Electrical Review

for using MEMS

Duy-Son Nguyen
Mar 2017
 Contents
1. Discrete component: R, L, C
2. RLC circuits: DC, AC, transient
response, stable response.
 Resistor R
i R i C i L
+ - + - + -
u u u

1 di
u idt uL
C dt

q Cu
q idt
 Resistor R
Conductive materials: metal
Al ( good adhesive on silicon Si, cheap
oxidation, low melt temperature)
Au ( poor adhesive on Si, need adhesive
layer Cr, expensive, no oxidation)

doping Increasing electrical conductivity

Semiconductor: Si Adding P -> p-type
Adding B -> n-type
1 cm3 of metal or Si = order of 1022 atoms
- Metal: 1022 free electrons
- Si at 200C: 4.2x1022 atoms, 2.51013free electrons and2.51013holes
The addition of 0.001% of As donates an extra 10 17free electrons

Insulate materials: SiO2, Si3N4, Al2O3

 Resistor - Conductivity
: electrical resistivity : conductivity

[] =.m
[]=S/m

: electrical resistivity

Image: internet

How to make resistors on Si wafer?

 Resistor - Conductivity
Wafer 4 (100 mm) or 6 (150 mm)
Thickness 200 m 1 mm
(Regular: 400 500 m)

All Si wafers are doped!

Wafer ingot
 Resistor - Conductivity
: electrical resistivity

:conductivity

[] =.m
S []=S/m
A rough summary
Resistivity, Conductivity
Material
(m)
Superconductor 0 qe= 1.6e-19 [C]
s
Metals 108 : concentration of electrons and holes
: mobility of electrons and holes
Semiconductors Variable
Electrolytes Variable Semiconductor:

Insulators 1016
Superinsulators : donor atoms /m3

For p-type doping : acceptor atoms /m3
: intrinsic concentration
(= 1.5x1016/m3 room t0)
For n-type doping
 Resistor - Conductivity
: electrical resistivity

=1mm
S = 50x50 m
 : electrical resistivity

==
, /

Calculate Rsheet above?

Capacitor C

 Capacitor C

Calculate the capacitance?

Fabrication?
4 Resonator
 Example of MEMS capacitive

Flow
sensor

Accelerometer of iphone4
DC, AC circuit
 DC, AC circuit

https://en.wikipedia.org/wiki/Capacitor
http://www.electronics-tutorials.ws/rc/rc_1.html
 Electrical force

ttp://www.df.unipi.it/~macchi/TEACHING/FISICA2/PROBLEMS/capacitorforce.pdf