Optical Interferometry and Industrial Interferometers - A Tutorial

Friedemann Mohr - Pforzheim UnivApplSci Interferometry - ITSS 2007 1
Optical Interferometry
and Industrial Interferometers
- a Tutorial -
Friedemann Mohr
Pforzheim University of Applied Sciences
Outline
1 Physical Basics and components
2 Interferometry for path measurement
3 Laser vibrometry for vibration
measurement
The photoelectric conversion process
Number of photons impinging:
v
= =
h
W
W
W
n
ph

v
= =
h
W
W
W
n
ph

Gives total charge:
v
n =
h
W
e q

Current: P P
h
e
dt
dW
h
e
i = = = R
v
n
v
n

where
n
v
n
= =
c h
e
h
e
R = Responsivity, Sensitivity

Detecting a light wave
Poynting vector
*
2
1
H E S

= Total power:
=
A
dy dx S P

0
Z
E
H
=
(where Z
0
=characteristic impedance of medium)

2
0
A
2
0
E
Z 2
A
dy dx E
Z 2
1
P

= =

2 2
0
2
E K E
Z
A
P i

= = = R R
= photo current

2
E I

= = intensity or, irradiation
using
) t ( j
0
) kz t ( j
0
e E e E E
o e e
= =

2
0
E K i =

i.e., detection of light is a nonlinear process.
E
H
S
S
A
i
Components I: Lenses, beam transformation
f1 f2
The
tele-
scope
Gaussian
beam
trans-
formation

t
= o w
is an invariant

1
2
1
2
f
f
D
D
=

Components II:
Mirrors and retroreflectors
o
o
i
r
1
2
o
'
i1
o
'
r2
a
b
c
Components III:
Lossless
beamsplitters
Power conservation:
2 1 0
P P P + = or,
2
2
2
1
2
0
E E E + =
(1)
(Special case of 3dB power splitters:
2
0
2
2
2
1
E
2
1
E E = = whence
0 1
E
2
1
2 E E = = )

Field continuity:
2 1 0
E E E + =
(2)

1
*
2 2
*
1
2
2
2
1 1
*
2 2
*
1 2
*
2 1
*
1 2 1
*
2
*
1 0
*
0
2
0
E E E E E E E E E E E E E E ) E E ( ) E E ( E E E + + + = + + + = + + = =
Comparison with (1): 0 E E E E
1
*
2 2
*
1
= +
| | 0 ) cos( E E 2 e e E E e E e E e E e E
2 1 2 1
) ( j ) ( j
2 1
j
1
j
2
j
2
j
1
2 1 2 1 1 21 2 1
= o o = + = +
o o o o o o o o
.
I.e., must be:
2
2 1
t
+ = o o
or
2
2 1
t
= o o
Both output waves are in quadrature!
E0 E1
E2
E1
E2
E0
E1
E2
E0
fiber
optic
bulk
integrated
optic
4
j
e
2
0 E
1 E
t
+
=
4
j
e
2
0 E
2 E
t
=
Components IV:
Lossless beam-
splitters and
their technical
realisation
Components V:
Lossy
beamsplitters
Results achieved
above are valid for
purely dielectric layer.
However: Metal has
complex refractive
index

ik n n =
.

Substrate refractive index assumed was n
sub
=1.5
(Raine, Downs, 1978)
Polarisation I:
Polarisation ellipse
and Jones vector
E-field of a wave can, at a fixed position
in space, be described by the Jones vector
=
o + e
o + e
) t ( j
y
) t ( j
x
y
x
y
x
e E
e E
E
E
E

x
y
v
a
b
n>0
n = arctan b/a
t/4 < n < +t/4
t/2 < v < +t/2
a) Linear polarisation in x direction (elevation angle 0):
0 E
y
=
,
b) Linear polarisation in y direction (elevation angle 90):
0 E
x
=
,
c) Linear polarisation with 45 (135) elevation angle: y x
E
=
, x y
o = o
(
t + o = o
x y )
d) Circular polarisation:
y x
E
=
, 2
x y
t
= o o
Polarisation II:
Propagation and
Jones matrix
Propagation of a wave can, generally, be
described by the Jones matrix

