero and restart this guide.

Changing the E-Beam Crucible (or QCM2): 1) Be sure to turn off the cooling water (supply valve on wall) at least 2-3 hours before venting. *Wait appropriate amount of time* 2) Manually close the gate valve between the growth chamber and the e-beam chamber. 3) Remove water return line. 4) Verify that all e-beam controllers are off. The e-beam is high voltage and can be dangerous. 5) Vent lower portion of chamber with nitrogen line. (Use metal valve, and be sure that the QCM valve is open to the e-beam chamber or you will only vent the QCM). 6) Place support rails in. Ensure that no water and power lines are trapped between the rails. 7) Hand un-tighten the bolts on the 8 flange. 8) Slide support rails fully in place and lock using the hard stops. If the rails do not slide in, loosen the bolts more. 9) Remove bolts completely. 10)Slide e-beam chamber fully onto rails. 11)Manually control the e-beam shutter (using the touch screen by the GM1 Rack) and open it. 12)Remove crucible and vacuum as much as you can in the e-beam chamber and the empty crucible slot. 13)Replace/refill with desired crucible / material combination. Do not fill a crucible more than 2/3! 14)Using a fresh 8 copper gasket position the e-beam unit back inside the chamber and hand-tighten all bolts. 15)Loosen hard stops and remove support rails. 16)Finish tightening bolts and begin pumping down with pump cart. 17)After pump cart pressure stabilized at minimum pressure close the all-metal valve to 25 ft-lbs (unless labeled differently) and slowly open gate valve to growth chamber