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Lecture 11:
MOS Transistor
Prof. Niknejad
Department of EECS
Prof. A. Niknejad
Lecture Outline
CV Curve
Threshold Voltage
Overview
Cross-section and layout
I-V Curve
Prof. A. Niknejad
MOS Capacitor
Oxide (SiO2)
ox 3.9 0
Gate (n+ poly)
0
Body (p-type substrate)
Very Thin!
tox ~ 1nm
s 11.7 0
Prof. A. Niknejad
VGB VFB
QB QG
++++++++++++++++++
( x)
( x)
Prof. A. Niknejad
VGB VFB +
( x)
tox
++ + + + + + + ++
( x)
QB qN a X d (VGB )
Prof. A. Niknejad
Inversion
s
VGB VT
ns ni e
tox
xdep
++ + + + + + + ++
( x)
qs
kT
( x)
Na
Prof. A. Niknejad
Threshold Voltage
GB
VBS
s VBS 2 p
s
Vox Eox tox
tox Es
ox
qN a xdep qN a 2 s
2qN a (2 p )
Es
s
s
s qN a
s
1
VTn VFB 2 p
2q s N a (2 p )
Cox
Vox
Prof. A. Niknejad
Prof. A. Niknejad
dep
ac
m
cu
io
at
l
u
l et i o
on
i
s
QN (VGB )
QB ,max
VFB
VTn
VGB (V )
Prof. A. Niknejad
Numerical Example
N a 5 1016 cm 3
Calculate flat-band:
VFB (n p ) (550 (402)) 0.95V
tox
2 10-6 cm
1
VTn VFB 2 p
2q s N a (2 p )
Cox
Prof. A. Niknejad
Device is in accumulation
The entire voltage drop is across the oxide:
Vox VGB n p 2.5 0.55 (0.4)
5 V
Eox
10
tox
tox
2 106
cm
Prof. A. Niknejad
1 qN a
2
X
d ,max
2 s
2 sVB ,max
qN a
144nm
Prof. A. Niknejad
MOS CV Curve
QG
Cox
Cox
QN (VGB )
QB ,max
VFB
VTn
VGB (V )
VFB
VTn
VGB
Prof. A. Niknejad
Cdep
Cox
Cdep Cox
Cox
Cox
Ctot
Cdep
s tox
Cdep Cox
1
1
ox xdep
Cox
In accumulation mode the capacitance is just due to the
voltage drop across tox
Cdep
xdep
Cox
Prof. A. Niknejad
source
drain
diffusion regions
p+
n+
n+
p-type substrate
Prof. A. Niknejad
MOSFET Layout
poly gate
contact
G
B
p+
n+
n+
xj
p-type substrate
L
Prof. A. Niknejad
p+
n+
G
B
n+
p+
n+
xj
p-type substrate
NMOS
p+
xj
n-type substrate
PMOS
Prof. A. Niknejad
CMOS
G
p+
n+
n+
xj
n+
p+
p+
xj
n-type well
PMOS
NMOS
p-type substrate
Prof. A. Niknejad
Circuit Symbols
Prof. A. Niknejad
VDS
VGS
VT
VGS
Prof. A. Niknejad
I DS / k
non-linear resistor region
resistor region
I DS
constant current
VDS
VGS 3V
VGS
VGS 2V
VDS
Prof. A. Niknejad
G
D
n+
n+
p-type
NMOS
VDS 100mV
x
Inversion layer
channel
Prof. A. Niknejad
I DS
W
nCox (VGS VTn )VDS
L
Ey
Prof. A. Niknejad
W
nCox (VGS VTn )VDS
L
RW(VGS )
I DS n Cox (VGS VTn ) W
W