1 1 2
E
D C
B A
E J E

= =
=
0 0
0 1
) 0 ( J ,
=
1 0
0 0
) 90 ( J
u u u
u u u
= u
2
2
sin cos sin
cos sin cos
) ( J
j
e
J
j
0
0 1
0
0 1
) 0 (
2
t
,
=
+
j
e
J
j
0
0 1
0
0 1
) 90 (
2
t

=
1
1
2
1
1
1
2
1
) 45 (
2
2
j
j
e
e
J
j
j
t
t

Polariser
Retarder,

here with specific
retardation of
Ao=t/2
(quarterwave
plate)
Polarising beam splitters (PBS)
left: crystal type
(Wollaston prism)
p
s
p
s
right: thin film type
Some characteristic polarisation states
x
y
x
y
x
y
x
y
x
y
x
y
x
y
x
y
top: linear || x, linear || y
bottom: linear, +45, linear -45
top: circular, RH, circular, LH
bottom: elliptical, RH elliptical, LH
He-Ne
laser for
interfero-
metry I
a tube design

b gain curve

c mode scheme

d real modes
due to b and c
1,5 GHz
laser
threshold
0
600
MHz
a
b
c
d
M+2 M+1 M M-1 M-2
lost
radiation
used radiation glass tube
front
mirror
rear
mirror
LR
He-Ne
laser for
interfero-
metry II
NBS neutral beam splitter
POL polariser
PBS polarising beam splitter
D1, D2 detectors
C control circuit
0
Laser
QWP
PBS
NBS
D1 D2
+
-
heating
foil
f0-300MHz
f0+300MHz
C
(POL)
Stability improvement:
~ 10
-6
~10
-9
Coherence length:
kms

measurement
The historical Michelson-Morley experiment I
Aim: Proving the existence of the ether
Det
Source
S
N
The historical Michelson-Morley experiment II
Approach: Verification of Doppler
effect on speed of light using high-
resolution phase measurement
Det
Source
x
y
z
a b
S
N
Mach-
Zehnder
interfero-
meter I
1 1
jkz t j 0
4
j
jkz
4
j
t j
0 11
e e
2
E
e
2
1
e e
2
1
e E E
e
t
t
e
=
=
2 2
jkz t j 0
4
j
jkz
4
j
t j
0 12
e e
2
E
e
2
1
e e
2
1
e E E
e
t
e
=
=
| |
2 1
jkz jkz t j 0
12 11 1
e e e
2
E
E E E
e
+ = + =
| | ) z z ( k cos 1
2
E
E E E I
2 1
2
0
1
*
1
2
1 1
+ = = =
I
0
I
1
I
2
Laser
1
2
2
1
D1
D2
o2
o1
1 1
z k = o
, 2 2
z k = o
1 1 1
jkz t j 0 jkz
2
j
t j 0
4
j
jkz
4
j
t j
0 21
e e
2
E
j e e e
2
E
e
2
1
e e
2
1
e E E
e
t
e
t
t
e
= =
=
2 2 2
jkz t j 0 jkz
2
j
t j 0
4
j
jkz
4
j
t j
0 22
e e
2
E
j e e e
2
E
e
2
1
e e
2
1
e E E
e
t
e
t
e
= =
=
| |
2 1
jkz jkz t j 0
22 21 2
e e e
2
E
j E E E
e
= + =
| | ) z z ( k cos 1
2
E
E E E I
2 1
2
0
2
*
2
2
2 2
= = =
I
0
I
1
I
2
Laser
1
2
2
1
D1
D2
o2
Ao
I1
I2
t t 2t 2t
o1
Mach-
Zehnder
Interfero-
meter
| | ) cos( 1
2
I
I
0
1
o A + =
| | ) cos( 1
2
I
I
0
2
o A =
stabilized
Laser
NBS
x
D1
D2
MZI arrangement for path measurement
Problem:
No directional
information !!
Laser
phi 1
phi 2
PBS
PBS
Ao = 0 Ao = 45 Ao = 90 Ao = 180 Ao = 135
Basic Arrangement of
polarisation interferometer
Examples of polarisation states at output port
Mach-Zehnder interferometer with directional sensitivity I
Superposition of
2 orthogonally
polarised waves
yields not only
output intensity
but polarisation
ellipse.
Polarisation el-
lipse carries two
informations:

Shape and
elevation angle.

