Semicon Taiwan 2011, Sep.

82011

High Stroke Robot system for TSV, Wet and Exposure systems

Takeshi Sasaki Factory Automation group

TOHO KASEI CO.,LTD, Japan

TOHO-FA

Agenda

Speed & Fine

High Stroke Robot TTR Tracked Telescopic Robot Low Pass Line and Longer Arm Robot AWL Auto Wafer Loader

300mm 450mm

Confidential

TOHO FA

Stacked Process Module for TSV 3D Packaging and Wet Process

v

TSV/3D Packaging configured by 4port EFEM, Multi Chamber and Stacked Process Modules for 3 types of SUBSTRATES Handling, 1) 400mm DF (Dicing Frame), 2) 300mm Quartz Wafer, 3) 300mm Silicon Wafer TTR Tracked Telescopic Robot configured by TELE-ROBOT + LINEAR TRACK with best combination with high Z-STROKE, fine POSITIONING and high SPEED.

EFEM : RD300-570 + Linear Track

Process : RD300-1050 + Linear Track

Confidential

TOHO FA

High Stroke Robot-1

For Stacked Process Module and high Throughput Process Max.1200mmZ stroke and min.400mmFL High Speed 1200mm/1sec 1200mm Dual Arm Robot 0.05mm positioning 3-step 1050mm Telescopic

Folding

2-step

570mm
2-step

Z=660mm
400mm FL

FZR300-660
Confidential

RD300-570
TOHO FA

RD300-1050

RD300-1200
4

High Stroke Robot-2

Folding Z=660mm Telescopic 570mm 1050mm
2-step 2-step

1200mm
3-step

1100mm Stroke

400mm FL FZR300-660
Confidential

RD300-570
TOHO FA

RD300-1050

RD300-1200
5

High Stroke Robot Specification

Components

AC servo motor Absolute Encoder Harmonic Drive Linear Track Smart Motion 2 FOUP Access Wafer Mapping
Fast

High Speed, high Power AC Servo Fine Positioning, Harmonic Drive

model
axis R1, R2 Axis

RD300-570 5 (2-step)

RD300-1050 5 (2-step)
651 mm 330 deg

RD300-1200 6 (3-step)

Envelope

T Axis Z Axis R1, R2 Axis 570mm

1,050 mm 1,050 mm/s 196 deg/s

1,200 mm

Movement 3-axis Movement Z 3-step Movement Teaching ANSI Teaching Pendant Direct Teaching
Software

Speed

T Axis Z Axis R1, R2 Axis 570mm/s

1,000 mm/s 0.05 mm 0.02 deg 0.1 mm

1,200 mm/s

Repeatability Motor

T Axis Z Axis All

AC Servo Motor, Absolute Encoder, Harmonic Drive 2.0 kgf (Optional) Class1@0.1 55 kg 80 kg 110 kg 6

Command : Put, Get , Swap CE marking Toughness Al 6061

Confidential

Payload mapping Clean Weight

TOHO FA

TTR Tracked Telescopic Robot

TELE-ROBOT + LINEAR TRACK RD300-1050 + TL1350
1) 400mm Dicing Frame

2) 300mm Glass Wafer

3) 300mm Silicon Wafer with Face down

Confidential

TOHO FA

Positioning Repeatability
Power :
axis L-arm R-arm Rotation Z-1 Z-2 Linear Track

Telescopic Robot_RD300-1050 (Z=1050mm Stroke)

Motor 100W 100W 100W 200W 400W 800W Function AC Servo Motor Absolute Encoder Harmonic Drive AC Servo Motor Absolute Encoder Brake AC Servo Motor Incremental Encoder Pole Sensor

Resolution :
Rotation 2084 pulse/deg

Gear Ratio 92 :
Harmonic rive 50 : Puley / Timing Belt 1.84 : 1

total

1700W

Positioning Repeatability : mm
TR arm move , dir
R-arm X-Y

fm LEFT
0.034 0.026 0.033 0.031

fm RIGHT
0.027 0.038 0.019 0.016

LOST motion

0.037 0.039 0.033 0.031

8

TTR RD300-1050

R-arm X-Z L-arm X-Y L-arm X-Z

Confidential

TOHO FA

Low Pass Line Robot_FZR

Folding Z Robot FZR300-660
Dual arm Robot

Feature :

Extension 1100mm

Folding Z-axis Lower Pass Line 400mmFL Long Z stroke 660mm Long Arm Stroke 1100mm Dual Arm Robot 0.05mm Positioning

660mm Z-stroke Folding Concept

400mmFL
Confidential

TOHO FA

Low Pass Line Robot_RD300-200

Feature :

LED 50-150mm & 300mm Wafer Dual Arm Robot with AC Servo/Ab.Encoder/Harm.Drive High Speed 1m/s all Axis Fine Positioning 0.05mm Low Pass Line 490mmFL Arm Reach 750mm Z Stroke 200/300mm Wafer Mapping

Confidential

TOHO FA

10

AWL300 (Auto Wafer Loader)

Confidential

TOHO FA

11

Compact 300mm EFEM

Compact 1port EFEM and AWL(Auto Wafer Loader) Dual arm Robot, FOUP Opener and Prealigner Configuration Lower Cost and High Performance 50um and 0.02deg Fine Positioning and high Speed

Demo @ Booth#1929

Confidential

TOHO FA

12

Exposure System with AWL

Mejiro Stepper from TOHO-KASEI with AWL Auto Wafer Loader 50mm 300mm Configuration High Cost Performance

Confidential

TOHO FA

13

AWL-LED
4inch to 300mm /FOUP Transfer
4inch Carrier

Prealigner Index

FOUP Buffer

4inch Wafer

Centering

300mm CF Tray
300mmCF Tray FOUP Transfer

Dual Arm Robot

Right arm : 4inch Wafer with Bernoulli Chuck Left arm : 300mm CF Tray by Edge Clamp

FOUP

Confidential

TOHO FA

14

Thanks !
TOHO-KASEI Booth at #1929 e-mail: sasaki@toho-kasei.co.jp http://www.toho-kasei.co.jp TOHO-KASEI CO,. LTD, Japan Taiwan TOHO Technical Center @ Hsinchu

TOHO-FA
Confidential

TOHO FA

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