BASIC VACUUM

PRACTICE

Why is a Vacuum Needed?

To move a particle in a (straight) line over a large distance

(Page 5 manual)

Why is a Vacuum Needed?

Atmosphere
Contamination
(usually water)

(High)Vacuum
Clean surface

To provide a clean surface

HOW DO WE CREATE A
VACUUM?

VACUUM PUMPING METHODS

VACUUM PUMPS
(METHODS)
Gas Transfer
Vacuum Pump

Entrapment
Vacuum Pump
Kinetic
Vacuum Pump

Positive Displacement
Vacuum Pump
Rotary
Pump

Reciprocating
Displacement Pump

Drag
Pump

Diaphragm
Pump

Liquid Ring
Pump

Gaseous
Ring Pump

Piston
Pump

Rotary
Piston Pump

Turbine
Pump

Multiple Vane
Rotary Pump

Dry
Pump

Fluid Entrainment
Pump

Ion Transfer
Pump

Ejector
Pump
Liquid Jet
Pump

Diffusion
Pump
Diffusion
Ejector Pump

Sliding Vane
Rotary Pump

Axial Flow
Pump

Gas Jet
Pump

Rotary
Plunger Pump

Radial Flow
Pump

Vapor Jet
Pump

Roots
Pump

Adsorption
Pump
Cold Trap

Bulk Getter
Pump

Getter
Pump

Getter Ion
Pump

Sublimation
Pump

Self Purifying
Diffusion Pump

Evaporation
Ion Pump

Fractionating
Diffusion Pump

Sputter Ion
Pump

Molecular
Drag Pump

Cryopump

Turbomolecular
Pump

Condenser

BAROMETER

10.321
mm

Mercury: 13.58 times

heavier than water:
Column is 13.58 x shorter :
10321 mm/13.58=760 mm
(= 760 Torr)

WATER

760
mm

29,9
in

MERCURY
(Page 12 manual)

PRESSURE OF 1 STANDARD
ATMOSPHERE:
760 TORR, 1013 mbar
AT SEA LEVEL, 0O C AND 45O LATITUDE

Pressure Equivalents
Atmospheric Pressure (Standard) =
0
14.7
29.9
760
760
760,000
101,325
1.013
1013

gauge pressure (psig)

pounds per square inch (psia)
inches of mercury
millimeter of mercury
torr
millitorr or microns
pascal
bar
millibar

THE ATMOSPHERE IS A MIXTURE OF GASES

PARTIAL PRESSURES OF GASES CORRESPOND TO THEIR RELATIVE VOLUMES

GAS

Nitrogen
Oxygen
Argon
Carbon Dioxide
Neon
Helium
Krypton
Hydrogen
Xenon
Water

SYMBOL

N2
O2
A
CO2
Ne
He
Kr
H2
X
H2 O

PERCENT BY
VOLUME

78
21
0.93
0.03
0.0018
0.0005
0.0001
0.00005
0.0000087
Variable
(Page 13 manual)

PARTIAL PRESSURE
PASCAL
TORR

593
158
7.1
0.25
1.4 x 10-2
4.0 x 10-3
8.7 x 10-4
4.0 x 10-4
6.6 x 10-5
5 to 50

79,000
21,000
940
33
1.8
5.3 x 10-1
1.1 x 10-1
5.1 x 10-2
8.7 x 10-3
665 to 6650

VAPOR PRESSURE OF WATER AT

VARIOUS TEMPERATURES
P (mbar)

T (O C)
100

(BOILING)

32

25
0

1013

(FREEZING)

6.4
0.13

-40
-78.5

(DRY ICE)

6.6 x 10 -4

-196

(LIQUID NITROGEN)

10 -24

(Page 14 manual)

(Page 15 manual)

Vapor Pressure of some Solids

(Page 15 manual)

PRESSURE RANGES
RANGE

PRESSURE

ROUGH (LOW) VACUUM

759 TO 1 x 10 -3 (mbar)

HIGH VACUUM

1 x 10 -3 TO 1 x 10 -8 (mbar)

ULTRA HIGH VACUUM

LESS THAN 1 x 10 -8 (mbar)

(Page 17 manual)

GAS FLOW
CONDUCTANCE

(Page 24 manual)

