Role of MEMS in

-by soujanya
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First things first, what is a Sensor ?



A device used to measure a physical quantity (such as temperature) and convert it into an electronic signal of some kind (e.g a voltage), without modifying the environment.
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What can be sensed?

Almost Everything!!!

Commonly sensed parameters are : Pressure  Temperature  Flow rate  Radiation  Chemicals  Pathogens


N W S E

2 Axis Magnetic Sensor 2 Axis Accelerometer Light Intensity Sensor Humidity Sensor Pressure Sensor Temperature Sensor
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What is MEMS ?

MEMS or Micro Electro Mechanical Systems is a technique of combining Electrical and Mechanical components together on a chip, to produce a system of miniature dimensions .. By miniature, we mean dimensions less than the thickness of human hair !!!!

The wonder called nanotechnology

   

Nanotechnology is the technology of arranging atoms and molecules in a material. This allows to alter the properties of a material and build structures of desired features. A nanometer is one-billionth of a meter. Nanotechnology makes it possible to manufacture devices 80,000 times smaller than the thickness of human hair !!

A simple analogy..


The atoms in an object can be compared to the blocks in a building game. In a building game, the blocks can be arranged to create different looking structures. Similarly, atoms can be arranged differently to produce a multitude of devices. This forms the basis of nanotechnology.
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But why MEMS for sensors?

Sensors made using MEMS are better than their conventional counterparts because they are :
    

Smaller in size Have lower power consumption More sensitive to input variations Cheaper due to mass production Less invasive than larger devices

So good things do come in small packages !!!!

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Comparison between conventional and MEMS based sensor

Mass Size Power Cost Conventional 1587.5 gm 15x8x5 cm 35 W $20,000 MEMS based 10 gm 2x2x0.5 cm ~1mW $500

Faster, Smaller, Numerous..

 

From the figure we can see the revolution of MEMS The cost of the chip will be less than a dollar when mass production is done.

Streaming Data to/from the Physical World

log (people per computer)

year 9

Projected MEMS Market Share 2010

Consumer 3% Industrial 22%

Medical 11%

Automotive 17%

Communictions 21%

Computer 26%

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Types of Sensors
Mechanical Sensors  Optical Sensors  Thermal Sensors  Chemical and Biological Sensors


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Mechanical Micro sensors

Services Networking TinyOS

Strain Gauges  Accelerometers  Gyroscopes (Rotation rate)  Pressure Sensors  Microphones  Tactile Sensors (sensory feedback)  Biological Sensors (cochlear implants)

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Accelerometers :


Used in deploying airbags, navigation, activity detection for pacemakers.

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Scrolling  Compensated compass  Gaming  Wireless pedometer  Image stabilization  Freefall detection  Health monitoring  Activity monitoring  Alarms  Vibration monitoring

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Temperature Navigation Weather forecast Context awareness Fluid level measurement

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Sensors in automobiles

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Sight for the blind

MEMS based array that may be inserted in the retina of a blind person to provide partial sight

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Chem Bio Sensors



Electronic nose can sense a large number of gases

Electronic tongue can sense a variety of liquids

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Chemical lab on a chip

Used to detect chemicals in gas, liquids and DNA

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Medical and homeland security applications

   

Biocavity laser Decontamination foam Smart pill Sensors for missile systems
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Parameters monitored in marine science

Temperature, pressure, light transmission, tidal and current velocity Dissolved gases (like oxygen), pH, metals, pesticides

Plant pigments (chlorophyll), plankton cells

Seabed characteristics, Seismic signal

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Where are these MEMS devices attached ?

The MEMS devices, in marine sensing maybe attached to:  Ships  Floating devices (buoys) in the sea  Fixed sea structures (like oil rigs)  Sea bed using links  AUVs

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AUV ( Autonomous underwater vehicle )



AUVs are unmanned underwater vehicles for real time monitoring in the oceans. AUVs can be equipped with Lab on a Chip, a set of sensors developed on a single chip, using MEMS. These Lab on a Chip devices can sense a large number of chemical pollutants simultaneously.

AUV

Lab on a Chip

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Hydrophones

))))

Just as microphones collect sounds in air, hydrophones are small devices that detect sounds in water. The sources of sounds in water maybe ships, earthquakes, waves or marine animals.
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Digital mammal tags



 

These are tiny devices attached to animals like whales, sharks, dolphins etc.. Provides vital data about the animal and its surroundings A tag houses Pressure sensor(s) Temperature sensor(s) Hydrophone (sound sensor) Radio transmitter for data collection at remote locations.
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MEMS in military operations



An array of MEMS sensors spread on the ocean floor could detect the presence of enemy submarines. MEMS sensors (pressure sensors, accelerometers etc.) are being used in anti-torpedo weapons on submarines and ships. MEMS sensors in torpedoes are responsible for Detonating the torpedo at the right time Hitting the target in a crowded environment Prevent any premature explosion

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CONCLUSION
 

MEMS promises to be an effective technique of producing sensors of high quality, at lower costs. Thus we can conclude that the MEMS can create a proactive computing world, connected computing nodes automatically, acquire and act on real-time data about a physical environment, helping to improve lives, promoting a better understanding of the world and enabling people to become more productive.

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QUERIES..

Thank u
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