V fabricated from extremely thin layers of silicon

only a few millionths of a meter thick. The

silicon layers can be shaped into levers, gears,
and other mechanical devices.
V Micromachine technology is currently used in
imaging systems and motion sensors, and is
being developed for applications in
biomedicine, computers, and
telecommunications.
V lso referred to as Microelectromechanical
systems (MEMS) - a miniaturized mechanical
device built with the materials and techniques
used to make integrated circuits for computers
V most general definition requires that at least
one dimension of a micromachined device be
in the micrometer range.
V sensitive, they can move faster
V use less energy than larger machines do
V cheaper to manufacture and can be easily made
in large quantities
V MEMS technology is currently used in devices
such as air bag sensors and certain types of
video screen systems. It is being adapted for
uses in many other fields, such as medicine,
computers, and communication.
V Micromachines are constructed by etching or chemically
dissolving patterns onto thin slices of silicon wafers.
V Computers and microscopes are used to control the
manufacturing process. MEMS construction has the same
advantages of integrated-circuit construction, such as small
size, so many can be made at once, and ease of manufacture.
V Micromachines are also easy and inexpensive to mass-
produce (although perfecting the initial design may be
expensive). Tens to thousands of identical MEMS devices,
such as mirrors, valves, and levers, can be made
simultaneously.
V Some micromachine designs take advantage of the ease of
mass production and use thousands or millions of MEMS
elements that work together to make a complete system.
V i

  
  
Most of the machines used in transportation and
telecommunication rely on the use of 6



. These
are instruments that measure acceleration forces.
ccelerometers are integrated into complex navigation
devices for aircraft, missiles, other weapon systems, and
in simple everyday devices like our cell phones and alarm
motion detectors or vehicles (airbag deployment in cars).
lthough they are already in use, micromachining aims
to make them smaller, cheaper, and even more sensitive.
The same rule applies to memories and batteries. These
enhancements will boost device performance, especially
in the demanding areas of satellite systems, ground
control systems, and aerospace technology.
V

 
MEMS used as M 
 are already in the spotlight of
development.
Their main purpose is to identify a specific chemical compound
(protein, enzyme, DN) and interact with it, within a given
chemical environment.
One of the most common techniques, involves the adsorption
of the compound molecule on the nanostructured surface of the
biosensor and the measurement of the biosignal (current, heat,
light, etc.) generated from the molecule-sensor interaction. Such
biosensors can detect pathogenic organisms and help in
cholesterol and arteriosclerosis prevention.
Bio-MEMS that are made up of biocompatible materials can be
used in the medical implant industry or serve as drug delivery
agents. The idea is to substitute any chemical interference with
our body to a mechanical one that will have the same effective
result.
V u
Micromachines and microtechnology may bring
revolutionary changes in the photovoltaic industry.
High efficiency solar modules are already being
produced, while other technologies such as
hydrogen and catalyst technology are in constant
development.
V
   
This is a least known application potential for micromachines.
Many researchers are now focusing on new approaches for
processing fibers into textile structures using MEMS
technology, such as the monitoring and measurement of warp
tension during fabric formation.
The fabrication of a micro weaving machine could also lead to
the weaving of fabrics with extraordinary properties for
spacesuits, fire suits and even everyday clothing.
On the other hand, the food industry has a lot to learn as well.
Similarly to the biomedicine section, pathogenic agents in food
could be detected and neutralized prior to mass consumption.
Processes such as the nutritional value measurement during
production are another possibility as well.
V ×   
Other applications involve the development of microsensors to
detect chemical and biological weapons and thus prevent a
possible terrorist strike.
Some researchers have also suggested the use of microtechnology
for a future nanolithography tool below the 100 nm era. Such a tool
will be able to characterize surfaces in an atomic scale, leading to
the development of atomic resolution lithography and
consequently to the printing of nanocircuits and nanochips.
nother idea involves the manufacturing of miniaturized facilities
or microfactories, to make possible the production of small systems
and enable the tailoring of their optical, mechanical, or thermal
conductive properties (mobility, flexibility, etc.).
Taking into account today's growth rate, it seems that microrobots
and nanomachines with movable microparts are still a distant
scenario.
V Micromachining demands an interdisciplinary
approach to achieve growth, and it's running
fast. It has already entered our lives and
estimates show that it will dominate the
production line and revolutionize most
industry fields within this decade. However, in
a world where technology is coupled with
commercialization and funding schemes, it is
very difficult to make accurate predictions.