Viscous and Molecular Flow

Viscous Flow
(momentum transfer
between molecules)

Molecular Flow
(molecules move
independently)

FLOW REGIMES
Viscous Flow:
Distance between molecules is small; collisions between
molecules dominate; flow through momentum transfer;
generally P greater than 0.1 mbar
Transition Flow:
Region between viscous and molecular flow
Molecular Flow:
Distance between molecules is large; collisions between
molecules and wall dominate; flow through random motion;
generally P smaller than 10-3 mbar
(Page 25 manual)

MEAN FREE PATH

MOLECULAR DENSITY AND MEAN FREE PATH

1013 mbar (atm)

1 x 10-3 mbar

1 x 10-9 mbar

#
mol/cm3

3 x 10 19
(30 million trillion)

4 x 10 13
(40 trillion)

4 x 10 7
(40 million)

MFP

2.5 x 10-6 in
6.4 x 10-5 mm

2 inches
5.1 cm

31 miles
50 km

FLOW REGIMES

Viscous Flow:

Mean Free Path

is less than 0.01
Characteristic Dimension

Transition Flow:

Mean Free Path

Characteristic Dimension

Molecular Flow:

Mean Free Path

is greater than 1
Characteristic Dimension

is between 0.01 and 1

Conductance in Viscous
Flow

Under viscous flow conditions doubling the

pipe diameter increases the conductance
sixteen times.
The conductance is INVERSELY related to
the pipe length
(Page 28 manual)

Conductance in Molecular
Flow

Under molecular flow conditions doubling

the pipe diameter increases the conductance
eight times.
The conductance is INVERSELY related to
the pipe length.

Series Conductance
RT = R 1 + R 2

SYSTEM

1 = 1 + 1
CT

C1

C2

1 = C 1 + C2
CT

C1 x C2

C1
C2

CT = C1 x C2
C 1 + C2

PUMP
(Page 29 manual)

GAS LOAD
Outgassing

Permeation
Real
Leaks

Diffusion

GAS LOAD (Q) IS EXPRESSED IN:

mbar liters per second

Virtual
Backstreaming

Pumpdown Curve
10+1

Pressure (mbar)

10-1

Volume

10-3
10-5

Surface Desorption

10-7
Diffusion
10-9
10-11 1
10

Permeation
10 3

10 5

10 7 10 9 10 11 10 13 10 15 10 17
Time (sec)

Roughing Pumps

2
(Page 39 manual)

VACUUM PUMPING METHODS

VACUUM PUMPS
(METHODS)
Gas Transfer
Vacuum Pump

Entrapment
Vacuum Pump
Kinetic
Vacuum Pump

Positive Displacement
Vacuum Pump
Rotary
Pump

Reciprocating
Displacement Pump

Drag
Pump

Diaphragm
Pump

Liquid Ring
Pump

Gaseous
Ring Pump

Piston
Pump

Rotary
Piston Pump

Turbine
Pump

Multiple Vane
Rotary Pump

Dry
Pump

Fluid Entrainment
Pump

Ion Transfer
Pump

Ejector
Pump
Liquid Jet
Pump

Diffusion
Pump
Diffusion
Ejector Pump

Sliding Vane
Rotary Pump

Axial Flow
Pump

Gas Jet
Pump

Rotary
Plunger Pump

Radial Flow
Pump

Vapor Jet
Pump

Roots
Pump

Adsorption
Pump
Cold Trap

Bulk Getter
Pump

Getter
Pump

Getter Ion
Pump

Sublimation
Pump

Self Purifying
Diffusion Pump

Evaporation
Ion Pump

Fractionating
Diffusion Pump

Sputter Ion
Pump

Molecular
Drag Pump

Cryopump

Turbomolecular
Pump

Condenser

PUMP OPERATING RANGES

Ultra High
Vacuum

Rough Vacuum

High Vacuum

Rotary Vane Mechanical Pump

Rotary Piston Mechanical Pump
Dry Mechanical Pump
Sorption Pump
Blower/Booster Pump
Venturi Pump
High Vac. Pumps
Ultra-High Vac. Pumps
10-12

10-10

10-8

10-6
10-4
P (mbar)

