Transmission Electron

microscopy (TEM)


1)Introduction
2)Aparatus
3)Different modes
4)Resolution
5)TEM Vs SEM
6)Applications

Invention and Evolution of the modern TEM
In 1932, invented by E. Ruska et al.
In 1986, Ruska received the Nobel Prize

James Hillier
Radio Corporation of America. (RCA)
Ruska at Nobel prize meet Max Knoll and Ernst Ruska
Scheme of a Transmission Electron Microscope
Electron gun: The electrons are generated and
accelerated.

Condenser system: A set-up of different magnetic lenses
and apertures.

Objective lens: Important lens in the microscope since it
generates the first intermediate image.

Intermediate lens: Switching between imaging and
diffraction mode.

Projective lenses: Further magnification of second
intermediate image.

Image observation: Images and diffraction pattern can
can directly be observed on the
viewing screen.

Vacuum system: Because of strong interactions of
electron with matter, gas particles
must be absent in the column.
Diffraction pattern and image are simultaneously present in the TEM
Specimen Interaction
Switching from image mode to diffraction mode is easily achieved by changing
the strength of the intermediate lens.
Ernst Abbe
1840 - 1905
0.61
R.P. = ----------
N.A.
R.P. = the minimum distance between two object
N.A. = n (sin ) numeric aperture
n = index of refraction (light)
= half angle of illumination

1.Resolution limit of the light microscope = 380 nm, n=1.5 R.P = 0.172 nm~ 0.2 m

2. For TEM, = 1.23 / V^-2,
Energy (keV) 60 100 200
(nm) 0.005 0.0039 0.0028
R.P (nm) 0.003 0.0021 0.0017
Most TEMs will only have an actual resolution of:0.24 nm at 100KeV and 0.19 nm at 200kV
due to spherical and chromatic lens aberrations.



Louis de Broglie
1923
In electron microscopy, the refractive index cannot exceed 1.0.
Resolution
(Rule of thumb)
human eye => 0.2mm

light scope => 0.2m

SEM => 3nm

TEM => 0.2nm
Accelerating voltage
specimen contrast A) 40kev B) 80kv
TEM
SEM
Optical instrument that uses a lens to form an image


Gives information of the internal structure
A magnification of 300,000 times can be routinely
obtained for many materials

Not an optical instrument but Generates the
image by analyzing electrons emitted from a
specimen
Gives surface information for the specimen
A magnification of 100,000 times can be
achieved for certain specimens
Spores of the liverwort, Pallavicinia
Applications of TEM
The TEM is used heavily in both material science/metallurgy and the biological sciences.
micro structural analysis
interfacial analysis
crystal structure
magnifications up to 1,000,000 X => atomic resolution
small region elemental analysis
The observation of materials by transmission electron microscopy requires the use of
very thin samples, transparent to electrons accelerated to 100 keV-300 keV.

The specimen thickness needs to be less than 200 nm
Milestones in the History of Electron Microscopy
1897 Discovery of the electron by J.J. Thompson

1924 P. De Broglie: particle/wave dualism

1927 Hans Busch: Electron beams can be focused in an inhomogeneous magnetic field

1931 Max Knoll and Ernst Ruska built the first TEM

1938 Scanning transmission electron microscope (M. von Ardenne)

1939 First commercial TEM by Siemens (Ruska, von Borries)

1943 Electron energy-loss spectroscopy EELS (J. Hillier)

~1940 Basic theoretical work on electron optics and electron lenses (W. Glaser, O. Scherzer)

1951 X-ray spectroscopy (R. Castaing)

1956 First lattice image (J. Menter)

1957 Multi-slice method (J. Cowley, A. Moodie)

1964 First commercial SEM by Cambridge Instruments

~1970 HRTEM microscopes with a resolution better than 4

1986 Nobel prize for E.Ruska (together with G. Binning and H. Rohrer, who developed the Scanning
Tunneling Microscope)