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8D Report : MPK EC8295 Shoot Up

on May/22
SZ Media
Jul 15, 2016
07/01 update
D0: Awareness Of The Problem By Qian Hu

Symptom or event : MPK EC8295(Delta TDP Final Function) error code trigger by MAP4 on
May/22 at Final test process from 0.5% to 7%. Observed disk sputter date(Apr/14)
dependency
Reported date: 31 May 2016
Immediate response :
Establish the team/Media investigation
On-hold all sputter date Apr/14 MPK parts in Media site.

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07/01 update
D1: Establish The Team By Qian Hu

Name Area Email

Team Leader : Wei Jin SZ Engineering

Technical Team : Shizhong Luo SZ Material&FA Lab

Linkai Guo SZ Charact

Hong Yu SZ Yield

Manuel Tomas SZ Sputter


Eric OBrien SJ FA

Hong Guo SZ Reliability&Chemical Lab

Jun Zhang SZ Front End

Zhenbang Yang SZ Back End


Supporting Team: Juan Yang SZ Yield

Ti Zhang SZ QC

Qian Hu SZ PE

Dong Wang SZ Production

Peisen Huang SZ Facility


Xiangshuang Zeng SZ QA

Fujio Harako FJ MAL


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07/01 update
D2: Define The Problem By Qian Hu

Problem statement: MPK EC8295(Delta TDP Final Function) error code trigger by MAP4 on
May/22 at Final test process from 0.5% to 7%. Observed disk sputter date(Apr/14) dependency

Media Investigation Information as below:


Observed MPK failure from sputter date Apr.14
3pm to 9pm.

Based on EC8295 fail disk cross line data, no


process tool dependency.

Fail disk lube start/end time for phase2 and phase4 is close, comparing with other process.
Shipping cassette(1.27mm thickness) is common between phase2 and phase4, and unique from
other products during that time period.
Phase Wash Sputter Lube FTP UV Test Bagging

Phase1 Apr15 02:44-08:56 Apr15 06:12-21:11 Apr15 06:00-22:00


Phase2 Apr14 15:22-19:45 Apr14 18:35-20:49 Apr14 21:30-Apr15 02:01 Apr15 02:51-07:17 Apr15 04:28-09:00 Apr15 09:40-Apr16 01:02 Apr15 10:00-Apr16 02:00
Phase3 Apr15 07:32-07:35
Phase4 Apr14 14:08-20:54 Apr14 15:02-21:31 Apr14 21:00-Apr15 02:07 Apr15 03:29-15:46 Apr15 05:25-15:15 Apr15 10:00-20:00
Phase5 Apr15 05:06-09:00 Apr15 08:08-11:34 Apr15 09:23-Apr16 00:11
11001+6024=1 6361+5974=12 5971+11371+75 8581+11818+37 17405+10187+2191+
Volume 11450+6074=17524
7025 335 =17417 14=24113 5661=35444

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D3: Containment Actions 07/01 update
By Tony

No. Containment Actions Owner CP Status


1 HDD PRB stop load MPK affected disks PRB May.31/2016 Done

2 Check MPK media inventory, on hold all affected parts SZ Media May.31/2016 Done

3 Immediately conference call between WW team on RC WW team Daily update Ongoing


investigation for MPK
4 To stop use affected maintenance oil(Mobil SHC 626) SZ Media Jun.15/2016 Done

5 HDD PRB stop load AR8 affected disks HDD PRB Jun.28/2016 Done

6 Immediately alert to GSP for Jaguar risk assessment SZ Media Jun.28/2016 Done

7 HDD GSP stop load Jaguar affected disks HDD GSP Jun.28/2016 Done

8 SZ media on hold all suspected product inventory SZ Media Jun.28/2016 Done

9 Sort and scrap return shipping cassettes for all product SZ Media Jul.15/2016 Done
from impact period

10 Scrap all of suspected disks in SZ media HDD&SZ Media Jul.08/2016 Done

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D3: Containment Actions 07/01 update
By Tony

