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Hormoz Zareh, Associate professor Mechanical Engineering Dept. Portland State University SAE Meeting, October 24, 2003
Acquire broad knowledge base. Know and remember the assumptions and underlying
restrictions of the analysis tools.
Generate the beam models with curves and edges and not
the actual cross sections.
251-elem. mesh, Max. stress = 3540 954-elem. mesh, Max. stress = 4370
For example: Consider the stress contour indicating stress variation within a single element as follows:
Contour
1 2 3 4
Stress [Psi]
2511 2970 3380 3820
The average stress within the element is 3170 with an estimated highest error of almost 21% !
Mesh refinement
This is based on the assumption that discontinuities in
element-by-element stress field are indicative of error. However, physical discontinuities may exist which produce realistic, and often desirable, stress discontinuities.
Mesh should not be refined to the extent that the size of the
smallest element is considerably smaller than the largest one.
Element Selection
Forms the foundation of FE modeling and analysis. Example: 4-node QUADS are preferred to 3-node triangular
elements.
Elements
Meshing examples:
Elements (continued)
More examples
Elements (continued)
Linear (4-node) Tetrahedron Quadratic (10-node)
Boundary Conditions
A critical aspect of the modeling is the proper
transformation of the actual boundary conditions to the loads/restraints set of the FE software. For example, Dynamic (Modal) analysis is very sensitive to the boundary conditions.
Solution strategy
Post processing
View the results with critical eyes.
Dont be impressed by color contours, and what might
seem to be a convincing output.
Elements = 2 565 Elements = 66 727 No. of equations = 311 421 No. of equations = 14 889
Source: http://lma.berkeley.edu/precision/
CMP Model
Pad
Sub-layer
Retaining Ring
Gap elements
60
62
64
66
68
70
72
74
76
-7.50 -10.00 -12.50 -15.00 -17.50 -20.00 Distance from center of w afer (m m ) 7 PSI 8 psi 3 PSI 5 PSI 9 PSI 10 PSI
Experimental Results
FEA Results with Retaining Ring Ring Pressure 8 PSI 6.95 7.411 4.612 40.273
Average Contact Pressure Maximum Contact Pressure Minimum Contact Pressure Pressure Non-uniformity
Final Thought