Auger Electron Spectroscopy

Auger Electron Spectroscopy:

Surface specific technique

Named after Pierre Auger, a French Physicist (discovered Auger effect) Highly sensitive to most elements except H and He

Auger effect:

MNEL

Characterisation Techniques

Auger Electron Spectroscopy

Page 1 of 5

Basic Processes:
Three basic steps :

(1) Atomic ionization (by removal of a core electron) (2) Electron emission (the Auger process) (3) Analysis of the emitted Auger electrons Instrumentation:

Electron source has variable energy and capable of producing a very small spot of electrons

Electron energy analyser spherical sector analyser

Secondary electron detector Backscattered electron detector (optional) produces an image similar to an SEM but it is less surface sensitive

Ion source (optional) clean a surface prior to analysis and to erode the surface of the sample so that concentration depth profiles can be measured

Emitted electrons have energy between 50 eV and 3 keV Ultra high vacuum required to avoid electron scattering off of residual gas atoms and formation of thin gas adsorbate layer
Characterisation Techniques Auger Electron Spectroscopy Page 2 of 5

MNEL

Typical Auger spectrum:

Advantages:
High sensitivity

Spatial resolution Depth profiling possible with Auger peak heights vs sputter time or atomic concentration vs depth plots

Disadvantages:
Charging effects

Characteristic energy losses Higher order atomic ionization events (Satellite peaks) Electrons ejected from a solid generally undergo multiple scattering events They lose energy in the form of collective electron density oscillations called plasmons If plasmon losses have energies near that of an Auger peak, the less intense Auger process becomes dwarfed by the plasmon peak
Characterisation Techniques Auger Electron Spectroscopy Page 3 of 5

MNEL

Scanning Auger Microcopy (SAM):

Enables images of elements in the near surface layer of conducting samples (2-3 atomic layers)

Combination of SEM and AES Electron beam scanned over the surface Electrons excited from the surface energy analysed to detect Auger peaks Intensity of Auger peaks as a function of the position of the electron beam provides an image of the element to which the Auger peak corresponds

SEM vs SAM:

SAM:

MNEL

Characterisation Techniques

Auger Electron Spectroscopy

Page 4 of 5

Auger depth profiling:

Applications: Corrosion Plating Microelectronics Space Chandrayan II???

MNEL

Characterisation Techniques

Auger Electron Spectroscopy

Page 5 of 5