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Tai-Ran Hsu
Room 117A, Engineering Building
Pre-requisites: MatE 25, ME 106 and ME 154, or with consent of the Instructor
To be able to explain the basic and relevant design principles of MEMS and
microsystems.
To learn the scaling laws for miniaturization.
To be able to identify the optimum microfabrication and packaging techniques
for microdevices and systems.
Microfabrication techniques,
MEMS Packaging
Editor and author: Tai-Ran Hsu
Institute of Electrical Engineers, United Kingdom
2004 (ISBN 0-86341-335-8)
Fundamentals of Microfabrications
Author: Marc Madou, CRC Press, 2001
Self-Study Project: 25% (Due on the same day of the final exam)
(See 2005 projects for examples)
Objective:
Project Teams:
Deliverables:
11. Micro heat pipes and their applications (Yong Chang Li)
Polymer for MEMS and microfluidics (Fredrick Tai and Greg Barker)
Micro robots for in-vivo diagnosis (Kyle Chang, Alexandra Pham and Sang Nguyen)
Design of Masks for photolithographic process (Kuldeep Narwat and Deval Shah)
Complete airbag system for automobile safety (Harish Penmethsa and Pavan Murukatla)
Self-Study Projects in 2009
A. Biomedical devices
B. Mobile telecommunication equipment
C. Wireless sensors including GPS