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ABSTRACT

Sri Haryati
Why writing an
abstract?
An abstract is a brief, comprehensive
summary of the contents of the article,
it allows readers to survey the
contents of an article quickly and, like
a title, it enables persons interested in
the document to retrieve it from
abstracting and indexing database.
Most journals require abstracts to
conform to a formal structure within a
word count of, usually, 200–250 words.
Good Abstract
• Accurate
• Non evaluative (report)
• Coherent and readable
• Concise
International Journal of Instruction
An abstract or a report empirical study:
• The problem under investigation (in
one sentence if possible)
• The participants, specifying pertinent
characteristics such as age, sex, and
ethic and/or racial group; in animal
research, specifying genus or
species
• The essential of study method
• The basic findings, including the
effect sizes and confidence intervals
and/or statistical significance levels;
and;
• The conclusions and implications or
applications.
Abstract should be concise, stand alone summary of the
paper, covering the following topic:

• Background/motivation/context
• Aim/objective/problem statement
• Approach/ method(s)/ procedure(s)/
material(s)
• Results
• Conclusion(s) / implication(s)

(Mack, 2012)
Background
• What issues led to this work? What
is the environment that makes this
work interesting or important?
Photoresist development rate can be
defined microscopically (the
development rate at a point) or
macroscopically (the propagation
rate of an average resist height). In
the presence of stochastic noise,
these two rates will be different.
Aim
What did you plan to achieve in this
work? What gap is being filled?
In order to properly calibrate
lithography simulators, the
difference between these two
definitions of develop- ment rate
should be quantified.
Approach:
• How did you set about achieving your
aims (e.g., experimental method,
simulation approach, theo- retical
approach, combinations of these, etc.)?
What did you actually do?
• Using theoretical derivations and a
stochastic (Monte Carlo) resist simulator,
the propagation rate of a resist surface is
characterized in the presence of sto-
chastic variation in the resist deprotection
concentration and a nonlinear
development rate response.
Results:
• What were the main results of the
study (including numbers, if
appropriate)?
• The resulting propagation rate can
be more than an order of magnitude
higher than for the case of no
stochastic noise. Correlation in the
development rate creates an effective
surface inhibition over a depth into
the resist of several correlation
lengths.
Conclusions:
• What were your main conclusions?
Why are the results important?
Where will they lead?
Example:
• The differences between microscopic
and macroscopic dissolution rate
can have an important effect on how
development rate models should be
calibrated, depending on their use in
continuum or stochastic lithography
simulators
The abstract for theory oriented paper
• How the theory or model works
and/or the principles on which it is
based
• What phenomena the theory or
model accounts for and linkage to
empirical results

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