Or:
Phase difference
and direction.
Laser
phi 1
phi 2
PBS
PBS
NBS
QWP
Ao
I2
I2'
t -t
2t 2t
I1'
I1
D2
D2'
D1'
D1
PBS
D1's detect circularity
of polarisation ellipse
D2's detect orientation
of polarisation ellipse Ao
PBS = polarising
beam splitter
NBS = neutral
beam splitter
QWP = quarter wave plate
t -t
2t 2t
Mach-Zehnder interferometer with directional sensitivity II
Calculating
interference
taking into
account
polarisation
1 1
jkz t j 0
4
j
jkz
4
j
t j
0 11
e e
2
E
e
2
1
e e
2
1
e E E
e
t
t
e
=
=
2 2
jkz t j 0
4
j
jkz
4
j
t j
0 12
e e
2
E
e
2
1
e e
2
1
e E E
e
t
e
=
=
| |
2 1
jkz jkz t j 0
12 11 1
e e e
2
E
E E E
e
+ = + =
| | ) z z ( k cos 1
2
E
E E E I
2 1
2
0
1
*
1
2
1 1
+ = = =
Scalar case, from above:
t j
a b c
e E J J J E
e
=
0 11
...

t j
a b c
e E J J J E
e
=
0 11
...

12 11 1
E E E

+ =
0 0 1 1
2
1 1
... E J J J J J J E E E E I
a b c a b a

= = =
+ + + + +

Calculation of I
2
in an analogous way.
Vectorial case, requires Jones calculus:
Processing of directional signals I
PBS QWP
D2
D2'
D1'
D1
PBS
-
+
1-cos
1+cos
-
+
1-sin
1+sin
2cos
2sin
Stabilized
Laser
x
Processing of directional signals II
Environmental factors
Path is measured in multiples (or fractions) of wavelength

Problem: Wavelength is dependent
on environmental factors:
- temperature, 0
- atmospheric pressure, p
- humidity factor of air, F
- gas content of air, G
Solutions:
- measure all parameters (0, ...), calculate n, compensate arithmetically
- measure n directly
) , , , (
2
0
G F p n n and
n
where
z
0
t
o
= =
A = A
MZI for tooling machine calibration
X
Zhler Zhler
inkrementales
Mesystem
Laser-
Interferometer
N
LI
N
IS
X
ist
X
soll
Istposition Sollposition
B
LI
B
IS
MZI based mask positioning
in semiconductor industry
measurement
Heterodyne interferometer for laser vibrometry
AOM
Laser
PBS
NBS
QWP
camera lens
target
f
B
D1
D2
PBS=polarising beam splitter
NBS=neutral beam splitter
QWP=quarter wave plate
AOM=acoustooptic modulator
Acoustooptic modulator (Bragg cell)
f1 = f0 (1 + v/csound)
f1 = f0 (1 - v/csound)
Laser
f1 = f0 (1 + 2 v/clight) = f0 + fD
f0
f1
Doppler shift
Heterodyne Interferometer: Calculation of Interference
AOM
Laser
PBS
NBS
QWP
camera lens
target
f
B
D1
D2
PBS=polarising beam splitter
NBS=neutral beam splitter
QWP=quarter wave plate
AOM=acoustooptic modulator 2
1
2
) (
0
11
0
=
+ t j
B
e
E
E
e e
;
2
1
2
) (
0
12
0
=
+ t j
D
e
E
E
e e

