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90-nm
Intel is charging into the nanoscale era with its new 90-nm manufacturing process. In this scale, the transistors will have gate lengths of only 50 nm. The silicon dioxide insulation, barely visible beneath the gate, is only about 5 atomic layers thick.
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Intel will take products to 32nm and beyond. Intel is looking at a variety of technologies including high-k/metal gate, 3-D transistors, and III-V materials, even carbon nanotubes, and semiconductor nanowires as highmobility materials for future high-speed and low-power transistor applications and future interconnect applications (SoC, NoC).
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To address the leakage problems that come with shrinking transistors, Intel has identified a new high-k material, to replace the transistor's silicon dioxide gate dielectric, and new metals to replace the polysilicon gate electrode of NMOS and PMOS transistors. These new materials, along with the right process recipe, reduce gate leakage to less than 4% of what it was for the previous process generation, while delivering record transistor performance.
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Intel is investigating 3-D transistors that have a gate that controls the flow of current from 3 sides.
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The presence of transistors T5 and T8 is what differentiates this gate from other DCVS logic gates.
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SPICE simulations show that internal node voltage swings for DCSL are of the order of 1 V with a supply voltage of 5 V. A completion signal may be generated by taking a NAND of the two outputs (precharged high). The power advantage is primarily because of the very low internal voltage swings.
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Gate operation starts with CLK high, T9 on and nodes Q and Q equalized. Hence Q and Q discharges to a voltage that is Vtn or lower, through transistors T6 and T7.
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SSDL (sample set differential logic) CVSL (cascade voltage switch logic)
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I1 PN Reverse-Bias Current I2 Weak Inversion I3 Drain-Induced Barrier-Lowering Effect I4 Gate-Induced Drain Leakage I5 Punchthrough I6 Narrow-Width Effect I7 Gate Oxide Tunneling I8 Hot-Carrier Injection
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VDD
5 5
Tox()
200 150
VT
Leff
0.80
0.60
0.55
0.6
0.35 0.25 0.18
3.3
2.5 1.8 1.6
80
60 45 30
0.58
0.47 0.43 0.40
0.35
0.25 0.15 0.10
0.15
8.9 24 86
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Punchthrough
Punchthrough occurs when the drain and source depletion region approach each other and electrically touch deep in the channel. Punchthrough is regarded as a subsurface version of DIBL.
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max
Diff(%) HSPCIE GA 0.492 2.220 3.049 Diff(%)
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b1 long channel
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In order to make the device work properly, dVth/dL cannot be too large. This will determine the minimum channel length Lmin.
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The small SCE of this transistor is because of the smaller depletion depth and junction depth.
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The effective junction depth and the depletion width are reduced to half of that of a bulk MOSFET.
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When the leakage current is higher than a certain value, the Self-Sub-Bias will be triggered and will reduce the substrate bias of all the other nMOSFETs, which in turn will increase the threshold voltage and reduce the leakage current.
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MTCMOS Multithreshold CMOS uses both high- and lowthreshold voltage MOSFETs in a single chip and a sleep control scheme is introduced for efficient power management.
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Because of the body effect, the threshold voltage of MOSFETs can be changed dynamically during the different mode of operation. In the active mode, the circuit switches from low to high with a higher speed because of the low-Vth PMOS. In the standby mode, the static leakage current is decided by the subthreshold current of the high-Vth nMOS and is smaller. The supply voltage of DTMOS is limited by the diode built-in potential. The pn-junction diode between source and body should not be forward biased. So this technique is only suitable for ultra-low-voltage (0.6-V and below) circuits. 54
DGDT SOI MOSFETs combine the advantages of DTMOSs and Fully depleted (FD) SOI MOSFETs without the limitation of the supply voltage.
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The back-gate oxide of DGDT SOI MOSFETs is thick enough to make the threshold voltage of the back gate larger than the supply voltage. The front gate is a conducting gate while the back gate acts as a controlling gate for the front gate.
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The thinner the silicon layer thickness, the smaller is the threshold voltage. Thinning tob can improve the controllability of the back gate to the front gate, which increases the threshold voltage variation range.
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Comparison of Ion/Ioff for different FD SOI MOSFETs and DGDT SOI MOSFETs
Vth
FDSOI NMOS 0.35
-0.13
-0.36
-5.54
-3.46
-6800
-0.735
0.0008
4.7
0.13-0.35 -0.13-0.36
10.02 -5.55
1.33 -0.735
7.53 7.55
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The sleep control scheme is achieved by a modified DTMOS. The body of high Vth is connected to the gates through a reverse-biased MOS Diode (MD)
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In sleep mode (VGS = 0V), the drain-current of the variable high-Vth MOSFET equals that of the conventional MOSFET because the body voltage is equal to the source voltage of 0V. In active mode (VGS < 0V), the drain-current of the variable high-Vth MOSFET increases because the threshold voltage is reduced due to the bodyvoltage reduction. At the supply voltage of 0.5V, the variable highVth MOSFET increases the drain conductance to about three times that of the conventional 64 MOSFET.
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Ioff(pA/m) 20
Lgate m Vt 0.16 0.42
1.60
0.16 0.63 22
0.15
0.18 0.73 14
300
0.13 0.40 43
1,800
0.11 0.29 52
13,000
0.08 0.25 80
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FET (GHz) 30
Reduce glitching Reduce short circuit currents (slope engineering) Reduce leakage currents
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