Suspected disks inventory in HDD and Media site

SGP Total Remain


PRB Remained Ship to GSP Remained SZ Remained
Product Ship to PRB Ship to SGP Remained Inventory-
Inventory GSP Inventory Inventory
Inventory Media level
CBF 0 0 NA NA 0 0 6207 6207
CEP 835 0 NA NA NA NA 0 0
AR8 32195 0 66 0 NA NA 0 0
APK 0 0 NA NA NA NA 0 0
MPK 23488 0 NA NA NA NA 8 8
FB6 279 0 NA NA NA NA 0 0
Libra 4524 0 NA NA NA NA 734 734
Jaguar 50 0 59618 450 NA NA 1082 1532
Total 61371 0 59684 450 0 0 8031 8481

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07/08 update
D4: Identify And Evaluate Root Causes By Tony

Why-Why Analysis
Why does this cause occur?

Why1:Why MPK EC8295 trigger from 0.5% to 7%?


Answer :Because MPK HDD TDP shift and TD FA indicated Si smear on head.

Why2:Why failed head had Si-smear?


Answer :Because head picked up Si contamination from disk surface.

Why3:Why disk surface had Si contamination?


Answer :Suspected because disk was contaminated by shipping cassette.

Why4:Why shipping cassette was contaminated?


Answer :Suspected because shipping cassette was contaminated by operators gloves.

Why5:Why operators gloves were contaminated?


Answer :Suspected because operator touched lift maintenance oil which contained high Si level.

Occurrence cause : Suspected disk was cross-contaminated by Mobil maintenance oil which contained high Si level.

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07/08 update
D4: Identify And Evaluate Root Causes By Tony

HDD PRB TD and MSL result found Si-Smear on the failed head from EC8295 fail drive
Disk dTDP_OD dTDP_ID
HDDSN PROC PFCD PHD HDDASMDATE LI TI MSL result SEM image Remark
lot (Final-Func) (Final-Func)

6800 8295 3 20160522144737 LG 97 6417 - - Normal

EDX

PEJYBNMS 6800 8295 4 20160522144737 LG 97 6417 -30 -27 Si-smear

Refer EDX on
6800 8295 5 20160522144737 LG 97 6417 - - Si-smear
head#4**

**EDX on bad head in the same drive can refer Si-smear on other heads.

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dTDP by Sputter Date 07/08 update
By Tony

Exclude
Bad
sputter
period
High dTDP on disk
sputter date Apr/14
indicated media was
contaminated

dTDP back to normal


after exclude 3pm-
9pm

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07/08 update
D4: Identify And Evaluate Root Causes By Tony

How disks are contaminated (Hypothesis)


The clean room material lift stations (1.2M height between clean room and external environment)
were conducted monthly PM & cleaning on April 14. Maintenance oil (Mobil SHC 626) was used for
the spindle lubricant, which was detected with higher level of Siloxane (24461.3ng/g) than its normal
level (480.4ng/g). Its suspected contaminated before use. Pls. ref.to suspected path:
Maintenance oil with
Touch oil with glove Shipping cassette
high Siloxane

How affected time defined LifLift diagram

Oil
Sputter date Apr.14 3:00pm~9:00pm is suspected based on the following information applied
for
spindle
s
MPK failure from sputter date Apr.14 3:00pm~9:00pm

Each type shipping cassette transfer two times per shift on Apr.14 for all product, no accurate time traceability

Lift station PM during 8:30am ~16:30 on Apr.14, cleaning was performed during 16:00~19:00.

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07/08 update
D4: Identify And Evaluate Root Causes By Tony

Si Source Hunting

Many different analyses were conducted looking for evidence of Si present on Mars-KP Media from affected timeframe,
with no obvious differences found between affected and control samples

TOF-SIMS analysis of extractions showed higher levels of siloxanes on the clear inner poly bag from the affected lot,
relative to the control bag, as well as higher levels on the affected cassette relative to the control cassette.

Peaks associated with Irgafos 168 (a common anti-oxidant/process stabilizer) were also observed on the affected
metallized bag, and on the affected cassette.Do not believe this is related to Si smear issue.

