Professional Documents
Culture Documents
Guide-PROF.S.CHAKKA
Surface Contact
Surface Roughness Interfacial Forces Adhesion Friction
Wear
Models Environmental Effects
Surfaces
asperities
Interfacial Forces
Capillary Forces Electrostatic Forces Van der Waals Forces
Adhesion
Friction
Surface Contact
Wear
Wear Mechanisms
Adhesive
Low contact pressures Augmented asperities
Abrasive
High contact pressures Wear tracks
Humidity
Volume of wear debris Morphology of wear debris
Diamond Coatings
Diamond has a variety of useful properties compared to Silicon Low wear, low coefficient of friction, thermally stable, isotropic hardness Diamond cannot be simply made into smaller and smaller flakes, then deposited on MEMS devices Diamond (or diamond-like) film must be grown on surface.
Conventional CVD
Tribological properties better than silicon are achieved, but its not an ideal solution:
Low uniformity Non-constant density Amount of impurities and crystal growth suffers if dissociation is incomplete.
If coating isnt uniform, predicting failure is difficult and surface finish suffers.
UNCD
ULTRANANOCRYSTALLINE DIAMOND
A better method for producing diamond-like films. Grain size is 2-5nm. Unlike conventional diamond film CVD, C60 is introduced into the reaction along with CH4.
C60 collides with itself, creating C2 (carbon dimers) These C2 molecules enter the diamond lattice. An abundance of C2 is the goal of the UNCD creation process.
Properties more like natural diamond Method allows for uniform coating Very little residual stress.
Demonstration
Coating Uniformity
Deposition O Si OH Si OH OH OH Si Si Si O O O O Si Si O Si O Si O Si O Si O Si
Beam Structures
Results
Apparatus
Proof Mass
FDTS Covered
Post
Results
Proof Mass
Tests materials at the nanoscale Cantilever tips are silicon nitride Results
Conclusion
Friction and Wear are the biggest issues in blocking advances of MEMS technology Once SAMS and Diamond Coatings are more fully developed, MEMS technology will be able to more completely realize its potential.
Reference
www.falexint.com www.wikipedia.org lqme.sjtu.edu.cn www.tribology-abc.com Design of machine elements- V.B BHANDARI Fundamentals of Tribology-Basu, Sengupta, Ahuja
THANK YOU