( )
t j t j t j
t j t j
e e e
E
e
E
e
E
E E E
B D
D B D
0
2
2 2
0
) (
0
) (
0
12 11 1
e e e
e e e e
+ =
+ = + =
+ +

| | t
E
E E E I
D B
) cos( 1
2
2
0
1
*
1
2
1 1
e e + + = = =

| | t
E
E E E I
D B
) cos( 1
2
2
0
2
*
2
2
2 2
e e + = = =

Operating range of heterodyne vibrometer
f
B
f +f
B D
f
f
f +f
B D
f
40MHz
40MHz +/- 32MHz
operating range
Operating range depends on
Bragg frequency

typically, f
B
= 40 MHz

|v|=10 m/s corr. to |f
D
| = 32MHz

Vibrometer block diagram / velocity decoder block
Master
oscillator
Local
oscillator
FM de-
modulator
Velocity
output
Range
setting
Vibrating
target
Laser-interferometric
measurement head
Mixer
f
B
f
LO
(f +f )
B
f
B
i.f. = (f + f ) - f
D
B LO D
Vibrometer block diagram / fringe counter block
Master
oscillator
Local
oscillator
Displace-
ment
output
Range
setting
Vibrating
target
Laser-interferometric
measurement head
f
B
f
LO
(f +f )
B
f
B
i.f. = (f + f ) - f
D
B LO D
cos
sin
cos(i.f.)
sin(i.f.)
up/down
counter
digital/
analog
converter
Vibrometer head Polytec design II
10
-3
1 10
3
10
6
10
-9
10
-6
10
-3
1
10
3
10
3
1
10
-3
10
-12
10
-6
10
-9
10
-3
1
10
3
10
6
10
9
displacement (m)
v
e
l
o
c
i
t
y

(
m
/
s
)
acceleration (m/s)
vibration frequency (Hz)
grey area with red bounds: : operating range of velocity decoder (FM decoder)
white area with dotted bounds:: operating range of displacement decoder (fringe counter)
Operating
range diagram
of a laser
vibrometer
Spectrum Analyser
Laser
Vibrometer
Vibr.-
Gene-
rator
Measurement example #1 for single point mode
top: loudspeaker drive signal

center: velocity decoder output

bottom: displacement decoder output
by courtesy of Polytec GmbH
Measurement example #2
HD drive dynamic measurements:

With stationary disk the R/W head
touches the disk. With rotating disk
the head is flying over the disk
(hydrodynamic lubrication)

Lowest possible flight height gives
best storage density. Optimum is h=0.

Vibrometer serves for measuring /
optimizing resonance characteristics
of flight control system
Application example #3
Valve position
measurement in
automotive
industry using
fiberoptic vibro-
meters
Using two fiber heads,
differential velocity
measurement between
two points is possible.
More vibrometer application aspects
Measure body sound contactlessly and with high precision
Avoid mass loading of DUT
Acquire many data points in short time
Measure from points otherwise difficult accessible
Be widely independent from material properties
Measure from smooth, hot, minute, intricate structures
Measure high-frequency vibrations
Measure from large distances..
Laser vibrometer in scanning mode
Fiber sensor coil deformation under forced vibration
Scanning vibrometer measurement example
Summary
1 Physical basics and components
2 Interferometry for path measurement:
Operating concepts and applications
3 Laser vibrometry for vibration measurement:
Operating concepts and applications
Vibrometers - More Applications
Medicine Ear drum, hearing functions, heart
Zoologie Elephants, insekts, spider webs
Household Washing machines, vacuum
cleaners, shavers
Entertainment Loudspeakers
Military Guns, mines
Civil engineering Buildings, bridges
..........and much more
Processing of directional signals III
pi -pi 2pi -2pi
pi -pi 2pi -2pi
C
S
Forward
Reverse
) S C ( ) S C ( ) S C ( ) S C ( R
RCounter / F
) S C ( ) S C ( ) S C ( ) S C ( F
. v . v . v . =
. v . v . v . =

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Friedemann Mohr - Pforzheim UnivApplSci Interferometry - ITSS 2007 1

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