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Management using
MEMS and IOT
Internet of Things
Network of physical objects or things embedded with electronics,
software, sensors, and network connectivity which enable these
objects to collect and exchange data
Data is collected by the devices using existing technologies and
exchanged with other devices for advised action
Applications:
Home Automation
Manufacturing
Environment Monitoring
Medicine and Healthcare
z = 4 (1- ) L
E
t
Modified Stoneys
Equation
MEMS Sensors
MEMS Cantilever
Sensors
Active
Sensors
Electrostat
ic
Actuation
Electromagne
tic
Actuation
Optical
Readout
Passive
Sensors
Piezoelect
ric
Actuation
Capacitive
Readout
Capacitiv
e Sensors
Piezoelect
ric
Sensors
= i 1 + 2L3
1/4
Effect of Surface
Stresses
1/2
fluid = 1 + b
vac
4ch
-1/2
Re = wb2
4
[24]C. Van Eysden and J. Sader, "Frequency response of cantilever beams immersed in viscous
fluids with applications to the atomic force microscope: Arbitrary mode order",J. Appl. Phys., vol.
101, no. 4, p. 044908, 2007.