WD
Confidential
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07/08 update
D4: Identify And Evaluate Root Causes By Tony
Si Source Hunting GCMS Outgassing result
Sample Name Outgas (ug/g) Siloxane (ng/g) Silane (ng/g) Remark

Dry paint 2191.634 26.772 Not detected from Facility


Silicone sealant 11642.372 306886.061 Not detected from Facility
Mobil elevator lubricant oil - In bottle ready for
1144.232 24461.267 Not detected from Facility
use
New Mobil elevator lubricant oil Original
512.928 480.432 Not detected from Facility
Packaging
paint dilution 51921.020 181.332 Not detected from Facility
pure fresh paint 225.283 391.212 Not detected from Facility
Pallet Cardboard 1.392 9.477 Not detected from ENCO wash
Pallet bottom Cardboard 5.622 16.925 Not detected from ENCO wash
Poly-foam 48.171 10.168 Not detected from ENCO wash
Tape 41.979 10.302 Not detected from ENCO wash

Siloxane containing materials were found to have been used in and around the production factory during the
affected timeframe

While the silicone sealant for toilet maintenance contains very high siloxane, the timing does not match the
problem vintage timeframe so we find no clear linkage to the issue. Also, toilet maintenance was done in sister
building across street from media mfg building (connected by tunnel)

New Mobil lubricant oil that had been transferred to a smaller container/bottle prior to use contains high siloxane,
and was used during maintenance of the elevator during the affected timeframe.

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07/14 update

D5: Identify And Evaluate Corrective Actions By Tony

Hypothesis root
Corrective Actions Owner CP Status
cause

Only use maintenance grease on monthly lift PM Sam Huang Jun.15 Done

WW contamination control team revisit updated lift


Dong Wang Jul.20 Ongoing
station PM procedure

Media was cross- Enhance training unbag


contaminated by operators about the risk of cross
Istvan.Mcr Jul.04 Done
Mobil maintenance contamination and improper
Optimize
oil which detected handling.
shipping
high Si level
cassette unbag
activity in lift Optimize cleaning cassette (and
station other consumables) unbag flow
Xiaohui Zeng Jul.14 Done
to reduce risk of cross
contamination

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07/14 update

D6: Implement And Validate Corrective Actions By Tony

Hypothesis root
Corrective Actions Owner CP Status
cause
Media was cross-
contaminated by
Mobil maintenance Only use maintenance grease on monthly lift PM Sam Huang Jun.15 Done
oil which detected
high Si level

Siloxanes
Spec of PE
Outgas
Sample Name
(ug/g)
Siloxane (ng/g) Bag for Silane (ng/g)
reference(n
g/g)
Mobil XHP222 grease
703.062 4.639 10 Not detected
01
Mobil XHP222 grease
922.398 6.465 10 Not detected
02

GCMS result for maintenance grease


2points for same sample

FTIR result for maintenance grease


Red: maintenance grease spectrum Blue: Standard Siloxane spectrum

FTIR and GCMS result shows Si level of Mobil XHP222 maintenance grease is acceptable
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07/15 update

D6: Implement And Validate Corrective Actions By Tony

Hypothesis root
Corrective Actions Owner CP Status
cause
Media was cross-
contaminated by
WW contamination control team revisit updated lift
Mobil maintenance Dong Wang Jul.19 Ongoing
station PM procedure
oil which detected
high Si level

Experiment Plan:
Facility select 3 lifts including the affected lifts to decontamination
Conduct updated PM on above lifts
Pick up shipping cassette for GCMS testing, before and after maintenance every 4 hours for 6 data points
of each. (Total 12 data points per lift)
Experiment execution plan: Week of Jul 19
GCMS result CP: Jul 29

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07/13 update

D6: Implement And Validate Corrective Actions By Tony

Hypothesis root
Corrective Actions Owner CP Status
cause
Enhance training unbag
operators about the risk of cross
Media was cross- Optimize Dong Wang Jul.04 Done
contamination and improper
contaminated by shipping handling.
Mobil maintenance cassette unbag
oil which detected activity in lift Optimize cleaning cassette (and
high Si level station other consumables) unbag flow
Xiaohui Zeng Jul.14 Done
to reduce risk of cross
contamination

Training Record

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07/15 update

D6: Implement And Validate Corrective Actions By Tony

Optimize shipping cassette unbag activity in lift station

1.Move the shipping cassette from pallet 2.Move the rack with shipping cassette 3.Open outer PE bag w/ double gloves
in corridor to the rack in elevator by from elevator to outer transfer room by in outer transfer room by C/R operator
unpacking room operator A C/R operator B with double gloves B

