A paper presentation on Micro electromechanical systems

Micro electromechanical systems

MEMS is the integration of mechanical elements, sensors, actuators, and electronics onto a common silicon base through the use of micro fabrication technology. This technology has expanded from the conventional two-dimensional design of chips to three-dimensional structures.

Components of MEMS

Components of MEMS
Micro electronics:

It receives data, processes it, and makes decisions. The data received comes from the micro sensors in the MEMS

Micro sensors:

These constantly gather data from the surrounding environment and pass this information on to the microelectronics for processing. These sensors can monitor mechanical, thermal, biological, chemical, optical and magnetic readings from the surrounding environment.

Micro actuators:

A micro actuator acts as a switch or a trigger to activate an external device. The actuators respond according to the decision taken by micro electronics.

Micro structures:

Due to the increase in technology for micro machining, extremely small structures can be built onto the surface of a chip. These tiny structures are called micro structures and are actually built right into the silicon of the MEMS .

Major steps involved in IC fabrication:

Preparation of silicon substrate. Deposition of silicon dioxide layer. Photolithographic process. Fabrication of thin film components. Packaging.

Fabrication of MEMS
The major methods are:
Surface micro machining LIGA

Surface micro machining

It is based on deposition and etching of different structural layers.

A substrate is chosen and layers are grown on the top of the substrate. Sacrificial layers are selectively etched by photolithography involving wet etching or dry etching processes.

LIGA

LIGA is an acronym for the German words lithography, electroforming and molding electroforming is the process of creating 3dimensional metal parts by using a carefully controlled long duration electroplating process Can withstand high temperatures and pressures

Advantages

Miniaturization Portability High accuracy, precision and reliability systems integration on a single chip. Reduced manufacturing cost and time Improved performance and fast response time Low power consumption Easily maintained and replaced

Applications
Communications Bio technology Consumer market Industrial Market Military Inertial sensors

Challenges
Experts and professionals are few in number. High initial investment Packaging becomes difficult as some devices have to be in contact with their environment.

Conclusion
MEMS is an emerging technology which will rapidly revolutionize all the fields in the near future.

Thank you
S. Santhosh Kumar & V. Sandhya