10-2

10+2

VACUUM SYSTEM USE

9

1
2
3
3a
4
5
6
7
8
9

8
1

4
7
2
6
3a

3
(Page 44 manual)

Chamber
High Vac. Pump
Roughing Pump
Foreline Pump
Hi-Vac. Valve
Roughing Valve
Foreline Valve
Vent Valve
Roughing Gauge
High Vac. Gauge

Rotary Vane, Oil-Sealed

Mechanical Pump

(Page 45 manual)

Pump Mechanism

How the Pump Works

(Page 46 manual)

OIL BACKSTREAMING

PRESSURE LEVELS: LESS THAN 0.2 mbar

The Molecular Sieve/Zeolite

Trap

(Page 48 manual)

Dry Vacuum Pumps

Blower/Booster Pump

(Page 61 manual)

One Stage Roots Blower

Pump Assembly

VACUUM SYSTEM USE

12

1
2
3
4
5
6
7
8
9
10
11
12

11
1

3
2

9
10
8

Chamber
Foreline
Roughing Valve
Roughing Gauge
Roughing Pump
Foreline
Foreline Valve
Foreline Gauge
High Vacuum Valve
Booster/Blower
Vent Valve
High Vacuum Gauge

6
5
(Page 62 manual)

Sorption Pump Components

(Page 54 manual)

Vapor Pressure

(Page 56 manual)

Cryo-condensation

Cryo-sorption

(Page 55 manual)

HIGH VACUUM PUMPS

3
(Page 63 manual)

VACUUM PUMPING METHODS

VACUUM PUMPS
(METHODS)
Gas Transfer
Vacuum Pump

Entrapment
Vacuum Pump
Kinetic
Vacuum Pump

Positive Displacement
Vacuum Pump
Rotary
Pump

Reciprocating
Displacement Pump
Diaphragm
Pump

Liquid Ring
Pump

Piston
Pump

Rotary
Piston Pump

Multiple Vane
Rotary Pump

Dry
Pump

Drag
Pump

Fluid Entrainment
Pump

Liquid Jet
Pump

Diffusion
Pump
Diffusion
Ejector Pump

Sliding Vane
Rotary Pump

Axial Flow
Pump

Gas Jet
Pump

Rotary
Plunger Pump

Radial Flow
Pump

Vapor Jet
Pump

Roots
Pump

Ion Transfer
Pump

Ejector
Pump

Gaseous
Ring Pump
Turbine
Pump

Adsorption
Pump
Cold Trap

Bulk Getter
Pump

Getter
Pump

Getter Ion
Pump

Sublimation
Pump

Self Purifying
Diffusion Pump

Evaporation
Ion Pump

Fractionating
Diffusion Pump

Sputter Ion
Pump

Molecular
Drag Pump

Cryopump

Turbomolecular
Pump

Condenser

PUMP OPERATING RANGES

Ultra High
Vacuum

High Vacuum

Rough Vacuum

Roughing Pumps
Liquid Nitrogen Trap
Diffusion Pump
Turbo Pump
Cryo Pump
Ion Pump
Tit. Subl. Pump
10-12

10-10

10-8

10-6
10-4
P (Torr)

10-2

10+2

VACUUM SYSTEM USE

9

8
1

1 Chamber
2 High Vac. Pump
3 Roughing Pump
3a Fore Pump
4 Hi-Vac. Valve
5 Roughing Valve
6 Foreline Valve
7 Vent Valve
8 Roughing Gauge
9 High Vac. Gauge

4
8
22
6
3a

Oil Diffusion Pump

Pump Construction

(Page 66 manual)

How the Pump Works

How the Pump Works

First stage vapors are

separated from others

Pumping Speed
Pumping Speed (Air)

Critical Point
1. Compression Ratio Limit
2. Constant Speed
3. Constant Q (Overload)
4. Mechanical Pump Effect

10-10

10--3
Inlet Pressure (Torr)

10--1

Maximum Tolerable Foreline

Pressure

(Page 73 manual)

LN2 reservoir with baffles

(Page 78 manual)

How the LN2 Trap Works

Approximate Vapor
Pressure (mbar)

Gas
Water (H2O)
Argon (A)
Carbon Dioxide (CO2)
Carbon Monoxide (CO)
Helium (He)
Hydrogen (H2)
Oxygen (O2)
Neon (Ne)
Nitrogen (N2)
Solvents