Notes
1)Operator B can not touch inner bag
2)Operator C take out inner bag from operator B
3)Operator C take off outer gloves and pull the
shipping cassette to C/R
4)Put cassettes removed outer bag to rack B by
4.Move the shipping cassette w/outer PE operator C
bag by operator B to another C/R
operator C between outer and inner
transfer room
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07/13 update

D6: Implement And Validate Corrective Actions By Tony

Optimize shipping cassette unbag activity in lift station

Previous Unbag Procedure New Unbag Procedure

0.2m air particle level at transfer room shows obvious improvement for new
unbag procedure comparing to previous unbag procedure

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07/13 update

D6: Implement And Validate Corrective Actions By Tony

Optimize shipping cassette unbag activity in lift station

Previous Unbag Procedure New Unbag Procedure


Same operator in step4 testing for operator C in step4

Surface particle level for operators gowning shows obvious improvement for new
unbag procedure comparing to previous unbag procedure

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07/13 update

D6: Implement And Validate Corrective Actions By Tony

Optimize shipping cassette unbag activity in lift station

Previous Unbag Procedure New Unbag Procedure


Same operator in step4 testing for operator C in step4

LPC level for operators gloves shows obvious improvement for new unbag
procedure comparing to previous unbag procedure

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D7: Prevent Similar Occurrences 07/15 update
By Tony

Hypothesis root
Preventive Actions Owner CP Status
cause
Review scope: <<WI-HGST-01Facility Warehouse Management
Procedure>> & <<WI-HGST-09 Facility Maintenance Working
Facility material
Instruction>>
storage/handling
Sam
enhancement to Focus areas: a) Material control (Approved/designated); b) Storage Jul.20 Ongoing
Huang
prevent cross- (Separation, area/material condition, EOL control etc.); c) Handling
contamination (Distribution, usage condition, temporary storage & disposal etc.)
Method: a) Update the instructions; b) Re-train technicians
Review scope: Clean room environment relative system (MAU, Air-
shower, C/R Exhaust etc.)
Media was cross- Review facility
contaminated by Focus areas: a) materials/tools (approved/designated, Si free material
PM to eliminate
Mobil maintenance etc.); b) Maintenance method (PCN/C & C approval process, Sam
risk of impacting Jul.29 Ongoing
oil which detected particle/outgas avoidances, cross-contamination rules; release for use Huang
clean room
high Si level standard etc.)
environment
Method: a) Pull the facility PM list; b) Review and update in PM system
(Maximo); c) Re-train technicians
Employee clean room cosmetic contamination control training Jun.19 Done
Extend contamination monitoring to SZ shipping cassette cleaning
Overall Jul.E Ongoing
vendor facility Prakash.
contamination
Cross functional audits for grease from CC, QA, Facility, EE, ELM inside Von
improvements Jul.E Ongoing
and outside CR
Extend material purchase control to non-clean room used item Sep. E Ongoing

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D7: Prevent Similar Occurrences 07/13 update
By Tony

Hypothesis root
Preventive Actions Owner CP Status
cause
Media was cross- Employee clean room cosmetic contamination control training Jun.19 Done
contaminated by Overall
Extend contamination monitoring to SZ shipping cassette cleaning Dong
Mobil maintenance contamination Jul.E Ongoing
vendor facility Wang
oil which detected improvements
high Si level Extend material purchase control to non-clean room used item Sep. E Ongoing

Cosmetic Check Result


Wk Area Total Pass Fail Fail Rate Pass rate
2nd Floor 7047 6014 1033 14.66% 85.34%
1st Floor 5182 4452 730 14.09% 85.91%
wk25 Phase 6 789 665 124 15.72% 84.28%
Tape 1605 1465 140 8.72% 91.28%
Total 14623 12596 2027 13.86% 86.14%
2nd Floor 6491 6078 413 6.36% 93.64%
1st Floor 5026 4606 420 8.36% 91.64%
wk26 Phase 6 681 620 61 8.96% 91.04%
Tape 1605 1493 112 6.98% 93.02%
Total 13803 12797 1006 7.29% 92.71%

Fail rate shows down trend after cosmetic contamination control implemented

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