(Page 79 manual)

10-22
500
10 -7
>760
>760
>760
350
>760
760
<10 -10

Turbomolecular Pump
INLET FLANGE

ROTOR BODY

STATOR BLADES
HIGH PUMPING SPEED

HIGH COMPRESSION

BEARING
EXHAUST
HIGH FREQ. MOTOR
BEARING

(Page 81 manual)

Rotor - stator assembly

(Page 82 manual)

Pump Operation
Molecule

Moving Wall with Speed V

Principle of the Turbomolecular Pump
(Page 83 manual)

Roughing through the turbo

6

7
1

4
5
22

3
(Page 91 manual)

1
2
3
4
5
6

Chamber
Turbo Pump
Roughing Pump
Vent Valve
Roughing Gauge
High Vac. Gauge

Pumping by Cryocondensation

Cryosorption in charcoal

(Page 98 manual)

Charcoal placement

Gauges

5
(Page 123 manual)

Gauge Operating Ranges

Ultra High
Vacuum

Rough Vacuum

High Vacuum

Bourdon Gauge
Capacitance Manometer
Thermocouple Gauge
Pirani Gauge
Hot Fil. Ion Gauge
Cold Cathode Gauge
Residual Gas Analyzer
McLeod Gauge
Spinning Rotor Gauge

10-12

10-10

10-8

10-6
10-4
P (mbar)

10-2

10+2

Bourdon Gauge

How the gauge works

Heat Transfer Gauges

Thermocouple gauge
and
Pirani Gauge

Thermocouple Gauge

How the gauge works

Ionization gauges

Ionization current is the

measure of vacuum

Residual Gas Analyzer

QUADRUPOLE
HEAD

CONTROL UNIT

How the RGA works

(A)

RELATIVE INTENSITY

RGA SPECTRUM

H2 O
H2

NORMAL (UNBAKED)
SYSTEM

N2,, CO
CO2
MASS NUMBER (A.M.U.)

(B)

RELATIVE INTENSITY

RGA SPECTRUM
N2
SYSTEM WITH
AIR LEAK
H2 O
O2
H2

CO2
MASS NUMBER (A.M.U.)

LEAK DETECTION

9
(Page 249 manual)

Introduction

Problems that appear to be

Leaks
Diffusion

Permeation
Real
Leaks

Outgassing

Virtual
Backstreaming

Trapped Volumes

Vented Screw

Double O ring sealed shafts

Atmosphere
(760 torr)

Vacuum

Differential Pumping
Atmosphere
(1013 mbar)

Vacuum

To Pump

1 mbar

PERMEATION LEAKS
Permeation leaks are different
than real leaks because the only way
to stop them is to change to a less
permeable material

One standard cubic

centimeter/sec
(std. cc/sec)

Leak rate of 1 x 10 std cc/sec

-1

Leak rate of 1 x 10-3 std cc/sec

Leak Rates over Time

LEAK RATES
10 -1 STD CC/SEC --- 1 CC/10 SEC
10 -3 STD CC/SEC --- 3 CC/HOUR
10 -5 STD CC/SEC --- 1 CC/DAY
10 -6 STD CC/SEC --- 1 CC/2 WEEKS
10 -7 STD CC/SEC --- 3 CC/YEAR
10 -9 STD CC/SEC --- 1 CC/30 YEARS

Why Helium is used

HELIUM

Helium is very light and small

Low concentration in air (0.0005%)
Permits dynamic testing
Permits non-destructive testing
Helium is safe

CONVENTIONAL LEAK DETECTOR

1
12

10

2
11

8
3

6
4

1
2
3
4
5
6
7
8
9
10
11
12

Test Piece
Test Port
High Vac. Pump
Roughing Pump
Fore Pump
RoughingValve
Test Valve
Pump Valve
Spectrometer Tube
Cold Trap
Roughing Gauge
Vent Valve

Ion Separation in Magnetic

Field
Ion Gauge

Ion Source
To Pre-Amplifier

Magnetic Field
Deflects He Ions
90O, other ions
more or less than
90O.

Lighter ions:
more

Collector
Heavier ions:
less

He ions pass
through slit and
are collected

Tracer probe leak detection

technique